CN105583014A - Photon microflow detection chip based on LTCC integration - Google Patents
Photon microflow detection chip based on LTCC integration Download PDFInfo
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- CN105583014A CN105583014A CN201510956601.4A CN201510956601A CN105583014A CN 105583014 A CN105583014 A CN 105583014A CN 201510956601 A CN201510956601 A CN 201510956601A CN 105583014 A CN105583014 A CN 105583014A
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
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- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The invention discloses a photon microflow detection chip based on LTCC integration, and belongs to the field of microsystem sensing detection. The chip integrates a micro light source, an optical fiber system, a photon sensing system, a detector chip, a signal processing chip and a temperature control board on an LTCC monolithic substrate, wherein a microflow channel and the optical fiber system are manufactured in the substrate, and therefore sensing of photons in the monolithic microflow system is achieved. The photon microflow detection chip has the advantages that integrated manufacturing of the optical fiber system and the photon sensing system can be more conveniently achieved in the LTCC substrate; parts such as the light source, the detector and the signal processor which are needed by the detection chip can be integrated on the LTCC substrate through a standard microassembly technology; controllable manufacturing of the microflow detection channel needed by the detection chip on the LTCC substrate can be conveniently achieved; LTCC has the good anti-corrosion characteristic and the high-temperature characteristic and can support the chip to be applied to a severe environment.
Description
Technical field
The invention belongs to micro-system sensory field, particularly a kind of at LTCC (LTCC)On substrate, realize photon miniflow detection chip.
Technical background
Optical detecting method refers to applies photon as signal vehicle physical quantity to external world in functional structureCarry out the method for sensing. There is little, the anti-electromagnetic interference of loss compared with conditional electronic sensingThe advantages such as performance is strong. Therefore, the detection technique based on photon sensing all obtains in academia and industrial circleExtensive concern.
Microfluidic sensing chip can be realized the quick sensing of material on very little chip. Its chip entiretyBe of a size of a centimetre magnitude, the network of fluid passages of chip internal is micron dimension. Should in sensing and detectionWith in, large, dangerous high than reagent consumption in macroscopic view experiment, pollute the shortcomings such as many, micro-fluidicIt is few that sensing chip has reagent dosage, and cost is low, safe, environmental protection, highly sensitive, chip chiVery little little, integrated level advantages of higher, makes " microfluidic sensing chip " become the master of " laboratory on sheet " researchWant aspect. Wherein, the basic material of micro-fluidic structure and structure manufacture are microfluidic sensing chip researchIn first need solve key issue.
Photon detection technology is combined with microflow control technique, can build photon miniflow detection chip, noOnly merge both advantages, also greatly expanded application, there is huge application potential.
At present, the manufactured materials of micro-fluidic chip mainly contains the inorganic material such as silicon chip, glass and quartzAnd the macromolecule organic material such as PMMA, PC and PDMS. Macromolecular material light transmission better,Low price, manufacturing technology are relatively simple. But the thermodynamic behaviour of macromolecular material is poor, limitMade the environment for use of fluidic chip, and its manufacturing technology is difficult for realizing once integrated with ECUManufacture, also need the auxiliary process manufactures such as bonding. The inorganic material corrosion resistants such as silicon chip, glass and quartzErosion, is the good material of micro-fluidic chip, but their manufacturing technology more complicated, microchannel chiVery little being difficult to controlled, more difficult and cost is higher with the bonding of other system, is difficult for batch production. CauseThis, attempting other materials, to carry out the controlled manufacture of low cost of micro-fluidic chip significant.
