CN111505474A - CO2Laser amplifier upper energy level service life testing device and method - Google Patents
CO2Laser amplifier upper energy level service life testing device and method Download PDFInfo
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- CN111505474A CN111505474A CN202010334463.7A CN202010334463A CN111505474A CN 111505474 A CN111505474 A CN 111505474A CN 202010334463 A CN202010334463 A CN 202010334463A CN 111505474 A CN111505474 A CN 111505474A
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The invention discloses a device for testing the upper energy level service life of a CO2 laser amplifier, which comprises: the signal trigger is used for sending a trigger signal to the CO2 laser amplifier to be detected and starting the CO2 laser amplifier to be detected to excite the working particles to jump to the upper energy level; and the testing device is used for detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level service life of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light. Utilize CO2 laser amplifier to arouse the working particle in this application to detecting the transition light and obtain the upper energy level life-span, the actual working process of simulation CO2 laser amplifier that can be more real, and then survey more accurate upper energy level life-span, provide more reliable data basis for CO2 laser amplifier's application. The application also provides a method for testing the upper energy level service life of the CO2 laser amplifier, which has the beneficial effects.
Description
Technical Field
The invention relates to the technical field of CO2 lasers, in particular to a device and a method for testing the upper energy level service life of a CO2 laser amplifier.
Background
Laser lithography is the heart of modern large-scale integrated circuit manufacturing technology, and laser light sources are important components of lithographic apparatus. The high repetition frequency, narrow pulse width and high power CO2 laser mainly adopts a Main Oscillation Power Amplification (MOPA) technical approach, i.e. the high repetition frequency and narrow pulse width seed laser obtains high power laser through the power amplification of a multi-stage CO2 laser amplifier. Therefore, it is a core technology of great interest to improve the power extraction efficiency (amplification factor) of the CO2 laser amplifier.
Research shows that the service life of the upper energy level of the CO2 laser amplifier is one of factors influencing the power extraction efficiency of the CO2 laser amplifier, and high-precision measurement of the service life of the upper energy level of the CO2 laser amplifier is beneficial to integration and optimization of a high-repetition-frequency, narrow-pulse-width and high-power CO2 laser system.
Disclosure of Invention
The invention aims to provide a device and a method for testing the upper energy level service life of a CO2 laser amplifier, which improve the accuracy and reliability of the upper energy level service life test of a CO2 laser amplifier.
In order to solve the above technical problem, the present invention provides an upper energy level life testing apparatus for a CO2 laser amplifier, including:
the signal trigger is used for sending a trigger signal to the CO2 laser amplifier to be detected and starting the CO2 laser amplifier to excite the working particles to jump to the upper energy level;
and the testing device is used for detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level service life of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
In an optional embodiment of the present application, the testing device includes a resonant cavity, a laser lead-out component, and a laser detector;
wherein the resonant cavity is used for enabling the transition light to resonate through the resonant cavity to form laser which can be detected by the laser detector;
the laser detector is used for receiving the laser led out from the resonant cavity by the laser leading-out component and detecting the energy of the received laser, so that the upper energy level service life is determined according to the time length from the time when the CO2 laser amplifier to be detected stops exciting the working particles to the time when the energy of the laser is attenuated to 1/e of the highest energy.
In an alternative embodiment of the present application, the resonant cavity comprises a total reflection mirror and a reflective phase retarder that can phase-delay the polarization of the reflected polarized light by 180 °;
the laser leading-out component comprises a film-coated beam splitting plate which is highly transmissive to S polarized light and highly reflective to P polarized light, and a Pockels cell which can delay the polarization phase of the polarized light by 90 degrees when 1/4 wave voltage is applied;
the total reflection mirror and the reflective phase delay sheet are respectively arranged on two sides of the CO2 laser amplifier to be detected; the film-coated beam splitting sheet and the Pockels cell are arranged between the CO2 laser amplifier to be detected and the reflective phase delay sheet, and the Pockels cell is positioned between the film-coated beam splitting sheets;
the total reflection mirror, the CO2 laser amplifier to be detected, the coated beam splitting sheet, the Pockels cell and the reflective phase retardation sheet are all located on the same optical axis.
In an optional embodiment of the present application, the pockels cell is connected to the signal trigger, and when the signal trigger receives a trigger signal, 1/4-wave voltage is applied to the pockels cell.
In an optional embodiment of the present application, a beam shrinking mirror group is further disposed between the CO2 laser amplifier to be tested and the pockels cell, and is configured to match a gain area aperture of the CO2 laser amplifier to be tested with an incident aperture of the pockels cell.
