CN111279012B

CN111279012B - Method for manufacturing vapor deposition mask and display device

Info

Publication number: CN111279012B
Application number: CN201780096263.9A
Authority: CN
Inventors: 田中庄介
Original assignee: Sharp Corp
Current assignee: Sharp Corp
Priority date: 2017-10-31
Filing date: 2017-10-31
Publication date: 2022-03-22
Anticipated expiration: 2037-10-31
Also published as: CN111279012A; WO2019087287A1

Abstract

In a frame-shaped part (11c) of a mask frame (11), a third extension part (11c3) between a first extension part (11c1) and a second extension part (11c2) is thinner than a first extension part (11c1) and a second extension part (11c2) to which an alignment piece (14) is fixed, and the third extension part (11c3) is not in contact with the alignment piece (14).

Description

Method for manufacturing vapor deposition mask and display device

Technical Field

The present invention relates to a method for manufacturing an evaporation mask and a display device.

Background

As described in patent document 1, in the vapor deposition mask sheet, a sheet-like mask sheet in which a pattern of vapor deposition holes for vapor deposition of a vapor deposition layer is formed is fixed in a stretched state to a mask frame which is a strong frame-like frame.

As shown in fig. 22, the frame-shaped mask frame 111 has a frame-shaped portion 111c and an outer peripheral portion 111b surrounding the frame-shaped portion 111 c.

The frame-shaped portion 111c is a region surrounding the edge of the frame opening 111a, and is a region for fixing each sheet member mounted on the mask frame 111. The frame-shaped portion 111c has a first extending portion 111c1 and a second extending portion 111c2 facing each other with the frame opening 111a interposed therebetween, and a third extending portion 111c and a fourth extending portion 111c4 facing each other with the frame opening 111a interposed therebetween.

Both end portions of the sheet member, i.e., the cover sheet 112, are inserted and welded into the grooves 111d, and the grooves 111d are formed on the first extension 111c1 and the second extension 111c 2. Both end portions of the sheet member, i.e., the supporting bar 113, are inserted and welded into the grooves 111e, which are formed at the third and fourth extending portions 111c3 and 111c 4.

The top surfaces 111g of the protrusions adjacent to the groove 111d in the first and second extension parts 111c1 and 111c2 are the same height as the top surfaces 111h of the protrusions adjacent to the groove 111e in the third and fourth extension parts 111c3 and 111c 4.

As shown in fig. 23, next, 2 alignment pieces 114, which are sheet members, are attached to the frame-shaped portion 111c so as to extend along both ends of the frame opening 111 a. An alignment mark 114a is provided on each alignment tab 114.

Of the 2 alignment pieces 114, the alignment piece 114a1 is arranged to cover a part of the third extension 111c3, and both ends are laser-welded. Thus, the alignment piece 114a1 is fixed to the top surfaces 111g of the first and second extending portions 111c1 and 111c2 by forming the fixing portions 114b welded at both end portions.

Of the 2 alignment pieces 114, the alignment piece 114a2 is arranged to cover a part of the fourth extension 111c4, and both ends are laser-welded. Thus, the alignment piece 114a2 is fixed to the top surfaces 111g of the first and second extending portions 111c1 and 111c2 by forming the fixing portions 114b welded at both end portions.

Next, a plurality of masking sheets 115, which are sheet members, are mounted between the alignment sheets 114a1 and 114a2, that is, on the frame-shaped portion 111 c.

The mask sheet 115 is provided with a plurality of effective portions 115a, and the effective portions 115a are provided with a plurality of evaporation holes in an array. The evaporation hole is a through hole for forming an evaporation layer on each pixel of the evaporated substrate. The mask sheet 115 needs to be mounted at an accurate position in the mask frame 111, and is thus positioned with reference to the alignment mark 114a of the alignment sheet 114. Both ends of the mask sheet 115 are laser-welded to the top surfaces 111g of the first and second extending portions 111c1 and 111c 2. The vapor deposition mask is completed by fixing a predetermined number of mask sheets 115 to the top surfaces 111g of the first extension portion 111c1 and the second extension portion 111c 2.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication: japanese patent application laid-open No. 2010-135269 "

Disclosure of Invention

Technical problem to be solved by the invention

The vapor deposition mask is cleaned in order to remove foreign matter generated during the production of the vapor deposition mask or to remove vapor deposition particles adhering during the vapor deposition.

Here, as shown in the area AR101 in fig. 23, both end portions of the alignment tab 114a1 are in contact with the top surfaces 111g of the first extension portion 111c1 and the second extension portion 111c 2. The area AR101 is fixed by the fixing portion 114 b. Therefore, the aligning piece 114 is in close contact with the top surfaces 111g of the first extension portion 111c1 and the second extension portion 111c2, and foreign matter is less likely to enter.

On the other hand, the partial area AR102 of the top surface 111h of the third extension 111c3 covered by the alignment tab 114a1 is in contact with the alignment tab 114a1, but is not fixed. Therefore, foreign substances will intrude between the alignment tab 114a1 and the top surface 111h of the third extension 111c 3. However, since the top surface 111h covered with the alignment tab 114a1 is in contact with the alignment tab 114a1, the cleaning liquid is hard to flow and foreign substances are likely to remain.

Similarly, the alignment piece 114a2 fixes and closely contacts the region AR101 in contact with the top surfaces 111g of the first extension 111c1 and the second extension 111c2, and therefore, foreign matter is unlikely to enter.

On the other hand, the area AR102 of the alignment tab 114a2 covering the fourth extension 111c4 is in contact with the alignment tab 114a2, the top surface 111h of the fourth extension 111c, but is not fixed. Therefore, foreign substances will intrude between the alignment tab 114a2 and the top surface 111h of the fourth extension 111c 4. However, since the alignment piece 114a2 contacts the top surface 111h of the fourth extension 111c4, the cleaning liquid is hard to flow and foreign substances are likely to remain.

If foreign matter remains, then, when vapor deposition is performed using a vapor deposition mask, the remaining foreign matter adheres to the vapor deposition substrate.

The present invention has been made in view of the above conventional problems, and an object thereof is to provide a vapor deposition mask having an improved cleaning effect.

Means for solving the problems

In order to solve the above-described problems, an aspect of the present invention provides an evaporation mask including a mask frame having a frame opening, and a plurality of sheet members fixed to the mask frame so as to cover the frame opening, wherein the mask frame has a frame-shaped portion surrounding the frame opening in a frame shape, the frame-shaped portion has a first extending portion, a second extending portion, a third extending portion, and a fourth extending portion, the first extending portion and the second extending portion are arranged in line with the frame opening therebetween and extend in a first direction, the third extending portion and the fourth extending portion are arranged in line with the frame opening therebetween and extend in a second direction, the plurality of sheet members include first sheet members located at end portions among a plurality of sheet members arranged in line with the first direction, and the first sheet members are fixed to top surfaces of the first extending portion and the second extending portion, covering at least a portion of the third extending portion, wherein the third extending portion has a thickness smaller than the thicknesses of the first extending portion and the second extending portion, and does not contact the first sheet member.

In order to solve the above-described problems, a method of manufacturing a display device according to an aspect of the present invention includes a method of manufacturing an evaporation mask having a mask frame provided with a frame opening and a plurality of sheet-like members fixed to the mask frame so as to cover the frame opening, the method including forming the mask frame having a frame-like portion surrounding the frame opening in a frame shape, the frame-like portion having a first extending portion, a second extending portion, a third extending portion, and a fourth extending portion, the first extending portion and the second extending portion being arranged so as to be spaced from the frame opening and extending in a first direction, the third extending portion and the fourth extending portion being arranged so as to be spaced from the frame opening and extending in a second direction, the third extending portion having a thickness smaller than thicknesses of the first extending portion and the second extending portion, the fourth extending portion has a thickness smaller than thicknesses of the first extending portion and the second extending portion, the plurality of sheet members include a plurality of sheet members arranged in the first direction, and the method for manufacturing a vapor deposition mask includes: fixing a first sheet member of the plurality of sheet members arranged in the first direction to the top surfaces of the first extending portion and the second extending portion, which are the end portions in the first direction, so as not to contact the third extending portion while covering at least a part of the third extending portion; fixing a second sheet member of the plurality of sheet members arranged in the first direction to an end opposite to the first sheet member, that is, to top surfaces of the first extending portion and the second extending portion so as not to contact the fourth extending portion while covering at least a part of the fourth extending portion; and a step of fixing, to the mask frame, a plurality of mask sheets, which are provided with a plurality of deposition holes corresponding to pixels of a deposition target substrate, among the plurality of sheet members arranged in the first direction, with reference to alignment marks provided on the first sheet member and the second sheet member, wherein the method for manufacturing a display device includes a deposition step of forming a deposition layer on the pixels of the deposition target substrate by using the deposition mask manufactured by the method for manufacturing a deposition mask.

