CN111455322A

CN111455322A - Crucible device and vapor deposition device

Info

Publication number: CN111455322A
Application number: CN202010388897.5A
Authority: CN
Inventors: 伍丰伟
Original assignee: TCL Huaxing Photoelectric Technology Co Ltd
Current assignee: TCL Huaxing Photoelectric Technology Co Ltd
Priority date: 2020-05-09
Filing date: 2020-05-09
Publication date: 2020-07-28
Anticipated expiration: 2040-05-09
Also published as: CN111455322B

Abstract

The invention provides a crucible device and a vapor deposition device, wherein the crucible device is used for evaporating aluminum-plated material, and comprises: the outer crucible is provided with an outer cavity, and the surface of the outer cavity is covered with a heat reflection coating; the inner-layer crucible is provided with a main body part which is nested in an outer-layer cavity of the outer-layer crucible. On one hand, the heat reflection coating is arranged on the inner wall of the outer crucible, so that the evaporation material in the crucible device can maintain stable evaporation rate, and the evaporation rate is effectively improved; on the other hand, the grooves are arranged above the inner layer crucible, and each groove is provided with an overflow hole and can be used for dredging overflow liquid to the outer layer crucible, so that the risk that the liquid is emitted from the upper surface of the crucible device to damage the crucible device is reduced.

Description

Crucible device and vapor deposition device

Technical Field

The application relates to the technical field of display, especially, relate to a crucible device, coating by vaporization device.

Background

The O L ED (Organic L light-Emitting Diode, abbreviated as O L ED) display screen has been classified as the next generation display technology with great development prospect because of its advantages of thin, light, wide viewing angle, active light emission, continuously adjustable light color, low cost, fast response speed, low energy consumption, low driving voltage, wide working temperature range, simple production process, high luminous efficiency and flexible display.

At present, the main method for manufacturing an O L ED device is heating evaporation coating, which is to heat an evaporation material by using a heating container under a certain vacuum condition, so that the evaporation material is melted (or sublimated) into vapor composed of atoms, molecules or atomic groups, and then deposited on a substrate having a TFT (Thin Film Transistor) structure or an anode structure, thereby forming a functional layer of the O L ED device.

The bottom structure of an O L ED light-emitting device is generally made of a metal aluminum material by evaporation, while an existing evaporator is used for evaporating an aluminum crucible, the inner layer of the crucible is generally made of a ceramic material (silicon nitride), the outer layer of the crucible is sleeved with a layer of heat insulation device (heat insulation material), the temperature of the aluminum crucible is increased and decreased for 1 time, and the crucible is at risk of cracking when the temperature is increased again.

Disclosure of Invention

The invention aims to provide a crucible device and a vapor deposition device, which aim to solve the technical problem that a crucible is easy to expand by heat and deform in the process of depositing metal aluminum, so that the crucible is cracked.

To achieve the above object, the present invention provides a crucible apparatus for evaporating a metallic aluminum material, the crucible apparatus comprising:

the outer crucible is provided with an outer cavity, and the surface of the outer cavity is covered with a heat reflection coating; the inner-layer crucible is provided with a main body part which is nested in an outer-layer cavity of the outer-layer crucible.

Furthermore, the materials used by the outer crucible and the inner crucible are both heat-insulating high-temperature-resistant ceramic materials.

Further, the heat-insulating high-temperature-resistant ceramic material is at least one of aluminum oxide, silicon nitride and boron nitride.

Further, the outer layer crucible is made of boron nitride, and the inner layer crucible is made of silicon nitride; or the outer layer crucible is made of silicon nitride, and the inner layer crucible is made of boron nitride.

Further, the inner crucible further comprises an upper body part, the upper body part is provided with a middle area and an edge area surrounding the middle area, the main body part is connected to the middle area of the upper body part, and the edge area of the upper body part is lapped on the outer crucible; the main body part is provided with an inner layer cavity, the upper body part is provided with a plurality of grooves, overflow holes are formed in the grooves, and the overflow holes are communicated with the inner layer cavity.

Further, the number of the grooves is 2-5; the number of the overflow holes is 3-6; the aperture of the overflow hole is 1-3 mm.

