CN109468596A - A kind of vapor deposition crucible and evaporation coating device - Google Patents
A kind of vapor deposition crucible and evaporation coating device Download PDFInfo
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- CN109468596A CN109468596A CN201910013481.2A CN201910013481A CN109468596A CN 109468596 A CN109468596 A CN 109468596A CN 201910013481 A CN201910013481 A CN 201910013481A CN 109468596 A CN109468596 A CN 109468596A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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Abstract
The present invention relates to evaporation coating technique field more particularly to a kind of vapor deposition crucibles and evaporation coating device.It is low to the high two sides temperature of crucible middle portion temperature during solving vapor deposition, and make the evaporation rate of intermediate noxzzle big, the evaporation rate of two side nozzles is small to lead to that non-uniform problem is deposited.A kind of vapor deposition crucible, including Crucible body, and the lid being arranged in Crucible body, lid are equipped with the multiple nozzles equidistantly arranged along a straight line；Baffle is equipped in Crucible body, baffle is horizontally disposed and is detachably connected with Crucible body；The identical steam channel of structure is provided between baffle and each nozzle, the lower port of each steam channel and the upper surface of baffle connect；The region overlapped mutually on baffle with the lower port of each steam channel is equipped with multiple steam overfolw holes, in the orientation of multiple nozzles, from intermediate nozzle to the nozzle of two sides, respectively the corresponding steam overfolw hole being connected to is gradually increased in the gross area of the projection of vertical direction.
Description
Technical field
The present invention relates to evaporation coating technique field more particularly to a kind of vapor deposition crucibles and evaporation coating device.
Background technique
Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) be make under electric field action it is organic
The device of material emission, in production, metal electrode and organic light emission material is formed on the substrate in the mode for generalling use vapor deposition
Material.
Summary of the invention
The embodiment of the present invention provides a kind of vapor deposition crucible and evaporation coating device, to solve during vapor deposition temperature in the middle part of crucible
It is low to spend high two sides temperature, and makes the evaporation rate of intermediate noxzzle big, the evaporation rate of two side nozzles is small to cause vapor deposition uneven
The problem of.
In order to achieve the above objectives, the embodiment of the present invention adopts the following technical scheme that
In a first aspect, providing a kind of vapor deposition crucible, including Crucible body, and the lid being arranged in the Crucible body
Body, the lid are equipped with multiple nozzles, and multiple nozzles equidistantly arrange along a straight line；Gear is equipped in the Crucible body
Plate, the baffle is horizontally disposed, and space in the Crucible body is divided into two spaces up and down, the baffle and the earthenware
Crucible main body is detachably connected；The identical steam channel of structure is provided between the baffle and each nozzle, each
The baffle and each nozzle is arranged at the face position of vertical direction in the steam channel, and passes through upper end respectively
Mouth connection corresponding with the nozzle, is connect by lower port with the upper surface of the baffle；It is on the baffle and each described
The region that the lower port of steam channel overlaps mutually is equipped with multiple steam overfolw holes, in the orientation of multiple nozzles,
From intermediate nozzle to the nozzle of two sides, the gross area of the projection of the respective corresponding steam overfolw hole being connected in the vertical direction
It is gradually increased.
Optionally, in the region that the lower port of each steam channel and the baffle overlap mutually, each steam
Overfolw hole is all the same in the projected area of vertical direction, in the orientation of multiple nozzles, from intermediate nozzle to two
The nozzle of side, respectively the number of the corresponding steam overfolw hole being connected to is gradually increased；Alternatively, under each steam channel
The number in the region that port and the baffle overlap mutually, the steam overfolw hole is all the same, in the arrangement side of multiple nozzles
Upwards, from intermediate nozzle to the nozzle of two sides, the perspective plane of the respective corresponding steam overfolw hole being connected in the vertical direction
Product is gradually increased.
Optionally, each steam channel is in gradually-reducing shape from top to bottom, and each nozzle is in the throwing of vertical direction
Shadow is respectively positioned on the lower port for corresponding the steam channel of connection and the baffle overlaps mutually the center position in region.
Optionally, each steam channel is enclosed by the conical plate that top is equipped with opening.
Optionally, the conical plate is connected as one with the baffle, and the top difference of each conical plate
It is abutted against with the lower end for corresponding the nozzle being connected to.