Effects of the invention

According to an aspect of the present invention, the following effects are achieved: an evaporation mask having an improved cleaning effect can be provided.

Drawings

Fig. 1 is a diagram illustrating a manufacturing process of an organic EL display panel according to embodiment 1.

Fig. 2 is a plan view of a substrate of the organic EL display panel according to embodiment 1.

Fig. 3 is a sectional view of an organic EL display panel forming region of the substrate of fig. 2.

Fig. 4 is a schematic diagram showing a case of a vapor deposition step in forming a vapor deposition layer of the organic EL display device according to embodiment 1.

Fig. 5 is an enlarged view of a part of the active region 3 of embodiment 1.

Fig. 6 is a diagram illustrating a process for producing a vapor deposition mask according to embodiment 1.

Fig. 7(a) is a plan view showing the structure of a mask frame in the vapor deposition mask according to embodiment 1, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Fig. 8(a) is a plan view showing a case where a cover plate is attached to a mask frame in the vapor deposition mask according to embodiment 1, (b) is a sectional view of a line X1 to X1 shown in (a), and (c) is a sectional view of a line Y1 to Y1 shown in (a).

Fig. 9(a) is a plan view showing a state where the stay is attached to the mask frame in the vapor deposition mask according to embodiment 1, (b) is a sectional view of a line X1 to X1 shown in (a), and (c) is a sectional view of a line Y1 to Y1 shown in (a).

Fig. 10(a) is a plan view showing a state where an alignment sheet is attached to a mask frame in a vapor deposition mask according to embodiment 1, (b) is a sectional view of a line X1-X1 shown in (a), and (c) is a sectional view of a line Y1-Y1 shown in (a).

Fig. 11(a) is a plan view in which the vicinity of the mounting portion of the alignment tab shown in fig. 10(a) is enlarged, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Fig. 12(a) is a plan view showing a case where a mask sheet is attached to a mask frame in a vapor deposition mask according to embodiment 1, (b) is a cross-sectional view of a line X1 to X1 shown in (a), and (c) is a cross-sectional view of a line Y1 to Y1 shown in (a).

Fig. 13(a) is a plan view showing a vapor deposition mask according to embodiment 1, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Fig. 14 is a plan view of the mask sheet according to embodiment 1, (B) is an enlarged view of the effective portion shown in (a), (C) is a sectional view taken along line B-B shown in (B), and (d) is a sectional view taken along line C-C shown in (B).

Fig. 15 is a view showing a part of the vapor deposition mask according to embodiment 1 as viewed from the second surface side.

Fig. 16 is a sectional view of a vapor deposition mask and a TFT substrate when vapor deposition is performed in vapor deposition step 1 of embodiment 1.

Fig. 17(a) is a plan view showing a state where an alignment sheet is attached to a mask frame in a vapor deposition mask according to embodiment 2, (b) is a sectional view of a line X1-X1 shown in (a), and (c) is a sectional view of a line Y1-Y1 shown in (a).

Fig. 18(a) is a plan view in which the vicinity of the mounting portion of the alignment tab shown in fig. 17(a) is enlarged, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Fig. 19(a) is a plan view showing a case where a mask sheet is attached to a mask frame in a vapor deposition mask according to embodiment 2, (b) is a cross-sectional view of a line X1 to X1 shown in (a), and (c) is a cross-sectional view of a line Y1 to Y1 shown in (a).

Fig. 20(a) is a plan view showing a vapor deposition mask according to embodiment 2, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Fig. 21 is a view showing a part of the vapor deposition mask according to embodiment 2 when viewed from the second surface side.

Fig. 22(a) is a plan view showing a case where a cover plate and a stay are attached to a mask frame in a conventional vapor deposition mask, (b) is a sectional view of lines X0 to X0 shown in (a), and (c) is a sectional view of lines Y0 to Y0 shown in (a).

Fig. 23(a) is a plan view showing a case where an alignment sheet and a mask sheet are mounted on a mask frame in a conventional vapor deposition mask, (b) is a sectional view of lines X0 to X0 shown in (a), and (c) is a sectional view of lines Y0 to Y0 shown in (a).

Detailed Description

[ embodiment 1]

(outline of the method for manufacturing organic EL display Panel)

Fig. 1 is a diagram illustrating a manufacturing process of an organic EL display panel according to embodiment 1. Fig. 2 is a plan view of substrate 1 of the organic EL panel according to embodiment 1 of the present invention. Fig. 3 is a sectional view of an organic EL display panel forming region of the substrate of fig. 2. Fig. 3 shows a configuration when 18 organic EL display panels are chamfered from one mother glass. The number of organic EL display panels chamfered from one mother glass is not limited to 18, and may be 17 or less or 19 or more.

On the substrate 1, 18 organic EL display panel forming regions 9 are arranged. The organic EL display panel forming region 9 is a region which is cut out from the mother glass and is singulated to form an organic EL display panel.

The substrate 1 includes a TFT substrate (deposition target substrate) 2, an active region 3, a frame-shaped bank 4, and a sealing layer 5.

The active regions 3 are provided in a matrix and 3. The active region 3 is a region in which pixels of RGB, for example, are formed. A region of the organic EL display panel formation region 9 where the active region 3 is formed is a display region 43, and a peripheral region of the organic EL display panel formation region 9 surrounding the active region 3 is a frame region 44. In fig. 2, the frame region 44 is a region outside the region (active region 3) indicated by the broken line in the organic EL display panel formation region 9.

As shown in fig. 1 to 3, first, the TFT substrate 2 is produced in the TFT step S11. The TFT substrate 2 is produced by the following steps: a thin film to be a base of a flexible substrate is formed on a mother glass using a material such as polyimide, a TFT (transistor, driver element), a gate wiring, a source wiring, and other various wirings included in a pixel circuit provided for each pixel are formed by a known method, a purification film (protective film), an interlayer insulating film (planarization film), and the like are formed, and a reflective electrode layer to be an anode and a contact, and a pixel bank (bezel) for defining an ITO layer and a light-emitting region are formed on an inorganic insulating film.

Thereby, a light emitting region is formed in the active region 3.

The purification film prevents peeling of the metal film in the TFT and protects the TFT. The purified film is formed on the mother glass or formed with another layer interposed therebetween, covering the TFT. The purification film is an inorganic insulating film made of silicon nitride, silicon oxide, or the like.

The interlayer insulating film planarizes irregularities on the purification film. An interlayer insulating film is formed on the purification film. The interlayer insulating film is an organic insulating film made of a photosensitive resin such as acrylic or a thermoplastic resin such as polyimide.

In addition, when the active region 3 is formed, a frame-shaped bank 4 surrounding the active region 3 in a frame shape is also formed on the TFT substrate 2. The frame bank 4 is made of a photosensitive resin such as acrylic or a thermoplastic resin such as polyimide.

Next, in the organic EL step S12, an organic EL layer is formed on the reflective electrode layer in each pixel of the TFT substrate 2 (i.e., in the opening of the pixel bank formed in the TFT step S11). The organic EL layer includes a light emitting layer, a hole transport layer, and other functional layers. The light emitting layer emits light of a different color, for example, red, green, or blue for each pixel. At least one of the light-emitting layer and the hole-transporting layer (hereinafter, sometimes referred to as a light-emitting layer or the like) is formed at a predetermined position of each pixel by vapor deposition in vacuum using the vapor deposition mask according to the present embodiment in the vapor deposition step.

