CN111621740A

CN111621740A - Transmission device, transmission method and net-opening device

Info

Publication number: CN111621740A
Application number: CN201910152945.8A
Authority: CN
Inventors: 吴福龙; 黄元昊
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2019-02-28
Filing date: 2019-02-28
Publication date: 2020-09-04
Anticipated expiration: 2039-02-28
Also published as: CN111621740B

Abstract

The invention provides a transmission device, a transmission method and a net tensioning device. Wherein the transmission device is used for conveying the mask plate, and the mask plate is loaded in the tray. The transmission device comprises a version library unit, a transmission unit, a detection unit and a pre-compensation unit. The plate library unit is used for providing a tray, the transmission unit is used for taking the tray out of the plate library unit and transmitting a mask plate in the tray to the pre-compensation unit, the detection unit is used for detecting and acquiring the offset of the mask plate in the Rz direction, and the pre-compensation unit is used for adjusting the position of the mask plate according to the offset of the mask plate in the Rz direction so as to compensate the offset of the mask plate in the Rz direction. The transmission device, the transmission method and the net tensioning device can compensate the offset of the mask plate in the Rz direction, improve the position accuracy of the mask plate in the Rz direction and improve the net tensioning precision.

Description

Transmission device, transmission method and net-opening device

Technical Field

The invention relates to the technical field of display, in particular to a transmission device, a transmission method and a net-opening device.

Background

The net-stretching equipment is the key equipment of an evaporation production line of OLED small-molecule organic materials. The device is responsible for fixing a high-precision evaporation screen printing plate (mask plate) on a screen frame, so that the image position of the screen printing plate is correct, and the screen printing plate is not deformed or distorted in the subsequent working process. In the OLED evaporation process, the mask plate plays a role of a template and is used for evaporating the pattern on the mask plate on the surface of the glass substrate.

In the net-stretching equipment, a transmission device is responsible for transmitting the mask plate to a clamping jaw joint position of the net-stretching equipment, and the clamping jaw transmits the mask plate to a workpiece table. The mask plate is made of Invar, the length of the Invar is 1200mm, the width of the Invar is 20-400 mm, and the thickness of the Invar is 5-50 um.

However, most of the conventional reticles have a problem of poor screen expanding precision.

Disclosure of Invention

The invention aims to provide a transmission device, a transmission method and a screen stretching device, which aim to solve the problem of poor screen stretching precision of a mask.

In order to solve the technical problem, the invention provides a transmission device for conveying a mask, wherein the mask is loaded in a tray, the transmission device comprises a plate library unit, a transmission unit, a detection unit and a pre-compensation unit, the plate library unit is used for providing the tray, the transmission unit is used for taking out the tray from the plate library unit and transmitting the mask in the tray to the pre-compensation unit, the detection unit is used for detecting and obtaining the offset of the mask in the Rz direction, and the pre-compensation unit is used for adjusting the position of the mask according to the offset of the mask in the Rz direction so as to compensate the offset of the mask in the Rz direction.

Optionally, the pre-compensation unit includes: a support frame; the rotating assembly is arranged on the supporting frame and is in rotating connection with the supporting frame; the mask plate supporting plate is fixedly arranged on the rotating assembly and used for bearing a mask plate; a support plate driving unit fixedly provided on the support frame; and the controller is used for controlling the supporting plate driving unit to drive the supporting plate of the mask plate to rotate according to the offset of the mask plate in the Rz direction so as to adjust the position of the mask plate to compensate the offset of the mask plate in the Rz direction.

Optionally, the pre-compensation unit further includes a measuring device, the measuring device is disposed on the support frame, the measuring device is configured to measure a displacement of the support plate driving unit and feed back the displacement to the controller, and the controller controls the support plate driving unit to move in real time according to the detected offset of the mask in the Rz direction and the displacement measured by the measuring device.

Optionally, the supporting plate driving unit includes a driver body and an output end, the driver body is fixedly connected to the supporting frame, the output end is fixedly connected to the mask plate supporting plate, the supporting plate driving unit is a linear driver, and the output end is used for driving the mask plate supporting plate to rotate.

Optionally, the transmission device is configured to transmit the mask to a workpiece stage in a screening device, and the detection unit is a measurement system in the screening device.

Optionally, the transmission unit includes a plate taking device and a plate taking device, the plate taking device is configured to take the tray out of the plate library unit, and the plate taking device is configured to take the mask plate out of the tray and transmit the mask plate to the pre-compensation unit.

Optionally, the disc taking device comprises a first base, a first sliding table and a disc taking fork, the first sliding table is arranged on the first base, the disc taking fork is arranged on the first sliding table, the disc taking fork is used for placing a tray, and the first sliding table is used for driving the disc taking fork to move.

