CN111483235A - Inkjet printing method and inkjet printing apparatus for light emitting device - Google Patents
Inkjet printing method and inkjet printing apparatus for light emitting device Download PDFInfo
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- CN111483235A CN111483235A CN201910542138.7A CN201910542138A CN111483235A CN 111483235 A CN111483235 A CN 111483235A CN 201910542138 A CN201910542138 A CN 201910542138A CN 111483235 A CN111483235 A CN 111483235A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M7/00—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M7/00—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock
- B41M7/009—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock using thermal means, e.g. infrared radiation, heat
Abstract
The present invention relates to an inkjet printing method and an inkjet printing apparatus for a light emitting device. The inkjet printing method of the light emitting device includes the steps of: providing a substrate, wherein a pixel definition layer is arranged on the substrate, and a plurality of pixel pits are formed in a display area of the pixel definition layer; and placing the substrate above an ink-jet printing head, wherein the opening of the pixel pit faces downwards, the ink-jet printing head prints light-emitting functional layer ink upwards and deposits the light-emitting functional layer ink into the pixel pit, and drying to form a light-emitting functional layer to obtain the light-emitting device. The method and the device are adopted to manufacture the luminescent device, so that the occurrence probability of bridging defects can be effectively reduced, and the stability of the ink jet printing process and the product yield of the luminescent device are improved.
Description
Technical Field
The invention relates to the technical field of ink jet printing display, in particular to an ink jet printing method and an ink jet printing device of a light-emitting device.
Background
Organic light emitting diode (O L ED) and quantum dot light emitting diode (Q L ED) devices have attracted attention as the next generation display technology in recent years due to their advantages of wide color gamut, high contrast, rapid response, large viewing angle, low power consumption, etc. light emitting diodes have a structure comprising an anode, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer and a cathode, wherein the hole injection layer, the hole transport layer and the light emitting layer can be prepared by using a conventional vapor deposition method and also can be prepared by using an ink jet printing method.
The ink-jet printing is to dissolve the functional layer material into the solvent to make ink, and then accurately deposit the ink into each pixel pit surrounded by the pixel definition layer by the ink-jet printing mode. After deposition, drying under reduced pressure to completely volatilize the solvent and only leave the functional layer material, and then baking the functional layer material to finish the preparation of a functional layer.
With the increasing requirements for the resolution of display devices, the density of pixels is higher and higher, and the design of pixel pits is smaller and smaller. At present, the drop precision of the ink-jet printing head is obviously limited, and the drop precision is difficult to greatly leap in recent years, so that bridging defects are often generated when a display panel with high resolution is prepared by ink-jet printing. As shown in fig. 1, where 1 is a substrate, 2 is a pixel bank, 3 is ink, 4 is a bridging defect, 5 is an ink droplet, and 6 is an inkjet printhead, due to the high pixel density, the ink may accidentally shift when dropping or the volume of an individual ink droplet is too large, causing the ink to overflow the pixel pits, so that the ink in the adjacent pixel pits can be overlapped to form the bridging defect 4. Bridging defects not only affect the final film-forming thickness and morphology, but also even cause the occurrence of pixel color mixing of a light-emitting layer, and seriously affect the process stability and the product yield of ink-jet printing.
Disclosure of Invention
Therefore, the ink jet printing method of the light-emitting device is provided, and the process stability and the product yield of the ink jet printing can be improved.
An inkjet printing method of a light emitting device, comprising the steps of:
providing a substrate, wherein a pixel definition layer is arranged on the substrate, and a plurality of pixel pits are formed in a display area of the pixel definition layer;
and placing the substrate above an ink-jet printing head, wherein the opening of the pixel pit faces downwards, and the ink-jet printing head prints light-emitting functional layer ink upwards and deposits the light-emitting functional layer ink into the pixel pit, and drying the light-emitting functional layer ink to form a light-emitting functional layer, so that the light-emitting device is obtained.
The substrate is arranged above the ink-jet printing head upside down, the ink is printed and deposited in the pixel pits by the ink-jet printing head, the ink in the pixel pits is smaller in volume and smaller in self gravity and cannot fall freely to remain in the pixel pits, and bridging defects generated in the printing process can be disconnected at pixel dams of the pixel definition layer due to the action of gravity, the surface tension of the ink and the intermolecular attraction and flow back to the respective pixel pits to be self-healed.