LTCC (LTCC), by multilayer standard thickness, (approximately 100 μ ceramic chips m) laminatesAfter integral, burn and form altogether through low temperature (850 DEG C). In recent years, along with retrofit technology and first systemThe development of manufacturing apparatus, can on LTCC individual layer ceramic chips, manufacture cavity that width dimensions is 50 μ m andIts channel design. Be laminated among ltcc substrate by the ceramic chips of these having been manufactured to channel design,
Mode by " laying bricks " just can realize fluid channel structure in ltcc substrate inside. Except streamBody channel design can also realize cavity, the isostructural integrated manufacture of rete simultaneously. At ltcc substrateOn realize the ability of the Various Complex 3D structure of above-mentioned cavity, passage, rete and their compositions,Make the application of ltcc substrate break conventional microwave circuit module application, and progressively expand to micro-systemSystem integration field. LTCC cavity, is reliable integrated the provide space of IC chip on substrate, canThe integrated level of Hoisting System greatly. LTCC film layer structure, for integrated manufacture on ltcc substrate multipleThe sensor (for example: pressure sensor, acceleration transducer etc.) of type provides architecture basics.Particularly, LTCC internal fluid channels structure, by controlling manufacturing process, can realize tens microns and arriveThe controlled manufacture of mm size structure, for the manufacture of microfluidic system provides new approaches.
Compare with manufacturing technology with traditional miniflow manufactured materials, ltcc substrate miniflow sensor-based system hasFollowing advantage:
1) manufacture of LTCC microfluxion is simple, and " laying bricks " mode of support is manufactured: " manufactured by stackedThe green band of channel design " can easily realize the quick manufacture of complicated microfluxion. In manufacture, do not need " to carveErosion " and sheet between bonding, not only reduced the manufacturing cycle, save manufacturing time, also greatly reduce manufactureCost.
2) LTCC ceramic material has good anticorrosion properties, can be applicable to severe corrosive and badly encirclesBorder.
3) LTCC ceramic material has good hot properties, can steady operation in hot environment (>500℃)。
4) LTCC can compatible resistance, the integrated manufacture of the passive device such as electric capacity and inductance, all rightRealize the integrated manufacture of LTCC rete sensor device. Be conducive to realize micro-fluidic system on monolithicThe integrated manufacture of system and signal processing system.
5) ltcc substrate and modern micro-package technique compatibility, be easy to manufacture cavity body structure and by eutectic,Assembling and the overall package of the ambient systems such as technique practical function chip such as bonding.
Summary of the invention
The present invention is directed to the problem in current miniflow photon detection technology, proposed a kind of based on LTCCIntegrated photon miniflow detection chip.
The technical solution used in the present invention is:
Based on the integrated photon miniflow detection chip of LTCC, comprise ltcc substrate, laser coreSheet, microchannel, detector chip and digital processing element, is characterized in that: described miniflow is logicalRoad is arranged in the matrix of ltcc substrate, and described laser chip and detector chip are oppositely arranged onThe two ends of microchannel, the detectable signal output of detector chip and the detection of digital processing element letterNumber input is connected.
Wherein, also comprise photon sensor-based system; One end and the laser chip of described photon sensor-based systemBe connected, the other end of photon sensor-based system is connected with detector chip through microchannel.
Wherein, described photon sensor-based system is biconical fiber, biconical fiber-Gao Q optical microcavity sensingUnit or evanscent field micro-nano fiber sensing unit.
Wherein, in the matrix of the ltcc substrate below microchannel, be provided with temperature control plate.
Substantive distinguishing features of the present invention and significantly beneficial effect are as follows:
1, compared with semiconductor fabrication, the manufacture that realizes microchannel on ltcc substrate is succinct,Fast, in manufacture, do not need bonding between " etching " and sheet, not only reduced the manufacturing cycle, save and manufactureTime, also greatly reduce manufacturing cost.
2) LTCC ceramic material has good anticorrosion properties, can make this detection system be applied to by forceCorrosivity adverse circumstances.
3) LTCC ceramic material has good hot properties, can steady operation in hot environment (>500℃)。
4) LTCC can compatible resistance, the integrated manufacture of the passive device such as electric capacity and inductance, all rightRealize the integrated manufacture of LTCC rete sensor device. Be conducive to realize micro-fluidic system on monolithicThe integrated manufacture of system and signal processing system.
5) ltcc substrate and modern micro-package technique compatibility, be easy to manufacture cavity body structure and by eutectic,Assembling and the overall package of the ambient systems such as technique practical function chip such as bonding.