Optionally, get the version device and include second base, second slip table and get the version fork, the second slip table sets up on the second base, it sets up to get the version fork on the second slip table, it is used for absorbing the mask version to get the version fork, the second slip table is used for the drive it removes to get the version fork.

Optionally, get version fork including getting version fork body and at least one sucking disc subassembly, get version fork body with second slip table fixed connection, the sucking disc subassembly sets up it is used for absorbing the mask version to get on the version fork body.

Optionally, the sucking disc subassembly includes sucking disc driver, sucking disc slip table, suction nozzle support piece and at least one suction nozzle, the suction nozzle sets up on the suction nozzle support piece, suction nozzle support piece sets up on the sucking disc slip table, the sucking disc slip table with the sucking disc driver sets up get on the version edition of books fork body, the sucking disc driver is used for the drive the sucking disc slip table is in get on the edition of books fork body and remove in order to drive the suction nozzle along predetermined direction.

Optionally, the version storehouse unit includes version storehouse support, version storehouse body, version storehouse drive arrangement and at least one locking device that targets in place, the version storehouse body is used for storing at least one tray, the version storehouse support is used for supporting the version storehouse body, the setting of version storehouse drive arrangement is in on the version storehouse support, the drive of version storehouse drive arrangement is used for the drive the version storehouse body is relative the removal of version storehouse support along the predetermined direction, the locking device that targets in place is used for the restriction the relative version storehouse body the removal of version storehouse support.

The invention also provides a transmission method, which comprises the following steps: the plate library unit provides a tray, and the tray is used for loading the mask plates; taking the tray out of the plate library unit, and transmitting the mask plates in the tray to a pre-compensation unit; detecting and obtaining the offset of the mask in the Rz direction; and adjusting the position of the mask plate according to the offset of the mask plate in the Rz direction so as to compensate the offset of the mask plate in the Rz direction.

The invention also provides a net-stretching device, which comprises a workpiece table and the transmission device, wherein the transmission device is used for transmitting the mask plate to the workpiece table.

The transmission device, the transmission method and the net tensioning device provided by the invention have the following beneficial effects:

the detection unit can detect the offset of the mask plate transmitted from the mask plate library unit to the pre-compensation unit through the transmission unit in the Rz direction, and the pre-compensation unit adjusts the position of the mask plate according to the offset of the mask plate in the Rz direction so as to compensate the offset of the mask plate in the Rz direction, so that the position accuracy of the mask plate in the Rz direction can be improved, and the mesh tensioning precision is improved.

Drawings

FIG. 1 is an exploded view of a transport apparatus in one embodiment of the invention;

FIG. 2 is a schematic diagram of a structure of a library body according to an embodiment of the present invention;

FIG. 3 is a schematic view of the structure of the alignment pins of the first pallet in one embodiment of the present invention;

FIG. 4 is a schematic diagram of a support for a library in accordance with an embodiment of the present invention;

FIG. 5 is a schematic view of the in-place locking mechanism in one embodiment of the present invention;

FIG. 6 is a schematic diagram of a pallet fork according to an embodiment of the present invention;

FIG. 7 is a schematic diagram of a partial structure of a pallet fork according to an embodiment of the present invention;

FIG. 8 is a schematic structural diagram of a tray taking slide table according to an embodiment of the present invention;

FIG. 9 is a schematic diagram of a plate pick in one embodiment of the present invention;

FIG. 10 is a schematic view of the structure of the chuck assembly in one embodiment of the present invention;

FIG. 11 is a schematic structural diagram of a pre-compensation unit according to an embodiment of the present invention;

fig. 12 is a flow chart of the operation of the transmission apparatus in one embodiment of the present invention.

Description of reference numerals:

100-a tray; 200-mask plate;

300-version library unit;

310-version library ontology; 311-version library framework; 312-a tray support assembly; 313-first pallet locator pins; 314-first tray presence sensor;

320-a version library holder; 321-a drive frame; 322-version library base; 323-first library body frame; 324-a second version of library body framework; 325 — a first sliding table; 326 — second slip table;

330-version library driving device; 331-a drive motor; 332-a first reduction gearbox; 333-first lead screw;

340-in-place locking device; 341-limit driver; 342-a limit slider; 343-a limit pin;

400-a transmission unit;

410-a disk-fetching device; 412-disk pickup slide; 413-disc taking fork; 414-disc taking plate fork body; 416-second tray alignment pins; 417-second tray presence sensor;

420-plate taking device; 423-plate taking fork; 424-plate taking fork body; 425-a suction cup assembly; 427-sucker sliding table; 428-nozzle support; 429-a suction nozzle;

500-a detection unit;

600-a pre-compensation unit; 610-a support frame; 620-rotating assembly; 630-reticle support plate; 640-a support plate drive unit; 6410-a stator; 6420-mover; 650-measuring means.

