CN111531450A

CN111531450A - Take chip-breaker carbide blade chemical mechanical polishing equipment

Info

Publication number: CN111531450A
Application number: CN202010454927.8A
Authority: CN
Inventors: 毛美姣; 杨志豪; 吴翼; 李博鸿; 许庆; 谭志飞; 胡自化; 李敏
Original assignee: Xiangtan University
Current assignee: Xiangtan University
Priority date: 2020-06-19
Filing date: 2020-06-19
Publication date: 2020-08-14
Anticipated expiration: 2040-06-19
Also published as: CN111531450B

Abstract

The invention relates to chemical mechanical polishing equipment for a hard alloy blade with a chip breaker, which is designed aiming at the technical problem that the chemical mechanical polishing process cannot be applied to the chip breaker surface polishing of the hard alloy blade with the chip breaker due to the limitation of the existing chemical mechanical polishing equipment. The polishing device comprises a universal device, a Z-direction precise sliding table, a brush device, a vibration motor, a blade clamp and a polishing solution supply device, wherein the Z-direction precise sliding table is connected with the rear side of the universal device, the brush device is connected with the Z-direction precise sliding table, the vibration motor is arranged on the front side of the brush device, the blade clamp is connected with the universal device, and the polishing solution supply device is connected with the brush device. The invention realizes the process of chemical mechanical polishing by accurately controlling the brush and the polishing solution and utilizing the chemical corrosion of the polishing solution and the mechanical abrasion of the brush to the hard alloy blade with the chip breaker groove, and has the advantages of simple operation, convenient control, reliable operation and convenient adjustment.

Description

Take chip-breaker carbide blade chemical mechanical polishing equipment

Technical Field

The invention relates to the technical field of polishing equipment, in particular to chemical mechanical polishing equipment for a hard alloy blade with a chip breaker groove.

Background

The hard alloy cutter has high strength and hardness, good wear resistance and oxidation resistance, and higher cutting speed and longer cutting life than high-speed steel hard alloy cutters, and is the leading hard alloy cutter in developed countries at present. The quality and performance of the cemented carbide tool directly determine the production level of the manufacturing industry, and the surface quality (surface roughness, thermal deformation, cracks, scratches, surface damage) of the cemented carbide tool is an important factor influencing the durability of the cemented carbide tool. The diamond grinding wheel grinding is the most common processing method for domestic hard alloy cutters, but the common grinding easily causes the surface of the hard alloy cutter to be damaged (such as a deformation layer, surface/subsurface cracks, residual stress and the like), and does not achieve high dimensional precision and surface roughness, and the processing efficiency is low; although the high-speed grinding can improve the processing efficiency and reduce the surface roughness of the hard alloy cutter, a large amount of heat and overlarge pressure are generated in the grinding process, so that the surface temperature of the hard alloy cutter is quickly increased, the grinding heat cannot be effectively conducted, and the surface of the hard alloy cutter is damaged; the surface quality of the hard alloy cutter can be improved to a certain extent through ultra-precision grinding, but an expensive ultra-precision grinding machine needs to be imported, so that the production cost is greatly improved, the uniformity and the contour of grinding wheel abrasive particles are difficult to ensure, the abrasive particles are abraded greatly, and the surface of the hard alloy cutter is easy to damage.

The chemical mechanical polishing technique can obtain high surface quality such as flatness, few scratches and the like on a processed workpiece through a combination of mechanical grinding and chemical etching. Chemical mechanical polishing has become more and more widely used, from the initial use for obtaining high quality glass surfaces to the various industries of semiconductor industry today, such as interlayer dielectrics (ILD), mechanical abrasive tools, precision valves, etc. There have been studies to apply chemical mechanical polishing to the surface of a cemented carbide insert to reduce or eliminate surface/sub-surface damage of the cemented carbide insert and improve the surface quality and cutting performance of the cemented carbide insert.

