CN111487470A - Device and method for testing dielectric property of material - Google Patents

Device and method for testing dielectric property of material Download PDF

Info

Publication number
CN111487470A
CN111487470A CN202010192678.XA CN202010192678A CN111487470A CN 111487470 A CN111487470 A CN 111487470A CN 202010192678 A CN202010192678 A CN 202010192678A CN 111487470 A CN111487470 A CN 111487470A
Authority
CN
China
Prior art keywords
resonant cavity
concave mirror
electromagnetic wave
open
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010192678.XA
Other languages
Chinese (zh)
Other versions
CN111487470B (en
Inventor
宋锡滨
奚洪亮
艾辽东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maipu New Material Technology Shandong Co ltd
Original Assignee
Shandong Sinocera Functional Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Sinocera Functional Material Co Ltd filed Critical Shandong Sinocera Functional Material Co Ltd
Priority to CN202010192678.XA priority Critical patent/CN111487470B/en
Publication of CN111487470A publication Critical patent/CN111487470A/en
Application granted granted Critical
Publication of CN111487470B publication Critical patent/CN111487470B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2617Measuring dielectric properties, e.g. constants
    • G01R27/2623Measuring-systems or electronic circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2617Measuring dielectric properties, e.g. constants
    • G01R27/2635Sample holders, electrodes or excitation arrangements, e.g. sensors or measuring cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2688Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
    • G01R27/2694Measuring dielectric loss, e.g. loss angle, loss factor or power factor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses a device and a method for testing dielectric property of a material. Wherein, this testing arrangement includes: an electromagnetic wave absorption plate for absorbing electromagnetic waves; an adjustable sample holder which is arranged on the electromagnetic wave absorption plate and has adjustable height; the open type resonant cavity consists of a first concave mirror and a second concave mirror which are positioned above the electromagnetic wave absorption plate, and the placing angles of the first concave mirror and the second concave mirror can be adjusted; and the network analyzer is connected with the open resonant cavity and used for sending an initial electromagnetic wave with a preset frequency into the open resonant cavity and receiving a target electromagnetic wave returned by the open resonant cavity, and further determining the dielectric property of the sample to be tested based on the property parameters of the initial electromagnetic wave and the target electromagnetic wave. The invention solves the technical problem that the method for testing the performance of the dielectric material under the high-frequency condition has various defects.