The vapor deposition mask used in the vapor deposition step for forming the vapor deposition layer, such as the light-emitting layer and the hole transport layer, which is vapor deposited for each pixel is prepared in advance in the vapor deposition mask preparation step S20 before the vapor deposition step. Further, details of the vapor deposition mask producing process S20 will be described later. The layer formed using the vapor deposition mask is not limited to the light-emitting layer and the hole transport layer, and may be a layer formed for each pixel (that is, in the opening of the pixel bank).

Further, a transparent electrode facing the reflective electrode with the organic EL layer interposed therebetween is formed so as to cover the organic EL layer.

Next, in the sealing step S13, the sealing layer 5 is formed. As an example, the sealing layer 5 may have a three-layer structure in which an inorganic film 6, an organic film 7, and an inorganic film 8 are stacked in this order from the TFT substrate 2 side. Since the frame-like bank 4 is formed, the organic film 7 can be formed to have a thickness of, for example, 1.0 μm.

After the sealing layer 5 is formed, a flexible step S14 is performed. In the flexibility step S14, the glass of the substrate is peeled off and a film or the like serving as a support is attached.

Next, in the singulation step S15, the organic EL display panel formation regions 9 are cut out. Thereby, each organic EL display panel forming region 9 is singulated. Thus, a display panel (organic EL display panel) having flexibility and a special shape is formed.

Next, in the mounting step S16, components such as drivers are mounted on the organic EL display panel forming regions 9 that have been singulated. Thereby, the organic EL display device is completed.

Fig. 4 is a schematic view showing a deposition step in forming a light-emitting layer and the like (a deposition layer such as a light-emitting layer and a hole transport layer deposited for each pixel) of the organic EL display device according to embodiment 1 of the present invention.

In a vapor deposition step for depositing a light-emitting layer or the like, a vapor deposition mask 10 provided with a mask sheet 15 having a plurality of through holes is brought into close contact with the TFT substrate 2, and vapor deposition particles Z (for example, an organic light-emitting material) evaporated by a vapor deposition source 70 are vapor-deposited onto pixels in the TFT substrate 2 over the mask sheet under vacuum. Thereby, a vapor deposition pattern having a pattern corresponding to the through hole of the mask sheet 15 is formed on the TFT substrate 2.

Fig. 5 is an enlarged view of a part of the active region 3 of embodiment 1. In the active region 3, pixels pix contributing to image display are arranged in a matrix. A light-emitting layer 80 is formed on the pixel pix. The peripheral region surrounding the pixel pix is a pixel bank bk.

As an example, in fig. 5, a red pixel Rpix formed with a red light emitting layer 80R emitting red light, a green pixel Gpix having a green light emitting layer 80G emitting green light, and a blue pixel Bpix having a blue light emitting layer 80B emitting blue light become a corrugated tile array. However, the pixel array is not particularly limited to the pantile array, and may be another array such as a stripe array.

The light-emitting layer 80 has a shape in which an opening of the pixel bank bk covering the light-emitting layer 80 is formed.

(vapor deposition mask)

Next, the structure of the vapor deposition mask used in the vapor deposition step and the vapor deposition mask production step S20 will be described.

As shown in fig. 7, the mask frame 11 is a frame-like member provided with a frame opening 11 a. The mask frame 11 is a support for a mask for fixing a plurality of sheet members such as mask sheets. For example, as described later, the sheet-like member fixed to the mask sheet 11 so as to cover the frame opening 11a includes a cover sheet 12 (fig. 8), a support sheet 13 (fig. 9), an alignment sheet 14 (fig. 10 and 11), a mask sheet 15 (fig. 12 and 13), and the like.

The mask frame 11 is made of, for example, an invar material having a thickness of 20mm to 30mm and having a very small thermal expansion. The mask frame 11 is sufficiently thick compared to the mask sheet, and also has high rigidity that can ensure sufficient accuracy even when the mask sheet is stretched and welded.

The mask frame 11 is a frame-like member having a square shape, a rectangular shape, or the like, for example. In the present embodiment, the mask frame 11 is rectangular.

The mask frame 11 has a frame-shaped portion 11c surrounding the frame opening 11a in a frame shape and an outer peripheral portion 11b surrounding the outer periphery of the frame-shaped portion 11 c.

The frame-like portion 11c is a region for contacting and fixing a sheet-like member mounted on the mask frame 11.

The thickness of the outer peripheral portion 11b is smaller than the thickness of the frame-shaped portion 11 c. The outer peripheral portion 11b is a region for reinforcing the frame-shaped portion 11c, and may not be in contact with the sheet-like member. In the present embodiment, the outer peripheral portion 11b does not contact the sheet member.

The frame-like member 11c is, for example, an edge of the frame opening 11a, and is provided so as to surround the frame opening 11a once.

The frame-like portion 11c has a first extension portion 11c1, a second extension portion 11c2, a third extension portion 11c, and a fourth extension portion 11c 4. The first extending portion 11c1 and the second extending portion 11c2 are arranged to face each other with the frame opening 11a interposed therebetween, and extend in the Y direction (first direction: vertical direction on the paper). The third extending portion 11c3 and the fourth extending portion 11c4 are arranged to face each other with the frame opening 11a interposed therebetween, and extend in the X direction (second direction: left-right direction on the paper surface).

The frame opening 11a may be a square, rectangular, or other shape. In the present embodiment, the frame opening 11a is rectangular. The first extending portion 11c1, the second extending portion 11c2, the third extending portion 11c, and the fourth extending portion 11c4 are arranged in a rectangular frame shape.

In the present embodiment, the extending direction (Y direction) of the first extending portion 11c1 and the second extending portion 11c2 is a direction parallel to the longitudinal direction of the frame opening 11a and the mask frame 11. Further, the extending direction (X direction) of the third extending portion 11c3 and the fourth extending portion 11c4 is a direction parallel to the lateral direction orthogonal to the longitudinal direction of the frame opening 11a and the mask frame 11.

The third extension 11c3 and the fourth extension 11c4 are disposed between the first extension 11c1 and the second extension 11c 2. For example, the third extending portion 11c3 is provided between one end of the first extending portion 11c1 and the second extending portion 11c2, and the fourth extending portion 11c4 is provided between the other end of the first extending portion 11c1 and the second extending portion 11c 2.

Grooves 11d for fixing a plurality of cover sheets 12 (fig. 8) arranged in the Y direction are arranged on the first extending portion 11c1 and the second extending portion 11c 2. The grooves 11d are provided for each of the cover sheets 12 (fig. 8) attached to the first extending portion 11c1 and the second extending portion 11c2, and are arranged in the Y direction on the first extending portion 11c1 and the second extending portion 11c2 so as to face each other across the frame opening 11 a.

The regions of the first extending portion 11c1 and the second extending portion 11c2 adjacent to the groove 11d become convex portions, and the top surfaces 11g of the convex portions are arranged in line in the Y direction. The top surface 11g is a plane on which the alignment sheet 114 (fig. 10, 11) or the mask sheet 15 (fig. 12, 13) is fixed. The top surfaces 11g are arranged in the Y direction on the first extension portion 11c1 and the second extension portion 11c2 with the groove 11d therebetween.

Grooves 11e for fixing a plurality of supporting bars 13 (fig. 9) arranged in the X direction are arranged on the third extending portion 11c3 and the fourth extending portion 11c 4. The grooves 11e are provided for each support bar 13 (fig. 9) mounted on the third extending portion 11c3 and the fourth extending portion 11c4, and are arranged in the X direction on the third extending portion 11c3 and the fourth extending portion 11c4 in an opposed manner across the frame opening 11 a.

The regions of the third extending portion 11c3 and the fourth extending portion 11c4 adjacent to the groove 11e become convex portions, and the convex portions have top surfaces 11 h.

The thickness of the regions of the third and fourth extensions 11c3 and 11c4 where the grooves 11e are provided is thinner than the thickness of the regions of the first and second extensions 11c1 and 11c2 where the grooves 11d are provided.

Further, the thickness of the region of the third extension 11c3 and the fourth extension 11c4 where the top surface 11h is provided is thinner than the thickness of the region of the first extension 11c1 and the second extension 11c2 where the top surface 11g is provided.

As described later, at least a part of the third extension 11c3 and the fourth extension 11c4 is overlapped on the alignment sheet 14 when the alignment sheet 114 is fixed on the mask frame 1.