But the current chemical mechanical polishing equipment is only suitable for polishing planar cemented carbide inserts. Most of hard alloy blades are provided with chip breakers due to the process requirements of cutting off chips, maintaining processing precision, prolonging service life of the hard alloy blades and the like, and the chip breakers are limited by chemical mechanical polishing equipment, so that the chemical mechanical polishing process cannot be applied to surface polishing of the chip breakers of the hard alloy blades with the chip breakers.

Disclosure of Invention

In order to solve the technical problem, the invention provides chemical mechanical polishing equipment for a hard alloy blade with a chip breaker, which utilizes the material characteristics of a hairbrush to ensure that bristles are fully contacted with the surface to be processed of the hard alloy blade with the chip breaker, thereby generating mechanical removal action under the relative motion, and simultaneously, a polishing solution supply device is used for supplying chemical polishing solution to the surface of a workpiece to be processed, so as to realize the mechanical chemical polishing processing technology for the hard alloy blade with the chip breaker. The polishing equipment for the blade with the groove is simple in structure, reliable in work and convenient to operate.

The technical scheme of the invention is as follows: on the basis of the existing polishing equipment, a Z-direction precise sliding table is additionally arranged on the outer side of a machine body, a brush disc is arranged on a working table of the sliding table and is connected with a vibration motor, a polishing solution supply hole is formed in the center of a brush hole, and an original polishing pad mounting disc is changed into a blade clamp.

The invention discloses a chemical mechanical polishing device for a hard alloy blade with a chip breaker groove, which is characterized in that: the polishing device comprises a universal device, a Z-direction precision sliding table, a brush device, a vibration motor, a blade clamp and a polishing solution supply device.

The universal device comprises a machine body, a main motor frame and a main motor. The main motor frame is arranged right below the inner side of the machine body, the main motor is vertically arranged on the main motor frame, a round hole is formed in the rear side of the machine body, the machine body has a function of protecting and bearing equipment and a function of containing and guiding polishing waste liquid, the blade clamp is connected with the tail end of an output shaft of the main motor through a coupler and located right above the universal device, and the blade clamp is driven to rotate when the main motor rotates.

The blade clamp positions the blade in a complementary mode, the blade can be changed according to different shapes of the blade to be machined, a flow guide groove with a specific shape which is beneficial to the flowing of polishing liquid is formed in the surface of the blade, and the depth of the flow guide groove just touches the surface of the blade to be machined.

The Z-direction precise sliding table comprises a stepping motor, a screw rod seat, a first conical gear, a second conical gear, a screw rod, a guide rail, a sliding block, a cross beam and a damping spring. Screw rod seat and fuselage rigid connection, be located the fuselage rear inboard and open under the round hole at the fuselage, step motor installs in the fuselage rear outside, the output shaft passes the round hole and is connected with conical gear two, guide rail and fuselage rear upside rigid connection, the lead screw lower extreme is connected with the screw rod seat, the lead screw upper end is connected with the guide rail upper end, conical gear one with lead screw rigid connection and rotation direction coaxial with the lead screw, conical gear one and conical gear two intermeshing, the slider mutually supports with guide rail and lead screw, crossbeam and slider threaded connection, the spring mounting that slowly shakes is in crossbeam and brush device junction, be used for reducing the influence of brush device vibration to other parts.

The brush device comprises a brush handle, a brush frame and a brush head, the brush handle is hollow, the brush frame and the brush head are provided with flow guide holes, and the side edges of the brush frame and the brush head are provided with threaded holes for connection. The brush handle is connected with the cross beam, the brush holder is connected with the brush handle, and the brush holder is buckled with the brush head and then is connected with the brush head through threads. The step motor during operation is rotatory to drive conical gear two and rotates, and then drives lead screw and conical gear one through gear engagement and rotate, and the rotation of lead screw turns into the upper and lower slip of slider, finally reaches the accurate control of brush device in the Z side through the crossbeam.

The vibration motor is connected with the brush handle to provide vibration for the bristles of the brush device.

