CN109468596B - Evaporation crucible and evaporation device - Google Patents
Evaporation crucible and evaporation device Download PDFInfo
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- CN109468596B CN109468596B CN201910013481.2A CN201910013481A CN109468596B CN 109468596 B CN109468596 B CN 109468596B CN 201910013481 A CN201910013481 A CN 201910013481A CN 109468596 B CN109468596 B CN 109468596B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The invention relates to the technical field of evaporation, in particular to an evaporation crucible and an evaporation device. The crucible is used for solving the problems that the temperature of the middle part of the crucible is high, the temperature of the two sides of the crucible is low, the evaporation rate of the middle nozzle is high, and the evaporation rate of the nozzles on the two sides of the crucible is low, so that the evaporation is not uniform. An evaporation crucible comprises a crucible main body and a cover body arranged on the crucible main body, wherein the cover body is provided with a plurality of nozzles which are arranged at equal intervals along a straight line; a baffle is arranged in the crucible main body, and the baffle is horizontally arranged and detachably connected with the crucible main body; steam channels with the same structure are arranged between the baffle and each nozzle, and the lower port of each steam channel is connected with the upper surface of the baffle; the area of the baffle plate overlapped with the lower port of each steam channel is provided with a plurality of steam overflow holes, and the total area of the projection of the steam overflow holes correspondingly communicated with each other in the vertical direction is gradually increased from the middle nozzle to the nozzles at the two sides in the arrangement direction of the nozzles.
Description
Technical Field
The invention relates to the technical field of evaporation, in particular to an evaporation crucible and an evaporation device.
Background
An Organic Light Emitting Diode (OLED) is a device that emits Light from an Organic material under the action of an electric field, and a metal electrode and an Organic Light Emitting material are generally formed on a substrate by evaporation during fabrication.
Disclosure of Invention
The embodiment of the invention provides an evaporation crucible and an evaporation device, which are used for solving the problems that the middle temperature of the crucible is high, the temperatures of two sides of the crucible are low, so that the evaporation rate of a middle nozzle is high, and the evaporation rates of two side nozzles are low, so that the evaporation is not uniform.
In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:
in a first aspect, an evaporation crucible is provided, which comprises a crucible main body and a cover body arranged on the crucible main body, wherein a plurality of nozzles are arranged on the cover body, and the nozzles are arranged at equal intervals along a straight line; the crucible body is internally provided with a baffle which is horizontally arranged and divides the space in the crucible body into an upper space and a lower space, and the baffle is detachably connected with the crucible body; steam channels with the same structure are arranged between the baffle and each nozzle, each steam channel is arranged at the position opposite to the baffle and each nozzle in the vertical direction, is correspondingly communicated with the nozzle through an upper port and is connected with the upper surface of the baffle through a lower port; the steam channel is characterized in that a plurality of steam overflow holes are formed in the overlapped area of the baffle and the lower port of each steam channel, and the total area of the projection of the steam overflow holes correspondingly communicated with each other in the vertical direction is gradually increased from the middle nozzle to the nozzles on the two sides in the arrangement direction of the plurality of nozzles.
Optionally, in an area where the lower port of each steam channel overlaps with the baffle, the projection area of each steam overflow hole in the vertical direction is the same, and in the arrangement direction of the plurality of nozzles, the number of the steam overflow holes correspondingly communicated with each other gradually increases from the nozzle in the middle to the nozzles on both sides; or, in the overlapped area of the lower port of each steam channel and the baffle, the number of the steam overflow holes is the same, and in the arrangement direction of the plurality of nozzles, the projection area of the steam overflow holes correspondingly communicated with each other in the vertical direction is gradually increased from the nozzle in the middle to the nozzles on the two sides.
Optionally, each steam channel is tapered from bottom to top, and a projection of each nozzle in the vertical direction is located at a central position of an overlapping region of a lower port of the steam channel and the baffle plate, which are correspondingly communicated with the nozzle.
Optionally, each steam channel is enclosed by a conical plate with an opening at the top.
Optionally, the conical plates and the baffle are connected into an integral structure, and the top end of each conical plate is respectively abutted against the lower end of the nozzle correspondingly communicated with the conical plate.