As shown in steps Sa and 8 of fig. 6, a plurality of cover sheets 12 are mounted on the mask frame 11 so as to be aligned in the Y direction and parallel to each other to cover the frame opening 11a (cover sheet mounting step).

The cover sheet 12 is a sheet-like member arranged in the Y direction and fixed to the frame-like portion 11 c. The cover sheet 12 functions as follows: filling gaps between mask sheets, which are later mounted on the mask frame 11, or blocking dummy patterns formed on the mask sheets.

The cover sheet 12 is made of, for example, invar material having a thickness of 30 to 50 μm. The cover sheet 12 is elongated and extends linearly in the X direction from one end to the other end.

When the cover sheet 12 is mounted on the mask frame 11, the both end portions are respectively pulled (pulled) by applying a force in an outward direction (a direction separating from each other), and the both end portions of the cover sheet 12 are arranged in the grooves 11d provided on each of the first extending portion 11c1 and the second extending portion 11c 2. The lid plate 12 is fixed to the frame-like portion 11c by welding the lid plate 12 at the portion disposed in the groove 11d with a laser or the like. Thereby, each covering sheet 12 is fixed in the groove 11d of each of the first extending portion 11c1 and the second extending portion 11c 2. Further, unnecessary portions outside the welded portions in the cover sheet 12 are cut off as necessary.

Next, as shown in step Sb of fig. 6 and fig. 9, support bars 13 (also referred to as support bars) are attached to the mask sheet 11 so as to be aligned in the X direction and parallel to each other, and a cover sheet 12 is attached to the mask sheet 11 (support bar attaching step).

The stay 13 is a sheet-like member arranged in the X direction and fixed to the frame-like portion 11 c. The support strip 13 functions as follows: the mask sheet, which is later mounted on the mask frame 11, is supported so as not to be loosened, or to block the dummy patterns formed on the mask sheet.

The support strips 13 are made of, for example, an invar material having a thickness of 30 to 100 μm. The width of the support strips 13 is, for example, about 8mm to 10mm, determined according to the layout on the substrate on which the panel is arranged. The support strip 13 is elongate and extends linearly from one end to the other end.

When the supporting bar 13 is mounted on the mask frame 11, the both end portions are respectively pulled (pulled) by applying a force in an outward direction (a direction separating from each other), and the both end portions of the supporting bar 13 are disposed in the grooves 11e provided on each of the third extending portion 11c3 and the fourth extending portion 11c 4. The portions of the stay 13 disposed in the grooves 11e are welded by laser or the like, and are fixed. Thereby, each supporting bar 13 is fixed in the groove 11e of each of the third and fourth extending portions 11c3 and 11c 4. And, unnecessary portions outside the welded portions in the stay 13 are cut off as necessary.

As shown in fig. 9(a), the plurality of cover sheets 12 and the plurality of support bars 13 are attached to the mask frame 11 in a grid pattern, whereby openings defined by the cover sheets 12 and the support bars 13 facing each other are arranged.

Further, the order of mounting the cover sheet 12 and the supporting strip 13 on the mask frame 11 may be reversed (replacing the processes Sa and Sb in fig. 6), and the supporting strip 13 may be mounted on the mask sheet 11 first, and then the cover sheet 12 may be mounted on the mask frame 11.

In this case, the thickness of the region of the third extension 11c3 and the fourth extension 11c4 where the groove 11e is provided needs to be thinner than the thickness of the region of the first extension 11c1 and the second extension 11c2 where the groove 11d is provided.

Fig. 10(a) is a plan view showing a state where an alignment sheet is attached to a mask frame in a vapor deposition mask according to embodiment 1, (b) is a sectional view of a line X1-X1 shown in (a), and (c) is a sectional view of a line Y1-Y1 shown in (a). Fig. 11(a) is a plan view in which the vicinity of the mounting portion of the alignment tab shown in fig. 10(a) is enlarged, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Next, as shown in Sc in fig. 6 and 10, the alignment sheet 14 on which the alignment marks 14a are formed is mounted on the mask frame 11 so as to be aligned in the Y direction and parallel to each other, so that the alignment marks 14a are positioned at predetermined positions (alignment sheet mounting step).

The alignment piece 14 is a sheet-like member that is aligned in the Y direction and fixed to the frame-like portion 11 c. The aligning pieces 14 are located at both ends of the sheet-like member arranged in the Y direction and fixed to the frame-like portion 11 c. The side of the 2 alignment tabs 14 adjacent to the third extension 11c3 is sometimes referred to as alignment tab 14a1, and the side adjacent to the fourth extension 11c4 is sometimes referred to as alignment tab 14a 2.

The alignment mark 14a will later be a reference for positioning when the mask sheet 15 is mounted on the mask frame 11.

The alignment sheet 14 is made of, for example, an invar material having a thickness of 10 to 50 μm, preferably about 25 μm, as a base material. The alignment piece 14 is a short strip having a width wider than the cover piece 12 and the support piece 13, and extends in the X direction from one end portion to the other end portion.

When the alignment piece 14 is mounted on the mask frame 11, the both end portions are respectively pulled (pulled) by applying a force in an outward direction (a direction separating from each other), and the both end portions of the alignment piece 14 are disposed in contact with the top surfaces 11g provided on the first extending portion 11c1 and the second extending portion 11c2, respectively. And a portion of the alignment piece 14 that is in contact with the top surface 11g is welded by laser or the like. Thus, the fixing portions 14b to be welded are formed at both end portions of the alignment piece 14. The alignment piece 14 is fixed to the top surfaces 11g of the first extending portion 11c1 and the second extending portion 11c2 by the fixing portion 14 b. In the alignment piece 14, unnecessary portions (fixing portions 14b) outside the welded portions are cut out as necessary.

Thereby, each alignment piece 14 is attached to a predetermined position of the mask frame 11. In the present embodiment, 2 alignment pieces 14 are respectively mounted on the mask frame 11 in such a manner as to be parallel to each other along the short sides of the frame opening 11a of the mask frame 11.

The 2 alignment sheets 14 are sheet members at both ends among the sheet members (i.e., the plurality of alignment sheets 14 and the plurality of mask sheets 15) arranged to be the same height (i.e., arranged on the top surface 11g) and arranged in line in the Y direction. Further, in the present embodiment, the 2 alignment pieces 14 are sheet members provided at different heights (i.e., provided at the top surface 11g and the bottom surface of the groove 11 d), and are sheet members located at both ends among the sheet members provided in line in the Y direction (i.e., the plurality of alignment pieces 14, the plurality of masking sheets 15, and the plurality of cover sheets 12).

Therefore, the 2 alignment tabs 14 cover at least a portion of the third extension portion 11c3 and the fourth extension portion 11c4 provided between the first extension portion 11c1 and the second extension portion 11c2 in the frame-like portion 11 c.

For example, as shown in fig. 10 and 11, the alignment piece 14a1 is fixed to the ends in the Y direction, i.e., the top surfaces 11g of the first extension portion 11c1 and the second extension portion 11c2 so as not to contact the third extension portion 11c3 while covering at least a part of the third extension portion 11c 3.

Thus, as shown by the area AR1, the alignment tab 14a1 contacts the top surfaces of the fixed, first extension 11c1 and second extension 11c 2. Also, the alignment tab 14a1 overlaps at least a portion of the third extension 11c3 disposed between the first extension 11c1 and the second extension 11c 2.

Here, as described above, the thickness of the region of the third extension 11c3 where the top surface 11h is provided is thinner than the thickness of the regions of the first extension 11c1 and the second extension 11c2 where the top surface 11g is provided.

As shown in fig. 11(a), in the frame-like portion 11c, if the thickness t1 of the region where the top surface 11g is provided in the first extending portion 11c1 is set to be the thickness t1 and the thickness of the region where the top surface 11h is provided in the third extending portion 11c3 is set to be the thickness t2, t1> t 2.

Therefore, the partial area AR102 of the top surface 11h covered by the alignment piece 14a1 in the third extension 11c3 is not in contact with the alignment piece 14a1, and the gap is set only to the distance t 3.

As with alignment tab 14a2, as shown in fig. 10, alignment tab 14a2 is fixed to the end opposite to alignment tab 14a2, i.e., the top surfaces 11g of first extension 11c and second extension 11c2, so as not to contact fourth extension 11c4 while covering at least a portion of fourth extension 11c 4.

