CN107344329A - Center feed flow small abrasive nose polishing tool - Google Patents

Center feed flow small abrasive nose polishing tool Download PDF

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Publication number
CN107344329A
CN107344329A CN201710516235.XA CN201710516235A CN107344329A CN 107344329 A CN107344329 A CN 107344329A CN 201710516235 A CN201710516235 A CN 201710516235A CN 107344329 A CN107344329 A CN 107344329A
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CN
China
Prior art keywords
polishing
soft
feed flow
polishing pad
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710516235.XA
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Chinese (zh)
Inventor
林彬
黄田
张晓峰
李凯隆
李岩
柳鹏飞
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Tianjin University
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Tianjin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University filed Critical Tianjin University
Priority to CN201710516235.XA priority Critical patent/CN107344329A/en
Publication of CN107344329A publication Critical patent/CN107344329A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/002Grinding heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Abstract

A kind of center feed flow small abrasive nose polishing tool.It includes soft polishing pad, sponge interlayer, polishing disk, connecting rod, flexible pipe, flexible clutch and electro spindle;Effect of the present invention:Feed flow centered on surrounding feed flow is improved, polishing fluid supply in central area is abundant, and a large amount of processing heats and abrasive dust are taken away machining area by polishing fluid, and soft pad interface wear condition will be substantially better than traditional small abrasive nose polishing tool.Therefore, it is possible to improve the wear resistence of soft polishing pad, and the service life of soft polishing pad is improved more than 4 times, reduce soft polishing pad replacement frequency, reduce production cost.Polishing fluid is supplied from tool focus to surrounding, and relative to surrounding feed flow, more fully, uniformly, the renewal speed of abrasive particle is also more stable, so that soft polishing pad abrasion situation is greatly improved for abrasive particle supply in whole machining area.Therefore, center feed flow small abrasive nose polishing tool material removal efficiency within the whole process-cycle is more stable, and Surface contral ability is stronger.