Detailed Description

As described in the background art, most of the existing mask plates have the problem of poor reticle precision, and after research by the applicant, the reason for poor reticle precision is mainly because a workpiece table of a reticle device does not have a function of Rz compensation on the mask plates, that is, when the position of the mask plates in the Rz direction has a deviation, the workpiece table cannot adjust the position of the mask plates to compensate the deviation of the mask plates in the Rz direction. The applicant also found that if Rz compensation of the mask plate is realized by the movement of the workpiece table in the screen device, the cost for controlling the workpiece table to rotate to perform Rz compensation on the mask plate is high due to the large mass of the workpiece table, and the compensation effect is limited due to the low control precision.

Based on this, the application provides a transmission device, which is used for carrying out Rz compensation on the mask plate before the mask plate is transmitted to the screen stretching equipment so as to improve the screen stretching precision. Meanwhile, compared with a mode of realizing Rz compensation of the mask plate through the movement of a workpiece table in the screen expanding equipment, the method can reduce the cost and has good compensation effect.

Correspondingly, the application also provides a transmission method adopting the transmission device, and a net opening device comprising the transmission device.

The transmission device, the transmission method and the mesh opening device according to the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

The present embodiments provide a transport apparatus for transporting reticles that are loaded in a pallet. Referring to fig. 1, fig. 1 is an exploded schematic view of a transfer apparatus in an embodiment of the present invention, the transfer apparatus including a plate library unit 300, a transfer unit 400, a detection unit 500, and a pre-compensation unit 600.

The library unit 300 is used to provide the tray 100. Referring to fig. 1, the library unit 300 includes a library support 320, a library body 310, a library driving device 330, and at least one in-place locking device.

The library body 310 is used for storing at least one tray 100. Referring to fig. 2, fig. 2 is a schematic structural diagram of a library body 310 according to an embodiment of the present invention, the library body 310 includes a library frame 311 and at least one tray supporting assembly 312 disposed in the library frame 311, and a plurality of tray supporting assemblies 312 are sequentially disposed along a first predetermined direction. As shown in fig. 2, the first predetermined direction is parallel to the Z-axis. Each of the tray support assemblies 312 is configured to support one tray 100. A plurality of compartments for storing a plurality of trays 100 are formed within the magazine frame 311 by a plurality of tray support assemblies 312, the tray support assemblies 312 on each compartment being for supporting one tray 100.

Specifically, referring to fig. 2 and 3, fig. 3 is a schematic structural diagram of a first tray positioning pin according to an embodiment of the present invention, and the tray support assembly 312 includes at least one first tray positioning pin 313, and the first tray positioning pin 313 is used for limiting the movement of the tray 100 on the tray support assembly 312. For example, the tray supporting assembly 312 includes four tray supporting frames, and each of the tray supporting frames is provided with a first tray positioning pin 313.

The library body 310 further comprises at least one first tray presence sensor 314, wherein the first tray presence sensor 314 is configured to detect whether the tray 100 is disposed on the tray support assembly 312. The number of the first tray presence sensors 314 preferably corresponds to the number of the tray support members 312.

The library body 310 further includes at least one tray presence indicator light for indicating whether a tray 100 is provided on the tray support assembly 312. The number of tray presence indicator lights preferably corresponds to the number of tray support assemblies 312.

The library holder 320 is used to support the library body 310.

Specifically, referring to fig. 1 and 4, fig. 4 is a schematic structural diagram of a plate library support in an embodiment of the present invention, where the plate library support 320 includes a driving frame 321 and a sliding table assembly. The slide table assembly is provided on the drive frame 321, the slide table assembly being configured to support the library body 310, the slide table assembly being movable in a second predetermined direction with respect to the drive frame 321.

The slide table assembly in this embodiment is movable relative to the drive frame 321 in a direction parallel to the Z-axis.

Specifically, the slide table assembly includes a first slide table 325 and a second slide table 326, the first slide table 325 and the second slide table 326 are used for supporting the plate library body 310, and the first slide table 325 and the second slide table 326 can synchronously move along the Z direction relative to the driving frame 321.

Specifically, the driving frame 321 includes a library base 322, a first library main body frame 323, and a second library main body frame 324. The first and second library main body frames 323 and 324 are provided on the library base 322. The first sliding table 325 is disposed on the first library main body frame 323, the second sliding table 326 is disposed on the second library main body frame 324, the first sliding table 325 can synchronously move along the Z direction relative to the first library main body frame 323, and the second sliding table 326 can synchronously move along the Z direction relative to the second library main body frame 324.