Optionally, the nozzle and the conical plate are hollow structure, are provided with heater strip in the hollow structure.
Optionally, the setting in one week of the side of the Crucible body is fluted, and the edge of the baffle is embedded in the groove
In, the baffle is connected and composed by multiple sub- baffles are shrinkable in the horizontal direction, and is in expansion shape in multiple sub- baffles
When state, two adjacent sub- baffles have crossover region in the vertical direction.
Optionally, the lid and the nozzle are connected as one.
Optionally, the Crucible body is rectangular parallelepiped structure, and the lid is rectangle, and multiple nozzles are along the length
The extending direction of rectangular long side equidistantly arranges.
Optionally, the baffle and the material of the taper version include stainless steel, aluminum oxide, titanium, in boron nitride
One or more of mixing materials.
Second aspect, the embodiment of the present invention provides a kind of evaporation coating device, including crucible is deposited as described above.
The embodiment of the present invention provides a kind of vapor deposition crucible and evaporation coating device, logical by the way that steam is arranged between baffle and nozzle
Road, and multiple steam overfolw holes are set in the region that the lower port of each steam channel and baffle overlap mutually, and in the related technology
It is respectively provided with steam overfolw hole on entire baffle to compare, steam can be gathered in each steam channel, improves steam and is leading
Vapour pressure during stream, and each nozzle is guided under the guide functions of steam channel, it is sprayed through nozzle, can be improved steaming
The utilization rate of material is plated, and since baffle is horizontally disposed, and the structure of each steam channel is all the same, and therefore, each steam
The lower port in channel and the area in the region that baffle overlaps mutually are all the same, in the steam overfolw hole of connection corresponding with each nozzle
Spilling rate it is all the same in the case where, the vapour pressure into the evaporation material in each steam channel is also identical, and due to
In the orientation of nozzle, from intermediate nozzle to the nozzle of two sides, respectively the corresponding steam overfolw hole being connected to is in vertical side
The gross area of upward projection is gradually increased, therefore, in the steam channel that can reduce connection corresponding with intermediate nozzle
Vapour pressure increases the vapour pressure in the steam channel of connection corresponding with the nozzle of two sides, increases two sides so as to reach
The evaporation rate of nozzle reduces the technical effect of the evaporation rate of intermediate nozzle, during can be used to solve to be deposited in crucible
Temperature high two sides temperature in portion's is low, and makes the evaporation rate of intermediate noxzzle big, and the evaporation rate of two side nozzles is small to lead to vapor deposition not
Uniform problem.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be in embodiment or description of the prior art
Required attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some realities of the invention
Example is applied, it for those of ordinary skill in the art, without creative efforts, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is a kind of side view for vapor deposition crucible that the relevant technologies provide；
Baffle is equipped with the structural schematic diagram of steam overfolw hole in a kind of vapor deposition crucible that Fig. 2 provides for the relevant technologies；
Fig. 3 is a kind of side view for vapor deposition crucible that the embodiment of the present invention provides；
Baffle and conical plate overlapping region are arranged steam and overflow in a kind of vapor deposition crucible that Fig. 4 provides for the embodiment of the present invention
The structural schematic diagram to portal；
Fig. 5 is a kind of baffle that the embodiment of the present invention provides and the structural schematic diagram that crucible body is detachably connected；
Baffle and conical plate overlapping region are arranged steam and overflow in a kind of vapor deposition crucible that Fig. 6 provides for the embodiment of the present invention
The structural schematic diagram to portal；
Fig. 7 is the structure that heater strip is arranged in the hollow structure of a kind of nozzle that the embodiment of the present invention provides and conical plate
Schematic diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " center ", "upper", "lower", "front", "rear", " left side ",
The orientation or positional relationship of the instructions such as " right side ", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on the figure
Orientation or positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device of indication or suggestion meaning or
Element must have a particular orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
Term " first ", " second " be used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or
Implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or imply
Ground includes one or more of the features.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or
It is more than two.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected.It is right
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
During current vapor deposition, due to the problems such as price of evaporation material is high, and utilization rate is low, so that production cost occupies
It is high not under, especially luminous organic material.
