CN105583014B - The photon miniflow detection chip integrated based on LTCC - Google Patents
The photon miniflow detection chip integrated based on LTCC Download PDFInfo
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Abstract
The photon miniflow detection chip based on LTCC that the invention discloses a kind of, belongs to micro-system sensing detection field.The chip realizes the integrated of low-light source, fibre system, photon sensor-based system, detector chip, signal processing chip and temperature control plate on LTCC single substrate.Wherein, microchannel and fibre system are manufactured in inside substrate, to realize sensing of the photon in monolithic micro-fluidic system.Advantages of the present invention: 1) Integrated manufacture of fibre system and photon sensor-based system ltcc substrate in can be more easily realized；2) components such as light source, detector, signal processor required for the detection chip can be realized integrated on ltcc substrate by the microwave assembly technology of standard；3) miniflow sense channel required for detection chip can easily realize controllable manufacture on ltcc substrate；4) LTCC ceramics have good anticorrosion properties and hot properties, this chip can be supported to be applied in adverse circumstances.
Description
Technical field
The invention belongs to micro-system sensory fields, in particular to a kind of to realize light on low-temperature co-fired ceramics (LTCC) substrate
Sub- miniflow detection chip.
Technical background
Optical detecting method, which refers to, senses external physical quantity as signal vehicle using photon in functional structure
Method.Have many advantages, such as that transmission loss is small, electromagnetism interference performance is strong compared with conditional electronic sensing.Therefore, it is based on
The detection technique of photon sensing all obtains extensive concern in academia and industrial circle.
Microfluidic sensing chip can realize the quick sensing of substance on the chip of very little.Its chip overall dimensions is centimetre
Magnitude, the network of fluid passages of chip interior are micron dimension.In sensing is applied with detection, compared to reagent in macroscopic view experiment
The disadvantages of consumption is big, dangerous high, pollution is more, microfluidic sensing chip has reagent dosage few, at low cost, highly-safe, ring
Guarantor, high sensitivity, the advantages that chip size is small, integrated level is high, grind so that " microfluidic sensing chip " becomes " on piece laboratory "
The main aspect studied carefully.Wherein, the basic material of micro-fluidic structure and structure manufacture are needed first in microfluidic sensing chip research
The critical issue to be solved.
Photon detection technology is combined with microflow control technique, photon miniflow detection chip can be constructed, not only merged two
The advantages of person, has also expanded application field significantly, has huge application potential.
Currently, the manufacture material of micro-fluidic chip mainly has the inorganic material such as silicon wafer, glass and quartz and PMMA, PC
With the macromolecule organic materials such as PDMS.High molecular material translucency is preferable, cheap, manufacturing technology is relatively easy.However, high
The thermodynamic behaviour of molecular material is poor, limits the use environment of fluidic chip, and its manufacturing technology is not easy and automatically controlled list
Member realizes an Integrated manufacture, it is also necessary to the auxiliary processes manufacture such as bonding.The inorganic material corrosion resistant such as silicon wafer, glass and quartz
Erosion, is the good material of micro-fluidic chip, but their manufacturing technology is more complicated, and microchannel size is difficult to control, with it
The bonding of his system is relatively difficult and higher cost, is not easy to produce in batches.Therefore, it attempts other materials and carries out micro-fluidic chip
Inexpensive controllable manufacture is of great significance.
Low-temperature co-fired ceramics (LTCC), by the ceramic chips of multilayer standard thickness (about 100 μm) laminate it is integral after by
Low temperature (850 DEG C) cofiring forms.It in recent years, can be in LTCC single layer with the development of fine processing technique and advanced manufacture equipment
Cavity and its channel design that width dimensions are 50 μm are manufactured on ceramic chips.By the ceramic chips that these have been manufactured to channel design
It is laminated among ltcc substrate,
Fluid channel structure can be realized inside ltcc substrate by way of " laying bricks ".In addition to fluid channel structure,
The isostructural Integrated manufacture of cavity, film layer can also be realized simultaneously.Realized on ltcc substrate above-mentioned cavity, channel, film layer and
The ability for the Various Complex 3D structure that they are formed, so that conventional microwave circuit module application has been broken in the application of ltcc substrate,
And gradually expand to micro-system integration field.Reliable integrate that LTCC cavity is IC chip on substrate provides space, can be big
The integrated level of big lifting system.LTCC film layer structure, be ltcc substrate on a plurality of types of sensors of Integrated manufacture (such as: pressure
Force snesor, acceleration transducer etc.) provide structure basis.In particular, LTCC internal fluid channels structure, is made by control
Technique is made, it can be achieved that tens microns of controllable manufactures to mm size structure, provide new approaches for the manufacture of microfluidic system.
Compared with traditional miniflow manufacture material and manufacturing technology, ltcc substrate miniflow sensor-based system is had the advantage that
1) LTCC microfluxion is simple to manufacture, and " laying bricks " mode of support manufactures: " having manufactured the life of channel design by stacking
Porcelain band " can complicated microfluxion easy to accomplish quick manufacture.Do not need " to etch " in manufacture and piece between be bonded, not only reduce
Manufacturing cycle saves manufacturing time, also substantially reduces manufacturing cost.