The library driving device 330 is disposed on the library holder 320. The plate library driving device 330 is used for driving the plate library body 310 to move along the forward direction or the reverse direction of the second preset direction relative to the plate library support 320.

As shown in fig. 4, the plate library driving device 330 includes a driving motor 331, a first reduction box 332, a first lead screw 333, a second reduction box, a third reduction box, a second lead screw, and a third lead screw. The driving motor 331, the first reduction gearbox 332, the first lead screw 333, the second reduction gearbox and the third reduction gearbox are arranged on the plate library base 322, and the second lead screw and the third lead screw are respectively arranged on the first plate library main body frame 323 and the second plate library main body frame 324. The driving motor 331 is configured to drive the first lead screw 333 to rotate through the first reduction gearbox 332, the first lead screw 333 is configured to drive the second lead screw and the third lead screw to synchronously rotate through the second reduction gearbox and the third reduction gearbox, and the second lead screw and the third lead screw are configured to drive the first sliding table 325 and the second sliding table 326 to synchronously move along the Z direction.

The in-place locking device 340 is used to limit the movement of the library body 310 relative to the library holder 320.

Specifically, referring to fig. 5, fig. 5 is a schematic structural diagram of an in-place locking device 340 according to an embodiment of the present invention, where the in-place locking device 340 includes a limit driver 341, a limit slider 342, a limit pin 343, and a limit hole matching with the limit pin 343.

The limiting hole is formed in the plate library body 310 (the plate library frame 311), the limiting driver 341 is arranged on the plate library support 320, the limiting slider 342 is arranged on the plate library support 320, the limiting pin 343 is fixedly connected with the limiting slider 342, and the limiting driver 341 is used for driving the limiting slider 342 to move on the plate library support 320 (the driving frame 321) so as to drive the limiting pin 343 and the limiting hole to be matched with each other or separated from each other. When the limiting pin 343 is engaged with the limiting hole, the limiting pin 343 may limit the movement of the plate library body 310 relative to the plate library holder 320, and when the limiting pin 343 is disengaged from the limiting hole, the plate library driving device 330 may drive the plate library body 310 to move in a second predetermined direction relative to the plate library holder 320.

The position limiting driver 341 may be an air cylinder.

In this embodiment, in the working process of the library unit 300, the library body 310 is firstly placed on the library holder 320, and then the library driving device 330 can drive the library body 310 to move along the second predetermined direction relative to the library holder 320, that is, the library driving device 330 can adjust the relative positions of the library body 310 and the library holder 320, so that the tray 100 in the library body 310 can be located at different positions. When the plate library body 310 reaches a certain preset position, the in-place locking device 340 can limit the mutual movement between the plate library body 310 and the plate library bracket 320, so as to prevent the abnormal movement of the plate library driving device 330 from causing the deviation of the position of the plate library body 310 from the preset position, and cause the deviation of the position of the tray 100 from the preset position, thereby influencing the plate library unit 300 to provide the mask plate 200, even seriously causing the interference between the plate library body 310 and the transmission unit 400 to cause the damage of the transmission unit 400, the tray 100 or the mask plate 200, therefore, the safety of the butt joint of the plate library unit 300 and the transmission unit 400 can be improved by arranging the in-place locking device 340.

In practical applications, the transport unit 400 usually takes away the trays 100 in the library unit 300 at the tray taking station, and therefore, the trays 100 in the library unit 300 are required to be sequentially present at the station, and the library driving device 330 drives the library body 310 to move cumulatively one segment along one of the forward direction and the reverse direction of the second predetermined direction relative to the library support 320, so that the plurality of trays 100 in the library body 310 are sequentially located at the station, that is, the trays 100 in the library body 310 are sequentially present at the station. The library driving device 330 drives the library body 310 to move relative to the library holder 320 in a section of cumulative movement along one of the forward direction and the reverse direction of the second predetermined direction, and the displacement of each section of movement needs to be adapted to the space between the plurality of trays 100 in the library body 310.

In practical applications, the first predetermined direction and the second predetermined direction are both parallel to the Z-axis direction.

The transmission unit 400 is used for taking the pallet 100 out of the plate library unit 300 and transmitting the reticles 200 in the pallet 100 to the pre-compensation unit 600. The transmission unit 400 comprises a plate taking device 410 and a plate taking device 420, wherein the plate taking device 410 is used for taking the tray 100 out of the plate library unit 300, and the plate taking device 420 is used for taking the mask plate 200 out of the tray 100 and transmitting the mask plate 200 to the pre-compensation unit 600.

