AU2020100963A4 - A hybrid integration Mach-Zehnder interference optical fiber microfluidic chip - Google Patents
A hybrid integration Mach-Zehnder interference optical fiber microfluidic chip Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02042—Multicore optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02052—Optical fibres with cladding with or without a coating comprising optical elements other than gratings, e.g. filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
- G02B6/29352—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means in a light guide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0654—Lenses; Optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12159—Interferometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2821—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals
- G02B6/2835—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals formed or shaped by thermal treatment, e.g. couplers
- G02B2006/2839—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals formed or shaped by thermal treatment, e.g. couplers fabricated from double or twin core fibres
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention relates to a dual-core optical fiber microfluidic chip with a hybrid integration of
microfluidic channel and optical waveguide, which integrates microfluidic channel, evanescent
field for sensing and micro optical interferometer on one fiber, its characteristics are: (1) The
microfluidic chip contains one or more air holes as microfluidic channels and two fiber cores as
optical waveguide channels. (2) The microfluidic chip is heated at two ends or one end to
implement the tapering process, forming an optical Mach-Zehnder interferometer inside the
fiber. (3) The microfluidic channel of the fiber microfluidic chip has two microholes open
perpendicular to the surface of the fiber surface acting as the input and output channels for
microfluidics. The fiber hybrid integration microfluidic chip enables real-time monitoring and
online measurement of concentration, refractive index, chemical substances, etc. in fluid
substances.
1/3
DRAWINGS
~ 1-3
1-2
FIG. 1
24 2-6 2-7 2
2--2- 2
FIG. 2
3-4
3-3
3-1 3-2
FIG. 3
Description
1/3
~ 1-3
1-2
FIG. 1
24 2-6 2-7 2
2--2- 2
FIG. 2
3-4
3-3
3-1 3-2
FIG. 3
A hybrid integration Mach-Zehnder interference optical fiber microfluidic chip
[0001] The invention relates to a dual-core optical fiber microfluidic chip with a hybrid
integration of microfluidic channel and optical waveguide, which integrates microfluidic
channels, evanescent field for sensing and a micro optical interferometer on one fiber, and this
achieves real-time monitoring and online measurement of concentration, refractive index,
chemical substances, etc. in fluid substances, belongs to the field of optical fiber sensing
technology.
[0002] Microfluidics technology or Lab-on-a-chip refers to a system that uses micro-pipes (sizes
of tens to hundreds of micrometers) to process or manipulate tinyfluids (volumes ranging from
nanoliters to attoliter). After more than 20 years of development, microfluidic technology has
become an emerging interdisciplinary discipline involving chemistry, fluid physics, optics,
microelectronics, new materials, biology, and biomedical engineering. Due to the small sample
size and short detection optical path of the microfluidic chip, high-sensitivity, fast-responding,
and low power consumption optical detectors and new detection methods are essential for the
practical development of microfluidic technology.
[0003] Traditional optical fiber type microfluidic chips mainly include optical fiber microfluidic
electrophoresis chip [B. Su, et. al, Development of Optical Fiber Microfluidic Electrophoresis
Chip. Measurement and Control, 2005, 24(11): 5-8]. The chip is mainly composed of two parts:
multimode fiber, and PDMS substrate and cover sheet. It uses the double exposure technology to
make the die of the chip and make the electrophoresis chip by pouring; the chip achieves the
fabrication of microfluidic channels and optical fiber channels with different depths on PDMS so
that the optical fibers and microfluidic channels can be easily aligned.
[0004] There is also an embedded optical fiber microfluidic chip [YL. Jin, et. al, Fabrication of
an Embedded Optical Fiber Microfluidic Device Based on Excimer Laser Processing
Technology. Chinese Journal of Lasers, 2008, 35(11): 1821-1824], its fabricating method is to
use a 248 nm KrF excimer laser to micromachined on polydimethylsiloxane (PDMS) substrate,
to form the structure of the chip, and embed a corroded single-mode optical fiber of a diameter
[tm, thereby forming an embedded optical fiber chip.