The polishing solution supply device comprises a polishing solution supply box, a temperature controller, a polishing solution delivery pipe and a flow controller. The polishing solution supply box stores and pumps polishing solution, the temperature controller is installed on the polishing solution storage box and used for adjusting and recording the temperature of the polishing solution, one end of the polishing solution delivery pipe is connected with the polishing solution supply box, the other end of the polishing solution delivery pipe penetrates through the hollow hairbrush handle and is connected with the flow guide hole in the hairbrush frame, and the flow controller is installed on the polishing solution delivery pipe and used for controlling and recording the flow. When the polishing solution supply device works, the polishing solution drops from the polishing solution supply box to the center of the blade clamp through the polishing solution delivery pipe and finally from the diversion hole, and under the centrifugal action generated when the blade clamp rotates, the polishing solution continuously and uniformly flows through the blade to be processed under the guidance of the diversion groove.

Compared with the prior art, the invention has the technical effects that: after the to-be-machined blade is mounted on the blade clamp, the position of the brush device in the Z direction is controlled through rotation accurate control of the stepping motor, bristles are made to fully contact with the to-be-machined blade, polishing pressure is characterized by adjusting the Z direction distance of the brush device, the main motor rotates to drive the blade clamp to rotate, the vibration motor works to enable the bristles of the brush device to generate irregular vibration, and the polishing liquid is supplied to the polishing liquid supply device during working. Therefore, when the device works, relative circular motion is formed between the blade to be machined and the brush device, the brush hair of the brush device which vibrates at high frequency forms irregular relative motion on the surface of the blade to be machined, the brush hair of the brush device uniformly acts on the surface of the uneven blade to be machined under the interaction of the two motions, meanwhile, the polishing solution supply device works, the polishing solution dropping on the center of the blade clamp continuously flows through the surface of the blade to be machined under the action of the circular motion of the blade clamp through the diversion groove of the blade clamp, and the chemical mechanical polishing process is completed under the action of chemical corrosion and mechanical removal of the polishing solution and the brush hair on the blade to be machined respectively. The invention can realize the chemical mechanical polishing process of the surface of the grooved blade, and is a high-efficiency and high-quality processing mode.

Drawings

FIG. 1 is a partial cross-sectional view of an isometric view according to an example of the invention;

FIG. 2 is a partial cross-sectional view of a rear view according to an example of the invention;

FIG. 3 is a schematic view of a polishing brush assembly according to an embodiment of the present invention;

FIG. 4 is a top view of a blade holder according to an example of the invention;

FIG. 5 is a rear view of an embodiment according to the invention;

FIG. 6 is a schematic diagram of an operation according to an example of the present invention;

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1, 2 and 5: the polishing device comprises a universal device 1, a Z-direction precision sliding table 2, a brush device 3, a vibration motor 4, a blade clamp 5 and a polishing solution supply device 6.

As shown in fig. 1, 2 and 5: the universal device 1 comprises a machine body 1-1, a main motor frame 1-2 and a main motor 1-3. The polishing machine is characterized in that a main motor frame 1-2 is arranged right below the inner side of a machine body 1-1, a main motor 1-3 is vertically arranged on the main motor frame 1-2, a round hole 1-4 is formed in the rear side of the machine body 1-1, the machine body provides a protection and bearing function for equipment and has a function of containing and guiding polishing waste liquid, a blade clamp 5 is connected with the tail end of an output shaft of the main motor 1-3 through a coupler and located right above a universal device 1, and the blade clamp 5 is driven to rotate when the main motor 1-3 rotates.

As shown in fig. 1, 2, 3, 5 and 6: the blade clamp 5 positions the blade in a complementary mode, the blade can be changed according to different shapes of the blade to be machined, a flow guide groove with a specific shape which is beneficial to the flow of polishing liquid is formed in the surface of the blade, and the depth of the flow guide groove just touches the surface of the blade to be machined.