Specifically, the disk taking device 410 includes a first base, a disk taking sliding table 412, and a disk taking plate fork 413. Get set slip table 412 and set up on the first base, it is in to get set version fork 413 the setting get set slip table 412 on, it is used for placing tray 100 to get set version fork 413, it is used for the drive to get set slip table 412 get set version fork 413 and remove.

Referring to fig. 6 and 7, fig. 6 is a schematic structural diagram of a pallet taking fork 413 in an embodiment of the present invention, and fig. 7 is a schematic partial structural diagram of the pallet taking fork 413 in an embodiment of the present invention, where the pallet taking fork 413 includes a pallet taking fork body 414 and at least one second pallet positioning pin 416. The disc taking fork body 414 is fixedly connected with the disc taking sliding table 412, the second tray positioning pin 416 is arranged on the disc taking fork body 414, and the second tray positioning pin 416 is used for limiting the tray 100 to move on the disc taking fork body 414.

In this embodiment, as shown in fig. 6, the number of the second tray positioning pins 416 is four, and the pallet fork body 414 is used to support the tray 100.

The pick plate fork 413 further includes a second tray presence sensor 417. The second pallet presence sensor 417 is configured to measure whether the pallet 100 is on the pallet taking fork body 414, so as to prevent the pallet 100 or the reticle 200 from being damaged due to misoperation of the pallet taking fork 413.

The disk taking fork 413 further comprises a tray bar code scanner for identifying an identifier on the tray 100 to confirm information of the tray 100 and the mask 200 carried in the tray 100.

The disk taking plate fork 413 further comprises a leveling component and a plate fork locking component. The leveling component is used for adjusting the levelness of the disc taking plate fork body 414. The plate fork locking assembly is used for fixing the plate fork body 414 on the plate sliding table 412.

In this embodiment, referring to fig. 8, fig. 8 is a schematic structural diagram of a tray taking sliding table 412 in an embodiment of the present invention, where the tray taking sliding table 412 is movable in three XYZ directions.

During operation, get a set slip table 412 earlier get a set version fork body 414 and remove to getting a set station, make get a set version fork body 414 and remove to the tray 100 below that corresponds, and with tray 100 aligns, promote again and get a set version fork body 414 and make second tray locating pin 416 and tray 100 mutually support, later further promote again and get a set version fork body 414 and make tray 100 and the first tray locating pin 313 phase separation in the version storehouse body 310, then will get a set version fork body 414 and take out from version storehouse unit 300, thereby follow tray 100 take out in the version storehouse unit 300, later transmit tray 100 to getting the membrane station.

Specifically, get version device 420 and include the second base, get version slip table and get version fork 423. Get the version slip table setting and be in on the second base, it sets up to get version fork 423 get on the version slip table, it is used for absorbing mask version 200 to get version fork 423, it is used for the drive to get the version fork 423 and remove to get the version slip table.

In this embodiment, the plate taking device 420 is disposed above the plate taking device 410, and the second base is fixed to the first base.

Referring to fig. 9, fig. 9 is a schematic structural diagram of a plate taking fork 423 according to an embodiment of the present invention, where the plate taking fork 423 includes a plate taking fork body 424 and at least one suction cup assembly 425, and the plate taking fork body 424 is fixedly connected to the plate taking sliding table. The sucker assembly 425 is arranged on the plate taking fork body 424 and is used for sucking the mask plate 200.

Referring to fig. 10, fig. 10 is a schematic structural diagram of a chuck assembly 425 according to an embodiment of the present invention, where the chuck assembly 425 includes a chuck driver, a chuck sliding table 427, a nozzle support 428, and at least one nozzle 429, the nozzle 429 is disposed on the nozzle support 428, the nozzle support 428 is disposed on the chuck sliding table 427, the chuck sliding table 427 and the chuck driver are disposed on the plate taking fork body 424, and the chuck driver is configured to drive the chuck sliding table 427 to move on the plate taking fork body 424 to drive the nozzle 429 to move along a third predetermined direction. In this embodiment, the third predetermined direction is a direction parallel to the Z axis, and the suction cup driver is an air cylinder.

Since the number of the suction nozzles 429 is multiple, different numbers and positions of the suction nozzles 429 can be adopted to suck masks 200 with different sizes, so that the chuck assembly 425 is suitable for masks 200 with different sizes, and the universality of the chuck assembly 425 is improved. In addition, compared with a magnetic adsorption head, the suction nozzle 429 can prevent the mask plate 200 from being magnetized, and the magnetized mask plate 200 is not good in quality after being screened, so that the problem that the screen quality is influenced by the fact that the mask plate 200 is magnetized can be solved compared with the mode that the magnetic adsorption head is adopted.