In an optional embodiment of the present application, the testing device is a laser spectrometer, and is configured to detect laser light generated by energy released by transition of the upper level to the lower level of the working particle, and determine the life of the upper level according to a duration from when the CO2 laser amplifier to be tested stops exciting the working particle to when the laser light is not received.
In an optional embodiment of the present application, the signal trigger is a synchronous trigger that can trigger a square wave signal.
The application also provides a method for testing the upper energy level life of the CO2 laser amplifier, which is applied to any one of the devices for testing the upper energy level life of the CO2 laser amplifier, and comprises the following steps:
sending a trigger signal to a CO2 laser amplifier to be tested through a signal trigger, and triggering the upward energy level transition of the excited working particles in the CO2 laser amplifier to be tested;
and detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level through a testing device, and determining the service life of the upper energy level of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
In an optional embodiment of the present application, the sending a trigger signal to the CO2 laser amplifier to be tested by a signal trigger includes:
sending a first square wave trigger signal to a CO2 laser amplifier to be tested through a synchronous trigger, and controlling the duration of the CO2 laser amplifier to be tested for exciting the working particles to continue to reach a first preset duration;
detecting and analyzing transition light generated by energy released by the working particles from the transition from the upper energy level to the lower energy level through a testing device, and determining the service life of the upper energy level of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light comprises the following steps:
when the time difference delta T between the moment when the CO2 laser amplifier to be tested stops exciting the working particles is equal to 0, controlling a Pockels cell in the testing device to be connected with 1/4 wave voltage, so that the transition light released by the CO2 laser amplifier to be tested resonates in a resonant cavity in the testing device to form laser which can be detected by a laser detector;
when the time length of the Pockels cell for switching on 1/4 wave voltage reaches a second preset time length, controlling the Pockels cell to switch on 1/4 wave voltage so that laser can be led out to a laser detector through a coating beam splitting sheet in the testing device;
and recording the corresponding laser energy when the time difference delta T is equal to 0 through the laser detector, repeatedly executing the operation step of sending the first square wave trigger signal to the CO2 laser amplifier to be detected through the synchronous trigger again, gradually increasing the set time difference delta T each time, and obtaining the laser energy corresponding to each different time difference delta T through the detection of the laser detector until the laser energy detected by the laser detector is equal to 1/e of the corresponding laser energy when the time difference delta T is equal to 0.
In an optional embodiment of the present application, when a time difference Δ T from a time when the CO2 laser amplifier to be tested stops exciting the working particles is equal to 0, controlling a pockels cell in the testing apparatus to turn on 1/4-wave voltage includes:
and when the time when the CO2 laser amplifier to be detected stops exciting the working particles is the time difference delta T, the synchronous trigger sends a second square wave signal to the Pockels cell, so that the duration of the Pockels cell plus 1/4 wave voltage is the second preset duration.
The invention provides a device for testing the upper energy level service life of a CO2 laser amplifier, which comprises: the signal trigger is used for sending a trigger signal to the CO2 laser amplifier to be detected and starting the CO2 laser amplifier to excite the working particles to jump to the upper energy level; and the testing device is used for detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level service life of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
After being excited, the working particles in the CO2 laser amplifier can make a transition from a base energy state to a high energy state of an upper energy level, the working particles in the high energy state can make a transition to the base energy state again when being unstable, and energy is released in the transition process, namely energy provided for laser amplification. The laser of incident does not exist among the CO2 laser amplifier that awaits measuring in this application, and the energy of working particle transition generates the transition light to detect the transition light through testing arrangement, can continuously release the time length of transition light through the energy of transition light and CO2 laser amplifier and can reflect the upper energy level life-span. The upper energy level testing device of the CO2 laser amplifier provided in the application can simulate the state of the CO2 laser amplifier in actual working more truly, so that the more accurate upper energy level service life is measured, and more reliable data basis is provided for the application of the CO2 laser amplifier.
The application also provides a method for testing the upper energy level service life of the CO2 laser amplifier, which has the beneficial effects.