Optionally, the nozzle and the tapered plate are both hollow structures, and heating wires are arranged in the hollow structures.
Optionally, a groove is formed in one circumference of the side of the crucible main body, the edge of the baffle is embedded in the groove, the baffle is formed by connecting a plurality of sub-baffles in a retractable manner in the horizontal direction, and when the sub-baffles are in an expanded state, two adjacent sub-baffles have an overlapping area in the vertical direction.
Optionally, the cover body and the nozzle are connected into an integral structure.
Optionally, the crucible main part is the cuboid structure, the lid is the rectangle, and is a plurality of the nozzle is followed the extending direction on long limit of rectangle is equidistant to be arranged.
Optionally, the baffle and the tapered plate are made of one or more of stainless steel, aluminum oxide, titanium and boron nitride.
In a second aspect, an embodiment of the present invention provides an evaporation apparatus, including the evaporation crucible as described above.
The embodiment of the invention provides an evaporation crucible and an evaporation device, wherein a steam channel is arranged between a baffle and a nozzle, and a plurality of steam overflow holes are arranged in the overlapped area of the lower port of each steam channel and the baffle, compared with the prior art that the steam overflow holes are arranged on the whole baffle, the evaporation crucible can collect steam in each steam channel, improve the steam pressure of the steam in the diversion process, guide the steam to each nozzle under the diversion action of the steam channel, and spray out through the nozzle, thereby improving the utilization rate of evaporation materials, and because the baffles are horizontally arranged and the structures of the steam channels are the same, the areas of the overlapped areas of the lower port of each steam channel and the baffle are the same, and the steam pressure of the evaporation materials entering each steam channel is the same under the condition that the overflow rates of the steam overflow holes correspondingly communicated with the nozzles are the same, and because in the array orientation of nozzle, from nozzle in the middle to nozzle of both sides, the total area of the projection of the steam overflow hole that each corresponds the intercommunication in vertical direction increases gradually, therefore, can reduce the steam pressure in the steam passageway that corresponds the intercommunication with nozzle in the middle, increase the steam pressure in the steam passageway that corresponds the intercommunication with nozzle of both sides, thereby can reach the evaporation coating rate that increases the nozzle of both sides, reduce the technical effect of the evaporation coating rate of nozzle in the middle, can be used to solve that the crucible middle part temperature is high both sides low temperature among the evaporation coating process, and make the evaporation coating rate of middle nozzle big, the evaporation coating rate of both sides nozzle is little leads to the inhomogeneous problem of evaporation coating.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a side view of an evaporation crucible according to the related art;
FIG. 2 is a schematic structural view of a vapor overflow hole formed in a baffle plate of an evaporation crucible provided in the related art;
FIG. 3 is a side view of an evaporation crucible according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a vapor overflow hole formed in an overlapping region of a baffle plate and a tapered plate in an evaporation crucible according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a baffle plate detachably connected to a crucible body according to an embodiment of the present invention;
FIG. 6 is a schematic structural view of a vapor overflow hole formed in an overlapping region of a baffle plate and a tapered plate in an evaporation crucible according to an embodiment of the present invention;
fig. 7 is a schematic structural view of a nozzle and a heating wire arranged in a hollow structure of a tapered plate according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless otherwise explicitly stated or limited. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the existing evaporation process, due to the problems of high price, low utilization rate and the like of evaporation materials, the production cost is high, and especially organic luminescent materials are adopted.
The structure of the evaporation crucible is schematically shown in fig. 1 and fig. 2, and comprises a crucible main body 1 and a cover body 2 arranged on the crucible main body 1, wherein the cover body 2 is provided with a plurality of nozzles 3, the plurality of nozzles 3 are arranged along a straight line at equal intervals, a baffle 4 is arranged in the crucible main body 1, the baffle 4 divides the space in the crucible main body 1 into an upper space and a lower space, and a steam overflow hole 41 is arranged on the baffle 4. In the evaporation process, the temperature of the middle part of the crucible body 1 is higher, the temperatures of the two sides are lower, and the steam overflow holes 41 arranged on the baffle 4 are uniformly distributed, so that the material evaporation rate of the middle nozzle is higher than that of the nozzles at the two sides, the thickness of a film layer formed by evaporation is not uniform, and the light-emitting characteristic is influenced.
