CN206711923U - One kind is thrown the net device - Google Patents

One kind is thrown the net device Download PDF

Info

Publication number
CN206711923U
CN206711923U CN201720578738.5U CN201720578738U CN206711923U CN 206711923 U CN206711923 U CN 206711923U CN 201720578738 U CN201720578738 U CN 201720578738U CN 206711923 U CN206711923 U CN 206711923U
Authority
CN
China
Prior art keywords
mask version
auxiliary mask
frame
net
throwing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201720578738.5U
Other languages
Chinese (zh)
Inventor
郭登俊
靳福江
张健
孙朴
张德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201720578738.5U priority Critical patent/CN206711923U/en
Application granted granted Critical
Publication of CN206711923U publication Critical patent/CN206711923U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Electroluminescent Light Sources (AREA)

Abstract

The utility model provides one kind and thrown the net device, and for installing the auxiliary mask version in evaporated device, the evaporated device includes:Middle part has the frame of open area;Deposition mask version with mask pattern, it is arranged on the open area of the frame;For aiding in throwing the net for the deposition mask version, the auxiliary mask version is arranged on the open area of the frame, and between the deposition mask version and the frame;The device of throwing the net includes:For being arranged on the outside of the frame, when install auxiliary mask version, the positioning mechanism that is aligned to auxiliary mask version to be installed with the frame.Device provided by the utility model of throwing the net, can be when installing or repairing auxiliary mask version by setting positioning mechanism, auxiliary mask version is tentatively aligned with frame, so that auxiliary mask version to be installed is put on frame exactly, it is easy to the installation of auxiliary mask version to position, it is easy to operation.

