CN1113983C - 用处理液对被处理元件进行电化学处理的方法和设备 - Google Patents

用处理液对被处理元件进行电化学处理的方法和设备 Download PDF

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Publication number
CN1113983C
CN1113983C CN97193534A CN97193534A CN1113983C CN 1113983 C CN1113983 C CN 1113983C CN 97193534 A CN97193534 A CN 97193534A CN 97193534 A CN97193534 A CN 97193534A CN 1113983 C CN1113983 C CN 1113983C
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CN
China
Prior art keywords
brush
electrodes
treated
polarity
transport
Prior art date
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Expired - Fee Related
Application number
CN97193534A
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English (en)
Chinese (zh)
Other versions
CN1215439A (zh
Inventor
罗尔夫·施罗德
莱因哈德·施奈德
洛伦茨·科普
托玛斯·赖德威斯克
霍斯特·斯蒂芬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
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Atotech Deutschland GmbH and Co KG
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Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of CN1215439A publication Critical patent/CN1215439A/zh
Application granted granted Critical
Publication of CN1113983C publication Critical patent/CN1113983C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/008—Current shielding devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Electrotherapy Devices (AREA)
CN97193534A 1996-03-29 1997-03-26 用处理液对被处理元件进行电化学处理的方法和设备 Expired - Fee Related CN1113983C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19612555.3 1996-03-29
DE19612555A DE19612555C2 (de) 1996-03-29 1996-03-29 Verfahren zur selektiven elektrochemischen Behandlung von Leiterplatten und Vorrichtung zur Durchführung des Verfahrens

Publications (2)

Publication Number Publication Date
CN1215439A CN1215439A (zh) 1999-04-28
CN1113983C true CN1113983C (zh) 2003-07-09

Family

ID=7789861

Family Applications (1)

Application Number Title Priority Date Filing Date
CN97193534A Expired - Fee Related CN1113983C (zh) 1996-03-29 1997-03-26 用处理液对被处理元件进行电化学处理的方法和设备

Country Status (10)

