CN111465160A - Plasma jet generating device and system - Google Patents
Plasma jet generating device and system Download PDFInfo
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- CN111465160A CN111465160A CN202010407099.2A CN202010407099A CN111465160A CN 111465160 A CN111465160 A CN 111465160A CN 202010407099 A CN202010407099 A CN 202010407099A CN 111465160 A CN111465160 A CN 111465160A
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- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 208000031872 Body Remains Diseases 0.000 claims 1
- 230000004048 modification Effects 0.000 abstract description 21
- 238000012986 modification Methods 0.000 abstract description 21
- 239000002861 polymer material Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 9
- 230000002209 hydrophobic effect Effects 0.000 abstract description 9
- 239000012535 impurity Substances 0.000 abstract description 7
- 239000002245 particle Substances 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 80
- 238000000034 method Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- 238000004590 computer program Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
Abstract
The invention discloses a plasma jet generating device and a system, wherein the device comprises: a tube and an electrode; wherein the electrode surrounds the tube; the tube body comprises a gas input end for receiving working gas and a jet end for emitting plasma jet; and after the working gas is introduced into the gas input end, the electrode is used for applying voltage to the working gas in the tube body until the working gas is broken down to form plasma jet. According to the device, the electrodes are arranged on the pipe body at intervals in a surrounding mode, a plurality of sections capable of being fully collided and excited by gas particles can be built in the pipe body, the content of active groups in jet flow can be improved, impurity elements can be effectively prevented from being mixed into the jet flow, the energy of the jet flow is improved, and the effect of modification treatment such as hydrophobic treatment is improved when surface modification treatment is carried out on a high polymer material.
Description
Technical Field
The invention relates to the technical field of plasma jet, in particular to a plasma jet generating device and system.
Background
Under the atmospheric pressure environment, the low-temperature plasma jet generated based on the dielectric barrier discharge mode receives more and more attention due to the wide application in the fields of surface modification, biomedical treatment and the like, and has good development prospect. However, the plasma jet generating device is still in the exploration stage at present, and because the energy loss in the pipe is more, the formed jet has short length, narrow diameter and lower energy, so that the treatment effect is poor when the jet is applied. Studies have shown that the quality of the plasma jet is of significant relevance to the structure of the generating device. Most of the existing plasma jet pipes adopt a coaxial straight pipe-shaped structure, and the discharge electrode structure comprises a needle-ring structure, a ring-ring structure, a needle-plate structure, a ring-plate structure and the like, and is a discharge structure mostly consisting of a single high-voltage electrode and a single ground electrode.
According to hydrodynamics, working gas in the coaxial straight tube type jet flow generating device is easy to generate conditions such as turbulence and turbulent flow, and the like, so that the defects of poor stability, easy discharge termination and the like in the discharge process are caused. Moreover, under the electrode structure adopted at present, the excitation to working gas molecules is incomplete, so that the number of active bases contained in the jet flow is insufficient, the jet flow quality is further influenced, and the surface treatment effect is influenced when the electrode structure is applied to the surface treatment of high polymer materials. In addition, the plasma jet which can be generated at present is difficult to form large-area plasma, the processing range is limited, and large-area surface processing cannot be realized in a short time.
Disclosure of Invention
In view of the above-mentioned defects of the prior art, the present invention aims to provide a plasma jet generating device and system, which can effectively avoid impurity elements from mixing into the jet, improve the energy of the jet, and improve the effect of modification treatment when the surface modification treatment is performed on the high polymer material by the plasma jet.
One of the objects of the present invention is achieved by a plasma jet generating apparatus comprising: a tube and an electrode;
wherein the electrode is wrapped around an outer surface of the pipe body;
the tube body comprises a gas input end for receiving working gas and a jet end for emitting plasma jet;
and after the working gas is introduced into the gas input end, the electrode is used for applying voltage to the working gas in the tube body until the working gas is broken down to form plasma jet.
Optionally, the inner diameter of the pipe body linearly increases along the axial direction of the pipe body;
wherein, the one end that the internal diameter of body is little is the gas input end.
Optionally, the outer diameter and the inner diameter of the pipe body are synchronously and linearly increased, so that the wall thickness of the pipe body is kept unchanged.
Optionally, the electrodes include a high voltage electrode and a ground electrode, and the high voltage electrode and the ground electrode are arranged at an interval;
wherein, the electrode close to the gas input end is a high voltage electrode.
Optionally, the high voltage electrode and the ground electrode are wound around the tube body at intervals according to a preset distance.
Optionally, the tube body is made of an insulating dielectric material.
Optionally, the electrode is a metal electrode.