The structural schematic diagram of currently used vapor deposition crucible is as depicted in figs. 1 and 2, including Crucible body 1, and setting exists
Lid 2 in the Crucible body 1, the lid 2 are equipped with multiple nozzles 3, the equidistant arrangement along a straight line of multiple nozzles 3, the earthenware
Baffle 4 is provided in crucible main body 1, which is divided into two spaces up and down for space in Crucible body 1, and sets on the baffle 4
It is equipped with steam overfolw hole 41.During vapor deposition, the middle portion temperature of Crucible body 1 is higher, and two sides temperature is relatively low, and due to baffle
Set steam overfolw hole 41 is uniformly distributed on 4, this material vaporization rate that will result in intermediate noxzzle is higher than two side nozzles
Material vaporization rate so as to be formed by thicknesses of layers uneven for vapor deposition, to can have an impact to the characteristics of luminescence.
In consideration of it, the embodiment provides a kind of vapor deposition crucible, referring to Fig. 3 and Fig. 4, including Crucible body 1, and
Lid 2 in the Crucible body 1 is set, which is equipped with multiple nozzles 3, and multiple nozzles 3 are equidistant along a straight line to be arranged
Column；Baffle 4 is equipped in the Crucible body 1, the baffle 4 is horizontally disposed, and space in the Crucible body 1 is divided into two skies up and down
Between, which is detachably connected with Crucible body 1；The identical steaming of structure is provided between baffle 4 and each nozzle 3
The baffle 4 and each nozzle 3 is arranged at the face position of vertical direction in vapour channel 51, each steam channel 51, and point
Not Tong Guo upper port connection corresponding with nozzle 3, connect by lower port with the upper surface of baffle 4；On the baffle 4 with each steaming
The region A that the lower port in vapour channel 51 overlaps mutually is equipped with steam overfolw hole 41, and in the orientation of multiple nozzles 3,
From intermediate nozzle 3 to the nozzle 3 of two sides, respectively the projection of the corresponding steam overfolw hole 41 being connected in the vertical direction is total
Area is gradually increased.
Wherein, without limitation to the specific structure of the Crucible body 1, for crucible is deposited, during vapor deposition, earthenware
The middle portion temperature of crucible main body 1 is higher, and two sides temperature is relatively low and the material vaporization rate of intermediate noxzzle is made to be higher than two side nozzles
The case where material vaporization rate, the present invention are applicable in.
In an alternative embodiment of the invention, as shown in figure 3, the Crucible body 1 is rectangular parallelepiped structure, which is length
Rectangular, multiple nozzles 3 are equidistantly arranged along the extending direction of rectangular long side.
Wherein, the lid 2 and nozzle 3 can be structure as a whole, or independent structure.
In one embodiment of the invention, the lid 2 and nozzle 3 are connected as one.It can be avoided in lid 2 and nozzle
When 3 non-integral structures connect, it is easy to appear poorly sealed situation during the connection process and occurs, so as to guarantee the close of connection
Feng Xing.
During actually vapor deposition, due to the Crucible body 1 for hold evaporation material it is necessary to have certain intensity and
Heating conduction.Therefore, the material of the Crucible body 1 includes one or more of stainless steel, aluminum oxide, titanium, boron nitride
Mixing material.
Similarly, the material of lid 2, nozzle 3 and baffle 4 also may include stainless steel, aluminum oxide, titanium, boron nitride
One or more of mixing material.
Wherein, which is divided into two spaces up and down for space in Crucible body 1, is capable of increasing the steaming of evaporation material
Vapour pressure, so that the steam molecule of evaporation material passes through the steam overfolw hole 41 being arranged on baffle 4 and overflows, and along steam channel 51
Nozzle 3 is moved up to, is sprayed through nozzle 3.
Wherein, the mode being detachably connected of the Crucible body 1 and baffle 4 is not specifically limited, it can be in the crucible
Supporting element is set on the side wall of main body 1, baffle 4 is placed on supporting element, can also be arranged in Crucible body 1 and baffle 4
The side wall of baffle 4 and Crucible body 1 is detachably connected by fastener by fastener.
It is shown in Figure 5 in one embodiment of the invention, the side setting fluted 11 in one week of the Crucible body 1, the gear
The edge of plate 4 is embedded in groove 11, which is connected and composed by multiple sub- baffles 42 are shrinkable in the horizontal direction, and
When multiple sub- baffles 42 are in unfolded state, the sub- baffle 42 of adjacent two has crossover region in the vertical direction.
