CN111424240B - Evaporation crucible - Google Patents
Evaporation crucible Download PDFInfo
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- CN111424240B CN111424240B CN202010478086.4A CN202010478086A CN111424240B CN 111424240 B CN111424240 B CN 111424240B CN 202010478086 A CN202010478086 A CN 202010478086A CN 111424240 B CN111424240 B CN 111424240B
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- crucible
- spring
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- crucible body
- evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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Abstract
The embodiment of the invention provides an evaporation crucible, which comprises: a crucible body; and the at least one buffer plate is arranged in a crucible groove of the crucible body, and the at least one buffer plate is arranged along the width direction of the crucible body, wherein the buffer plate comprises a baffle plate and at least one spring connected with the surface of the baffle plate, and the at least one spring can be stretched or compressed along the length direction of the crucible body. The application solves the problems that the crucible needs to be moved alternately in the evaporation process, and the organic molten material in the crucible is severely shaken and vibrated in the moving process due to acceleration, so that the thickness of the evaporation film is inconsistent and the performance of products is influenced.
Description
Technical Field
The invention relates to the technical field of evaporation processes, in particular to an evaporation crucible.
Background
With the development of display technology, an OLED (Organic light emitting diode) display screen in a display device becomes a hot spot for the current high-end intelligent product to pursue adoption. When the OLED is prepared, the crucible is required to be utilized to evaporate the organic molten material onto the OLED substrate, the crucible is required to be alternately moved and used in the evaporation process, and in the moving process of the crucible, the organic molten material in the crucible is severely shaken and vibrated due to acceleration of movement, so that the thickness of an evaporated film is inconsistent, and the performance of the product is influenced.
Disclosure of Invention
In view of this, the embodiment of the present invention provides an evaporation crucible, which solves the problem that the thickness of an evaporation film is inconsistent and product performance is affected due to the fact that the crucible needs to be alternately moved and used in the evaporation process and the movement process is accelerated to cause severe shaking oscillation of an organic molten material in the crucible.
An evaporation crucible provided in an embodiment of the present invention includes: a crucible body; and the at least one buffer plate is arranged in a crucible groove of the crucible body, and the at least one buffer plate is arranged along the width direction of the crucible body, wherein the buffer plate comprises a baffle plate and at least one spring connected with the surface of the baffle plate, and the at least one spring can be stretched or compressed along the length direction of the crucible body.
In one embodiment, the baffle plate is provided with a plurality of first through holes. The fluidity of the molten material can be ensured, and the molten materials can flow mutually in a plurality of spaces in the moving process of the crucible, so that the volume of the molten materials in each space is balanced.
In one embodiment, the crucible body comprises 1 to 20 crucible slots, wherein 1 to 10 buffer plates are placed in each crucible slot. The movable space of the molten material can be ensured to be obviously reduced, so that the molten material is buffered and stabilized in shaking, the thickness consistency of the vapor deposition film is improved, and the performance of the product is improved.
In one embodiment, 1 to 10 buffer plates are disposed along the width direction of the crucible body, wherein 1 to 10 buffer plates correspondingly divide the inner space of the crucible tank into 2 to 11 equal spaces along the length direction of the crucible body.
In one embodiment, at least one spring is disposed in each of the equal spaces, wherein the at least one spring can be stretched or compressed along the length direction of the crucible body.
In one embodiment, the length of the spring is equal to or less than the length of the space.
In one embodiment, the crucible cover cap is covered above the crucible body; and the plurality of crucible nozzles penetrate through the crucible cover cap.
In one embodiment, the length of the crucible nozzle on the side of the crucible cover cap away from the crucible body is 2-15 mm; the length of the crucible nozzle at one side of the crucible cover cap close to the crucible body is 5-20 mm. It is possible to prevent the problem that the nozzle is clogged by the molten material reaching the nozzle surface due to the excessively low temperature of the nozzle.
In one embodiment, the crucible cap further comprises: the middle plate is arranged on one side, close to the crucible, of the crucible nozzle, a plurality of second through holes are formed in the middle plate, and the second through holes and the crucible nozzles are correspondingly formed in a plurality of the second through holes respectively. The nozzle can prevent the molten material from being cooled and solidified on the outer surface of the nozzle, thereby preventing the problem of hole blockage of the nozzle and being beneficial to the uniformity and stability of the molten material during deposition.
In one embodiment, the middle plate is made of one or more of the following materials: titanium alloys, tantalum alloys, and ceramics. Can ensure that the middle plate is not easy to deform and deteriorate in the evaporation process.