Description

Device and method for testing dielectric property of material
Technical Field
The invention relates to the field of performance testing, in particular to a device and a method for testing dielectric performance of a material.
Background
The method for testing the performance of the dielectric material mainly comprises a network parameter method and a resonant cavity method, and compared with the network parameter method, the network parameter method is suitable for testing the material with higher dielectric loss, and the material with lower dielectric loss is usually tested by adopting the resonant cavity method. The resonant cavity method generally comprises a high-Q cavity method, a resonant cavity perturbation method, a dielectric resonant cavity method, an open resonant cavity method and the like, wherein the open resonant cavity method is suitable for dielectric property test of dielectric materials in a millimeter wave frequency band and a terahertz frequency band. Three open cavity configurations can be found: the dielectric property detection device comprises a double-flat-cavity structure, a flat concave cavity structure and a double-concave cavity structure, wherein the double-concave cavity structure is used for detecting the dielectric property of a concave cavity open type resonant cavity (two concave mirrors are oppositely arranged) such as a confocal open type resonant cavity, and can realize the detection of the dielectric property of large-size sheet materials (the length of the side of a square sheet is more than or equal to 100mm and more than or equal to 50mm) under a millimeter wave frequency band (more than 30 GHz). However, for the detection of special materials, it is difficult to provide a large-area parallel plate-shaped detection sample, and for the detection of a sample with a small size (10 mm-50 mm), the detection becomes one of the problems to be solved urgently for the detection of the dielectric property of the material under the millimeter wave frequency band.
It should be noted that: the dielectric behavior of a material is mainly a polarization phenomenon generated by the material under the influence of an electric field, and further influences the electric field, so that the properties of the dielectric constant and the loss factor of the material under a high-frequency condition are particularly important for the application of electronic components.
Aiming at the technical problems of various defects existing in the method for testing the performance of the dielectric material under the high-frequency condition, no effective solution is provided at present. For example: the method for testing the dielectric property of a sample with a smaller size (10 mm-50 mm) has not been proposed.
Disclosure of Invention
The embodiment of the invention provides a device and a method for testing the dielectric property of a material, which at least solve the technical problem that the method for testing the dielectric property of the material under the high-frequency condition has various defects.
According to an aspect of an embodiment of the present invention, there is provided a test apparatus for dielectric properties of a material, the test apparatus comprising: an electromagnetic wave absorption plate for absorbing electromagnetic waves; the adjustable sample rack is arranged on the electromagnetic wave absorption plate and is adjustable in height, wherein the top surface of the adjustable sample rack is parallel to the electromagnetic wave absorption plate and is used for placing a sample to be tested; the open type resonant cavity consists of a first concave mirror and a second concave mirror which are positioned above the electromagnetic wave absorption plate, and the placing angles of the first concave mirror and the second concave mirror can be adjusted, wherein the first concave mirror and the second concave mirror are symmetrically arranged, and the intersection point of the concave center line of the first concave mirror and the concave center line of the second concave mirror is projected on the top surface of the adjustable sample rack; and the network analyzer is connected with the open resonant cavity and is used for sending an initial electromagnetic wave with a preset frequency into the open resonant cavity, receiving a target electromagnetic wave returned by the open resonant cavity and further determining the dielectric property of the sample to be tested based on the property parameters of the initial electromagnetic wave and the target electromagnetic wave.
Optionally, the included angles between the concave center line of the first concave mirror and the concave center line of the second concave mirror and the vertical line of the electromagnetic wave absorption plate all satisfy a first preset range.
Optionally, the flatness of the surface of the adjustable sample holder is higher than a second predetermined threshold, and/or the electromagnetic wave absorption rate of the electromagnetic wave absorption plate is higher than a third predetermined range.
Optionally, the first concave mirror comprises: the first concave mirror main body adjusts a placing angle through the first rotation control shaft; the second concave mirror includes: the second concave mirror main body and the second rotating control shaft, wherein the placing angle of the second concave mirror main body is adjusted through the second rotating control shaft;
optionally, the adjustable sample holder comprises a sample holder main body, an adjustable support column and a moving motor, wherein the sample holder main body is arranged above the adjustable support column, and the electric motor is used for adjusting the height of the adjustable support column.
Optionally, the inner concave surfaces of the first concave mirror and the second concave mirror are formed by metal grinding; and/or the top surface of the adjustable sample rack is made of metal/ceramic.
Optionally, the testing apparatus further comprises: the first coaxial transmission line is connected with the network analyzer and used for receiving the initial electromagnetic waves generated by the network analyzer; the first coaxial coupling waveguide ring is connected with the first coaxial transmission line, penetrates through the center of the concave surface of the first concave mirror, and is used for receiving the initial electromagnetic wave transmitted by the first coaxial transmission line and transmitting the initial electromagnetic wave into the open type resonant cavity; the second coaxial coupling waveguide ring penetrates through the center of the concave surface of the second concave mirror and is used for receiving the target electromagnetic wave returned from the open resonant cavity; and the second coaxial transmission line is connected with the second coaxial coupling waveguide ring and the network analyzer and is used for receiving the target electromagnetic wave received by the second coaxial coupling waveguide ring and transmitting the received target electromagnetic wave back to the network analyzer.
According to another aspect of the embodiments of the present invention, there is also provided a method for testing dielectric properties of a material, which is applied to any one of the above devices for testing dielectric properties of a material, wherein the method for testing dielectric properties of a material includes: under the condition that the open type resonant cavity is not loaded with a sample to be tested, carrying out first test processing on the open type resonant cavity through a network tester to obtain a first test result; loading a sample to be tested into the open resonant cavity, continuously adjusting the height of the adjustable sample rack and the placing angle corresponding to the open resonant cavity until the sample to be tested in the open resonant cavity resonates, and performing second test treatment on the open resonant cavity through the network tester to obtain a second test result; calculating the material dielectric properties of the test sample based on the first test data and the second test data.
Optionally, the method for testing the dielectric property of the material further comprises the following steps: before the open resonant cavity is subjected to secondary testing by the network tester, the network tester is adjusted to a target working mode matched with the open resonant cavity.
Optionally, in the process of adjusting the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity, the intersection point of the concave center line of the first concave mirror and the concave center line of the second concave mirror is always projected onto the target position of the top surface of the adjustable sample holder, wherein the open resonant cavity is composed of the first concave mirror and the second concave mirror which are symmetrically arranged, and the top surface of the adjustable sample holder is used for loading a sample to be tested.
Optionally, the continuously adjusting the height of the adjustable sample holder and the placing angle corresponding to the open resonant cavity in the testing process includes: determining an adjustment relationship between the height of the adjustable sample holder and the corresponding placement angle of the open resonator, wherein the adjustment relationship is expressed as
Figure RE-GDA0002555388160000031