The suction cup assembly 425 further comprises a guide rail disposed on the cliche-taking fork body 424, the guide rail cooperating with the suction nozzle support 428 for guiding the suction nozzle support 428.

As shown in fig. 9, the number of the plate taking forks 423 is two, and the two plate taking forks 423 are symmetrically arranged at two ends of the plate taking fork body 424. The nozzle support member 428 has a long shape, and the plurality of nozzles 429 are linearly arranged.

The plate taking sliding table can move along a fourth preset direction, and the fourth preset direction can be a direction parallel to the Y axis.

During operation, get the version slip table earlier get version fork body 424 and move to getting the membrane station, make get version fork body 424 and move to tray 100 top, rethread sucking disc driver drive sucking disc slip table 427 descends in order to drive suction nozzle support piece 428 and suction nozzle 429 descend, wait that suction nozzle 429 absorbs mask version 200 after, rise in order to drive suction nozzle support piece 428 and suction nozzle 429 through sucking disc driver drive sucking disc slip table 427, later will get version fork body 424 through getting the version slip table and shift out and get the membrane station to carry mask version 200 to precompensation unit 600.

The detection unit 500 is used for detecting and acquiring the offset of the reticle 200 in the Rz direction. The detection unit 500 is preferably a measurement system in a screening device, so that the structure of the transmission device can be simplified and the cost can be reduced while the offset of the mask 200 in the Rz direction can be accurately detected and acquired. In other embodiments, the detection unit 500 may also be a separately provided device for detecting and acquiring an offset of the reticle 200 in the Rz direction, or other equipment that can be used for detecting and acquiring an offset of the reticle 200 in the Rz direction.

The pre-compensation unit 600 is configured to adjust a position of the reticle 200 according to an offset of the reticle 200 in an Rz direction to compensate the reticle 200. Referring to fig. 11, fig. 11 is a schematic diagram of a pre-compensation unit 600 in an embodiment of the invention, where the pre-compensation unit 600 comprises a support frame 610, a rotation assembly 620, a reticle support plate 630, a support plate drive unit 640, a controller and a measurement device 650.

The rotating assembly 620 is disposed on the supporting frame 610 and is rotatably connected to the supporting frame 610. The reticle support plate 630 is fixedly disposed on the rotation assembly 620, and the reticle support plate 630 is used for carrying the reticle 200. The bearing plate driving unit 640 is fixedly provided on the support frame 610. The controller is configured to control the support plate driving unit 640 to drive the reticle support plate 630 to rotate according to the offset of the reticle 200 in the Rz direction, so as to adjust the position of the reticle 200 to compensate for the offset of the reticle 200 in the Rz direction.

Specifically, the support plate driving unit 640 includes a driver body and an output end, the driver body is fixedly connected to the support frame 610, the output end is fixedly connected to the reticle support plate 630, the support plate driving unit 640 is linearly driven, and the output end is used for driving the reticle support plate 630 to rotate.

The support plate driving unit 640 further includes a stator 6410 and a mover 6420, the stator 6410 of the support plate driving unit 640 is fixedly connected to the driver body and indirectly and fixedly connected to the support frame 610 through the driver body, the mover 6420 of the support plate driving unit 640 is connected to the reticle support plate 630, and a gap is formed between the stator 6410 of the support plate driving unit 640 and the mover 6420, so that the mover can deflect relative to the stator.

Since the mask plate support plate 630 can be directly driven to rotate by the output end of the support plate drive unit 640, the precision of the rotation of the mask plate support plate 630 driven by the support plate drive unit 640 can be improved, so that the accuracy of the mask plate support plate 630 in adjusting the offset of the mask plate 200 in the Rz direction is improved, and the quality of the screen is improved.

The movement of the rotor of the bearing plate driving unit 640 in the X direction and the movement in the Y direction are decoupled from each other. Since the offset of the reticle 200 in the Rz direction is usually small, the rotation amount required by the reticle support plate 630 is relatively small, when the mover 6420 moves, the reticle support plate 630 can be driven to rotate, and at the same time, the mover 6420 is shifted with respect to the stator, and a certain gap is provided between the stator 6410 and the mover 6420 of the support plate driving unit 640, so that the rotor can be allowed to shift with respect to the stator without interfering with each other.

Referring to fig. 11, the pre-compensation unit 600 further includes a measuring device 650, and the measuring device 650 is disposed on the support frame 610. The measuring device 650 is configured to measure a displacement of the support plate driving unit 640 and feed back the displacement to the controller, and the controller controls the support plate driving unit 640 to move in real time according to an offset of the reticle 200 in the Rz direction and the displacement measured by the measuring device 650.