In one embodiment, the surface of the pixel defining layer away from the substrate is hydrophobic, and the region of the sidewall of the pixel pit near the bottom is hydrophilic.
In this manner, ink flow back into the respective pixel pits can be promoted.
In one embodiment, the drying step sequentially comprises pre-drying, vacuum drying under reduced pressure and baking; and during the pre-drying and/or the reduced pressure vacuum drying, the opening of the pixel pit faces downwards.
Therefore, the pre-drying is carried out before the reduced pressure drying, so that the content of the solvent in the ink deposited in the pixel pits can be reduced, the ink in the pixel pits is prevented from flowing into other pixel pits due to the influence of air flow or vibration and the like in the process of transferring the substrate from the position of the ink jet printing head to the reduced pressure drying device, and the integrity of the ink in the pixel pits is ensured; during pre-drying and/or reduced pressure drying, the opening of the pixel pit is kept downward, so that the pixel pit can be prevented from being overturned under the condition that ink in the pixel pit is not dried or is not completely dried, and the ink can be prevented from flowing out of the pixel pit.
In one embodiment, the pre-drying temperature is 70-90 ℃ and the time is 30-180 s;
the temperature of the reduced pressure drying is 15-35 ℃, the vacuum degree is 0.1-1000 torr, and the time is 180-600 s.
In one embodiment, in the process of printing the light-emitting functional layer ink by the ink-jet printing head upwards, the non-display area of the substrate, which is not provided with the pixel pits, is fixed, the pixel pits of the display area are exposed, and upward supporting buoyancy is provided for the substrate.
Another object of the present invention is to provide an inkjet printing apparatus, comprising:
the substrate bearing mechanism is used for fixing a substrate, a pixel definition layer is arranged on the substrate, a plurality of pixel pits are formed in a display area of the pixel definition layer, and openings of the pixel pits on the substrate face downwards;
a printing mechanism having an inkjet print head operable to inkjet print onto the substrate positioned thereabove.
In one embodiment, the non-display area of the substrate, which is not provided with the pixel pits, is in contact with the substrate carrying mechanism to expose the display area of the substrate.
In one embodiment, the inkjet printing apparatus further comprises an air floating platform for providing upward supporting buoyancy to the substrate;
the substrate bearing mechanism can move along a first direction relative to the air floating platform.
In one embodiment, the air floating platform comprises a first sub-platform and a second sub-platform, the first sub-platform and the second sub-platform are sequentially arranged along the first direction, an ink jet printing space is formed between the first sub-platform and the second sub-platform, and the ink jet printing head can perform ink jet printing on the substrate positioned above the ink jet printing space through the ink jet printing space; the inkjet print head is movable in a second direction, the second direction being perpendicular to the first direction.
In one embodiment, the inkjet printing apparatus further includes a transfer platform connected to one side of the air floating platform and located in the first direction, the transfer platform and the air floating platform having the same horizontal height and being connected to each other by a side surface; and the conveying platform is provided with a heating mechanism.
Therefore, after the substrate is subjected to ink jet printing, the substrate deposited with the ink can be pre-dried, the amount of the solvent in the ink is reduced, and the ink is prevented from dripping or flowing into other pixel pits due to the influence of air flow or vibration when the substrate is moved out of the ink jet printing device.
In one embodiment, the substrate supporting mechanism includes a substrate holding member disposed on one side of the air floating platform perpendicular to the first direction, and the substrate holding member fixes a horizontal position of the substrate by holding one side of the substrate and can drive the substrate to move on the air floating platform along the first direction.
Therefore, the suspension of the substrate on the air floatation platform and the motion stability in the moving process can be improved, and the possibility that the substrate slides out of the air floatation platform to be damaged and broken is reduced.
In one embodiment, the substrate holding member includes a holding plane having a vacuum hole, and a negative pressure mechanism is connected to the vacuum hole to fix one side of the substrate to the holding plane by suction through the vacuum hole.