[0005] The use of Micro-/Nanofiber (MNFs) as a typical one-dimensional micro-/nano optical
waveguide has the characteristics of low transmission loss, strong field confinement capability, a
large proportion of optical waveguide, and flexible operation. It has unique advantages in the
construction of miniaturized and high-sensitivity sensors. It has obvious advantages in short time
measurement. However, such measurement devices based on MNFs generally have the
disadvantages of being easily polluted and having a short service life. Typical MNFs sensing
structures include biconical MNFs, winding MNFs, MNFs grating, MNFs ring-shaped resonator,
MNFs Mach-Zehnder interferometer and surface functionalization or doped MNFs. The
physical, chemical, and biological sensors based on the refractive index, concentration, humidity,
temperature, strain, current, etc. of these structures have been extensively studied [X. Guo, Y
B. Ying, L. M. Tong, Photonicnanowires: from subwavelengthwaveguides to optical
sensors, Accounts of Chemical Research. 47, 2014, 656-666;L. Zhang, J. Lou,
L. Tong, Micro/nanofiber optical sensors, Photonic Sensors 1, 2010,31-42;J. Lou,
Y. Wang, L. Tong, Microfiber optical sensors: areview, Sensors14, 2014, 5823-5844].
[0006] The femtosecond laser-assisted processing method can also process a microfluidic channel parallel to the core in a single-mode optical fiber, thereby making a new type of optical fiber microfluidic device that can be applied to liquid refractive index sensing [X. Li, Femtosecond Laser Fabrication of Optical Fiber Microfluidic Device and Liquid Refractive Index Sensing. Harbin Institute of Technology, 2013; H. H. Sun, Femtosecond Laser Preparation and Temperature-salt Sensing Characteristics of Mach-Zehnder Interferometric Microcavity in Optical Fiber. Harbin Institute of Technology, 2015]. This microfluidic device has the characteristics of a high-temperature resistance, the liquid flows inside the microfluidic channel, avoiding the measured liquid from contacting the outside world, and has a strong anti interference ability.
[0007] Another method is directly using the hollow optical channel of the hollow photonic crystal optical fiber as the microfluidic channel [C. Jiang. Femtosecond Laser Pulse Precision Fabrication of Microfluidic Fiber Device and Its Applications. Laser Journal, 2009, 30(5): 6-8]. The working principle of this microfluidic measuring device is based on the interaction of the optical field transmitted in the optical fiber directly interacting with the microfluidic substance, thereby changing the characteristics of the optical wave in the optical fiber. That is to say, the basis of the microfluidic device lies in the effective overlap between the optical field and the channel fluid. When the waveguide optic and the microfluidic substance are confined in a physical space at the same time, the interaction between the optic and the fluid substance can be optimized, which can shorten the interaction length as much as possible while obtaining a large dynamic response.
[0008] In fact, most MNFs sensors place MNFs in the air or a large flow cell. MNFs are easily affected by environmental factors, and the surface is easily polluted, which seriously affects the stability of MNFs sensors. Embedding MNFs in low refractive index material (for example, Telflon AF) [N. Lou, et.al, Embedded optical micro/nano-fibers for stable devices, Optics Letters, 35, 2010, 571-573;. R.Lorenzi, Y. Jung, G.Brambilla, In-line absorption sensor based on coiled optical microfiber, Applied Physics Letters 98, 2011, 173504], is an effective method to improve the stability of MNFs sensor. However, the encapsulation of low-refractive-index materials will reduce the interaction between the optical waveguide of the MNFs and the substance to be measured, and reduce the sensitivity of the MNFs sensing.
[0009] Whether it is a high-precision sensing detection of various physical, chemical, and
biological parameters, or a high-performance all-optical control device, it is necessary to rely on
the efficient interaction of optics and substances to form full information exchange between
optical wave information and substances, and environmental characteristics. So as to achieve the
purposes of improving sensor detection accuracy, enhancing function integration, and improving
device performance. The same is true for micro-structured optical fiber devices based on the
interaction of optic and substances.
[0010] In order to increase channel integration, reliability and make it easier to process and
produce in manufacturing, as well as to overcome the shortcomings and deficiencies of above
advanced technology, the invention proposes an integrated optical fiber microfluidic chip that
prepares the microfluidic channel in the optical fiber. The advantages of the microfluidic chip is
that it facilitates optical connection, avoids optical alignment and adjustment in the case of
separation, has good consistency, and is suitable for large-scale mass production. In the operation
of micro-scale tinyliquid, it provides excellent research and application platforms for low sample
consumption, high-throughput chemistry, biology, and pharmaceutical analysis detection. This
also provides microfluidic chips a convenient technical means for the control of high-throughput
analysis and detection in the fields of chemistry, biology, medicine, etc.