θ1A target placing angle h corresponding to the open type resonant cavity1The target height of the sample holder can be adjusted; thetaoIs the initial placing angle, h, corresponding to the open resonant cavityoFor the initial height of the adjustable sample holder, α is adjusting the adjustable sample holder and the open resonator according to the adjustment relationship, so that the intersection of the concave center line of the first concave mirror and the concave center line of the second concave mirror is projected onto the target position of the top surface of the adjustable sample holder all the time during the adjustment process.
Optionally, the first testing processing on the open resonant cavity by the network tester to obtain a first testing result includes: carrying out first test processing on the open resonant cavity through a network tester to obtain no-load resonant frequency and no-load quality factor; carrying out second test processing on the open resonant cavity through the network tester to obtain a second test result, wherein the second test result comprises the following steps: carrying out secondary test treatment on the open resonant cavity through a network tester to obtain an on-load resonant frequency and an on-load quality factor; wherein the resonant frequency is calculated by the following formula:
Figure RE-GDA0002555388160000032
wherein f is a resonant frequency, c is a speed of light, q is an axial mode number of the target working mode, D is a distance from the coupled waveguide ring to a target position of the adjustable sample holder, and R is a curvature radius of a concave mirror constituting the open resonant cavity.
Optionally, calculating the material dielectric properties of the test sample based on the first test data and the second test data comprises: calculating the relative dielectric constant and the dielectric loss tangent value of the sample to be tested based on the first test data and the second test data
In order to achieve the above object, according to another aspect of the present application, there is provided a storage medium including a stored program, wherein the program performs the method of testing dielectric properties of a material according to any one of the above.
In order to achieve the above object, according to another aspect of the present application, there is provided a processor for executing a program, wherein the program is executed to perform the method for testing dielectric properties of a material according to any one of the above.
By applying the device for testing the dielectric property of the material, under the condition that a sample to be tested is not loaded in an open mode, a network tester is used for carrying out first test treatment on the open type resonant cavity to obtain a first test result; loading a sample to be tested into the open resonant cavity, continuously adjusting the height of the adjustable sample rack and the placing angle corresponding to the open resonant cavity until the sample to be tested in the open resonant cavity resonates, and performing second test treatment on the open resonant cavity through the network tester to obtain a second test result; the dielectric property of the material of the sample to be tested is calculated based on the first test data and the second test data, the technical problem that various defects exist in a method for testing the performance of the dielectric material under a high-frequency condition is solved, and the technical effect of testing the performance of the small-size flaky dielectric material is achieved.
Furthermore, it is inferred from the experimental results that: in the existing symmetric confocal resonant cavity test, electromagnetic wave detection needs to penetrate through the interior of a sample to be tested to generate coherent electromagnetic wave interference, so that the thickness of the sample to be tested needs to meet 100-500 um; the electromagnetic wave is adopted to generate interference on the surface of the sample, and the electromagnetic wave is reflected, so that the receiver receives electromagnetic wave signals, the requirement on the material to be tested is low, and the performance test of the small-size sheet dielectric material can be carried out.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic view of an apparatus for testing dielectric properties of a material according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method of testing dielectric properties of a material according to an embodiment of the present invention;
wherein the figures include the following reference numerals:
10. an electromagnetic wave absorption plate; 20. an adjustable sample holder; 21. a sample holder body; 22. an adjustable support column; 23. A movement motor; 31. a first concave mirror; 31a, a first concave mirror body; 31b, a first rotation control shaft; 31. a second concave mirror; 32a, a second concave mirror body; 32b, a second rotation control shaft; 41. a first coaxially coupled waveguide ring; 42. a second coaxially coupled waveguide ring.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
It should be noted that the "concave center line" anywhere in this document is a perpendicular line to the concave center point of the concave mirror, and the perpendicular line is perpendicular to the concave surface of the concave center point of the concave mirror.
The embodiment of the present application provides a testing arrangement of material dielectric properties, specifically as shown in fig. 1, this testing arrangement includes: the device comprises an electromagnetic wave absorption plate, an adjustable sample frame, an open resonant cavity and a network analyzer.
Specifically, the electromagnetic wave absorption sheet is used for absorbing electromagnetic waves; the adjustable sample rack is arranged on the electromagnetic wave absorption plate and is adjustable in height, wherein the top surface of the adjustable sample rack is parallel to the electromagnetic wave absorption plate and is used for placing a sample to be tested; the open type resonant cavity consists of a first concave mirror and a second concave mirror which are positioned above the electromagnetic wave absorption plate, and the placing angles of the first concave mirror and the second concave mirror can be adjusted, wherein the first concave mirror and the second concave mirror are symmetrically arranged, and the intersection point of the concave surface central line of the first concave mirror and the concave surface central line of the second concave mirror is projected on the top surface of the adjustable sample rack; and the network analyzer is connected with the open resonant cavity and used for sending an initial electromagnetic wave with a preset frequency into the open resonant cavity and receiving a target electromagnetic wave returned by the open resonant cavity, and further determining the dielectric property of the sample to be tested based on the property parameters of the initial electromagnetic wave and the target electromagnetic wave.
It should be noted that: as shown in fig. 1, the adjustable sample holder is vertically disposed on a predetermined point of the electromagnetic wave absorption plate, wherein the predetermined point can be any position on the electromagnetic wave absorption plate, the first concave mirror and the second concave mirror are symmetrically disposed, the mirror surface of the first concave mirror passes through the predetermined point of the electromagnetic wave absorption plate and is perpendicular to the electromagnetic wave absorption plate, and furthermore, the intersection point of the center line of the concave surface of the first concave mirror and the center line of the concave surface of the second concave mirror is projected on the top surface of the adjustable sample holder.
It should be noted that: the first concave mirror and the second concave mirror are symmetrical along a certain mirror surface, and the symmetrical mirror surface refers to the mirror surface on which the first concave mirror and the second concave mirror are symmetrically arranged. And the placing angles of the first concave mirror and the second concave mirror are mirror-symmetrical in the adjusting process and after the adjustment is finished.
In an alternative example, the included angle between the concave center line of the first concave mirror and the concave center line of the second concave mirror and the vertical line of the electromagnetic wave absorption plate satisfies the first preset range. For example, the following steps are carried out: the included angles between the concave center line of the first concave mirror and the vertical line of the electromagnetic wave absorption plate are all greater than or equal to 0 ° and less than 60 °, preferably greater than or equal to 0 ° and less than 30 °, and the included angles between the concave center line of the second concave mirror and the vertical line of the electromagnetic wave absorption plate are all greater than or equal to 0 ° and less than 60 °, preferably greater than or equal to 0 ° and less than 30 °.
In an alternative example, the flatness of the sample holder surface may be adjusted to be above a second preset threshold. That is, the adjustable sample holder surface has an extremely high flatness in the present application, and at this time, a metal or ceramic material having an extremely high flatness may be used as the adjustable sample holder surface.
It should be noted that the sample to be tested can be a round piece or a square piece, and the application is not limited in particular, but the sample to be tested should conform to the size of 10 mm-50 mm, and the warpage of the sample surface satisfies the range of H/L ≤ 0.005, where H is the height of the warpage, and L is the length of the warpage panel.