Drawings
In order to more clearly illustrate the embodiments or technical solutions of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an upper-level lifetime testing apparatus of a CO2 laser amplifier according to an embodiment of the present disclosure;
fig. 2 is a schematic diagram of an optical path structure for an upper-level lifetime test of a CO2 laser amplifier provided in an embodiment of the present application;
fig. 3 is a schematic flowchart of a method for testing the upper-level lifetime of a CO2 laser amplifier according to an embodiment of the present disclosure;
fig. 4 is a schematic flow chart of the upper level lifetime test amplification of a CO2 laser amplifier according to another embodiment of the present application;
FIG. 5 shows the laser energy received by the laser detector according to the embodiment of the present application with a time Δ TnSchematic diagram of the variation of (1).
Detailed Description
The core of the invention is to provide a technical scheme for testing the life of the upper energy level of the CO2 laser amplifier, and the life of the upper energy level of the CO2 laser amplifier can be accurately measured in real time.
In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
At present, the conventional method for testing the upper energy level life of the CO2 laser amplifier is to take the working particles in the CO2 laser amplifier, which is beneficial to taking out CO2 molecules, nitrogen molecules and the like from the CO2 laser amplifier, as a test sample, and emit excitation light to the working particles through a fluorescence spectrometer, so that the working particles in the test sample transition to the upper energy level, then transition from the unstable upper energy level back to the ground state level, and simultaneously release fluorescence. And detecting the duration of the time that the working particles can release the fluorescence by using a fluorescence spectrometer, and further determining the service life of the upper energy level. The life of the upper energy level of the CO2 laser amplifier is detected by a fluorescence spectrometer, and CO is ignored2The influence of gas dissociation, temperature change, turbulence and other factors caused by high-voltage discharge on the service life of the upper energy level in the working process of the laser amplifier cannot detect CO in real time2Upper level lifetime of the laser amplifier.
Therefore, another technical scheme for detecting the upper energy level life of the CO2 laser amplifier is provided in the application. Specifically, as shown in fig. 1, fig. 1 is a schematic structural diagram of an upper-level lifetime testing apparatus of a CO2 laser amplifier according to an embodiment of the present application. The apparatus may include:
the signal trigger 10 is used for sending a trigger signal to the CO2 laser amplifier 20 to be tested and starting the CO2 laser amplifier 20 to be tested to excite the working particles to jump to the upper energy level;
the signal trigger 10 can trigger the CO2 laser amplifier 20 to be tested to start exciting the working particles for a period of time, and during actual testing, the triggering signal of the signal trigger can directly control the start and stop of the CO2 laser amplifier 20 to be tested to excite the working particles, that is, the duration.
And the testing device 30 is used for detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level service life of the CO2 laser amplifier 20 to be tested according to the energy and the duration of the transition light.
In general, the testing device 30 may be a device with light detecting function, after the CO2 laser amplifier 20 stops exciting the working particle, it starts to detect the light released from the working particle transition in the CO2, until the detected light disappears or the energy of the light is low, and the duration of the process is the upper energy level life.
In order to determine the time when the testing device 30 starts to emit light, the testing device 30 may also be connected to the signal trigger 10, so that the signal triggers the CO2 laser amplifier 20 to be tested to stop exciting the working particles, and then triggers the testing device 30 to test.
Specifically, the CO2 laser amplifier 20 to be tested is a device for increasing laser power energy, and mainly provides energy for the working particles in the CO2 laser amplifier 20 to be tested to excite the working particles to have low energy level excited to high energy level, that is, upper energy level, the state of the working particles in the high energy level is unstable, and the working particles are transited from the high energy level to the low energy level, and energy is released in the transition process. If the incident laser exists in the CO2 laser amplifier 20 to be measured, the energy released by the transition from the high energy level to the low energy level of the working particles is absorbed by the laser, and the amplification of the laser energy and power is realized.
It can be seen that the energy released by the working particles in the CO2 laser amplifier 20 to be measured is critical to laser amplification. The upper energy level life of the CO2 laser amplifier 20 to be tested is the time period during which the working particles can release energy continuously after being excited. When the working particle in the CO2 laser amplifier 20 to be tested is excited for a period of time, the longer the time for which the working particle can jump to release energy, the more energy can be provided for laser power amplification, and accordingly, the longer the upper energy level life of the CO2 laser amplifier 20 to be tested is.
In the conventional upper energy level life test process of the CO2 laser amplifier, the upper energy level life of the CO2 laser amplifier is mainly considered to be related to the time length of the working particles capable of being kept at the upper energy level, and other parts in the CO2 laser amplifier only provide excitation energy for the working particles, so that the working particles are taken out of the CO2 laser amplifier to be tested independently in the conventional test method.