The embodiment of the invention provides an evaporation crucible which comprises a crucible body, wherein at least one buffer plate is arranged in a crucible groove of the crucible body, and the at least one buffer plate is arranged along the width direction of the crucible body. The buffer plate comprises a separation blade and at least one spring, the separation blade divides the crucible body into two spaces and a plurality of spaces along the width direction of the crucible body, the springs are arranged on one side or two sides of the separation blade, and the springs can be stretched or compressed along the length direction of the crucible body. Through set up the spring on the separation blade at the buffer board, can make the buffer board play similar absorbing effect, do benefit to balanced saturated coating by vaporization pressure, reduce the fluctuation of saturated coating by vaporization pressure to improve the homogeneity of coating by vaporization membrane.
Drawings
Fig. 1 is a schematic structural diagram of a crucible body according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a buffer plate according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a crucible cap and a nozzle according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic structural view of a crucible body according to an embodiment of the present invention.
As shown in fig. 1, the evaporation crucible includes a crucible body 1, and the crucible body 1 of the conventional evaporation crucible has a large length, and a plurality of crucible grooves 11 are provided in the longitudinal direction of the crucible body 1, and the longitudinal direction a of the crucible body 1 is an extending direction in which the plurality of crucible bodies 1 are arranged. At least one buffer plate 12 is placed in each crucible slot 11 in the present application, wherein at least one buffer plate 12 is placed along the width direction of the crucible body 1, and the width direction B of the crucible body 1 is a direction perpendicular to the length direction a of the crucible body 1 on the horizontal plane. The buffer plate 12 comprises a baffle plate 121 and at least one spring 122, the spring 122 is connected with the surface of the baffle plate 121, one baffle plate 121 divides the crucible body 1 into two spaces along the width direction of the crucible body 1, one side or two sides of the baffle plate 121 are provided with the spring 122, and the spring 122 can be stretched or compressed along the length direction of the crucible body 1.
It can be understood that the buffer plate 12 is disposed along the width direction of the crucible body 1, i.e., the plane where the buffer plate 12 is located is parallel to the width direction of the crucible body 1, as can be seen in fig. 1.
This embodiment sets up at least one buffer plate 12 through the crucible slot 11 at crucible body 1, sets up spring 122 on the separation blade 121 of buffer plate 12, can make buffer plate 12 play similar absorbing effect, does benefit to balanced saturated coating by vaporization pressure, reduces the fluctuation that saturated coating by vaporization pressed to improve the homogeneity of coating by vaporization membrane.
Fig. 2 is a schematic structural diagram of a buffer plate 12 according to an embodiment of the present invention.
As shown in fig. 2, the blocking sheet 121 is provided with a plurality of first through holes 123, and the first through holes 123 are arranged on the blocking sheet 121 according to a preset arrangement manner. A separation blade 121 can divide crucible body 1 into two spaces along the width direction of crucible body 1, set up a plurality of buffer plates 12 in a crucible tank 11, a plurality of separation blades 121 of a plurality of buffer plates 12 divide crucible tank 11 into a plurality of spaces, set up first perforation 123 on separation blade 121 and can guarantee the mobility of molten material, in the in-process that the crucible removed, it is that molten material can flow each other in a plurality of spaces, balanced every volume of molten material in the space, thereby the homogeneity of molten material in crucible tank 11 has been increased.
It is to be understood that the plurality of first through holes 123 may be arranged on the blocking sheet 121 in a matrix shape, or the plurality of first through holes 123 may be arranged on the blocking sheet 121 in a concentric circle shape, and what predetermined shape the plurality of first through holes 123 are arranged on the blocking sheet 121 may be set or selected according to actual situations, and the predetermined shape of the arrangement of the plurality of first through holes 123 is not limited in the present invention.
It is also understood that the shape of the first through-hole 123 itself may be circular, square, triangular, etc., and the present invention does not limit the shape of the first through-hole 123 itself, provided that it is possible to ensure that the molten material can flow in the plurality of spaces of the crucible pot 11 through the first through-hole 123. The shapes of the first through holes 123 may be the same or different, and the present invention is not limited to whether the shapes of the first through holes 123 are the same.
It is to be understood that the sizes of the first through holes 123 may be the same or different, and the present invention is not limited to whether the sizes of the first through holes 123 are the same.