In one embodiment, the device further comprises a decompression drying mechanism and a transfer mechanism;
the rotating device comprises a vacuum adsorption plate, a mechanical arm and a base, wherein one end of the mechanical arm is connected with the vacuum adsorption plate, and the other end of the mechanical arm is connected with the base;
the decompression drying mechanism is used for the base plate to carry out decompression drying after the base plate inkjet prints, decompression drying mechanism includes: a cavity;
the substrate supporting frame is arranged in the cavity and used for supporting the substrate so that the non-display area of the substrate is in contact with the substrate supporting frame, and the opening of the pixel pit on the substrate faces downwards;
the solvent capturing plate is arranged in the cavity and located below the substrate supporting frame, and the solvent capturing plate and the substrate supporting frame are arranged oppositely.
Drawings
FIG. 1 is a schematic diagram of a conventional ink jet printing process;
FIG. 2 is a schematic view of an ink jet printing process according to an embodiment of the present invention;
FIG. 3 is a schematic illustration of the self-healing effect of a bridging defect in the inkjet printing process of FIG. 2;
FIG. 4 is a schematic structural diagram of an inkjet printing apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a transfer mechanism in the inkjet printing apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic structural view of a decompression drying mechanism in the inkjet printing apparatus according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a baking mechanism in an inkjet printing apparatus according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a baking mechanism in an inkjet printing apparatus according to another embodiment of the present invention.
Detailed Description
In order that the invention may be more fully understood, a more particular description of the invention will now be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The inkjet printing method of a light emitting device according to an embodiment of the present invention includes the following steps S1 to S2.
S1, please refer to fig. 2, which provides a substrate 10, wherein a pixel definition layer 20 is disposed on the substrate 10, and a plurality of pixel pits (not shown) are disposed in a display region of the pixel definition layer 20.
S2, referring to fig. 2, the substrate 10 is placed above the inkjet printhead 30, and the openings of the pixel pits on the substrate 10 face downward (i.e. in the same direction as gravity); the inkjet print head 30 prints the light emitting function layer ink 301 upward (opposite to the direction of gravity), and deposits into the pixel pits, dries, and forms a light emitting function layer, resulting in a light emitting device.
Referring to fig. 2 to 3, during the printing process, the substrate 10 is in an inverted state, the openings of the pixel definition layers 20 are facing downward, the ink 302 in the pixel pits has a small volume and a small self-gravity, and cannot freely fall down to remain in the pixel pits, and the bridging defects 303 generated during the printing process are broken at the pixel dams of the pixel definition layers 20 due to the gravity, the surface tension of the ink, and the intermolecular attraction, and flow back to the respective pixel pits to be self-healed.
The surface of the pixel defining layer 20 far away from the substrate 10 has hydrophilicity and hydrophobicity opposite to that of the ink, and the hydrophilicity and hydrophobicity of the region of the sidewall of the pixel pit near the bottom is consistent with that of the ink. For example, when the ink is hydrophilic, the surface of the pixel defining layer 20 away from the substrate 10 is hydrophobic, and the region of the sidewall of the pixel pit near the bottom is hydrophilic. In this manner, the ink is wetted with the bottom of the pixel pit and is not wetted with the upper surface of the pixel dam of the pixel defining layer (i.e., the portion of the pixel defining layer away from the substrate), and the ink in which the bridging defect occurs is more likely to be broken at the upper surface of the pixel dam of the pixel defining layer during the above-described ink-jet printing and to flow back into the respective pixel pit.
In one embodiment, the volume of ink deposited into a single pixel pit is 10p L-60 p L it is understood that the volume of ink deposited into a single pixel pit can be defined by the size of the capacity of the pixel pit, specifically, for example, the capacity of the pixel pit is 10p L-60 p L, and printing can be done on demand to deposit a full pixel pit.
Preferably, the volume of ink deposited into a single pixel well is 20p L to 50p L.
In one embodiment, the drying step in step S2 includes pre-drying, vacuum drying under reduced pressure, and baking.
Wherein the pre-drying temperature is 70-90 ℃ and the time is 30-180 s.
