CN111610343A - Optical fiber micro-flow velocity sensor - Google Patents
Optical fiber micro-flow velocity sensor Download PDFInfo
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- CN111610343A CN111610343A CN202010276477.8A CN202010276477A CN111610343A CN 111610343 A CN111610343 A CN 111610343A CN 202010276477 A CN202010276477 A CN 202010276477A CN 111610343 A CN111610343 A CN 111610343A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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Abstract
An optical fiber microflow velocity sensor, which is characterized in that: it is composed of holey fibre and single-mode fibre. In the composition: (1) inclined gratings are engraved on the fiber core of the optical fiber with the hole; (2) the optical fiber with the hole is provided with a micropore channel for the inlet and the outlet of the microfluid; (3) the holey fiber and the single-mode fiber are butt-welded; (4) the pump light and the broadband light are transmitted to the inclined grating on the holey fiber through the single-mode fiber, and the pump light is reflected to the microfluidic channel of the holey fiber by the inclined grating and is absorbed by the microfluidic channel; after the broadband light passes through the inclined grating, the light with the wavelength according with the backward resonance condition is reflected. The microfluid absorbs light energy, the temperature of the microfluid changes along with the change of the microfluid flow rate, so that the reflection peak of the inclined grating shifts, and the flow rate of the microfluid in the optical fiber hole with the hole can be measured by monitoring the reflection peak of the inclined grating. The sensor can be embedded into a microfluidic chip and is used for real-time measurement of microfluidic flow of a microfluidic chip system.
Description
(I) technical field
The invention relates to an optical fiber microflow flow velocity sensor which can be used for measuring and monitoring the flow velocity and flow rate of microflow in an optical fiber or a microflow chip and belongs to the technical field of microflow control.
(II) background of the invention
Laboratories on chip have found widespread use in biological, chemical and medical fields over the past 20 years. It has numerous advantages such as minimal reagent consumption, short reaction times, small reaction volumes, low cost, and high sensitivity. Accurate measurement of parameters such as thermal conversion, flow rate, migration time, pressure differential, fluid concentration, PH, etc. of trace fluids is important in a variety of applications including sample preparation, mixing, and particle screening. Of course, cross-sensitivity between different parameter quantities affects the accuracy of parameter measurement, which is also a problem to be solved. Therefore, the real-time and accurate measurement of local microfluidic parameters can be realized, which is a problem to be solved urgently in laboratories on chip, and the development of systems on chip for measuring and monitoring various parameters is particularly important.
A common micro-flow liquid flow velocity detection system is based on a Micro Electro Mechanical System (MEMS) and adopts an electrical and mechanical detection scheme such as cantilever deflection, thermoelectric conversion and the like. The detection system has the characteristics of high cost and complex preparation while realizing high-precision measurement.
The optical fiber with the micropore channel or the photonic crystal optical fiber is widely applied to a lab-on-a-chip system, because the air hole of the optical fiber is a natural microflow channel, and the optical field transmitted in the optical fiber can realize the functions of parameter control and sensing measurement on the microflow through the design of the structure of the optical fiber. Besides, the optical fiber sensor also has the characteristics of chemical corrosion resistance and more flexibility.
The invention provides an optical fiber micro-flow sensor. The device can realize the measurement of the flow velocity and the flow of microfluid in the optical fiber micropore, can be combined with microfluidic systems such as a microfluidic chip and the like, and realizes the flow measurement and monitoring in the microfluidic system.
Disclosure of the invention
The invention aims to provide an optical fiber microfluidic flow sensor which can be integrated in a microfluidic chip and is used for measuring the microfluidic flow of a microfluidic chip system in real time.
The purpose of the invention is realized as follows:
an optical fiber microflow flow velocity sensor is composed of a holey optical fiber and a single-mode optical fiber. In the composition: (1) inclined gratings are engraved on the fiber core of the optical fiber with the hole; (2) the optical fiber with the hole is provided with a micropore channel for the inlet and the outlet of the microfluid; (3) the holey fiber and the single-mode fiber are butt-welded; (4) the pump light and the broadband light are transmitted to the inclined grating on the holey fiber through the single-mode fiber, and the pump light is reflected to the microfluidic channel of the holey fiber by the inclined grating and is absorbed by the microfluidic channel; after the broadband light passes through the inclined grating, the light with the wavelength according with the backward resonance is reflected backward. The temperature of the microfluid in the microfluidic channel changes along with the change of the flow rate of the microfluid, so that the reflection peak of the inclined grating shifts, and the flow rate of the microfluid can be measured by monitoring the reflection peak of the inclined grating.