Description

One kind is thrown the net device
Technical field
It the utility model is related to display fabrication techniques field, more particularly to one kind is thrown the net device.
Background technology
At present, organic elctroluminescent device (Organic Electroluminesecent Display, OLED) with By means of its low-power consumption, high color saturation, wide viewing angle, minimal thickness, the excellent properties such as flexibility can be realized, be increasingly becoming display neck The main flow in domain.
At present, it is independently luminous or white to generally comprise red (R) green (G) blue (B) sub-pixel for the full-color display of OLED display device The modes such as light OLED combination colored filters.When the RGB sub-pixels of OLED display device use juxtaposition pixel arrangements, High-precision metal mask plate (Fine Metal Mask, FMM) technology mainly is used during preparing luminescent layer, it is to pass through OLED material according on preset program evaporation to LTPS (low temperature polycrystalline silicon) backboard, is utilized the figure on FMM, shape by evaporation mode Into RGB device.
At present, when being deposited using high-precision metal mask platemaking technology, usual deposition mask version component is fixed on side On frame, deposition mask version component mainly includes high-precision metal mask and auxiliary mask version, and auxiliary mask version includes blocking covering Masterplate (Cover mask) and support mask (Howling mask).FMM can be because the original such as substrate breakage during evaporation Thus damage, FMM reparation at present can be easily accomplished, if block masks version or support mask damage are difficult to repair It is multiple, because FMM is covered on block masks version and support mask, by taking block masks version as an example, if block masks Version damage, it is necessary to passed through below from FMM and support mask from by block masks version, then stretching is welded on frame, this Individual process needs artificially repeatedly to enter equipment, and difficult point is the block masks version how block masks version is accurately put into frame Weld in groove, and how to adjust the position of frame after stretching to adjust the relative position of frame and block masks version.Due to Auxiliary mask version is needed through below FMM, it is difficult to ensure that auxiliary mask version is not bent, the position at its both ends can with frame Weld groove face, and because block masks version is all close in whole repair process with frame, so regulation frame Block masks version can start with frame one behind position, if operation slightly mistake will damage FMM.
Utility model content
The purpose of this utility model is to provide one kind and thrown the net device, its can when installing or repairing auxiliary mask version, Auxiliary mask version is tentatively aligned with frame, to enable auxiliary mask version to be installed to be put into exactly on frame, just Positioned in the installation of auxiliary mask version, it is easy to operation.
Technical scheme provided by the utility model is as follows:
One kind is thrown the net device, and for installing the auxiliary mask version in evaporated device, the evaporated device includes:Middle part has The frame of open area;Deposition mask version with mask pattern, it is arranged on the open area of the frame;And for aiding in The auxiliary mask version of the deposition mask version, the auxiliary mask version is arranged on the open area of the frame, and is located at Between the deposition mask version and the frame;The device of throwing the net includes:
For carrying the plummer of the frame;
And be arranged on the outside of the plummer, for when installing auxiliary mask version, to auxiliary mask version to be installed and institute State the positioning mechanism that frame is aligned.
Further, the positioning mechanism includes:
For clamping the hold assembly of auxiliary mask version to be installed;
And the positioning element for being positioned to auxiliary mask version to be installed.
Further, the device of throwing the net also includes:Moved for controlling the positioning element and the hold assembly Travel mechanism.
Further, the positioning element includes two locators for being separately positioned on the opposite sides of the plummer;
The hold assembly includes two clampers for being separately positioned on the opposite sides of the plummer, and the clamping Device and be in the clamper described plummer the same side locator position face, and the clamper is arranged on and the folder Holder is in the outside of the locator of described plummer the same side;
Wherein described travel mechanism can control the locator and the clamper synchronizing moving.
Further, the frame is provided with the multiple link slots for being used for connecting the auxiliary mask version;Wherein described shifting Motivation structure can control the locator and the clamper is moved on the position with the center of link slot institute face.
Further, each locator is provided with the standing groove for being used for placing auxiliary mask version to be installed, and described Standing groove is the insertion cell body of both ends open, so that the both ends of auxiliary mask version to be installed are each passed through the placement of two locators Groove, by the gripper.
Further, the standing groove of the locator includes two side walls being oppositely arranged, wherein described two side wall energy Enough relative movements, to change the width of the standing groove.
Further, it is provided with the locator for controlling the auxiliary mask version to be installed in the standing groove to lift Lifting structure.
Further, the lifting structure includes:The blowing nozzle of the bottom land of the standing groove is arranged on, the blowing nozzle is used Blown with the auxiliary mask version to be installed into the standing groove, so that auxiliary mask version to be installed rises.
The beneficial effects of the utility model are as follows:
Device provided by the utility model of throwing the net, by setting positioning mechanism, it can install or repair auxiliary mask During version, auxiliary mask version is tentatively aligned with frame, auxiliary mask version to be installed is put on frame exactly, just Positioned in the installation of auxiliary mask version, it is easy to operation.
Brief description of the drawings
What Fig. 1 represented to provide in the utility model embodiment throw the net device is during auxiliary mask version is repaired to be installed Structural front view when mask is aligned with frame;