It should be noted that, since the ink contains a certain amount of solvent and has high fluidity, the ink is liable to flow out or drip from the inverted pixel pits due to vibration and the like, after the ink is deposited in the pixel pits and before the reduced-pressure vacuum drying is performed, the substrate needs to be subjected to the pre-drying treatment to reduce the amount of solvent in the ink and avoid the substrate from dripping or flowing into other pixel pits due to the influence of air flow, vibration and the like in the process of moving the substrate from the printing apparatus to the reduced-pressure vacuum drying apparatus.
Further, in the pre-baking process, the opening of the pixel pit on the substrate faces downward.
In one embodiment, the temperature of the reduced pressure vacuum drying is 15-35 ℃, the vacuum degree is 0.1-1000 torr, and the time is 180-600 s.
It can be understood that after ink-jet printing on a substrate, it is necessary to perform vacuum drying treatment under reduced pressure, to reduce the boiling point of the solvent by reducing the ambient pressure, to accelerate the volatilization rate of the solvent in the ink, to precipitate the organic substances in the ink, and to form a uniform and flat film.
In this embodiment, the openings of the pixel pits on the substrate face downward during the reduced-pressure vacuum drying process, that is, the substrate is in an inverted state during the reduced-pressure drying process. In other embodiments, the substrate may be in a state of being upright when dried under reduced pressure.
In one embodiment, the baking temperature is 100 ℃ to 250 ℃.
Preferably, the openings of the pixel pits on the substrate face downward during baking.
It should be noted that the light-emitting functional layer of the light-emitting device may include a plurality of functional layers to be deposited in the pixel pits, such as a hole injection layer, a hole transport layer, and a light-emitting layer, and the step S2 may be repeated when forming the hole injection layer, the hole transport layer, and the light-emitting layer, so as to reduce the occurrence of bridging defects to the maximum extent and improve the yield of the product.
In one embodiment, in the process of printing the light emitting functional layer ink upward by the inkjet printhead 30, the non-display region of the substrate 10 without the pixel pits is fixed, the pixel pits of the display region are exposed, and an upward supporting buoyancy is provided to the substrate 10.
Referring to fig. 4, an inkjet printing apparatus 100 according to another embodiment of the present invention includes an air floating stage 110, a substrate supporting mechanism 120, and a printing mechanism 130.
The air floating platform 110 is used for providing upward supporting buoyancy for the substrate 10.
The substrate supporting mechanism 120 is used for fixing the substrate 10, a pixel defining layer 20 is disposed on the substrate 10, a plurality of pixel pits are disposed in a display area of the pixel defining layer 20, and openings of the pixel pits on the substrate face downward.
The printing mechanism 130 has an inkjet print head 132, and the inkjet print head 132 is used to inkjet print onto the substrate 10 located thereabove.
Further, the non-display region of the substrate 10 not provided with the pixel pits is in contact with the substrate carrying mechanism 120 to expose the display region of the substrate 10.
In this embodiment, the substrate supporting mechanism 120 is capable of moving along a first direction relative to the air floating stage 110. That is, during the inkjet printing operation, the substrate supporting mechanism 120 can drive the substrate 10 to move along the first direction on the air floating platform 110.
Specifically, the air bearing platform 110 includes a first sub-platform 112 and a second sub-platform 114, the first sub-platform 112 and the second sub-platform 114 are sequentially disposed along a first direction, an inkjet printing space is formed between the first sub-platform 112 and the second sub-platform 114, and the inkjet printhead 132 can perform inkjet printing on the substrate 10 located above the inkjet printing space through the inkjet printing space.
In the present embodiment, the inkjet print head 132 is provided in the inkjet printing space.
Specifically, the inkjet print head 132 is movable in a second direction within the inkjet printing space, and the second direction is perpendicular to the first direction.
Further, the air feeding holes 1122 are uniformly formed on the surfaces of the first sub-platform 112 and the second sub-platform 114 of the air floating platform 110, so that air can be uniformly blown upwards during the inkjet printing process, thereby providing an upward supporting buoyancy for the substrate 10 to balance the gravity of the substrate 10 and keep the substrate 10 horizontal. Further, the air feeding channels 1122 are uniformly distributed, so that the upward thrust of the air feeding channels 1122 on each portion of the substrate 10 is the same, thereby improving the flatness of the substrate on the air floating platform 110 and further improving the uniformity of the functional layer formed on the substrate.