In an embodiment of the present invention, the crucible body 1 may include 1 to 20 crucible slots 11, and preferably, the crucible body 1 may include 10 crucible slots 11, wherein 1 to 10 buffer plates 12 may be disposed in each crucible slot 11, each buffer plate 12 is disposed along a width direction of the crucible body 1, 1 to 10 buffer plates 12 are disposed in parallel along a length direction of the crucible body 1, and 1 to 10 buffer plates 12 may correspondingly divide one crucible slot 11 into 2 to 11 spaces. For example: 2 buffer plates 12 are placed in each of 10 crucible grooves 11, so 20 buffer plates 12 divide 10 crucible grooves 11 into 30 spaces, which is equivalent to changing original 10 crucible grooves 11 into 30 crucible grooves 11, and because the space of each crucible groove 11 is reduced to one third of the space of the original crucible groove 11, in the process of crucible movement, the movable space of a molten material is obviously reduced, so that the molten material is buffered and stabilized in shaking, the thickness consistency of a vapor deposition film is improved, and the performance of a product is improved.
It is understood that the crucible body 1 may include 10 crucible slots 11, 15 crucible slots 11, or 20 crucible slots 11, and the like, the number of the crucible slots 11 included in the crucible body 1 is determined by the actual crucible type, the number of the crucible slots 11 included in different crucible bodies 1 is different, and the specific number of the crucible slots 11 included in the crucible body 1 is not limited in the present invention.
It should be understood that 2 buffer plates 12, or 5 buffer plates 12, or a plurality of buffer plates 12, etc. may be placed in the crucible slot 11, and the number of the buffer plates 12 placed in the crucible slot 11 may be determined according to the length of the crucible slot 11 itself, and may be selected, and the number of the buffer plates 12 placed in the crucible slot 11 is not limited in the present invention.
It is also understood that the number of the buffer plates 12 placed in different crucible baths 11 may be the same, or the number of the buffer plates 12 placed in different crucible baths 11 may be different. The number of the buffer plates 12 placed in different crucible slots 11 can be set according to actual requirements, and the specific number of the buffer plates 12 placed in different crucible slots 11 is not limited by the present invention.
In one embodiment of the present invention, one crucible slot 11 is divided into two or more spaces by at least one buffer plate 12, wherein each space is provided with a spring 122, and the spring 122 can be stretched or compressed along the length direction of the crucible body 1. For example: a buffer plate 12 is placed in a crucible slot 11, then a spring 122 is arranged on each side of the buffer plate 12, the buffer plate 12 is placed along the width direction of the crucible body 1, then the buffer plate 12 divides the crucible slot 11 into a first space and a second space, and the first space and the second space both contain the spring 122 of the buffer plate 12. Or two buffer plates 12 are placed in one crucible slot 11, which are respectively a first buffer plate 12 and a second buffer plate 12, then both sides of the first buffer plate 12 can be provided with a spring 122, one side of the second buffer plate 12 far away from the first buffer plate 12 is provided with the spring 122, one side of the second buffer plate 12 near the first buffer plate 12 is not provided with the spring 122, then the crucible slot 11 is divided into a first space, a second space and a third space by the two buffer plates 12, and the first space, the second space and the third space all contain the spring 122 of one buffer plate 12; or both sides of the first buffer plate 12 may be provided with a spring 122, and both sides of the second buffer plate 12 may also be provided with a spring 122, so that the two buffer plates 12 divide the crucible slot 11 into a first space, a second space and a third space, the first space and the third space both include a spring 122 of the buffer plate 12, and the second space includes two springs 122; or one side of the first buffer plate 12 far away from the second buffer plate 12 may be provided with one spring 122, one side of the first buffer plate 12 near the second buffer plate 12 is not provided with the spring 122, two sides of the second buffer plate 12 are provided with two springs 122, so that the two buffer plates 12 divide the crucible slot 11 into a first space, a second space and a third space, and the first space, the second space and the third space all contain one spring 122 of one buffer plate 12. At least one spring 122 is arranged in each space, so that the distance between the blocking pieces 121 can be always kept in the moving process, and when the movement is finished, the blocking pieces 121 can return to the original positions. Set up spring 122 on the separation blade 121 of buffer board 12, can make buffer board 12 play similar absorbing effect, do benefit to balanced saturated coating by vaporization pressure, reduce the fluctuation of saturated coating by vaporization pressure to improve the homogeneity of coating by vaporization membrane.
It is understood that one crucible tank 11 is divided into two or more spaces by at least one buffer plate 12, wherein each space is provided with one spring 122, or each space may be provided with a plurality of springs 122, the number of springs 122 placed in the plurality of spaces of the crucible tank 11 may be set, and the number of springs 122 placed in the plurality of spaces of the crucible tank 11 is not limited in the present invention.