What Fig. 2 represented to provide in the utility model embodiment throw the net device is during auxiliary mask version is repaired to be installed Side view when mask is aligned with frame;
Fig. 3 represents the structural representation of locator.
Embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer The accompanying drawing of type embodiment, the technical scheme of the utility model embodiment is clearly and completely described.Obviously, it is described Embodiment is part of the embodiment of the present utility model, rather than whole embodiments.Based on described of the present utility model Embodiment, the every other embodiment that those of ordinary skill in the art are obtained, belong to the scope that the utility model is protected.
For the auxiliary mask version of the deposition mask version component used in high-precision metal mask platemaking technology in the prior art When being repaired, auxiliary mask version and frame not easy fitted the problem of, the utility model provides one kind and thrown the net device, its energy It is enough tentatively to be aligned auxiliary mask version with frame when installing or repairing auxiliary mask version, to cause auxiliary to be installed to cover Masterplate can be put on frame exactly, be easy to the installation of auxiliary mask version to position, easy to operation.
As shown in figure 1, device provided by the utility model of throwing the net is used to install the auxiliary mask version in evaporated device, institute Stating evaporated device includes:Middle part has the frame 100 of open area;Deposition mask version 200 with mask pattern, the evaporation Mask 200 is arranged on the open area of the frame 100;And for aiding in the auxiliary mask version of the deposition mask version 200 300, the auxiliary mask version 300 is arranged on the open area of the frame 100, and is located at the deposition mask version 200 and institute State between frame 100;The device of throwing the net includes:For carrying the plummer of the frame;And it is arranged on outside the plummer Side, for being arranged on the outside of frame 100, when installing auxiliary mask version 300, to auxiliary mask version 300 ' to be installed and institute State the positioning mechanism 400 that frame 100 is aligned.
Device provided by the utility model of throwing the net, by setting positioning mechanism 400, auxiliary mask version can repaired When 300, auxiliary mask version 300 and frame 100 are tentatively aligned, auxiliary mask version 300 ' to be installed is put into exactly On frame 100, it is easy to the installation of auxiliary mask version 300 to position, it is easy to operation.
In such scheme, the deposition mask version 200 is high-precision metal mask plate (FMM);The auxiliary mask version 300 including for supporting the support mask 301 of the deposition mask version 200 and for blocking the predetermined of deposition mask version 200 The block masks version 302 in region, wherein the support 302 crisscross setting of mask 301 and the block masks version.Need Illustrate, as shown in figure 1, FMM has multiple, there is gap, the block masks version 302 blocks FMM between two neighboring FMM Presumptive area, wherein the presumptive area is the gap between two neighboring FMM, that is to say, that the block masks version 302 blocking the gap between two neighboring FMM.
Illustrate the preferred embodiment of device provided by the utility model of throwing the net below.
In preferred embodiment provided by the utility model, as depicted in figs. 1 and 2, the positioning mechanism 400 includes: For clamping the hold assembly of auxiliary mask version 300 ' to be installed;And for being positioned to auxiliary mask version 300 ' to be installed Positioning element.
In such scheme, the positioning element is located at the auxiliary mask for being used to install auxiliary mask version 300 of frame 100 The position of 300 mount point faces of version, when the damage of auxiliary mask version 300 needs to repair, by the hand of auxiliary mask version 300 ' to be installed It is dynamic to be positioned over through below FMM on the positioning element, to carry out Primary Location to the auxiliary mask version 300, and the folder The both ends that part is then used to clamp auxiliary mask version 300 ' to be installed are held, auxiliary mask version 300 ' to be installed is stretching in frame On 100, it is easy to subsequently be fixed on auxiliary mask version 300 ' to be installed on frame 100 using modes such as welding.
Preferably, the device of throwing the net also includes:For the shifting for controlling the positioning element and the hold assembly to move Motivation structure.
Using such scheme, the positioning element and the hold assembly are removable, and the travel mechanism can be according to The strategy preset, to control mobile step distance of the positioning element and the hold assembly etc., so that the location division The position for the mount point institute face of auxiliary mask version 300 that part and the hold assembly can be moved on frame 100.
It should be noted that it is not defined in the utility model for the concrete structure of the travel mechanism, only Will can realize control the locator and the clamper according to set in advance state travel mechanism can according to the strategy preset, To control mobile step distance of the positioning element and the hold assembly etc., for example, the travel mechanism can adopt The mode being engaged with motor, leading screw with sliding block, the locator and/or the clamper are arranged on the sliding block, The motor drives the leading screw so that the sliding block movement, to drive the locator and/or the clamper to move It is dynamic.
In preferred embodiment provided by the utility model, as depicted in figs. 1 and 2, the positioning element includes difference It is arranged on two locators 401 of the opposite sides of the plummer;The hold assembly includes being separately positioned on the carrying Two clampers 402 of the opposite sides of platform, and the clamper 402 and to be in the plummer with the clamper 402 same The position face of the locator 401 of side, and the clamper 402 is arranged on that to be in the plummer with the clamper 402 same The outside of the locator 401 of side;Wherein described travel mechanism can control the locator 401 and the clamper 402 synchronous It is mobile.
