CN108882493B - Glow plasma generating device for surface modification of high polymer material - Google Patents

Glow plasma generating device for surface modification of high polymer material Download PDF

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CN108882493B
CN108882493B CN201810738883.4A CN201810738883A CN108882493B CN 108882493 B CN108882493 B CN 108882493B CN 201810738883 A CN201810738883 A CN 201810738883A CN 108882493 B CN108882493 B CN 108882493B
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electrode
voltage
metal
insulating medium
discharge
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CN108882493A (en
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刘文正
祝莉莹
陈晓中
赵潞翔
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Beijing Ruiyuda Technology Co ltd
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Beijing Ruiyuda Technology Co ltd
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    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma

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Abstract

The invention provides a glow plasma generating device for surface modification of a high polymer material. The method comprises the following steps: high-frequency high-voltage power supply, high-voltage electrode, insulating medium, metal net electrode and modified material. The high-voltage electrode is connected with a high-voltage high-frequency power supply through a lead, the metal mesh electrode is connected with a grounding end through a lead, the insulating medium is arranged between the high-voltage electrode and the metal mesh electrode, the modifying material is arranged on the surface of the metal mesh electrode, the high-voltage electrode and the insulating medium, the insulating medium and the metal mesh electrode and the modifying material are in sealing contact, and after the voltage applied by the high-voltage high-frequency power supply reaches the discharge voltage, glow discharge plasma is generated in the discharge region and acts on the modifying material. The invention constructs the submillimeter-level discharge gap by directly contacting the modified material with the electrode, and inhibits the development degree of electron collapse, thereby inhibiting the generation of filiform discharge and being beneficial to improving the effect of plasma on the surface modification of the material.

Description

Glow plasma generating device for surface modification of high polymer material
Technical Field
The invention relates to the technical field of high polymer materials, in particular to a glow plasma generating device for surface modification of a high polymer material.
Background
The high polymer material is a general name of plastic, rubber and fiber. In recent years, polymer materials have been widely used in the related fields of construction, medical treatment, printing, agriculture, military, aerospace, composite materials and the like due to the obvious advantages of low density, low specific strength and modulus compared with metals, low cost, simple processing technology, good chemical and thermal stability and the like, and have become essential important materials in national economic construction and daily life. However, for general polymer materials, due to their special molecular structures, the crystallinity of the materials is high and the surface energy is low, resulting in poor properties such as hydrophilicity, cohesiveness, anti-shrinkage, dyeability, biocompatibility, and the like, thereby limiting further applications of the polymer materials. With the increasing demand for the performance of polymer materials, it is becoming increasingly difficult for conventional polymer materials to meet the demands of use. Therefore, in order to further improve the surface properties of the polymer material, it is necessary to modify the polymer material.
At present, the main methods for modifying polymer materials are chemical methods and physical methods. Wherein, the traditional chemical method treatment is generally only suitable for treating a small amount of materials, and the treatment efficiency is low; meanwhile, chemical reactions easily cause wastewater pollution and a large amount of energy loss. The physical methods include electron beam, ultraviolet irradiation, plasma method, and the like. Compared with the traditional chemical method, the active particles generated by the plasma have larger chemical activity and energy, and show great advantages in the surface modification effect of the high polymer material. Meanwhile, as a dry process, the plasma method has the advantages of high efficiency, energy conservation and no pollution; only the surface can be modified on the basis of not influencing the performance of the main body of the material. The plasma can improve the roughness and the surface free energy of the surface by etching, crosslinking, introducing active groups and the like, and can endow the surface with new functions while improving the surface performance.