In an alternative example, the first concave mirror comprises a first concave mirror body and a first rotation control shaft, wherein the first concave mirror body adjusts the placing angle through the first rotation control shaft; and the second concave mirror comprises a second concave mirror main body and a second rotation control shaft, wherein the second concave mirror main body is adjusted in placement angle through the second rotation control shaft. It should be noted that: the first and second rotary control shafts are extremely high in precision.
In one optional example, the adjustable sample holder comprises a sample holder body, an adjustable support column, and a movement motor, wherein the sample holder body is disposed above the adjustable support column, and the electric motor is used to make height adjustment to the adjustable support column. It should be noted that: the precision of the moving motor is extremely high.
In addition, the first concave mirror and the second concave mirror are formed by polishing metal materials; that is, the first concave mirror and the second concave mirror are made of metal, and the mirror surfaces of the first concave mirror and the second concave mirror are manufactured by polishing the metal surfaces.
In an optional example, the test apparatus further comprises: the first coaxial transmission line is connected with the network analyzer and used for receiving the electromagnetic waves generated by the network analyzer; the first coaxial coupling waveguide ring is connected with the first coaxial transmission line, penetrates through the center of the concave surface of the first concave mirror, and is used for receiving the electromagnetic waves transmitted by the first coaxial transmission line and transmitting the electromagnetic waves into the open resonant cavity; the second coaxial coupling waveguide ring penetrates through the center of the concave surface of the second concave mirror and is used for receiving the electromagnetic waves returned from the open type resonant cavity; and the second coaxial transmission line is connected with the second coaxial coupling waveguide ring and the network analyzer and used for receiving the electromagnetic waves received by the second coaxial coupling waveguide ring and transmitting the received electromagnetic waves back to the network analyzer.
That is, the electromagnetic wave is emitted by the network analyzer, enters the first coupling waveguide ring through the first coaxial transmission line, and further enters the open resonant cavity; the electromagnetic wave presents Gaussian beam distribution after entering the open resonant cavity and reaches the surface of a sample to be tested; and then the electromagnetic wave reaches the second coaxial coupling waveguide ring and is transmitted back to the network analyzer through the second coaxial transmission line, and at the moment, a worker can utilize the network analyzer and automatic detection control software to test the tested sample.
The embodiment of the present application further provides a method for testing dielectric properties of a material, and it should be noted that the device for testing dielectric properties of a material in the embodiment of the present application can be used for executing the method for testing dielectric properties of a material provided in the embodiment of the present application. The method for testing the dielectric property of the material provided by the embodiment of the application is described below.
Fig. 2 is a flowchart of a method for testing dielectric properties of a material according to an embodiment of the present invention, and as shown in fig. 2, the method for testing dielectric properties of a material includes:
step S102, under the condition that the open type resonant cavity is not loaded with a sample to be tested, carrying out first test processing on the open type resonant cavity through a network tester to obtain a first test result;
step S104, loading a sample to be tested into the open resonant cavity, continuously adjusting the height of the adjustable sample rack and the placing angle corresponding to the open resonant cavity until the sample to be tested in the open resonant cavity resonates, and performing second test treatment on the open resonant cavity through the network tester to obtain a second test result;
step S106, calculating the dielectric property of the material to be tested based on the first test data and the second test data.
By applying the device for testing the dielectric property of the material, under the condition that a sample to be tested is not loaded in an open mode, a network tester is used for carrying out first test treatment on the open type resonant cavity to obtain a first test result; loading a sample to be tested into the open resonant cavity, continuously adjusting the height of the adjustable sample rack and the placing angle corresponding to the open resonant cavity until the sample to be tested in the open resonant cavity resonates, and performing second test treatment on the open resonant cavity through the network tester to obtain a second test result; the dielectric property of the material of the sample to be tested is calculated based on the first test data and the second test data, the technical problem that various defects exist in a method for testing the performance of the dielectric material under a high-frequency condition is solved, and the technical effect of testing the performance of the small-size flaky dielectric material is achieved.
It should be noted that: the first test result is obtained by testing under the condition that the sample to be tested is not loaded in an open mode; the second test result is obtained by testing under the condition that the open resonant cavity is loaded with a sample to be tested and the sample to be tested resonates.
Further, it is presumed from the experimental results that: in the existing symmetric confocal resonant cavity test, electromagnetic wave detection needs to penetrate through the interior of a sample to be tested to generate coherent electromagnetic wave interference, so that the thickness of the sample to be tested needs to meet 100-500 um; the electromagnetic wave is adopted to generate interference on the surface of the sample, and the electromagnetic wave is reflected, so that the receiver receives electromagnetic wave signals, the requirement on the material to be tested is low, and the performance test of the small-size sheet dielectric material can be carried out.
In an optional example, the method for testing dielectric properties of a material further comprises: before the open resonant cavity is subjected to secondary testing by the network tester, the network tester is adjusted to a target working mode matched with the open resonant cavity.
It should be noted that: before the open resonant cavity is subjected to secondary test by the network tester, the following steps are performed: carrying out first test processing on an open resonant cavity through a network tester, and carrying out second test processing on the open resonant cavity through the network tester; and the target mode of operation matched to the open resonator is referred to as the primary mode TEM00q mode.
In an optional example, in the process of adjusting the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity, the intersection point of the concave center line of the first concave mirror and the concave center line of the second concave mirror is always projected to the target position of the top surface of the adjustable sample holder, wherein the open resonant cavity is composed of the first concave mirror and the second concave mirror which are symmetrically arranged, and the top surface of the adjustable sample holder is used for loading a sample to be tested.
Preferably, the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity are continuously adjusted in the testing process, and the method can be realized in the following manner:
step a, determining an adjustment relation between the height of an adjustable sample holder and a placing angle corresponding to an open resonant cavity, wherein the adjustment relation is expressed as
Figure RE-GDA0002555388160000081
θ1Is a target pendulum corresponding to the open resonant cavityAngle of inclination, h1The target height of the sample holder can be adjusted; thetaoIs the initial placing angle, h, corresponding to the open resonant cavityoα is the initial height of the adjustable sample holder, the predetermined height of the open resonator relative to the electromagnetic wave absorption plate.
It should be noted that: the corresponding placing angle of the open resonant cavity is as follows: an included angle between a concave surface center line segment of the first concave mirror and a perpendicular line of the electromagnetic wave absorption plate; because the first concave mirror and the second concave mirror are symmetrically arranged, the corresponding placing angle of the open type resonant cavity is also referred to as: and the included angle between the concave surface center line segment of the second concave mirror and the perpendicular line of the electromagnetic wave absorption plate. That is, the angles of the first concave mirror and the second concave mirror are synchronously adjusted.
It should be noted that: the preset height of the open type resonant cavity relative to the electromagnetic wave absorption plate is as follows: and the distance between the central point of the concave surface of the open resonant cavity and the perpendicular line between the central points of the concave surfaces of the open resonant cavities and the electromagnetic wave absorption plate.