Specifically, the measuring device 650 is used for measuring the displacement amount of the supporting plate driving unit 640 moving in the fifth predetermined direction. For example, the measuring device 650 is a grating ruler measuring system. Before controlling the support plate driving unit 640, the controller may convert the displacement measured by the grating ruler measurement system into a rotation amount in the Rz direction, and perform real-time compensation on the offset of the reticle 200 detected by the detection unit 500 in the Rz direction by using the converted rotation amount, so as to control the rotation of the reticle support plate 630 in a closed-loop feedback manner, so as to improve the accuracy of the offset compensation of the pre-compensation unit 600 on the reticle 200 in the Rz direction.

The operation of the transmission device in this embodiment is specifically described below. Referring to fig. 12, fig. 12 is a flowchart illustrating an operation of a transmission device according to an embodiment of the present invention, where the operation of the transmission device mainly includes the following steps:

first, the library unit 300 sequentially provides the trays 100 to the tray taking station.

Next, the in-place locking mechanism 340 in the library cell 300 restricts the mutual movement between the library body 310 and the library holder 320.

Next, the pickup device 410 picks up the tray 100 from the plate magazine unit 300, and transfers the tray 100 to the plate pickup station.

Next, the reticle handler 420 takes out the reticle 200 from the tray 100 and transfers the reticle 200 to the pre-compensation unit 600.

Next, the detection unit 500 detects and acquires an amount of shift of the reticle 200 in the Rz direction.

Again, the pre-compensation unit 600 adjusts the position of the reticle 200 according to the amount of offset of the reticle 200 in the Rz direction to compensate for the amount of offset of the reticle 200 in the Rz direction.

The embodiment also provides a transmission method. The transmission method adopts the transmission device in the above embodiment to transmit the mask 200, and the transmission method includes: providing a tray 100, wherein the tray 100 is used for loading a mask plate 200; taking the pallet 100 out of the plate library unit 300 and transmitting the reticles 200 in the pallet 100 to the pre-compensation unit 600; detecting and acquiring the offset of the mask plate 200 in the Rz direction; and adjusting the position of the mask plate 200 according to the offset of the mask plate 200 in the Rz direction so as to compensate the offset of the mask plate 200 in the Rz direction.

The embodiment also provides a net tensioning device. The net-spreading device comprises a workpiece table and the transmission device, and the transmission device is used for transmitting the mask plate 200 to the workpiece table.

In the above embodiments, the mask 200 may be made of a metal film or other materials commonly used for mask in an evaporation process.

In the above embodiment, the Z-axis direction is generally a direction perpendicular to the surface of the workpiece stage of the tenter apparatus in the tenter apparatus, i.e., a direction perpendicular to the large surface of the reticle 200 provided in the tenter apparatus, and the Rz direction is a direction of rotation around the Z-axis.

In the above embodiment, the detection unit 500 may detect the offset of the reticle 200 transmitted from the reticle library unit 300 to the pre-compensation unit 600 through the transmission unit 400 in the Rz direction, and the pre-compensation unit 600 may adjust the position of the reticle 200 according to the offset of the reticle 200 in the Rz direction to compensate the offset of the reticle 200 in the Rz direction, so as to improve the position accuracy of the reticle 200 in the Rz direction, thereby improving the mesh precision, and enabling the repeatability precision of the reticle 200 in the mesh process to reach 1 urad.

In the embodiment, the in-place locking device limits the mutual movement between the plate library body and the plate library bracket, so that the plate library unit is prevented from providing a mask plate due to the fact that the position of the plate library body deviates from the preset position thereof due to abnormal movement of the plate library driving device, and the position of the tray deviates from the preset position thereof, and even the plate library body interferes with the transmission unit seriously, so that the transmission unit, the tray or the mask plate are damaged, and therefore, the safety of butt joint of the plate library unit and the transmission unit can be improved by arranging the in-place locking device.

In the above embodiment, since the number of the suction nozzles is multiple, the suction nozzles in different numbers and different positions can be adopted to adsorb mask plates in different sizes, so that the suction cup assembly is suitable for mask plates in different sizes, and the applicability of the suction cup assembly is improved. Compared with a magnetic adsorption head, the magnetic adsorption head has the advantages that the mask can be prevented from being magnetized by the suction nozzle, and the magnetized mask is not good in quality after being screened, so that the problem that the mask is magnetized to influence the screening quality can be solved.

In the above embodiment, the detection unit may be a measurement system in a reticle device, so that the structure of the transmission device may be simplified and the cost may be reduced while the offset of the reticle in the Rz direction is accurately detected and obtained.

