CN105332046A - Novel single-crystal furnace guide cylinder - Google Patents
Novel single-crystal furnace guide cylinder Download PDFInfo
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- CN105332046A CN105332046A CN201510712556.8A CN201510712556A CN105332046A CN 105332046 A CN105332046 A CN 105332046A CN 201510712556 A CN201510712556 A CN 201510712556A CN 105332046 A CN105332046 A CN 105332046A
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- crystal furnace
- guide cylinder
- guide shell
- guide
- single crystal
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Abstract
The invention provides a novel single-crystal furnace guide cylinder. The novel single-crystal furnace guide cylinder comprises a guide cylinder body, a guide layer, a straight pipe region, a transition region and an expansion region. The caliber of the guide cylinder body is sequentially increased from top to bottom. The guide layer is arranged on the inner wall of the guide cylinder, the smoothness of a wall is improved, and friction disturbance between gas and the wall is reduced. The straight pipe region, the transition region and the expansion region are located on the upper portion, the middle portion and the lower portion of the guide cylinder body respectively. When argon passes the regions, the flow area is continuously increased, the flow speed becomes smaller and smaller, airflow fluctuation is gradually reduced, the guide layer is arranged in the guide cylinder body, the smoothness of the wall can be improved, friction disturbance between the gas and the wall is reduced, thus, when the argon flows in the guide cylinder body from top to bottom, the airflow strength is reduced, the turbulence probability generated by airflow is reduced, the phenomena of single-crystal silicon rod shaking, liquid level fluctuation and the like are reduced, the working efficiency of a single-crystal furnace is greatly improved, and the novel single-crystal furnace guide cylinder is simple in structure and convenient to manufacture.
Description
Technical field
The present invention relates to a kind of equipment of manufacture order crystal silicon, particularly a kind of single-crystal furnace guide shell.
Background technology
Guide shell, as a vitals of single crystal growing furnace, plays an important role in the production of silicon single crystal, especially in CZ legal system in the production of silicon single crystal, the guide shell of single crystal growing furnace has a significant impact crystal growth.Use guide shell can reduce the argon gas flowing whirlpool born of the same parents of upper of furnace body, and then reduce the deposition of SiO on single crystal growing furnace top, thus guarantee that pulled crystal silicon rod has very high quality.But the diameter of existing guide shell upper and lower end parts is different, successively decrease from upper end to bottom, like this because the circulating face of gas reduces, flow velocity during this cross section that gas passes through increases, the flow velocity of unexpected increase will cause the fluctuation of air-flow, argon gas stream air strength when entering single crystal growing furnace lower end can be strengthened, causing silicon single crystal rod to rock, liquid fluctuating, can cause falling time serious rod wait industrial accident.In addition, when existing guide shell carries out thermal radiation, be that heat is dispersed to furnace wall surrounding, which adds energy consumption.Therefore, develop a kind of single-crystal furnace guide shell that can reduce the fluctuation of air-flow when argon gas stream flows wherein from top to bottom, ensure the steady running that crystal pulling is produced.
It is not enough that the present invention will overcome more existing single-crystal furnace guide shells exactly, provides a kind of Novel draft tube of single crystal furnace.The single-crystal furnace guide shell of fluctuation of air-flow when this Novel draft tube of single crystal furnace both can reduce argon gas stream flowing from top to bottom wherein, also can the crystal pulling steady running of producing, and structure is simple, easily manufactured.
Summary of the invention
The technical problem to be solved in the present invention is: provide a kind of Novel draft tube of single crystal furnace, this guide shell bore from top to down increases successively, straight tube district is defined in guide shell, zone of transition, expansion regions, when argon gas stream flows wherein from top to bottom, flow from straight tube district, airflow sectional area is less, gas speed is now larger, the zone of transition be connected with straight tube district is the fluid zone with arc transition, can be reduced the airflow fluctuation that is that cause because sectional area becomes suddenly large like this, air-flow velocity in zone of transition diminishes, gas flow into expansion regions by zone of transition, by being connected with the arc transition of zone of transition, the unexpected expansion of runner can be avoided, flow velocity and airflow fluctuation can be reduced further simultaneously, guide layer is set in baffle inside simultaneously, the slickness of wall can be increased, decrease gas and friction and disturbance between avoiding, during the flowing from top to bottom wherein of such argon gas stream, air strength weakens, reduce the turbulent flow probability that air-flow produces, reduce silicon single crystal rod to rock, the phenomenons such as liquid fluctuating, substantially increase the working efficiency of single crystal growing furnace.
