CN109752788A - Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip - Google Patents
Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip Download PDFInfo
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- CN109752788A CN109752788A CN201711070166.0A CN201711070166A CN109752788A CN 109752788 A CN109752788 A CN 109752788A CN 201711070166 A CN201711070166 A CN 201711070166A CN 109752788 A CN109752788 A CN 109752788A
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Abstract
The present invention relates to the twin-core fiber micro flow chips of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated on an optical fiber, it is mainly characterized by comprising: that (one) the optical fiber micro flow chip includes one or more airports as miniflow substance channel, also comprising two fibre cores as Light guiding channel, one of fibre core and miniflow substance channel close to, so that the evanscent field of light wave interacts with miniflow substance, another fibre core is far from miniflow substance channel, it can be used as reference or the comparison channel of light wave；(2) method that the both ends or one end of the optical fiber micro flow chip pass through heating respectively, which implements, draws cone processing, to constitute an optics Mach-Zehnder interferometer in inside of optical fibre, the measurement arm of interferometer is constituted with the adjacent fibre core of miniflow substance channel, and the fibre core far from miniflow substance channel then constitutes the reference arm of interferometer；(3) the miniflow substance channel both ends of the optical fiber micro flow chip are opened perpendicular to optical fiber surface there are two micropore, output and input channel as miniflow substance.The fiber mix, which integrates micro flow chip, can realize the real-time monitoring and on-line measurement of concentration, refractive index, chemical substance in flowing material etc..
Description
(1) technical field
The present invention relates to the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this
Kind of optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in an optical fiber
It is upper, it can be achieved that concentration, refractive index, chemical substance in flowing material etc. real-time monitoring and on-line measurement, belong to Fibre Optical Sensor
Technical field.
(2) background technique
Microflow control technique (Microfluidics or Lab-on-a-chip) refers to (arriving having a size of tens of using microchannel
Hundreds of microns) processing or manipulation minute fluid (volume be nanoliter arrive A Sheng) system.Microflow control technique is by more than two decades
Development, has become one and is related to chemistry, fluid physics, optics, microelectronics, new material, biology and biomedical engineering
Emerging cross discipline.Since the sample volume in micro-fluidic chip is small, detection light path is short, and high sensitivity, response time be fast, power consumption
Low fluorescence detector and novel detection method develops microflow control technique to functionization most important.
Traditional optical-fiber type micro flow chip mainly has optical-fiber type micro-fluidic electrophoresis chip [Su Bo etc., the micro-fluidic electricity of optical-fiber type
The development observation and control technology of swimming chip, 2005,24 (11): 5-8], which mainly consists of two parts: multimode fibre, PDMS base
Piece and cover plate.The mold of chip is produced using re-expose technology；Electrophoresis chip is made by the method for casting；The chip is real
Show and made depth different microfluidic channel and optical fiber channel on PDMS, has kept optical fiber easily right with microfluidic channel
It is quasi-.
Another kind is optical fiber built-in type micro-fluidic chip [embedded light of the such as Jin Yonglong based on excimer laser process technology
The preparation Chinese laser of fine type micro-fluidic device, 2008,35 (11): 1821-1824], preparation method utilizes 248nm
KrF excimer laser carries out micro Process on polymethyl methacrylate (PMMA) substrate, constructs chip structure, and be embedded in corrosion
The single mode optical fiber of 35 μm of the diameter crossed, to form optical fiber built-in cake core.
Using micro-nano fiber as a kind of typical one-dimensional micro-nano optical waveguide, have low transmission loss, high field restriction ability,
Evanescent field large proportion, can the characteristics such as flexible operating, there is unique advantage in terms of building miniaturization, high sensor.