Thus, as shown in the area AR1, the alignment tab 14a2 contacts the top surfaces 11g of the fixed, first extension 11c1 and second extension 11c 2. Also, the alignment tab 14a2 overlaps at least a portion of the fourth extension 11c4 disposed between the first extension 11c1 and the second extension 11c 2.

Further, as described above, the thickness of the region of the fourth extension portion 11c4 where the top surface 11h is provided is thinner than the thickness of the regions of the first extension portion 11c1 and the second extension portion 11c2 where the top surface 11g is provided.

Therefore, the partial area AR2 of the top surface 11h covered by the alignment piece 14a2 in the fourth extension 11c4 is not in contact with the alignment piece 14a2, and is provided with a gap.

Fig. 13(a) is a plan view showing the vapor deposition mask 10 according to embodiment 1, (b) is a sectional view taken along line X1-X1 shown in (a), and (c) is a sectional view taken along line Y1-Y1 shown in (a).

Next, as shown in step Sd of fig. 6, fig. 12, and fig. 13, the plurality of mask sheets 15 are mounted on the mask frame 11 so as to be aligned in the Y direction and parallel to each other (mask sheet mounting step).

The mask sheet 15 is a sheet-like member arranged in the Y direction and fixed to the frame-like portion 11 c. A plurality of mask sheets 15 are disposed between the 2 alignment sheets 14a1 and 14a 2.

The mask sheet 15 is a sheet that is separately colored, for example, RGB, in order to form an evaporation layer pattern in the pixels in the active region 3 shown in fig. 2 and 3.

Before the step Sd, as a step S101, before the mask sheet 15 is attached to the mask frame 11, the plurality of vapor-deposited holes are aligned and formed, whereby the effective portion YA is formed on the mask sheet 15 (effective portion forming step). A plurality of effective portions YA are formed on 1 mask sheet 15 for each active region 3. Details of the effective portion YA will be described later.

The masking sheet 15 is a short strip having a width wider than the cover sheet 12 and the support strip 13, and extends in the X direction from one end portion to the other end portion.

When the mask sheet 15 is attached to the mask frame 11, the mask sheet 15 is stretched (pulled) by applying a force in an outward direction (a direction away from each other) to both ends thereof, and the both ends of the mask sheet 15 are placed in contact with the first extending portion 11c1 and the second extending portion 11c2, respectively, so that the vapor deposition holes constituting the effective portions YA are positioned at predetermined positions with reference to the alignment marks 14a formed on the alignment sheet 14.

The mask sheet 15 is fixed by welding a portion in contact with the top surface 11g with a laser or the like. Thereby, the mask sheet 15 is fixed to the top surfaces 11g of the first extension portion 11c1 and the second extension portion 11c2 with high accuracy.

Then, as shown in step Se of fig. 6, unnecessary portions of the mask sheet 15 outside the welded portions are cut off.

Next, as shown in step Sf of fig. 6, the vapor deposition mask 10 with the mask sheet 15 attached thereto is cleaned, and various mask inspections such as a foreign matter inspection and a precision inspection are performed. Then, the vapor deposition mask 10 that has not caused a problem in the mask inspection is stored in a stocker and supplied to a vapor deposition device used in the vapor deposition step as needed. Thereby, the evaporation mask 10 is completed.

The vapor deposition mask 10 is cleaned in order to remove foreign substances generated when the vapor deposition mask 10 is manufactured. After vapor deposition is performed using the vapor deposition mask 10, cleaning is performed to remove vapor deposition particles adhering to the vapor deposition mask 10.

Wherein, as described above, the alignment tabs 14a1 and 14a2 are fixed to the top surfaces 11g of the first extension portion 11c1 and the second extension portion 11c2, and are in contact with the area AR 1. In this region AR1, the alignment tabs 14a1 and 14a2 are in close contact with the top surfaces 11g of the first extension portion 11c and the second extension portion 11c2, and therefore foreign matter does not intrude between the alignment tabs 14a1 and 14a2 and the top surfaces 11g of the first extension portion 11c and the second extension portion 11c 2.

Further, the alignment tab 14a1 overlaps at least a part of the third extending portion 11c3 provided between the first extending portion 11c1 and the second extending portion 11c2 because it is located at one end of the sheet-like members arranged in line in the Y direction.

Also, the alignment tab 14a2 overlaps at least a portion of the fourth extension portion 11c4 disposed between the first extension portion 11c1 and the second extension portion 11c2 because it is located at the other end of the sheet-like members arranged in line in the Y direction.

However, as described above, the thickness of the region of the third extension 11c3 and the fourth extension 11c4 where the top surface 11h is provided is thinner than the thickness of the region of the first extension 11c1 and the second extension 11c2 where the top surface 11g is provided.

Therefore, the partial area AR2 of the top surface 11h covered by the alignment piece 14a1 in the third extension 11c3 is not in contact with the alignment piece 14a1, and is provided with a gap.

Also, the area AR2 of the top surface 11h covered by the alignment piece 14a2 in the fourth extension 11c4 is not in contact with the alignment piece 14a2, and is provided with a gap.

Thus, when cleaning the vapor deposition mask 10, the cleaning liquid flows between the alignment piece 14a1 and the top surface 11h of the third extension portion 11c3 in the region AR 2. Therefore, the cleaning effect between the alignment tab 14a1 and the top surface 11h of the third extension 11c3 in the area AR2 can be improved. Therefore, foreign matter can be prevented from remaining between the alignment piece 14a1 and the top surface 11h of the third extension portion 11c3 in the area AR 2.

Also, when cleaning the vapor deposition mask 10, the cleaning liquid flows between the alignment piece 14a1 and the top surface 11h of the fourth extension portion 11c4 in the region AR 2. Therefore, the cleaning effect between the alignment tab 14a2 and the top surface 11h of the fourth extension 11c4 in the area AR2 can be improved. Therefore, foreign matter can be prevented from remaining between the alignment piece 14a2 and the top surface 11h of the fourth extension portion 11c4 in the area AR 2.

This prevents foreign substances remaining after cleaning from adhering to the deposition target substrate (TFT substrate 2) when vapor deposition is performed using the vapor deposition mask 10. As a result, the finished panel can be prevented from deteriorating.

(effective part YA)

Fig. 14 is a diagram showing a structure of a mask sheet 15 according to embodiment 1. Fig. 14(a) is a plan view of the mask sheet 15, (B) is an enlarged view of the effective portion shown in (a), (C) is a sectional view taken along the line B-B shown in (B), and (d) is a sectional view taken along the line C-C shown in (B).

As shown in fig. 14(a), the mask sheet 15 is in the form of a short strip, and an invar material or the like having a thickness of, for example, 10 μm to 50 μm, preferably about 25 μm, is used as a base material. The mask sheet 15 is formed of a thin sheet to prevent the thickness of the vapor deposition layer to be deposited from being uneven.

A plurality of effective portions YA extending in the longitudinal direction of the mask sheet 15 are formed between both end portions of the mask sheet 15 in a row. A plurality of deposition holes H corresponding to the pixels are formed in the effective portion YA in an aligned manner. The effective portions YA are regions where the evaporation holes H are provided at equal intervals.

The outer shape of each effective portion YA is not a special shape for making the stress applied when stretching the mask sheet 115 as uniform as possible, but is preferably a square or a rectangle. In the present embodiment, each effective portion YA has a rectangular outer shape. The effective portions YA are provided for each active region 3 of the TFT substrate 2, and are formed separately from each other.

The evaporation hole H is a through hole. When the light emitting layer is evaporated on the TFT substrate through the mask sheet 15, the evaporation holes H are formed in the effective portion YA corresponding to the formation region of the light emitting layer that emits light of any color among colors emitted by the light emitting layer. For example, when a red light emitting layer, a green light emitting layer, and a blue light emitting layer are formed in the active region 3, the evaporation holes H are formed in the same pattern as any one of the red light emitting layer, the green light emitting layer, and the blue light emitting layer.

On the mask sheet 15, the vapor deposition holes H are formed as follows, for example, in step S101 shown in fig. 6.