Using such scheme, the locator 401 is separately positioned on the opposite sides of the plummer, i.e., described locator 401 are located at the opposite sides of the frame 100, and the outside of each locator 401 sets a clamper 402, the positioning of the same side Device 401 and clamper 402 can synchronizing moving, when repairing auxiliary mask version 300, by auxiliary mask version 300 ' to be installed from FMM lower section, when being worn by the side of frame 100 to the opposite side of frame 100, the both ends of auxiliary mask version 300 ' to be installed can be with It can be clamped respectively by two locators 401 of the opposite sides positioned at the frame 100 to carrying out Primary Location, and by two Device 402 clamps the both ends of auxiliary mask version 300 ' to be installed respectively, and auxiliary mask version 300 ' to be installed is stretched, works as frame After 100 align with assistor to be installed, auxiliary version to be installed is welded on to the mount point of auxiliary mask version 300 of frame 100.
Preferably, the frame 100 is provided with the multiple link slots 101 for being used for connecting the auxiliary mask version 300;Wherein The travel mechanism can control the locator 401 and the clamper 402 to be moved to the center institute with the link slot 101 On the position of face.
Using such scheme, the mount point of auxiliary mask version 300 on the frame 100 uses the structure of link slot 101, to Auxiliary mask version 300 ' to be installed is welded in the link slot 101, auxiliary mask version 300 is fixed on frame 100, its Described in locator 401 and the clamper 402 can under the control of the travel mechanism, synchronizing moving to the link slot On the position of 101 cell body center institute face, to realize the cell body center by auxiliary mask version 300 ' to be installed and link slot 101 The purpose of face, and then auxiliary mask version 300 ' to be installed is welded in link slot 101.
Certainly it should be noted that the concrete structure of the mount point of auxiliary mask version 300 on the frame 100 actually should Link slot 101 can be not limited in.
In addition, in preferred embodiment provided by the utility model, as shown in figures 1 and 3, each locator 401 are provided with the standing groove 4011 for being used for placing auxiliary mask version 300 ' to be installed, and the standing groove 4011 is both ends open Insertion cell body so that the both ends of auxiliary mask version 300 ' to be installed are each passed through the standing groove 4011 of two locators 401, quilt The clamper 402 clamps.
Using such scheme, standing groove 4011 is offered on the locator 401, is repairing auxiliary mask version to be installed When 300 ', it can be passed through below FMM, the both ends of auxiliary mask version 300 ' to be installed are respectively placed in the standing groove 4011 It is interior, play a part of tentatively aligning by increased locator 401, allow the auxiliary mask version 300 ' to be installed of reparation can be accurate The link slot 101 for being put into frame 100 center, then by the both ends end of auxiliary mask version 300 ' to be installed respectively by Clamper 402 clamps, to stretch auxiliary mask version 300 ' to be installed.
Preferably, the standing groove 4011 of the locator 401 includes two side walls being oppositely arranged, wherein described two sides Wall can relatively move, to change the width of the standing groove 4011.
Using such scheme, the width of standing groove 4011 can adjust on locator 401, be adapted to blocking for different in width Mask 302 and support mask 301.
In addition, be positioned over by auxiliary mask version 300 ' to be installed in the standing groove 4011 of locator 401, then using clamping Device 402 clamps auxiliary mask version 300 ' to be installed, has applied pulling force on clamper 402 to stretch auxiliary mask version to be installed When 300 ', auxiliary mask version 300 ' to be installed and the relative position of frame 100 can change, now can be by adjusting frame 100 position adjusts auxiliary mask version 300 ' to be installed to the center of the link slot 101 with frame 100, still, if Auxiliary mask version 300 ' to be installed is close to frame 100, auxiliary mask version 300 can be caused to be moved with frame 100, existing It is typically to need artificially to go to stir auxiliary mask version 300 ' to be installed after regulation frame 100 position every time in technology, so Human users are caused to get up very complicated.
In order to solve the above problems, in preferred embodiment provided by the utility model, set on the locator 401 There is the lifting structure for controlling the auxiliary mask version 300 ' to be installed in the standing groove 4011 to lift.
Using such scheme, the auxiliary mask to be installed in the standing groove 4011 can be controlled by the lifting structure Version 300 ' lifts, and when needing to move frame 100 to carry out accurate contraposition, can pass through lifting structure auxiliary to be installed Mask 300 ' rises, and to cause the frictional force between auxiliary mask version 300 ' to be installed and frame 100 to reduce, therefore makes to wait to pacify Dress auxiliary mask version 300 ' will not follow frame 100 to move together, enter equipment number so as to greatly reduce personnel, reduce personnel The danger of operation.
In embodiment provided by the utility model, it is preferred that as shown in figure 3, the lifting structure includes:It is arranged on The blowing nozzle 4012 of the bottom land of the standing groove 4011, the blowing nozzle 4012 is to be installed into the standing groove 4011 Auxiliary mask version 300 ' is blown, so that auxiliary mask version 300 ' to be installed rises.
Using such scheme, the blowing nozzle 4012 in the standing groove 4011 is blown to auxiliary mask version 300 ' to be installed When, auxiliary mask version 300 ' to be installed can be blown afloat, and make it that the position of auxiliary mask version 300 ' to be installed rises, and reduce Frictional force between auxiliary mask version 300 ' to be installed and frame 100;When frame 100 move complete after, can stop to Auxiliary mask version 300 ' to be installed is blown so that the position of auxiliary mask version 300 ' to be installed declines, and is easy to auxiliary to be installed Mask 300 ' is welded in the link slot 101 of frame 100.
In such scheme, the lifting of auxiliary mask version 300 ' to be installed is realized by the way of air blowing, this mode is grasped Facilitate, auxiliary mask version 300 ' to be installed etc. will not be caused to damage or polluted.It should be appreciated that in actual applications, The lifting structure be can also be using other structures to realize, this is not defined.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art For art personnel, on the premise of the utility model technical principle is not departed from, some improvement and replacement can also be made, these change Enter and replace and also should be regarded as the scope of protection of the utility model.