[0011] The invention aims to provide a dual-core optical fiber microfluidic chip integrating
microfluidic channels, optical channels and a micro optical interferometer on an optical fiber, which achieves real-time monitoring and online measurement of concentration, refractive index, chemical substances, etc. in fluid substances.
[0012] The purpose of the invention is achieved as follows:
[0013] The invention disclose a dual-core optical fiber microfluidic chip integrating microfluidic
channels, optical channels and a micro optical interferometer on an optical fiber. This can
achieve real-time monitoring and online measurement of concentration, refractive index,
chemical substances, etc. in fluid substances. Its main characteristics are:
[0014] (1) The microfluidic chip contains one or more air holes 1-1 as microfluidic channels and
two fiber cores 1-2 and 1-3 as optical waveguide channels, the core 1-2 is adjacent to the
microfluidic channel so that the evanescent field of the optical wave in the core 1-2 interacts
with the microfluidics; the core 1-3 is far away from the microfluidic channel and can be used as
a reference or contrast channel for the optical wave, as shown in FIG. 1.
[0015] (2) The microfluidic chip is heated at two ends to implement the melt-tapering process,
forming two couplers 2-4 and 2-5 in the fiber, which then forms an optical Mach-Zehnder
interferometer inside the fiber. The core 2-2 adjacent to the microfluidic channel 2-1 is the
measurement arm of the interferometer and the core 2-3 away from the microfluidic channel is
the reference arm of the interferometer. The microfluidic channel of the fiber microfluidic chip
has two microholes open perpendicular to the surface of the fiber surface acting as the input
channel 2-6 and the output channel 2-7 for microfluidics, as shown in FIG. 2.
[0016] (3) In order to further expand the structure of the dual-core fiber microfluidic chip
integrated with microfluidic channels and optical wave channels, the invention also discloses the following possible various fiber structures and various fiber microfluidic chips which are achieved by integration based on the fibers of various structures.
[017] FIG. 3 shows a dual-core fiber with two symmetrical air holes 3-1 and 3-2. The fiber has two cores, the core 3-3 is located in the center of the optical fiber, and adjacent to two air holes that are acting as the microfluidic channels. The other core 3-4 is away from the two microfluidic channel holes.
[018] Based on the twin-hole dual-core fiber shown in FIG. 3, the structure of the dual-core optical fiber microfluidic chip, in which the microfluidic channels and the optical wave channels are integrated, can be further formed. Since the optical fiber has two microfluidic channel holes, the measurement of two microfluidic substances can be achieved simultaneously. FIG. 4 shows the Mach-Zehnder interferometer structure based on twin-hole dual-core fibers. The preparation method is the same as the preparation process of the single-hole dual-core optical fiber microfluidic chip.
[019] In order to enhance the effectiveness of the interaction between the evanescent field and the microfluidic substances, and enlarge the interface area between the optical waveguide and the microfluidic substances, FIG. 5 shows a dual-core optical fiber that encloses the circular shaped optical waveguide around the microfluidic channel. This optical fiber has two cores, one core is located on the inner wall of the center air hole, forming an annular shaped waveguide layer core -1, which encloses the air hole 5-2 located at the center of the fiber, this air-hole acts as a microfluidic channel; the other core 5-3 is far from the microfluidic channel hole, as shown in FIG. 5.
[020] Similarly, based on this dual-core fiber that encloses the circular shaped optical waveguide in the microfluidic channel as shown in FIG. 5, it can also constitute two types of optic structures of the dual-core fiber microfluidic chip that integrates a microfluidic channels and optical wave channels structure. FIG. 6 shows the structure of the Mach-Zehnder interferometer based on a dual-core fiber that encloses the circular shaped optical waveguide in the microfluidic channel.
The preparation method is the same as the preparation process of the single-hole dual-core
optical fiber microfluidic chip.