Further, the heat reflecting coating has a thickness of

The material used for the heat reflecting coating is titanium dioxide.

Further, the crucible apparatus further comprises:

the bracket comprises a base body and a bracket body vertically connected with the edge of the base body; the support base is arranged on the seat body, and the outer-layer crucible is fixed on the support base; the ceramic supporting seat is arranged on the seat body and surrounds the supporting base; and the induction coil is arranged on one surface of the ceramic supporting seat facing the outer crucible.

Further, the crucible apparatus further comprises:

and the anti-plating shielding plate is arranged at the top of the frame body and connected to the outer wall of the inner-layer crucible from the top surface of the frame body.

In order to achieve the above object, the present invention further provides an evaporation apparatus, comprising an evaporation chamber and the crucible apparatus described above; wherein, the crucible device is arranged in the evaporation chamber.

The crucible device and the evaporation device have the technical effects that on one hand, the heat reflection coating is arranged on the inner wall of the outer crucible, so that the evaporation material in the crucible device can maintain stable evaporation rate, and the evaporation rate is effectively improved; on the other hand, the grooves are arranged above the inner layer crucible, and each groove is provided with an overflow hole and can be used for dredging overflow liquid to the outer layer crucible, so that the risk that the liquid is emitted from the upper surface of the crucible device to damage the crucible device is reduced.

Drawings

The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of the crucible device provided in the embodiments of the present application.

FIG. 2 is a plan view of the inner crucible provided in the examples of the present application.

FIG. 3 is a schematic structural view of the inner crucible provided in the embodiments of the present application.

FIG. 4 is a schematic three-dimensional structure of an upper body of the inner crucible according to an embodiment of the present application.

Fig. 5 is a schematic structural diagram of the evaporation apparatus according to an embodiment of the present application.

The components of the drawings are identified as follows:

100 crucible devices; 11 an outer crucible;

12 an inner crucible; 13 a heat reflective coating;

14, a bracket; 15 supporting a base;

16 ceramic support seats; 17 an induction coil;

18 a plating-resistant shield;

111 outer cavity; 121 a main body portion;

122 an upper body portion; 1221 a middle region;

1222 edge region; 1211 inner cavity;

1200 grooves; 1201 overflow aperture;

12001 a first recess; 12002 second groove;

141 seat body; 142 a frame body;

1000 vapor deposition device;

200 vapor deposition chambers; 300 baffle plates;

400 an anti-tampering device; 500 mask plates;

600 a substrate; 700 cold plate;

800 a permanent magnet; 401 open area.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

As shown in FIG. 1, the present embodiment provides a crucible apparatus 100 for evaporating a metallic aluminum material, the crucible apparatus 100 comprising an outer crucible 11, an inner crucible 12, a heat reflective coating 13, a support 14, a support base 15, a ceramic support base 16, an induction coil 17 and a plating-prevention shield 18.

The outer crucible 11 has an outer cavity 111, the surface of which is coated with a heat reflective coating 13. Wherein, the outer crucible 11 is made of heat-insulating high-temperature-resistant ceramic material. The thickness of the heat reflective coating 13 is

The material used is titanium dioxide. Adopt the spraying mode to carry out spray coating to the lateral wall and the diapire of outer crucible 11, form heat reflection coating 13, heat reflection coating 13 is used for reflecting crucible device 100's bottom heat to crucible device 100 all around, makes crucible device 100 keep at invariable temperature, and then makes the evaporation coating material in crucible device 100 maintain stable evaporation rate, and effectual improvement evaporation coating rate, realized high-speed evaporation coating promptly, when having reduced manufacturing cost, the homogeneity of product has still been guaranteed.

The inner crucible 12 includes a body 121 and an upper body 122. The body 121 is fitted in the outer cavity 111 of the outer crucible 11. The inner crucible 12 is made of heat-insulating high-temperature-resistant ceramic materials.

In this embodiment, the heat-insulating and high-temperature-resistant ceramic material is at least one of aluminum oxide, silicon nitride, and boron nitride. Specifically, when the material used for the outer crucible 11 is boron nitride, the material used for the inner crucible 12 is silicon nitride; or when the material used for the outer crucible 11 is silicon nitride, the material used for the inner crucible 12 is boron nitride.