In this embodiment, the substrate supporting mechanism 120 has a substrate holder (not shown) disposed on one side of the air floating stage 110 perpendicular to the first direction, and the substrate holder holds one side of the substrate 10 to fix the horizontal position of the substrate 10 and can drive the substrate 10 to move on the air floating stage 110 along the first direction.
Further, the substrate holder may be an adsorbing member having an adsorbing function, or may be a clamping member, a mechanical gripper, or the like.
Preferably, the substrate holder is a vacuum chuck.
Specifically, the substrate holder includes a holding plane 122 (in fig. 4, the surface of the substrate holder contacting the substrate 10 is the holding plane), and a vacuum hole (not shown) is formed in the holding plane 122, and the suction action of the vacuum hole fixes one side of the substrate 10 to the holding plane 122.
The inkjet printing apparatus 100 of the present embodiment further includes a transfer platform 140, the transfer platform 140 is connected to one side of the air floating platform 110 along the moving direction of the substrate 10, and the transfer platform 140 and the air floating platform 110 have the same horizontal height and are connected to each other by side surfaces.
Further, a heating mechanism 142 is disposed on the conveying platform 140.
In the present embodiment, the heating mechanism 142 is an infrared heating tube. In other embodiments, the heating mechanism 142 may be an infrared heating tube, or may be other heating mechanisms such as a microwave heating tube.
Referring to fig. 5, a transfer mechanism 200 for substrate transfer according to the present invention includes: a vacuum adsorption plate 210, a robot arm 220 and a base 230, wherein one end of the robot arm 220 is connected to the vacuum adsorption plate 210, and the other end is connected to the base 230. The substrate 10 is transported by sucking the upper surface of the substrate (the surface without the pixel defining layer) by the vacuum suction plate 210, considering that the substrate 10 is turned upside down, the ink 302 in the pixel pits provided in the pixel defining layer 20 on the lower surface is not dried to form a film, and the upper surface is a glass substrate.
In order to facilitate drying of ink in the pixel pits after the substrate is inverted for ink-jet printing, the ink-jet printing device provided by the invention further comprises a decompression drying mechanism.
Referring to fig. 6, a decompression drying mechanism 300 according to an embodiment of the present invention includes a chamber 310, a substrate supporting frame 320, and a solvent trap plate 340.
The substrate support frame 320 is disposed in the cavity 310, and is used for supporting the substrate 10 so that the non-display region of the substrate 10 is in contact with the substrate support frame 320, and the opening of the pixel pit on the substrate 10 faces downward.
A solvent trap plate 340 is disposed in the cavity 310 below the substrate support frame 320, and the solvent trap plate 340 is disposed opposite the substrate 10 for trapping a solvent vaporized from the ink deposited on the substrate 10.
In the present embodiment, the substrate support frame 320 has a rectangular frame body, and supports the substrate 10 by contacting the non-display region of the substrate 10. It is understood that the shape of the frame body of the substrate supporting frame 320 may be designed according to the specific shape of the substrate, so that the substrate can be placed to keep the substrate horizontal, and when contacting the substrate, the frame body contacts only the non-display region on the substrate (i.e., the peripheral region of the substrate where no pixel pits are formed).
In this embodiment, the decompression drying mechanism 300 further includes a substrate supporting frame buffer assembly 330, one end of the substrate supporting frame buffer assembly 330 is fixed on the top wall of the cavity 310, and the other end is connected to the substrate supporting frame 320. The substrate support frame 320 supports the substrate 10 by contacting the non-display region of the substrate 10.
The substrate supporting frame buffering assembly 330 has a spring buffer, one end of which is connected to the top wall of the cavity and the other end of which is connected to the substrate supporting frame. Thus, the substrate supporting frame and the substrate placed thereon can be well cushioned.
The decompression drying mechanism 300 further comprises a solvent capture plate lifting assembly 350, wherein one end of the solvent capture plate lifting assembly 350 is fixed on the bottom wall of the cavity 310, and the other end of the solvent capture plate lifting assembly 350 is connected with the solvent capture plate 340; the solvent capture plate lift assembly 350 is free to move the solvent capture plate 340 up and down.