And b, adjusting the adjustable sample frame and the open resonant cavity according to the adjustment relation so that the intersection point of the concave surface central line of the first concave mirror and the concave surface central line of the second concave mirror is projected to the target position of the top surface of the adjustable sample frame all the time in the adjustment process.
It should be noted that: the top surface of the adjustable sample frame is used for placing a sample to be tested, so that the intersection point of the concave surface central line of the first concave mirror and the concave surface central line of the second concave mirror is projected on the sample to be tested; in the adjusting process, the intersection point is projected to the same position of the sample to be detected all the time, and the deviation caused by the adjustment of the adjustable sample frame and the open resonant cavity is avoided.
That is, the adjustable sample holder and the open resonator are adjusted in a matched manner, so that the intersection point of the concave surface center line of the first concave mirror and the concave surface center line of the second concave mirror is projected to the target position of the top surface of the adjustable sample holder all the time in the adjusting process, and the first test result and the second test result are obtained by testing when the intersection point of the concave surface center line of the first concave mirror and the concave surface center line of the second concave mirror is projected to the target position of the top surface of the adjustable sample holder all the time.
In an optional example, the first test processing on the open resonator by the network tester to obtain a first test result includes: and carrying out first test processing on the open resonant cavity through a network tester to obtain the no-load resonant frequency and the no-load quality factor.
In another optional example, performing a second test process on the open resonator by the network tester to obtain a second test result includes: and carrying out secondary test treatment on the open resonant cavity through a network tester to obtain the on-load resonant frequency and the on-load quality factor.
It should be noted that: the calculation formulas of the no-load resonance frequency and the load resonance frequency are the same and are as follows:
Figure RE-GDA0002555388160000091
wherein f is a resonant frequency, c is a speed of light, q is an axial mode number of the target working mode, R is a curvature radius of a concave mirror constituting the open resonant cavity, and D is a distance from the coupled waveguide ring to a target position of the adjustable sample holder.
It should be noted that: the distance from the coupling waveguide ring to the target position of the adjustable sample holder varies with the adjustable sample holder and the open resonator adjustment, and therefore the distance from the coupling waveguide ring to the target position of the adjustable sample holder includes: under the condition that the open resonant cavity is not loaded with a sample to be tested, coupling a waveguide ring to the distance from the target position of the adjustable sample frame; and under the condition that the open type resonant cavity is loaded with a sample to be tested and the sample to be tested in the open type resonant cavity resonates, coupling the waveguide ring to the target position of the adjustable sample holder.
In an alternative example, calculating the material dielectric properties of the test sample based on the first test data and the second test data comprises: and calculating the relative dielectric constant and the dielectric loss tangent value of the sample to be tested based on the first test data and the second test data.
Finally, in order to make the technical solutions of the present application more clearly understood by those skilled in the art, the following description will be given with reference to specific embodiments.
Testing the node performance of a sample to be tested by using the testing device for the dielectric performance of the material; firstly, controlling a network analyzer to enter a main mode TEM00q mode, and testing the no-load resonant frequency and the no-load quality factor when a sample to be tested is not placed in an open resonant cavity under the main mode TEM00q mode; then, loading a sample to be tested into the open resonant cavity, regulating and controlling the height of the adjustable sample rack and the arrangement angle of the open resonant cavity to enable the sample in the open resonant cavity to generate a resonant reaction, and recording the on-load resonant frequency and the no-load quality factor measured by the network analyzer; and finally, the data processor solves the relative dielectric constant and the dielectric loss tangent of the sample to be tested through the test data obtained by the network analyzer.
It should be noted that: the height of the adjustable sample frame and the adjusting process of the placing angle of the open resonant cavity meet the following equation 1:
Figure RE-GDA0002555388160000101
θ1a target placing angle theta corresponding to the open type resonant cavityoIs the initial placing angle, h, corresponding to the open resonant cavity1The target height of the sample holder can be adjusted; h isoα is the initial height of the adjustable sample holder, the predetermined height of the open resonator relative to the electromagnetic wave absorption plate.
It should be noted that: the calculation formula of the loaded resonance frequency and the unloaded resonance frequency is equation 2:
Figure RE-GDA0002555388160000102
wherein f is a resonant frequency, c is a speed of light, and q is an axial mode of the target operating modeAnd D is the distance from the coupling waveguide ring to the target position of the adjustable sample holder.
It should be noted that: the equation for solving the relative dielectric constant of the sample to be tested is equation 3 (transcendental equation):
Figure RE-GDA0002555388160000103
wherein k is 2 pi fs/c,
Figure RE-GDA0002555388160000104
Figure RE-GDA0002555388160000105
Figure RE-GDA0002555388160000106
Figure RE-GDA0002555388160000107
`=n2
Wherein k is the wave number in free space; f. ofsThe resonant frequency is loaded, c is the speed of light, c is 3 × 1011mm/s, t is the thickness of the sample to be tested, n is the refractive index of the sample to be tested, d is the vertical distance between the coupled waveguide ring and the electromagnetic wave absorption plate, R is the curvature radius of the concave mirror forming the open resonant cavity, and R is the relative dielectric constant of the sample to be tested.
It should be noted that: the calculation formula of the relative dielectric constant of the sample to be tested is equation 4:
Figure RE-GDA0002555388160000111
wherein the content of the first and second substances,
Figure RE-GDA0002555388160000112
Figure RE-GDA0002555388160000113
Figure RE-GDA0002555388160000114
Figure RE-GDA0002555388160000115
Figure RE-GDA0002555388160000116
wherein Q isdFor loaded quality factor, Q, after the sample to be tested is placedlQuality factor, Q, for placing an ideal lossless sample0The unloaded quality factor of the sample to be tested is not put in, and t is the thickness of the sample to be tested; d is the vertical distance from the coupling waveguide ring to the electromagnetic wave absorption plate; k is the wave number in free space; n is the refractive index of the sample to be tested; h is2To couple the waveguide ring to an initial value of the vertical distance of the adjustable sample holder.
In summary, the invention provides an automatic testing device and method for performance of a small-size sheet-shaped dielectric material based on an open type non-right double-concave resonant cavity, which are mainly characterized in that the non-right double-concave resonant cavity is placed at an inclined angle, a sample resonates by adjusting the height of the sample and the included angle between the resonant cavity and the vertical line of an electromagnetic wave absorption plate, the position of the sample is raised, the deflection of the resonant cavity is performed simultaneously, and equation 1 is satisfied. The redundant electromagnetic waves are completely absorbed by the wave-absorbing material below, so that the influence of the miscellaneous waves and the high-mode electromagnetic waves on the main mode is avoided, and the precision of the dielectric property test of the material is improved. The sample moves up and down to realize sample detection, and the test electromagnetic wave resonates with the sample to realize the test of dielectric property, so that the performance test of the small-size sheet dielectric material can be realized.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
In the above embodiments of the present invention, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed technology can be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, a division of a unit may be a division of a logic function, and an actual implementation may have another division, for example, a plurality of units or components may be combined or may be integrated into another system, or some features may be omitted, or may not be executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, units or modules, and may be in an electrical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic or optical disk, and other various media capable of storing program codes.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.