It should be understood that the number of the springs 122 placed in the plurality of spaces of the crucible bath 11 may be the same or different, the number of the springs 122 placed in the plurality of spaces of the crucible bath 11 may be set, and the present invention is not limited to whether the number of the springs 122 placed in the plurality of spaces of the crucible bath 11 is the same.
In an embodiment of the present invention, the length of the spring 122 is less than or equal to the length of the space in which the spring 122 is located, and preferably, the length of the spring 122 is equal to the length of the space in which the spring 122 is located. Under crucible maintenance quiescent condition, spring 122 between crucible body 1 and the separation blade 121 contacts with 1 wall of crucible body mutually, spring 122 between two separation blades 121 contacts with two separation blades 121, when the crucible did not move, spring 122 is in the state of relaxing, when the crucible removed, some spring 122 were in by compression state, thereby played the effect of buffering, do benefit to balanced saturated coating by vaporization pressure, reduce the fluctuation of saturated coating by vaporization pressure, thereby improve the homogeneity of coating by vaporization membrane.
It is understood that the spring 122 adjacent to the wall of the crucible body 1 can be fixedly connected with the wall of the crucible body 1, and can be specifically configured according to practical situations, and is not particularly limited herein.
It is understood that the length of the spring 122 may be equal to the length of the space in which the spring 122 is located, or less than the length of the space in which the spring 122 is located, the length of the spring 122 may be set according to actual product requirements, and the specific length of the spring 122 is not limited in the present invention.
Fig. 3 is a schematic structural diagram of a crucible cap 13 and a nozzle according to an embodiment of the present invention.
As shown in fig. 3, the evaporation crucible further includes a crucible cap 13, and the crucible cap 13 covers the crucible body 1 and covers the crucible body 1 during evaporation. A plurality of crucible nozzles 14 penetrate the crucible cap 13. Wherein the length of the crucible nozzle 14 on the side of the crucible cap 13 away from the crucible body 1 can be 2-15 mm, and preferably can be 3.5 mm. The length of the crucible nozzle 14 on the side of the crucible cap 13 close to the crucible body 1 may be 5 to 20mm, and preferably may be 12 mm. Because crucible nozzle 14 runs through crucible block 13, so after crucible block 13 covered the top at crucible body 1, the lower extreme of nozzle is inside getting into crucible body 1, because crucible body 1 is inside to have certain evaporation coating temperature for the nozzle also has certain evaporation coating problem, can prevent because the nozzle temperature is low excessively, and the problem that the nozzle was blockked up is arrived on the nozzle surface to the molten material.
It can be understood that the length of the crucible nozzle 14 on the side of the crucible cap 13 away from the crucible body 1 can be 2-15 mm. The length of the crucible nozzle 14 on the side of the crucible cap 13 away from the crucible body 1 can be set according to actual product requirements, and the length of the crucible nozzle 14 on the side of the crucible cap 13 away from the crucible body 1 is not limited in the present invention.
It can be further understood that the length of the crucible nozzle 14 on the side of the crucible cap 13 close to the crucible body 1 can be 5-20 mm. The length of the crucible nozzle 14 on the side of the crucible cap 13 close to the crucible body 1 can be set according to actual product requirements, and the length of the crucible nozzle 14 on the side of the crucible cap 13 close to the crucible body 1 is not limited.
In an embodiment of the present invention, the crucible cap 13 further comprises an intermediate plate 15 disposed on a side of the crucible nozzle 14 close to the crucible, wherein the intermediate plate 15 is provided with a plurality of second through holes, and the plurality of second through holes and the plurality of crucible nozzles 14 are respectively disposed correspondingly. Crucible nozzle 14 passes behind crucible block 13 and the second perforation butt joint on the medium plate 15, adds the hot melt material at the in-process of coating by vaporization, because the melting point of melt material is less than sublimation temperature, melt material turns into liquid earlier under the high temperature effect and vaporizes, melt material can hold in the coating by vaporization crucible, the coating by vaporization crucible outside is provided with heating device, heating device heats the crucible and then makes the melt material evaporate for the steam, this steam passes through the second perforation and the deposit of crucible nozzle 14 forms the coating by vaporization film to the substrate surface. Set up medium plate 15 near the one end of crucible body 1 at the nozzle, some molten material that do not get into the nozzle among the evaporation process can cool off and solidify on medium plate 15, can prevent that molten material from cooling and solidifying at the nozzle surface, and then prevent the stifled hole problem of nozzle, homogeneity and stability when being favorable to the molten material deposit.