The decompression drying mechanism 300 further comprises a temperature control platform 360 and a temperature control platform lifting assembly 370, wherein the temperature control platform 360 is disposed above the substrate supporting frame 320 and is disposed in the cavity 310 in a manner opposite to the substrate 10 for controlling and adjusting the temperature of the substrate 10; one end of the temperature control platform lifting assembly 370 is fixed on the top wall of the cavity 310, the other end is connected with the temperature control platform 360, and the temperature control platform lifting assembly 370 can freely drive the temperature control platform 360 to move up and down.
The side wall of the cavity 310 is provided with a door and an exhaust pipe which can be opened and closed, the exhaust pipe is connected with an external exhaust device, and the door and the side wall can be sealed, so that the cavity is a closed cavity.
Referring to fig. 4 to 7 again, the inkjet printing apparatus 100 according to the present invention is used for inkjet printing of a light emitting device, and the working process thereof is as follows:
s21, providing a substrate 10, wherein a pixel definition layer is disposed on the substrate 10, and a plurality of pixel pits are disposed on the pixel definition layer.
S22, referring to fig. 4, the substrate 10 is placed above the inkjet print head 132, and the openings of the pixel pits on the substrate 10 face downward, and the inkjet print head 132 faces upward to print the light-emitting functional layer ink and deposit the ink into the pixel pits.
It will be appreciated that the placement of the substrate 10 above the ink jet print head 132 can be accomplished by using substrate carry-in or placement directly above the ink jet print head, and the like.
Specifically, in the present embodiment, the substrate is placed above the inkjet print head by carrying in the substrate, and then the inkjet printing apparatus 100 is used to perform inkjet printing on the substrate 10: moving the substrate support mechanism 120 to both sides of the transfer platform 140, then entering the substrate 10 into the inkjet printing apparatus 100 from the outside by means of a robot or the like, placing the substrate on the grip plane 122 of the substrate support mechanism 120, and fixing the substrate 10 by the suction of the vacuum holes on the grip plane 122; the substrate carrying mechanism 120 carries the substrate 10 from the transfer stage 140 to the air bearing stage 110 in the first direction, and reciprocates (or reciprocates) in the first direction on the first sub-stage 112 and the second sub-stage 114, and the printing mechanism 130 reciprocates (or reciprocates) in the second direction, and during this process, the inkjet print head 132 operates to deposit the ink 301 into the pixel pits. In the inkjet printing process, the air feeding channel 1122 on the air floating platform always blows nitrogen upwards to balance the gravity of the substrate 10, so that the substrate is kept horizontal and the uniformity of film formation is improved.
In the process of performing ink-jet printing operation, the substrate 10 will continuously move back and forth between the first printing area and the second printing area of the air floating platform, and between the air floating platform and the conveying platform according to different printing patterns; similarly, the ink jet print head is continuously moved back and forth on the air bearing platform along the second direction.
Specifically, as the substrate 10 reciprocates in the first direction between the first printing region 112 and the second printing region 114, the inkjet printhead 132 makes a progressive movement in the second direction; as the substrate 10 is moved in the first direction in increments, the inkjet print head 132 is reciprocated in the second direction.
And S23, drying to form a light-emitting functional layer, and obtaining the light-emitting device.
Specifically, in the present embodiment, the drying step includes prebaking, drying under reduced pressure, and baking in this order.
S231, pre-drying: after printing, the substrate carrying mechanism 120 carries the substrate 10 to the transfer platform 140, the heating mechanism 142 arranged on the transmission platform 140 pre-dries the substrate 10 at a temperature of 70-90 ℃ for 30-180 s, and after the ink 301 is pre-dried, the solvent content is reduced and is marked as ink 302.
By performing the pre-baking process in this manner, the content of the solvent in the ink 301 is reduced, and the ink in the pixel well is prevented from dripping or flowing into another pixel well due to the influence of air flow and/or vibration during the process of carrying the substrate 10 out of the inkjet printing apparatus 100.
S232, reduced pressure drying: after pre-drying, the substrate 10 is placed in a decompression drying mechanism for decompression and vacuum drying.