Claims (10)

1. A device for testing dielectric properties of a material, the device comprising:
an electromagnetic wave absorption plate (10) for absorbing electromagnetic waves;
an adjustable sample holder (20) which is arranged on the electromagnetic wave absorption plate (10) and has an adjustable height, wherein the top surface of the adjustable sample holder (20) is parallel to the electromagnetic wave absorption plate (10) and is used for placing a sample to be tested;
an open resonant cavity, which is composed of a first concave mirror (31) and a second concave mirror (32) positioned above the electromagnetic wave absorption plate (10), and the placing angles of the first concave mirror (31) and the second concave mirror (32) can be adjusted, wherein the first concave mirror (31) and the second concave mirror (32) are symmetrically arranged, and the intersection point of the concave center line of the first concave mirror (31) and the concave center line of the second concave mirror (32) is projected on the top surface of the adjustable sample holder (20);
and the network analyzer is connected with the open resonant cavity and is used for sending an initial electromagnetic wave with a preset frequency into the open resonant cavity, receiving a target electromagnetic wave returned by the open resonant cavity and further determining the dielectric property of the sample to be tested based on the property parameters of the initial electromagnetic wave and the target electromagnetic wave.
2. The apparatus for testing dielectric properties of materials according to claim 1, wherein the included angles between the center line of the concave surface of the first concave mirror (31), the center line of the concave surface of the second concave mirror (32) and the vertical line of the electromagnetic wave absorption plate (10) all satisfy a first preset range.
3. The apparatus for testing dielectric properties of a material according to claim 1,
the first concave mirror (31) includes: a first concave mirror main body (31a) and a first rotation control shaft (31b), wherein the first concave mirror main body (31a) adjusts the placing angle through the first rotation control shaft (31 b); the second concave mirror (32) includes: a second concave mirror main body (32a) and a second rotation control shaft (32b), wherein the second concave mirror main body (32a) adjusts the placing angle through the second rotation control shaft (32 b);
and/or the presence of a gas in the gas,
the adjustable sample holder (20) comprises a sample holder main body (21), an adjustable supporting column (22) and a moving motor (23), wherein the sample holder main body (21) is arranged above the adjustable supporting column (22), and the electric motor is used for adjusting the height of the adjustable supporting column (22).
4. The device for testing the dielectric properties of a material of claim 1, further comprising:
the first coaxial transmission line is connected with the network analyzer and used for receiving the initial electromagnetic waves generated by the network analyzer;
a first coaxial coupling waveguide ring (41) connected with the first coaxial transmission line, penetrating through the center of the concave surface of the first concave mirror (31), and used for receiving the initial electromagnetic wave transmitted by the first coaxial transmission line and transmitting the initial electromagnetic wave to the open type resonant cavity;
the second coaxial coupling waveguide ring (42) penetrates through the center of the concave surface of the second concave mirror (32) and is used for receiving the target electromagnetic wave returned from the open resonant cavity;
and the second coaxial transmission line is connected with the second coaxial coupling waveguide ring (42) and the network analyzer and is used for receiving the target electromagnetic wave received by the second coaxial coupling waveguide ring (42) and transmitting the received target electromagnetic wave back to the network analyzer.
5. A method for testing the dielectric property of a material, which is applied to the device for testing the dielectric property of the material as claimed in any one of claims 1 to 4, wherein the method for testing the dielectric property of the material comprises the following steps:
under the condition that the open type resonant cavity is not loaded with a sample to be tested, carrying out first test processing on the open type resonant cavity through a network tester to obtain a first test result;
loading a sample to be tested into the open resonant cavity, continuously adjusting the height of the adjustable sample rack and the placing angle corresponding to the open resonant cavity until the sample to be tested in the open resonant cavity resonates, and performing second test treatment on the open resonant cavity through the network tester to obtain a second test result;
calculating the material dielectric properties of the test sample based on the first test data and the second test data.
6. The method for testing the dielectric property of the material as claimed in claim 5, wherein during the process of adjusting the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity, the intersection point of the concave center line of the first concave mirror and the concave center line of the second concave mirror is projected to the target position of the top surface of the adjustable sample holder, wherein the open resonant cavity is composed of the first concave mirror and the second concave mirror which are symmetrically arranged, and the top surface of the adjustable sample holder is used for loading the sample to be tested.
7. The method for testing the dielectric property of the material as claimed in claim 6, wherein the step of continuously adjusting the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity during the testing process comprises:
determining the adjustment relation between the height of the adjustable sample holder and the corresponding placing angle of the open resonant cavity,
wherein the adjustment relationship is expressed as
Figure FDA0002416479640000021
θ1A target placing angle h corresponding to the open type resonant cavity1The target height of the sample holder can be adjusted; thetaoIs the initial placing angle, h, corresponding to the open resonant cavityoα is the initial height of the adjustable sample holder, and is the preset height of the open resonant cavity relative to the electromagnetic wave absorption plate;
and adjusting the adjustable sample holder and the open resonant cavity according to the adjustment relationship so that the intersection point of the concave surface central line of the first concave mirror and the concave surface central line of the second concave mirror is projected to the target position of the top surface of the adjustable sample holder all the time in the adjustment process.
8. The method of claim 6, wherein the dielectric properties of the material are measured,
the method comprises the following steps of carrying out first test processing on an open resonant cavity through a network tester to obtain a first test result, wherein the first test result comprises the following steps: carrying out first test processing on the open resonant cavity through a network tester to obtain no-load resonant frequency and no-load quality factor;
carrying out second test processing on the open resonant cavity through the network tester to obtain a second test result, wherein the second test result comprises the following steps: carrying out secondary test treatment on the open resonant cavity through a network tester to obtain an on-load resonant frequency and an on-load quality factor;
calculating material dielectric properties of the test sample based on the first test data and the second test data, comprising: and calculating the relative dielectric constant and the dielectric loss tangent value of the sample to be tested based on the first test data and the second test data.
9. A storage medium comprising a stored program, wherein the program when executed controls a device on which the storage medium is located to perform a method of testing the dielectric properties of a material according to any one of claims 5 to 8.
10. A processor configured to run a program, wherein the program is configured to perform a method of testing dielectric properties of a material according to any one of claims 5 to 8 when the program is run.
CN202010192678.XA 2020-03-18 2020-03-18 Device and method for testing dielectric property of material Active CN111487470B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010192678.XA CN111487470B (en) 2020-03-18 2020-03-18 Device and method for testing dielectric property of material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010192678.XA CN111487470B (en) 2020-03-18 2020-03-18 Device and method for testing dielectric property of material