2) LTCC ceramic material has good anticorrosion properties, can be applied to strong corrosive adverse circumstances.
3) LTCC ceramic material have good hot properties, can steady operation in hot environment (500 DEG C of >).
4) Integrated manufacture of the passive devices such as the compatible resistance of LTCC, capacitor and inductance, can also realize LTCC film layer
The Integrated manufacture of the devices such as sensor.Be conducive to the Integrated manufacture that microfluidic system and signal processing system are realized on monolithic.
5) ltcc substrate is compatible with modern Micro-package technique, and easily fabricated cavity body structure simultaneously passes through the techniques such as eutectic, bonding
Realize the assembling and overall package of the ambient systems such as functional chip.
Summary of the invention
It is micro- to propose a kind of photon integrated based on LTCC for the problems in current miniflow photon detection technology by the present invention
Flow detection chip.
The technical solution used in the present invention are as follows:
A kind of photon miniflow detection chip integrated based on LTCC, including ltcc substrate, laser chip, microchannel, spy
Survey device chip and digital processing element, it is characterised in that: the microchannel is arranged in the matrix of ltcc substrate, described
Laser chip and detector chip are oppositely arranged on the both ends of microchannel, the detectable signal output end and number of detector chip
The detectable signal input terminal of processing unit is connected.
It wherein, further include photon sensor-based system；One end of the photon sensor-based system is connected with laser chip, photon
The other end of sensor-based system passes through microchannel and is connected with detector chip.
Wherein, the photon sensor-based system is biconical fiber, the high Q optical microcavity sensing unit of biconical fiber-or suddenly
Die a micro-nano fiber sensing unit.
Wherein, temperature control plate is provided in the matrix of the ltcc substrate below microchannel.
It substantive distinguishing features of the invention and significant has the beneficial effect that:
1, compared with semiconductor processing technology, realize that the manufacture of microchannel is succinct, quick on ltcc substrate, in manufacture not
Need " to etch " and piece between be bonded, not only reduce the manufacturing cycle, save manufacturing time, also substantially reduce manufacturing cost.
2) LTCC ceramic material has good anticorrosion properties, and the detection system can be made to be applied to the severe ring of strong corrosive
Border.
3) LTCC ceramic material have good hot properties, can steady operation in hot environment (500 DEG C of >).
4) Integrated manufacture of the passive devices such as the compatible resistance of LTCC, capacitor and inductance, can also realize LTCC film layer
The Integrated manufacture of the devices such as sensor.Be conducive to the Integrated manufacture that microfluidic system and signal processing system are realized on monolithic.
5) ltcc substrate is compatible with modern Micro-package technique, and easily fabricated cavity body structure simultaneously passes through the techniques such as eutectic, bonding
Realize the assembling and overall package of the ambient systems such as functional chip.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the cooperation schematic diagram of photon sensor-based system and microchannel.
Specific embodiment
Below with reference to Fig. 1 and Fig. 2, the present invention is described in detail.
As shown in Figure 1, based on the photon miniflow detection chip that LTCC is integrated, including ltcc substrate 1, laser chip 2, miniflow
Channel 3, detector chip 4 and digital processing element 5, the microchannel 3 is arranged in the matrix of ltcc substrate 1, described
Laser chip 2 and detector chip 4 be oppositely arranged on the both ends of microchannel 3, the detectable signal output end of detector chip 4
It is connected with the detectable signal input terminal of digital processing element 5.It is provided in the matrix of ltcc substrate below microchannel
Temperature control plate 6.
It further include photon sensor-based system as shown in Figure 2 as another embodiment；The input of the photon sensor-based system
End 7 is connected with laser chip 2, and the output end 8 of photon sensor-based system passes through microchannel 3 and is connected with detector chip 4.Institute
The photon sensor-based system stated is biconical fiber 9, the high Q optical microcavity sensing unit 10 of biconical fiber-or evanscent field micro-nano fiber
Sensing unit.
Example:
In the present invention ltcc substrate using Dupont951 tile make, every layer of the tile with a thickness of 114 μm.This example
20 layers of tile of middle application construct the detection chip.
Fibre system applies the multimode bare fibre of Corning Incorporated in the present invention.
Photon sensor-based system schematic diagram in the present invention in microchannel is as shown in Figure 2.The sectional dimension of microchannel is
1mm×1mm.Photon sensor-based system applies high Q optical microcavity sensing unit.
Based on the single chip integrated photon miniflow test method of LTCC, by the laser of light source chip transmitting as signal source,
Photon detection source enters the photon sensor-based system in microchannel by fibre system, realizes at microchannel to foreign objects
The detection of matter, the photon information with detectable signal are received by detector chip, and complete photoelectric signal transformation here and incite somebody to action
Electric signal sends digital signal processing unit to, and treated, and signal is input to storage unit completion information storage.Testing liquid
It is entered among microchannel by microfluidic liquid import, and is exported and flowed out by microfluidic liquid.