First, a negative-type or positive-type photosensitive resist material is coated on both sides of a long plate made of an invar material or the like, and resist films are formed on both main surfaces (a first surface and a second surface).

Next, the resist films on the first surface and the second surface are exposed and developed using an exposure mask, thereby forming resist patterns on both surfaces of the long plate. Next, the first surface 15b (the surface facing the TFT substrate 2 during vapor deposition) of the effective portion YA is etched (the upper surface of the edge portion is not etched) using the resist pattern of the first surface as a mask, and an opening K pattern is formed on the first surface 15b of the effective portion YA (no through-hole is formed at this stage).

Next, the first surface 15b is covered with a corrosion-resistant resin, and the effective portion YA and the lower surface of the edge portion are etched using the etching pattern of the second surface 15c (the surface opposite to the TFT substrate 2 at the time of vapor deposition) as a mask. Thus, in the effective portion YA, the vapor deposition holes H (through holes) are formed by erosion from the second surface 15c side, and a plurality of depressions are formed on the lower surface of the edge portion.

The plurality of vapor deposition holes H of the effective portion YA are formed in a matrix or a diagonal lattice in the longitudinal direction and the lateral direction (width direction) of the mask sheet 15, and the opening K (opening on the upper surface) thereof is formed in a rounded quadrangle shape or a circular or elliptical shape so as to correspond to the opening shape of the pixel bank of the substrate. In the effective portion YA, the vapor deposition holes H are etched to be wider and deeper than the 1 st surface 15b side on the 2 nd surface 15c side, so that shadow portions (the height of the space between the adjacent 2 vapor deposition holes) are reduced, thereby improving the accuracy and efficiency of vapor deposition on the substrate.

In the effective portion YA, if a cross section is taken by a line B-B passing through the centers of 2 openings K adjacent in the lateral direction, the base material structure is smallest as shown in fig. 14(C), and if a cross section is taken by a line C-C passing through equidistant points from 2 openings K adjacent in the longitudinal direction and parallel to the line B-B, the base material structure (the maximum thickness is the thickness Ti of the base material) is largest (the cavity is smallest) as shown in fig. 14(C) and (d). Thus, the mask sheet 15 is produced.

Fig. 15 is a view showing a state where a part of the vapor deposition mask is viewed from the second surface 15c side. Fig. 16 is a sectional view of the vapor deposition mask 10 and the TFT substrate 2 when vapor deposition is performed in the vapor deposition step.

As shown in fig. 15 and 16, the effective portion YA on which the plurality of evaporation holes H are formed in an aligned manner has a shape corresponding to the active region 3, and is provided for each small region 3.

The cover sheet 12, the support sheet 13, and the mask sheet 15 of the vapor deposition mask 10 are arranged in this order from the vapor deposition source toward the TFT 2. Further, since the first surface 15b of the mask sheet 15 is in close contact with the TFT substrate 2 during vapor deposition, the shadow caused by the separation of the effective portion YA of the mask sheet 15 from the TFT substrate 2 is prevented.

[ embodiment 2]

As shown in fig. 17 and 18, in the present embodiment, on the third extending portion 11c3 and the fourth extending portion 11c4, instead of providing the groove 11e (fig. 10 and 11) for each of the plurality of support bars 13, the recess 11f for fixing the plurality of support bars 13 is provided in a manner to span the plurality of support bars 13.

After the plurality of cover sheets 12 are mounted on the mask frame 11 through the process Sa (cover sheet mounting process) shown in fig. 6, the plurality of supporting bars 13 are mounted through the process Sb (supporting bar mounting process).

A recess 11f is provided in the third extension portion 11c3 and the fourth extension portion 11c4, and the recess 11f extends from a connection portion with the first extension portion 11c1 to a connection portion with the second extension portion 11c 2. The bottom surface of each concave portion 11f is not formed with irregularities and is a flat surface.

Therefore, each stay 13 can be fixed at any position in the X direction in the concave portion 11f of each of the third extending portion 11c3 and the fourth extending portion 11c 4. Therefore, the positions of the support bars 13 fixed in the concave portions 11f of the third extending portion 11c3 and the fourth extending portion 11c4 in the X direction can be adjusted according to the shape of the active region 3 (fig. 2 and 3) of the TFT substrate 2 to be vapor-deposited.

The bottom surface of the concave portion 11f of each of the third extending portion 11c3 and the fourth extending portion 11c4 has the same height as the area in contact with each supporting bar 13 and the area adjacent to the supporting bar 13. Therefore, the thickness of the region of the third extending portion 11c3 and the fourth extending portion 11c4 where the bottom surface of the recess 11f is provided is thinner than the thickness of the region of the first extending portion 11c1 and the second extending portion 11c2 where the top surface 11g is provided.

That is, in the present embodiment, the plurality of stay bars 13 share the concave portions 11f of the third extending portion 11c3 and the fourth extending portion 11c4, respectively.

Next, the alignment sheet 14 is mounted on the mask frame 11 by a step Sc (alignment sheet mounting step) of fig. 6.

Both end portions of the aligning piece 14 are disposed in contact with the top surfaces 11g provided on the respective first and second extending portions 11c1 and 11c 2. And a portion of the alignment piece 14 that is in contact with the top surface 11g is welded by laser or the like, thereby being fixed. Thereby, the alignment tab 14 is fixed to the respective top surfaces 11g of the first and second extension portions 11c1 and 11c 2. Further, unnecessary portions of the alignment piece 14 outside the welded portions are cut out as necessary.

As shown in fig. 17 and 18, the alignment tab 14a1 is fixed to the ends in the Y direction, i.e., the top surfaces 11g of the first extension portion 11c1 and the second extension portion 11c2 so as not to contact the third extension portion 11c3 while covering at least a part of the third extension portion 11c 3.

Thus, as shown in the area AR1, the alignment tab 14a1 contacts the top surfaces 11g of the fixed, first extension 11c1 and second extension 11c 2. Also, the alignment tab 14a1 overlaps at least a portion of the third extension 11c3 disposed between the first extension 11c1 and the second extension 11c 2.

As described above, the thickness of the region of the third extending portion 11c3 where the bottom surface of the recess 11f is provided is thinner than the thickness of the regions of the first extending portion 11c1 and the second extending portion 11c2 where the top surface 11g is provided.

As shown in fig. 18(a), in the frame-like portion 11c, if the thickness t1 of the region where the top surface 11g is provided in the first extending portion 11c1 is set to be the thickness t1 and the thickness of the region where the bottom surface of the concave surface 11f is provided in the third extending portion 11c3 is set to be the thickness t4, t1> t 4.

Therefore, the partial area AR3 of the bottom surface of the recess 11f covered by the alignment piece 14a1 in the third extending portion 11c3 is not in contact with the alignment piece 14a1, and the gap is set only to the distance t 5.

As with alignment tab 14a2, as shown in fig. 17, alignment tab 14a2 is fixed to the end opposite to alignment tab 14a2, i.e., the top surfaces 11g of first extension 11c and second extension 11c2, so as not to contact fourth extension 11c4 while covering at least a portion of fourth extension 11c 4.

As described above, the thickness of the region of the fourth extending portion 11c4 where the bottom surface of the recess 11f is provided is thinner than the thickness of the regions of the first extending portion 11c1 and the second extending portion 11c2 where the top surface 11g is provided.

Therefore, the partial area AR3 of the bottom surface of the recess 11f covered by the alignment piece 14a2 in the fourth extension portion 11c4 is not in contact with the alignment piece 14a2, and is provided with a gap.

Next, the mask sheet 15 is mounted on the mask frame 11 by a process Sd (mask sheet mounting process) of fig. 6.

As shown in fig. 19, when the mask sheet 15 is attached to the mask frame 11, the mask sheet 15 is stretched (pulled) by applying a force in an outward direction (a direction in which the both ends are separated from each other) to the both ends, and the both ends of the mask sheet 15 are placed in contact with the top surfaces 11g provided on the first extending portion 11c1 and the second extending portion 11c2, respectively, so that the vapor deposition holes constituting the effective portions YA are located at predetermined positions with reference to the alignment marks 14a formed on the alignment sheet 14.

Before the step Sd, as a step S101 shown in fig. 6, before the mask sheet 15 is attached to the mask frame 11, a plurality of vapor-deposited holes are aligned and formed, whereby the effective portion YA is formed on the mask sheet 15 (effective portion forming step).