The need for vacuum equipment for conventional low-pressure plasma leads to high production investment and cost, and the generated plasma cannot be expanded in large area and continuously process materials, thereby limiting large-scale industrial application. Therefore, research into plasma under atmospheric pressure conditions is currently receiving a great deal of attention. In atmospheric pressure plasma, corona discharge is generated in an extremely uneven electric field, and the actual discharge range thereof is small; meanwhile, when the voltage is increased, breakdown is easily caused due to too high local electric field, and further, arc discharge may be converted. The filiform discharge has thermal instability and is very easy to cause local damage of the modified material. Therefore, the atmospheric pressure glow discharge plasma is considered to be the best choice for material surface modification due to its uniform discharge, moderate power density and abundant species of active particles. At present, inert gas is generally needed to realize glow discharge under the atmospheric pressure condition, so that higher gas cost is needed, and the popularization and the use are difficult. Achieving atmospheric pressure glow discharge in air is still the focus and focus of current research. However, the generation of atmospheric air glow discharge is very difficult due to the high insulating properties of air, and the discharge is very likely to be converted into filaments.
At present, there are some patents for the invention of plasma surface treatment of polymer materials. The Chinese patent application with the publication number of CN02151228.0 and the name of dielectric barrier discharge continuous treatment device for surface modification of fiber materials discloses a device for continuously treating fiber materials by using dielectric barrier discharge. The intermittent discharge adopted by the device has higher discharge voltage in the actual treatment process, the generated discharge form is very easy to be converted into filiform discharge, and the fiber surface is very easy to be damaged when the fiber is treated. At the same time, uneven treatment may also occur.
Further, chinese patent application No. CN107124812A, entitled atmospheric pressure glow plasma generating device and textile material processing device, discloses a device for surface processing of textile fabrics by glow discharge, which adopts a manner in which an electrode is disposed on one side of a material, and plasma generated between the electrodes modifies the material by diffusion. In fact, the plasma loses energy during diffusion, thereby reducing the energy of active species in the plasma, resulting in a reduction in the strength of the plasma's action on the material and in the modifying effect.
Disclosure of Invention
The embodiment of the invention provides a glow plasma generating device for surface modification of a high polymer material, which overcomes the defects of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme.
A glow plasma generating device for surface modification of a polymeric material, comprising: the high-frequency high-voltage power supply comprises a high-frequency high-voltage power supply, a high-voltage electrode, an insulating medium, a metal mesh electrode and a modified material;
the high-voltage electrode is connected with a high-voltage end of a high-voltage high-frequency power supply through a lead, the metal mesh electrode is connected with a ground end through a lead, the insulating medium is arranged between the high-voltage electrode and the metal mesh electrode, the modified material is placed on the surface of the metal mesh electrode, the high-voltage electrode is in sealed contact with the insulating medium, the insulating medium is in sealed contact with the metal mesh electrode, the metal mesh electrode is in sealed contact with the modified material, and a submillimeter-level discharge area is formed between the modified material and the insulating medium;
when the voltage applied by the high-voltage high-frequency power supply reaches a set discharge voltage, glow discharge plasma is generated in the discharge area and acts on the modified material to modify the surface of the modified material.
Further, the high-voltage electrode is a metal flat plate or a metal roll shaft electrode.
Further, when the high-voltage electrode is a metal roll shaft electrode, a pair of driven roll shafts and the metal roll shaft electrode form a set of modifying device, the insulating medium and the metal mesh electrode are spread along the surface of the metal roll shaft electrode, the metal roll shaft electrode rotates at a certain speed, and the modifying material rolls along with the rotation of the metal roll shaft electrode.
When the high-voltage electrode is a metal roller electrode, a pair of metal roller electrodes are arranged, a pair of driven rollers and the pair of metal roller electrodes form a set of modification device, double-sided modification processing of the modification material is realized, and the distance between the driven rollers and the metal roller is adjusted, so that the modification material is spread on the surface of the metal roller electrode to the maximum extent and rolls along with the rolling of the metal roller electrodes.
Furthermore, the materials adopted by the high-voltage electrode and the metal mesh electrode comprise metal materials.