Initialize first: when no microfluidic liquid enters microchannel, system records the information of photodetector, and will
Its first reference information as follow-up processing.
When pure microfluidic liquid enters among microchannel, due to the interaction of microfluidic liquid and photonic system
(reflection, refraction, scattering), can change the output information of photodetector, which can be used as the second ginseng of follow-up processing
Examine information.
When the material composition in microfluid changes, the transmission characteristic of photon can be further changed, to can change
The output information of photodetector.Under first, second reference information help, digital signal processing unit passes through analysis clearing
Obtain the measured physical quantity (concentration, refractive index and particulate concentration etc.) in miniflow.
Based on the single chip integrated photon miniflow detection chip of LTCC, including laser chip, fibre system, photon sensing system
System, microchannel, detector chip, digital processing element, storage unit, temperature control unit, power interface, heating unit,
Inner lead and ltcc substrate, and all components are all integrated on the monolithic of one piece of LTCC multilager base plate；Its main feature is that:
The fibre system is integrated in the inside of ltcc substrate by Integrated manufacture；
Laser chip light source, detector chip, signal processing and the storage unit and temperature controlling chip are all used into
Ripe product, and assembled them on ltcc substrate by Micro-package technique corresponding blind intracavitary；
Mature thick-film resistor is respectively adopted in the heating unit, inner lead, thick film conductor technology is realized；
The ltcc substrate is realized using the LTCC Technology of standard, is designed according to system not in manufacture
Metallization and cavity manufacture are realized on same layer.
Based on the single chip integrated photon miniflow detection chip of LTCC, the photonic system in the detection chip is and optical fiber technology
Mutually compatible optical fiber sensing structure unit is high Q optical microcavity sensing unit, or for evanscent field micro-nano fiber sensing unit with
And other optical fiber sensing structures.
Based on the single chip integrated photon miniflow detection chip of LTCC, the miniflow sectional dimension in the detection chip is (150 μm
~2mm) × (150 μm~2mm).
Based on the single chip integrated photon miniflow detection chip of LTCC, the manufacturing method of the chip has merged optical fiber-LTCC base
The integrated manufacturing technology of plate and functional chip-ltcc substrate Integrated-manufacturing Techniques based on Micro-package technique.
Claims (3)
1. a kind of photon miniflow detection chip integrated based on LTCC, including ltcc substrate, laser chip, microchannel, detection
Device chip and digital processing element, it is characterised in that: the microchannel is arranged in the matrix of ltcc substrate, and described swashs
Optical chip and detector chip are oppositely arranged on the both ends of microchannel, at the detectable signal output end and number of detector chip
The detectable signal input terminal of reason unit is connected；The miniflow sectional dimension of the microchannel is (150 μm~2mm) × (150
μm~2mm)；The ltcc substrate using Dupont951 tile make, every layer of the tile with a thickness of 114 μm, using 20 layers
Tile constructs the photon miniflow detection chip；It further include photon sensor-based system, one end of the photon sensor-based system and laser
Chip is connected, and the other end of photon sensor-based system passes through microchannel and is connected with detector chip；
When being tested based on the photon miniflow detection chip that LTCC is integrated, initialize first: it is logical to enter miniflow in no microfluidic liquid
When road, system records the information of detector chip, and using the information as the first reference information；When pure microfluidic liquid enters
When among microchannel, microfluidic liquid and photon sensor-based system interact, and change the output information of detector chip, by this
Output information is as the second reference information；When the material composition in microfluid changes, the biography of photon can be further changed
Defeated characteristic, thus change the output information of detector chip, with the help of the first reference information and the second reference information, number
Signal processing unit obtains the measured physical quantity in microchannel by analyzing clearing.
2. a kind of photon miniflow detection chip integrated based on LTCC according to claim 1, it is characterised in that: described
Photon sensor-based system is that biconical fiber, the high Q optical microcavity sensing unit of biconical fiber-or evanscent field micro-nano fiber sensing are single
Member.
3. a kind of photon miniflow detection chip integrated based on LTCC according to claim 1, it is characterised in that: in miniflow
Temperature control plate is provided in the matrix of ltcc substrate below channel.
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| CN109752788A (en) * | 2017-11-03 | 2019-05-14 | 桂林电子科技大学 | Hybrid integrated Mach-Zehnder interferes formula optical fiber micro flow chip |
| CN113155348B (en) * | 2021-02-26 | 2023-09-12 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
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| CN1187601C (en) * | 2002-11-08 | 2005-02-02 | 浙江大学 | Micro fluid control chip detecting system |
| KR101935366B1 (en) * | 2012-05-18 | 2019-01-04 | 삼성전자주식회사 | Apparatus and method for detecting and controlling fluid in microfludic device |
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