Claims (9)

  1. The device 1. one kind is thrown the net, for installing the auxiliary mask version in evaporated device, the evaporated device includes:Middle part, which has, opens The frame in mouth region domain;Deposition mask version with mask pattern, it is arranged on the open area of the frame;And for aiding in The auxiliary mask version of deposition mask version is stated, the auxiliary mask version is arranged on the open area of the frame, and is located at institute State between deposition mask version and the frame;Characterized in that, the device of throwing the net includes:
    For carrying the plummer of the frame;
    And be arranged on the outside of the plummer, for when installing auxiliary mask version, to auxiliary mask version to be installed and the side The positioning mechanism that frame is aligned.
  2. 2. device according to claim 1 of throwing the net, it is characterised in that
    The positioning mechanism includes:
    For clamping the hold assembly of auxiliary mask version to be installed;
    And the positioning element for being positioned to auxiliary mask version to be installed.
  3. 3. device according to claim 2 of throwing the net, it is characterised in that
    The device of throwing the net also includes:For the travel mechanism for controlling the positioning element and the hold assembly to move.
  4. 4. device according to claim 3 of throwing the net, it is characterised in that
    The positioning element includes two locators for being separately positioned on the opposite sides of the plummer;
    The hold assembly include be separately positioned on the plummer opposite sides two clampers, and the clamper and The position face of the locator of described plummer the same side is in the clamper, and the clamper is arranged on and the clamper The outside of locator in described plummer the same side;
    Wherein described travel mechanism can control the locator and the clamper synchronizing moving.
  5. 5. device according to claim 4 of throwing the net, it is characterised in that
    The frame is provided with the multiple link slots for being used for connecting the auxiliary mask version;Wherein described travel mechanism can control The locator and the clamper are moved on the position with the center of link slot institute face.
  6. 6. device according to claim 4 of throwing the net, it is characterised in that
    Each locator is provided with the standing groove for being used for placing auxiliary mask version to be installed, and the standing groove is opened for both ends The insertion cell body of mouth, so that the both ends of auxiliary mask version to be installed are each passed through the standing groove of two locators, by the clamping Device clamps.
  7. 7. device according to claim 6 of throwing the net, it is characterised in that
    The standing groove of the locator includes two side walls being oppositely arranged, wherein described two side walls can relatively move, with Change the width of the standing groove.
  8. 8. device according to claim 6 of throwing the net, it is characterised in that
    The lifting structure for controlling the auxiliary mask version to be installed in the standing groove to lift is provided with the locator.
  9. 9. device according to claim 8 of throwing the net, it is characterised in that
    The lifting structure includes:It is arranged on the blowing nozzle of the bottom land of the standing groove, the blowing nozzle is to the placement Auxiliary mask version to be installed in groove is blown, so that auxiliary mask version to be installed rises.
CN201720578738.5U 2017-05-23 2017-05-23 One kind is thrown the net device Active CN206711923U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720578738.5U CN206711923U (en) 2017-05-23 2017-05-23 One kind is thrown the net device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720578738.5U CN206711923U (en) 2017-05-23 2017-05-23 One kind is thrown the net device