There is clear advantage in terms of short time measurement.But this measuring device based on micro-nano fiber is generally existing to be easy to dirty
The short deficiency of dye, service life.Typical micro-nano fiber sensing arrangement include biconial micro-nano fiber, winding-type micro-nano fiber,
Micro-nano fiber grating, micro-nano fiber ring shape resonator, micro-nano fiber Mach-Zehnder interferometer and it is surface-functionalized or
Inside doping micro-nano fiber, physics, chemistry, the lifes such as refractive index, concentration, humidity, temperature, strain, electric current based on these structures
Object sensor obtains extensive research [X.Guo, Y-B.Ying, L.M.Tong, Photonic nanowires:from
Subwavelength waveguides to optical sensors, Accounts of Chemical Research.47,
2014,656-666；L.Zhang, J.Lou, L.Tong, Micro/nanofiber optical sensors, Photonic
Sensors 1,2010,31-42；J.Lou, Y.Wang, L.Tong, Microfiber optical sensors:a review,
Sensors 14,2014,5823-5844].
The miniflow for being parallel to fibre core can also be processed in single mode optical fiber using the method for femtosecond laser water secondary process
Channel, so that a kind of novel optical fiber microfluidic device [Li Xiang optical fiber miniflow that can be applied to liquid refractivity sensing be made
The femtosecond laser of body device prepares and liquid refractivity sensing Harbin Institute of Technology, and 2013；Sun Huihui optical fiber Nei Maheze
The femtosecond laser that Deccan relates to microcavity prepares and thermohaline sensing characteristics Harbin Institute of Technology, and 2015], this microfluidic device tool
There is high temperature resistant, liquid avoids fluid to be measured from contacting with the external world in microchannel internal flow, has very strong anti-interference ability.
Another method is directly using the hollow optical channel of hollow photonic crystal fiber as miniflow substance channel.
[Jiang Chao femto-second laser pulse precision makes miniflow optical fibre device and its applies laser magazine, 2009,30 (5): 6-8.] is this
The working principle of miniflow measurement device be based on the light field transmitted in optical fiber directly with miniflow matter interaction, to change light
The characteristic of light wave in fibre.That is the basis of miniflow optical device is effective overlapping between light field and channel fluid.When
When Waveguide and miniflow substance are limited in a physical space simultaneously, the interaction of light and flowing material can be best
Change, is that can shorten interaction length as far as possible while obtaining larger dynamic response.
In fact, micro-nano fiber is placed in air or in big flow cell by micro-nano fiber sensor mostly, micro-nano light
Fibre is easy to be effected by environmental factors, and surface is easy to be contaminated, and has seriously affected the stability of micro-nano fiber sensor.It will be micro-
Nano fiber is embedded in low-index material (for example, TelflonAF) [N.Lou, et.al, Embedded optical
micro/nano-fibers for stable devices,Optics Letters,35,2010,571-573；
.R.Lorenzi, Y.Jung, G.Brambilla, In-line absorption sensor based on coiled
Optical microfiber, Applied Physics Letters 98,2011,173504], it is to improve micro-nano fiber sensing
The effective ways of device stability.However the package of low-index material can reduce micro-nano fiber periphery evanscent field and test substance
Interaction reduces the sensitivity of micro-nano fiber sensing.
Either various physics, chemistry, the high-precision sensing detection of biological parameter or high performance full light modulator
Part requires the efficient interaction by light and substance, to form the light-wave information information mutual with substance, environmental characteristic
Sufficiently exchange, to achieve the purpose that raising sensing detection precision, enhancing function are integrated, improve device performance.Based on light and object
The microstructure fiber device of matter interaction is also such.
In order to improve channel integrated level, reliability and the processing and manufacturing for being easier to production, overcome in above-mentioned first technology
Miniflow substance channel is directly made hybrid integrated optical fiber miniflow core in a fiber The present invention gives a kind of by shortcoming and defect
Piece.The advantages of micro flow chip is that it avoids the optical alignment in the case of separating and adjusting, consistency convenient for optics connection
Well, it is suitable for scale mass production.Micro-meter scale operate micro liquid, be low consumption sample amount, high throughput chemical, biology,
Medicine analysis detection provides excellent research and application platform, is that microflow control technique is high-throughput in chemistry, biology, medicine and other fields
The control of analysis and detection provides a kind of convenient and fast technological means.
Summary of the invention
The purpose of the present invention is to provide the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated,
This optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in a light
On fibre.The fiber mix, which integrates micro flow chip, can realize the real-time monitoring of concentration, refractive index, chemical substance in flowing material etc.