However, in the application, it is found that, in the actual application of the CO2 laser amplifier 20 to be tested, when the transition is excited to the working particle, the transition of the working particle is excited by high-voltage discharge, and in the process, gas separation of part of the working particle is easily caused, and the influence of factors such as temperature and turbulence also exists, so that finally, the upper energy level life of the CO2 laser amplifier 20 to be tested in the actual application and the upper energy level life of the working particle which is directly and independently tested have deviation.
Therefore, in order to make the test of the upper energy level life of the CO2 laser amplifier 20 to be tested closer to the actual application, the working particles of the CO2 laser amplifier to be tested are not taken out of the CO2 laser amplifier 20 to be tested, but are directly excited by the CO2 laser amplifier 20 to be tested. Because there is no incident laser absorption energy and no incident laser amplification power in the CO2 laser amplifier 20 to be measured, when the working particles in the CO2 laser amplifier 20 to be measured transit from the high energy level to the low energy level, the released energy is released in the form of photon laser, so that the light released from the CO2 laser amplifier 20 to be measured can be directly detected, and the upper energy level life of the CO2 laser amplifier 20 to be measured can be determined according to the duration of continuously receiving the light and the energy of the light after the excitation of the working particles is finished.
In summary, when the upper energy level life of the CO2 laser amplifier is tested, the working particles are not taken out of the CO2 laser amplifier for testing, but the CO2 laser amplifier directly excites the working particles, and the light generated by the transition release energy of the working particles is detected by the testing device, so that the working state of the CO2 laser amplifier in practical application is simulated to a greater extent, the accuracy of the upper energy level life test of the CO2 laser amplifier is improved, and a reliable basis is provided for the practical application of the CO2 laser amplifier.
As mentioned above, the light generated by the excited working particle in the CO2 laser amplifier 20 to be tested and transferred to the low energy level needs a testing device with light detecting capability to detect, and the testing device 30 has many kinds, for example, the laser spectrometer is a simpler one. The light emitted from the CO2 laser amplifier 20 to be detected is generally a laser with photon energy, and the light can be detected by using a laser spectrometer.
Of course, other detection devices may be used in addition to laser spectrometers. Specifically, in another specific embodiment of the present application, the testing device 30 may specifically include:
the laser detection device comprises a resonant cavity, a laser lead-out component and a laser detector;
the resonant cavity is used for enabling the transition light to resonate through the resonant cavity to form laser which can be detected by the laser detector;
the laser detector is used for receiving the laser led out from the resonant cavity by the laser leading-out component and detecting the energy of the received laser, so that the upper energy level service life is determined according to the time length from the time when the CO2 laser amplifier to be detected stops exciting the working particles to the time when the energy of the laser is attenuated to 1/e of the highest energy.
As described above, the laser generated by the energy released by the working particles of the CO2 laser amplifier to be detected is a large amount of small energy, and has no specific vibration and transmission direction, which is inconvenient for detection. Therefore, the testing device provided in this embodiment includes a resonant cavity, so that after laser released from the CO2 laser amplifier to be tested can oscillate repeatedly in the resonant cavity, energy power is accumulated to finally form laser with higher energy, and then the laser is guided out from the resonant cavity through the laser guiding component for detection. The energy of the led laser is detected by the laser detector, obviously, as the time for stopping exciting the working particles from the CO2 laser amplifier to be detected is gradually prolonged, the laser light emitted by the CO2 laser amplifier to be detected is also gradually reduced, and correspondingly, the laser energy capable of being detected by the laser detector is also gradually reduced, so that when the laser detector detects that the laser energy is reduced to 1/e of the maximum energy of the laser, the time for stopping exciting the working particles from the CO2 laser amplifier to be detected is the time corresponding to the upper energy level service life.
As shown in fig. 2, fig. 2 is a schematic diagram of an optical path structure of an upper-level lifetime test of a CO2 laser amplifier provided in an embodiment of the present application. The testing device 30 may specifically include:
the resonant cavity comprises a total reflection mirror 31 and a reflective phase retarder 32 which can delay the polarization phase of the reflected polarized light by 180 degrees;
the laser leading-out component comprises a film-coated beam splitting plate 33 which is highly transmissive to S polarized light and highly reflective to P polarized light, and a Pockels cell 34 which can delay the polarization phase of the polarized light by 90 degrees when 1/4 wave voltage is applied;
the total reflection mirror 31 and the reflective phase retardation plate 32 are respectively arranged on two sides of the CO2 laser amplifier 20 to be measured; the film-coated beam splitting sheet 33 and the Pockels cell are arranged between the CO2 laser amplifier 20 to be tested and the reflective phase delay sheet 32, and the Pockels cell 34 is positioned between the film-coated beam splitting sheets 33;
the total reflection mirror 31, the CO2 laser amplifier 20 to be measured, the coated beam splitting sheet 33, the Pockels cell 34 and the reflective phase retardation sheet 32 are all located on the same optical axis.