In embodiments of the present invention, by being embedded baffle 4 on the side wall of Crucible body 1, baffle 4 and earthenware are capable of increasing
The leakproofness that crucible main body 1 combines, so as to further increase the vapour pressure of evaporation material.And pass through the baffle 4 by multiple
Sub- baffle 42 is shrinkable in the horizontal direction to be connected and composed, can be by least one of multiple sub- baffles 42 edge in disassembly
Horizontal direction is shunk.And in order to guarantee the leakproofness of baffle 4 itself, unfolded state is in multiple sub- baffles
When, the sub- baffle 42 of adjacent two has crossover region in the vertical direction.
Specifically, multiple sub- baffles 42 can be connected by way of pulling and pushing to realize and shrink.
Wherein, from intermediate nozzle 3 to the nozzle 3 of two sides, respectively the corresponding steam overfolw hole 41 being connected to is in vertical side
The gross area of upward projection is gradually increased, and refers to the nozzle 3 from intermediate nozzle 3 to two sides, and respectively corresponding connection is every
The sum of the area of projection of a steam overfolw hole 41 in the vertical direction is gradually increased.So, opposite with each nozzle 3
In the identical situation of area for the region A that the lower port and baffle 4 for the steam channel 51 that should be connected to overlap mutually, it can reduce in
Between the corresponding connection of nozzle 3 steam overfolw hole 41 spilling rate, increase the steam of corresponding with the nozzle 3 of two sides connection
The spilling rate of overfolw hole 41, and the structure in each steam channel 51 is identical, and in company corresponding with each steam channel 51
In the identical situation of spilling rate of logical steam overfolw hole 41, it is able to maintain identical vapour pressure in each steam channel 51,
And in vapor deposition crucible provided in an embodiment of the present invention, in the orientation of nozzle 3, from intermediate nozzle to the spray of two sides
Mouth, respectively the gross area of the projection of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased, i.e., from centre
Nozzle 3 arrive two sides nozzle 3, through be connected to each steam channel 51 steam overfolw hole 41 entrance steam spilling rate by
Cumulative big, the vapour pressure in steam channel 51 so as to reduce connection corresponding with intermediate nozzle 3 increases and two sides
Vapour pressure in the steam channel 51 of the corresponding connection of nozzle 3, and then the evaporation rate of intermediate noxzzle can be reduced, increase two sides
The evaporation rate of nozzle.
The embodiment of the present invention provides a kind of vapor deposition crucible, as shown in Figure 3 and Figure 4, by setting between baffle 4 and nozzle 3
Steam channel 51 is set, and multiple steam overfolw holes are arranged in the region A overlapped mutually in the lower port of each steam channel 51 and baffle 4
41, compared with being respectively provided with steam overfolw hole on entire baffle 4 in the related technology, steam can be gathered in each steam channel
In 51, vapour pressure of steam during water conservancy diversion is improved, and each nozzle 3 is guided under the guide functions of steam channel 51,
It is sprayed through nozzle 3, can be improved the utilization rate of evaporation material, and since baffle 4 is horizontally disposed, and each steam channel 51
Structure is all the same, and therefore, the area for the region A that lower port and the baffle 4 of each steam channel 51 overlap mutually is all the same.With it is each
In the case that the spilling rate of the steam overfolw hole 41 of a corresponding connection of nozzle is all the same, into each steam channel 51
The vapour pressure of evaporation material is also identical.And due in the orientation of nozzle 3, from intermediate nozzle 3 to the nozzle 3 of two sides,
Respectively the gross area of the projection of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased, and therefore, can be reduced
Vapour pressure in the steam channel 51 of connection corresponding with intermediate nozzle 3, increases the steaming of connection corresponding with the nozzle 3 of two sides
Vapour pressure in vapour channel 51 reduces the steaming of intermediate nozzle 3 so as to reach the evaporation rate for the nozzle 3 for increasing two sides
The technical effect for plating rate, the high two sides temperature of crucible middle portion temperature is low during can be used to solve vapor deposition, and makes intermediate noxzzle
Evaporation rate it is big, the evaporation rate of two side nozzles is small to lead to that non-uniform problem is deposited.