In order to solve the problem, the present invention is achieved through technology,
Novel draft tube of single crystal furnace, comprises guide shell, guide layer, straight tube district, zone of transition, expansion regions.Guide shell bore from top to down increases successively; Guide layer is arranged on guide shell inwall, increases the slickness of wall, decreases gas and friction and disturbance between avoiding; Straight tube district, zone of transition, expansion regions lay respectively at the top of guide shell, middle part, bottom, and argon gas is through these regions, and flow area constantly increases, and flow velocity is more and more less, and airflow fluctuation lowers gradually.When argon gas stream flows wherein from top to bottom, flow from straight tube district, airflow sectional area is less, gas speed is larger, the zone of transition be connected with straight tube district is the fluid zone with arc transition, can be reduced the airflow fluctuation that is that cause because sectional area becomes suddenly large like this, air-flow velocity in zone of transition diminishes, gas flow into expansion regions by zone of transition, by being connected with the arc transition of zone of transition, the unexpected expansion of runner can be avoided, flow velocity and airflow fluctuation can be reduced further simultaneously, guide layer is set in baffle inside simultaneously, the slickness of wall can be increased, decrease gas and friction and disturbance between avoiding, during the flowing from top to bottom wherein of such argon gas stream, air strength weakens, reduce the turbulent flow probability that air-flow produces, reduce silicon single crystal rod to rock, the phenomenons such as liquid fluctuating, substantially increase the working efficiency of single crystal growing furnace.
This Novel draft tube of single crystal furnace has gradual change bore, and the upper end bore of guide shell is less than bottom bore.
This Novel draft tube of single crystal furnace inside forms three yield zones, and three yield zones achieve deceleration, the smooth flow of argon gas.
This Novel draft tube of single crystal furnace has guide layer, and guide layer has the function increasing and avoid slickness.
Have employed technique scheme, the invention has the beneficial effects as follows:
A kind of Novel draft tube of single crystal furnace, this guide shell bore from top to down increases successively, straight tube district is defined in guide shell, zone of transition, expansion regions, when argon gas stream flows wherein from top to bottom, flow area constantly increases, flow velocity is more and more less, airflow fluctuation lowers gradually, guide layer is set in baffle inside simultaneously, the slickness of wall can be increased, decrease gas and friction and disturbance between avoiding, during the flowing from top to bottom wherein of such argon gas stream, air strength weakens, reduce the turbulent flow probability that air-flow produces, reduce silicon single crystal rod to rock, the phenomenons such as liquid fluctuating, substantially increase the working efficiency of single crystal growing furnace.
Therefore, the present invention, compared with common guide shell, has outstanding advantage and is: (1) reduces the fluctuation of air-flow when argon gas stream flows wherein from top to bottom; (2) phenomenons such as silicon single crystal rod rocks, liquid fluctuating are reduced; (3) structural stability is good, and structure is simple, easily manufactured.
Accompanying drawing explanation
Accompanying drawing is structural representation of the present invention.
