CN109752793A - Hybrid integrated Michelson formula optical fiber micro flow chip - Google Patents
Hybrid integrated Michelson formula optical fiber micro flow chip Download PDFInfo
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- CN109752793A CN109752793A CN201711071015.7A CN201711071015A CN109752793A CN 109752793 A CN109752793 A CN 109752793A CN 201711071015 A CN201711071015 A CN 201711071015A CN 109752793 A CN109752793 A CN 109752793A
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- miniflow
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Abstract
The present invention relates to the twin-core fiber micro flow chips of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated on an optical fiber, it is mainly characterized by comprising: that (one) the optical fiber micro flow chip includes one or more airports as miniflow substance channel, also comprising two fibre cores as Light guiding channel, one of fibre core and miniflow substance channel are close to another fibre core is far from miniflow substance channel；(2) method that the both ends or one end of the optical fiber micro flow chip pass through heating respectively, which implements, draws cone processing, to constitute an optics Michelson interferometer in inside of optical fibre, the measurement arm of interferometer is constituted with the adjacent fibre core of miniflow substance channel, and the fibre core far from miniflow substance channel then constitutes the reference arm of interferometer；(3) the channel both ends of the optical fiber micro flow chip are opened perpendicular to optical fiber surface there are two micropore, output and input channel as miniflow substance.
Description
(1) technical field
The present invention relates to the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this
Kind of optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in an optical fiber
It is upper, it can be achieved that concentration, refractive index, chemical substance in flowing material etc. real-time monitoring and on-line measurement, belong to Fibre Optical Sensor
Technical field.
(2) background technique
Microflow control technique (Microfluidics or Lab-on-a-chip) refers to (arriving having a size of tens of using microchannel
Hundreds of microns) processing or manipulation minute fluid (volume be nanoliter arrive A Sheng) system.Microflow control technique is by more than two decades
Development, has become one and is related to chemistry, fluid physics, optics, microelectronics, new material, biology and biomedical engineering
Emerging cross discipline.Since the sample volume in micro-fluidic chip is small, detection light path is short, and high sensitivity, response time be fast, power consumption
Low fluorescence detector and novel detection method develops microflow control technique to functionization most important.
Traditional optical-fiber type micro flow chip mainly has optical-fiber type micro-fluidic electrophoresis chip [Su Bo etc., the micro-fluidic electricity of optical-fiber type
The development observation and control technology of swimming chip, 2005,24 (11): 5-8], which mainly consists of two parts: multimode fibre, PDMS base
Piece and cover plate.The mold of chip is produced using re-expose technology；Electrophoresis chip is made by the method for casting；The chip is real
Show and made depth different microfluidic channel and optical fiber channel on PDMS, has kept optical fiber easily right with microfluidic channel
It is quasi-.
Another kind is optical fiber built-in type micro-fluidic chip [embedded light of the such as Jin Yonglong based on excimer laser process technology
The preparation Chinese laser of fine type micro-fluidic device, 2008,35 (11): 1821-1824], preparation method utilizes 248nm
KrF excimer laser carries out micro Process on polymethyl methacrylate (PMMA) substrate, constructs chip structure, and be embedded in corrosion
The single mode optical fiber of 35 μm of the diameter crossed, to form optical fiber built-in cake core.
Using micro-nano fiber as a kind of typical one-dimensional micro-nano optical waveguide, have low transmission loss, high field restriction ability,
Evanescent field large proportion, can the characteristics such as flexible operating, there is unique advantage in terms of building miniaturization, high sensor.
There is clear advantage in terms of short time measurement.But this measuring device based on micro-nano fiber is generally existing to be easy to dirty
The short deficiency of dye, service life.Typical micro-nano fiber sensing arrangement include biconial micro-nano fiber, winding-type micro-nano fiber,
Micro-nano fiber grating, micro-nano fiber ring shape resonator, micro-nano fiber Mach-Zehnder interferometer and it is surface-functionalized or
Inside doping micro-nano fiber, physics, chemistry, the lifes such as refractive index, concentration, humidity, temperature, strain, electric current based on these structures
Object sensor obtains extensive research [X.Guo, Y-B.Ying, L.M.Tong, Photonic nanowires:from
Subwavelength waveguides to optical sensors, Accounts ofChemical Research.47,
2014,656-666；L.Zhang, J.Lou, L.Tong, Micro/nanofiber optical sensors, Photonic
Sensors 1,2010,31-42；J.Lou, Y.Wang, L.Tong, Microfiber optical sensors:a review,
Sensors 14,2014,5823-5844].