As shown in fig. 1, 2 and 5: the Z-direction precise sliding table 2 comprises a stepping motor 2-1, a screw rod seat 2-2, a conical gear I2-3, a conical gear II 2-4, a screw rod 2-5, a guide rail 2-6, a sliding block 2-7, a cross beam 2-8 and a damping spring 2-9. A screw rod seat 2-2 is rigidly connected with a machine body 1-1, is positioned at the inner side of the rear part of the machine body 1-1 and is positioned right below a circular hole 1-4 formed in the machine body 1-1, a stepping motor 2-1 is arranged at the outer side of the rear part of the machine body 1-1, an output shaft passes through the circular hole 1-4 and is connected with a conical gear II 2-4, a guide rail 2-6 is rigidly connected with the upper side of the rear part of the machine body 1-1, the lower end of a screw rod 2-5 is connected with the screw rod seat 2-2, the upper end of the screw rod 2-5 is connected with the upper end of the guide rail 2-6, the conical gear I2-3 is rigidly connected with the screw rod 2-5, the rotation direction is coaxial with the screw rod 2-5, the conical gear I2-3 is meshed with the conical gear, the cross beam 2-8 is in threaded connection with the sliding block 2-7, and the vibration damping spring 2-9 is arranged at the joint of the cross beam 2-8 and the brush device 3 and used for reducing the influence of the vibration of the brush device 3 on other parts.

As shown in fig. 1, 2, 3 and 5: the brush device 3 comprises a brush handle 3-1, a brush holder 3-2 and a brush head 3-3, the brush handle 3-1 is hollow, the brush holder 3-2 and the brush head 3-3 are provided with flow guide holes 3-4, and the side edges of the brush holder 3-2 and the brush head 3-3 are provided with threaded holes 3-5 for connection. The brush handle 3-1 is connected with the beam 2-8, the brush holder 3-2 is connected with the brush handle 3-1, and the brush holder 3-2 is buckled with the brush head 3-3 and then is connected through threads. When the stepping motor 2-1 works, the stepping motor rotates to drive the conical gear II 2-4 to rotate, further drives the screw rod 2-5 and the conical gear I2-3 to rotate through gear engagement, the rotation of the screw rod 2-5 is converted into the up-and-down sliding of the slide block 2-7, and finally the brush device 3 is accurately controlled in the Z direction through the cross beam 2-8.

As shown in fig. 1 and 5: the vibration motor 4 is connected with the brush handle 3-1 to provide vibration for the bristles of the brush device 3.

As shown in fig. 1 and 2: the polishing solution supply device 6 comprises a polishing solution supply box 6-1, a temperature controller 6-2, a polishing solution delivery pipe 6-3 and a flow controller 6-4. The polishing solution supply box 6-1 is used for storing and pumping polishing solution, the temperature controller 6-2 is arranged on the polishing solution storage box 6-1 and used for adjusting and recording the temperature of the polishing solution, one end of the polishing solution delivery pipe 6-3 is connected with the polishing solution supply box 6-1, the other end of the polishing solution delivery pipe passes through the hollow brush handle 3-1 and is connected with the flow guide hole 3-4 on the brush frame 3-2, and the flow controller 6-4 is arranged on the polishing solution delivery pipe 6-3 and used for controlling and recording the flow. When the polishing solution supply device 6 works, the polishing solution drops from the polishing solution supply box 6-1 through the polishing solution delivery pipe 6-3 and finally from the diversion hole 3-4 to the center of the blade clamp 5, and under the centrifugal action generated when the blade clamp 5 rotates, the polishing solution continuously and uniformly flows through the blade to be machined under the guidance of the diversion groove.