In the present embodiment, the effective portion YA has an area that overlaps with the plurality of active regions 3 to extend over the plurality of active regions 3 (fig. 2 and 3). Therefore, the effective portion YA overlaps the plurality of supporting bars 13.

As shown in fig. 20, in the present embodiment, the first and second regions YA1 and YA2 are provided in the effective portion YA of the mask sheet 15 through the process Sd.

The first region YA1 is formed for each active region 3 (see fig. 2), and has a shape corresponding to the active region 3. The second region YA2 is a region of the effective part YA different from the first region YA1, and is a region overlapping with the supporting bar 13.

A plurality of mask sheets 15 of a predetermined number are fixed between the 2 alignment sheets 14a1 and 141a2, and unnecessary portions of the mask sheets 15 outside the welded portions are cut off as shown in step Se of fig. 6 and fig. 20.

Next, as shown in step Sf of fig. 6, the vapor deposition mask 10 with the mask sheet 15 attached thereto is cleaned, and various mask inspections such as a foreign matter inspection and a precision inspection are performed. Then, the cross mask 10, which has not caused any problem in the mask inspection, is stored in a stocker and supplied to a vapor deposition device used in a vapor deposition step as needed. Thereby, the evaporation mask 10 is completed.

As shown in fig. 20 and 21, in the effective section YA, the vapor deposition holes included in the first area YA1 penetrate therethrough, and the vapor deposition holes included in the second area YA2 are blocked by the supporting bars 13.

The evaporation holes included in the first area YA1 are evaporation holes for forming an evaporation layer for each pixel. The evaporation holes included in the second area YA2 are dummy evaporation holes that do not contribute to the formation of an evaporation layer for each pixel.

In the vapor deposition step, the first region YA1 of the effective portion YA of the mask sheet 15 overlaps the active region 3 (see fig. 2 and 3) of the TFT substrate 2, and the second region YA2 outside the first region YA1 and the edge portion surrounding the effective portion YA overlap the frame region 44 (see fig. 2 and 3). The vapor deposition particles emitted from the vapor deposition source are deposited in the pixels of the active region 3 of the TFT substrate 2 through the vapor deposition holes H included in the first region YA 1. At this time, the second region YA2 and the edge portion surrounding the effective portion YA in the mask sheet 15 overlap the frame region 44 of the TFT substrate 2, and therefore the vapor deposition particles are blocked by the second region YA2 and the frame portion surrounding the effective portion YA and do not reach the frame region 44.

As described above, in the present embodiment, on the third and fourth extending portions 11c3 and 11c4, instead of providing the groove 11e (fig. 10 and 11) for each of the plurality of support bars 13, the recess 11f for fixing the plurality of support bars 13 is provided in a manner to straddle the plurality of support bars 13.

Therefore, the position of the stay 13 in the X direction can be freely adjusted.

The effective portion YA of the mask sheet 15 has an area that overlaps a plurality of active regions.

Therefore, the position and shape of the second region YA2, which defines the outer shape of the first region YA1, can be defined by the position and shape of the supporting bar 13. Thus, even if the outer shape of the active region 3 changes, the outer shape of the effective portion YA does not need to be changed. Therefore, the mask sheet 15 and the mask frame 11 on which the effective portion YA is formed can be shared between substrates having various outer shapes.

For example, the mask sheet 15 can be shared, and the mask sheet 15 is used to form the active regions 3 having different aspect ratios such as 4:3, 16:9, and 18: 9.

Further, as described above, the thickness of the region of the third extending portion 11c3 where the bottom surface of the recess 11f is provided is thinner than the thickness of the regions of the first extending portion 11c1 and the second extending portion 11c2 where the top surface 11g is provided.

Therefore, the area AR3 of the bottom surface of the recess 11f covered by the alignment piece 14a1 in the third extending portion 11c3 is not in contact with the alignment piece 14a1, and is provided with a gap.

Thereby, when cleaning the vapor deposition mask 10, the cleaning liquid flows between the alignment piece 14a1 in the area AR3 and the top surface 11h of the third extension portion 11c 3. Therefore, the cleaning effect between the alignment piece 14a1 in the area AR3 and the bottom surface of the recess 11f of the third extension portion 11c3 can be improved. This can prevent foreign matter from remaining between the alignment piece 14a1 in the area AR3 and the bottom surface of the recess 11f of the third extending portion 11c 3.

Further, the thickness of the region of the fourth extending portion 11c4 where the bottom surface of the recess 11f is provided is also thinner than the thickness of the regions of the first extending portion 11c1 and the second extending portion 11c2 where the top surface 11g is provided.

Thus, when cleaning the vapor deposition mask 10, the cleaning liquid flows between the alignment piece 14a2 and the top surface 11h of the third extension portion 11c4 in the region AR 3. Therefore, the cleaning effect between the alignment piece 14a2 and the bottom surface of the recess 11f of the fourth extending portion 11c4 in the area AR3 can be improved. This prevents foreign matter from remaining between the alignment piece 14a2 and the bottom surface of the recess 11f of the fourth extension 11c4 in the region AR 3.

As a result, it is possible to prevent foreign substances generated by cleaning residues from adhering to the deposition target substrate (TFT substrate 2) when performing deposition using the deposition mask 10. Therefore, the finished panel can be prevented from deteriorating.

Note that the displays according to

embodiments

1 and 2 are not particularly limited as long as they are display panels having display elements. The display element is a display element whose luminance or transmittance is controlled by a current, and examples of the current-controlled display element include an organic EL (ElectroLuminescence) display having an OLED (organic light emitting diode), an inorganic EL display having an inorganic light emitting diode, a QLED display having an EL display QLED (quantum dot light emitting diode), and the like.

(conclusion)

A vapor deposition mask according to a first aspect of the present invention is a vapor deposition mask including a mask frame having a frame opening, and a plurality of sheet members fixed to the mask frame so as to cover the frame opening, wherein the mask frame has a frame-like portion that surrounds the frame opening in a frame shape, the frame-like portion has a first extending portion, a second extending portion, a third extending portion, and a fourth extending portion, the first extending portion and the second extending portion are arranged in line with each other across the frame opening and extend in a first direction, the third extending portion and the fourth extending portion are arranged in line with each other across the frame opening and extend in a second direction, the plurality of sheet members include first sheet members positioned at end portions among the plurality of sheet members arranged in line with each other in the first direction, and the first sheet members are fixed to top surfaces of the first extending portion and the second extending portion, covering at least a portion of the third extending portion, wherein the third extending portion has a thickness smaller than the thicknesses of the first extending portion and the second extending portion, and does not contact the first sheet member.

In the vapor deposition mask according to the second aspect, the plurality of sheet members may include a second sheet member located at an end portion opposite to the first sheet member among the plurality of sheet members arranged in the first direction, the second sheet member may be fixed to top surfaces of the first extending portion and the second extending portion so as to cover at least a part of the fourth extending portion, and the fourth extending portion may be thinner than the first extending portion and the second extending portion and may not contact the second sheet member.

In the vapor deposition mask according to the third aspect, the plurality of sheet members may include a plurality of support bars arranged in the second direction, and a groove for fixing the plurality of support bars may be provided for each of the support bars in the third extending portion and the fourth extending portion.

In the vapor deposition mask according to a fourth aspect, the plurality of sheet members arranged in the first direction may include a plurality of mask sheets fixed to the top surfaces of the first extending portion and the second extending portion, each of the mask sheets may include a plurality of effective portions in which a plurality of vapor deposition holes corresponding to pixels of a vapor deposition substrate in which a plurality of active regions in which the pixels contributing to display are arranged, and the effective portions may be provided for each of the active regions.

In the vapor deposition mask according to a fifth aspect, the plurality of sheet members may include a plurality of support bars arranged in the second direction, and the third extending portion and the fourth extending portion may be provided with recesses for fixing the plurality of support bars so as to straddle the plurality of support bars.

In the vapor deposition mask according to a sixth aspect, the plurality of sheet members arranged in the first direction may include a plurality of mask sheets fixed to the top surfaces of the first extending portion and the second extending portion, each of the mask sheets may include an effective portion in which a plurality of vapor deposition holes corresponding to pixels of a vapor deposition substrate are arranged, the vapor deposition substrate may include a plurality of active regions in which the pixels contributing to display are arranged, and the effective portion may be provided so as to extend over the plurality of active regions.