Specifically, after the pre-baking, the substrate loading mechanism 120 releases the vacuum adsorption of the substrate 10, and the transfer mechanism 200 shown in fig. 5 is used to adsorb the upper surface (the surface without the pixel definition layer) of the substrate 10 by the vacuum adsorption plate 210, so that the substrate 10 is carried out of the inkjet printing apparatus 100, and is transferred into the reduced-pressure drying mechanism 300 shown in fig. 6, and the substrate 10 is placed on the substrate support frame 320 with the openings of the pixel pits facing downward on the substrate 10, and the substrate support frame 320 is in contact with the non-display region around the substrate 10. Then the temperature control platform 360 is driven by the temperature control platform lifting assembly 370 to move downwards to contact with the upper surface (the surface without the pixel definition layer) of the substrate 10, the temperature control platform 360 adjusts the temperature of the substrate to 15-35 ℃ through contact type heat transfer, and the substrate supporting frame buffer assembly 330 ensures that the force applied by the temperature control platform 360 on the substrate 10 is not too large, thereby preventing the substrate 10 from cracking. The solvent capture plate lifting assembly 350 drives the solvent capture plate 340 to lift to keep a distance of 2 mm-20 mm from the substrate 10, then the gas in the cavity 310 is exhausted through an exhaust device (vacuum pump), so that the pressure in the cavity is reduced to 0.1 torr-100 torr, and the pressure reduction drying treatment is carried out and the pressure is kept for 180 s-600 s. The ink 302 in the pixel well is dried under reduced pressure to form a thin film 304 containing no solvent.
It is understood that after the ink 301 on the substrate 10 is pre-dried to become the ink 302, the vacuum drying may be performed by using an upright drying method, or may be performed by using an inverted drying method according to the present invention, preferably, by using an inverted substrate.
S233, baking: after the reduced pressure drying treatment, the film 304 on the substrate 10 needs to be baked to complete the preparation of the light emitting functional layer, and the baking temperature is 100 ℃ to 250 ℃.
It is understood that after the reduced pressure drying treatment, the baking can be performed in a drying mode of being placed right side up, or in an upside down baking mode of the present invention, preferably, in a mode of being placed upside down.
Specifically, the baking can be performed by a baking mechanism using both contact heat transfer and infrared radiation.
In this embodiment, the substrate 10 is baked using the contact heat transfer baking mechanism 400 shown in fig. 7.
Referring to fig. 7, the baking mechanism 400 includes a chamber 410, a substrate loading frame 420 and a substrate loading frame buffer assembly 430 disposed in the chamber 410, a heating platform 440 and a heating platform lifting assembly 450.
One end of the substrate placing frame buffer assembly 430 is fixed on the top wall of the chamber 410, and the other end is connected to the substrate placing frame 420, so as to buffer the substrate placing frame 420 and the substrate 10 placed on the substrate placing frame 420; the heating platform 440 is disposed above the substrate mounting frame 420 and disposed opposite to the substrate, one end of the heating platform lifting assembly 450 is fixed on the top wall of the chamber 410, and the other end is connected to the heating platform 440, so as to drive the heating platform 440 to move up and down freely.
The substrate 10 is placed upside down on the substrate placing frame 420, the substrate placing frame 420 is in contact with the non-display area of the substrate 10, the heating platform lifting assembly 450 drives the heating platform 440 to descend and to be in contact with the upper surface of the substrate 10, and the substrate 10 is directly heated and baked through heat conduction.
In other embodiments, the substrate 10 is baked using the infrared radiation heat transfer baking mechanism 500 of fig. 8.
Referring to fig. 8, the baking mechanism 500 includes a chamber 510, a substrate frame 520 disposed in the chamber 510, a substrate frame fixing assembly 530, and an infrared heating device 540.
One end of the substrate frame fixing assembly 530 is fixed on the top wall of the chamber 510, and the other end is connected to the substrate frame 520.
The infrared heating device 540 is disposed below the substrate mounting frame 520 and is disposed opposite to the substrate, the infrared heating device 540 includes an infrared heating pipe 542 and an infrared heating pipe fixing component 544, one end of the infrared heating pipe fixing component 544 is fixed on the bottom wall of the chamber 510, and the other end is connected to the infrared heating pipe 542.