With on-line measurement.
The object of the present invention is achieved like this:
The invention discloses the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber
Micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated on an optical fiber, can be real
The real-time monitoring and on-line measurement of concentration, refractive index, chemical substance in existing flowing material etc., are mainly characterized by comprising:
(1) the optical fiber micro flow chip includes one or more airport 1-1 as miniflow substance channel, also includes two fibres
Core 1-2 and 1-3 is as Light guiding channel, and fibre core 1-2 and miniflow substance channel are close to so as to the evanscent field of light wave in fibre core 1-2
It interacts with miniflow substance, fibre core 1-3 can be used as reference or the comparison channel of light wave, such as far from miniflow substance channel
Shown in Fig. 1.
(2) method that the both ends of the optical fiber micro flow chip pass through heating respectively implements fused biconical taper processing, forms two light
Coupler 2-4 and 2-5 in fibre, so that an optics Mach-Zehnder interferometer is constituted in inside of optical fibre, with miniflow object
2-1 adjacent fibre core 2-2 in matter channel constitutes the measurement arm of interferometer, and the fibre core 2-3 far from miniflow substance channel is constituted
The miniflow substance channel both ends of the reference arm of interferometer, the optical fiber micro flow chip are opened perpendicular to optical fiber surface there are two micropore, are made
For the input channel 2-6 and output channel 2-7 of miniflow substance, as shown in Figure 2.
(3) in order to further expand the twin-core fiber micro flow chip of this miniflow substance channel and light wave channel hybrid integrated
Structure.The invention also discloses following possible a variety of optical fiber structures and its on the fiber basis of various structures, integrated
And a variety of optical fiber micro flow chips realized.
What Fig. 3 was provided is a kind of twin-core fiber with symmetrical two airports 3-1 and 3-2, and there are two fine for this optical fiber tool
Core, one is located at fiber optic hub 3-3, close to two airports as miniflow substance channel；Another fibre core 3-4 is far from two
Miniflow substance channel hole.
Based on this double-hole double-cylinder optical fiber shown in Fig. 3, miniflow substance channel and light wave channel similarly can be further constituted
The structure of the twin-core fiber micro flow chip of hybrid integrated.Since there are two miniflow substance channel holes for optical fiber tool, thus can be same
The measurement of two kinds of miniflow substances of Shi Shixian.Fig. 4 gives the Mach-Zehnder interferometer structure based on double-hole double-cylinder optical fiber.Its
Preparation method is identical as the preparation process of single hole twin-core fiber micro flow chip.
In order to enhance the evanscent field of light and the validity of miniflow matter interaction, expand the interface of optical waveguide and miniflow substance
Product, Fig. 5 give it is a kind of ring optical waveguide is wrapped the twin-core fiber of miniflow substance channel, this optical fiber tool there are two fibre core,
One fibre core is located at the inner wall in center air hole, constitutes annular waveguide layer fibre core 5-1, which, which wraps, is located at fiber optic hub
Airport 5-2, the airport is as miniflow substance channel；Another fibre core 5-3 is far from miniflow substance channel hole, such as Fig. 5 institute
Show.
It is similar, based on it is shown in fig. 5 it is this ring optical waveguide is wrapped the twin-core fiber of miniflow substance channel, similarly can be with
Constitute two kinds of optical textures of the twin-core fiber micro flow chip of miniflow substance channel and light wave channel hybrid integrated.Fig. 6 gives
It is wrapped the Mach-Zehnder interferometer structure of the twin-core fiber of miniflow substance channel based on ring optical waveguide.Preparation method with
The preparation process of single hole twin-core fiber micro flow chip is identical.