Furthermore, the metal mesh electrode is formed by weaving metal wires, and the shape of the formed mesh is square, rectangular or parallelogram; the wire is in the shape of a cube, cylinder or elliptic cylinder.
Further, the material adopted by the insulating medium comprises polytetrafluoroethylene, poly-p-phthalic plastic, quartz glass or ceramic.
Further, the size of the metal mesh electrode is smaller than a set numerical range.
It can be seen from the technical solutions provided by the embodiments of the present invention that the glow plasma generating device provided by the present invention effectively suppresses the development degree of electron collapse by forming a submillimeter-level discharge gap by directly contacting the modification material with the electrode, thereby suppressing the generation of filament discharge. Meanwhile, the submillimeter-sized gap enables higher electric field intensity to be formed in a discharge region under lower voltage, so that the energy of active particles in the plasma can be improved, and the effect of the plasma on the surface modification of the material can be improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a glow plasma generating device for surface modification of a polymer material according to an embodiment of the present invention;
FIG. 2a is a cross-sectional view of the device shown in FIG. 1;
FIG. 2b is a schematic, partially enlarged view of the apparatus of FIG. 1;
fig. 3 is a schematic structural diagram of another glow plasma generating device for surface modification of a polymer material according to a second embodiment of the present invention;
fig. 4 is a schematic structural diagram of another glow plasma generating device for surface modification of a polymer material according to the third embodiment of the present invention;
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or coupled. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
For the convenience of understanding the embodiments of the present invention, the following description will be further explained by taking several specific embodiments as examples in conjunction with the drawings, and the embodiments are not to be construed as limiting the embodiments of the present invention.
Aiming at the problems in the prior art, the embodiment of the invention provides a device for generating large-area high-activity glow plasma applied to a high polymer material, which can realize glow discharge and continuous treatment on the material in atmospheric pressure air. The device does not need vacuum equipment and gas cost, and has the advantages of lower discharge voltage and no limitation of material thickness. Meanwhile, a stronger electric field distribution can be formed in a discharge area between the material and the insulating medium, which is beneficial to further improving the energy of active particles, thereby improving the surface modification effect of the material.
The first embodiment is as follows:
fig. 1 is a schematic structural diagram of a glow plasma generating device for surface modification of a polymer material according to an embodiment of the present invention; FIG. 2a is a cross-sectional view of the device shown in FIG. 1; fig. 2b is an enlarged view of a portion of the device shown in fig. 1. As shown in fig. 1, fig. 2a and fig. 2b, the glow plasma generating device for surface modification of polymer material of the present invention comprises a high-frequency high-voltage power supply 1, a high-voltage electrode 2, an insulating medium 3 and a metal mesh electrode 4. In this embodiment, the high voltage electrode 2 is a metal plate electrode 2.
The high-voltage electrode 2 is connected with a high-voltage end of a high-voltage high-frequency power supply 1 through a lead, the metal mesh electrode 4 is connected with a grounding end through a lead, the insulating medium 3 is arranged between the high-voltage electrode 2 and the metal mesh electrode 4, the modified material 5 is placed on the surface of the metal mesh electrode 4, the high-voltage electrode 2 is in sealed contact with the insulating medium 3, the insulating medium 3 is in sealed contact with the metal mesh electrode 4, and the metal mesh electrode 4 is in sealed contact with the modified material 5, so that the phenomenon that the edge of the metal mesh electrode is sharp and discharges is avoided. The dimensions of the expanded metal electrode are smaller than a set value range, which is in the sub-millimeter level (<1mm), and a sub-millimeter level discharge region is formed between the insulating medium 3 and the modifying material 5. When the discharge voltage is reached, a glow discharge plasma is generated in the discharge region and effectively acts on the modifying material 5.
The high-voltage electrode 2 and the metal mesh electrode 4 are made of metal materials with good electrical conductivity, such as copper, aluminum or steel. The metal plate electrode 2 is generally made of a copper plate or an aluminum plate, so that good conductivity and certain mechanical strength are ensured, and the metal plate electrode can be kept in sealing contact with the insulating medium 3. Of course, other metals having similar properties may be used, such as tungsten, steel, and silver. The insulating medium 3 is made of a good dielectric insulating material, and a polytetrafluoroethylene film is selected in the embodiment, so that the insulating material has the advantages of high temperature resistance, corrosion resistance, good electrical insulating property and the like. The thickness of the insulating medium 3 employed in the present embodiment example is 0.1 mm. For the insulating medium 3, a plastic of polyterephthalic acid, quartz glass, ceramic or the like can also be used. The insulating medium 3 should be in sealing contact with the metal plate electrode 2 without leaving an area, which would otherwise affect the discharge process. The metal mesh electrode 4 is generally made of copper or zinc material, and ensures good conductivity, ductility and flexibility. For the metal mesh electrode 4, the metal mesh electrode is woven by metal wires 6, and the shape of the formed mesh 7 can be a square, a rectangle or a parallelogram; the shape for the wire may be cubic, cylindrical or elliptical cylindrical. It is important to ensure that the wire size is much smaller than the metal plate electrode 2, and that the wire size is in the sub-millimeter order. The spacing between the wires 6 can be adjusted according to actual needs. The wire 6 used in this embodiment example is cylindrical in shape and has a diameter of 0.03mm, and the mesh 7 formed by weaving is square in shape. The metal mesh electrode 4 should be in sealing contact with the insulating medium 3 and avoid sharp edges of the metal mesh electrode 4. The modifying material 5 may be a flexible material that can be deformed at will, or may be a material that has a certain thickness and cannot be deformed.
The high-voltage high-frequency power supply 1 is an alternating current power supply with adjustable voltage of 0 to 10 kilovolts and adjustable frequency of 0 to 50 kilohertz. When the voltage applied by the high-voltage high-frequency power supply 1 reaches the set discharge voltage, the set discharge voltage may be 1 kV. Plasma is generated in the discharge region between the modifying material 5 and the insulating medium 3, forming a plasma discharge region 8 and effectively acting on the material surface. Because the adopted insulating medium 3 is thin and the distance of the discharge area is small, glow discharge can be realized under the condition of low voltage, and the generation of filament discharge is effectively avoided.
Experiments prove that uniformly diffused glow discharge plasma can be formed in the whole discharge region, bright spots corresponding to filament discharge are avoided, the overall discharge intensity is not greatly different, and the modified material is effectively acted. In this case, the maximum instantaneous pulse current amplitude is only about 30mA, and falls within the range of glow discharge.
According to the glow plasma generating device provided by the invention, the modified material is directly contacted with the electrode to form a submillimeter-level discharge gap, so that the development degree of electron collapse is effectively inhibited, and the generation of filament discharge is inhibited. Meanwhile, the submillimeter-sized gap enables higher electric field intensity to be formed in a discharge region under lower voltage, so that the energy of active particles in the plasma can be improved, and the effect of the plasma on the surface modification of the material can be improved. Meanwhile, the mode of arranging the electrodes only on one side of the electrodes is adopted, so that the discharge between the electrodes is not limited by the thickness of materials, and the device is beneficial to wide application.
Example two:
fig. 3 is a schematic structural diagram of another glow plasma generating device for surface modification of a polymer material according to an embodiment of the present invention. As shown in fig. 3, this embodiment provides a device in which the metal plate electrode 2 described in the first embodiment is replaced by a metal roller electrode 9, and a pair of driven rollers 10 is added to form a set of modification device together with the metal roller electrode 9. The insulating medium 3 and the metal mesh electrode 4 are spread along the surface of the metal roll shaft electrode 9, and the metal roll shaft electrode 9 and the insulating medium 3, the insulating medium 3 and the metal mesh electrode 4, and the metal mesh electrode 4 and the modification material 5 are in sealing contact.
In this embodiment, the metal roller electrode 9 is made of copper, so as to ensure mechanical strength and good conductivity thereof, and in the actual processing process, the metal roller electrode 9 can rotate at a certain speed. The insulating medium 3 is made of a polytetrafluoroethylene film, the thickness of the insulating medium is 0.1mm, and the insulating medium has the advantages of high temperature resistance, corrosion resistance, good electrical insulation and the like. The metal mesh electrode 4 is made of copper material and has certain flexibility. The metal mesh electrode 4 is woven by metal wires 6, and the shape of the formed mesh 7 can be square, rectangular or parallelogram; for the shape of the wire 6 to be cubic, cylindrical or cylindroidal, it is important to ensure that the wire 6 is much smaller in size than the metal roller electrode 9, in the sub-millimeter order. The spacing between the wires 6 can be adjusted according to actual needs. The wire 6 used in this embodiment is cylindrical in shape, and the mesh 7 formed by weaving is square in shape. The metal mesh electrode 4 can be bent and spread along the metal roller electrode 9, is tightly attached to the insulating medium 3, and avoids the edge of the metal mesh electrode 4 from being sharp. The distance between the two driven roll shafts 10 can be adjusted according to the actual situation, so that the modified material 5 can spread and roll along the whole metal roll shaft electrode as much as possible, and useless power consumption is avoided. In a modification apparatus set comprising a pair of the driven roller 10 and the metal roller electrode 9, a plurality of modification apparatuses are arranged in a row in actual operation, and the modification material is repeatedly processed a plurality of times.
During the operation of the device, the modified material 5 can roll along with the rotation of the metal roll shaft electrode 9 and the driven roll shaft 10, and the sealed contact between the modified material 5 and the metal mesh electrode 4 is ensured at any time. When the applied voltage reaches the discharge voltage, plasma is generated in the discharge region between the modification material 5 and the insulating medium 3, and the modification material 5 is effectively modified.
Example three:
fig. 4 is a schematic structural diagram of another glow plasma generating device for surface modification of a polymer material according to an embodiment of the present invention. As shown in fig. 4, in the apparatus provided in this embodiment, a pair of metal roller electrodes 9 is provided, and a pair of driven rollers and a pair of metal roller electrodes form a set of reforming apparatus, so that double-sided processing of a reforming material can be realized. The insulating medium 3 and the metal mesh electrode 4 are spread along the surface of the metal roll shaft electrode 9, and the metal roll shaft electrode 9 and the insulating medium 3, the insulating medium 3 and the metal mesh electrode 4, and the metal mesh electrode 4 and the modification material 5 are in sealing contact. The rest of the structure of this embodiment is the same as that of the embodiment.
During the operation of the device, the modified material 5 can roll along with the rotation of the metal roll shaft electrode 9 and the driven roller 10, and the sealed contact between the modified material 5 and the metal mesh electrode 4 is ensured at any time. After the rolling treatment of the pair of metal roller electrodes 9, the double-sided treatment of the modification material 5 can be realized. By adjusting the distance between the driven roller 10 and the pair of metal rollers 9, the modifying material 5 can be spread on the surface of the metal roller electrode 9 to the maximum extent, and the rolling process can be performed as the metal roller electrode rolls. When the applied voltage reaches the discharge voltage, plasma is generated in the discharge region between the modification material 5 and the insulating medium 3, and the modification material 5 is effectively modified.
It should be understood by those skilled in the art that the above-mentioned types of structures of the metal plate electrode 2 and the metal roller electrode 9 are only examples, and other types of structures of the metal electrode 2 that may be present or may appear in the future, such as may be suitable for the embodiments of the present invention, should also be included in the scope of the present invention, and are hereby incorporated by reference.