The holey fiber has a microporous microfluidic channel and a fiber core embedded in a cladding. Preferably, several different configurations of holey fibres can be used, as shown in figure 1.
Further, the tilted grating has two functions: (1) the pump light is reflected to the microfluidic channel, absorbed by the microfluid and converted into heat energy by the optical energy, so that the temperature of the microfluid is changed; (2) the light waves in the broadband light which meet the condition of backward reflection resonance are reflected, and the temperature of the microfluid can be monitored by detecting a reflection spectrum through a spectrometer.
Preferably, the micropore channel for the microfluid inlet and outlet is formed by processing micropores on the outer wall of the holey fiber by femtosecond laser, and the micropore channel avoids the fiber core of the holey fiber and does not influence the light guiding property of the fiber core.
From the hot-wire analysis principle, it is known that the following formula is available for the measurement of the flow rate of gas or liquid:
ΔT＝T(v)-T(0) (2)
wherein HlossFor the liquid to absorb heat, Δ T is the temperature change, v is the fluid velocity, and A and B are empirical constants. When the output power of the pump light source playing a heating role is fixed, the total amount H of heat absorbed by the microfluidlossThe temperature change Δ T and the fluid velocity v have a certain relationship.
The temperature change Δ T can be monitored by a tilted grating on the core. The wavelength drift amount Δ λ of the light wave reflected back by the tilted grating and the temperature change Δ T are in a linear relationship, as shown in formula (3), where k is a linear coefficient.
Δλ＝kΔT (3)
Substituting equation (3) into equation (1) yields:
therefore, the measurement of the reflection spectrum of the tilted grating can be used for realizing the real-time measurement of the flow rate of the microfluid. For holey fibers, the hole diameter parameters are known, thus facilitating low flow rates to the microfluid.
From the above principle, it is important that the micro-fluid absorbs the pump light and efficiently converts the light energy into the heat energy. Therefore, the wavelength of the pump light source is the light source of the strong absorption band of the transmitted microfluid.
Further, in order to increase the efficiency of the pump light conversion from light energy to heat energy, a light absorbing material layer, such as a graphene oxide layer, may be deposited in the holes of the optical fiber to increase the absorption efficiency of the pump light. Of course, the wavelength of the pump light source can also be selected by the absorption properties of the absorption layer for light of different wavelengths.
The optical fiber with the hole provided by the invention is provided with the microfluidic channel, and various microstructures can be prepared on the optical fiber through a femtosecond processing technology so as to realize the purpose of integrating different microfluidic chip functions into one optical fiber. Therefore, the flowmeter provided by the invention can accurately measure the flow speed and the flow of microfluid in the optical fiber micropore channel.
Furthermore, the micro-flow sensor with the optical fiber with the hole can also be embedded into a traditional micro-flow chip to be used as a flowmeter of a micro-flow system and used for measuring and monitoring the flow of the whole micro-flow chip.
The invention has at least the following advantages:
(1) the optical fiber is provided with the microfluidic channel, the light wave conduction characteristic of the optical fiber and the functional operation characteristic of the microfluidic are combined, and meanwhile, the fine diameter and the bendable characteristic of the optical fiber bring flexibility to the whole device.
(2) Compared with the traditional MEMS flow velocity sensor preparation process, the preparation process is relatively simple, and as for the existing optical fiber preparation process, hundreds of kilometers of optical fibers can be prepared by one-time wire drawing, the consistency is good, and the batch production of devices is facilitated.
(3) The sensor adopts an optical sensing principle and resists electromagnetic interference; and a tiny sensing structure like a cantilever beam and a spring is not arranged in the microfluidic channel, so that the smooth flowing of the microfluid is ensured.
