CN111590459A - Control system of chemical mechanical polishing equipment for hard alloy blade with chip breaker groove - Google Patents
Control system of chemical mechanical polishing equipment for hard alloy blade with chip breaker groove Download PDFInfo
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- CN111590459A CN111590459A CN202010454073.3A CN202010454073A CN111590459A CN 111590459 A CN111590459 A CN 111590459A CN 202010454073 A CN202010454073 A CN 202010454073A CN 111590459 A CN111590459 A CN 111590459A
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- Prior art keywords
- polishing
- module
- touch screen
- vibration
- chemical
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A control system of a chemical mechanical polishing device for a hard alloy blade with a chip breaker groove comprises a touch screen, a frequency conversion module, a polishing solution supply module, a vibration module and a lifting module; the touch screen is used for setting the rotating speed of the clamp, the temperature of the polishing liquid, the flow rate of the polishing liquid, the polishing time, the vibration frequency and the position of the polishing head; the frequency conversion module controls the rotating speed of the main motor, and the polishing solution supply module controls the temperature and the flow of the polishing solution; the vibration module controls the vibration frequency of a polishing head vibration motor; the lifting module controls the position of the polishing head; after the system is started, the polishing solution supply module adjusts the temperature of the polishing solution to reach a set temperature value, after the temperature meets the requirement, the main motor, the vibration motor and the polishing solution are started to supply the solution, timing is started, the temperature and flow data of the polishing solution are automatically recorded and stored, and after the set polishing time is reached, the system is automatically stopped; the invention has the advantages of simple operation, convenient control and reliable operation.
Description
Technical Field
The invention relates to the technical field of chemical mechanical polishing equipment control, in particular to a control system of a chemical mechanical polishing equipment for a hard alloy blade with a chip breaker.
Background
The hard alloy cutter has high strength and hardness, good wear resistance and oxidation resistance, and higher cutting speed and longer cutting life than high-speed steel cutters, and is the leading cutter in developed countries at present. The quality and performance of the cemented carbide tool directly determine the production level of the manufacturing industry, and the surface quality (surface roughness, thermal deformation, cracks, scratches, surface damage) of the cemented carbide tool is an important factor influencing the durability of the cemented carbide tool. The diamond grinding wheel grinding is the most common processing method for domestic hard alloy cutters, but the common grinding easily causes the surface of the hard alloy cutter to be damaged (such as a deformation layer, surface/subsurface cracks, residual stress and the like), and does not achieve high dimensional precision and surface roughness, and the processing efficiency is low; although the high-speed grinding can improve the processing efficiency and reduce the surface roughness of the hard alloy cutter, a large amount of heat and overlarge pressure are generated in the grinding process, so that the surface temperature of the hard alloy cutter is quickly increased, the grinding heat cannot be effectively conducted, and the surface of the hard alloy cutter is damaged; the surface quality of the hard alloy cutter can be improved to a certain extent through ultra-precision grinding, but an expensive ultra-precision grinding machine needs to be imported, so that the production cost is greatly improved, the uniformity and the contour of grinding wheel abrasive particles are difficult to ensure, the abrasive particles are abraded greatly, and the surface of the hard alloy cutter is easy to damage.
The chemical mechanical polishing technique can obtain high surface quality such as flatness, few scratches and the like on a processed workpiece through a combination of mechanical grinding and chemical etching. Chemical mechanical polishing has become more and more widely used, from the initial use for obtaining high quality glass surfaces to the various industries of semiconductor industry today, such as interlayer dielectrics (ILD), mechanical abrasive tools, precision valves, etc. There have been studies to apply chemical mechanical polishing to the surface of a cemented carbide insert to reduce or eliminate surface/sub-surface damage of the cemented carbide insert and improve the surface quality and cutting performance of the cemented carbide insert.
But the current chemical mechanical polishing equipment is only suitable for polishing planar cemented carbide inserts. Most of hard alloy blades are provided with chip breakers due to the process requirements of cutting off chips, maintaining processing precision, prolonging service life of the hard alloy blades and the like, and the chip breakers are limited by chemical mechanical polishing equipment, so that the chemical mechanical polishing process cannot be applied to surface polishing of the chip breakers of the hard alloy blades with the chip breakers.
Disclosure of Invention
In order to solve the technical problem, the invention provides a control system of a chemical mechanical polishing device for a hard alloy blade with a chip breaker groove, which realizes mechanical polishing of the surface of the hard alloy blade with the chip breaker groove structure through a brush device with vibration and accurate control of the lifting position, and simultaneously supplies chemical polishing liquid to the brush through a polishing liquid supply device, thereby realizing the mechanical chemical polishing processing technology of the hard alloy blade with the chip breaker groove.
The technical scheme of the invention is as follows: on the basis of the existing polishing equipment, a Z-direction precise sliding table is additionally arranged on the outer side of a machine body, a brush disc is arranged on a working table of the sliding table and is connected with a vibration motor, and a polishing liquid supply hole is formed in the center of a brush hole.