Brief description of the drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is photon sensor-based system and the schematic diagram that coordinates of microchannel.
Detailed description of the invention
Below in conjunction with Fig. 1 and Fig. 2, the present invention is described in detail.
As shown in Figure 1, based on the integrated photon miniflow detection chip of LTCC, comprise ltcc substrate1, laser chip 2, microchannel 3, detector chip 4 and digital processing element 5, described miniflowPassage 3 is arranged in the matrix of ltcc substrate 1, described laser chip 2 and detector chip 4Be oppositely arranged on the two ends of microchannel 3, the detectable signal output of detector chip 4 and numeral placeThe detectable signal input of reason unit 5 is connected. The matrix of the ltcc substrate below microchannelInside be provided with temperature control plate 6.
As another embodiment, also comprise photon sensor-based system as shown in Figure 2; Described photon passesThe input 7 of sensing system is connected with laser chip 2, and the output 8 of photon sensor-based system is through micro-Circulation road 3 is connected with detector chip 4. Described photon sensor-based system is biconical fiber 9, bipyramidOptical fiber-Gao Q optical microcavity sensing unit 10 or evanscent field micro-nano fiber sensing unit.
Example:
In the present invention, ltcc substrate adopts Dupont951 ceramics to make, and the thickness that this ceramics is every layer is114 μ m. In this example, apply 20 layers of ceramics and build this detection chip.
The multimode bare fibre of fibre system application Corning Incorporated in the present invention.
Photon sensor-based system schematic diagram in the present invention in microchannel as shown in Figure 2. MicrochannelSectional dimension is 1mm × 1mm. Photon sensor-based system is applied high Q optical microcavity sensing unit.
Based on the single chip integrated photon miniflow of LTCC method of testing, the laser of being launched by light source chip is doneFor signal source, photon detection source enters into the photon sensor-based system in microchannel through fibre system,Realize the detection of material to external world at microchannel place, be detected device with the photon information of detectable signalChip is accepted, and completes herein photosignal conversion and send the signal of telecommunication to Digital Signal Processing listUnit, signal after treatment is input to memory cell and completes information storage. Testing liquid is through miniflow liquidImport enters among microchannel, and flows out by miniflow liquid outlet.
First initialize: in the time entering into microchannel without miniflow liquid, system log (SYSLOG) photodetectorInformation, and set it as the first reference information of follow-up processing.
Among pure miniflow liquid enters into microchannel time, due to miniflow liquid and photonic systemInteraction (reflection, refraction, scattering), can change the output information of photodetector, this informationCan be used as the second reference information of follow-up processing.
In the time that the material composition in microfluid changes, can further change the transmission characteristic of photon,Thereby can change the output information of photodetector. Under first, second reference information helps, numberWord signal processing unit by analysis settle accounts the measured physical quantity that obtains in miniflow (concentration, refractive index withAnd particulate concentration etc.).
Based on the single chip integrated photon miniflow of LTCC detection chip, comprise laser chip, fibre system,Photon sensor-based system, microchannel, detector chip, digital processing element, memory cell, temperatureControl module, power interface, heating unit, inner lead and ltcc substrate, and all portionsPart is all integrated on the monolithic of a LTCC multilager base plate; Be characterized in:
Described fibre system is passed through integrated manufacturing integration in the inside of ltcc substrate;
Described laser chip light source, detector chip, signal processing and memory cell and temperature control coreSheet all adopts matured product, and by micro-package technique, they is assembled on ltcc substrate correspondingIn blind chamber;
Described heating unit, inner lead adopt respectively ripe thick-film resistor, thick film conductor technologyRealize;
Described ltcc substrate adopts the LTCC Technology of standard to realize, in manufacture in basisSystem is realized metallization and cavity manufacture on different layers.
Based on the single chip integrated photon miniflow of LTCC detection chip, the photonic system in this detection chipBeing and the optical fiber technology optical fiber sensing structure unit of compatibility mutually, is high Q optical microcavity sensing unit, orPerson is evanscent field micro-nano fiber sensing unit and other optical fiber sensing structure.