In the vapor deposition mask according to a seventh aspect, the first extension portion, the second extension portion, the third extension portion, and the fourth extension portion are arranged to form a quadrilateral.

In the vapor deposition mask according to the eighth aspect, the plurality of sheet members may include a plurality of cover sheets arranged in the first direction, and the first extending portion and the second extending portion may be provided with a groove for fixing the plurality of cover sheets.

In the vapor deposition mask according to a ninth aspect, each of the first sheet member and the second sheet member is an alignment sheet provided with an alignment mark that is a reference when a mask sheet provided with a plurality of vapor deposition holes corresponding to pixels of a vapor deposition substrate is fixed to the mask frame.

A method of manufacturing a display device according to a tenth aspect includes a method of manufacturing an evaporation mask having a mask frame provided with a frame opening and a plurality of sheet-like members fixed to the mask frame so as to cover the frame opening, wherein the mask frame has a frame-like portion surrounding the frame opening in a frame shape, the frame-like portion has a first extending portion, a second extending portion, a third extending portion, and a fourth extending portion, the first extending portion and the second extending portion are arranged in line across the frame opening and extend in a first direction, the third extending portion and the fourth extending portion are arranged in line across the frame opening and extend in a second direction, respectively, and a thickness of the third extending portion is thinner than a thickness of the first extending portion and the second extending portion, the fourth extending portion has a thickness smaller than thicknesses of the first extending portion and the second extending portion, the plurality of sheet members include a plurality of sheet members arranged in the first direction, and the method for manufacturing a vapor deposition mask includes: fixing a first sheet member of the plurality of sheet members arranged in the first direction to the top surfaces of the first extending portion and the second extending portion, which are the end portions in the first direction, so as not to contact the third extending portion while covering at least a part of the third extending portion; fixing a second sheet member of the plurality of sheet members arranged in the first direction to an end opposite to the first sheet member, that is, to top surfaces of the first extending portion and the second extending portion so as not to contact the fourth extending portion while covering at least a part of the fourth extending portion; and a step of fixing, on the mask frame, a plurality of mask sheets, in which a plurality of deposition holes corresponding to pixels of a deposition substrate are provided, among the plurality of sheet members arranged in the first direction, with reference to alignment marks provided on the first sheet member and the second sheet member, wherein the display device manufacturing method includes a deposition step of forming a deposition layer on the pixels of the deposition substrate by using the deposition mask manufactured by the deposition mask manufacturing method.

The present invention is not limited to the above-described embodiments, various modifications may be made within the scope shown in the claims, and examples obtained by appropriately combining technical means respectively disclosed in different examples are also included in the technical scope of the present invention. Further, by combining the technical means disclosed in the respective embodiments, new technical features can be formed.

Description of the reference numerals

1 substrate

2 TFT substrate (substrate to be evaporated)

3 active region

4 frame-shaped dike

5 sealing layer

6. 8 inorganic film

7 organic film

9 organic EL display panel forming region

10 vapor deposition mask

11 mask frame

11a frame opening

11b outer peripheral portion

11c frame-shaped part

11c1 first extension

11c2 second extension

11c3 third extension

11c4 fourth extension

11f recess

11g, 11h top surface

12 cover (sheet component)

13 support bar (sheet component)

14 alignment sheet (sheet member)

14A1 alignment tab (first sheet member, sheet member)

14A2 alignment tab (second tab member, tab member)

14a alignment mark

14b fixed part

15 mask (sheet member)

43 display area

44 frame area

70 vapor deposition source

80 luminous layer (vapor deposition layer)

AR1, AR2, AR3 regions

bk pixel bank

YA effective part

First region of effective portion YA of YA1

Second region of the effective portion YA of YA2

Claims

1. An evaporation mask having a mask frame provided with a frame opening and a plurality of sheet members fixed to the mask frame so as to cover the frame opening,

the mask frame has a frame-shaped portion surrounding the frame opening into a frame shape,

the frame-shaped part is provided with a first extending part, a second extending part, a third extending part and a fourth extending part,

the first extension portion and the second extension portion are arranged across the frame opening and extend in a first direction,

the third extending portion and the fourth extending portion are arranged across the frame opening and extend in a second direction,

the plurality of sheet members include a first sheet member located at an end portion among the plurality of sheet members arranged in the first direction,

the first sheet member is fixed to the top surfaces of the first extension portion and the second extension portion, and covers at least a part of the third extension portion,

the third extending portion is thinner than the first extending portion and the second extending portion, and does not contact with the first sheet-like member,

the plurality of sheet members include a second sheet member located at an end opposite to the first sheet member among the plurality of sheet members arranged in the first direction,

the second sheet member is fixed to the top surfaces of the first extension portion and the second extension portion, and covers at least a part of the fourth extension portion,

the fourth extending portion is thinner than the first extending portion and the second extending portion, and does not contact the second sheet member.

2. The vapor deposition mask according to claim 1,

the plurality of sheet members include a plurality of support bars arranged in the second direction,

and grooves for fixing the plurality of support bars are arranged on the third extending parts and the fourth extending parts aiming at each support bar.

3. The vapor deposition mask according to claim 2,

the plurality of sheet members arranged in the first direction include a plurality of mask sheets fixed to the top surfaces of the first extending portion and the second extending portion,

each mask sheet has a plurality of effective portions in which a plurality of vapor deposition holes corresponding to pixels of a vapor deposition substrate having a plurality of active regions in which the pixels contributing to display are arranged,

the effective portion is provided for each of the active regions.

4. The vapor deposition mask according to claim 1,

the third extending part and the fourth extending part are provided with concave parts spanning the plurality of supporting bars for fixing the plurality of supporting bars.

5. The vapor deposition mask according to claim 4,

each mask sheet has an effective portion in which a plurality of evaporation holes corresponding to pixels of an evaporation substrate are arranged, the evaporation substrate having a plurality of active regions in which the pixels contributing to display are arranged,

the effective portion is provided so as to span the plurality of active regions.

6. The vapor deposition mask according to claim 1,

the first extension portion, the second extension portion, the third extension portion, and the fourth extension portion are arranged to form a quadrangle.

7. The evaporation mask according to any one of claims 1 to 6,

the plurality of sheet members include a plurality of cover sheets arranged in the first direction,

on the first extension and the second extension, a groove for fixing the plurality of cover sheets is provided for each of the cover sheets.

8. The vapor deposition mask according to claim 1,

the first sheet member and the second sheet member are each an alignment sheet provided with an alignment mark that is used as a reference when a mask sheet provided with a plurality of deposition holes corresponding to pixels of a deposition target substrate is fixed to the mask frame.

9. A method of manufacturing a display device including a method of manufacturing an evaporation mask having a mask frame provided with a frame opening and a plurality of sheet-like members fixed to the mask frame so as to cover the frame opening,

the thickness of the third extension part is thinner than the thickness of the first extension part and the second extension part,

the thickness of the fourth extension part is thinner than the thickness of the first extension part and the second extension part,

the plurality of sheet members include a plurality of sheet members arranged in the first direction,

the method for manufacturing the vapor deposition mask comprises the following steps:

fixing a first sheet member of the plurality of sheet members arranged in the first direction to the top surfaces of the first extending portion and the second extending portion, which are the end portions in the first direction, so as not to contact the third extending portion while covering at least a part of the third extending portion;

fixing a second sheet member of the plurality of sheet members arranged in the first direction to an end opposite to the first sheet member, that is, to top surfaces of the first extending portion and the second extending portion so as not to contact the fourth extending portion while covering at least a part of the fourth extending portion; and

fixing a plurality of mask sheets, which are provided with a plurality of deposition holes corresponding to pixels of a substrate to be deposited, among the plurality of sheet-like members arranged in the first direction, to the mask frame with reference to alignment marks provided on each of the first sheet-like member and the second sheet-like member,

the method for manufacturing a display device includes a vapor deposition step of forming a vapor deposition layer on the pixels of the vapor deposition substrate using the vapor deposition mask manufactured by the method for manufacturing a vapor deposition mask.