The substrate 10 is placed upside down on the substrate placing frame 520, the substrate placing frame 520 is in contact with the non-display area of the substrate 10, and the infrared heating device heats and bakes the substrate 10 by infrared radiation heat conduction.
According to the invention, the ink jet printing device, the decompression drying mechanism and the like are adopted to manufacture the high-resolution luminescent device, so that the bridging defect caused by the drop point offset of ink drops in the ink jet process can be effectively reduced, the uniformity and the flatness of a formed film are improved, and the stability of the process and the yield of products are finally improved.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An inkjet printing method of a light emitting device, comprising the steps of:
providing a substrate, wherein a pixel definition layer is arranged on the substrate, and a plurality of pixel pits are formed in a display area of the pixel definition layer;
and placing the substrate above an ink-jet printing head, wherein the opening of the pixel pit faces downwards, the ink-jet printing head prints light-emitting functional layer ink upwards and deposits the light-emitting functional layer ink into the pixel pit, and drying to form a light-emitting functional layer to obtain the light-emitting device.
2. The inkjet printing method of a light emitting device according to claim 1, wherein a surface of the pixel defining layer remote from the substrate is hydrophobic, and a region of a sidewall of the pixel pit near a bottom is hydrophilic.
3. The inkjet printing method of a light emitting device according to claim 1, wherein the drying step includes, in order, pre-baking, drying under reduced pressure, and baking; and during the pre-drying and/or the reduced pressure drying, the opening of the pixel pit faces downwards.
4. The inkjet printing method of a light emitting device according to claim 3, wherein the temperature of the pre-baking is 70 to 90 ℃ for 30 to 180 seconds;
the temperature of the reduced pressure drying is 15-35 ℃, the vacuum degree is 0.1-1000 torr, and the time is 180-600 s.
5. The inkjet printing method of a light emitting device according to any one of claims 1to 4, wherein in the process of printing the light emitting functional layer ink with the inkjet print head facing upward, the non-display region of the substrate where the pixel pits are not provided is fixed, and the pixel pits of the display region are exposed, and an upward supporting buoyancy is provided to the substrate.
6. An inkjet printing apparatus, comprising:
the substrate bearing mechanism is used for fixing a substrate, a pixel definition layer is arranged on the substrate, a plurality of pixel pits are formed in a display area of the pixel definition layer, and openings of the pixel pits on the substrate face downwards;
a printing mechanism having an inkjet print head operable to inkjet print onto the substrate positioned thereabove.
7. The inkjet printing apparatus according to claim 6, further comprising an air floating platform for providing upward supporting buoyancy to the substrate;
the substrate bearing mechanism can move along a first direction relative to the air floating platform.
8. The inkjet printing apparatus according to claim 7, wherein the air bearing stage includes a first sub-stage and a second sub-stage, the first sub-stage and the second sub-stage are sequentially disposed along the first direction, and an inkjet printing space is formed between the first sub-stage and the second sub-stage, and the inkjet printing head is capable of inkjet printing through the inkjet printing space to the substrate located thereabove;
the inkjet print head is movable in a second direction, the second direction being perpendicular to the first direction.
9. The inkjet printing apparatus according to any one of claims 6 to 8, further comprising a transfer platform connected to one side of the air floating platform and located in the first direction, wherein a heating mechanism is disposed on the transfer platform.
10. The inkjet printing apparatus according to claim 9, further comprising a decompression drying mechanism and a transfer mechanism; the rotating mechanism comprises a vacuum adsorption plate, a mechanical arm and a base, wherein one end of the mechanical arm is connected with the vacuum adsorption plate, and the other end of the mechanical arm is connected with the base;
the decompression drying mechanism includes: a cavity;
the substrate supporting frame is arranged in the cavity and used for supporting the substrate so that the non-display area of the substrate is in contact with the substrate supporting frame, and the opening of the pixel pit on the substrate faces downwards;
the solvent capturing plate is arranged in the cavity and located below the substrate supporting frame, and the solvent capturing plate and the substrate supporting frame are arranged oppositely.
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