CN108801978A - A kind of high-precision liquid index sensor - Google Patents
A kind of high-precision liquid index sensor Download PDFInfo
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- CN108801978A CN108801978A CN201810645208.7A CN201810645208A CN108801978A CN 108801978 A CN108801978 A CN 108801978A CN 201810645208 A CN201810645208 A CN 201810645208A CN 108801978 A CN108801978 A CN 108801978A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A kind of liquid refractive index sensor based on sub-wavelength grate structure proposed by the invention, belongs to bio-photon sensory field.The sensor is made of substrate, sub-wave length grating and microfluidic channel, using sub-wave length grating guide mode resonance phenomenon, realizes the high-acruracy survey of liquid refractivity.When the liquid refractivity in microfluidic channel changes, the centre wavelength of the transmission spectrum of grating will change, and centre wavelength and liquid refractivity size are closely related.By measuring transmission spectrum centre wavelength, to obtain the refractive index of liquid.This be it is a kind of measure liquid refractivity novel sensor, have it is simple in structure, be easy to make, high certainty of measurement many advantages, such as, have broad application prospects in the fields such as bio-sensing, chemical analysis, medical diagnosis.
Description
Technical field
The invention belongs to bio-photon field of sensing technologies, and in particular to a kind of high-precision liquid index sensor.
Background technology
Liquid is one of the grown form of nature substance, and liquid refractivity is that one of reflection liquid physical property is important
Parameter.The purity or concentration of liquid usually have a direct impact its refractive index, thus quickly, accurately obtain the refractive index of liquid,
It is of great significance for numerous areas such as chemical analysis, medical diagnosis, environmental monitoring, food productions.In general, measuring liquid
There are many ways to body refractive index, such as Abbe refraction process, michelson interferometry, surface plasma method, but these methods are logical
It is commonly present the shortcomings of measurement accuracy is poor or environment influence is big or device architecture is complicated.
In recent years, there has been proposed the various liquid refractive index sensors based on optical grating construction, such as waveguide grating type liquid
Index sensor, grating type optical fiber liquid refractive index sensor, Bragg grating type liquid refractive index sensor etc., still,
These sensors usually have that measurement range is small or measurement accuracy is low or the outstanding problems such as cost height, thus are actually answering
It is subject to many limitations in.
Based on this, patent of the present invention designs a kind of New using sub-wave length grating and microfluidic channel integrated structure
Body index sensor, the device have high certainty of measurement, it is simple in structure, measure it is easy, the advantages such as be easily integrated, medicine,
There is wide application prospect in the fields such as biology, industry.
Invention content
The object of the present invention is to provide a kind of high-precision liquid index sensors.The sensor is by substrate, sub-wavelength light
Grid are constituted with microfluidic channel.Microfluidic channel is between two sub-wave length gratings, and testing liquid exists under micro-fluid pump driving
Flowing in microfluidic channel.When the refractive index of testing liquid in microfluidic channel changes, due to leading for sub-wave length grating
Mould resonance effects, thus its transmission spectrum centre wavelength will change, changed wavelength and liquid refractivity variable quantity are close
Cut phase is closed.By measuring its transmission spectrum centre wavelength, to just obtain the refractive index of liquid.The device have high certainty of measurement,
It is simple in structure, test is easy, many advantages, such as being easy to integrate with biochip.
Technical solution of the present invention is as follows：A kind of sensor for measuring refractive indexes of liquid, as depicted in figs. 1 and 2, wherein
Fig. 1 is device vertical view, and Fig. 2 is device cross.The sensor is by substrate（1）, grating（5）And microfluidic channel（4）
It constitutes.Testing liquid is by microfluidic channel（2）Left side is injected, and grating region microfluidic channel is flowed through（4）, then prepare liquid is from miniflow
Body channel（3）It flows out on right side.The polarization state of incident light is TM waves, and the angle between incident light and grating normal N isθ。
The screen periods of the sensor areT, grating depth isH, grating steps width isd, grating space isw.Substrate
Refractive Index of Material isn s , VPG medium Refractive Index of Material isn h , testing liquid refractive index isn l 。
The screen periodsTLess than lambda1-wavelength, the dielectric material of grating is monocrystalline silicon, and substrate material is optics glass
Glass.
The incident light is near infrared light, and wave-length coverage is about 1525 ~ 1565nm.
Optical lithography can be used in the index sensor and prepared by reactive ion etching method, with traditional sub-wave length grating
It makes similar, technological process is no longer discussed in detail here.
The present invention operation principle be：Testing liquid is under micro-fluid pump driving from microfluidic channel（2）Left side is injected, so
After flow into microfluidic channel（4）.When light wave is incident on grating, reflection and transmission can occur for light wave.In certain incident condition and
Under grating structural parameter, Diffraction of light wave will produce resonant anomaly phenomenon, and reflection and transmitted spectrum are narrow bandwidth spectrums.When to be measured
When the refractive index of liquid changes, this is equivalent to the structural parameters for changing grating, also occurs to the optical property of grating
Respective change, therefore the centre wavelength of transmission spectrum will change, this shows that the variation of centre wavelength and liquid refractivity are close
Cut phase is closed.By the relationship for demarcating the centre wavelength and liquid refractivity of grating transmission spectrum.When testing liquid injection microfluid is logical
When road, the centre wavelength of transmission spectrum is measured, using the change curve between transmission spectrum centre wavelength and liquid refractivity, so as to
Obtain the refractive index of its testing liquid.