Publications (2)

Publication Number Publication Date
CN111487470A true CN111487470A (en) 2020-08-04
CN111487470B CN111487470B (en) 2022-05-31

Family

ID=71812527

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010192678.XA Active CN111487470B (en) 2020-03-18 2020-03-18 Device and method for testing dielectric property of material

Country Status (1)

Country Link
CN (1) CN111487470B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112305315A (en) * 2020-09-30 2021-02-02 山东国瓷功能材料股份有限公司 Variable-temperature automatic test system and method for dielectric property of dielectric material
CN112444681A (en) * 2020-11-30 2021-03-05 山东国瓷功能材料股份有限公司 Dielectric material testing system, method, device and platform
CN113252992A (en) * 2021-07-05 2021-08-13 山东国瓷功能材料股份有限公司 Material dielectric property test equipment
CN117471182A (en) * 2023-12-21 2024-01-30 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) System, method and storage medium for testing dielectric property of circuit board

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682369A (en) * 1992-08-31 1994-03-22 Shincron:Kk Method and apparatus for measuring refractive index of membrane
RU2025656C1 (en) * 1991-07-10 1994-12-30 Федорцов Александр Борисович Device for non-destructive measuring of thickness of dielectric and semiconductor films in predetermined point
RU94026729A (en) * 1994-07-08 1996-05-10 А.В. Федорцов Device for non-destructive measurement of insulating and semiconductor film thickness
JP2005229125A (en) * 2005-03-14 2005-08-25 Fujitsu Ltd Evaluation method of silicon oxide film and device, and manufacturing method and device of semiconductor device
US20060098189A1 (en) * 2004-11-09 2006-05-11 Nikon Corporation Surface inspection apparatus, surface inspection method and exposure system
CN102707155A (en) * 2012-06-04 2012-10-03 电子科技大学 Test device for complex dielectric constant of dielectric material based on quasi-optical resonant cavity
CN102798766A (en) * 2012-08-03 2012-11-28 浙江大学 Method for testing microwave dielectric property of high-loss dielectric substance
CN202661552U (en) * 2012-06-04 2013-01-09 电子科技大学 Dielectric materials complex permittivity testing device based on quasi-optics resonant cavity
CN107144736A (en) * 2017-05-24 2017-09-08 电子科技大学 The quasi-optical cell method wideband of material complex dielectric permittivity tests non-equiphase surface modification method
CN110398736A (en) * 2019-07-04 2019-11-01 宁波信泰机械有限公司 It is applicable in the wave transparent performance test methods and test equipment of ACC millimeter wave label