Description

Center feed flow small abrasive nose polishing tool
Technical field
The invention belongs to optical tool technical field, and in particular to a kind of center feed flow small abrasive nose polishing tool.
Background technology
Traditional small abrasive nose polishing tool mainly includes soft small mill, solid hopkinson bar, sponge interlayer and soft polishing pad;Its One end of middle solid hopkinson bar is fixed on the upper surface centre of soft small mill, and the other end is connected on grinding machine;Sponge interlayer is pacified Mounted in the lower surface of soft small mill, and soft polishing pad is then arranged on the outer surface of sponge interlayer, and soft polishing pad Outer surface be provided with ten peace grooves;This small abrasive nose polishing tool is the contact processing method using free abrasive to workpiece table Face is polished, i.e., using soft small mill as polishing tool, directly touches and produce between the instrument and workpiece in process Relative motion, thus workpiece surface material is removed with the free abrasive between power driven tools and workpiece.
Although traditional small abrasive nose polishing tool is with a long history, develops relative maturity, have been widely used for optics at present and add The grinding of work and rough polishing stage, but its shortcoming be Surface contral ability easily by abrasive concentration, abrasive species, abrasive particle distribution, The influence of the factors such as bistrique abrasion:First, traditional small abrasive nose polishing tool is by the way of surrounding feed flow, due to high-revolving Under processing conditions, instrument rotation produces the factors such as centrifugal force so that polishing fluid is not easily accessible the central area of soft polishing pad, causes Make abrasive particle skewness, abrasive particle renewal speed is slow, and heat caused by processing is not easy to shed, and ultimately results in soft polishing pad The central area rate of wear is too fast, greatly reduces the service life of soft polishing pad;Secondly, needed in polishing process frequently more Soft polishing pad is changed, reduces production efficiency, improves production cost;Finally, abrasive material skewness and soft polishing pad abrasion Excessive velocities, which can also cause, removes the unstable of function.Therefore, traditional small abrasive nose polishing tool also has the shortcomings that many needs gram Clothes.
The content of the invention
In order to solve the above problems, it is an object of the invention to provide a kind of center feed flow small abrasive nose polishing tool.
In order to achieve the above object, center feed flow small abrasive nose polishing tool provided by the invention includes soft polishing pad, sea Cotton interlayer, polishing disk, connecting rod, flexible pipe, flexible clutch and electro spindle;Wherein sponge interlayer is arranged on the lower surface of polishing disk On;Soft polishing pad is arranged on the outer surface of sponge interlayer;One end of connecting rod is connected to polishing disk using flexible clutch Upper surface centre, and a confession fluid apertures have been formed through at internal axis, external port is inlet, while soft throwing Light pad, sponge interlayer, polishing disk center at be each formed with a centre bore being connected with confession fluid apertures in connecting rod;Flexible pipe pastes It is attached on the inner peripheral surface of confession fluid apertures;Electro spindle is enclosed on the outer circumference surface of connecting rod, and inside is provided with motor.
Confession fluid apertures in described connecting rod are identical with the center-hole diameter on soft polishing pad, sponge interlayer, polishing disk.
Described soft polishing pad is polyurethane polishing pad, and outer surface is provided with crisscross grooves, and the intersection point of crisscross grooves Positioned at central hole.
Feed flow small abrasive nose polishing tool in center provided by the invention has the advantages that:
(1) feed flow centered on center feed flow small abrasive nose polishing tool improves surrounding feed flow, the supply of central area polishing fluid Fully, a large amount of processing heats and abrasive dust are taken away machining area by polishing fluid, and soft pad interface wear condition will be substantially better than Traditional small abrasive nose polishing tool.Therefore, center feed liquid way can improve the wear resistence of soft polishing pad, and by soft polishing pad Service life improve more than 4 times, reduce soft polishing pad replacement frequency, reduce production cost.
(2) under the feed liquid way of center, polishing fluid is supplied from tool focus to surrounding, relative to surrounding feed flow, entirely More fully, uniformly, the renewal speed of abrasive particle is also more stable, so that soft polishing pad abrasion for abrasive particle supply in machining area Situation is greatly improved.Therefore, material removal efficiency is more within the whole process-cycle for center feed flow small abrasive nose polishing tool Stable, Surface contral ability is stronger.
Brief description of the drawings
Fig. 1 is center feed flow small abrasive nose polishing tool structural representation provided by the invention.
Fig. 2 (a) and (b) are respectively to be thrown using traditional small abrasive nose polishing tool and feed flow small abrasive nose in center provided by the invention Optical tool carries out the polished surface figure after 30min fixed point polishing experiments.
Fig. 3 (a) and (b) are respectively to be thrown using traditional small abrasive nose polishing tool and feed flow small abrasive nose in center provided by the invention Optical tool carries out the polished surface figure after 60min fixed point polishing experiments.
Fig. 4 changes over time trend curve figure to remove spot depth.
Fig. 5 is soft polishing on traditional small abrasive nose polishing tool and feed flow small abrasive nose polishing tool in center provided by the invention Pad abrasion condition microgram:(a)5min;(b)10min;(c)15min;(d)20min;(e)25min;(f)30min
Fig. 6 is original removal spot contrast curve.
Fig. 7 removes spot contrast curve for normalization.
Embodiment
Make further illustrate to the present invention with reference to specific embodiment and accompanying drawing.
As shown in figure 1, center feed flow small abrasive nose polishing tool provided by the invention includes soft polishing pad 1, sponge interlayer 2nd, polishing disk 3, connecting rod 4, flexible pipe 5, flexible clutch 6 and electro spindle 7;Wherein sponge interlayer 2 is arranged on the lower end of polishing disk 3 On face;Soft polishing pad 1 is arranged on the outer surface of sponge interlayer 2;One end of connecting rod 4 is connected to using flexible clutch 6 The upper surface centre of polishing disk 3, and a confession fluid apertures 8 have been formed through at internal axis, external port is inlet, together When soft polishing pad 1, sponge interlayer 2, polishing disk 3 center at be each formed with one and be connected with confession fluid apertures 8 in connecting rod 4 Centre bore;Flexible pipe 5 is attached on the inner peripheral surface of confession fluid apertures 8;Electro spindle 7 is enclosed on the outer circumference surface of connecting rod 4, and inside is set There is motor.
Confession fluid apertures 8 in described connecting rod 4 and the center-hole diameter on soft polishing pad 1, sponge interlayer 2, polishing disk 3 It is identical.
Described soft polishing pad 1 is polyurethane polishing pad, and outer surface is provided with crisscross grooves, and the intersection point of crisscross grooves Positioned at central hole.
Now center feed flow small abrasive nose polishing tool application method provided by the invention is described below:First package unit is connected Connect and then movement is by the electro spindle 7 of air supporting driving, soft polishing pad 1 is contacted workpiece 9, then by the outer end of connecting rod 4 Mouth is connected with the feed pipe for providing polishing fluid 10, starts electro spindle 7, under the driving of the upper motor of electro spindle 7, this work Tool, which will produce, to be rotated at a high speed, at the same time, the polishing fluid 10 from feed pipe by from the external port of connecting rod 4 through flexible pipe 5 and Soft polishing pad 1, sponge interlayer 2, the centre bore on polishing disk 3 are supplied between the soft surface of polishing pad 1 and the surface of workpiece 9, Then equably supplied while being polished to the surface of workpiece 9 by the crisscross grooves on soft polishing pad 1 to surrounding.Material Expect that cutting mechanisms and traditional small abrasive nose polishing tool are essentially identical.