In view of this, the embodiment of the present invention provides an evaporation crucible, referring to fig. 3 and 4, comprising a crucible main body 1, and a cover body 2 arranged on the crucible main body 1, wherein a plurality of nozzles 3 are arranged on the cover body 2, and a plurality of nozzles 3 are arranged at equal intervals along a straight line; a baffle 4 is arranged in the crucible main body 1, the baffle 4 is horizontally arranged to divide the space in the crucible main body 1 into an upper space and a lower space, and the baffle 4 is detachably connected with the crucible main body 1; steam channels 51 with the same structure are arranged between the baffle 4 and each nozzle 3, each steam channel 51 is arranged at the position opposite to the baffle 4 and each nozzle 3 in the vertical direction, is correspondingly communicated with the nozzle 3 through an upper port and is connected with the upper surface of the baffle 4 through a lower port; the area a of the baffle 4 overlapping the lower port of each steam channel 51 is provided with a steam overflow hole 41, and the total area of the projection of the steam overflow hole 41 corresponding to each steam overflow hole increases gradually from the middle nozzle 3 to the nozzles 3 at both sides in the arrangement direction of the plurality of nozzles 3.
The specific structure of the crucible body 1 is not limited, and for an evaporation crucible, the temperature in the middle of the crucible body 1 is higher, and the temperatures on the two sides are lower during evaporation, so that the evaporation rate of the material in the middle nozzle is higher than that of the material in the nozzles on the two sides, and the invention is applicable.
In an alternative embodiment of the present invention, as shown in fig. 3, the crucible main body 1 has a rectangular parallelepiped structure, the lid body 2 has a rectangular shape, and the plurality of nozzles 3 are arranged at equal intervals along the extending direction of the long side of the rectangular shape.
The lid body 2 and the nozzle 3 may be formed integrally or may be formed separately.
In one embodiment of the present invention, the cap 2 and the nozzle 3 are connected as a single structure. The situation that sealing is not tight can be avoided from occurring easily in the connection process when the cover body 2 and the nozzle 3 are connected in a non-integrated structure, so that the connection sealing performance can be ensured.
In the actual evaporation process, the crucible body 1 is used for containing evaporation materials and needs to have certain strength and heat conductivity. Therefore, the material of the crucible body 1 comprises one or more mixed materials of stainless steel, aluminum oxide, titanium and boron nitride.
Similarly, the materials of the cover body 2, the nozzle 3 and the baffle 4 may also include one or more of stainless steel, aluminum oxide, titanium and boron nitride.
The baffle 4 divides the space in the crucible body 1 into an upper space and a lower space, and can increase the vapor pressure of the evaporation material, so that vapor molecules of the evaporation material overflow through the vapor overflow hole 41 arranged on the baffle 4, move upwards along the vapor channel 51 to the nozzle 3, and are sprayed out through the nozzle 3.
The detachable connection between the crucible body 1 and the baffle 4 is not particularly limited, and the side wall of the crucible body 1 may be provided with a support member, the baffle 4 may be placed on the support member, or the crucible body 1 and the baffle 4 may be provided with a fastener, and the baffle 4 and the side wall of the crucible body 1 may be detachably connected by the fastener.
In an embodiment of the present invention, referring to fig. 5, a groove 11 is formed on a periphery of a side portion of the crucible main body 1, an edge of the baffle 4 is embedded in the groove 11, the baffle 4 is formed by connecting a plurality of sub-baffles 42 in a retractable manner in a horizontal direction, and when the plurality of sub-baffles 42 are in an expanded state, two adjacent sub-baffles 42 have an overlapping region in a vertical direction.
In the embodiment of the present invention, the baffle plate 4 is fitted to the side wall of the crucible main body 1, whereby the sealing property of the joint between the baffle plate 4 and the crucible main body 1 can be increased, and the vapor pressure of the vapor deposition material can be further increased. In addition, since the baffle 4 is formed by connecting a plurality of sub-baffles 42 in a retractable manner in the horizontal direction, at least one of the plurality of sub-baffles 42 may be retracted in the horizontal direction when detached. In order to ensure the sealing performance of the baffle 4 itself, when a plurality of the sub-baffles are in the unfolded state, two adjacent sub-baffles 42 have an overlapping region in the vertical direction.