(IV) description of the drawings
FIGS. 1(a) and 1(b) are two fiber configurations that are useful in the present invention. The labels are respectively: air holes 1-1 and 2-1, claddings 1-2 and 2-2, and cores 1-3 and 2-3.
Fig. 2 is a structure of a fiber optic microfluidic flow rate sensor. The newly appearing reference numerals are respectively: the optical fiber micro-fluidic system comprises a single-mode optical fiber 3, an inclined grating 4, a micro-fluidic inlet 5-1, a micro-fluidic outlet 5-2, incident light 6, reflected light 7 and micro-fluid 8.
Fig. 3 is a system diagram of a fiber optic microfluidic flow rate sensor. The newly appearing reference numerals are respectively: a pumping light source 9, a broadband ASE light source 10, an optical fiber wavelength division multiplexer 11, an optical fiber circulator 12 and a spectrometer 13.
FIG. 4 is a graph showing the change of absorption coefficient of water for different wavelengths of light.
FIG. 5 is a structural diagram of a holey fiber with graphene oxide deposited on the inner wall of the micropores of the fiber, wherein 2-4 are graphene oxide.
Fig. 6 is a block diagram of a fiber optic microfluidic flow sensor that can be integrated with a conventional microfluidic chip. The newly appearing reference numerals are respectively: the microfluidic chip comprises a microfluidic chip 14, a microfluidic inlet 14-1 of the microfluidic chip, an outlet channel 14-2 of the optical fiber microfluidic sensor and a functional area 14-3 of the microfluidic chip.
(V) detailed description of the preferred embodiments
The invention is further illustrated with reference to the following figures and specific examples.
Example 1:
the holey fiber used in the present invention has an air hole and a single-mode core embedded in the cladding layers 1-2 and 2-2, wherein the air hole serves as a microfluidic channel. Two typical fiber configurations are shown in fig. 1(a), (b), both of which can be used in the present invention.
The structure of the microflow flow sensor is shown in figure 2, two ends of a holey fiber 1 are welded with a single-mode fiber 3 in a core-to-core mode, and an inclined grating 4 is engraved on a fiber core. The outer wall of the holey fiber 1 is etched into two micropore channels through a femtosecond laser processing technology, and the micropore channels are communicated with the outside and the microflow channels inside the holey fiber and are used as an inlet 5-1 and an outlet 5-2 of microfluid.
The entire fiber optic microfluidic flow sensing system is shown in fig. 3. The system comprises a pump light source 9, a C + L waveband broadband ASE (amplified spontaneous emission) light source 10, an optical fiber wavelength division multiplexer 11, an optical fiber circulator 12, a spectrometer 13 and an optical fiber microflow velocity sensor. The output light of the pump light source 9 and the ASE light source 10 is input into the single mode fiber 3 after being combined by the fiber wavelength division multiplexer 11. When the light wave is transmitted to the inclined grating 4, the input light 6 is reflected to the microfluidic channel by the grating and is absorbed by the microfluid 8 in the microfluidic channel, so that the light energy is converted into the internal energy of the liquid; light 7 in the broadband light wave corresponding to the backward resonant wavelength of the tilted grating is reflected and transmitted via the fiber optic circulator 12 into the spectrometer 13 for analysis. When the output power of the pump light source 9 is constant, the amount of heat of the microfluid 8 converted by the absorbed light energy is constant. When the flow rate of the microfluid changes, the temperature change of the microfluid is in a functional relationship with the flow rate according to the hot-wire theory and the formula (1). And the change in temperature of the liquid in the microfluidic channel can be known from the amount of spectral shift in the reflection on the spectrometer. Therefore, the measurement of the flow velocity in the microfluidic channel of the holey fiber is realized.
Preferably, the microfluidics employ water. Since the absorption coefficients of water for different light waves are shown in fig. 3, it is preferable to select 1480nm as the wavelength of the pumping light source 9.
Example 2:
as shown in FIG. 5, the difference between this example and example 1 is that a layer of light absorbing material is deposited on the inner wall of the microfluidic channel of the holey fiber to increase the absorption efficiency of the pump light. Preferably, the light absorption material is graphene oxide 2-4.