Liquid refractive index sensor proposed by the present invention is a kind of novel optical sensing based on sub-wavelength grate structure
Device is easy to integrated with various micro-fluid chips, has in the fields such as medical diagnosis, chemical analysis, environmental monitoring, food security
Wide application prospect.
Description of the drawings
Fig. 1 is the overlooking structure diagram of liquid refractive index sensor provided by the invention.
Fig. 2 is the cross-sectional structure figure of liquid refractive index sensor provided by the invention.
Fig. 3 is the transmission spectrum of liquid refractive index sensor provided by the invention with the variation relation of testing liquid refractive index.
Fig. 4 is the transmission spectrum centre wavelength of liquid refractive index sensor provided by the invention with the change of testing liquid refractive index
Change relationship.
Specific implementation mode
The present invention is further detailed below in conjunction with the accompanying drawings.Use near infrared light for incident light, wavelength here
Range is about 1525 ~ 1565nm, and polarization state is TM waves, and plane of incidence is in x-z-plane, incidence angleθIt is 1 °, the period of gratingT, slot
It is deepH, step widthdWei not be 0.60 μm, 0.45 μm, 0.45 μm, spacingwIt is 0.80 μm.Substrate material uses refractive index for 1.5
Optical glass.VPG medium material is monocrystalline silicon, refractive index 3.48.
Use Fourier type method to carry out sunykatuib analysis to the performance of liquid refractive index sensor provided by the invention here.
It is assumed herein that the variation range of the refractive index of testing liquid is 1.33 ~ 1.41.The transmission spectrum of sensor changes with liquid refractivity
As shown in Figure 3.As seen from Figure 3, with the increase for measuring liquid refractivity, transmission spectrum centre wavelength is moved to long wave direction
Dynamic, wavelength variation range is up to 28nm.Secondly, transmission spectrum peak power varies less, and is nearly equal to 1, this is conducive to
Improve light utilization ratio.It is important to note that the bandwidth of transmission spectrum varies less, and be consistently less than 0.03nm, this for
Realize that high refractive index precision measure is particularly significant.It is computed, the sensitivity of the sensor is 350nm/RIU, and quality factor are always
More than 50000.
Transmission spectrum central wavelength lambda0It is as shown in Figure 4 with microfluid variations in refractive index relationship.As seen from the figure, in transmission spectrum
Cardiac wave length is substantially linear with microfluid refractive index, this is advantageous to the accurate measurement to liquid refractivity.
A kind of liquid refractive index sensor proposed by the invention, have it is simple in structure, measure simplicity, high certainty of measurement,
It the advantages such as is easily integrated, there is wide application prospect in the fields such as medicine, biology, industry.
Claims (2)
1. a kind of sensor for measuring refractive indexes of liquid is by substrate（1）, sub-wave length grating（5）And microfluidic channel（4）
It constitutes；Testing liquid is by microfluidic channel（2）Left side is injected, by grating region microfluidic channel（4）, finally by microfluidic channel
（3）It flows out on right side；The polarization state of incident light is TM waves, and the angle between incident light and grating normal is 1 °；When grating region is micro- logical
Road（4）When interior liquid refractivity changes, transmitted spectrum centre wavelength will change correspondingly, centre wavelength knots modification and liquid
Refractive index variable quantity is closely related；By measuring its transmission spectrum centre wavelength, to obtain the refractive index of liquid.
2. high-precision liquid index sensor according to claim 1, which is characterized in that sub-wave length grating（5）Material
Material is monocrystalline silicon, substrate（1）Material is optical glass.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810645208.7A CN108801978A (en) | 2018-06-21 | 2018-06-21 | A kind of high-precision liquid index sensor |
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| CN201810645208.7A CN108801978A (en) | 2018-06-21 | 2018-06-21 | A kind of high-precision liquid index sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839365A (en) * | 2019-03-26 | 2019-06-04 | 中国计量大学 | A kind of gas sensor based on sub-wave length grating waveguide infrared in silicon substrate |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424377A (en) * | 2013-08-16 | 2013-12-04 | 上海理工大学 | Sensor for detecting liquid refractive index |
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2018
- 2018-06-21 CN CN201810645208.7A patent/CN108801978A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424377A (en) * | 2013-08-16 | 2013-12-04 | 上海理工大学 | Sensor for detecting liquid refractive index |
Non-Patent Citations (2)
| Title |
|---|
| KU YI-FAN 等: "Enhanced sensitivity in injection-molded guided-mode-resonance sensors via low-index cavity layers", 《OPTICS EXPRESS》 * |
| 王振华 等: "正交双光栅结构的导模共振光谱特性", 《光学学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839365A (en) * | 2019-03-26 | 2019-06-04 | 中国计量大学 | A kind of gas sensor based on sub-wave length grating waveguide infrared in silicon substrate |
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Application publication date: 20181113 |