Specifically, the plurality of sub-barriers 42 may be connected by inserting and withdrawing to achieve the contraction.
The fact that the total area of the projections of the steam overflow holes 41 correspondingly communicated with each other in the vertical direction gradually increases from the middle nozzle 3 to the nozzles 3 on both sides means that the sum of the areas of the projections of each of the steam overflow holes 41 correspondingly communicated with each other in the vertical direction gradually increases from the middle nozzle 3 to the nozzles 3 on both sides. In this way, in the case where the areas a where the lower ports of the steam passages 51 communicating with the respective nozzles 3 overlap with the baffle 4 are the same, the overflow rate of the steam overflow holes 41 communicating with the middle nozzle 3 can be reduced, the overflow rate of the steam overflow holes 41 communicating with the nozzles 3 on both sides can be increased, while in the case where the structures of the respective steam passages 51 are the same, and in the case where the overflow rates of the steam overflow holes 41 communicating with the respective steam passages 51 are the same, the same steam pressure can be maintained in the respective steam passages 51, whereas in the evaporation crucible provided in the embodiment of the present invention, the total area of the projections of the respective correspondingly communicating steam overflow holes 41 in the vertical direction gradually increases from the middle nozzle to the nozzles on both sides in the arrangement direction of the nozzles 3, that is, from the middle nozzle 3 to the nozzles 3 on both sides, the overflow rate of the steam entering through the steam overflow holes 41 communicating with the steam passages 51 is gradually increased, so that the steam pressure in the steam passages 51 communicating with the middle nozzle 3 can be reduced, the steam pressure in the steam passages 51 communicating with the nozzles 3 on both sides can be increased, the evaporation rate of the middle nozzle can be reduced, and the evaporation rate of the nozzles on both sides can be increased.
An embodiment of the present invention provides an evaporation crucible, as shown in fig. 3 and 4, a steam channel 51 is provided between a baffle plate 4 and a nozzle 3, and a plurality of steam overflow holes 41 are provided in an area a where a lower port of each steam channel 51 and the baffle plate 4 overlap, compared with the related art in which steam overflow holes are provided in the whole baffle plate 4, steam can be collected in each steam channel 51, steam pressure during a diversion process can be increased, steam is guided to each nozzle 3 by a diversion function of the steam channel 51, and is ejected through the nozzle 3, utilization rate of evaporation material can be increased, and since the baffle plate 4 is horizontally provided and each steam channel 51 has the same structure, an area of the area a where the lower port of each steam channel 51 and the baffle plate 4 overlap is the same. When the overflow rates of the vapor overflow holes 41 communicating with the nozzles are all the same, the vapor pressure of the vapor deposition material entering the vapor passages 51 is also the same. And because in the direction of arrangement of the spray nozzles 3, from the middle spray nozzle 3 to the spray nozzles 3 on both sides, the total area of the projection of the steam overflow hole 41 correspondingly communicated with each other in the vertical direction gradually increases, therefore, the steam pressure in the steam channel 51 correspondingly communicated with the middle spray nozzle 3 can be reduced, and the steam pressure in the steam channel 51 correspondingly communicated with the spray nozzles 3 on both sides can be increased, thereby achieving the technical effects of increasing the evaporation rate of the spray nozzles 3 on both sides and reducing the evaporation rate of the spray nozzle 3 in the middle, and being capable of solving the problems that the temperature in the middle of the crucible is high, the temperatures on both sides are low, the evaporation rate of the spray nozzle in the middle is high, and the evaporation rates of the spray nozzles on both sides are low, so that.
In the arrangement direction of the plurality of nozzles 3, from the middle nozzle 3 to the nozzles 3 on both sides, the total area of the projections of the steam overflow holes 41 correspondingly communicated with each other in the vertical direction gradually increases, and various implementations are possible.