Based on the single chip integrated photon miniflow of LTCC detection chip, the miniflow cross section in this detection chipBe of a size of (150 μ m～2mm) × (150 μ m～2mm).
Based on the single chip integrated photon miniflow of LTCC detection chip, the manufacture method of this chip has mergedThe integrated manufacturing technology of optical fiber-ltcc substrate and the functional chip based on micro-package technique-ltcc substrate Integrated-manufacturing Techniques.
Claims (4)
1. based on the integrated photon miniflow detection chip of LTCC, comprise ltcc substrate, laserChip, microchannel, detector chip and digital processing element, is characterized in that: described miniflowChannel setting is in the matrix of ltcc substrate, and described laser chip and detector chip are oppositely arrangedAt the two ends of microchannel, the detectable signal output of detector chip and the detection of digital processing elementSignal input part is connected.
2. according to claim 1 a kind of based on the integrated photon miniflow detection chip of LTCC,It is characterized in that: also comprise photon sensor-based system; One end of described photon sensor-based system and laser coreSheet is connected, and the other end of photon sensor-based system is connected with detector chip through microchannel.
3. according to claim 2 a kind of based on the integrated photon miniflow detection chip of LTCC,It is characterized in that: described photon sensor-based system is that biconical fiber, biconical fiber-Gao Q optical microcavity passSense unit or evanscent field micro-nano fiber sensing unit.
4. according to claim 1 a kind of based on the integrated photon miniflow detection chip of LTCC,It is characterized in that: in the matrix of the ltcc substrate below microchannel, be provided with temperature control plate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752788A (en) * | 2017-11-03 | 2019-05-14 | 桂林电子科技大学 | Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip |
| CN113155348A (en) * | 2021-02-26 | 2021-07-23 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1250160A (en) * | 1998-07-20 | 2000-04-12 | 生命扫描有限公司 | Fluid apparatus for medical diagnosis |
| CN1410760A (en) * | 2002-11-08 | 2003-04-16 | 浙江大学 | Micro fluid control chip detecting system |
| CN1548957A (en) * | 2002-09-27 | 2004-11-24 | ��տƼ��ɷ�����˾ | Micro-fluid transfer and analysis system |
| CN103424361A (en) * | 2012-05-18 | 2013-12-04 | 三星电子株式会社 | Apparatus and method for detecting and controlling fluid in microfluidic device |
-
2015
- 2015-12-18 CN CN201510956601.4A patent/CN105583014B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1250160A (en) * | 1998-07-20 | 2000-04-12 | 生命扫描有限公司 | Fluid apparatus for medical diagnosis |
| CN1548957A (en) * | 2002-09-27 | 2004-11-24 | ��տƼ��ɷ�����˾ | Micro-fluid transfer and analysis system |
| CN1410760A (en) * | 2002-11-08 | 2003-04-16 | 浙江大学 | Micro fluid control chip detecting system |
| CN103424361A (en) * | 2012-05-18 | 2013-12-04 | 三星电子株式会社 | Apparatus and method for detecting and controlling fluid in microfluidic device |
Non-Patent Citations (5)
| Title |
|---|
| LEI ZHANG等: "Microfluidic chip based microfiber sensors", 《OPTICAL SOCIETY OF AMERICA》 * |
| 严英占等: "LTCC单膜层内置腔制造技术", 《电子与封装》 * |
| 张卫平等: "《量子光学研究前沿》", 31 October 2014, 上海交通大学出版社 * |
| 白春礼等: "《中国科学院优博论丛·2007》", 31 May 2008, 科学出版社 * |
| 金玉丰等: "《微米纳米器件封装技术》", 31 October 2012, 国防工业出版社 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752788A (en) * | 2017-11-03 | 2019-05-14 | 桂林电子科技大学 | Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip |
| CN113155348A (en) * | 2021-02-26 | 2021-07-23 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
| CN113155348B (en) * | 2021-02-26 | 2023-09-12 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
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