[021] If this part of the circular shaped optical waveguide enclosing the microfluidic channel is
moved out of the center of the optical fiber, and a common fiber core is placed in the center of
the optical fiber, we can further construct another type of dual-core optical fiber that has a
microfluidic channel enclosed by annular shaped waveguide, as shown in FIG. 7. This optical
fiber is a dual-core optical fiber with an annular core 7-1 enclosing the microfluidic channel
hole. This fiber has two cores, one core 7-2 is located in the center of the optical fiber, and the
other core is located on the inner wall of the air hole away from the center, they constitute
annular shaped waveguide layer core. The core encloses the air hole 7-3, which serves as a
microfluidic channel. Similarly, FIG. 8 shows the structure of a Mach-Zehnder interferometer
based on the dual-core fiber that has an annular shaped waveguide enclosing the microfluidic
channel shown in FIG. 7. The preparation method is the same as the preparation process of the
single-hole dual-core optical fiber microfluidic chip.
[022] As claimed in claim 1, a dual-core optical fiber microfluidic chip with a hybrid integration
of microfluidic channel and optical waveguide, during use of the fiber microfluidic chip, its
characteristics are: the fiber microfluidic chip has an optical structure of the Mach-Zehnder
interferometer. One end of the interferometer is connected to the light source 9-1, the other end is
connected to the spectrometer 9-2 to each other. The material channel of thefiber microfluidic
chip is connected to the external liquid injection pump 9-3, and the discharged liquid is
connected to the waste disposal 9-4 to form application measurement system of the chip, as
shown in FIG. 9.
[023] FIG. 1 is a cross-sectional view of a dual-core fiber having microfluidic channel holes.
[024] FIG. 2 is a structural schematic diagram of a dual-core fiber microfluidic chip with a microfluidic channel hole.
[025] FIG. 3 is a structural schematic diagram of a cross-section of a dual-core fiber with two symmetrical air holes 3-1 and 3-2.
[026] FIG. 4 is a structural schematic diagram of a microfluidic chip of a Mach-Zehnder interferometer based on a twin-hole dual-core fiber.
[027] FIG. 5 is a structural schematic diagram of a cross-section of a dual-core fiber that encloses microfluidic channels with a circular shaped optical waveguide.
[028] FIG. 6 is a structural schematic diagram of the microfluidic chip of a Mach-Zehnder interferometer based on a dual-core fiber that encloses microfluidic channels with a circular shaped optical waveguide.
[029] FIG. 7 is a structural schematic diagram of a cross-section of a dual-core fiber that encloses microfluidic channels with a circular shaped optical waveguide.
[030] FIG. 8 is a structural schematic view of a microfluidic chip of a Mach-Zehnder interferometer based on a dual-core optical fiber that encloses microfluidic channels with a circular shaped optical waveguide shown in FIG. 7.
[031] FIG. 9 is a schematic diagram of an application measurement system of a fiber microfluidic chip with a Mach-Zehnder interferometer optical structure inside.
[032] The invention will be further described below in conjunction with specific embodiments.
[033] Without loss of generality, we use the single-hole dual-core fiber shown in FIG. 1 as the fiber microfluidic chip to be the specific embodiment to elaborate on specific implementation steps and implementation methods of the invention.
[034] (1) First, take a section of the single-hole dual-core optical fiber shown in FIG. 1, remove the cladding for use;
[035] (2) Then, under the microscope, use a femtosecond laser to make two microfluidic holes on the side of the microfluidic hole near the fiber surface, acting as the inlet for the microfluidic substance to be tested to go in and out of the microfluidic channel of the optical fiber and also act as the liquid outlet;
[036] (3) Next, with the aid of a fiber taper machine, melt-heat-taper near the outside of the two microfluidic channel holes, this would form the core part of an fiber microfluidic chip with a Mach-Zehnder interferometer optical structure;
[037] (4) For convenient connection with external optical sources and spectrometers, the optical fiber microfluidic chip also needs to be welded with standard optical fibers with movable connectors at both ends, and get packaged after welding;
[038] (5) Finally, two microfluid connectors are used to connect and seal the two microfluid inlets and outlets on the fiber microfluidic chip, and the preparation of thefiber microfluidic chip is completed.