Wherein, respectively corresponding from intermediate nozzle 3 to the nozzle 3 of two sides in the orientation of multiple nozzles 3
The gross area of the projection of the steam overfolw hole 41 of connection in the vertical direction is gradually increased, can be there are many implementation.
In the first possible implementation, as shown in Figure 3 and Figure 4, in the lower port and gear of each steam channel 51
The region that plate 4 overlaps mutually, each steam overfolw hole 41 is all the same in the projected area of vertical direction, in the row of multiple nozzles 3
On column direction, from intermediate nozzle 3 to the nozzle 3 of two sides, respectively the number of the corresponding steam overfolw hole 41 being connected to gradually increases
Greatly.
In this possible implementation, by intersecting the lower port for being located at each steam channel 51 and baffle 4
Each steam overfolw hole 41 in folded region is all the same in the projected area of vertical direction, in the orientation of multiple nozzles 3,
From intermediate nozzle 3 to the nozzle 3 of two sides, respectively the number of the corresponding steam overfolw hole 41 being connected to is gradually increased, i.e., therefrom
Between nozzle 3 arrive the nozzles 3 of two sides, respective lower port and baffle of the corresponding steam overfolw hole 41 being connected in steam channel 51
The distribution density in 4 regions overlapped mutually is gradually increased, and can make the nozzle 3 from intermediate nozzle 3 to two sides, respectively corresponding to connect
The gross area of the projection of logical steam overfolw hole 41 in the vertical direction is gradually increased.
In second of possible implementation, as shown in fig. 6, the lower port and baffle 4 in each steam channel 51 intersect
Folded region A, the number of the steam overfolw hole 41 is all the same, in the orientation of multiple nozzles 3, from intermediate nozzle 3 to
The nozzle 3 of two sides, respectively the projected area of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased.
Wherein, it should be noted that in this possible implementation, from the nozzle 3 of centre to the nozzle 3 of two sides,
Respectively the projected area of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased, and refers to the nozzle 3 with two sides
The projected area of the steam overfolw hole 41 of corresponding connection in the vertical direction is greater than the steaming of connection corresponding with intermediate nozzle 3
The projected area of vapour overfolw hole 41 in the vertical direction, not to each steam overfolw hole of connection corresponding with the same nozzle
41 projected area in the vertical direction is defined, and each steam overfolw hole 41 of connection corresponding with the same nozzle is perpendicular
The upward projected area of histogram may be the same or different.
In this possible implementation, by intersecting the lower port for being located at each steam channel 51 and baffle 4
The number of the steam overfolw hole 41 in folded region is all the same, in the orientation of multiple nozzles 3, from intermediate nozzle 3 to
The nozzle 3 of two sides, respectively the corresponding steam overfolw hole 41 being connected to is gradually increased in the projected area of vertical direction, equally can
Make the nozzle 3 from intermediate nozzle 3 to two sides, the projection of the respective corresponding steam overfolw hole 41 being connected in the vertical direction
The gross area is gradually increased.
In the third possible implementation, in the orientation of multiple nozzles 3, from intermediate nozzle 3 to two sides
Nozzle 3, the respectively projected area of the number of the corresponding steam overfolw hole 41 being connected to and steam overfolw hole 41 in vertical direction
It is gradually increased.
Wherein, it should be noted that in this possible implementation, from the nozzle 3 of centre to the nozzle 3 of two sides,
Respectively the projected area of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased, and refers to the nozzle 3 with two sides
The projected area of the steam overfolw hole 41 of corresponding connection in the vertical direction is greater than the steaming of connection corresponding with intermediate nozzle 3
The projected area of vapour overfolw hole 41 in the vertical direction, not to multiple steam overfolw holes of connection corresponding with the same nozzle
41 projected area in the vertical direction is defined, and multiple steam overfolw holes 41 of connection corresponding with the same nozzle are perpendicular
The upward projected area of histogram may be the same or different.
It is different according to the position of nozzle 3 in this possible implementation, so that the steam of connection corresponding with nozzle is overflow
Portal 41 number and change in the projected area of vertical direction, can equally make from intermediate nozzle 3 to two sides
Nozzle 3, respectively the gross area of the projection of the corresponding steam overfolw hole 41 being connected in the vertical direction is gradually increased.