The second purpose of the invention is realized by the technical scheme that the plasma jet generating system comprises a gas flow controller, an adjustable power supply and the plasma jet generating device;
the output end of the gas flow controller is connected with the gas input end of the plasma jet generating device, and the gas flow controller is communicated with the inner hole of the tube body;
the adjustable power supply is connected to the electrode of the plasma jet generating device;
the gas flow controller is used for adjusting the flow of working gas introduced into the pipe body;
the adjustable power supply is used for changing the voltage parameter applied to the electrode to break down the working gas.
Optionally, the voltage parameter includes: voltage peak and frequency.
Due to the adoption of the technical scheme, the invention has the following advantages: according to the device, the electrodes are arranged on the pipe body at intervals in a surrounding mode, a plurality of sections capable of being fully collided and excited by gas particles can be built in the pipe body, the content of active groups in jet flow can be improved, impurity elements can be effectively prevented from being mixed into the jet flow, the energy of the jet flow is improved, and the effect of modification treatment such as hydrophobic treatment is improved when surface modification treatment is carried out on a high polymer material.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
The drawings of the invention are illustrated as follows:
fig. 1 is a schematic structural view of a plasma jet generating device according to a second embodiment of the present invention.
Detailed Description
The invention is further illustrated by the following figures and examples.
Example one
A first embodiment of the present invention provides a plasma jet generating apparatus, including: a tube and an electrode;
wherein the electrode is wrapped around an outer surface of the pipe body;
the tube body comprises a gas input end for receiving working gas and a jet end for emitting plasma jet;
and after the working gas is introduced into the gas input end, the electrode is used for applying voltage to the working gas in the tube body until the working gas is broken down to form plasma jet.
Specifically speaking, on encircling the body with the electrode interval in this embodiment, can form a plurality of intervals that can supply the gas particle abundant collision excitation in the body, can improve the content of the active group in the efflux, and can effectively avoid impurity element to mix into in the efflux, improve the energy of efflux, when carrying out surface modification to macromolecular material, improve modification treatment's such as hydrophobic effect.
Optionally, the inner diameter of the pipe body linearly increases along the axial direction of the pipe body;
wherein, the one end that the internal diameter of body is little is the gas input end.
Optionally, the outer diameter and the inner diameter of the pipe body are synchronously and linearly increased, so that the wall thickness of the pipe body is kept unchanged. Specifically, in an alternative embodiment of the present invention, the inner diameter and the outer diameter of the tube body are uniformly changed along the direction of the tube body, and the whole tube body is in a funnel shape, wherein the end of the tube body with the smaller inner diameter and outer diameter is a gas input end.
The funnel-shaped device structure is adopted, after the working gas is introduced, the turbulent flow phenomenon can be effectively avoided, the gas is ensured to keep a laminar flow state, and the gas discharge process is more stable. Meanwhile, the jet flow generating device can generate plasma jet flow with larger area, the temperature of the generated jet flow is close to room temperature, and the surface of the material cannot be damaged when the surface of the high polymer material is subjected to surface modification treatment.
Optionally, the electrodes include a high voltage electrode and a ground electrode, and the high voltage electrode and the ground electrode are wound around the pipe body at intervals;
wherein the electrode surrounding close to the gas input end is a high voltage electrode.
Optionally, the electrode is a metal electrode.
Specifically, in another alternative embodiment of the device of the present invention, the electrodes include a high voltage electrode and a ground electrode, the electrodes may be made of copper or other metal materials, so as to ensure good conductivity, and the high voltage electrode and the ground electrode are spaced and surround the outer surface of the pipe body, wherein the electrode surrounding near the gas input end is the high voltage electrode, and the electrode near the jet end is the ground electrode.
Optionally, the high voltage electrode and the ground electrode are wound around the tube body at intervals according to a preset distance.
Specifically speaking, according to the body structure of funnel shape, the spacing distance of high voltage electrode and ground electrode is decided according to the actual condition that discharges, also can expand in pairs, for example encircle two sets of high voltage electrode and ground electrode, perhaps, encircle three sets of high voltage electrode and ground electrode, through the distance between the rational arrangement electrode, can guarantee that plasma jet generating device inside electric field distributes evenly, strong electric field region wide range to gas ionization's probability has been improved by a wide margin, has guaranteed the stability of dielectric barrier discharge process.
Optionally, the tube body is made of an insulating dielectric material.
In the embodiment, the tube body is made of an insulating medium material, such as quartz glass, ceramic and the like, and has the advantages of convenient material selection, simple processing and effective cost control.
In summary, the invention provides a plasma jet generating device, which has uniform electric field distribution inside and wide range of strong electric field area, greatly improves the probability of gas ionization, and ensures the stability of the dielectric barrier discharge process.
The funnel-shaped device structure is adopted, after the working gas is introduced, the turbulent flow phenomenon is effectively avoided, the gas is ensured to keep a laminar flow state, and the gas discharge process is more stable.