The control system of the chemical mechanical polishing equipment for the hard alloy blade with the chip breaker groove is characterized by comprising a touch screen for controlling the lifting distance of a lifting module, so that a polishing brush disc can fully contact with a groove of a processing surface to be polished; the vibration module for controlling the polishing brush disc changes the vibration frequency to improve the polishing process, and the polishing solution supply module is controlled to provide proper chemical polishing solution for the whole polishing process.
The distance for descending the hairbrush polishing disc is set on the touch screen, so that the hairbrush polishing disc descends to a proper position and can be fully contacted with a chip breaker groove of the hard alloy blade arranged on the main polishing disc, and when the main polishing disc rotates, the hairbrush of the hairbrush polishing disc can move relative to the chip breaker groove of the hard alloy blade, so that mechanical polishing is realized.
The temperature and the flow of the supplied chemical polishing solution are set on the touch screen, so that the requirement of a polishing process on the polishing solution is met, the chemical polishing solution flows to the whole polishing disc through the diversion trench in the center of the polishing disc, and when the main polishing disc rotates, the brush polishing disc can paint the chemical polishing solution on the surface of a workpiece to be polished, so that the chemical reaction is generated between the chemical polishing solution and the surface to be processed, the chemical effect is achieved on the whole polishing process, and the chemical mechanical polishing is realized.
The vibration frequency of the hairbrush polishing disc is set on the touch screen, the contact uniformity of polishing liquid and the surface of a workpiece to be polished is improved, the chemical reaction effect and uniformity of the polishing liquid are improved, and the polishing quality and efficiency are improved from the surface.
The built-in analog output module of touch-sensitive screen can set up vibration frequency, and the analog input module passes to the touch-sensitive screen with the temperature and the flow that temperature sensor and flowmeter gathered and shows, and the touch-sensitive screen can show whole polishing time and relevant data of storage.
The invention has the advantages that:
the invention utilizes the touch screen, the polishing solution supply module, the lifting module and the vibration module to realize the chemical mechanical polishing of the hard alloy blade with the chip breaker groove, and has the advantages of simple operation, convenient control, reliable operation and low price.
Drawings
FIG. 1 is a control system composition diagram of the present invention
FIG. 2 is a main interface diagram of the present invention
FIG. 3 is a flow chart of the system auto mode
Detailed Description
For a clearer understanding of the technical features, objects and effects of the present invention, the present invention will be further described with reference to the accompanying drawings and examples, but the present invention is not limited to the scope;
the system structure of the present invention is explained below with reference to fig. 1 and 2;
as shown in fig. 1, the polishing device comprises a touch screen, a frequency conversion module, a polishing solution supply module, a vibration module and a lifting module; the touch screen is not only a system display center, but also a control core of the system, and is connected with the frequency conversion module, the polishing solution supply module, the lifting module and the vibration module; the polishing solution supply module comprises a temperature controller and a flow controller which are respectively connected with an analog quantity input module and an analog quantity output module in the PLC arranged in the touch screen, and the lifting module comprises a stepping motor which is directly connected with the touch screen;
as shown in fig. 2, a start button, a stop button and an emergency stop button are arranged on an interface of the control area and used for controlling the start, stop and emergency stop of the polishing machine, and the control mode is divided into an automatic mode and a manual mode; the parameter setting area can set the temperature of polishing liquid, the flow rate of the polishing liquid, the polishing time, the position of a polishing head, the vibration frequency and the rotating speed of a clamp, and the real-time display area can display real-time curves of the temperature and the flow rate during polishing in real time, wherein a purple line is a temperature curve, and a green curve is a flow rate curve;
when the system is started in an automatic mode, the touch screen controls a temperature controller in a polishing liquid supply module according to a set temperature value, so that the temperature of the polishing liquid reaches a set value, the integrated temperature detection function of the temperature controller transmits acquired data to the touch screen, when the temperature reaches the set value, a stepping motor in a lifting module accurately controls a polishing head to reach a set position, timing is started, a main motor, a vibration motor and the polishing liquid start to supply liquid, the integrated flow detection function of the flow controller transmits the data to the touch screen for display and storage, and the system stops running by clicking a stop button of a touch screen interface or automatically stops after the polishing time is up; the independent control of the main motor, the polishing solution supply and the vibration motor can be realized in a manual mode;
referring to fig. 3, the automatic mode operation of the present invention is as follows:
1. start of
2. Setting the position of a polishing head, the frequency of a vibration motor, the temperature and flow of the polishing liquid, the polishing rotating speed and the polishing time on the touch screen;
3. the temperature controller starts to work to enable the temperature to reach a set value;
4. the temperature reaches a set value;
5. the step motor controls the polishing head to reach a set position;
6. starting timing, starting a main motor, a vibration motor and polishing solution to start supplying liquid;
7. when the specified time is reached, the polishing head returns to the initial position, the liquid supply is stopped, and the main motor and the vibration motor are closed;
8. and (6) ending.