In these three possible implementations, the first and second are compared with the third, by making and the same spray
Each steam overfolw hole 41 of the corresponding connection of mouth 3 is identical in the projected area of vertical direction, can make to enter the same steam
Steam molecule in channel 51 is distributed more uniform stabilization.
Wherein, without limitation to the specific structure of the steam channel 51, as long as can lead steam from steam overfolw hole 41
It flow to nozzle 3.
In one embodiment of the invention, as shown in figure 3, each steam channel 51 is in gradually-reducing shape from top to bottom, and each
Nozzle 3 is respectively positioned on the lower port for corresponding the steam channel 51 of connection in the projection of vertical direction and baffle 4 overlaps mutually
The center position of region A.
In embodiments of the present invention, since each steam channel 51 is in gradually-reducing shape from top to bottom, and each nozzle 3 is perpendicular
Histogram to projection be respectively positioned in the lower port and the region A that overlaps mutually of baffle 4 for corresponding the steam channel 51 of connection
At heart position, therefore, as steam moves upwards in steam channel 51, it can be gradually increased the vapour pressure of evaporation material, had
Conducive to the size and stability of control evaporation rate.
Wherein, without limitation to the specific structure of the steam channel, as long as steam can be guided to nozzle 3.
In one embodiment of the invention, with continued reference to shown in Fig. 3, each steam channel 51 is equipped with the cone of opening by top
Shape plate 5 encloses, and each conical plate 5 is connected as one with baffle 4, and the top of each conical plate 5 is respectively and therewith
The lower end of the nozzle 3 of corresponding connection abuts against.
In embodiments of the present invention, the smooth ramp of conical plate 5 can reduce the contact area of inner wall and steam molecule, will
The molecule of random motion is strapped in conical region, can reduce the distance between steam molecule and nozzle 3, is conducive to control
The size and stability of steam molecule movement rate.
Wherein, in order to improve thermal conductivity, the material of the conical plate include stainless steel, aluminum oxide, titanium, in boron nitride
One or more of mixing materials.
It should be noted that after evaporation material cools down at 3 mouthfuls of nozzle, can be partly refluxed to during practical vapor deposition
In Crucible body 1, and when heating evaporation again, it can be deposited in the form of macromolecular or micel, influence whether film layer
Uniformity, and by primary heating vapor deposition material, be often denaturalized, these reflow materials are deposited again can make film
Layer performance is affected.
Based on this, in another embodiment of the present invention, referring to Fig. 7, the nozzle 3 and conical plate 5 are hollow structure, in this
Heater strip 6 is provided in hollow structure.
Heater strip 6 is properly termed as heating wire, heating wire again.When in use by the heater strip be powered can to nozzle and
Conical plate is heated, and is controlled by the heating temperature to heater strip, and the steam molecule at nozzle and conical plate can be made
Temperature and the bottom temp of Crucible body be consistent, steam molecule is cooling and flows back so as to preventing, or blocks
Nozzle.
Specifically, the heater strip 6 can be resistive heater, i.e., the heat generated using the Joule effect that electric current flows through conductor
Object can be heated.
Wherein, as shown in fig. 7, the heater strip 6 can be spirally wrapped around in hollow structure, so, Neng Goujia
The contact area of big heater strip 6 and nozzle 3 and conical plate 5.
The embodiment of the present invention provides a kind of evaporation coating device, including crucible is deposited as described above.
The vapor deposition crucible that the beneficial effect and above-mentioned technical proposal for the evaporation coating device that the embodiment of the present invention provides provide
Beneficial effect is identical, and details are not described herein.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (11)
1. a kind of vapor deposition crucible, which is characterized in that including Crucible body, and the lid being arranged in the Crucible body, it is described
Lid is equipped with multiple nozzles, and multiple nozzles equidistantly arrange along a straight line；
Baffle is equipped in the Crucible body, the baffle is horizontally disposed, and space in the Crucible body is divided into upper and lower two
A space, the baffle are detachably connected with the Crucible body；
The identical steam channel of structure is provided between the baffle and each nozzle, each steam channel is set
It sets in the baffle and each nozzle at the face position of vertical direction, and passes through upper port and the nozzle phase respectively
Corresponding connection, is connect by lower port with the upper surface of the baffle；
The region overlapped mutually on the baffle with the lower port of each steam channel is equipped with multiple steam overfolw holes, more
In the orientation of a nozzle, from intermediate nozzle to the nozzle of two sides, respectively the corresponding steam overfolw hole being connected to exists
The gross area of projection on vertical direction is gradually increased.