The jet flow generating device can generate plasma jet flow with larger area, the temperature of the generated jet flow is close to room temperature, and the surface of the material cannot be damaged when the surface modification treatment is carried out on the high polymer material.
The jet flow generating device is internally provided with a plurality of intervals which can be fully collided and excited by gas particles, the content of active groups in the jet flow can be improved, impurity elements can be effectively prevented from being mixed into the jet flow, the energy of the jet flow is improved, and the effect of modification treatment such as hydrophobic treatment is improved when surface modification treatment is carried out on a high polymer material.
Example two
The present embodiment provides an implementation case of a plasma jet generating apparatus, which includes: the plasma jet pipe and the electrode of funnel type structure, wherein the body is quartz glass pipe, and the body includes the tip of gas input end and jet end, as shown in fig. 1, the first internal diameter 1 of gas input end is 4mm and the second internal diameter 2 of gas input end is 6mm, the first internal diameter 7 of jet end is 8mm and the second internal diameter 8 of jet end is 10mm, the glass pipe length is 84mm, the wall thickness is 2 mm.
In this embodiment, as shown in fig. 1, the electrodes include 4 ring electrodes, but it is needless to say that other electrodes with an even number are not limited thereto, four ring electrodes are attached to the outer side of the funnel-shaped jet pipe, the electrodes are 3mm in width and 2mm in thickness, and are made of copper sheets. The four ring electrodes are composed of two high-voltage electrodes and two ground electrodes, the first electrode close to the gas input end is a first high-voltage electrode 3, and the high-voltage electrodes and the ground electrodes are alternately surrounded. As shown in fig. 1, the electrodes include a first high voltage electrode 3, a first ground electrode 4, a second high voltage electrode 5, and a second ground electrode 6, which are sequentially disposed. The distance between the first high-voltage electrode 3 and the first ground electrode 4 is 18mm, the distance between the first ground electrode 4 and the second high-voltage electrode 5 is 17mm, the distance between the second high-voltage electrode 5 and the second ground electrode 6 is 26mm, the distance between the second ground electrode 6 and the jet end is 6mm, the distance between the electrodes can be adjusted according to actual conditions, so that a better technical effect is achieved, and the distance between the electrodes is not limited. The first high-voltage electrode 3 and the second high-voltage electrode 5 are connected with the output end of a high-frequency high-voltage alternating current power supply 9, and the first ground electrode 4 and the second ground electrode 6 are both reliably grounded 10.
When the generating device normally operates, gas is introduced into the gas input end of the jet flow generating device, a beam of uniform plasma jet flow can be generated at the jet flow end of the jet flow generating device, and the temperature of the jet flow is close to room temperature, so that the surface hydrophobic modification treatment can be performed on the high polymer material.
The device of the invention has the following specific working procedures:
1. and introducing working gas to enable the working gas to enter the funnel-shaped quartz glass tube from the gas input end.
2. And applying high-voltage alternating current, adjusting the voltage peak value and the frequency until the working gas breaks down, and generating plasma jet with the length and the width meeting the requirements.
3. And treating the surface of the material to be treated.
In conclusion, the plasma jet generating device has the following advantages:
(1) the plasma jet generating device has the advantages of uniform electric field distribution inside the plasma jet generating device and wide strong electric field area range, greatly improves the probability of gas ionization, and ensures the stability of the dielectric barrier discharge process.
(2) The funnel-shaped device structure is adopted, after the working gas is introduced, the turbulent flow phenomenon is effectively avoided, the gas is ensured to keep a laminar flow state, and the gas discharge process is more stable.
(3) The jet flow generating device can generate plasma jet flow with larger area, the temperature of the generated jet flow is close to room temperature, and the surface of the material cannot be damaged when the surface modification treatment is carried out on the high polymer material.
(4) Three intervals capable of being sufficiently collided and excited by gas particles exist in the jet flow generating device, the content of active groups in jet flow can be improved, impurity elements can be effectively prevented from being mixed into the jet flow, the energy of the jet flow is improved, and when surface modification treatment is carried out on a high polymer material, the effect of modification treatment such as hydrophobic treatment is improved.
When the funnel-type four-electrode jet flow generating device uses argon gas and carbon tetrafluoride gas as working gas, the surface energy of the silicon rubber insulator material can be greatly reduced, the water contact angle is improved, and the hydrophobic treatment of the surface of the material is realized.
EXAMPLE III
The embodiment provides a plasma jet generating system, which comprises a gas flow controller, an adjustable power supply and the plasma jet generating device;
the output end of the gas flow controller is connected with the gas input end of the plasma jet generating device, and the gas flow controller is communicated with the inner hole of the tube body;
the adjustable power supply is connected to the electrode of the plasma jet generating device;
the gas flow controller is used for adjusting the flow of working gas introduced into the pipe body;
the adjustable power supply is used for changing the voltage parameter applied to the electrode to break down the working gas.