Publications (1)

Publication Number Publication Date
CN206711923U true CN206711923U (en) 2017-12-05

Family

ID=60462596

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720578738.5U Active CN206711923U (en) 2017-05-23 2017-05-23 One kind is thrown the net device

Country Status (1)

Country Link
CN (1) CN206711923U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111621740A (en) * 2019-02-28 2020-09-04 上海微电子装备(集团)股份有限公司 Transmission device, transmission method and net-opening device
CN112410724A (en) * 2019-08-23 2021-02-26 上海微电子装备(集团)股份有限公司 Net tensioning device and net tensioning method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111621740A (en) * 2019-02-28 2020-09-04 上海微电子装备(集团)股份有限公司 Transmission device, transmission method and net-opening device
CN111621740B (en) * 2019-02-28 2021-07-16 上海微电子装备(集团)股份有限公司 Transmission device, transmission method and net-opening device
CN112410724A (en) * 2019-08-23 2021-02-26 上海微电子装备(集团)股份有限公司 Net tensioning device and net tensioning method
CN112410724B (en) * 2019-08-23 2022-02-15 上海微电子装备(集团)股份有限公司 Net tensioning device and net tensioning method

Similar Documents

Publication Publication Date Title
JP7199889B2 (en) Film forming apparatus, film forming method, and electronic device manufacturing method
US10566533B2 (en) Masks, method to inspect and adjust mask position, and method to pattern pixels of organic light-emitting display device utilizing the masks
CN104928621B (en) It is a kind of to make throw the net device and the method for throwing the net used during mask plate
KR102177784B1 (en) Open mask assembly
KR100800237B1 (en) Process and Device for Positioning the Mask
CN105144421B (en) The fine metal mask of active alignment
CN206711923U (en) One kind is thrown the net device
CN110416140A (en) The manufacturing method of substrate transfer system, the manufacturing device of electronic equipment and electronic equipment
CN103981491A (en) Evaporating plating device
CN106530971B (en) A kind of production method of display base plate, display base plate and display device
CN109837510B (en) Film forming apparatus and method for manufacturing organic EL display device using the same
JP2018197363A (en) Substrate mounting method, substrate mounting mechanism, film formation method, film formation device, and method for producing electronic device
CN109273565A (en) A kind of transfer method of micro- light-emitting diode chip for backlight unit
KR101963982B1 (en) Film forming apparatus, film forming method and manufacturing method of electronic device
KR102128888B1 (en) Film forming apparatus, film forming method and manufacturing method of electronic device
CN204221302U (en) A kind of metal mask plate component assembling center
CN107359285A (en) A kind of OLED display and preparation method thereof
CN206512267U (en) A kind of mask sheet and mask plate
KR20060075110A (en) Substrate align device
US11038155B2 (en) Film formation device, vapor-deposited film formation method, and organic EL display device production method
KR20140146441A (en) A Automatic Aligning Apparatus for Thin-film Deposition Device
JP2013110072A (en) Organic el light emitting device manufacturing method and manufacturing device
CN103205670A (en) System for mask assembly indirect alignment
CN107398396A (en) The apparatus for coating and coating method of photoresist
CN107833983A (en) A kind of preparation method of mask plate and preparation method thereof, substrate

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant