CN109905954A - Surface discharge plasma device - Google Patents
Surface discharge plasma device Download PDFInfo
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- CN109905954A CN109905954A CN201910231912.2A CN201910231912A CN109905954A CN 109905954 A CN109905954 A CN 109905954A CN 201910231912 A CN201910231912 A CN 201910231912A CN 109905954 A CN109905954 A CN 109905954A
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Abstract
Disclose the surface discharge plasma device of combining medium material composition, it includes high-field electrode, ground electrode and combining medium layer, high-field electrode is slab construction, ground electrode is strip structure, and combining medium layer includes the alumina ceramic layer and polytetrafluoroethylene ethylene layer of stacking, wherein, the high-field electrode is close to alumina ceramic layer, the ground electrode is close to the polytetrafluoroethylene ethylene layer, and when high-field electrode is under the excitation of high voltage power supply, ground electrode generates the discharge plasma being distributed along its surface.
Description
Technical field
The present invention relates to technical field of plasma, the creeping discharge etc. constituted more particularly, to a kind of combining medium material
Ion body device.
Background technique
Surface dielectric barrier discharge can be generated under the conditions of atmospheric air large area, uniformly, stablize and close to room temperature
Plasma, obtained in terms of biomedicine, material surface modifying, environmental protection, industrial ozone at present extensive
Research and application.
At present surface dielectric barrier discharge face in application process dielectric material is easy to aging, discharge inception voltage is higher,
It generates heat the problems such as larger.Dielectric material also will affect the characteristic of surface dielectric barrier discharge plasma simultaneously.For example, with quartz
With ceramic phase ratio, polytetrafluoroethylene (PTFE) is more conducive to electric field line in the propagation on its surface as dielectric material, and polytetrafluoroethylene (PTFE)
Discharge inception voltage it is higher.Compared with organic glass, polytetrafluoroethylene (PTFE) generates the vibration temperature of plasma as dielectric material
Degree and electron temperature are higher.And for three kinds of polytetrafluoroethylene (PTFE), FR-4 epoxy glass fiber plate and aluminium oxide ceramics dielectric materials,
Under identical discharge power, the fever of FR-4 epoxy glass fiber plate is maximum, and the fever of aluminium oxide ceramics is minimum, electric discharge originates
Voltage is minimum.When surface dielectric barrier discharge handles human skin, if the plasma temperature generated, which is higher than 40 DEG C, to be made
Cell degradation and destruction；When temperature is higher than 45 DEG C, it will lead to protein denaturation, so that its structure be made to change, and then lead
It causes function to lose, causes thermal damage.And the temperature of plasma also will affect the type and concentration of active particle.Such as when from
Daughter when the temperature is excessively high, with the increase of discharge time, gas phase O3Concentration gradually decrease, and O3Have in terms of sterilization
There is important role.Therefore it in the application of surface dielectric barrier discharge, needs to avoid the temperature because of dielectric material excessively high, to life
Object tissue causes thermal damage.Simultaneously when using dielectric barrier discharge, since the fever of dielectric material leads to dielectric material aging,
And punch-through occurs, to generate spark discharge or arc discharge, electric injury is caused to biological tissue.Therefore control medium material
The fever of material helps to improve safety and the treatment effect of processing.
In conclusion for dielectric material is easy to aging, discharge inception voltage is higher in surface dielectric barrier discharge, fever compared with
The problems such as big, needs to select a kind of new material or the performance composition combining medium material in conjunction with different medium material, with drop
The fever of the discharge inception voltage and dielectric material of low surface dielectric barrier discharge, extends the service life of dielectric material, simultaneously
The active particle with biological medical effect is obtained, and then generates stronger biological effect.
Disclosed above- mentioned information are used only for enhancing the understanding to background of the present invention in the background section, it is thus possible to
Information comprising not constituting the prior art known to a person of ordinary skill in the art in home.
Summary of the invention
In view of the above problems, it is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind
The surface discharge plasma device that combining medium material is constituted.
The purpose of the present invention is be achieved by the following technical programs.
The surface discharge plasma device that a kind of combining medium material is constituted includes,
High-field electrode is slab construction,
Ground electrode is strip structure,
Combining medium layer comprising the alumina ceramic layer and polytetrafluoroethylene ethylene layer of stacking, wherein the high-field electrode is tight
Alumina ceramic layer is pasted, the ground electrode is close to the polytetrafluoroethylene ethylene layer, when high-field electrode is under the excitation of high voltage power supply,
Ground electrode generates the discharge plasma being distributed along its surface.
In the surface discharge plasma device that the combining medium material is constituted, the polytetrafluoroethylene ethylene layer is plated on institute
It states on alumina ceramic layer.
In the surface discharge plasma device that the combining medium material is constituted, the thickness of the alumina ceramic layer
For 0.5-3mm, polytetrafluoroethylene ethylene layer is with a thickness of 10-1000 μm.
In the surface discharge plasma device that the combining medium material is constituted, the ground electrode is reticular structure.
In the surface discharge plasma device that the combining medium material is constituted, the reticular structure is by positive triangle
Shape, square, regular hexagon or circular arrangement are formed.
In the surface discharge plasma device that the combining medium material is constituted, the polytetrafluoroethylene ethylene layer is coated on
On alumina ceramic layer.
In the surface discharge plasma device that the combining medium material is constituted, the alumina ceramic layer is replaced with
Glassy layer or quartz layer, polytetrafluoroethylene ethylene layer replace with polystyrene layer.
In the surface discharge plasma device that the combining medium material is constituted, the combining medium layer size difference
Greater than the size of high-field electrode and ground electrode, the size of high-field electrode is less than the size of ground electrode.
In the surface discharge plasma device that the combining medium material is constituted, the high-field electrode and ground electrode by
Copper, iron or stainless steel are made.
In the surface discharge plasma device that the combining medium material is constituted, the high-field electrode connects high-voltage electricity
Source, high voltage power supply include sinusoidal high pressure and pulsed high voltage generator, and the frequency of the sine high voltage power supply is 50Hz~100MHz, electricity
For pressure amplitude value between 1kV~20kV, the frequency of the pulsed high voltage generator is lower than 100kHz.
Compared with prior art, the beneficial effects of the present invention are:
The surface discharge plasma device that combining medium material of the present invention is constituted is by being close to high-field electrode and ground electrode
Combining medium layer reduce device discharge inception voltage, especially aluminium oxide ceramics discharge voltage it is lower, using aluminium oxide
Ceramics plating polytetrafluoroethylene (PTFE) can be substantially reduced discharge inception voltage, to reduce the requirement to power supply excitation and fill to electric discharge
The damage set is conducive to the safety for improving device, it is suppressed that the fever of dielectric material.Polytetrafluoroethylene (PTFE) and aluminium oxide ceramics
It generates heat all lower, constitutes combining medium material using both dielectric materials, the fever of dielectric material can be further suppressed, had
Conducive to the active particle in the stabilization for keeping electric discharge and accurate control plasma, and extend the service life of device, so that dress
Set the application field for being more applicable for heat sensitivity.Improve sterilizing efficiency.Polytetrafluoroethylene (PTFE) and ground electricity in combining medium material
Pole is affixed, and improves the uniformity of large area plasma, and changes the type and concentration of active particle in plasma,
So that sterilizing efficiency increases substantially.
The above description is only an overview of the technical scheme of the present invention, in order to make technological means of the invention clearer
Understand, reach the degree that those skilled in the art can be implemented in accordance with the contents of the specification, and in order to allow the present invention
Above and other objects, features and advantages can be more clearly understood, illustrated below with a specific embodiment of the invention
Explanation.
Detailed description of the invention
By reading the detailed description in hereafter preferred embodiment, various other advantages and benefits of the present invention
It will become apparent to those of ordinary skill in the art.Figure of description only for the purpose of illustrating preferred embodiments,
And it is not to be construed as limiting the invention.It should be evident that drawings discussed below is only some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.And throughout the drawings, identical component is presented with like reference characters.
In the accompanying drawings:
Fig. 1 is the knot for the surface discharge plasma device that combining medium material according to an embodiment of the invention is constituted
Structure schematic diagram.
Below in conjunction with drawings and examples, the present invention will be further explained.
Specific embodiment
The specific embodiment that the present invention will be described in more detail below with reference to accompanying drawings.Although being shown in attached drawing of the invention
Specific embodiment, it being understood, however, that may be realized in various forms the present invention without that should be limited by embodiments set forth here
System.It is to be able to thoroughly understand the present invention on the contrary, providing these embodiments, and can be complete by the scope of the present invention
Be communicated to those skilled in the art.
It should be noted that having used some vocabulary in the specification and claims to censure specific components.Ability
Field technique personnel it would be appreciated that, technical staff may call the same component with different nouns.This specification and right
It is required that not in such a way that the difference of noun is as component is distinguished, but with the difference of component functionally as differentiation
Criterion."comprising" or " comprising " as mentioned throughout the specification and claims are an open language, therefore should be solved
It is interpreted into " including but not limited to ".Specification subsequent descriptions are to implement better embodiment of the invention, so the description be with
For the purpose of the rule of specification, the range that is not intended to limit the invention.Protection scope of the present invention is when the appended right of view
It is required that subject to institute's defender.
In order to facilitate understanding of embodiments of the present invention, further by taking specific embodiment as an example below in conjunction with attached drawing to be solved
Explanation is released, and each attached drawing does not constitute the restriction to the embodiment of the present invention.
In order to better understand, Fig. 1 is the creeping discharge that combining medium material according to an embodiment of the invention is constituted
The structural schematic diagram of plasma device, the surface discharge plasma device that a kind of combining medium material is constituted include,
The surface discharge plasma device that a kind of combining medium material is constituted includes,
High-field electrode 101 is slab construction,
Ground electrode 102 is strip structure,
Combining medium layer comprising the alumina ceramic layer and polytetrafluoroethylene ethylene layer 104 of stacking, wherein the high-voltage electricity
Alumina ceramic layer 103 is close in pole 101, and the ground electrode 102 is close to the polytetrafluoroethylene ethylene layer 104, when high-field electrode 101 exists
When under the excitation of high voltage power supply, ground electrode 102 generates the discharge plasma being distributed along its surface.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the polytetrafluoro
Pvdf layer 104 is plated on the alumina ceramic layer 103.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the aluminium oxide
Ceramic layer 103 with a thickness of 0.5-3mm, polytetrafluoroethylene ethylene layer 104 is with a thickness of 10-1000 μm.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the ground electrode
102 be reticular structure.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the netted knot
Structure is formed by equilateral triangle, square, regular hexagon or circular arrangement.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the polytetrafluoro
Pvdf layer 104 is coated on alumina ceramic layer 103.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the aluminium oxide
Ceramic layer 103 replaces with glassy layer or quartz layer, and polytetrafluoroethylene ethylene layer 104 replaces with polystyrene layer.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the combination is situated between
Matter layer size is respectively greater than the size of high-field electrode 101 and ground electrode 102, and the size of high-field electrode 101 is less than ground electrode 102
Size.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the high-voltage electricity
Pole 101 and ground electrode 102 are made of copper, iron or stainless steel.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, the high-voltage electricity
Pole 101 connects high voltage power supply, and high voltage power supply includes sinusoidal high pressure and pulsed high voltage generator, and the frequency of the sine high voltage power supply is
50Hz~100MHz, for voltage magnitude between 1kV~20kV, the frequency of the pulsed high voltage generator is lower than 100kHz.
In the one embodiment for the surface discharge plasma device that the combining medium material is constituted, high-field electrode
101 connection high-voltage power cathodes, ground electrode 102 connect 101 cathode of high-field electrode, in addition after high tension voltage, in ground electrode 102 1
Side can generate the surface discharge plasma of large area.
In one embodiment, device plates polytetrafluoroethylene (PTFE) as combining medium material using the side of aluminium oxide ceramics
Surface discharge plasma source is constituted, high-field electrode 101 is tightly attached to aluminium oxide ceramics and does not plate polytetrafluoroethylene (PTFE) side, ground electrode
102 are close to the side of aluminium oxide ceramics plating polytetrafluoroethylene ethylene layer.Under the excitation of high voltage power supply, 102 side of ground electrode can be generated
The surface discharge plasma of large area.