In a first possible implementation manner, as shown in fig. 3 and 4, in a region where the lower port of each steam channel 51 and the baffle 4 overlap, the projected area of each steam overflow hole 41 in the vertical direction is the same, and in the arrangement direction of the plurality of nozzles 3, the number of the steam overflow holes 41 which respectively correspond to and communicate with the nozzles 3 at the two sides is gradually increased from the middle nozzle 3.
In this possible implementation, by making the projected area of each steam overflow hole 41 in the vertical direction in the region where the lower port of each steam channel 51 and the baffle 4 overlap each other the same, and in the arrangement direction of the plurality of nozzles 3, from the middle nozzle 3 to the nozzles 3 on both sides, the number of the respective correspondingly communicated steam overflow holes 41 gradually increases, that is, from the middle nozzle 3 to the nozzles 3 on both sides, the distribution density of the respective correspondingly communicated steam overflow holes 41 in the region where the lower port of the steam channel 51 and the baffle 4 overlap each other gradually increases, the total area of the respective correspondingly communicated steam overflow holes 41 projected in the vertical direction gradually increases from the middle nozzle 3 to the nozzles 3 on both sides.
In a second possible implementation manner, as shown in fig. 6, in the area a where the lower end of each steam channel 51 and the baffle 4 overlap, the number of the steam overflow holes 41 is the same, and in the arrangement direction of the plurality of nozzles 3, from the middle nozzle 3 to the nozzles 3 on both sides, the projection area of the steam overflow hole 41, which is correspondingly communicated with each other, in the vertical direction gradually increases.
It should be noted that, in this possible implementation manner, from the middle nozzle 3 to the nozzles 3 on both sides, the projection areas of the steam overflow holes 41 correspondingly communicated with each other in the vertical direction gradually increase, which means that the projection areas of the steam overflow holes 41 correspondingly communicated with the nozzles 3 on both sides in the vertical direction are larger than the projection areas of the steam overflow holes 41 correspondingly communicated with the nozzle 3 in the middle in the vertical direction, and the projection areas of each steam overflow hole 41 correspondingly communicated with the same nozzle in the vertical direction are not limited, and the projection areas of each steam overflow hole 41 correspondingly communicated with the same nozzle in the vertical direction may be the same or different.
In this possible implementation, by making the number of the steam overflow holes 41 in the region where the lower end of each steam passage 51 and the baffle 4 overlap the same, the projected area of the steam overflow holes 41 corresponding to each communication in the vertical direction gradually increases from the middle nozzle 3 to the nozzles 3 on both sides in the arrangement direction of the plurality of nozzles 3, and also the total area of the projection of the steam overflow holes 41 corresponding to each communication in the vertical direction gradually increases from the middle nozzle 3 to the nozzles 3 on both sides.
In a third possible implementation manner, in the arrangement direction of the plurality of nozzles 3, from the middle nozzle 3 to the nozzles 3 on both sides, the number of the steam overflow holes 41 respectively corresponding to the nozzles, and the projection area of the steam overflow holes 41 in the vertical direction are gradually increased.
It should be noted that, in this possible implementation manner, from the middle nozzle 3 to the nozzles 3 on both sides, the projection areas of the steam overflow holes 41 correspondingly communicated with each other in the vertical direction gradually increase, which means that the projection areas of the steam overflow holes 41 correspondingly communicated with the nozzles 3 on both sides in the vertical direction are larger than the projection areas of the steam overflow holes 41 correspondingly communicated with the nozzle 3 in the middle in the vertical direction, and the projection areas of the steam overflow holes 41 correspondingly communicated with the same nozzle in the vertical direction are not limited, and the projection areas of the steam overflow holes 41 correspondingly communicated with the same nozzle in the vertical direction may be the same or different.
In this possible implementation, the number of the steam overflow holes 41 corresponding to the nozzles and the projected area in the vertical direction are changed according to the positions of the nozzles 3, and the total area of the projections in the vertical direction of the steam overflow holes 41 corresponding to each nozzle from the middle nozzle 3 to the nozzles 3 on both sides can be gradually increased.
In the first and second possible implementations, compared with the third implementation, by making the projected area of each steam overflow hole 41 correspondingly communicated with the same nozzle 3 in the vertical direction the same, the distribution of steam molecules entering the same steam channel 51 can be more uniform and stable.