If by ring optical waveguide wrap miniflow substance channel this part remove fiber optic hub, and in a fiber the heart place one
Common fibre core, we can further construct another ring optical waveguide and wrap the twin-core fiber of miniflow substance channel, such as
Shown in Fig. 7.This optical fiber is that annular fibre core 7-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core 7-2 is located at the center of optical fiber, and another fibre core is in the inner wall of deep airport, constitutes
Annular waveguide layer fibre core, the fibre core are wrapped airport 7-3, and the airport is as miniflow substance channel.Similar, Fig. 8 is provided
It is wrapped the Mach-Zehnder interferometer structure of the twin-core fiber of miniflow substance channel based on ring optical waveguide shown in Fig. 7.
Preparation method is identical as the preparation process of single hole twin-core fiber micro flow chip.
The twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated, it is this
Optical fiber micro flow chip in use, it is characterized in that: having Mach-Zehnder interference inside the described optical fiber micro flow chip
One end of the optical texture of instrument, interferometer is connected with light source 9-1, and the other end is connected with spectrometer 9-2, the optical fiber micro flow chip
Substance channel is connected with external liquid infusion pump 9-3, and the liquid being discharged then is connected with waste liquid pool 9-4, constitutes chip
Using measuring system, as shown in Figure 9.
Detailed description of the invention
Fig. 1 is the cross-sectional view with the twin-core fiber in miniflow substance channel hole.
Fig. 2 is the structural schematic diagram of the twin-core fiber micro flow chip with a miniflow substance channel hole.
Fig. 3 is a kind of cross-sectional configuration schematic diagram of twin-core fiber with symmetrical two airports 3-1 and 3-2.
Fig. 4 is the Mach-Zehnder interferometer micro flow chip structural schematic diagram based on double-hole double-cylinder optical fiber.
Fig. 5 be a kind of ring optical waveguide wrap miniflow substance channel twin-core fiber cross-sectional configuration schematic diagram.
Fig. 6 be wrapped based on ring optical waveguide miniflow substance channel twin-core fiber Mach-Zehnder interferometer micro flow chip
Structural schematic diagram.
Fig. 7 be a kind of ring optical waveguide wrap miniflow substance channel twin-core fiber cross-sectional configuration schematic diagram.
Fig. 8 be wrapped based on ring optical waveguide shown in Fig. 7 miniflow substance channel twin-core fiber Mach-Zehnder interference
Instrument micro flow chip structural schematic diagram.
Fig. 9 is the application test systems structure of the optical fiber micro flow chip of the internal optical texture with Mach-Zehnder interferometer
Schematic diagram.
Specific embodiment
Below with reference to specific embodiment, the present invention is further explained.
Without loss of generality, we come detailed using single hole twin-core fiber shown in FIG. 1 as the specific embodiment of optical fiber micro flow chip
Illustrate specific implementation step and implementation method of the invention.
(1) firstly, taking one section of single hole twin-core fiber shown in FIG. 1, removal covering is stand-by；
(2) then, two miniflow apertures under the microscope, are made a call in the close optical fiber surface side in miniflow hole using femto-second laser,
Inlet port and liquid outlet as miniflow substance to be measured disengaging optical fiber microchannel；
(3) next, carrying out melting heating and real respectively in the outside close to two microchannel holes by means of optical fiber to draw cone machining
Drawing cone is applied, the core of optical fiber micro flow chip of the inside with Mach-Zehnder interferometer optics structure is just constituted
Point；
(4) for convenience be attached with external light source and spectrometer, the optical fiber micro flow chip also need its both ends with have
The standard fiber of flexible jumper is welded, and the packaging protection after being welded；
(5) finally, being attached with two microfluidic liquid connectors and two microfluidic liquids on optical fiber micro flow chip
With sealing, the preparation of the optical fiber micro flow chip is just completed.
This optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in one
, it can be achieved that the real-time monitoring and on-line measurement of concentration, refractive index, chemical substance in flowing material etc. on root optical fiber.