Optionally, the voltage parameter includes: voltage peak and frequency.
Specifically, the system of the invention has the following working procedures:
1. and introducing working gas to enable the working gas to enter the funnel-shaped quartz glass tube from the gas input end.
2. Applying high-voltage alternating current, adjusting voltage peak value and frequency until the working gas breaks down, and generating plasma jet with length and width meeting requirements
3. And treating the surface of the material to be treated.
The system can effectively adjust the flow of the working gas through the gas flow controller, and can adjust the output voltage parameters of the alternating current power supply on the adjustable power supply, wherein the voltage parameters comprise a voltage peak value and frequency, and the parameters influencing plasma jet mainly comprise the voltage peak value u, the frequency f, the flow l of the working gas (such as argon Ar) and the like. Under normal environment temperature (0-40 ℃), working gas can be punctured within the parameter range shown in table 1 to generate plasma jet with different lengths.
TABLE 1 parameter Range of funnel type four-electrode jet generator capable of generating plasma jet
| Parameter(s) | Voltage u/(kV) | Frequency f/(kHz) | Gas flow rate l/(L. min.)-1) |
| Range of | 5～15 | 5～15 | 2～6 |
In conclusion, the plasma jet generating system has the following advantages:
(1) the plasma jet generating device has the advantages of uniform electric field distribution inside the plasma jet generating device and wide strong electric field area range, greatly improves the probability of gas ionization, and ensures the stability of the dielectric barrier discharge process.
(2) The funnel-shaped device structure is adopted, after the working gas is introduced, the turbulent flow phenomenon is effectively avoided, the gas is ensured to keep a laminar flow state, and the gas discharge process is more stable.
(3) The jet flow generating device can generate plasma jet flow with larger area, the temperature of the generated jet flow is close to room temperature, and the surface of the material cannot be damaged when the surface modification treatment is carried out on the high polymer material.
(4) The jet flow generating device has at least three sections capable of being fully collided and excited by gas particles, so that the content of active groups in the jet flow can be improved, impurity elements can be effectively prevented from being mixed into the jet flow, the energy of the jet flow is improved, and the effect of modification treatment such as hydrophobic treatment is improved when surface modification treatment is carried out on a high polymer material.
When the funnel-type four-electrode jet flow generating device uses argon gas and carbon tetrafluoride gas as working gas, the surface energy of the silicon rubber insulator material can be greatly reduced, the water contact angle is improved, and the hydrophobic treatment of the surface of the material is realized.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered thereby.
Claims (9)
1. A plasma-jet generating device, comprising: a tube and an electrode;
wherein the electrode is wrapped around an outer surface of the pipe body;
the tube body comprises a gas input end for receiving working gas and a jet end for emitting plasma jet;
and after the working gas is introduced into the gas input end, the electrode is used for applying voltage to the working gas in the tube body until the working gas is broken down to form plasma jet.
2. The device of claim 1, wherein the inner diameter of the tubular body increases linearly along the axial direction of the tubular body;
wherein, the one end that the internal diameter of body is little is the gas input end.
3. The apparatus of claim 2, wherein the outer diameter and the inner diameter of the tubular body increase linearly in synchrony such that the wall thickness of the tubular body remains constant.
4. The apparatus of claim 1, wherein the electrodes comprise a high voltage electrode and a ground electrode, the high voltage electrode and the ground electrode being spaced apart;
wherein, the electrode close to the gas input end is a high voltage electrode.
5. The apparatus of claim 4, wherein the high voltage electrode and the ground electrode are spaced around the pipe body by a predetermined distance.
6. A device as claimed in any one of claims 1 to 5 wherein the tubular body is formed from an insulating dielectric material.
7. The device of any of claims 1-5, wherein the electrode is a metal electrode.
8. A plasma jet generating system comprising a gas flow controller, an adjustable power supply and a plasma jet generating device according to any one of claims 1 to 7;
the output end of the gas flow controller is connected with the gas input end of the plasma jet generating device, and the gas flow controller is communicated with the inner hole of the tube body;
the adjustable power supply is connected to the electrode of the plasma jet generating device;
the gas flow controller is used for adjusting the flow of working gas introduced into the pipe body;
the adjustable power supply is used for changing the voltage parameter applied to the electrode to break down the working gas.
9. The plasma-jet generating system of claim 8, wherein the voltage parameters comprise: voltage peak and frequency.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113692100A (en) * | 2021-08-09 | 2021-11-23 | 南京工业大学 | Multi-section electrode plasma jet triggering method applied to endoscope inner wall disinfection |
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