Example 3:
the optical fiber microfluidic flow sensor provided by the invention can be combined with a traditional microfluidic chip and is used for monitoring the flow velocity and flow of fluid in the microfluidic chip. As shown in fig. 5, the optical fiber microfluidic flow rate sensor in example 1 is embedded in a microfluidic chip 14, an inlet 14-1 of the microfluidic chip is connected to an optical fiber microfluidic inlet 5-1 in fig. 2, and an optical fiber microfluidic outlet 5-2 is connected to a microfluidic channel 14-2 in the chip. Therefore, microfluid is guided into the functional area 14-3 of the microfluidic chip after passing through the optical fiber microfluidic flow rate sensor, so that the measurement of the flow rate and the flow in the whole microfluidic chip is realized.
In the description and drawings, there have been disclosed typical embodiments of the invention. The invention is not limited to these exemplary embodiments. Specific terms are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth.
Claims (6)
1. An optical fiber microflow velocity sensor, which is characterized in that: it comprises holey fiber and single mode fiber, in the constitution: (1) inclined gratings are engraved on the fiber core of the optical fiber with the hole; (2) the optical fiber with the hole is provided with a micropore channel for the inlet and the outlet of the microfluid; (3) the holey fiber and the single-mode fiber are butt-welded; (4) the pump light and the broadband light are transmitted to the inclined grating on the holey fiber through the single-mode fiber, and the pump light is reflected to the microfluidic channel of the holey fiber by the inclined grating and is absorbed by the microfluidic channel; after the broadband light passes through the inclined grating, the light with the wavelength according with the backward resonance condition is reflected backward.
2. An optical fibre microfluidic flow rate sensor as claimed in claim 1, wherein: the holey fiber has a microfluidic channel and a fiber core embedded in a cladding.
3. An optical fibre microfluidic flow rate sensor as claimed in claim 1, wherein: the micropore channel for the microfluid inlet and outlet is formed by processing micropores on the outer wall of the holey optical fiber by femtosecond laser, avoids the fiber core of the holey optical fiber and does not influence the light guiding property of the fiber core.
4. An optical fibre microfluidic flow rate sensor as claimed in claim 1, wherein: the wavelength of the pump light is the strong absorption waveband of the transmitted microfluid.
5. An optical fibre microfluidic flow rate sensor as claimed in claim 1, wherein: the inner wall of the microfluidic channel of the optical fiber with the hole can be deposited with a layer of light absorbing material, so that the absorption efficiency of the pump light is increased.
6. An optical fibre microfluidic flow rate sensor as claimed in claim 1, wherein: the optical fiber micro-flow sensor can be embedded into a traditional micro-flow chip and used as a flow meter of a micro-flow system.
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| CN202010276477.8A CN111610343A (en) | 2020-04-10 | 2020-04-10 | Optical fiber micro-flow velocity sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113465656A (en) * | 2021-04-30 | 2021-10-01 | 潍坊嘉腾液压技术有限公司 | Tester for detecting fluid composite parameters and data processing method |
| CN114487476A (en) * | 2022-01-21 | 2022-05-13 | 南京航空航天大学 | System and method for measuring particle image flow field velocity related to space-time state |
| CN114924444A (en) * | 2022-03-30 | 2022-08-19 | 绵阳惠科光电科技有限公司 | Display device, display panel and array substrate thereof |
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2020
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113465656A (en) * | 2021-04-30 | 2021-10-01 | 潍坊嘉腾液压技术有限公司 | Tester for detecting fluid composite parameters and data processing method |
| CN113465656B (en) * | 2021-04-30 | 2023-08-15 | 潍坊嘉腾液压技术有限公司 | Tester for detecting fluid composite parameters and data processing method |
| CN114487476A (en) * | 2022-01-21 | 2022-05-13 | 南京航空航天大学 | System and method for measuring particle image flow field velocity related to space-time state |
| CN114487476B (en) * | 2022-01-21 | 2022-10-21 | 南京航空航天大学 | System and method for measuring particle image flow field velocity related to space-time state |
| CN114924444A (en) * | 2022-03-30 | 2022-08-19 | 绵阳惠科光电科技有限公司 | Display device, display panel and array substrate thereof |
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