Country Link
US (1) US6071400A (cg-RX-API-DMAC7.html)
EP (1) EP0874920B1 (cg-RX-API-DMAC7.html)
JP (1) JP3913782B2 (cg-RX-API-DMAC7.html)
CN (1) CN1113983C (cg-RX-API-DMAC7.html)
AT (1) ATE185856T1 (cg-RX-API-DMAC7.html)
CA (1) CA2250020A1 (cg-RX-API-DMAC7.html)
DE (2) DE19612555C2 (cg-RX-API-DMAC7.html)
ES (1) ES2138450T3 (cg-RX-API-DMAC7.html)
TW (1) TW561202B (cg-RX-API-DMAC7.html)
WO (1) WO1997037062A1 (cg-RX-API-DMAC7.html)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19749832A1 (de) * 1997-07-01 1999-01-07 Thomson Brandt Gmbh Verfahren zum Entfernen und/oder Aufbringen von leitendem Material
EP0889680A3 (en) * 1997-07-01 2000-07-05 Deutsche Thomson-Brandt Gmbh Method of removing and/or applying conductive material
DE19736352C1 (de) 1997-08-21 1998-12-10 Atotech Deutschland Gmbh Vorrichtung zur Kontaktierung von flachem Behandlungsgut in Durchlaufgalvanisieranlagen
DE19837973C1 (de) * 1998-08-21 2000-01-20 Atotech Deutschland Gmbh Vorrichtung zum partiellen elektrochemischen Behandeln von stabförmigem Behandlungsgut
DE19840471A1 (de) * 1998-09-04 2000-03-09 Schmid Gmbh & Co Geb Einrichtung zum Abtrag einer Beschichtung von Gegenständen
DE19951325C2 (de) * 1999-10-20 2003-06-26 Atotech Deutschland Gmbh Verfahren und Vorrichtung zum elektrolytischen Behandeln von elektrisch gegeneinander isolierten, elektrisch leitfähigen Strukturen auf Oberflächen von elektrisch isolierendem Folienmaterial sowie Anwendungen des Verfahrens
DE19951324C2 (de) * 1999-10-20 2003-07-17 Atotech Deutschland Gmbh Verfahren und Vorrichtung zum elektrolytischen Behandeln von elektrisch leitfähigen Oberflächen von gegeneinander vereinzelten Platten- und Folienmaterialstücken sowie Anwendung des Verfahrens
DE10007435A1 (de) * 2000-02-18 2001-08-23 Enthone Omi Deutschland Gmbh Verfahren zum Galvanisieren eines mit einem elektrisch leitenden Polymer beschichteten Werkstücks
DE10043816C1 (de) * 2000-09-06 2002-05-16 Egon Huebel Vorrichtung zur elektrochemischen Behandlung von Gut
DE10043817C2 (de) * 2000-09-06 2002-07-18 Egon Huebel Anordnung und Verfahren für elektrochemisch zu behandelndes Gut
DE10234705B4 (de) * 2001-10-25 2008-01-17 Infineon Technologies Ag Galvanisiereinrichtung und Galvanisiersystem zum Beschichten von bereits leitfähig ausgebildeten Strukturen
DE10153171B4 (de) * 2001-10-27 2004-09-16 Atotech Deutschland Gmbh Verfahren und Vorrichtung zum elektrolytischen Behandeln von Teilen in Durchlaufanlagen
US6857880B2 (en) * 2001-11-09 2005-02-22 Tomonari Ohtsuki Electrical connector
DE10207941A1 (de) * 2002-02-17 2003-09-04 Egon Huebel Verfahren und Vorrichtung zur elektrischen Kontaktierung von flachem Gut in elektrolytischen Anlagen
AU2003226114A1 (en) * 2002-03-29 2003-10-13 Astropower, Inc. Method and apparatus for electrochemical processing
US8199453B2 (en) * 2003-03-17 2012-06-12 Illinois Tool Works Inc. Shaft current control brush ring assembly
DE10342512B3 (de) * 2003-09-12 2004-10-28 Atotech Deutschland Gmbh Vorrichtung und Verfahren zum elektrolytischen Behandeln von elektrisch gegeneinander isolierten, elektrisch leitfähigen Strukturen auf Oberflächen von bandförmigem Behandlungsgut
DE102005038449B4 (de) * 2005-08-03 2010-03-25 Gebr. Schmid Gmbh & Co. Einrichtung zur Behandlung von Substraten, insbesondere zur Galvanisierung von Leiterplatten, und Verfahren
JP4878866B2 (ja) * 2006-02-22 2012-02-15 イビデン株式会社 めっき装置及びめっき方法
US20070278093A1 (en) * 2006-06-02 2007-12-06 Barnard Michael P Electrical conductive contact ring for electroplating or electrodeposition
CN102234831A (zh) * 2010-04-26 2011-11-09 鸿吉机械有限公司 电镀设备、电镀设备的保养方法与电镀方法
US10184189B2 (en) 2016-07-18 2019-01-22 ECSI Fibrotools, Inc. Apparatus and method of contact electroplating of isolated structures
TW201827655A (zh) * 2016-12-09 2018-08-01 德商雷納科技有限公司 連續式分離器及其組件
US11713514B2 (en) * 2019-08-08 2023-08-01 Hutchinson Technology Incorporated Systems for electroplating and methods of use thereof
CN110725001B (zh) * 2019-10-30 2023-11-17 昆山金易得环保科技有限公司 用于退锡设备的导电刷及包含其的退锡设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4093520A (en) * 1976-02-17 1978-06-06 Bell Telephone Laboratories, Incorporated Process for gold plating
US4359366A (en) * 1981-07-27 1982-11-16 Micro-Plate, Inc. Plating cell with continuous cathode contact and method
JPS62136813A (ja) * 1985-12-11 1987-06-19 Hitachi Ltd 処理装置
JPS63297588A (ja) * 1987-05-29 1988-12-05 Sagami Shokai:Kk 孤立した導電体の電解メッキ法
US5114558A (en) * 1989-02-15 1992-05-19 Kadija Igor V Method and apparatus for manufacturing interconnects with fine lines and spacing
DE3939681A1 (de) * 1989-12-01 1991-06-06 Schering Ag Verfahren zur steuerung des ablaufes von galvanischen anlagen, sowie zur durchfuehrung des verfahrens dienender anordnung
DE4033137C1 (cg-RX-API-DMAC7.html) * 1990-10-18 1991-11-14 Wendt Gmbh, 4005 Meerbusch, De
DE4123985C2 (de) * 1991-07-19 1994-01-27 Hoellmueller Maschbau H Vorrichtung zur elektrolytischen Behandlung von Leiterplatten, insbesondere zur elektrolytischen Beschichtung mit Kupfer
DE4337988A1 (de) * 1993-11-06 1995-05-11 Hoellmueller Maschbau H Verfahren zur Herstellung von Multilayern sowie Vorrichtung zur Durchführung dieses Verfahrens

Also Published As

Publication number Publication date
US6071400A (en) 2000-06-06
DE59700583D1 (de) 1999-11-25
CA2250020A1 (en) 1997-10-09
TW561202B (en) 2003-11-11
EP0874920A1 (de) 1998-11-04
DE19612555C2 (de) 1998-03-19
DE19612555A1 (de) 1997-10-09
HK1015422A1 (en) 1999-10-15
CN1215439A (zh) 1999-04-28
ES2138450T3 (es) 2000-01-01
EP0874920B1 (de) 1999-10-20
JP2000507646A (ja) 2000-06-20
WO1997037062A1 (de) 1997-10-09
JP3913782B2 (ja) 2007-05-09
ATE185856T1 (de) 1999-11-15

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Granted publication date: 20030709

Termination date: 20150326

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