In order to verify the effect of feed flow small abrasive nose polishing tool in center provided by the invention, present inventor has performed following reality Test:
(1) soft polishing pad service life contrast experiment
The present inventor is small using traditional small abrasive nose polishing tool of surrounding feed liquid way and center feed flow provided by the invention Influence when grinding head polishing instrument carries out workpiece polishing to soft polishing pad abrasion situation has carried out contrast experiment, as a result such as Fig. 2 Shown in Fig. 3, wherein Fig. 3 is soft pad interface abrasion condition after processing 30min, and Fig. 3 is polishing pad table after processing 60min Surface wear situation.
From figures 2 and 3, it will be seen that workpiece polishing is carried out using traditional small abrasive nose polishing tool of surrounding feed liquid way When, cause polishing fluid to be not easily accessible the central area of soft polishing pad under the high-revolving centrifugal action of instrument, cause abrasive particle more New speed is slow, and caused heat is not easy to shed in process, because polishing powder in soft pad interface is gathered into one Annular, it is big to often result in the removal quantitative change of polishing powder aggregation zone workpiece surface material, causes soft polishing pad to use 30min Afterwards, core is to wear, and after 60min, core damages.
When carrying out workpiece polishing using center feed flow small abrasive nose polishing tool provided by the invention, polishing fluid is from tool focus Being supplied to surrounding, abrasive particle renewal speed is stable, and abrasive particle is evenly distributed, and obvious clustering phenomena does not occur in polishing powder, and Processing heat takes away machining area by polishing fluid, and soft pad interface wear condition will be substantially better than traditional small abrasive nose buffer Tool.Therefore, this instrument can extend the service life of soft polishing pad.
(2) function stabilised efficiency contrast experiment is removed
The raising of face shape error convergence efficiency is that glossing studies highly important content, directly affects polishing mistake The time of journey, it is therefore desirable to which Gaussian in shape optimization is carried out to removing function by planetary motion.Two kinds of differences are mainly studied in this experiment Synthesis removes the stabilised efficiency of function under feed liquid way.In this experiment, instrument rotational velocity is 600rpm, and revolution speed is 120rpm, implement load 35N, removal spot diameter is polished according to fixed point and suitably chooses eccentric throw to ensure the removal function of synthesis With single-peak structure, 6 pieces of workpiece are processed successively using the removal function of synthesis, every piece of work pieces process time is 5min, comparative study is carried out to removal efficiency under two kinds of feed liquid ways in 30min.
It can be obtained by Fig. 4 as drawn a conclusion:First, under two kinds of feed liquid ways, when material removal efficiency is with processing Between passage and improve, under surrounding feed liquid way, material removing rate with process time change it is more violent, in preceding 25min, go Except the average rate of change of efficiency reaches 0.3 μm/min, because the average rate of change of removal efficiency is excessive, therefore can not apply in face In type dressing process, after 25min, removal efficiency is close stable.Secondly, under the feed liquid way of center, material removing rate is steady Fixed, in preceding 15min, the average rate of change of removal efficiency is less than 0.03 μm/min, after 15min, the average change of removal efficiency Rate reaches 0.09 μm/min, and compared to surrounding feed liquid way, the average rate of change of removal efficiency is more stable.In addition, center It is more efficient that feed liquid way supplies polishing fluid, and abrasive particle distribution is more uniform, therefore the material of center feed liquid way starting stage Removal efficiency will be apparently higher than traditional surrounding feed liquid way.
Then, polishing pad abrasion situation in this experimentation is observed, comparing result is as shown in Figure 5.As shown in Figure 5, four Under all feed liquid ways, during 0~20min, due to surface abrasion, the effective area that soft polishing pad participates in processing is constantly increasing Add, simultaneously as the planetary motion mode of instrument make it that the movement locus of each point is homogenized on instrument, subtracts to a certain extent The clustering phenomena of polishing powder is lacked, but clustering phenomena is still present, from analysis of experimental results, when clustering phenomena is with processing Between become more and more obvious, during 20~30min, soft polishing pad abrasion is serious, has been ground in the region contacted with workpiece Smooth surface is damaged into, polishing powder clustering phenomena is also increasingly severe;Compared to the experimental result of surrounding feed liquid way, center feed liquid way Under, in 30min, soft polishing pad abrasion situation is substantially better than surrounding feed liquid way, and polishing powder clustering phenomena is improved.
Contrast and experiment understands that under surrounding feed liquid way, during 0~20min, the abrasion of soft polishing pad is more next It is more obvious so that its material removal efficiency gradually increases, and during 20~30min, soft polishing pad abrasion is serious and tends to be flat Surely so that material removal efficiency speedup tends towards stability, while the clustering phenomena of polishing powder is serious, and the abrasive particle largely assembled is easily right Optical element surface causes to scratch, i.e., soft polishing pad now has not been suitable for optical surface processing.In center feed flow Under mode, because abrasive particle supply is abundant, the material removing rate for processing initial stage is more than surrounding feed liquid way, meanwhile, polishing pad abrasion Situation is greatly improved, and material removal efficiency is more stable in the whole process-cycle.
(3) function shape contrast experiment is removed
Fixed point removes spot profile under this experiment two kinds of feed liquid ways of main investigation and comparison.Experimental comparison results such as Fig. 6 and Fig. 7 It is shown:Fig. 6 representational tools rotating speed is 600rpm, and when implement load is 35N, the contrast of spot profile is removed under two kinds of feed liquid ways Figure, as seen from the figure, due to being sufficiently fed for abrasive particle, is evenly distributed, and the abrasive particle quantity for participating in processing under the feed liquid way of center is more, Material removal efficiency is higher.Fig. 7 represents the removal spot silhouette contrast figure after normalization, and analysis is apparent from, under surrounding feed liquid way, Due to the centrifugal action of instrument high-speed rotation, abrasive particle is not easily accessible tool focus region, and abrasive particle skewness causes central part Removal amount is divided to decline very fast, and variation tendency is in non-linear;Under the feed liquid way of center, stable due to polishing fluid abrasive particle supplies Give, improve the uniformity of abrasive particle distribution so that core material removal amount is more plentiful, and variation tendency is linear.
Understood with reference to three above embodiment, center feed flow small abrasive nose polishing tool provided by the invention is compared to the small mill of tradition Head polishing tool, it can not only reduce the abrasion of soft polishing pad, improve the service life of soft polishing pad, and can improve The stability of polishing efficiency, profile control ability is improved, meanwhile, fixed point polishing center removal amount is more plentiful, the removal of synthesis Function is unimodal also more wider.
Although above in conjunction with accompanying drawing, invention has been described, and the invention is not limited in above-mentioned specific implementation Mode, above-mentioned embodiment are only illustrative, rather than restricted, are come for one of ordinary skill in the art Say, on the premise of inventive principle is not departed from, some improvements and modifications can also be made, these improvements and modifications belong to the present invention Protection domain.