[039] This fiber microfluidic chip integrates microfluidic channels, evanescent field for sensing and a micro optical interferometer on one optical fiber, which can achieve the real-time monitoring and online measuring of the concentration, refractive index, chemical substances, etc. in fluid substances.
Claims (5)
1. A dual-core optical fiber microfluidic chip with a hybrid integration of microfluidic channel and optical waveguide, which integrates microfluidic channel, evanescent field for sensing and micro optical interferometer on one fiber, and this achieves real-time monitoring and online measurement of concentration, refractive index, chemical substances, etc. in fluid substances. Its main characteristics are: (1) The microfluidic chip contains one or more air holes 1-1 as microfluidic channels and two fiber cores 1-2 and 1-3 as optical waveguide channels, the core 1-2 is adjacent to the microfluidic channel so that the evanescent field of the optical wave in the core 1-2 interacts with the microfluidics; the core 1-3 is far away from the microfluidic channel and can be used as a reference or contrast channel for the optical wave, as shown in FIG. 1. (2) The microfluidic chip is heated at two ends to implement the melt-tapering process, forming two couplers 2-4 and 2-5 in thefiber, which then forms an optical Mach-Zehnder interferometer inside the fiber. The core 2-2 adjacent to the microfluidic channel 2-1 is the measurement arm of the interferometer and the core 2-3 away from the microfluidic channel is the reference arm of the interferometer, as shown in FIG. 2. (3) The microfluidic channel of the fiber microfluidic chip has two microholes open perpendicular to the surface of the fiber surface acting as the input channel 2-6 and the output channel 2-7 for microfluidics.
2. As claimed in claim 1, a dual-core optical fiber microfluidic chip with a hybrid integration of microfluidic channel and optical waveguide, its characteristics are: the fiber is a dual-core fiber having two symmetrical air holes 3-1 and 3-2, such fiber has two cores, the core 3-3 is located in the center of the fiber and is adjacent to two air holes which act as microfluidic channels, and the other core 3-4 is away from the two microfluidic channel holes, as shown in FIG. 3.
3. As claimed in claim 1, a dual-core optical fiber microfluidic chip with a hybrid integration of microfluidic channel and optical waveguide, its characteristics are: the optical fiber described is a dual-core fiber with an annular core 5-1 enclosing a microfluidic channel hole, such fiber has two cores, one of which is located in the inner wall of the center air hole and forms a circular waveguide core that encloses an air hole 5-2 located in the center of the optical fiber, the air hole serves as a microfluidic channel; the other core 5-3 is located away from the microfluidic channel hole, as shown in FIG. 5.
4. As claimed in claim 1, a dual-core optical fiber microfluidic chip with a hybrid integration
of microfluidic channel and optical waveguide, its characteristics are: the fiber is a dual-core
optical fiber with an annular core 7-1 enclosing a microfluidic channel hole, such fiber has two
cores, one core 7-2 is located in the center of the optical fiber and the other core is located in the
inner wall of the air hole away from the center, forming a circular waveguide core, which
encloses the air hole 7-3, which acts as a microfluidic channel, as shown in FIG. 7.
5. As claimed in claim 1, a dual-core optical fiber microfluidic chip with a hybrid integration
of microfluidic channel and optical waveguide, its characteristics are: the inside of the fiber
microfluidic chip has an optical structure of Mach-Zehnder interferometer, one end of the
interferometer is connected to the light source 9-1 and the other end is connected to the
spectrometer 9-2, the material channel of the fiber microfluidic chip is connected to the external
liquid injection pump 9-3, and the discharged liquid is connected to the waste disposal 9-4,
forming the application measurement system of the chip, as shown in FIG. 9.
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Cited By (2)
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2020
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CN112432912A (en) * | 2020-11-19 | 2021-03-02 | 哈尔滨理工大学 | Optical fiber ultraviolet sensing device based on interference array and implementation method |
CN112432912B (en) * | 2020-11-19 | 2021-09-24 | 哈尔滨理工大学 | Optical fiber ultraviolet sensing device based on interference array and implementation method |
CN115436323A (en) * | 2022-09-30 | 2022-12-06 | 哈尔滨工程大学 | Moisture sensor based on spider silk and micro-nano optical fiber and manufacturing method thereof |
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