The miniflow for being parallel to fibre core can also be processed in single mode optical fiber using the method for femtosecond laser water secondary process
Channel, so that a kind of novel optical fiber microfluidic device [Li Xiang optical fiber miniflow that can be applied to liquid refractivity sensing be made
The femtosecond laser of body device prepares and liquid refractivity sensing Harbin Institute of Technology, and 2013；Sun Huihui optical fiber Nei Maheze
The femtosecond laser that Deccan relates to microcavity prepares and thermohaline sensing characteristics Harbin Institute of Technology, and 2015], this microfluidic device tool
There is high temperature resistant, liquid avoids fluid to be measured from contacting with the external world in microchannel internal flow, has very strong anti-interference ability.
Another method is directly using the hollow optical channel of hollow photonic crystal fiber as miniflow substance channel.
[Jiang Chao femto-second laser pulse precision makes miniflow optical fibre device and its applies laser magazine, 2009,30 (5): 6-8.] is this
The working principle of miniflow measurement device be based on the light field transmitted in optical fiber directly with miniflow matter interaction, to change light
The characteristic of light wave in fibre.That is the basis of miniflow optical device is effective overlapping between light field and channel fluid.When
When Waveguide and miniflow substance are limited in a physical space simultaneously, the interaction of light and flowing material can be best
Change, is that can shorten interaction length as far as possible while obtaining larger dynamic response.
In fact, micro-nano fiber is placed in air or in big flow cell by micro-nano fiber sensor mostly, micro-nano light
Fibre is easy to be effected by environmental factors, and surface is easy to be contaminated, and has seriously affected the stability of micro-nano fiber sensor.It will be micro-
Nano fiber is embedded in low-index material (for example, TelflonAF) [N.Lou, et.al, Embedded optical
micro/nano-fibers for stable devices,Optics Letters,35,2010,571-573；
.R.Lorenzi, Y.Jung, G.Brambilla, In-line absorption sensor based on coiled
Optical microfiber, Applied Physics Letters 98,2011,173504], it is to improve micro-nano fiber sensing
The effective ways of device stability.However the package of low-index material can reduce micro-nano fiber periphery evanscent field and test substance
Interaction reduces the sensitivity of micro-nano fiber sensing.
Either various physics, chemistry, the high-precision sensing detection of biological parameter or high performance full light modulator
Part requires the efficient interaction by light and substance, to form the light-wave information information mutual with substance, environmental characteristic
Sufficiently exchange, to achieve the purpose that raising sensing detection precision, enhancing function are integrated, improve device performance.Based on light and object
The microstructure fiber device of matter interaction is also such.
In order to improve channel integrated level, reliability and the processing and manufacturing for being easier to production, overcome in above-mentioned first technology
Miniflow substance channel is directly made hybrid integrated optical fiber miniflow core in a fiber The present invention gives a kind of by shortcoming and defect
Piece.The advantages of micro flow chip is that it avoids the optical alignment in the case of separating and adjusting, consistency convenient for optics connection
Well, it is suitable for scale mass production.Micro-meter scale operate micro liquid, be low consumption sample amount, high throughput chemical, biology,
Medicine analysis detection provides excellent research and application platform, is that microflow control technique is high-throughput in chemistry, biology, medicine and other fields
The control of analysis and detection provides a kind of convenient and fast technological means.
Summary of the invention
The purpose of the present invention is to provide the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated,
This optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in a light
On fibre.The fiber mix, which integrates micro flow chip, can realize the real-time monitoring of concentration, refractive index, chemical substance in flowing material etc.
With on-line measurement.
The object of the present invention is achieved like this:
The invention discloses the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber
Micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated on an optical fiber, can be real
The real-time monitoring and on-line measurement of concentration, refractive index, chemical substance in existing flowing material etc., are mainly characterized by comprising:
(1) the optical fiber micro flow chip includes one or more airport 1-1 as miniflow substance channel, also includes two fibres
Core 1-2 and 1-3 is as Light guiding channel, and fibre core 1-2 and miniflow substance channel are close to so as to the evanscent field of light wave in fibre core 1-2
It interacts with miniflow substance, fibre core 1-3 can be used as reference or the comparison channel of light wave, such as far from miniflow substance channel
Shown in Fig. 1.