2. vapor deposition crucible according to claim 1, which is characterized in that in the lower port of each steam channel and described
The region that baffle overlaps mutually, each steam overfolw hole is all the same in the projected area of vertical direction, in multiple nozzles
Orientation on, from intermediate nozzle to the nozzle of two sides, respectively the number of the corresponding steam overfolw hole being connected to gradually increases
Greatly；Alternatively,
Number in the region that the lower port of each steam channel and the baffle overlap mutually, the steam overfolw hole is homogeneous
Together, in the orientation of multiple nozzles, from intermediate nozzle to the nozzle of two sides, respectively the corresponding steam being connected to overflows
The projected area portalled in the vertical direction is gradually increased.
3. vapor deposition crucible according to claim 1 or 2, which is characterized in that
Each steam channel is in gradually-reducing shape from top to bottom, and each nozzle is respectively positioned on therewith in the projection of vertical direction
The lower port of the steam channel of corresponding connection and the baffle overlap mutually the center position in region.
4. vapor deposition crucible according to claim 3, which is characterized in that
Each steam channel is enclosed by the conical plate that top is equipped with opening.
5. vapor deposition crucible according to claim 4, which is characterized in that
The conical plate is connected as one with the baffle, and the top of each conical plate respectively and corresponds
The lower end of the nozzle of connection abuts against.
6. vapor deposition crucible according to claim 4 or 5, which is characterized in that
The nozzle and the conical plate are hollow structure, are provided with heater strip in the hollow structure.
7. vapor deposition crucible according to claim 1, which is characterized in that
The side setting in one week of the Crucible body is fluted, and the edge of the baffle is embedded in the groove, the baffle
It is connected and composed by multiple sub- baffles are shrinkable in the horizontal direction, and when multiple sub- baffles are in unfolded state, it is adjacent
Two sub- baffles have crossover region in the vertical direction.
8. vapor deposition crucible according to claim 1, which is characterized in that
The lid and the nozzle are connected as one.
9. vapor deposition crucible according to claim 1, which is characterized in that
The Crucible body is rectangular parallelepiped structure, and the lid is rectangle, and multiple nozzles are along the rectangular long side
Extending direction equidistantly arrange.
10. vapor deposition crucible according to claim 4 or 5, which is characterized in that
The material of the baffle and the conical plate includes that one or more of stainless steel, aluminum oxide, titanium, boron nitride are mixed
Condensation material.
11. a kind of evaporation coating device, which is characterized in that including the described in any item vapor deposition crucibles of such as claim 1-10.
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| CN201910013481.2A CN109468596B (en) | 2019-01-07 | 2019-01-07 | Evaporation crucible and evaporation device |
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| CN109468596B CN109468596B (en) | 2020-11-13 |
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| CN111424240A (en) * | 2020-05-29 | 2020-07-17 | 云谷（固安）科技有限公司 | Evaporation crucible |
| CN111455322A (en) * | 2020-05-09 | 2020-07-28 | Tcl华星光电技术有限公司 | Crucible device and vapor deposition device |
| CN112553578A (en) * | 2019-09-26 | 2021-03-26 | 宝山钢铁股份有限公司 | Vacuum coating device with flow-inhibiting nozzle |
| CN113088936A (en) * | 2021-03-31 | 2021-07-09 | 长江存储科技有限责任公司 | Film layer growth equipment and method |
| CN114075649A (en) * | 2020-12-24 | 2022-02-22 | 广东聚华印刷显示技术有限公司 | Crucible nozzle structure, crucible device, and evaporation device |
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| CN112553578A (en) * | 2019-09-26 | 2021-03-26 | 宝山钢铁股份有限公司 | Vacuum coating device with flow-inhibiting nozzle |
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| CN111424240A (en) * | 2020-05-29 | 2020-07-17 | 云谷（固安）科技有限公司 | Evaporation crucible |
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|---|---|
| CN109468596B (en) | 2020-11-13 |
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