As shown in fig. 1, 2, 5 and 6: when the polishing device works, after a blade to be machined is arranged on a blade clamp 5, the position of a brush device 3 in the Z direction is controlled by accurately controlling the rotation of a stepping motor 2-1, so that bristles are in full contact with the blade to be machined, the polishing pressure is represented by adjusting the position of the brush device 3 in the Z direction, a main motor 1-3 rotates to drive the blade clamp 5 to rotate, a vibration motor 4 works to enable the bristles of the brush device 3 to generate irregular vibration, and a polishing solution supply device 6 works to supply polishing solution. Therefore, when the device works, relative circular motion is formed between the blade to be machined and the brush device 3, the brush hair of high-frequency vibration forms irregular relative motion on the surface of the blade to be machined, the brush hair of the brush device 3 uniformly acts on the surface of the uneven blade to be machined under the interaction of the two motions, meanwhile, the polishing solution supply device 6 works, the polishing solution dropping on the center of the blade clamp 5 continuously flows through the surface of the blade to be machined under the action of the circular motion of the blade clamp 5 through the diversion groove of the blade clamp 5, and the chemical mechanical polishing process is completed under the action of chemical corrosion and mechanical removal of the polishing solution and the brush hair on the blade to be machined respectively. The invention can realize the chemical mechanical polishing process of the surface of the grooved blade, and is a high-efficiency and high-quality processing mode.

While embodiments of the invention have been shown and described, it will be obvious to those skilled in the art that the invention is not limited to the details of the foregoing specific embodiments, and that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A chemical mechanical polishing device for a hard alloy blade with a chip breaker is characterized by comprising

A machine body (1), a Z-direction precision sliding table (2), a brush device (3), a vibration motor (4), a blade clamp (5), a polishing solution supply device (6) and a main motor (7),

the Z-direction precision sliding table (2) comprises a stepping motor (2-1), a screw rod seat (2-2), a first conical gear (2-3), a second conical gear (2-4), a screw rod (2-5), a guide rail (2-6), a sliding block (2-7), a cross beam (2-8) and a buffer spring (2-9); wherein

The screw rod seat (2-2) and the guide rail (2-6) are rigidly connected with the machine body (1), the lower end of the screw rod (2-5) is connected with the screw rod seat (2-2), the upper end of the screw rod (2-5) is connected with the upper end of the guide rail (2-6),

the stepping motor (2-1) is arranged on the machine body (1), an output shaft of the stepping motor (2-1) is connected with the second conical gear (2-4),

after the rotating motion of the stepping motor (2-1) is reduced in speed through the meshing transmission of the second conical gear (2-4) and the first conical gear (2-3) and the motion direction is changed, the screw rod (2-5) is driven to rotate, the first conical gear (2-3) is rigidly connected with the screw rod (2-5), the first conical gear (2-3) is meshed with the second conical gear (2-4), the sliding block (2-7) is matched with the guide rail (2-6) and the screw rod (2-5), the cross beam (2-8) is in threaded connection with the sliding block (2-7), and the vibration damping spring (2-9) is installed at the joint of the cross beam (2-8) and the brush device (3);

the main motor (7) is arranged on the machine body (1), the output shaft of the main motor is connected with the blade clamp (5), when the main motor (7) rotates, the blade clamp (5) is driven to synchronously rotate,

the brush device (3) comprises a brush handle (3-1), a brush holder (3-2) and a brush head (3-3), the brush handle (3-1) is hollow, the brush holder (3-2) and the brush head (3-3) are provided with flow guide holes (3-4), and the side edges of the brush holder (3-2) and the brush head (3-3) are provided with threaded holes (3-5) for connection; the brush handle (3-1) is connected with the cross beam (2-8), the brush frame (3-2) is connected with the brush handle (3-1), and the brush frame (3-2) is buckled with the brush head (3-3) and then is connected through threads;

the vibration motor (4) is connected with the brush handle (3-1);

the polishing solution supply device (6) comprises a polishing solution supply box (6-1), a temperature controller (6-2), a polishing solution delivery pipe (6-3) and a flow controller (6-4); the temperature controller (6-2) is arranged on the polishing solution storage box (6-1), one end of the polishing solution delivery pipe (6-3) is connected with the polishing solution supply box (6-1), the other end of the polishing solution delivery pipe penetrates through the hollow brush handle (3-1) to be connected with the flow guide hole (3-4) in the brush frame (3-2), and the flow controller (6-4) is arranged on the polishing solution delivery pipe (6-3).