(2) the twin-core fiber micro flow chip of this miniflow substance channel and light wave channel hybrid integrated, can construct
Michelson interferometer structure, as shown in Figure 2.One end of the optical fiber micro flow chip is implemented by the method heated and is drawn at cone
Reason, forms the coupler 2-4 in optical fiber, the other end is coated with high reflecting metal film or multilayer dielectric reflective coating 2-5, thus in light
One optics Michelson interferometer of fine Inner Constitution, with the adjacent fibre core 2-2 of miniflow substance channel 2-1 constitutes interference
The measurement arm of instrument, and the fibre core 2-3 far from miniflow substance channel constitutes the reference arm of interferometer.The optical fiber micro flow chip it is micro-
Stream substance channel is provided with a micropore perpendicular to optical fiber surface at cone coupling, as the input channel 2-6 of miniflow substance,
And the miniflow substance channel open end of the other end is then used as output channel.
(3) in order to further expand the twin-core fiber micro flow chip of this miniflow substance channel and light wave channel hybrid integrated
Structure.The invention also discloses following possible a variety of optical fiber structures and its on the fiber basis of various structures, integrated
And a variety of optical fiber micro flow chips realized.
What Fig. 3 was provided is a kind of twin-core fiber with symmetrical two airports 3-1 and 3-2, and there are two fine for this optical fiber tool
Core, one is located at fiber optic hub 3-3, close to two airports as miniflow substance channel；Another fibre core is micro- far from two
Flow substance channel hole.
Based on this double-hole double-cylinder optical fiber shown in Fig. 3, miniflow substance channel and light wave channel similarly can be further constituted
The structure of the twin-core fiber micro flow chip of hybrid integrated.Since there are two miniflow substance channel holes for optical fiber tool, thus can be same
The measurement of two kinds of miniflow substances of Shi Shixian.Fig. 4 then gives the Michelson interferometer structure constructed based on this optical fiber.
Preparation method is identical as the preparation process of single hole twin-core fiber micro flow chip.
In order to enhance the evanscent field of light and the validity of miniflow matter interaction, expand the interface of optical waveguide and miniflow substance
Product, Fig. 5 give it is a kind of ring optical waveguide is wrapped the twin-core fiber of miniflow substance channel, this optical fiber tool there are two fibre core,
One fibre core is located at the inner wall in center air hole, constitutes annular waveguide layer fibre core 5-1, which, which wraps, is located at fiber optic hub
Airport 5-2, the airport is as miniflow substance channel；Another fibre core 5-3 is far from miniflow substance channel hole, such as Fig. 5 institute
Show.
It is similar, based on it is shown in fig. 5 it is this ring optical waveguide is wrapped the twin-core fiber of miniflow substance channel, similarly can be with
Constitute two kinds of optical textures of the twin-core fiber micro flow chip of miniflow substance channel and light wave channel hybrid integrated.Fig. 6 is then provided
The Michelson interferometer structure that is constructed based on this optical fiber.Preparation method and single hole twin-core fiber micro flow chip
Preparation process is identical.
If by ring optical waveguide wrap miniflow substance channel this part remove fiber optic hub, and in a fiber the heart place one
Common fibre core, we can further construct another ring optical waveguide and wrap the twin-core fiber of miniflow substance channel, such as
Shown in Fig. 7.This optical fiber is that annular fibre core 7-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core 7-2 is located at the center of optical fiber, and another fibre core is in the inner wall of deep airport, constitutes
Annular waveguide layer fibre core, the fibre core are wrapped airport 7-3, and the airport is as miniflow substance channel.Similar, Fig. 8 is provided
It is wrapped the Michelson interferometer structure of the twin-core fiber of miniflow substance channel based on ring optical waveguide shown in Fig. 7.It is made
Preparation Method is identical as the preparation process of single hole twin-core fiber micro flow chip.
The twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated, it is this
Optical fiber micro flow chip in use, it is characterized in that: there is Michelson interferometer inside the described optical fiber micro flow chip
Optical texture, one end of interferometer and three fiber port circulator 9-1 are by micro flow chip 9-2, light source 9-3 and spectrometer 9-
4 are connected with each other, and the substance channel of the optical fiber micro flow chip is connected with external liquid infusion pump 9-5, and the liquid being discharged
Then it is connected with waste liquid pool 9-6, constitutes the application measuring system of chip, as shown in Figure 9.
Detailed description of the invention
Fig. 1 is the cross-sectional view with the twin-core fiber in miniflow substance channel hole.
Fig. 2 is the structural schematic diagram of the twin-core fiber micro flow chip with a miniflow substance channel hole.
Fig. 3 is a kind of cross-sectional configuration schematic diagram of twin-core fiber with symmetrical two airports 3-1 and 3-2.
Fig. 4 is the Michelson interferometer micro flow chip structural schematic diagram based on double-hole double-cylinder optical fiber.
Fig. 5 be a kind of ring optical waveguide wrap miniflow substance channel twin-core fiber cross-sectional configuration schematic diagram.
Fig. 6 be wrapped based on ring optical waveguide miniflow substance channel twin-core fiber Michelson interferometer micro flow chip knot
Structure schematic diagram.
Fig. 7 be a kind of ring optical waveguide wrap miniflow substance channel twin-core fiber cross-sectional configuration schematic diagram.
Fig. 8 be wrapped based on ring optical waveguide shown in Fig. 7 miniflow substance channel twin-core fiber Michelson interferometer it is micro-
Flow chip structure schematic diagram.
Fig. 9 is the application test systems structural representation of the internal optical fiber micro flow chip with Michelson interferometer optics structure
Figure.
Specific embodiment
Below with reference to specific embodiment, the present invention is further explained.
Without loss of generality, we come detailed using single hole twin-core fiber shown in FIG. 1 as the specific embodiment of optical fiber micro flow chip
Illustrate specific implementation step and implementation method of the invention.
(1) firstly, taking one section of single hole twin-core fiber shown in FIG. 1, removal covering is stand-by；
(2) then, a miniflow aperture under the microscope, is made a call in the close optical fiber surface side in miniflow hole using femto-second laser,
Inlet port as miniflow substance to be measured disengaging optical fiber microchannel；
(3) next, carrying out melting heating respectively in the outside close to microchannel hole by means of optical fiber to draw cone machining and implementing to draw
Cone just constitutes the core of optical fiber micro flow chip of the inside with Michelson interferometer optics structure；
(4) for convenience be attached with external light source and spectrometer, the optical fiber micro flow chip also need its both ends with have
The standard fiber of flexible jumper is welded, and the packaging protection after being welded；
(5) finally, being attached with two microfluidic liquid connectors and two microfluidic liquids on optical fiber micro flow chip
With sealing, the preparation of the optical fiber micro flow chip is just completed.
This optical fiber micro flow chip is by miniflow substance channel and suddenly to die to sense light field and micro-optical interferometer is integrated in one
, it can be achieved that the real-time monitoring and on-line measurement of concentration, refractive index, chemical substance in flowing material etc. on root optical fiber.
Claims (5)
1. the twin-core fiber micro flow chip of a kind of miniflow substance channel and light wave channel hybrid integrated, this optical fiber micro flow chip are
It by miniflow substance channel and suddenly dies and senses light field and micro-optical interferometer is integrated on an optical fiber, it can be achieved that flowing material
In concentration, refractive index, chemical substance etc. real-time monitoring and on-line measurement, be mainly characterized by comprising: (one) described optical fiber miniflow
Chip includes one or more airport 1-1 as miniflow substance channel, also comprising two fibre cores 1-2 and 1-3 as optical waveguide
Channel, fibre core 1-2 and miniflow substance channel are close to so that with miniflow substance phase interaction occurs for the evanscent field of light wave in fibre core 1-2
With fibre core 1-3 can be used as reference or the comparison channel of light wave, as shown in Figure 1 far from miniflow substance channel；(2) optical fiber is micro-
The one end for flowing chip is implemented by the method heated draws cone processing, forms the coupler 2-4 in optical fiber, the other end is coated with height
Reflecting metallic film or multilayer dielectric reflective coating 2-5, so that an optics Michelson interferometer is constituted in inside of optical fibre, with
The adjacent fibre core 2-2 of miniflow substance channel 2-1 constitutes the measurement arm of interferometer, and the fibre core 2-3 far from miniflow substance channel
The reference arm of interferometer is constituted, as shown in Figure 2；(3) the miniflow substance channel of the optical fiber micro flow chip is at cone coupling
It is provided with a micropore perpendicular to optical fiber surface, as the input channel 2-6 of miniflow substance, and the miniflow substance channel of the other end is opened
End is put then as output channel.
2. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is the twin-core fiber with symmetrical two airports 3-1 and 3-2, and there are two fine for this optical fiber tool
Core, one is located at fiber optic hub 3-3, close to two airports as miniflow substance channel；Another fibre core 3-4 is far from two
Miniflow substance channel hole, as shown in Figure 3.
3. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is that annular fibre core 5-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core are located at the inner wall in center air hole, constitute annular waveguide layer fibre core, which, which wraps, is located in optical fiber
The airport 5-2 of the heart, the airport is as miniflow substance channel；Another fibre core 5-3 is far from miniflow substance channel hole, such as Fig. 5
It is shown.
4. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: the optical fiber is that annular fibre core 7-1 wraps the twin-core fiber in miniflow substance channel hole, and there are two this optical fiber tools
Fibre core, a fibre core 7-2 is located at the center of optical fiber, and another fibre core is in the inner wall of deep airport, constitutes
Annular waveguide layer fibre core, the fibre core are wrapped airport 7-3, and the airport is as miniflow substance channel, as shown in Figure 7.
5. the twin-core fiber micro flow chip of miniflow substance channel according to claim 1 and light wave channel hybrid integrated,
Be characterized in: there is the optical texture of Michelson interferometer inside the described optical fiber micro flow chip, one end of interferometer with one
Micro flow chip 9-2, light source 9-3 and spectrometer 9-4 are connected with each other by three fiber port circulator 9-1, the optical fiber miniflow core
The substance channel of piece is connected with external liquid infusion pump 9-5, and the liquid being discharged then is connected with waste liquid pool 9-6, constitutes core
The application measuring system of piece, as shown in Figure 9.
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| CN201711071015.7A CN109752793A (en) | 2017-11-03 | 2017-11-03 | Hybrid integrated Michelson formula optical fiber micro flow chip |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752788A (en) * | 2017-11-03 | 2019-05-14 | 桂林电子科技大学 | Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip |
| CN111617683A (en) * | 2020-04-10 | 2020-09-04 | 桂林电子科技大学 | Photothermal microfluidic mixer based on porous optical fiber |
| CN111637033A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Micro-cavity type photo-thermal micro-pump based on annular core capillary optical fiber |
| CN111637034A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photo-thermal micro-thruster based on annular core capillary optical fiber |
| CN111637032A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photo-thermal micropump based on capillary optical fiber |
| CN111637031A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photothermal booster based on porous optical fiber |
| CN113866127A (en) * | 2021-10-26 | 2021-12-31 | 天津工业大学 | Micro-fluidic sensing device in fibre based on four-hole microstructure optical fiber integration |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752788A (en) * | 2017-11-03 | 2019-05-14 | 桂林电子科技大学 | Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip |
| CN111617683A (en) * | 2020-04-10 | 2020-09-04 | 桂林电子科技大学 | Photothermal microfluidic mixer based on porous optical fiber |
| CN111637033A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Micro-cavity type photo-thermal micro-pump based on annular core capillary optical fiber |
| CN111637034A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photo-thermal micro-thruster based on annular core capillary optical fiber |
| CN111637032A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photo-thermal micropump based on capillary optical fiber |
| CN111637031A (en) * | 2020-04-10 | 2020-09-08 | 桂林电子科技大学 | Photothermal booster based on porous optical fiber |
| CN113866127A (en) * | 2021-10-26 | 2021-12-31 | 天津工业大学 | Micro-fluidic sensing device in fibre based on four-hole microstructure optical fiber integration |
| CN113866127B (en) * | 2021-10-26 | 2024-01-16 | 天津工业大学 | Intra-fiber micro-fluidic sensing device based on four-hole microstructure optical fiber integration |
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