In summary, in the embodiments of the present invention, the modification material is directly and hermetically contacted with the discharge electrode, and when the discharge voltage is reached, the vicinity of the contact position between the electrode and the modification material will discharge first and provide seed electrons for the vicinity. Further, plasma is generated in the micron-sized discharge region of the entire material and electrode configuration and effectively acts on the material surface. The discharge mode can form stronger electric field distribution in a discharge area under the condition of lower voltage, and is favorable for improving the energy of active particles in plasma, thereby improving the surface modification effect of the material.
According to the embodiment of the invention, while a dielectric barrier mode is adopted, discharge is limited in a gap at a sub-millimeter level, the generation of filiform discharge is effectively inhibited, and uniform glow discharge can be realized under the atmospheric pressure air condition. Compared with the traditional low-pressure glow discharge and atmospheric-pressure dielectric barrier discharge, the plasma discharge device has the advantages of uniform discharge, no need of vacuum equipment and gas cost and higher plasma activity. Meanwhile, the electrode is arranged on one side of the material, so that the limitation of the thickness of the material on discharge is broken through, the electrode can be popularized more widely in the related field, and the problem in the prior art is solved.
Those of ordinary skill in the art will understand that: the figures are merely schematic representations of one embodiment, and the blocks or flow diagrams in the figures are not necessarily required to practice the present invention.
Those of ordinary skill in the art will understand that: the components in the devices in the embodiments may be distributed in the devices in the embodiments according to the description of the embodiments, or may be correspondingly changed in one or more devices different from the embodiments. The components of the above embodiments may be combined into one component, or may be further divided into a plurality of sub-components.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for apparatus or system embodiments, since they are substantially similar to method embodiments, they are described in relative terms, as long as they are described in partial descriptions of method embodiments. The above-described embodiments of the apparatus and system are merely illustrative, and the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (3)

1. A glow plasma generating device for surface modification of a high polymer material, comprising: the high-frequency high-voltage power supply comprises a high-frequency high-voltage power supply, a high-voltage electrode, an insulating medium, a metal mesh electrode and a modified material;
the high-voltage electrode is connected with a high-voltage end of a high-voltage high-frequency power supply through a lead, the metal mesh electrode is connected with a ground end through a lead, the insulating medium is arranged between the high-voltage electrode and the metal mesh electrode, the modified material is placed on the surface of the metal mesh electrode, the high-voltage electrode is in sealed contact with the insulating medium, the insulating medium is in sealed contact with the metal mesh electrode, the metal mesh electrode is in sealed contact with the modified material, and a submillimeter-level discharge area is formed between the modified material and the insulating medium;
when the voltage applied by the high-voltage high-frequency power supply reaches a set discharge voltage, glow discharge plasma is generated in the discharge area and acts on the modified material to modify the surface of the modified material;
the high-voltage electrode is a metal flat plate or a metal roll shaft electrode; when the high-voltage electrode is a metal roll shaft electrode, a pair of metal roll shaft electrodes are arranged, a pair of driven roll shafts and the pair of metal roll shaft electrodes form a group of modification devices, double-sided modification processing of a modification material is achieved, the modification material is enabled to be spread on the surface of the metal roll shaft electrode to the maximum extent by adjusting the distance between the driven roll shafts and the metal roll shafts, and rolling processing is carried out along with rolling of the metal roll shaft electrodes;
the metal mesh electrode is formed by weaving metal wires, and the mesh shape formed is square, rectangular or parallelogram; the metal wire is in a cubic shape, a cylindrical shape or an elliptic cylindrical shape; the size of the metal wires is far smaller than that of the metal flat plate electrode, the size of the metal wires is in a sub-millimeter level, and the distance between every two metal wires is adjusted according to actual needs;
the size of the metal mesh electrode is smaller than a set numerical range, the numerical range is in a submillimeter level, and a submillimeter-level discharge area is formed between the insulating medium (3) and the modified material (5).
2. The device of claim 1, wherein the high voltage electrode and the metal mesh electrode are made of metal materials.
3. The apparatus of claim 1, wherein the insulating medium is made of a material selected from the group consisting of teflon, parylene, quartz glass, and ceramic.
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