In the foregoing, the present invention has been described in detail with reference to the accompanying drawings. However, it should be understood by those skilled in the art that the present invention is not limited to the embodiment, but can be modified in various ways, or constructed or implemented in various other forms without departing from the scope and spirit as described and defined in the appended claims.
Claims (5)
1. A control system of a chemical mechanical polishing device for a hard alloy blade with a chip breaker groove is characterized by comprising a touch screen integrated machine, a frequency conversion module, a polishing solution supply module, a vibration module and a lifting module, wherein the touch screen controls the lifting distance of the lifting module so that a polishing brush disc can be in full contact with a groove of a processing surface to be polished; the vibration module for controlling the polishing brush disk changes the vibration frequency to improve the polishing process, and the polishing solution supply module is controlled to provide a proper chemical polishing solution for the whole polishing process.
2. The lifting module is used for setting the descending distance of the hairbrush polishing disc on the touch screen, so that the hairbrush polishing disc descends to a proper position and can be fully contacted with a chip breaker groove of a hard alloy blade arranged on the main polishing disc, and when the main polishing disc rotates, the hairbrush of the hairbrush polishing disc can move relative to the chip breaker groove of the hard alloy blade, so that mechanical polishing is realized.
3. The polishing solution supply module is used for setting the temperature and the flow of the supplied chemical polishing solution on the touch screen, so that the requirement of a polishing process on the polishing solution is met, the chemical polishing solution flows to the whole polishing disc through the diversion trench in the center of the polishing disc, and when the main polishing disc rotates, the brush polishing disc can paint the chemical polishing solution on the surface of a workpiece to be polished, so that the chemical polishing solution and the surface to be processed are subjected to chemical reaction, a chemical effect is achieved on the whole polishing process, and chemical mechanical polishing is achieved.
4. The vibration module is provided with the vibration frequency of the hairbrush polishing disc on the touch screen, so that the contact uniformity of polishing liquid and the surface of a workpiece to be polished is improved, the chemical reaction effect and uniformity of the polishing liquid are improved, and the polishing quality and efficiency are improved from the surface.
5. The vibration module and an analog quantity output module arranged in the touch screen can set vibration frequency, the analog quantity input module transmits the temperature and the flow collected by the temperature sensor and the flowmeter to the touch screen for display, and the touch screen can display the whole polishing time and store related data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010454073.3A CN111590459A (en) | 2020-05-26 | 2020-05-26 | Control system of chemical mechanical polishing equipment for hard alloy blade with chip breaker groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010454073.3A CN111590459A (en) | 2020-05-26 | 2020-05-26 | Control system of chemical mechanical polishing equipment for hard alloy blade with chip breaker groove |
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| Publication Number | Publication Date |
|---|---|
| CN111590459A true CN111590459A (en) | 2020-08-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010454073.3A Pending CN111590459A (en) | 2020-05-26 | 2020-05-26 | Control system of chemical mechanical polishing equipment for hard alloy blade with chip breaker groove |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101972978A (en) * | 2010-08-30 | 2011-02-16 | 清华大学 | Novel chemical mechanical polishing device |
| US20130102152A1 (en) * | 2011-10-20 | 2013-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| CN104742009A (en) * | 2015-03-31 | 2015-07-01 | 浙江工业大学 | Chemical mechanical polishing method for SiC materials |
| CN204819213U (en) * | 2015-07-13 | 2015-12-02 | 河南科技学院 | Roll -to -Roll chemically mechanical polishing machine concreties abrasive material burnishing roll photocuring machine |
| CN205342684U (en) * | 2016-02-17 | 2016-06-29 | 福建省威诺数控有限公司 | Vibration burnishing device |
| CN208163383U (en) * | 2018-05-23 | 2018-11-30 | 卢慧滨 | A kind of semiconductor machining burnishing device |
| CN209579020U (en) * | 2019-03-26 | 2019-11-05 | 漳州盈新精密模具有限公司 | Grinding device is used in a kind of production of precision die |
-
2020
- 2020-05-26 CN CN202010454073.3A patent/CN111590459A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101972978A (en) * | 2010-08-30 | 2011-02-16 | 清华大学 | Novel chemical mechanical polishing device |
| US20130102152A1 (en) * | 2011-10-20 | 2013-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| CN104742009A (en) * | 2015-03-31 | 2015-07-01 | 浙江工业大学 | Chemical mechanical polishing method for SiC materials |
| CN204819213U (en) * | 2015-07-13 | 2015-12-02 | 河南科技学院 | Roll -to -Roll chemically mechanical polishing machine concreties abrasive material burnishing roll photocuring machine |
| CN205342684U (en) * | 2016-02-17 | 2016-06-29 | 福建省威诺数控有限公司 | Vibration burnishing device |
| CN208163383U (en) * | 2018-05-23 | 2018-11-30 | 卢慧滨 | A kind of semiconductor machining burnishing device |
| CN209579020U (en) * | 2019-03-26 | 2019-11-05 | 漳州盈新精密模具有限公司 | Grinding device is used in a kind of production of precision die |
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Application publication date: 20200828 |