As shown in fig. 2 to 4, the upper body 122 is provided with a middle region 1221 and an edge region 1222 surrounding the middle region 1221, the main body 121 is connected to the middle region 1221 of the upper body 122, and the edge region 1222 of the upper body 122 overlaps the outer crucible 11. The main body 121 has an inner cavity 1211, the upper body 122 has a plurality of grooves 1200, the grooves 1200 are arranged at equal intervals, a plurality of overflow holes 1201 are arranged at equal intervals in the grooves 1200, and the overflow holes 1201 are communicated with the inner cavity 1211. The overflow holes 1201 penetrate the upper body 122, and when the liquid in the inner cavity 1211 reaches the position of the overflow holes 1201, the liquid flows out from the inner cavity 1211 to the groove 1200 through the overflow holes 1201 and flows out to the outer crucible 11 along the groove 1200. In this embodiment, the number of the grooves 1200 is 2 to 6, the grooves 1200 include first grooves 12001 and second grooves 12002, and the first grooves 12001 and the second grooves 12002 are disposed in a staggered manner from top to bottom, as shown in fig. 4. Each groove 1200 has 3-6 overflow holes 1201; the aperture of the overflow hole 1201 is 1-3 mm. During the evaporation process, when the liquid level of the inner crucible 12 is too high, the liquid can flow to the outer crucible 11 through the overflow hole 1201, so as to dredge the overflow liquid to the outer crucible 11, and prevent the liquid from suddenly boiling and overflowing from the surface of the inner crucible 12 to cause the instantaneous rupture of the crucible device 100. In particular, in the process of evaporating the metal material aluminum, since aluminum (Al) has a thermal expansion coefficient about 8.2 times that of the crucible apparatus 100 due to a difference in thermal expansion deformation amount from the crucible apparatus 100, the risk of damaging the crucible apparatus 100 by liquid emerging from the upper surface of the crucible apparatus 100 can be reduced by providing the recess 1200 above the inner layer crucible 12. In this embodiment, the number of the overflow holes 1201 is preferably 3, 4, or 5, and the aperture of the overflow holes 1201 is preferably 1.5mm, 2.2mm, 2.3mm, or 2.5 mm.

As shown in fig. 1, the stand 14 includes a housing 141 and a frame body 142 vertically connected to an edge of the housing 141. The support base 15 is provided on the holder body 141, and the outer crucible 11 is fixed to the support base 15. A ceramic support base 16 is provided on the housing and surrounds the support base 15. The induction coil 17 is provided on a surface of the ceramic susceptor 16 facing the outer crucible 11. In the process of evaporation, strong magnetic beams with polarity changing instantly are generated in the induction coil 17, and metal needing heat treatment is placed in the high-frequency coil, so that the magnetic beams penetrate through the whole heated metal material aluminum. The inside of the induction heating object is opposite to the direction of the induction heating current, corresponding strong eddy current is generated, and simultaneously, because the resistance exists in the metal material for induction heating, strong joule heat energy is generated, so that the temperature of the induction heating object is rapidly increased, the aim of heat treatment is fulfilled, and the heating of the metal material aluminum is realized. The plating-prevention shield 18 is provided on the top of the support 14, and is connected to the outer wall of the inner crucible 12 from the top surface of the support 14. The plating prevention shutter 18 prevents the evaporated material from falling onto the upper surface of the inner crucible 12 and damaging the crucible apparatus 100.

As shown in fig. 5, the present embodiment further provides an evaporation apparatus 1000, which includes the crucible apparatus 100, the evaporation chamber 200, the baffle 300, the anti-sticking device 400, the mask 500, the substrate 600, the cold plate 700, and the permanent magnet 800 as described above. The crucible apparatus 100, the baffle 300, the anti-sticking apparatus 400, the mask 500, the substrate 600, the cold plate 700, and the permanent magnet 800 are disposed in the evaporation chamber 200. A plurality of crucible apparatuses 100 are provided in one evaporation chamber 200.