The combining medium material reduces device discharge inception voltage, it is suppressed that the fever of dielectric material improves big face
The uniformity of product plasma, and the chemical characteristic for changing plasma increases substantially sterilizing efficiency, thus more
Add the application field for being suitable for the heat sensitivitys such as biomedicine, material surface processing, environmental protection.
In one embodiment, pulsed high-voltage source forcing can be used, the fever of dielectric material can be further decreased,
Improve the stability and safety of device.
In one embodiment, apply high pressure in high-field electrode 101 and ground electrode 102；When ground electrode 102 uses density more
When big grid, plasma more evenly can be generated.
In one embodiment, the high-field electrode 101 and ground electrode 102 are by copper, iron, stainless steel or other conductive metals
It is made.
In more specific one embodiment, the choosing of high-field electrode 101 is made of copper, and ground electrode 102 selects stainless steel
It is made.
Aluminium oxide ceramics in the combining medium material can change other inorganic material such as glass into；Polytetrafluoroethylene (PTFE) can
To change other organic materials such as polystyrene into.
The thickness of alumina ceramic plate is between 0.5-3mm in the combining medium material, plated polytetrafluoroethylene (PTFE)
Thickness is between 10-1000 μm.In practical applications, the dielectric material group of different-thickness can be used according to actual needs
It closes.
In the present embodiment, the thickness of aluminium oxide ceramics uses 1mm, and the thickness of polytetrafluoroethylene (PTFE) uses 10 μm.
In one embodiment, described device can generate plasma under atmospheric pressure or hypobaric environmental condition
Body.
In one embodiment, device includes: high-field electrode 101, ground electrode 102 and combining medium material.The combination
Dielectric material is to plate polytetrafluoroethylene (PTFE) by the side in aluminium oxide ceramics to be constituted.
The high-field electrode 101 and ground electrode 102 are tightly attached to the two sides of combining medium material, and wherein high-field electrode 101 is adopted
With slab construction, it is tightly attached to aluminium oxide ceramics and does not plate polytetrafluoroethylene (PTFE) side；Ground electrode 102 uses strip or reticular structure, tightly
It is attached to aluminium oxide ceramics plating polytetrafluoroethylene (PTFE) side.
Device of the present invention is constituted as combining medium material using aluminium oxide ceramics plating polytetrafluoroethylene (PTFE) and is put along face
Electro-plasma device.Polytetrafluoroethylene (PTFE) side is affixed with ground electrode 102, and the active particle type generated in plasma is more, counts
Amount is big, especially contains Nitrogen active species；And inducing the plasma-activated water of generation has very strong sterilization effect.Same fashionable dress
The discharge voltage and fever set are lower, improve the stability and safety of device, to be more applicable for biomedical, material
The application fields such as surface treatment, environmental protection.
Industrial applicibility
The surface discharge plasma device that combining medium material of the present invention is constituted can be in plasma field
It manufactures and uses.
The basic principle of the application is described in conjunction with specific embodiments above, however, it is desirable to, it is noted that in this application
The advantages of referring to, advantage, effect etc. are only exemplary rather than limitation, must not believe that these advantages, advantage, effect etc. are the application
Each embodiment is prerequisite.In addition, detail disclosed above is merely to exemplary effect and the work being easy to understand
With, rather than limit, it is that must be realized using above-mentioned concrete details that above-mentioned details, which is not intended to limit the application,.
In order to which purpose of illustration and description has been presented for above description.In addition, this description is not intended to the reality of the application
It applies example and is restricted to form disclosed herein.Although already discussed above multiple exemplary aspects and embodiment, this field skill
Its certain modifications, modification, change, addition and sub-portfolio will be recognized in art personnel.
Claims (10)
1. the surface discharge plasma device that a kind of combining medium material is constituted comprising,
High-field electrode is slab construction,
Ground electrode is strip structure,
Combining medium layer comprising the alumina ceramic layer and polytetrafluoroethylene ethylene layer of stacking, wherein the high-field electrode is close to oxygen
Change aluminium ceramic layer, the ground electrode is close to the polytetrafluoroethylene ethylene layer, when high-field electrode is under the excitation of high voltage power supply, ground electricity
Pole generates the discharge plasma being distributed along its surface.
2. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that preferably
, the polytetrafluoroethylene ethylene layer is plated on the alumina ceramic layer.
3. the surface discharge plasma device that combining medium material as claimed in claim 2 is constituted, which is characterized in that described
Alumina ceramic layer with a thickness of 0.5-3mm, polytetrafluoroethylene ethylene layer is with a thickness of 10-1000 μm.
4. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that described
Ground electrode is reticular structure.
5. the surface discharge plasma device that combining medium material as claimed in claim 4 is constituted, which is characterized in that described
Reticular structure is formed by equilateral triangle, square, regular hexagon or circular arrangement.
6. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that described
Polytetrafluoroethylene ethylene layer is coated on alumina ceramic layer.
7. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that described
Alumina ceramic layer replaces with glassy layer or quartz layer, and polytetrafluoroethylene ethylene layer replaces with polystyrene layer.
8. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that described
Combining medium layer size is respectively greater than the size of high-field electrode and ground electrode, and the size of high-field electrode is less than the size of ground electrode.
9. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that described
High-field electrode and ground electrode are made of copper, iron or stainless steel.
10. the surface discharge plasma device that combining medium material as described in claim 1 is constituted, which is characterized in that institute
High-field electrode connection high voltage power supply is stated, high voltage power supply includes sinusoidal high pressure and pulsed high voltage generator, the sine high voltage power supply
Frequency is 50Hz~100MHz, and for voltage magnitude between 1kV~20kV, the frequency of the pulsed high voltage generator is lower than 100kHz.
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| CN110461080A (en) * | 2019-08-08 | 2019-11-15 | 北京工商大学 | A kind of low temperature plasma generating device and its method for preparing activated water |
| CN110495401A (en) * | 2019-09-27 | 2019-11-26 | 武汉海思普莱生命科技有限公司 | A kind of plasma discharge configuration for pet hair nursing |
| CN111248393A (en) * | 2020-02-27 | 2020-06-09 | 西安交通大学 | Fluid food synergistic sterilization device and method |
| CN111328955A (en) * | 2020-02-27 | 2020-06-26 | 西安交通大学 | Food sterilization device and method based on surface dielectric barrier discharge plasma |
| CN111417247A (en) * | 2020-03-23 | 2020-07-14 | 西安交通大学 | Contact intelligent plasma surface discharge device |
| CN111432543A (en) * | 2020-03-23 | 2020-07-17 | 河北大学 | Device and method for generating large-area stable controllable plasma |
| CN111836447A (en) * | 2020-08-12 | 2020-10-27 | 西安交通大学 | Method for constructing low-pressure plasma creeping discharge device, simulation method and device |
| CN113473688A (en) * | 2021-06-28 | 2021-10-01 | 西安交通大学 | Discharge device for generating large-area plasma in atmospheric air |
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| CN110461080A (en) * | 2019-08-08 | 2019-11-15 | 北京工商大学 | A kind of low temperature plasma generating device and its method for preparing activated water |
| CN110495401A (en) * | 2019-09-27 | 2019-11-26 | 武汉海思普莱生命科技有限公司 | A kind of plasma discharge configuration for pet hair nursing |
| CN111248393A (en) * | 2020-02-27 | 2020-06-09 | 西安交通大学 | Fluid food synergistic sterilization device and method |
| CN111328955A (en) * | 2020-02-27 | 2020-06-26 | 西安交通大学 | Food sterilization device and method based on surface dielectric barrier discharge plasma |
| CN111328955B (en) * | 2020-02-27 | 2023-05-26 | 西安交通大学 | Food sterilization device and method based on surface dielectric barrier discharge plasma |
| CN111417247A (en) * | 2020-03-23 | 2020-07-14 | 西安交通大学 | Contact intelligent plasma surface discharge device |
| CN111432543A (en) * | 2020-03-23 | 2020-07-17 | 河北大学 | Device and method for generating large-area stable controllable plasma |
| CN111836447A (en) * | 2020-08-12 | 2020-10-27 | 西安交通大学 | Method for constructing low-pressure plasma creeping discharge device, simulation method and device |
| CN113473688A (en) * | 2021-06-28 | 2021-10-01 | 西安交通大学 | Discharge device for generating large-area plasma in atmospheric air |
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