Specifically, a synchronous trigger can be used as the signal trigger 10 to send a square wave pulse signal to the CO2 laser amplifier 20 to be tested, and after a square wave voltage is applied to the CO2 laser amplifier 20 to be tested, the gain region accumulates the number of upper-level particles and starts to release laser light.
It should be noted that the laser beam emitted from the CO2 laser amplifier is a light wave formed by only one photon energy, and each photon has a definite polarization direction, but the polarization state is random for a large number of photon light waves. After being released from the CO2 laser amplifier 20 to be measured, the laser light passes through the film-coated beam splitter 33, and the film-coated beam splitter 33 is equivalent to an analyzer, and can only transmit S-polarized light and reflect P-polarized light, that is, the light entering the pockels cell through the film-coated beam splitter is S-polarized light.
When the pockels cell 34 is not switched on with 1/4-wave voltage, S-polarized light is directly transmitted from the pockels cell 34, and the pockels cell 34 does not have any influence on the S-polarized light. The S-polarized light enters the reflective phase retarder 32 from the pockels cell 34 and is reflected, and the phase is delayed by 180 degrees, so that the S-polarized light is changed into P-polarized light, and when the P-polarized light passes through the pockels cell 34 again, the phase is not changed, and the S-polarized light enters the film-coated beam splitter 33. Since the coated beam splitter allows only S-polarized light to pass through, the coated beam splitter 33 acts as a mirror to reflect P-polarized light to the laser detector 35. In this process, no resonance is formed between the total reflection mirror 31 and the reflective retardation plate 32, and thus energy cannot be accumulated to form high-energy laser, and at this time, although the laser detector 35 can receive the incident laser beam, the energy of the laser beam is too weak and close to 0.
When the pockels cell 34 is connected with 1/4-wave voltage, after the laser light emitted by the CO2 laser detector 20 to be detected is filtered by the coated beam splitter 33 to form S polarized light, the pockels cell 34 can generate 90-degree phase delay for the S polarized light, and the polarized light after the phase delay is reflected by the reflective phase retarder 32 to generate 180-degree phase delay, and then generates 90-degree phase delay again through the pockels cell 34; that is to say, the S-polarized light filtered by the coated beam splitter 33 passes through the pockels cell 34 twice and passes through the reflective phase retarder 32 once, and when the S-polarized light enters the coated beam splitter 33 again, the phase is delayed by 360 degrees, that is, the polarization state of the S-polarized light is not changed, the polarized light can enter the total reflector 31 through the coated beam splitter 33 again, the total reflector 31 reflects the S-polarized light without changing the phase of the polarized light, and then the S-polarized light passes through the coated beam splitter 33, the pockels cell and the reflective phase retarder again, and so on, the S-polarized light can repeatedly resonate and accumulate energy in the resonant cavity formed by the total reflector 31 and the reflective phase retarder 32 to form laser with higher energy. When the resonant time length of the S polarized light reaches a preset time length, 1/4 wave voltage applied to the Pockels cell 34 is closed, the Pockels cell 34 does not change the polarization state phase of the laser any longer, and the laser can be led out to the laser detector 35 from the film coating fractional sheet 33.
When the upper energy level service life of the CO2 laser amplifier 20 to be tested is detected, the CO2 laser amplifier 20 is triggered by the signal trigger 10 to excite the working particles for a period of time, and then 1/4 wave voltage is applied to the pockels cell 34 immediately, so that laser light oscillates in the resonant cavity. At this time, the time for stopping exciting the working particles from the CO2 laser amplifier 20 to be detected is shortest, the number of photons released from the CO2 laser amplifier 20 to be detected is largest, the energy of the laser beam passing through the resonant cavity is also largest, after the laser beam oscillates in the resonant cavity for a period of time, the 1/4 wave voltage applied to the pockels cell 34 is disconnected, the laser beam can be led out and enter the laser detector 35, and at this time, the energy of the laser beam received by the laser detector 35 is largest.