The specific structure of the steam passage 51 is not limited as long as the steam can be guided from the steam overflow hole 41 to the nozzle 3.
In an embodiment of the present invention, as shown in fig. 3, each of the steam passages 51 is tapered from bottom to top, and a projection of each nozzle 3 in a vertical direction is located at a central position of a region a where a lower port of the steam passage 51 and the baffle 4, which are correspondingly communicated, overlap.
In the embodiment of the present invention, each of the steam channels 51 is tapered from bottom to top, and the projection of each nozzle 3 in the vertical direction is located at the center of the area a where the lower port of the steam channel 51 and the baffle 4, which are correspondingly communicated with each other, overlap, so that as the steam moves upwards in the steam channel 51, the steam pressure of the evaporation material can be gradually increased, which is beneficial to controlling the size and stability of the evaporation rate.
The specific structure of the steam passage is not limited as long as the steam can be guided to the nozzle 3.
In an embodiment of the present invention, with reference to fig. 3, each steam channel 51 is enclosed by a conical plate 5 having an opening at the top, and each conical plate 5 is connected with a baffle 4 to form an integral structure, and the top end of each conical plate 5 abuts against the lower end of the nozzle 3 correspondingly communicated therewith.
In the embodiment of the invention, the smooth inclined surface of the conical plate 5 can reduce the contact area between the inner wall and steam molecules, and bind irregularly moving molecules in the conical area, so that the distance between the steam molecules and the nozzle 3 can be reduced, and the control of the size and stability of the movement rate of the steam molecules is facilitated.
Wherein, in order to improve the thermal conductivity, the material of the conical plate comprises one or a mixture of several of stainless steel, aluminum oxide, titanium and boron nitride.
It should be noted that, in the actual coating by vaporization process, the coating by vaporization material can partially flow back to crucible body 1 after 3 mouths of nozzle cool off, and when the reheating evaporation, can carry out the coating by vaporization with the form of macromolecule or molecular group, can influence the homogeneity of rete, and at the material through once heating coating by vaporization, can often take place the degeneration, and these backflow materials of coating by vaporization again can make the rete performance receive the influence.
In this regard, in a further embodiment of the invention, referring to fig. 7, the nozzle 3 and the conical plate 5 are both hollow structures in which heating wires 6 are arranged.
The heating wire 6 can also be called as heating wire or heating wire. When the heating wire is used, the nozzle and the conical plate can be heated by electrifying the heating wire, and the heating temperature of the heating wire is controlled, so that the temperature of steam molecules at the nozzle and the conical plate can be kept consistent with the bottom temperature of the crucible main body, and the steam molecules can be prevented from cooling to generate backflow or block the nozzle.
In particular, the heating wire 6 may be a heating wire, i.e. a heating of the object by means of thermal energy generated by joule effect of an electric current flowing through the conductor.
As shown in fig. 7, the heater wire 6 may be spirally wound in a hollow structure, so that the contact area between the heater wire 6 and the nozzle 3 and the tapered plate 5 can be increased.
The embodiment of the invention provides a vapor deposition device, which comprises the vapor deposition crucible.
The beneficial effects of the evaporation device provided by the embodiment of the invention are the same as those of the evaporation crucible provided by the technical scheme, and are not repeated herein.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. An evaporation crucible is characterized by comprising a crucible main body and a cover body arranged on the crucible main body, wherein a plurality of nozzles are arranged on the cover body and are arranged at equal intervals along a straight line;
the crucible body is internally provided with a baffle which is horizontally arranged and divides the space in the crucible body into an upper space and a lower space, and the baffle is detachably connected with the crucible body;
steam channels with the same structure are arranged between the baffle and each nozzle, each steam channel is arranged at the position opposite to the baffle and each nozzle in the vertical direction, is correspondingly communicated with the nozzle through an upper port and is connected with the upper surface of the baffle through a lower port;
a plurality of steam overflow holes are formed in the overlapped area of the baffle and the lower port of each steam channel, and the total area of the projection of the steam overflow holes which are correspondingly communicated from the middle nozzle to the nozzles on the two sides in the arrangement direction of the nozzles is gradually increased;
each steam channel is tapered from bottom to top, and the projection of each nozzle in the vertical direction is located at the central position of the overlapping area of the lower port of the steam channel and the baffle plate which are correspondingly communicated with the nozzle.