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2025656C1 (en) * 1991-07-10 1994-12-30 Федорцов Александр Борисович Device for non-destructive measuring of thickness of dielectric and semiconductor films in predetermined point
JPH0682369A (en) * 1992-08-31 1994-03-22 Shincron:Kk Method and apparatus for measuring refractive index of membrane
RU94026729A (en) * 1994-07-08 1996-05-10 А.В. Федорцов Device for non-destructive measurement of insulating and semiconductor film thickness
US20060098189A1 (en) * 2004-11-09 2006-05-11 Nikon Corporation Surface inspection apparatus, surface inspection method and exposure system
JP2005229125A (en) * 2005-03-14 2005-08-25 Fujitsu Ltd Evaluation method of silicon oxide film and device, and manufacturing method and device of semiconductor device
CN102707155A (en) * 2012-06-04 2012-10-03 电子科技大学 Test device for complex dielectric constant of dielectric material based on quasi-optical resonant cavity
CN202661552U (en) * 2012-06-04 2013-01-09 电子科技大学 Dielectric materials complex permittivity testing device based on quasi-optics resonant cavity
CN102798766A (en) * 2012-08-03 2012-11-28 浙江大学 Method for testing microwave dielectric property of high-loss dielectric substance
CN107144736A (en) * 2017-05-24 2017-09-08 电子科技大学 The quasi-optical cell method wideband of material complex dielectric permittivity tests non-equiphase surface modification method
CN110398736A (en) * 2019-07-04 2019-11-01 宁波信泰机械有限公司 It is applicable in the wave transparent performance test methods and test equipment of ACC millimeter wave label

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112305315A (en) * 2020-09-30 2021-02-02 山东国瓷功能材料股份有限公司 Variable-temperature automatic test system and method for dielectric property of dielectric material
CN112444681A (en) * 2020-11-30 2021-03-05 山东国瓷功能材料股份有限公司 Dielectric material testing system, method, device and platform
CN112444681B (en) * 2020-11-30 2022-07-15 山东国瓷功能材料股份有限公司 Dielectric material testing system, method, device and platform
CN113252992A (en) * 2021-07-05 2021-08-13 山东国瓷功能材料股份有限公司 Material dielectric property test equipment
CN113252992B (en) * 2021-07-05 2021-11-05 山东国瓷功能材料股份有限公司 Material dielectric property test equipment
CN117471182A (en) * 2023-12-21 2024-01-30 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) System, method and storage medium for testing dielectric property of circuit board
CN117471182B (en) * 2023-12-21 2024-04-02 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) System, method and storage medium for testing dielectric property of circuit board

Also Published As

Publication number Publication date
CN111487470B (en) 2022-05-31

Similar Documents

Publication Publication Date Title
CN111487470B (en) Device and method for testing dielectric property of material
CN111239498B (en) Device and method for testing dielectric property of material
EP2068159A1 (en) Antenna characteristic determining apparatus and antenna characteristic determining method
US20210167517A1 (en) Terahertz leaky-wave antenna measuring system
US20190335346A1 (en) Measurement arrangement and measurement method
CN107290595B (en) high-temperature test method for relative complex dielectric constant of material based on ellipsoidal reflector
Varadan et al. In situ microwave characterization of nonplanar dielectric objects
CN111638268B (en) Metal crack detection method and device based on dielectric resonator array
CN111198302B (en) Method, device and system for testing dielectric property of material
US9810646B2 (en) Edge treatment system and method for evaluating a material
CN213780215U (en) Dielectric property testing device
JP4721784B2 (en) Fabry-Perot resonator for ESR and ESR device
CN111212177B (en) Test system of wireless terminal
US6713969B2 (en) Method and apparatus for determination and control of plasma state
Starr et al. Angle resolved microwave spectrometer for metamaterial studies
Yurchenko et al. MM-wave dielectric parameters of magnesium fluoride glass wafers
CN109257118B (en) Transceiving efficiency verification device of wireless product and operation method thereof
Quan et al. Ultra high-Q 60GHz open resonator system for precision dielectric permittivity and loss tangent measurements
JP2517849B2 (en) Cylindrical wave absorber
Kato et al. Comparison of free‐space VNA and TDS measurements using transmission‐type frequency selective surfaces
WO2023112502A1 (en) Open resonator
Dang et al. Impedance-Matched Planar Metamaterial Beam Steerer for Terahertz Waves
Gagnon et al. Accurate phase measurement of passive non-reciprocal quasi-optical components
Federico et al. An Open Hemispherical Resonant Cavity for Relative Permittivity Measurements of Fluid and Solid Materials at mm-Wave Frequencies
CN113433392A (en) Device and method for measuring electromagnetic parameters of dielectric material

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20230220

Address after: Room 101, Building 6, No. 61, Liuyanghe Road, Dongying Development Zone, Shandong Province, 257091

Patentee after: Maipu New Material Technology (Shandong) Co.,Ltd.

Address before: No.24, Liaohe Road, economic and Technological Development Zone, Dongying City, Shandong Province

Patentee before: SHANDONG SINOCERA FUNCTIONAL MATERIAL Co.,Ltd.