Claims (3)

  1. A kind of 1. center feed flow small abrasive nose polishing tool, it is characterised in that:Described center feed flow small abrasive nose polishing tool includes Soft polishing pad (1), sponge interlayer (2), polishing disk (3), connecting rod (4), flexible pipe (5), flexible clutch (6) and electro spindle (7);Wherein sponge interlayer (2) is arranged on the lower surface of polishing disk (3);Soft polishing pad (1) is arranged on sponge interlayer (2) On outer surface;One end of connecting rod (4) is connected to the upper surface centre of polishing disk (3) using flexible clutch (6), and A confession fluid apertures (8) it has been formed through at internal axis, external port is inlet, while soft polishing pad (1), sponge interlayer (2) one and confession fluid apertures (8) are connected in connecting rod (4) centre bore, are each formed with the center of polishing disk (3);Flexible pipe (5) It is attached on the inner peripheral surface of confession fluid apertures (8);Electro spindle (7) is enclosed on the outer circumference surface of connecting rod (4), and inside is provided with electronic Machine.
  2. 2. feed flow small abrasive nose polishing tool in center according to claim 1, it is characterised in that:In described connecting rod (4) Confession fluid apertures (8) it is identical with the center-hole diameter on soft polishing pad (1), sponge interlayer (2), polishing disk (3).
  3. 3. feed flow small abrasive nose polishing tool in center according to claim 1, it is characterised in that:Described soft polishing pad (1) it is polyurethane polishing pad, outer surface is provided with crisscross grooves, and the intersection point of crisscross grooves is located at central hole.
CN201710516235.XA 2017-06-29 2017-06-29 Center feed flow small abrasive nose polishing tool Pending CN107344329A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108436717A (en) * 2018-03-20 2018-08-24 重庆医科大学 A kind of use for laboratory electrode grinding device and polishing process
CN109531406A (en) * 2018-12-07 2019-03-29 天津大学 A kind of milling tool and grinding method of the grinding and polishing of concretion abrasive self-sharpening
CN111531450A (en) * 2020-06-19 2020-08-14 湘潭大学 Take chip-breaker carbide blade chemical mechanical polishing equipment
WO2021135452A1 (en) * 2019-12-31 2021-07-08 天津大学 Sub-aperture center liquid supply optical surface series machining technology and tool
CN113400176A (en) * 2021-06-21 2021-09-17 西安奕斯伟硅片技术有限公司 Silicon wafer edge polishing device and method
CN117124224A (en) * 2023-10-28 2023-11-28 山西通远磁材有限公司 Plane grinding polisher
CN109531406B (en) * 2018-12-07 2024-04-26 天津大学 Grinding tool and grinding method for self-sharpening grinding and polishing of fixed abrasive