In accompanying drawing 1: 1. guide shell; 2. guide layer; 3. straight tube district; 4. zone of transition; 5. expansion regions.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.Guide shell 1 bore from top to down increases successively.Guide layer 2 is arranged on guide shell 1 inwall, increases the slickness of wall, decreases gas and friction and disturbance between avoiding; Straight tube district 3, zone of transition 4, expansion regions 5 lay respectively at the top of guide shell 1, middle part, bottom, and argon gas is through these regions, and flow area constantly increases, and flow velocity is more and more less, and airflow fluctuation lowers gradually.When argon gas stream flows wherein from top to bottom, flow from straight tube district 3, airflow sectional area is less, gas speed is larger, the zone of transition 4 be connected with straight tube district 3 is the fluid zones with arc transition, the airflow fluctuation that is that cause because sectional area becomes suddenly large can be reduced like this, air-flow velocity in zone of transition 4 diminishes, gas flow into expansion regions 5 by zone of transition 4, by being connected with the arc transition of zone of transition 4, the unexpected expansion of runner can be avoided, flow velocity and airflow fluctuation can be reduced further simultaneously, guide layer 2 is set in baffle 1 inside simultaneously, the slickness of wall can be increased, decrease gas and friction and disturbance between avoiding, during the flowing from top to bottom wherein of such argon gas stream, air strength weakens, reduce the turbulent flow probability that air-flow produces, reduce silicon single crystal rod to rock, the phenomenons such as liquid fluctuating, substantially increase the working efficiency of single crystal growing furnace.
Last it is noted that above embodiment only in order to illustrate the present invention and and unrestricted technical scheme described in the invention; Therefore, although this specification sheets reference the above embodiments are to present invention has been detailed description, those of ordinary skill in the art should be appreciated that and still can modify to the present invention or equivalent replacement; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (4)
1. Novel draft tube of single crystal furnace, is characterized in that, comprising: guide shell, guide layer, straight tube district, zone of transition, expansion regions.Described guide shell bore from top to down increases successively; Described guide layer is arranged on guide shell inwall, increases the slickness of wall, decreases gas and friction and disturbance between avoiding; Described straight tube district, zone of transition, expansion regions lay respectively at the top of guide shell, middle part, bottom, and argon gas is through these regions, and flow area constantly increases, and flow velocity is more and more less, and airflow fluctuation lowers gradually.
2. Novel draft tube of single crystal furnace as claimed in claim 1, it is characterized in that: described Novel draft tube of single crystal furnace has gradual change bore, the upper end bore of guide shell is less than bottom bore.
3. Novel draft tube of single crystal furnace as claimed in claim 1, is characterized in that: described single-crystal furnace guide shell inside forms three yield zones, and three yield zones achieve deceleration, the smooth flow of argon gas.
4. Novel draft tube of single crystal furnace as claimed in claim 1, is characterized in that: described single-crystal furnace guide shell has guide layer, and guide layer has the function increasing and avoid slickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510712556.8A CN105332046A (en) | 2015-10-27 | 2015-10-27 | Novel single-crystal furnace guide cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510712556.8A CN105332046A (en) | 2015-10-27 | 2015-10-27 | Novel single-crystal furnace guide cylinder |
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| Publication Number | Publication Date |
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| CN105332046A true CN105332046A (en) | 2016-02-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510712556.8A Pending CN105332046A (en) | 2015-10-27 | 2015-10-27 | Novel single-crystal furnace guide cylinder |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109355695A (en) * | 2018-10-15 | 2019-02-19 | 徐州振丰原喷灌设备有限公司 | A kind of guide shell for single crystal growing furnace |
| CN111465160A (en) * | 2020-05-14 | 2020-07-28 | 国网重庆市电力公司电力科学研究院 | Plasma jet generating device and system |
| CN116497434A (en) * | 2023-06-20 | 2023-07-28 | 苏州晨晖智能设备有限公司 | Oxygen reduction guide cylinder, single crystal furnace and oxygen reduction process method |
-
2015
- 2015-10-27 CN CN201510712556.8A patent/CN105332046A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109355695A (en) * | 2018-10-15 | 2019-02-19 | 徐州振丰原喷灌设备有限公司 | A kind of guide shell for single crystal growing furnace |
| CN111465160A (en) * | 2020-05-14 | 2020-07-28 | 国网重庆市电力公司电力科学研究院 | Plasma jet generating device and system |
| CN116497434A (en) * | 2023-06-20 | 2023-07-28 | 苏州晨晖智能设备有限公司 | Oxygen reduction guide cylinder, single crystal furnace and oxygen reduction process method |
| CN116497434B (en) * | 2023-06-20 | 2023-09-05 | 苏州晨晖智能设备有限公司 | Oxygen reduction guide cylinder, single crystal furnace and oxygen reduction process method |
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Application publication date: 20160217 |