2. An evaporation crucible according to claim 1, wherein in a region where the lower port of each of the steam passages and the baffle plate overlap, the projected area of each of the steam overflow holes in the vertical direction is the same, and the number of the steam overflow holes which are respectively communicated with each other gradually increases from the nozzle in the middle to the nozzles on both sides in the arrangement direction of the plurality of nozzles; alternatively, the first and second electrodes may be,
in the overlapped area of the lower port of each steam channel and the baffle, the number of the steam overflow holes is the same, and in the arrangement direction of the plurality of nozzles, the projection area of the steam overflow holes correspondingly communicated with each other in the vertical direction is gradually increased from the nozzle in the middle to the nozzles on the two sides.
3. A vaporization crucible according to claim 1,
each steam channel is formed by enclosing a conical plate with an opening at the top.
4. A vaporization crucible according to claim 3,
the conical plates and the baffle are connected into an integral structure, and the top end of each conical plate is respectively abutted against the lower end of the nozzle correspondingly communicated with the conical plate.
5. A vaporization crucible according to claim 3 or 4,
the nozzle with the toper board is hollow structure, all be provided with the heater strip in the hollow structure.
6. A vaporization crucible according to claim 1,
the crucible comprises a crucible body and is characterized in that a groove is formed in the periphery of the side portion of the crucible body, the edge of each baffle is embedded in the groove, each baffle is formed by connecting a plurality of sub baffles in a retractable mode in the horizontal direction, and when the sub baffles are in an unfolded state, two adjacent sub baffles are provided with overlapping areas in the vertical direction.
7. A vaporization crucible according to claim 1,
the cover body and the nozzle are connected into an integral structure.
8. A vaporization crucible according to claim 1,
the crucible main part is the cuboid structure, the lid is the rectangle, and is a plurality of the nozzle is followed the extending direction on long limit of rectangle is equidistant to be arranged.
9. A vaporization crucible according to claim 3 or 4,
the baffle and the conical plate are made of one or a mixture of stainless steel, aluminum oxide, titanium and boron nitride.
10. An evaporation apparatus comprising the evaporation crucible according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910013481.2A CN109468596B (en) | 2019-01-07 | 2019-01-07 | Evaporation crucible and evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910013481.2A CN109468596B (en) | 2019-01-07 | 2019-01-07 | Evaporation crucible and evaporation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109468596A CN109468596A (en) | 2019-03-15 |
| CN109468596B true CN109468596B (en) | 2020-11-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201910013481.2A Active CN109468596B (en) | 2019-01-07 | 2019-01-07 | Evaporation crucible and evaporation device |
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| CN112553578B (en) * | 2019-09-26 | 2022-01-14 | 宝山钢铁股份有限公司 | Vacuum coating device with flow-inhibiting nozzle |
| CN111455322B (en) * | 2020-05-09 | 2022-04-26 | Tcl华星光电技术有限公司 | Crucible device and vapor deposition device |
| CN111424240B (en) * | 2020-05-29 | 2022-06-03 | 云谷（固安）科技有限公司 | Evaporation crucible |
| CN114075649B (en) * | 2020-12-24 | 2023-12-19 | 广东聚华印刷显示技术有限公司 | Crucible nozzle structure, crucible device and evaporation device |
| CN113088936B (en) * | 2021-03-31 | 2023-04-07 | 长江存储科技有限责任公司 | Film layer growth equipment and method |
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| CN104762600B (en) * | 2015-04-20 | 2017-05-10 | 京东方科技集团股份有限公司 | Evaporated crucible and evaporation device |
| CN206015075U (en) * | 2016-08-24 | 2017-03-15 | 京东方科技集团股份有限公司 | Evaporation crucible and evaporated device |
| CN206033867U (en) * | 2016-10-14 | 2017-03-22 | 京东方科技集团股份有限公司 | Coating by vaporization crucible and evaporation equipment |
| TWI607103B (en) * | 2016-11-08 | 2017-12-01 | 財團法人工業技術研究院 | Deposition source and deposition apparatus having the same |
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