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JP2005254416A (en) * 2004-03-15 2005-09-22 Okamoto Machine Tool Works Ltd Polishing method of square work
CN1727116A (en) * 2004-11-10 2006-02-01 中国科学院长春光学精密机械与物理研究所 A kind of numerical control polishing is with contactless hydrojet bistrique
JP2008006540A (en) * 2006-06-29 2008-01-17 Disco Abrasive Syst Ltd Polishing method
JP2009160695A (en) * 2008-01-08 2009-07-23 Nikon Corp Polishing device
CN103707154A (en) * 2013-12-17 2014-04-09 天津大学 Disc type polishing device and method based on dynamic pressure effect
CN104589183A (en) * 2015-02-06 2015-05-06 河南理工大学 Processing device for ultrasonic grinding on sapphire lenses
CN105234823A (en) * 2015-10-27 2016-01-13 上海华力微电子有限公司 Grinding liquid supply and grinding pad trimming device and grinding drilling crew
CN205148079U (en) * 2015-10-22 2016-04-13 盛昌远机械股份有限公司 Lapping liquid supply structure of grinding miller

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005254416A (en) * 2004-03-15 2005-09-22 Okamoto Machine Tool Works Ltd Polishing method of square work
CN1727116A (en) * 2004-11-10 2006-02-01 中国科学院长春光学精密机械与物理研究所 A kind of numerical control polishing is with contactless hydrojet bistrique
JP2008006540A (en) * 2006-06-29 2008-01-17 Disco Abrasive Syst Ltd Polishing method
JP2009160695A (en) * 2008-01-08 2009-07-23 Nikon Corp Polishing device
CN103707154A (en) * 2013-12-17 2014-04-09 天津大学 Disc type polishing device and method based on dynamic pressure effect
CN104589183A (en) * 2015-02-06 2015-05-06 河南理工大学 Processing device for ultrasonic grinding on sapphire lenses
CN205148079U (en) * 2015-10-22 2016-04-13 盛昌远机械股份有限公司 Lapping liquid supply structure of grinding miller
CN105234823A (en) * 2015-10-27 2016-01-13 上海华力微电子有限公司 Grinding liquid supply and grinding pad trimming device and grinding drilling crew

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108436717A (en) * 2018-03-20 2018-08-24 重庆医科大学 A kind of use for laboratory electrode grinding device and polishing process
CN109531406A (en) * 2018-12-07 2019-03-29 天津大学 A kind of milling tool and grinding method of the grinding and polishing of concretion abrasive self-sharpening
CN109531406B (en) * 2018-12-07 2024-04-26 天津大学 Grinding tool and grinding method for self-sharpening grinding and polishing of fixed abrasive
WO2021135452A1 (en) * 2019-12-31 2021-07-08 天津大学 Sub-aperture center liquid supply optical surface series machining technology and tool
CN111531450A (en) * 2020-06-19 2020-08-14 湘潭大学 Take chip-breaker carbide blade chemical mechanical polishing equipment
CN111531450B (en) * 2020-06-19 2021-07-30 湘潭大学 Take chip-breaker carbide blade chemical mechanical polishing equipment
CN113400176A (en) * 2021-06-21 2021-09-17 西安奕斯伟硅片技术有限公司 Silicon wafer edge polishing device and method
CN117124224A (en) * 2023-10-28 2023-11-28 山西通远磁材有限公司 Plane grinding polisher
CN117124224B (en) * 2023-10-28 2024-01-26 山西通远磁材有限公司 Plane grinding polisher

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Application publication date: 20171114