After the laser detector 35 completes receiving and detecting laser, the signal trigger 10 triggers the CO2 laser amplifier 20 to be detected to excite the working particles again, however, the difference is that after the CO2 laser amplifier 20 to be detected finishes exciting the particle laser, 1/4 wave voltage is applied to the pockels cell 34, so that the laser light oscillates in the resonant cavity, in the process that the time difference Δ T is equal to 0, the number of photons released from the CO2 laser amplifier 20 to be detected is relatively reduced in the process that the time difference Δ T is greater than 0, the energy of the laser light resonating through the resonant cavity is relatively reduced, and finally, the laser detector 35 detects that the laser energy in the process is relatively reduced. The process of excitation, laser oscillation and laser detection of the CO2 laser amplifier 20 to be detected on the working particles is repeated in this way, and the time difference Δ T is controlled to gradually increase until the laser energy received by the laser detector 35 is equal to 1/e of the corresponding laser energy when the time difference Δ T is equal to 0, and then the time difference Δ T is the upper energy level life of the CO2 laser amplifier 20 to be detected.
Alternatively, in another embodiment of the present application, the signal trigger 10 may be further connected to the pockels cell 34, and the start time and the end time of the application of 1/4-wave voltage to the pockels cell 34 are controlled by the signal trigger 10, so as to accurately control the variation of the time difference Δ T.
Optionally, in another specific embodiment of the present application, the method may further include:
a beam reducing mirror group 36 is further arranged between the CO2 laser amplifier 20 to be detected and the Pockels cell 34 and is used for matching the aperture of the gain area of the CO2 laser amplifier 20 to be detected and the incident aperture of the Pockels cell 34.
Specifically, the laser light of the CO2 laser amplifier 20 to be measured is emitted from the gain region, and the aperture of the gain region is generally not the same as the incident aperture of the pockels cell 34, so that the beam reduction mirror 36 may be disposed between the CO2 laser amplifier 20 to be measured and the pockels cell 34, thereby adjusting the optical path between the CO2 laser amplifier 20 and the pockels cell 34. As shown in fig. 1, the beam-reducing mirror set 36 in fig. 1 is disposed between the CO2 laser amplifier 20 to be measured and the coating splitting sheet 33, and the beam-reducing mirror set 36 only uses one group of lens, and in practical applications, other similar schemes may be considered as long as the optical path transmission in the present application can be achieved.
Fig. 3 is a schematic flow chart of a method for testing the lifetime of the upper energy level of a CO2 laser amplifier provided in an embodiment of the present application, and with reference to the above-mentioned embodiment of the apparatus for testing the lifetime of the upper energy level of a CO2 laser amplifier, the method may include:
s11: and sending a trigger signal to the CO2 laser amplifier to be tested through the signal trigger to trigger the excitation of working particles in the CO2 laser amplifier to be tested to make upward energy level transition.
S12: and detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level through a testing device, and determining the service life of the upper energy level of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
When testing CO2 laser amplifier's last energy level life-span in this application, utilize CO2 laser amplifier self to carry out the function of arousing the working particle, directly after CO2 laser amplifier laser working particle goes up the energy level transition, when the transition returns the low energy level again, the photon energy of release detects, according to the duration and the size that the photon energy that detects lasts, confirm CO2 laser amplifier's last energy level life-span, CO2 laser amplifier's actual working process has been simulated to the at utmost, make the last energy level life-span that records more accurate.
Optionally, in another specific embodiment of the present application, as shown in fig. 4, fig. 4 is a schematic flow chart of upper level lifetime test amplification of a CO2 laser amplifier provided in another embodiment of the present application, including:
s21: the synchronous trigger sends a first square wave trigger signal to the CO2 laser amplifier to be tested.
Specifically, the pulse width of the first square wave trigger signal is equal to a first preset time length T1, and when the CO2 laser amplifier to be tested receives a high level sent by the synchronous generator, energy excitation is performed on the working particles, so that the working particles jump to an upper energy level; after the first preset time period T1 lasts, the voltage sent to the CO2 laser amplifier to be tested by the synchronous generator becomes low level, and the CO2 laser amplifier stops exciting the working particles. The working state of the working particles at the upper energy level is unstable, and the working particles start to jump to the lower energy level, and the jump light, generally photon light waves, can be released in the process of the jump.
S22: the time difference delta T is obtained when the CO2 laser amplifier to be measured stops exciting the working particlesnWhen the voltage is measured, the Pockels cell in the test device is controlled to turn on 1/4 wave voltage.