Claims (5)
1. the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber micro flow chip are
It by miniflow substance channel and suddenly dies and senses light field and micro-optical interferometer is integrated on an optical fiber, it can be achieved that flowing material
In concentration, refractive index, chemical substance etc. real-time monitoring and on-line measurement, be mainly characterized by comprising: (one) described optical fiber miniflow
Chip includes one or more airport 1-1 as miniflow substance channel, also comprising two fibre cores 1-2 and 1-3 as optical waveguide
Channel, fibre core 1-2 and miniflow substance channel are close to so that with miniflow substance phase interaction occurs for the evanscent field of light wave in fibre core 1-2
With fibre core 1-3 can be used as reference or the comparison channel of light wave, as shown in Figure 1 far from miniflow substance channel；(2) optical fiber is micro-
The method that the both ends of stream chip pass through heating respectively implements fused biconical taper processing, forms the coupler 2-4 in two optical fiber
And 2-5, so that an optics Mach-Zehnder interferometer is constituted in inside of optical fibre, it is adjacent with miniflow substance channel 2-1
Fibre core 2-2 constitutes the measurement arm of interferometer, and the fibre core 2-3 far from miniflow substance channel constitutes the reference arm of interferometer,
As shown in Figure 2；(3) the miniflow substance channel both ends of the optical fiber micro flow chip are opened perpendicular to optical fiber surface there are two micropore, as
The input channel 2-6 and output channel 2-7 of miniflow substance.
2. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is the twin-core fiber with symmetrical two airports 3-1 and 3-2, and there are two fine for this optical fiber tool
Core, one is located at fiber optic hub 3-3, close to two airports as miniflow substance channel；Another fibre core 3-4 is far from two
Miniflow substance channel hole, as shown in Figure 3.
3. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is that annular fibre core 5-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core are located at the inner wall in center air hole, constitute annular waveguide layer fibre core, which, which wraps, is located in optical fiber
The airport 5-2 of the heart, the airport is as miniflow substance channel；Another fibre core 5-3 is far from miniflow substance channel hole, such as Fig. 5
It is shown.
4. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is that annular fibre core 7-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core 7-2 is located at the center of optical fiber, and another fibre core is in the inner wall of deep airport, constitutes
Annular waveguide layer fibre core, the fibre core are wrapped airport 7-3, and the airport is as miniflow substance channel, as shown in Figure 7.
5. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: there is the optical texture of Mach-Zehnder interferometer inside the described optical fiber micro flow chip, one end of interferometer with
Light source 9-1 is connected, and the other end is connected with spectrometer 9-2, the substance channel of the optical fiber micro flow chip and external liquid infusion pump
9-3 is connected, and the liquid being discharged then is connected with waste liquid pool 9-4, constitutes the application measuring system of chip, as shown in Figure 9.
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Cited By (8)
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| CN110879487A (en) * | 2019-10-29 | 2020-03-13 | 桂林电子科技大学 | Tunable optical fiber filter based on hole-assisted optical fiber |
| CN110954239A (en) * | 2019-10-29 | 2020-04-03 | 桂林电子科技大学 | Temperature sensor based on double-core single-hole optical fiber |
| CN111637034A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photo-thermal micro-thruster based on annular core capillary optical fiber |
| CN111637031A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photothermal booster based on porous optical fiber |
| CN112295622A (en) * | 2020-10-26 | 2021-02-02 | 武汉理工大学 | Integrated chip for total phosphorus digestion and real-time online detection based on optical flow control technology |
| CN112393750A (en) * | 2019-08-19 | 2021-02-23 | 聊城大学 | Optical parameter sensing and modulating system |
| CN112747778A (en) * | 2019-10-29 | 2021-05-04 | 桂林电子科技大学 | Adjustable Mach-Zehnder interferometer based on thermo-optic effect |
| CN113740587A (en) * | 2021-08-30 | 2021-12-03 | 国网陕西省电力公司电力科学研究院 | VFTO sensor and preparation method and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112393750A (en) * | 2019-08-19 | 2021-02-23 | 聊城大学 | Optical parameter sensing and modulating system |
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| CN110954239A (en) * | 2019-10-29 | 2020-04-03 | 桂林电子科技大学 | Temperature sensor based on double-core single-hole optical fiber |
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| CN111637031A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photothermal booster based on porous optical fiber |
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| CN113740587A (en) * | 2021-08-30 | 2021-12-03 | 国网陕西省电力公司电力科学研究院 | VFTO sensor and preparation method and application thereof |
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