The baffle 300 is disposed in the evaporation chamber 200 and close to the crucible apparatus 100. The baffle 300 is equivalent to the switch of the crucible apparatus 100, and when the crucible apparatus 100 finishes the evaporation process, the upper end of the baffle 300 covers the upper surface of the crucible apparatus 100; when the crucible apparatus 100 is in the evaporation process, the upper end of the baffle 300 is moved away from the upper surface of the crucible apparatus 100, so that the evaporation material in the crucible apparatus 100 is prevented from being gasified and solidified at the opening of the crucible apparatus 100, thereby preventing the blocking phenomenon.

The anti-sticking device 400 has an opening area 401, and a mask 500, a substrate 600, a cold plate 700 and a permanent magnet 800 are sequentially disposed above the opening area 401. During the evaporation, the evaporated material comes out of the crucible apparatus 100 and passes through the opening region 401 and the mask 500, so that the lower surface of the substrate 600 is coated with a film and a pattern of the mask 500 is formed. The anti-splashing device 400 is used to prevent the evaporation chamber 200 from being inconvenient to clean due to splashing of the material in the evaporation process and facilitate recycling of the material. The cold plate 700 is disposed on the upper surface of the substrate 600 for performing a cooling process on the substrate 600 to prevent the substrate 600 from being damaged by heat. The permanent magnet 800 is disposed on the upper surface of the cold plate 700, so that the substrate 600 and the mask 500 are tightly attached to prevent poor patterns from being formed subsequently. The evaporation apparatus 1000 includes other components besides the above components, which are not described in detail herein.

The above description of the embodiments has all emphasis, and reference may be made to related descriptions of other embodiments for parts of a certain embodiment that are not described in detail.

The crucible device and the evaporation device provided by the embodiments of the present application are described in detail above, and the principle and the implementation of the present application are explained in the present application by applying specific examples, and the description of the above embodiments is only used to help understanding the technical scheme and the core concept of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims

1. A crucible apparatus for evaporating a metallic aluminum material, comprising:

the outer crucible is provided with an outer cavity, and the surface of the outer cavity is covered with a heat reflection coating;

the inner-layer crucible is provided with a main body part which is nested in an outer-layer cavity of the outer-layer crucible.

2. The crucible apparatus of claim 1,

the outer crucible and the inner crucible are made of heat-insulating high-temperature-resistant ceramic materials.

3. The crucible apparatus of claim 2, wherein the thermally insulating, high temperature resistant ceramic material is at least one of alumina, silicon nitride, boron nitride.

4. The crucible apparatus as recited in claim 3, wherein the material used for the outer crucible is boron nitride and the material used for the inner crucible is silicon nitride; or the outer layer crucible is made of silicon nitride, and the inner layer crucible is made of boron nitride.

5. The crucible apparatus of claim 3, wherein the inner crucible further comprises an upper body, the upper body being provided with a middle region and a peripheral region surrounding the middle region, the main body being connected to the middle region of the upper body, the peripheral region of the upper body overlapping the outer crucible;

the main body part is provided with an inner layer cavity, the upper body part is provided with a plurality of grooves, overflow holes are formed in the grooves, and the overflow holes are communicated with the inner layer cavity.

6. The crucible apparatus of claim 5,

the number of the grooves is 2-5;

the number of the overflow holes is 3-6;

the aperture of the overflow hole is 1-3 mm.

7. The crucible apparatus of claim 1,

the material used by the heat reflecting coating is titanium dioxide, and the thickness of the heat reflecting coating is

8. The crucible apparatus of claim 1, further comprising: the bracket comprises a base body and a bracket body vertically connected with the edge of the base body;

the support base is arranged on the seat body, and the outer-layer crucible is fixed on the support base;

the ceramic supporting seat is arranged on the seat body and surrounds the supporting base;

and the induction coil is arranged on one surface of the ceramic supporting seat facing the outer crucible.

9. The crucible apparatus of claim 8, further comprising:

10. An evaporation apparatus comprising an evaporation chamber and the crucible apparatus according to any one of claims 1 to 9; wherein, the crucible device is arranged in the evaporation chamber.