It can be understood that the middle plate 15 may be made of titanium alloy, and the titanium alloy has the characteristics of high strength, good corrosion resistance and high heat resistance, and can ensure that the middle plate 15 is not easy to deform and deteriorate in the evaporation process. Besides titanium alloy material, the material of the middle plate 15 may also be tantalum alloy or ceramic, etc., the material of the middle plate 15 may be selected according to actual requirements, and the specific material of the middle plate 15 is not limited in the present invention.
In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specifically limited otherwise. All directional indicators in the embodiments of the present application (such as upper, lower, left, right, front, rear, top, bottom … …) are only used to explain the relative positional relationship between the components, the movement, etc. in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
Furthermore, reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents and the like included within the spirit and scope of the present invention.
Claims (9)
1. An evaporation crucible, comprising:
a crucible body; and
the setting is in at least one buffer board in the crucible groove of crucible body, at least one the buffer board is followed crucible body width direction places, wherein the buffer board include the separation blade and with at least one spring of separation blade surface connection, at least one the spring can be followed crucible body length direction is stretched or is compressed, seted up a plurality of first perforation on the separation blade.
2. An evaporation crucible according to claim 1, wherein the crucible body comprises 1 to 20 crucible slots, and 1 to 10 buffer plates are placed in each crucible slot.
3. A deposition crucible according to claim 2, wherein 1 to 10 of the buffer plates are placed along the width direction of the crucible body, and wherein 1 to 10 of the buffer plates divide the inner space of the crucible vessel into 2 to 11 equal spaces along the length direction of the crucible body.
4. A deposition crucible according to claim 3, wherein at least one spring is disposed in each of the equal spaces, and wherein at least one spring is capable of being stretched or compressed along the length of the crucible body.
5. A vaporization crucible according to claim 3, wherein the length of the spring is equal to or less than the length of the space.
6. The evaporation crucible according to claim 1, further comprising a crucible cap covering the crucible body; and
and the plurality of crucible nozzles penetrate through the crucible cover cap.
7. The evaporation crucible as recited in claim 6, wherein the length of the crucible nozzle on the side of the crucible cap away from the crucible body is 2 to 15 mm;
the length of the crucible nozzle at one side of the crucible cover cap close to the crucible body is 5-20 mm.
8. A vaporization crucible according to claim 6, wherein the crucible cap further comprises: the middle plate is arranged on one side, close to the crucible, of the crucible nozzle, a plurality of second through holes are formed in the middle plate, and the second through holes and the crucible nozzles are correspondingly formed in a plurality of the second through holes respectively.
9. An evaporation crucible according to claim 8, wherein the middle plate is made of one or more of the following materials: titanium alloys, tantalum alloys, and ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010478086.4A CN111424240B (en) | 2020-05-29 | 2020-05-29 | Evaporation crucible |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010478086.4A CN111424240B (en) | 2020-05-29 | 2020-05-29 | Evaporation crucible |
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| CN111424240A CN111424240A (en) | 2020-07-17 |
| CN111424240B true CN111424240B (en) | 2022-06-03 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756807A (en) * | 2017-01-23 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of vapor deposition source, evaporation coating device and its evaporation coating method |
| CN106987807A (en) * | 2017-06-01 | 2017-07-28 | 京东方科技集团股份有限公司 | A kind of vapor deposition source, evaporation coating device and evaporation coating method |
| CN107541703A (en) * | 2017-10-27 | 2018-01-05 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN109468596A (en) * | 2019-01-07 | 2019-03-15 | 京东方科技集团股份有限公司 | A kind of vapor deposition crucible and evaporation coating device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101094299B1 (en) * | 2009-12-17 | 2011-12-19 | 삼성모바일디스플레이주식회사 | Linear Evaporating source and Deposition Apparatus having the same |
| CN207646276U (en) * | 2018-05-29 | 2018-07-24 | 上海精骊电子技术有限公司 | A kind of evaporated device with movable crucible |
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2020
- 2020-05-29 CN CN202010478086.4A patent/CN111424240B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756807A (en) * | 2017-01-23 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of vapor deposition source, evaporation coating device and its evaporation coating method |
| CN106987807A (en) * | 2017-06-01 | 2017-07-28 | 京东方科技集团股份有限公司 | A kind of vapor deposition source, evaporation coating device and evaporation coating method |
| CN107541703A (en) * | 2017-10-27 | 2018-01-05 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN109468596A (en) * | 2019-01-07 | 2019-03-15 | 京东方科技集团股份有限公司 | A kind of vapor deposition crucible and evaporation coating device |
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