Wherein n is the frequency of exciting working particles by the CO2 laser amplifier to be tested, and delta T 10, and Δ Tn＜ΔTn+1。
In particular, the second square wave signal may be sent to the pockels cell through a synchronization trigger. Because the excitation of the CO2 laser amplifier to be tested on the working particles is triggered and controlled by the synchronous generator, the CO2 laser amplifier and the Pockels cell are respectively controlled by the synchronous trigger, which is helpful for ensuring the accuracy of controlling the start and stop of the CO2 laser amplifier exciting the working particles and the accuracy of the real and stop of the Pockels cell applied voltage on time.
After the pockels cell is switched on to 1/4-wave voltage, referring to the above-mentioned embodiment of the upper-level lifetime testing apparatus of the CO2 laser amplifier, it can be known that the transition light emitted from the CO2 laser amplifier can resonate in the resonant cavity in the testing apparatus, so that the laser energy can be accumulated and superposed to form laser with higher energy.
S23: when the time length of the Pockels cell for switching on 1/4 wave voltage reaches a second preset time length, the Pockels cell is controlled to be switched off at 1/4 wave voltage, and laser is led out to a laser detector through a coating film beam splitting sheet in the testing device.
S24: judging whether the laser energy detected by the laser detector is delta T or not1If the laser energy is 1/e corresponding to 0, the process proceeds to S25 if the laser energy is 1/e, and proceeds to S21 if the laser energy is not 1/e.
S25: determining the time difference delta T corresponding to the laser energy detected by the current laser detectornI.e. the upper level lifetime.
In addition, Δ T in this examplenAnd n is a positive integer, wherein n is the times of exciting the working particles by the CO2 laser amplifier to be tested. When the synchronous trigger triggers the CO2 laser amplifier for the first time to excite the transition of working particles, the Pockels cell is controlled to be switched on at 1/4 wave voltage, and n is 1; when the CO2 laser amplifier excites the working particle and the transition is over, the laser detector receives the delta T1After the laser energy corresponding to 0, the synchronous trigger triggers the CO2 laser amplifier again to continue the transition of the excited working particle with the first preset duration, n is 2, and at this time, Δ T2Is greater than 0; accordingly, the laser detector can detect and obtain the delta T2Corresponding laser energy, such repeated increases in Δ TnValue of, Δ TnThe larger the transition light, the less the transition light can resonate in the resonant cavity and the less the energy detected by the laser detector, in particularReference may be made to fig. 5, where fig. 5 illustrates laser energy received by the laser detector provided in the embodiment of the present application with Δ TnSchematic diagram of the variation of (1).
When the laser energy is reduced to delta T1When the laser energy is 1/e corresponding to 0, it means that the photon energy released from the CO2 laser amplifier is basically released completely, that is, Δ T at this time can be obtainednIs taken as the upper level lifetime.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include elements inherent in the list. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In addition, parts of the above technical solutions provided in the embodiments of the present application, which are consistent with the implementation principles of corresponding technical solutions in the prior art, are not described in detail so as to avoid redundant description.
Claims (10)
1. An upper energy level life test device of a CO2 laser amplifier is characterized by comprising:
the signal trigger is used for sending a trigger signal to the CO2 laser amplifier to be detected and starting the CO2 laser amplifier to be detected to excite the working particles to jump to the upper energy level;
and the testing device is used for detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level service life of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
2. The apparatus for testing the upper energy level lifetime of a CO2 laser amplifier of claim 1, wherein the apparatus comprises a resonant cavity, a laser lead-out assembly, and a laser detector;
wherein the resonant cavity is used for enabling the transition light to resonate through the resonant cavity to form laser which can be detected by the laser detector;
the laser detector is used for receiving the laser led out from the resonant cavity by the laser leading-out component and detecting the energy of the received laser, so that the upper energy level service life is determined according to the time length from the time when the CO2 laser amplifier to be detected stops exciting the working particles to the time when the energy of the laser is attenuated to 1/e of the highest energy.
3. The apparatus for upper level lifetime measurement of CO2 laser amplifier of claim 2, wherein the cavity resonator comprises a total reflection mirror and a reflective phase retarder for delaying the polarization phase of the reflected polarized light by 180 °;
the laser leading-out component comprises a film-coated beam splitting plate which is highly transmissive to S polarized light and highly reflective to P polarized light, and a Pockels cell which can delay the polarization phase of the polarized light by 90 degrees when 1/4 wave voltage is applied;
the total reflection mirror and the reflective phase delay sheet are respectively arranged on two sides of the CO2 laser amplifier to be detected; the film-coated beam splitting sheet and the Pockels cell are arranged between the CO2 laser amplifier to be detected and the reflective phase delay sheet, and the Pockels cell is positioned between the film-coated beam splitting sheets;
the total reflection mirror, the CO2 laser amplifier to be detected, the coated beam splitting sheet, the Pockels cell and the reflective phase retardation sheet are all located on the same optical axis.
4. The apparatus for testing upper energy level lifetime of a CO2 laser amplifier of claim 3, wherein the pockels cell is connected to the signal trigger, and when the signal trigger receives a trigger signal, 1/4 wave voltage is applied to the pockels cell.
5. The apparatus for testing upper energy level lifetime of a CO2 laser amplifier of claim 3, wherein a beam shrinking mirror set is further disposed between the CO2 laser amplifier under test and the pockels cell for matching the aperture of the gain region of the CO2 laser amplifier under test with the incident aperture of the pockels cell.
6. The apparatus for testing upper energy level lifetime of CO2 laser amplifier of claim 1, wherein the apparatus is a laser spectrometer for detecting laser light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level, and determining the upper energy level lifetime according to the duration from the time when the CO2 laser amplifier to be tested stops exciting the working particles to the time when the laser light is not received.
7. The apparatus for testing the upper energy level lifetime of a CO2 laser amplifier of claim 1, wherein the signal trigger is a synchronous trigger capable of triggering a square wave signal.
8. A method for testing the lifetime of the upper level of a CO2 laser amplifier, which is applied to the device for testing the lifetime of the upper level of a CO2 laser amplifier of any one of claims 1 to 7, and comprises:
sending a trigger signal to a CO2 laser amplifier to be tested through a signal trigger, and triggering the upward energy level transition of the excited working particles in the CO2 laser amplifier to be tested;
and detecting and analyzing transition light generated by energy released by the transition of the working particles from the upper energy level to the lower energy level through a testing device, and determining the service life of the upper energy level of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light.
9. The method for testing the upper energy level life span of the CO2 laser amplifier of claim 8, wherein the step of sending a trigger signal to the CO2 laser amplifier to be tested through a signal trigger comprises the steps of:
sending a first square wave trigger signal to a CO2 laser amplifier to be tested through a synchronous trigger, and controlling the duration of the CO2 laser amplifier to be tested for exciting the working particles to continue to reach a first preset duration;
detecting and analyzing transition light generated by energy released by the working particles from the transition from the upper energy level to the lower energy level through a testing device, and determining the service life of the upper energy level of the CO2 laser amplifier to be tested according to the energy and the duration of the transition light comprises the following steps:
when the time difference delta T between the moment when the CO2 laser amplifier to be tested stops exciting the working particles is equal to 0, controlling a Pockels cell in the testing device to be connected with 1/4 wave voltage, so that the transition light released by the CO2 laser amplifier to be tested resonates in a resonant cavity in the testing device to form laser detectable by the laser detector;
when the time length of the Pockels cell for switching on 1/4 wave voltage reaches a second preset time length, controlling the Pockels cell to switch on 1/4 wave voltage so that laser can be led out to a laser detector through a coating beam splitting sheet in the testing device;
and recording the corresponding laser energy when the time difference delta T is equal to 0 through the laser detector, repeatedly executing the operation step of sending the first square wave trigger signal to the CO2 laser amplifier to be detected through the synchronous trigger again, gradually increasing the set time difference delta T each time, and obtaining the laser energy corresponding to each different time difference delta T through the detection of the laser detector until the laser energy detected by the laser detector is equal to 1/e of the corresponding laser energy when the time difference delta T is equal to 0.
10. The method for testing the upper energy level life of the CO2 laser amplifier of claim 9, wherein when a time difference Δ T from a time when the CO2 laser amplifier to be tested stops exciting the working particles is equal to 0, controlling the pockels cell in the testing apparatus to turn on a 1/4 wave voltage comprises:
and when the time when the CO2 laser amplifier to be detected stops exciting the working particles is the time difference delta T, the synchronous trigger sends a second square wave signal to the Pockels cell, so that the duration of the Pockels cell plus 1/4 wave voltage is the second preset duration.
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| PCT/CN2020/110804 WO2021212710A1 (en) | 2020-04-24 | 2020-08-24 | Device and method for measuring upper energy level lifetime of co2 laser amplifier |
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