In the above embodiment, the mask plate supporting plate is directly driven to rotate by the output end of the supporting plate driving unit, so that the precision of the supporting plate driving unit driving the mask plate supporting plate to rotate can be improved, the accuracy of the mask plate supporting plate adjusting the offset of the mask plate in the Rz direction is improved, and the quality of the screen is improved.

The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.

Claims

1. A transmission device is used for conveying a mask, the mask is loaded in a tray, and the transmission device is characterized by comprising a mask library unit, a transmission unit, a detection unit and a pre-compensation unit, wherein the mask library unit is used for providing the tray, the transmission unit is used for taking out the tray from the mask library unit and transmitting the mask in the tray to the pre-compensation unit, the detection unit is used for detecting and obtaining the offset of the mask in the Rz direction, and the pre-compensation unit is used for adjusting the position of the mask according to the offset of the mask in the Rz direction so as to compensate the offset of the mask in the Rz direction.

2. The transmission apparatus of claim 1, wherein the pre-compensation unit comprises:

a support frame;

the rotating assembly is arranged on the supporting frame and is in rotating connection with the supporting frame;

the mask plate supporting plate is fixedly arranged on the rotating assembly and used for bearing a mask plate;

a support plate driving unit fixedly provided on the support frame;

and the controller is used for controlling the supporting plate driving unit to drive the supporting plate of the mask plate to rotate according to the offset of the mask plate in the Rz direction so as to adjust the position of the mask plate to compensate the offset of the mask plate in the Rz direction.

3. The transmission apparatus as claimed in claim 2, wherein the pre-compensation unit further comprises a measuring device disposed on the support frame, the measuring device is configured to measure a displacement of the support plate driving unit and feed the displacement back to the controller, and the controller controls the support plate driving unit to move in real time according to the detected displacement of the reticle in the Rz direction and the displacement measured by the measuring device.

4. The transmission device as claimed in claim 2, wherein the support plate driving unit comprises a driver body and an output end, the driver body is fixedly connected with the support frame, the output end is fixedly connected with the reticle support plate, the support plate driving unit is a linear driver, and the output end is used for driving the reticle support plate to rotate.

5. The transport apparatus of claim 1, wherein the transport apparatus is configured to transfer a reticle to a workpiece stage in a tenter apparatus, and the detection unit is a measurement system in the tenter apparatus.

6. The transfer device of claim 1, wherein the transfer unit comprises a pick-up device for picking up a tray from the plate library unit and a plate pick-up device for picking up a reticle from the tray and transferring the reticle to the pre-compensation unit.

7. The conveying device according to claim 6, wherein the disc taking device comprises a first base, a first sliding table and a disc taking plate fork, the first sliding table is arranged on the first base, the disc taking plate fork is arranged on the first sliding table, the disc taking plate fork is used for placing a tray, and the first sliding table is used for driving the disc taking plate fork to move.

8. The conveying device as claimed in claim 6, wherein the plate taking device comprises a second base, a second sliding table and a plate taking fork, the second sliding table is arranged on the second base, the plate taking fork is arranged on the second sliding table, the plate taking fork is used for sucking a mask, and the second sliding table is used for driving the plate taking fork to move.

9. The transmission device as claimed in claim 8, wherein the plate taking fork comprises a plate taking fork body and at least one sucker assembly, the plate taking fork body is fixedly connected with the second sliding table, and the sucker assembly is arranged on the plate taking fork body and used for sucking the mask.

10. The conveying device according to claim 9, wherein the suction cup assembly comprises a suction cup driver, a suction cup sliding table, a suction nozzle support member and at least one suction nozzle, the suction nozzle is arranged on the suction nozzle support member, the suction nozzle support member is arranged on the suction cup sliding table, the suction cup sliding table and the suction cup driver are arranged on the plate taking fork body, and the suction cup driver is used for driving the suction cup sliding table to move on the plate taking fork body so as to drive the suction nozzle to move along a predetermined direction.

11. The transport apparatus according to claim 1, wherein the magazine unit includes a magazine support for storing at least one pallet, a magazine body for supporting the magazine body, a magazine driving device provided on the magazine support for driving the magazine body to move in a predetermined direction with respect to the magazine support, and at least one in-place locking device for restricting movement of the magazine body with respect to the magazine support.

12. A method of transmission, comprising:

the plate library unit provides a tray, and the tray is used for loading the mask plates;

taking the tray out of the plate library unit, and transmitting the mask plates in the tray to a pre-compensation unit;

detecting and obtaining the offset of the mask in the Rz direction;

and adjusting the position of the mask plate according to the offset of the mask plate in the Rz direction so as to compensate the offset of the mask plate in the Rz direction.

13. A screening apparatus comprising a workpiece table and a transfer apparatus according to any one of claims 1 to 11 for transferring a reticle to the workpiece table.