WO2019087256A1

WO2019087256A1 - Vapor deposition mask and production method for vapor deposition mask

Info

Publication number: WO2019087256A1
Application number: PCT/JP2017/039148
Authority: WO
Inventors: 荘介田中
Original assignee: シャープ株式会社
Priority date: 2017-10-30
Filing date: 2017-10-30
Publication date: 2019-05-09

Abstract

In a vapor deposition mask (10), an alignment section (14d) and an alignment section (14e) are disposed so as to face each other with a plurality of howling sheets (13) interposed therebetween, and are attached to a mask frame (11) so as not to overlap with the howling sheets (13).

Description

Vapor deposition mask and method of manufacturing vapor deposition mask

The present invention relates to a deposition mask and a method of manufacturing the deposition mask.

As described in Patent Document 1, in the case of forming a light emitting layer in each pixel in an organic EL display device, a vapor deposition mask is used. A vapor deposition mask is a strong frame-like frame, and a sheet-like mask sheet in which vapor deposition holes for forming a vapor deposition layer are formed is fixed in a stretched state to a mask frame.

As shown in FIG. 20, the frame-shaped mask frame 111 has a frame-shaped portion 111c and an outer peripheral portion 111b surrounding the frame-shaped portion 111c.

The frame-shaped part 111 c is an area surrounding the periphery of the frame opening 111 a and is an area for fixing each sheet-like member attached to the mask frame 111. The frame-shaped portion 111c is configured such that the first extending portion 111c1 and the second extending portion 111c2 which are disposed opposite to each other through the frame opening 111a, and the third extending portion 111c3 which is disposed opposite to the first extending portion 111c2 through the frame opening 111a. It has a portion 111c4.

The both ends of the cover sheet 112 are inserted into the groove 111d with the groove 111d formed in the first extending portion 111c1 and the second extending portion 111c2 in the mask frame 111 as a reference for positioning. Then, both ends of the cover sheet 112 are welded in the groove 111d.

Subsequently, both ends of the howling sheet 113 are inserted into the groove 111 e with the groove 111 e formed in the third extending portion 111 c 3 and the fourth extending portion 111 c 4 in the mask frame 111 as a reference for positioning. Then, both ends of the howling sheet 113 are welded in the groove 111e.

As shown in FIG. 21, next, the alignment sheet 114 is attached to the frame-like portion 111c along the both ends of the frame opening 111a with the mask frame 111 as a reference for positioning. Each alignment sheet 114 is provided with an alignment mark 114 a.

Alignment sheet 114A1 is arrange | positioned so that a part of 3rd extending | stretching part 111c3 may be covered among two alignment sheet 114, and both ends are welded by a laser. As a result, the alignment sheet 114A1 has the fixing portions 114b welded to both end portions, and is fixed to the top surface 111g of the first extending portion 111c1 and the second extending portion 111c2.

Alignment sheet 114A2 is arrange | positioned so that a part of 4th extending | stretching part 111c4 may be covered among two alignment sheet 114, and both ends are welded by a laser. As a result, the alignment sheet 114A2 has the fixing portions 114b welded to both end portions, and is fixed to the top surface 111g of the first extending portion 111c1 and the second extending portion 111c2.

Next, a plurality of mask sheets 115 are attached to the frame-shaped portion 111c between the alignment sheets 114A1 and 114A2.

The mask sheet 115 is provided with a plurality of effective portions 115 a in which a plurality of vapor deposition holes are provided side by side. The vapor deposition holes are through holes for forming a vapor deposition layer in each of the pixels of the vapor deposition substrate.

Since the mask sheet 115 needs to be attached accurately at a predetermined position on the mask frame 111, the mask sheet 115 is positioned with reference to the alignment mark 114a of the alignment sheet 114. Then, both ends of the mask sheet 115 are welded to the top surface 111 g of the first extending portion 111 c 1 and the second extending portion 111 c 2 by laser. A predetermined number of mask sheets 115 are fixed to the top surface 111 g of the first extending portion 111 c 1 and the second extending portion 111 c 2. Thus, the deposition mask is completed.

Japanese Patent Publication "Japanese Patent Application Laid-Open No. 2010-135269"

For example, in order to differentiate in terms of design in a smartphone or other mobile phone terminal etc., the outline of the display area, for example, a round for each corner or a cutter for arranging a camera and a speaker It has come to be required that the shape is not square or rectangular, for example, a shape having a notch (dent).

If the light emitting layer is present in such an irregularly shaped cut portion, some light emitting layers are not sealed but exposed in the subsequent sealing step, so that the reliability can not be ensured. Therefore, in the deposition process of depositing the light emitting layer, it is necessary to perform masking so that the light emitting layer is not deposited on the irregular shaped cut portion.

Therefore, there is a method of masking by setting the shape between both ends of the howling sheet 113 to a shape corresponding to the deformed shape of the display area and partially shielding a plurality of vapor deposition holes in the effective portion 115a with the howling sheet 113. Conceivable. Thereby, the external shape of the area | region which does not overlap with the howling sheet 113 among the effective parts 115a can be made into the same shape as the external shape of a display area.

As described above, in order to shield a part of the plurality of vapor deposition holes in the effective portion 115a by the howling sheet 113, the accuracy of the relative position between the howling sheet 113 and the mask sheet 115 is required at a high level.

Then, as the resolution of the display area is further increased (that is, the density of the pixels is increased), the accuracy of the relative position between the howling sheet 113 and the mask sheet 115 (that is, the deposition holes) is required at a higher level. become.

Here, as described above, the relative position between the howling sheet 113 and the mask frame 111 is determined with reference to the mask frame 111.

Further, the relative position of the alignment sheet 114 with respect to the mask frame 111 is also determined with reference to the mask frame 111.

However, relative position of the mask sheet 115 to the mask frame 111 is determined based on the alignment mark 114 a in the alignment sheet 114, not the mask frame 111.

According to the above-described method, the relative positions of the howling sheet 113 and the mask sheet 115 are determined based on different criteria. For this reason, it is assumed that the accuracy of the relative position between the howling sheet 113 and the mask sheet 115 does not reach a required level as the definition of the display area is further increased.

The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide a deposition mask and a deposition mask manufacturing method in which the accuracy of the relative position between the howling sheet and the mask sheet is enhanced. is there.

In order to solve the above problems, a deposition mask according to an aspect of the present invention is a deposition mask for depositing a deposition layer on a pixel of a deposition substrate on which a plurality of active regions in which pixels contributing to display are arranged are provided. A plurality of mask frames provided with a frame opening, and an effective portion in which a plurality of vapor deposition holes corresponding to the pixels are arranged, and the plurality of mask frames being attached side by side so as to cover the frame openings. A mask sheet, a plurality of howling sheets that support the plurality of mask sheets, extend in the direction in which the plurality of mask sheets are arranged, and are attached to the mask frame And the first alignment unit and the second alignment unit in plan view. 2 alignment portion is oppositely arranged with the plurality of acoustic feedback sheets, respectively, and being attached to the mask frame so that the above feedback sheet and non-overlapping.

In order to solve the above-mentioned subject, in the manufacturing method of the vapor deposition mask concerning one mode of the present invention, in order to vapor-deposit a vapor deposition layer to the pixel concerned of a vapor deposition substrate in which a plurality of active fields where a pixel contributing to display is arranged are provided The method for manufacturing a vapor deposition mask according to claim 1, wherein the mask is provided with a frame opening so that the first alignment part and the second alignment part, each in sheet form and provided with the alignment mark, are separated and opposed to each other. Between the first alignment unit and the second alignment unit in an alignment unit forming step of forming on a frame and in plan view, so as not to overlap with the first alignment unit and the second alignment unit, A howling system for attaching a plurality of howling sheets to the mask frame with reference to the alignment mark A plurality of the howling sheets based on the alignment marks so as to cover the frame opening and to be supported by the plurality of howling sheets, and a mask sheet having an effective portion in which the plurality of deposition holes are arranged; And a plurality of mask sheet attaching steps of attaching a plurality of pieces in the extending direction of the sheet and attaching the mask sheet to the mask frame.

According to one aspect of the present invention, it is possible to enhance the accuracy of the relative position between the howling sheet and the mask sheet.

(A) is a perspective view showing the external appearance of the electronic device in which the organic electroluminescence display which concerns on Embodiment 1 was used, (b) is sectional drawing of (a). FIG. 7 is a view showing a manufacturing process of the organic EL display panel according to Embodiment 1. FIG. 2 is a plan view of a substrate of the organic EL display panel according to Embodiment 1. It is sectional drawing of the organic electroluminescent display panel formation area of the board | substrate of FIG. FIG. 5 is a schematic view showing a state of a vapor deposition process when forming a vapor deposition layer of the organic EL display device according to Embodiment 1. FIG. 5 is an enlarged view of a part of the active area 3 of the first embodiment. FIG. 5 is a diagram illustrating a production process of the vapor deposition mask according to Embodiment 1. (A) is a top view showing the structure of the mask frame in the vapor deposition mask of Embodiment 1, (b) is a X1-X1 line sectional view shown to (a), (c) is Y1 shown to (a) -Y1 line sectional view. (A) is a top view showing a mode that a cover sheet is attached to the mask frame in the vapor deposition mask of Embodiment 1, (b) is a X1-X1 line sectional view shown to (a), (c) is It is Y1-Y1 line sectional drawing shown to (a). (A) is a top view showing a mode that the alignment sheet is attached to the mask frame in the vapor deposition mask of Embodiment 1, (b) is a X1-X1 line sectional view shown to (a), (c) is It is Y1-Y1 line sectional drawing shown to (a). (A) is a top view showing a mode that the central part of the alignment sheet in the vapor deposition mask of Embodiment 1 was cut, (b) is a X1-X1 line sectional view shown to (a), (c) is (a) It is Y1-Y1 line sectional drawing shown to a). (A) is the top view to which the vicinity of the alignment part shown to (a) of FIG. 11 was expanded, (b) is a X1-X1 line sectional view shown to (a), (c) to (a) It is Y1-Y1 line sectional drawing which shows. (A) is a top view showing a mode that the howling sheet is attached to the mask frame in the vapor deposition mask of Embodiment 1, (b) is the X1-X1 line sectional view shown to (a), (c) is It is Y1-Y1 line sectional drawing shown to (a). FIG. 2 is a plan view illustrating the configuration of the howling sheet according to the first embodiment. (A) is a top view showing a mode that a mask sheet | seat in the vapor deposition mask of Embodiment 1 is attached to the mask frame, (b) is a X1-X1 line sectional view shown to (a), (c) is It is Y1-Y1 line sectional drawing shown to (a). (A) is a top view showing the vapor deposition mask of Embodiment 1, (b) is a X1-X1 line sectional view shown to (a), (c) is a Y1-Y1 line sectional view shown to (a) It is. (A) is a top view of the mask sheet | seat of Embodiment 1, (b) is an enlarged view of the effective part shown to (a), (c) is a BB sectional drawing shown to (b). (D) is a cross-sectional view taken along line CC shown in (b). It is a figure showing a mode that one part of the vapor deposition mask of Embodiment 1 was seen from the 1st surface side. FIG. 2 is a cross-sectional view of a deposition mask and a TFT substrate during deposition in the deposition step of Embodiment 1. (A) is a top view showing a mode that the cover sheet and the howling sheet | seat were attached to the mask frame among the conventional vapor deposition masks, (b) is the X0-X0 sectional view shown to (a) (C) is a cross-sectional view taken along line Y0-Y0 shown in (a). (A) is a top view showing a mode that an alignment sheet and a mask sheet | seat are attached to a mask frame among the conventional vapor deposition masks, (b) is the X0-X0 sectional view shown to (a) (C) is a cross-sectional view taken along line Y0-Y0 shown in (a). In the alignment sheet cutting step of Embodiment 1, (a) shows a center portion of the alignment sheet, a distance D2 between the alignment portions, and a length between both ends of a region where a plurality of grooves are formed in the third stretched portion. It is a figure showing a mode that it cut | disconnected so that it might become larger than D1, and (b) is a X1-X1 line sectional view shown to (a). (A) is a top view showing the vapor deposition mask concerning Embodiment 2, (b) is a X1-X1 line sectional view shown to (a), (c) is a Y1-Y1 line cross section shown to (a) FIG. FIG. 14 is a diagram illustrating a production process of a vapor deposition mask according to Embodiment 3. (A) is a top view showing a mode that the alignment sheet is attached to the mask frame in the vapor deposition mask of Embodiment 3, (b) is a X1-X1 line sectional view shown to (a), (c) is It is Y1-Y1 line sectional drawing shown to (a). (A) is a top view showing the mode which cut | disconnected the center part of the alignment sheet in the vapor deposition mask of Embodiment 3, (b) is a X1-X1 line sectional view shown to (a), (c) is (a) It is Y1-Y1 line sectional drawing shown to a).

(Configuration of Electronic Device 30)
(A) of FIG. 1 is a perspective view showing the external appearance of the electronic device 30 in which the organic EL display device according to Embodiment 1 of the present invention is used, and (b) is a cross-sectional view of (a). A smartphone can be given as an example of the electronic device 30. However, the electronic device 30 is not limited to a smart phone, and is incorporated with an organic EL display panel (a display panel of a different shape) such as another portable information terminal such as a portable telephone terminal or a tablet, a television receiver, a personal computer, etc. It may be an electronic device.

The electronic device 30 has a housing 32. And the electronic device 30 has the touch panel 40, the speaker 34, the camera 36, and the microphone which are not shown in figure each provided in the housing | casing 32. As shown in FIG. Further, the electronic device 30 may have various buttons such as a power button for switching on and off of the power.

The touch panel 40 has a touch sensor 41 and an organic EL display panel 42. The organic EL display panel 42 has an irregular display area 43 for displaying various images. The organic EL display panel 42 has a display area 43 and a frame area surrounding the periphery of the display area 43. An organic EL display device (display device) is configured by attaching various parts to the organic EL display panel 42.

The touch sensor 41 is provided on the organic EL display panel 42. The touch sensor 41 is an input device that receives an input of a coordinate position on the organic EL display panel 42 from the user by detecting an input operation by contact or proximity of a finger, a stylus pen or the like. The touch sensor 41 may be integrally formed with the organic EL display panel 42, or may be formed as a configuration different from the organic EL display panel 42. The touch sensor 41 may be a capacitive type, an infrared type, or any other type that can receive an input operation from the user.

The display area 43 of the organic EL display panel 42 has an outer shape which is not rectangular or square, but a shape other than rectangular or square.

In the deformed shape, at least a part of the edge (side or corner) when the outer shape of the organic EL display panel is rectangular or square is inside (from the edge toward the center of the rectangle or square) or outside (rectangular or square) It is a shape having a deformed portion projecting in a direction away from the central portion). That is, when the outer shape of the organic EL display panel is rectangular or square, the deformed portion is a shape portion different from the rectangular or square.

In FIG. 1, in the display area 43 of the organic EL display panel 42, for example, four corners 43a to 43d have a shape (arc shape) having a so-called round shape which is not a right angle but is curved. Furthermore, the display area 43 of the organic EL display panel 42 has, for example, a shape having a notch 43 d recessed to be convex toward the central portion of the display area 43 from the edge on at least one of four sides. is there. The notch 43d has, for example, an arc shape. The frame area in the organic EL display panel 42 is narrow in width and has an outer shape substantially the same as the outer shape of the display area 43.

Further, as shown in FIG. 1B, in the present embodiment, in the display area 43 of the organic EL display panel 42, the cross section in the vicinity of both long sides is curved.

The camera 36 and the speaker 34 are disposed in an area surrounded by the notch 43 d in the housing 32.

The outer shape of the organic EL display panel 42 is an example, and it may be another different shape. Hereinafter, a method of manufacturing the organic EL display panel 42 whose outer shape is different will be described.

(Outline of manufacturing method of organic EL display panel)
FIG. 2 is a view showing a manufacturing process of the organic EL display panel according to the first embodiment. FIG. 3 is a plan view of the substrate 1 of the organic EL display panel according to the first embodiment. FIG. 4 is a cross-sectional view of an organic EL display panel formation region of the substrate of FIG. FIG. 3 shows a configuration in which the organic EL display panel is chamfered from one mother glass. The number of the chamfering of the organic EL display panel from one mother glass is not limited to 18, and may be 17 or less or 19 or more.

Eighteen organic EL display panel forming regions 9 are arranged on the substrate 1. The organic EL display panel forming area 9 is an area to be an organic EL display panel after being separated into pieces by being cut out from a mother glass.

The substrate 1 has a TFT substrate (substrate to be evaporated) 2, an active region 3, a frame-like bank 4 and a sealing layer 5.

A plurality of active areas 3 are provided in a matrix. The active area 3 is, for example, an area where pixels of RGB are formed. In the organic EL display panel formation area 9, the area where the active area 3 is formed is the display area 43, and in the organic EL display panel formation area 9, an area around the active area 3 is the frame area 44. . In FIG. 3, the frame area 44 is an area outside the area (active area 3) indicated by the broken line in the organic EL display panel formation area 9.

As shown in FIGS. 2 to 4, first, the TFT substrate 2 is manufactured in the TFT process S11. The TFT substrate 2 is a mother glass on which a film as a base of a flexible substrate is formed of a material such as polyimide, and a TFT (transistor, drive element included in a pixel circuit disposed in each pixel is formed thereon by a known method. ), Gate wiring and source wiring, and other various wirings are formed, passivation film (protective film), interlayer insulating film (planarization film), etc. are formed, and contact with the anode is taken on the inorganic insulating film. A reflective electrode layer, an ITO layer, and a pixel bank (edge cover) for defining a light emitting region are formed.

Thus, a light emitting area is formed in the active area 3.

The passivation film prevents the peeling of the metal film in the TFT and protects the TFT. The passivation film is formed on the mother glass or through another layer and covers the TFT. The passivation film is an inorganic insulating film made of silicon nitride, silicon oxide or the like.

The interlayer insulating film planarizes the unevenness on the passivation film. The interlayer insulating film is formed on the passivation film. The interlayer insulating film is an organic insulating film made of a photosensitive resin such as acrylic or a thermoplastic resin such as polyimide.

Further, when the active area 3 is formed, a frame-like bank 4 surrounding the active area 3 in a frame shape is also formed on the TFT substrate 2. The frame-like bank 4 is made of a photosensitive resin such as acrylic or a thermoplastic resin such as polyimide.

Next, in the organic EL step S12, an organic EL layer is formed on the reflective electrode layer in each pixel of the TFT substrate 2 (that is, in the opening of the pixel bank formed in the TFT step S11). The organic EL layer includes a light emitting layer, a hole transport layer and other functional layers. The light emitting layer emits light of different colors such as red, green or blue for each pixel. At least one of the light emitting layer and the hole transporting layer (hereinafter, may be referred to as a light emitting layer or the like) is a predetermined position of each pixel by vapor deposition using the vapor deposition mask according to the present embodiment in vacuum in the vapor deposition process. Is formed.

A deposition mask used in a deposition process for forming a deposition layer to be deposited for each pixel, such as a light emitting layer and a hole transport layer, is prepared in advance by a production process S20 of a deposition mask before the deposition process. In addition, the detail of preparation process S20 of a vapor deposition mask is mentioned later. The layer formed using this vapor deposition mask is not limited to the light emitting layer and the hole transport layer, and may be a layer formed for each pixel (that is, in the opening of the pixel bank).

Then, a transparent electrode facing the reflective electrode through the organic EL layer is formed to cover the organic EL layer.

Then, in the sealing step S13, the sealing layer 5 is formed. The sealing layer 5 can have, for example, a three-layer structure in which an inorganic film 6, an organic film 7, and an inorganic film 8 are stacked in this order from the TFT substrate 2 side. Since the frame-like bank 4 is formed, the film thickness of the organic film 7 can be thickened to, for example, 1.0 μm or more.

After forming the sealing layer 5, a flexible step S14 is performed. In the flexible step S14, the glass of the substrate is peeled off and a film or the like to be a support is attached.

Then, next, in the singulation step S15, each organic EL display panel formation region 9 is cut out. Thereby, each organic EL display panel formation area 9 is singulated. Thereby, a flexible display panel (organic EL display panel) having a different shape is formed.

Next, in the mounting step S16, a member such as a driver is mounted on each of the separated organic EL display panel formation regions 9. Thus, the organic EL display device is completed.

FIG. 5 is a schematic view showing a deposition process when forming a deposition layer (a layer deposited for each pixel, such as a light emitting layer and a hole transport layer) of the organic EL display device according to the first embodiment.

In the deposition step of depositing a deposition layer, deposition particles 10 in which a deposition mask 10 provided with a mask sheet 15 having a plurality of through holes is adhered to the TFT substrate 2 and evaporated by a deposition source 70 under vacuum. The organic light emitting material is deposited on the pixels in the TFT substrate 2 through the mask sheet 15. Thereby, a vapor deposition pattern of a pattern corresponding to the through hole of the mask sheet 15 is formed on the TFT substrate 2.

FIG. 6 is an enlarged view of a part of the active area 3 of the first embodiment. In the active area 3, pixels pix contributing to the display of an image are arranged in a matrix. A light emitting layer 80 is formed in the pixel pix. A surrounding area surrounding the pixel pix is a pixel bank bk.

As an example, in FIG. 6, a red pixel Rpix in which a red light emitting layer 80R emitting red light is formed, a green pixel Gpix having a green light emitting layer 80G emitting green light, and a blue light emitting layer 80B emitting blue light And blue pixels Bpix having a .beta. However, the pixel arrangement is not particularly limited to the pen tile arrangement, and may be another arrangement such as a stripe arrangement.

The shape of the light emitting layer 80 is the shape of the opening of the pixel bank bk in which the light emitting layer 80 is formed.

(Evaporation mask)
Next, the structure of the deposition mask used in the deposition step and the preparation step S20 of the deposition mask will be described.

FIG. 7 is a view showing a manufacturing process of the vapor deposition mask according to the first embodiment. (A) of FIG. 8 is a plan view showing the configuration of a mask frame in the vapor deposition mask of Embodiment 1, (b) is a cross-sectional view taken along line X1-X1 shown in (a), and (c) is (a) It is Y1-Y1 sectional view taken on the line of.

As shown in FIG. 8, the mask frame 11 is a frame-like member provided with a frame opening 11 a. The mask frame 11 is a support for fixing a mask of a plurality of sheet-like members such as a mask sheet. For example, a sheet-like member fixed to the mask frame 11 so as to cover the frame opening 11a may be a cover sheet 12 (FIG. 9), an alignment sheet 14 (FIGS. 10 to 12), and a howling sheet 13 as described later. (FIGS. 13 and 14), and the mask sheet 15 (FIGS. 15 to 17).

For the mask frame 11, for example, an invar material or the like having a thickness of 20 mm to 30 mm, which has very little thermal expansion, is used as a base material. The mask frame 11 is sufficiently thick as compared with the mask sheet, and has high rigidity so as to ensure sufficient accuracy even when stretching and welding the mask sheet.

The mask frame 11 is, for example, a frame-shaped member which is a square such as a square or a rectangle. In the present embodiment, the mask frame 11 is rectangular.

The mask frame 11 has a frame-shaped portion 11 c surrounding the frame opening 11 a in a frame shape, and an outer peripheral portion 11 b surrounding the outer periphery of the frame-shaped portion 11 c.

The frame-like portion 11 c is a region for coming into contact with the sheet-like member attached to the mask frame 11 and fixing the sheet-like member.

The outer peripheral portion 11b is thinner than the frame portion 11c. The outer peripheral portion 11b is a region for reinforcing the frame-like portion 11c, and may not be in contact with the sheet-like member. In the present embodiment, the outer peripheral portion 11b does not contact the sheet-like member.

The frame-shaped portion 11 c is, for example, a peripheral edge of the frame opening 11 a and is provided so as to extend around the frame opening 11 a.

The frame-like portion 11c has a first extending portion 11c1, a second extending portion 11c2, a third extending portion 11c3, and a fourth extending portion 11c4. The first extending portion 11c1 and the second extending portion 11c2 are arranged side by side facing each other with the frame opening 11a therebetween, and extend in the Y direction (first direction: up and down direction on the sheet). The third extending portion 11c3 and the fourth extending portion 11c4 are disposed to face each other side by side with the frame opening 11a interposed therebetween, and extend in the X direction (second direction: left-right direction in the drawing).

The frame opening 11a may be square, such as square and rectangular, or other shapes. In the present embodiment, the frame opening 11a is rectangular. The first extension part 11c1, the second extension part 11c2, the third extension part 11c3 and the fourth extension part 11c4 are provided side by side so as to form a rectangular frame.

In the present embodiment, the extension direction (Y direction) of the first extension part 11c1 and the second extension part 11c2 is a direction parallel to the longitudinal direction of the frame opening 11a and the mask frame 11. Further, the extension direction (X direction) of the third extension part 11c3 and the fourth extension part 11c4 is a direction parallel to the lateral direction orthogonal to the longitudinal direction of the frame opening 11a and the mask frame 11.

The third extending portion 11c3 and the fourth extending portion 11c4 are provided between the first extending portion 11c1 and the second extending portion 11c2. For example, the third extension part 11c3 is provided between one end of each of the first extension part 11c1 and the second extension part 11c2, and the fourth extension part 11c4 is the first extension part 11c1 and the second extension part 11c2 is provided between the other end of each.

In the first extending portion 11c1 and the second extending portion 11c2, grooves 11d for fixing a plurality of cover sheets 12 (FIG. 9) provided side by side in the Y direction are provided side by side. The groove 11d is provided for each of the cover sheets 12 (FIG. 9) attached to the first extending portion 11c1 and the second extending portion 11c2, and the frame opening 11a is formed in each of the first extending portion 11c1 and the second extending portion 11c2. They are provided side by side in the Y direction so as to face each other.

In the first extending portion 11c1 and the second extending portion 11c2, a region adjacent to the groove 11d is a convex portion, and the top surface 11g of the convex portion is provided side by side in the Y direction. The crown surface 11g is a surface to which the alignment sheet 14 (FIGS. 10 to 12) or the mask sheet 15 (FIGS. 15 to 17) is fixed. The crown surface 11g is provided in the Y direction in each of the first extending portion 11c1 and the second extending portion 11c2 via the groove 11d.

In the third extending portion 11c3 and the fourth extending portion 11c4, grooves 11e for fixing a plurality of howling sheets 13 (FIGS. 13 and 14) provided side by side in the X direction are provided side by side. The groove 11e is provided for each of the howling sheets 13 (FIG. 9) attached to the third extending portion 11c3 and the fourth extending portion 11c4, and the frame opening 11a is provided in each of the third extending portion 11c3 and the fourth extending portion 11c4. They are provided side by side in the X direction so as to face each other.

In the third extending portion 11c3 and the fourth extending portion 11c4, a region adjacent to the groove 11e is a convex portion, and the convex portion has a top surface 11h.

The thickness of the region where the groove 11e is provided in the third extending portion 11c3 and the fourth extending portion 11c4 is thinner than the thickness of the region where the groove 11d of the first extending portion 11c1 and the second extending portion 11c2 is provided. .

Further, the thickness of the area where the top surface 11 h is provided in the third extension part 11 c 3 and the fourth extension part 11 c 4 is the area where the top surface 11 g of the first extension part 11 c 1 and the second extension part 11 c 2 is provided The same as the thickness of.

As shown in step Sa of FIG. 7 and FIG. 9, a plurality of cover sheets 12 are attached to the mask frame 11 so as to line the Y direction and to be parallel to one another (cover sheet attachment step).

The cover sheet 12 is a sheet-like member arranged in the Y direction and fixed to the frame-like portion 11 c. The cover sheet 12 plays a role of filling a gap between the mask sheets to be attached to the mask frame 11 later and closing a dummy pattern formed on the mask sheet.

The cover sheet 12 is made of, for example, an invar material having a thickness of 30 μm to 50 μm as a base material. The cover sheet 12 has an elongated shape and linearly extends in the X direction from one end to the other end.

The cover sheet 12 is attached in the groove 11 d with the groove 11 d formed in the first extending portion 11 c 1 and the second extending portion 11 c 2 in the mask frame 11 as a reference of positioning.

When attaching the cover sheet 12 to the mask frame 11, the ends of the cover sheet 12 are stretched by applying a force in the outward direction (direction away from each other) to both ends, and the first extension 11c1 And the second extending portion 11c2 is disposed in each of the grooves 11d. And the cover sheet 12 is fixed to the frame-like part 11c by welding the part arrange | positioned in the said groove | channel 11d among the cover sheets 12 with a laser etc. FIG. Thereby, each cover sheet 12 is fixed in the grooves 11 d of the first extending portion 11 c 1 and the second extending portion 11 c 2. And the unnecessary part outside the welded part in the cover sheet 12 is cut as needed.

FIG. 10A is a plan view showing how the alignment sheet is attached to the mask frame in the vapor deposition mask of Embodiment 1, and FIG. 10B is a sectional view taken along line X1-X1 shown in FIG. c) is a cross-sectional view taken along line Y1-Y1 shown in (a).

Next, as shown in step Sb of FIG. 7 and FIG. 10, the alignment sheet 14 on which the alignment mark 14a is formed is arranged in parallel in the Y direction so that the alignment mark 14a is at a predetermined position. It is attached to the mask frame 11 (alignment sheet attaching process).

The alignment sheet 14 is a sheet-like member arranged in the Y direction and fixed to the frame-shaped portion 11c. The alignment sheet 14 is positioned at both ends of the sheet-like member that is fixed to the frame-like portion 11 c side by side in the Y direction. Of the two alignment sheets 14, the side closer to the third stretched portion 11c3 may be referred to as an alignment sheet 14A1, and the side closer to the fourth stretched portion 11c4 may be referred to as an alignment sheet 14A2.

The alignment mark 14 a serves as a reference for positioning the mask sheet 15 to be attached to the mask frame 11 later. In addition, in the present embodiment, the alignment mark 14 a also serves as a reference for positioning the howling sheet 13 to be attached to the mask frame 11 later. The alignment marks 14 a are provided near both ends of the alignment sheet 14.

As the alignment sheet 14, for example, an invar material having a thickness of about 10 μm to 50 μm, preferably about 25 μm, is used as a base material. The alignment sheet 14 is in the form of a strip wider than the cover sheet 12 and the howling sheet 13, and extends in the X direction from one end to the other end.

The alignment sheet 14 is attached to the mask frame 11 with the mask frame 11 as a reference for positioning.

When attaching the alignment sheet 14 to the mask frame 11, the ends of the alignment sheet 14 are stretched by applying a force to the both ends in the outward direction (directions away from each other). And arranged in contact with the top surface 11g provided in each of the second extending portions 11c2. Then, a portion of the alignment sheet 14 in contact with the top surface 11g is welded by a laser or the like. Thus, fixing portions 14 b welded to both ends of the alignment sheet 14 are formed.

In the present embodiment, the alignment marks 14a in the vicinity of both ends of the alignment sheet 14 are disposed so as to overlap with the top surface 11g of the first extending portion 11c1 and the top surface 11g of the second extending portion 11c2.

The alignment sheet 14 is fixed to the top surface 11 g of the first extending portion 11 c 1 and the second extending portion 11 c 2 by the fixing portion 14 b. And the unnecessary part outside the welded part (fixed part 14b) in the alignment sheet 14 is cut | disconnected as needed.

In the present embodiment, the fixing portion 14 b is formed on the outer side farther from the groove 11 e than the alignment mark 14 a in the vicinity of both ends of the alignment sheet 14. Thereby, in a state where the position of the alignment mark 14a is fixed, an unnecessary portion outside the fixing portion 14b can be cut.

Since the howling sheet 13 is attached to the groove 11 e as described later, in the alignment sheet 14, it can be expressed that the fixing portion 14 b is formed on the outer side farther from the howling sheet 13 than the alignment mark 14 a.

Thus, each alignment sheet 14 is attached to a predetermined position of the mask frame 11. In this embodiment, two alignment sheets 14 are attached to the mask frame 11 so as to be parallel to each other along the short side of the frame opening 11 a of the mask frame 11.

The two alignment sheets 14 are provided at the same height (that is, provided on the top surface 11g), and among the sheet-like members (that is, the plurality of alignment sheets 14 and the plurality of mask sheets 15) provided side by side in the Y direction. , Sheet-like members located at both ends. Further, in the present embodiment, the two alignment sheets 14 are sheet-like members provided at different heights (that is, provided on the top surface 11g and the bottom of the groove 11d), and provided side by side in the Y direction. Among the sheet-like members (that is, the plurality of alignment sheets 14, the plurality of mask sheets 15, and the plurality of cover sheets 12), the sheet-like members are positioned at both ends.

Therefore, the two alignment sheets 14 are at least one of the third extending portion 11c3 and the fourth extending portion 11c4 provided between the first extending portion 11c1 and the second extending portion 11c2 in the frame portion 11c. Cover the department.

That is, the alignment sheet 14A1 covers at least a part of each of the plurality of grooves 11e provided in the third extending portion 11c3. Further, the alignment sheet 14A2 covers at least a part of each of the plurality of grooves 11e provided in the fourth extending portion 11c4.

(A) of FIG. 11 is a plan view showing a state in which the central portion of the alignment sheet in the vapor deposition mask of Embodiment 1 is cut, (b) is a cross-sectional view taken along line X1-X1 shown in (a). ) Is a cross-sectional view taken along line Y1-Y1 shown in (a).

(A) of FIG. 12 is a plan view enlarging the vicinity of the alignment portion shown in (a) of FIG. 11, (b) is a cross-sectional view taken along line X1-X1 shown in (a), (c) It is Y1-Y1 line sectional drawing shown to a).

In (a) of FIG. 22, in the alignment sheet cutting step of Embodiment 1, the central portion 14h of the alignment sheet 14A1 is formed, and the distance D2 between the

alignment portions

14d and 14e is a plurality of grooves 11e of the third extending portion 11c3. It is a figure showing a mode that it cut | disconnected so that it might become larger than the length D1 between the both ends of the area | region which is being carried out, (b) is a X1-X1 line sectional view shown to (a).

Next, as shown in step Sc of FIG. 7 and FIGS. 10 and 11, the

central portions

14h and 14i of the alignment sheet 14 are respectively cut (alignment sheet cutting step). Thereby,

alignment parts

14d, 14e, 14f and 14g are formed in the mask frame 11 (alignment part formation process). This alignment part formation process contains process Sb (alignment sheet attachment process) and process Sc (alignment sheet cutting process).

In the alignment sheet 14A1, regions near both ends including the alignment mark 14a are an alignment unit 14d (first alignment unit) and an alignment unit 14e (second alignment unit), and the alignment unit 14d and the alignment unit 14e The area to be connected is the central portion 14 h (first central portion).

In the alignment sheet 14A2, regions near both ends including the alignment mark 14a are an alignment unit 14f (third alignment unit) and an alignment unit 14g (fourth alignment unit), and the alignment unit 14f and the alignment unit 14g The area to be connected is the central portion 14i (second central portion).

Of the alignment sheets 14A1 and 14A2,

central portions

14h and 14i are regions between the alignment marks 14a near both ends.

As shown in FIGS. 10 and 11, the distance between the

alignment portions

14d and 14e to be left in the alignment sheet 14A1 is D2, and the third stretch portion 11c3 is located between both ends of the region where the plurality of grooves 11e are formed. Assuming that the length is D1, the central portion 14h is cut from the alignment sheet 14A1 so that D2 is the same as D1 (D2 = D1) (alignment sheet cutting step). Alternatively, as shown in FIG. 22, the central portion 14h may be cut from the alignment sheet 14A1 such that D2 is larger than D1 (D2> D1). That is, in the alignment sheet cutting step, the central portion 14 h is cut from the alignment sheet 14 A 1 so that D 2 is D 1 or more (D 2 D D 1).

As shown in FIG. 11 and FIG. 12 or FIG. 22, thereby, the plurality of grooves 11e provided in the third extending portion 11c3 are exposed, and the top surface 11h between the grooves 11e is also exposed.

Similarly, as shown in FIGS. 10 and 11, the distance between the

alignment portions

14f and 14g left in the alignment sheet 14A2 is D2, and in the fourth extension portion 11c4, in the region where the plurality of grooves 11e are formed. Assuming that the length between both ends is D1, the central portion 14i is cut from the alignment sheet 14A2 so that D2 is the same as D1 (D2 = D1) (alignment sheet cutting step). Alternatively, the central portion 14i may be cut from the alignment sheet 14A2 so that D2 is larger than D1 (D2> D1), as in the description using FIG. That is, in the alignment sheet cutting step, the central portion 14i is cut from the alignment sheet 14A2 such that D2 is D1 or more (D2 ≧ D1).

Thereby, as shown in FIG. 11, each of the plurality of grooves 11e provided in the fourth extension portion 11c4 is exposed, and the top surface 11h between the grooves 11e is also exposed.

FIG. 13A is a plan view showing how the howling sheet is attached to the mask frame in the vapor deposition mask of Embodiment 1, and FIG. 13B is a sectional view taken along line X1-X1 shown in FIG. c) is a cross-sectional view taken along line Y1-Y1 shown in (a).

Next, as shown in step Sd of FIG. 7 and FIG. 13, the howling sheets 13 (also referred to as support sheets) are arranged in the X direction on the mask frame 11 to which the

alignment units

14d, 14e, 14f and 14g are attached. Attach so as to be parallel (Howling sheet attachment process).

Each howling sheet 13 is provided in each groove 11e provided in each of the third extending portion 11c3 and the fourth extending portion 11c4 using the alignment marks 14a provided in the

alignment portions

14d, 14e, 14f, 14g as a reference for positioning. It is attached.

The howling sheet 13 is a sheet-like member which is fixed to the frame-like portion 11 c side by side in the X direction. The howling sheet 13 plays a role of supporting the mask sheet to be attached later to the mask frame 11 so as not to be loosened or blocking a dummy pattern formed on the mask sheet. Furthermore, the howling sheet 13 in the present embodiment is used as a sheet-like member that determines the outer shape of the display area in the organic EL display panel.

The howling sheet 13 extends in a direction different from that of the mask sheet 15. In the present embodiment, the howling sheet 13 extends in the Y direction.

For the howling sheet 13, for example, an invar material with a thickness of 30 μm to 100 μm is used as a base material. The width of the howling sheet 13 is, for example, about 8 mm to 10 mm, and is determined by the layout on the substrate on which the panel is disposed.

Normally, in a portrait-shaped display panel, the width of the howling sheet is wider than that of the cover sheet because the terminals are masked by the howling sheet, but the howling sheet is the display area of the display panel (ie, the mask sheet Is placed at a position not overlapping the However, in the present embodiment, the howling sheet 13 is disposed at a position overlapping the effective portion of the mask sheet 15 so that the outer shape (particularly, an irregular shape) of the display area of the display panel is formed by the howling sheet 13.

When attaching the howling sheet 13 to the mask frame 11, the both ends of the howling sheet 13 are stretched by applying a force in the outward direction (direction away from each other) to both ends, and the third extending portion 11c3 And it arrange | positions in the groove | channel 11e provided in each of 4th extending | stretching part 11c4. And the part arrange | positioned in the said groove | channel 11e among the howling sheets 13 is fixed by welding with a laser etc. FIG. Thereby, each howling sheet 13 is fixed in the groove 11 e of each of the third extending portion 11 c 3 and the fourth extending portion 11 c 4. And the unnecessary part outside the welded part in the howling sheet 13 is cut as needed.

As shown in (a) of FIG. 13, by attaching a plurality of cover sheets 12 and a plurality of howling sheets 13 to the mask frame 11 in a grid shape so as to intersect with each other, the cover sheets 12 facing each other Openings partitioned by the opposing howling sheets 13 are formed side by side.

As described above, D2 which is the distance between the

alignment portions

14d and 14e is D1 or more which is the length between both ends of the region where the plurality of grooves 11e are formed in the third extension portion 11c3 (D2 ≧ It is D1). Further, D2 which is a distance between the

alignment portions

14f and 14g is D1 or more (D2 D D1) which is a length between both ends of the region where the plurality of grooves 11e are formed in the fourth extension portion 11c4. It has become.

That is, the grooves 11e provided in the third extending portion 11c3 are not covered by the

alignment portions

14d and 14e and are exposed. The grooves 11e provided in the fourth extending portion 11c4 are not covered by the

alignment portions

14f and 14g and are exposed.

Therefore, in the step Sd (howling sheet attaching step), the alignment portion 14d and the alignment portion 14e are not located between the alignment portion 14d and the alignment portion 14e in plan view (when viewed from the normal direction to the XY plane). A plurality of howling sheets 13 can be attached to the mask frame 11 on the basis of the alignment marks 14 a so as to be superimposed. Similarly, in the step Sd, the plurality of howling sheets 13 and the alignment marks 14a are referred to so as not to overlap with the

alignment units

14f and 14g between the

alignment units

14f and 14g in plan view. Can be attached to the mask frame 11.

FIG. 14 is a plan view illustrating the configuration of the howling sheet 13 according to the first embodiment.

As shown in FIG. 14, the howling sheet 13 is provided with irregularities and the like including the shape of a deformed portion in the outer diameter shape of the active region from one end to the other end. The howling sheet 13 forms an outline of an active area between the attachment area 13a which is an area near both ends and which overlaps the mask frame 11 when attached to the mask frame 11, and the attachment area 13a. And an outer peripheral area 13b of an active area which is an area.

The outline forming area 13b of the active area has a concavo-convex shape for forming the outline of at least a part of the active area including the deformed part of the active area.

For example, in one side extending in the extending direction of the outer shape forming area 13b of the active area, the notches 13c are formed side by side, and on the other side extending in the extending direction, the notches 13d are arranged It is formed of

The

notches

13c and 13d have a shape corresponding to, for example, an arc-shaped deformed portion such as the notch 43e and four corners 43a to 43d in the active region 3 (FIG. 3).

The notched portion 13 c is the same as the curved portion 23 c having a rounded shape such as an arc shape having the same shape as the corner 43 c to form the corner 43 c of the active region 3 and the corner 43 d to form the corner 43 d of the active region 3. And a curved portion 23d having a rounded shape such as a circular arc shape. The

curved portions

23c and 23d are corner portions of the recess formed in the notch 13c.

The notched portion 13 d is a convex portion having a curved portion 23 a having a rounded shape such as the same arc shape as the corner 43 a to form a corner 43 a of the active region 3 and a convex shape having the same shape as the notched portion 43 e of the active region 3. It has a portion 23 e and a curved portion 23 b having a round shape such as the same arc shape as the corner 43 b in order to form the corner 43 b of the active region 3. The convex part 23e is formed between the curved part 23a and the curved part 23b. The

curved portions

23a and 23b are concave portions formed in the notch 13d. The convex part 23e is a convex part formed in the notch 13d.

In addition, it is preferable to design so that the position (for example, the position outside 100 μm to 200 μm) slightly outside the active area is the contour of the howling sheet in consideration of the error of the welding position of the howling sheet 13.

By forming the

notches

13c and 13d in the howling sheet 13, the width W13b of the

notches

13c and 13 facing each other is partially narrower than the width W13a of the attachment area 13a.

The howling sheet 13 has a shape having the

notches

13c and 13d in the sheet having a width W13a, but the sheet having a width W13b is provided with a projection such as the curved parts 23a to 23d and the convex part 23e. It may be of such a shape.

(A) of FIG. 15 is a plan view showing a mode that a mask sheet | seat in the vapor deposition mask of Embodiment 1 is attached to the mask frame, (b) is a X1-X1 line sectional view shown to (a), c) is a cross-sectional view taken along line Y1-Y1 shown in (a).

(A) of FIG. 16 is a plan view showing the vapor deposition mask of Embodiment 1, (b) is a cross-sectional view taken along line X1-X1 shown in (a), (c) is Y1-Y1 shown in (a) FIG.

Next, as shown in step Se of FIG. 7 and FIGS. 15 and 16, a plurality of mask sheets 15 are attached to the mask frame 11 so as to be aligned in the Y direction and parallel to each other (mask sheet attaching step).

The mask sheet 15 is a sheet-like member arranged in the Y direction and fixed to the frame-like portion 11 c. A plurality of mask sheets 15 are provided between the

alignment units

14 d and 14 e and the

alignment units

14 f and 14 g.

The mask sheet 15 is, for example, a sheet for separately applying each of RGB to pattern an evaporation layer in the pixels in the active area 3 shown in FIGS. 3 and 4.

Further, before the step Sd, as the step S101, before attaching the mask sheet 15 to the mask frame 11, a plurality of vapor deposition holes are formed side by side to form the effective portion YA on the mask sheet 15 (effective portion forming step ). A plurality of effective portions YA are formed on one mask sheet 15 for each active area 3. The details of the effective part YA will be described later.

The mask sheet 15 is in the form of a strip wider than the cover sheet 12 and the howling sheet 13, and extends in the X direction from one end to the other end.

When attaching the mask sheet 15 to the mask frame 11, it is stretched (pulled) by applying a force in the outward direction (direction away from each other) at both ends respectively, and is formed in each of the

alignment portions

14d, 14e, 14f, 14g With the alignment mark 14a as a reference for alignment, the both end portions of the mask sheet 15 are placed on the first extending portion 11c1 and the second extending portion 11c2 so that the vapor deposition holes constituting the effective portion YA are at predetermined positions. It arranges in contact with the provided crown surface 11g.

Then, a portion of the mask sheet 15 in contact with the top surface 11g is fixed by welding using a laser or the like. Thus, the mask sheet 15 is fixed to the top surface 11g of each of the first extending portion 11c1 and the second extending portion 11c2 with high accuracy.

Then, as shown in step Sf of FIG. 7 and FIG. 16, unnecessary portions outside the welded portion of the mask sheet 15 are cut.

As described above, the mask sheet 15 is arranged in the stretching direction (Y direction) of the plurality of howling sheets 13 so as to cover the frame opening 11 a and be supported by the plurality of howling sheets 13 in steps Sd to Se. Attach to 11

As shown in FIG. 16, the alignment unit 14d, the alignment unit 14e, the alignment unit 14f, the alignment unit 14g, and the mask sheet 15 are attached to the top surface 11g of the first extension part 11c1 and the second extension part 11c2, respectively. Therefore, the mask frame 11 is attached to the surface of the same height. On the other hand, since the howling sheet 13 is attached to the bottom of the groove 11e and the cover sheet 12 is attached to the bottom of the groove 11d, in the mask frame 11, the alignment portion 14d, the alignment portion 14e, the alignment portion 14f, the alignment portion 14g and It is attached to the surface of height different from the mask sheet 15.

In the present embodiment, since the howling sheet 13 is provided to be in contact with the mask sheet 15, the side of the cover sheet 12 and the howling sheet 13 in the mask frame 11 where the howling sheet 13 is higher (the mask sheet 15 It is attached to the surface of the direction side approaching).

Next, as shown in step Sg of FIG. 7, the vapor deposition mask on which the mask sheet 15 is attached is cleaned, and various mask inspections such as a foreign substance inspection and a precision inspection are performed. After this, the deposition mask 10 which has no problem in the mask inspection is stored in the stocker and supplied to the deposition apparatus used in the deposition process as needed. Thereby, the vapor deposition mask 10 is completed.

The deposition mask 10 is cleaned to remove foreign substances generated during the production of the deposition mask 10. In addition, after vapor deposition using the vapor deposition mask 10, cleaning is performed to remove vapor deposition particles attached to the vapor deposition mask 10.

In the present embodiment, in the step Sc, the

central portions

14h and 14i of the alignment sheets 14A1 and 14A2 are cut.

Therefore, as shown in FIG. 16, in the deposition mask 10, a region between the

alignment portions

14d and 14e (that is, a region covered by the central portion 14h), between the adjacent howling sheets 13 and the third extension portion The area enclosed by 11c3 is open. Further, in the deposition mask 10, an area between the

alignment portions

14f and 14g (that is, an area covered by the central portion 14i) and an area surrounded by the adjacent howling sheets 13 and surrounded by the fourth extending portion 11c4 is an opening. doing. However, since these openings are formed at the end of the vapor deposition mask 10, even if vapor deposition particles adhere to the vapor deposition substrate through these openings in the vapor deposition process, the active on the vapor deposition substrate Because it is out of the area 3, there is no adverse effect on the active area 3.

(Effective part YA)
FIG. 17 is a diagram showing the configuration of the mask sheet 15 of the first embodiment. (A) of FIG. 17 is a plan view of the mask sheet 15, (b) is an enlarged view of the effective portion shown in (a), and (c) is a cross-sectional view taken along line BB shown in (b). (D) is a cross-sectional view taken along line CC shown in (b).

As shown in FIG. 17A, the mask sheet 15 is in the form of a strip, and as a base material, for example, an invar material having a thickness of 10 μm to 50 μm, preferably about 25 μm, is used. The mask sheet 15 is formed of a thin sheet in order to prevent the thickness of the vapor deposited layer from becoming uneven.

A plurality of effective portions YA extending in the longitudinal direction of the mask sheet 15 are formed side by side between the two end portions of the mask sheet 15. The effective portion YA is a region of the mask sheet 15 in which the vapor deposition holes H are formed at equal pitches.

The outer shape of each effective portion YA is preferably not square, but square or rectangular so that stress applied when stretching the mask sheet 15 is as uniform as possible. In the present embodiment, the outer shape of each effective portion YA is rectangular. The respective effective portions YA are provided for each of the active regions 3 of the TFT substrate 2, and the effective portions YA are formed separately from each other.

In the vapor deposition step, the effective portion YA of the mask sheet 15 overlaps the active region 3 (FIGS. 3 and 4) of the TFT substrate 2 and the edge surrounding the effective portion YA is a frame region 44 (FIGS. 3 and 4). Overlapping with). Then, the deposition particles emitted from the deposition source are deposited on the pixels of the active region 3 of the TFT substrate 2 through some of the deposition holes H. In the present embodiment, the deposition holes H located outside the deformed portion of the active area 3 in the effective portion YA are shielded by overlapping with the howling sheet 13, so the deposition holes H located outside the deformed portion , Vapor deposition particles do not pass through.

Further, since the edge of the mask sheet 15 overlaps with the frame area 44 of the TFT substrate 2, the deposited particles are shielded by the edge and do not reach the frame area 44.

As shown to (b) of FIG. 17, the effective part YA is a part in which the several vapor deposition hole H provided in the mask sheet | seat 15 was provided.

As shown in (b) of FIG. 17 and FIG. 18, the effective part YA has a first area YA1 and a second area YA2. The first area YA1 is formed for each active area 3 (see FIG. 2), and has a shape corresponding to the active area 3. The second area YA2 is an area different from the first area YA1 in the effective portion YA, and is an area overlapping with the deformed portion of the howling sheet 13.

In the effective portion YA, the vapor deposition holes H included in the first region YA penetrate and the vapor deposition holes H included in the second region YA2 are shielded by the howling sheet 13.

The deposition holes H included in the first region YA are deposition holes for forming a pattern of a deposition layer for each pixel. The vapor deposition holes H included in the second region YA2 are dummy vapor deposition holes that do not contribute to pattern formation of the vapor deposition layer for each pixel. The deposition holes H in the second area YA2 have the same pitch and the same shape as the deposition holes H in the first area YA1.

When the light emitting layer is deposited on the TFT substrate through the mask sheet 15, the deposition holes H correspond to the formation region of the light emitting layer that emits light of any of the colors emitted by the light emitting layer in the effective portion YA. It is formed. For example, when the light emitting layer emitting red light, the light emitting layer emitting green light, and the light emitting layer emitting blue light are formed in the active region 3, the vapor deposition holes H emit light emitting red light The light emitting layer is formed in the same pattern as the light emitting layer of any of the layer, the light emitting layer emitting green light, and the light emitting layer emitting blue light.

In the effective portion YA, the area overlapping with the active area 3 and the area between the areas overlapping with the active area 3 are rectangular or square by combining the first area YA1 and the second area YA2, and in the variant, It has no shape.

In addition, with the odd shape, at least a part of the edge (side or corner) when the outer shape of the organic EL display panel is a rectangle or a square is inside (from the edge towards the center of the rectangle or square) or outside (a rectangle or It is a shape having a deformed portion projecting in a direction away from the center of the square). The irregularly shaped portion is a shape (arc shape) having a so-called round shape (round shape) in which the corner is not a right angle but curved, or at least one of the four sides is recessed so as to be convex from the edge toward the central portion It is a shape portion different from a rectangle or a square, such as a shape having a notch.

As shown in FIG. 18, for example, in the howling sheet 13 overlapping the effective portion YA, the active area 3 (FIGS. 3 and 4) is formed by the curved portion 23a, the convex portion 23e, the curved portion 23b, the curved portion 23c, and the curved portion 23d. Corner 43a, a notch 43e, a corner 43b, a corner 43c, and a corner 43d, which are deformed portions of. As described above, the contour of the portion including at least the deformed portion in the contour of the first area YA1 is defined by the howling sheet 13.

For this reason, in the vapor deposition process, the vapor deposition layer can be patterned in each pixel included in the active area having a desired outer shape by the effective portion YA and the howling sheet 13.

In the mask sheet 15, in the step S101 shown in FIG. 7, for example, vapor deposition holes H are produced as follows.

First, a negative or positive photosensitive resist material is applied on both sides of a long plate made of invar material or the like, and a resist film is formed on both main surfaces (first and second surfaces).

Next, a resist pattern is formed on both sides of the long plate by exposing and developing the resist film on the first surface and the second surface using an exposure mask. Then, the first surface 15b of the effective portion YA (the surface facing the TFT substrate 2 during deposition) is etched (the upper surface of the edge is not etched) using the first surface resist pattern as a mask, and the first surface 15b of the effective portion YA Pattern the opening K (do not form a through hole at this stage).

Next, the first surface 15b is covered with a resistant resin having etching resistance, and the second surface 15c (surface opposite to the surface facing the TFT substrate 2 at the time of vapor deposition) uses a resist pattern as a mask, the effective portion YA and the edge portion Etch the bottom of the Thereby, in the effective portion YA, the deposition holes H (through holes) are formed by erosion from the second surface 15c side, and a plurality of dents are formed on the lower surface of the edge.

The plurality of vapor deposition holes H in the effective portion YA are formed in a matrix or in a diagonal grid in the longitudinal direction and the transverse direction (width direction) of the mask sheet 15, and the opening K (opening on the upper surface) is a pixel of the substrate It has a square shape with rounded corners or a circular or oval shape so as to correspond to the opening shape of the bank. In the effective portion YA, the etching on the second surface 15c side is performed wider and deeper than the first surface 15b side with respect to each vapor deposition hole H, so that a shaded portion (a height of a partition between two adjacent vapor deposition holes To reduce deposition accuracy and deposition efficiency for the substrate.

In the effective portion YA, when the cross section is taken along the BB line passing through the centers of two laterally adjacent openings K, as shown in (c) of FIG. When a cross section is taken along a line C-C parallel to the line B--B, passing a point equidistant from two vertically adjacent openings K, as shown in (c) and (d) of FIG. It becomes a configuration (the maximum thickness is the thickness Ti of the base material) with the minimum number of cavities. Thereby, the mask sheet 15 is produced.

FIG. 19 is a cross-sectional view of a deposition mask and a TFT substrate during deposition in the deposition step of Embodiment 1.

As shown in FIG. 19, when depositing a deposition layer on the TFT substrate 2 using the deposition mask 10, the cover sheet 12, the howling sheet 13 and the mask sheet 15 are arranged in this order from the deposition source toward the TFT substrate 2. It is. Then, since the first surface 15b of the mask sheet 15 and the TFT substrate 2 are in close contact with each other at the time of vapor deposition, generation of shadows caused by separation of the effective portion YA of the mask sheet 15 and the TFT substrate 2 can be prevented. it can.

(Main effects)
Thus, the howling sheet 13 defines the outer shape of the deformed portion of the first area YA1 of the effective portion YA in the mask sheet 15. For this reason, the howling sheet 13 is required to have an accuracy of the relative position with the deposition holes H included in the effective portion YA. Further, along with the high definition of the pixels of the active region 3, the high definition of the deposition holes H of the effective portion YA is also required. Thereby, the accuracy improvement of the relative position of the howling sheet 13 and the mask sheet 15 is required.

Therefore, in the method of manufacturing the vapor deposition mask 10 according to the present embodiment, the

alignment portions

14 d, 14 e, 14 f, 14 g are attached to the mask frame 11 before attaching the howling sheet 13 to the mask frame 11. Then, both the howling sheet 13 and the mask sheet 15 are attached to the mask frame 11 while being aligned based on the alignment marks 14 a provided in the

alignment portions

14 d, 14 e, 14 f and 14 g. That is, the howling sheet 13 and the mask sheet 15 are attached to the mask frame 11 based on the same alignment mark 14 a.

Specifically, after the cover sheet is attached to the mask frame 11 in step Sa (FIGS. 7 and 9), next, in step Sb (FIGS. 7 and 10), the alignment sheet 14A1 is attached to the mask frame 11. While attached, the alignment sheet 14A2 is attached to the mask frame 11. The alignment sheet 14A1 is a sheet member including an alignment portion 14d, an alignment portion 14e, a central portion 14h connecting the alignment portion 14d and the alignment portion 14e. Further, the alignment sheet 14A2 is a sheet member including an alignment portion 14f, an alignment portion 14g, and a central portion 14i connecting the alignment portion 14f and the alignment portion 14g.

Next, in a step Sc (FIG. 7, FIG. 10, FIG. 11), the alignment portion 14d and the alignment portion 14e are formed on the mask frame 11 by cutting both ends of the central portion 14h of the alignment sheet 14A1. . Further, the alignment portion 14 f and the alignment portion 14 g are formed on the mask frame 11 by cutting both ends of the central portion 14 i of the alignment sheet 14 A 2.

In this manner, the alignment portion 14d and the alignment portion 14e which are sheet-like and provided with the alignment mark 14a are formed on the mask frame 11 provided with the frame opening 11a so as to be separated and opposed to each other. Further, an alignment portion 14f and an alignment portion 14g which are sheet-like and provided with the alignment mark 14a are formed on the mask frame 11 provided with the frame opening 11a so as to be separated and opposed to each other.

Next, in step Sd (FIGS. 7 and 13), the

alignment units

14d, 14e, 14f, 14g are between the

alignment units

14d, 14f and 14e, 14g in plan view. A plurality of howling sheets 13 are attached to the mask frame 11 on the basis of the alignment marks 14a of the

alignment units

14d, 14e, 14f and 14g so as not to overlap with each other.

Then, in steps Se and Sf (FIG. 7, FIG. 15, and FIG. 16), the mask sheet 15 having the effective portion YA in which the plurality of deposition holes H are arranged is covered by the frame opening 11a and supported by the plurality of howling sheets. As described above, a plurality of howling sheets 13 are arrayed in the extending direction (Y direction) and attached to the mask frame 11 based on the alignment marks 14a of the

alignment portions

14d, 14e, 14f and 14g.

In the vapor deposition mask 10 manufactured in this manner, the alignment unit 14 d and the alignment unit 14 e are disposed opposite to each other via the plurality of howling sheets 13 in plan view (when viewed from the normal direction of the XY plane). Each of the howling sheets 13 is attached to the mask frame 11 so as not to overlap with each other.

Further, an alignment unit 14 f is attached to the mask frame 11 from the alignment unit 14 d in the extending direction (Y direction) of the plurality of howling sheets 13. The alignment unit 14 g is attached to the mask frame 11 from the alignment unit 14 f in the extending direction (Y direction) of the plurality of howling sheets 13.

In a plan view, the alignment unit 14 f and the alignment unit 14 g are also disposed opposite to each other via the plurality of howling sheets 13 and are attached to the mask frame 11 so as not to overlap with the howling sheets 13.

According to the above configuration, the alignment unit 14d and the alignment unit 14e are disposed opposite to each other through the frame opening 11a, and the

alignment units

14f and 14g are disposed opposite to each other through the frame opening 11a. And the howling sheet 13 of FIG. For this reason, after attaching the

alignment parts

14d, 14e, 14f and 14f to the mask frame 11, the plurality of howling sheets 13 is used as the mask frame 11 with reference to the alignment marks 14a of the

alignment parts

14d, 14e, 14f and 14g. Can be attached to

Then, after attaching the plurality of howling sheets 13 to the mask frame 11, the plurality of mask sheets 15 can be attached to the mask frame 11 based on the alignment marks 14a of the

alignment portions

14d, 14e, 14f and 14g.

Therefore, the plurality of howling sheets 13 and the plurality of mask sheets 15 can be attached to the mask frame 11 based on the same alignment mark 14a.

Thereby, as compared with the case where the plurality of howling sheets and the plurality of mask sheets are attached to the mask frame based on different criteria, the positional deviation between the plurality of howling sheets 13 and the plurality of mask sheets 15 is reduced. The accuracy of the relative position of can be improved.

As a result, it is possible to obtain a deposition mask capable of forming a deposition layer at a more accurate position or forming a deposition layer having a more accurate outer shape.

Here, in step Sb (FIGS. 7 and 10), the alignment sheet 14A1 is attached to the mask frame 11, and the alignment sheet 14A2 is attached to the mask frame 11.

Of the alignment sheet 14A1, the alignment portion 14d is in close contact with the first extending portion 11c1, and the alignment portion 14e is in close contact with the second extending portion 11c2. Further, in the alignment sheet 14A2, the alignment portion 14f is in close contact with the first extending portion 11c1, and the alignment portion 14f is in close contact with the second extending portion 11c2.

For this reason, foreign substances are less likely to be mixed between the

alignment portions

14d and 14f and the first extending portion 11c1, and between the

alignment portions

14e and 14g and the second extending portion 11c2, respectively.

However, the central portion 14h of the alignment sheet 14A1 is not fixed to the third stretched portion 11c3, and the central portion 14i of the alignment sheet 14A2 is not fixed to the fourth stretched portion 11c4.

For this reason, when using a vapor deposition mask leaving the center part among alignment sheets, a foreign material may mix between the center part of an alignment sheet, and a mask frame. As described above, when foreign matter is mixed between the central portion of the alignment sheet and the mask frame, the remaining cleaning is likely to occur even when the deposition mask is cleaned. Then, if foreign matter remains on the deposition mask, the foreign matter may adhere to the deposition substrate during deposition, which may result in the deterioration of the completed panel quality.

On the other hand, in the present embodiment, the central portion 14h of the alignment sheet 14A1 is cut and removed, and the central portion 14i of the alignment sheet 14A2 is cut and removed. That is, in the deposition mask 10, the top surface 11h of the third extending portion 11c3 and the top surface 11h of the fourth extending portion 11c4 are exposed. Therefore, even if foreign matter adheres to the top surface 11h of the third extension portion 11c3 and the top surface 11h of the fourth extension portion 11c4, the foreign object can be easily removed by washing. As described above, the deposition mask 10 is less likely to cause cleaning residue. Therefore, during deposition using the deposition mask 10, it is possible to prevent foreign matter from remaining after cleaning from adhering to the deposition target substrate (TFT substrate 2). As a result, it is possible to prevent the deterioration of the finished panel quality.

Second Embodiment
(A) of FIG. 23 is a plan view showing the vapor deposition mask 10A according to the second embodiment, (b) is a cross-sectional view taken along line X1-X1 shown in (a), and (c) is Y1 shown in (a) -Y1 line sectional view.

In the vapor deposition step of forming a vapor deposition layer on the vapor deposition substrate, the vapor deposition mask 10A shown in FIG. 23 may be used instead of the vapor deposition mask 10 (FIG. 16). The deposition mask 10A has a configuration in which a mask sheet 15Z (dummy mask sheet) for measurement is attached to the mask frame 11 on the deposition mask 10 (FIG. 16).

After the steps Se and Sf shown in FIG. 7, the mask sheet 15Z is stretched and fixed to the mask frame 11 directly or indirectly by welding or the like while stretching. Next, the unnecessary part outside the said weld location is cut. Thereby, mask sheet 15Z can be attached to mask frame 11 directly or indirectly. After this, step Sg is performed.

The mask sheet 15Z is not a mask sheet for providing a vapor deposition layer in the active area 3, but is a strip-like mask sheet for providing vapor deposition layers for various measurements outside the active area 3. The mask sheet 15Z can be made of the same material as the mask sheet 15.

The width of the mask sheet 15Z may be different from the width of the mask sheet 15. On the mask sheet 15Z, effective portions YAZ (dummy effective portions) in which dummy evaporation holes which are dummy evaporation holes are arranged are provided side by side. Although the dummy evaporation holes provided in the effective portion YAZ are through holes, they may be different in shape from the evaporation holes H (FIG. 17) provided in the effective portion YA. It may be provided at different pitches. Further, the area and the shape of the effective part YAZ may be different from the area and the shape of the effective part YA.

In the present embodiment, two mask sheets 15Z are attached to the mask frame 11 directly or indirectly via the alignment unit.

The mask sheet 15Z is an area between the

alignment portions

14d and 14e (that is, an area covered by the central portion 14h), and an opening that is an area surrounded by the adjacent howling sheets 13 and surrounded by the third extending portion 11c3 is effective. It is attached to the mask frame 11 directly or through an alignment portion so as to cover the portion YAZ. The mask sheet 15Z is an area between the

alignment portions

14f and 14g (that is, the area covered by the central portion 14i) and is an area which is an area surrounded by the adjacent howling sheets 13 and surrounded by the fourth extending portion 11c4. Is attached to the mask frame 11 directly or through an alignment portion so as to cover the effective portion YAZ.

In the example of FIG. 23, the mask sheet 15Z is fixed to the surface of each of the

alignment portions

14d and 14e by welding or the like so as to cover a part of the third extending portion 11c3. Further, the mask sheet 15Z is fixed to the surface of each of the

alignment portions

14f and 14g by welding or the like so as to cover a part of the fourth stretched portion 11c4.

Alternatively, if there is a space for directly attaching the mask sheet 15Z to the mask frame 11, the mask sheet 15Z may be fixed by welding or the like directly to the top surface 11g of the first extension 11c1 and the top surface 11g of the second extension 11c2. Good.

Thus, the effective portion YAZ of the mask sheet 15Z provided on the mask frame 11 covers the opening between the alignment portion 14d and the alignment portion 14e. Further, the effective part YAZ of the mask sheet 15Z covers the opening between the alignment part 14f and the alignment part 14g.

According to the vapor deposition mask 10A, in the vapor deposition step, the vapor deposition particles pass through the effective portion YA of the mask sheet 15 and are deposited on each pixel of the active region 3 and pass through the effective portion YAZ of the mask sheet 15Z to form the TFT substrate 2 The deposition surface is also deposited in the area outside the active area 3. Various measurements such as film thickness and size can be performed using the deposition layer deposited on the deposition surface of the TFT substrate 2 and outside the active region 3.

Third Embodiment
FIG. 24 is a diagram illustrating a manufacturing process of the vapor deposition mask according to the third embodiment. (A) of FIG. 25 is a plan view showing a state in which the alignment sheet is attached to the mask frame in the vapor deposition mask of Embodiment 3, (b) is a sectional view taken along line X1-X1 shown in (a) c) is a cross-sectional view taken along line Y1-Y1 shown in (a). (A) of FIG. 26 is a plan view showing a state in which the central portion of the alignment sheet in the vapor deposition mask of Embodiment 3 is cut, (b) is a sectional view taken along line X1-X1 shown in (a). ) Is a cross-sectional view taken along line Y1-Y1 shown in (a).

The deposition mask manufacturing step S20 shown in FIG. 7 may be the deposition mask manufacturing step S20A shown in FIG. In the deposition mask manufacturing step S20A, before attaching the cover sheet 12 to the mask frame 11, the mask frame 11 is provided with an alignment portion.

As shown in step Sb of FIG. 24 and FIG. 25, the alignment sheet 14 on which the alignment marks 14a are formed is arranged in parallel in the Y direction so that the alignment marks 14a are at predetermined positions. On (alignment sheet mounting process).

When attaching the alignment sheet 14 to the mask frame 11, the ends of the alignment sheet 14 are stretched by applying a force to the both ends in the outward direction (directions away from each other). And arranged in contact with the top surface 11g provided in each of the second extending portions 11c2. Then, a portion of the alignment sheet 14 in contact with the top surface 11g is welded by a laser or the like. Thus, fixing portions 14 b welded to both ends of the alignment sheet 14 are formed. And the unnecessary part outside the welded part (fixed part 14b) in the alignment sheet 14 is cut | disconnected as needed.

The alignment sheet 14A1 covers at least a part of each of the plurality of grooves 11e provided in the third extending portion 11c3. Further, the alignment sheet 14A2 covers at least a part of each of the plurality of grooves 11e provided in the fourth extending portion 11c4.

Next, as shown in step Sc of FIG. 24, and FIGS. 25 and 26, the

central portions

14h and 14i of the alignment sheet 14 are cut (alignment sheet cutting step). Thereby,

alignment parts

14d, 14e, 14f and 14g are formed in the mask frame 11 (alignment part formation process).

In this alignment sheet cutting process, as described with reference to FIGS. 10 to 12 and 22, the central portion 14h is cut from the alignment sheet 14A1 so that D2 is D1 or more (D2DD1), and the alignment sheet The central portion 14i is cut from 14A2.

Thus, the plurality of grooves 11e provided in the third extension portion 11c3 are exposed, and the top surface 11h between the grooves 11e is also exposed. Further, each of the plurality of grooves 11e provided in the fourth extending portion 11c4 is exposed, and the top surface 11h between the grooves 11e is also exposed.

Next, as shown in step Sa of FIG. 24, the alignment marks 14a of the

alignment units

14d, 14e, 14f, 14g are used as a reference for positioning on the mask frame 11 to which the

alignment units

14d, 14e, 14f, 14g are attached. , Attach the cover sheet 12 (cover sheet attaching process). As a result, as shown in FIGS. 11 and 12, the

alignment portions

14d, 14e, 14f and 14g and the plurality of cover sheets 12 are attached to the mask frame 11.

As shown in FIG. 11, each cover sheet 12 is fixed in the groove 11 d formed in the first extending portion 11 c 1 and the second extending portion 11 c 2 as in the first embodiment. However, in the present embodiment, each cover sheet 12 is attached to the mask frame 11 with reference to the alignment marks 14 a of the

alignment portions

14 d, 14 e, 14 f, 14 g as described above unlike the first embodiment. .

After this, similarly to FIG. 7, as shown in step Sd of FIG. 24 and FIG. 13, the howling sheet 13 is inserted into the groove 11e of the mask frame 11 based on the alignment marks 14a of the

alignment portions

14d, 14e, 14f and 14g. Attach. Thereafter, as shown in steps Se and sf of FIG. 24, and as shown in FIGS. 15 and 16, the mask sheet 15 is stretched by the first extension portion 11c1 and the second extension with reference to the alignment marks 14a of the

alignment portions

14d, 14e, 14f and 14g. Attach to the top 11g of the head of the part 11c2. Then, next, mask inspection is performed as shown in step Sg of FIG. In addition, you may attach the mask sheet 15Z for a measurement as shown in FIG. 23 also to the vapor deposition mask which concerns on this embodiment.

As described above, in the present embodiment, in addition to the howling sheet 13 and the mask sheet 15, the cover sheet 12 is also aligned with the alignment marks 14a provided on the

alignment portions

14d, 14e, 14f and 14g as a mask Attach to the frame 11 That is, the cover sheet 12, the howling sheet 13, and the mask sheet 15 are attached to the mask frame 11 based on the same alignment mark 14a. Therefore, the accuracy of the relative positions of the cover sheet 12, the howling sheet 13, and the mask sheet 15 can be further improved.

As a result, even if the outer shape of the active area 3 (that is, the outer shape of the second area YA2 of the effective portion YA) is defined by the cover sheet 12 in addition to the howling sheet 13, the deposited layer is more accurately positioned. It is possible to obtain a deposition mask capable of forming a deposition layer having a more accurate outer shape.

[Other display]
The display according to each embodiment is not particularly limited as long as it is a display panel provided with a display element. The above-mentioned display element is a display element whose luminance and transmittance are controlled by a current, and an organic EL (Electro Luminescence: electro luminescence) provided with an OLED (Organic Light Emitting Diode) as a display element of current control. 2. Description of the Related Art An EL display such as an inorganic EL display including a display or an inorganic light emitting diode, and a QLED display including a quantum dot light emitting diode (QLED).

[Summary]
The vapor deposition mask according to aspect 1 is a vapor deposition mask for vapor depositing a vapor deposition layer on a pixel of a vapor deposition substrate provided with a plurality of active regions in which pixels contributing to display are arranged, and a mask frame provided with a frame opening And supporting a plurality of mask sheets arranged on the mask frame side by side so as to cover the frame opening and having an effective portion in which a plurality of vapor deposition holes corresponding to the pixels are arranged. A plurality of howling sheets extending in the direction in which the plurality of mask sheets are arranged and attached to the mask frame, and a first alignment unit and a second alignment unit each having a sheet shape and provided with alignment marks , And in plan view, the first alignment unit and the second alignment unit are configured to Are oppositely arranged with an Gushito, respectively, and being attached to the mask frame so that the above feedback sheet and non-overlapping.

The vapor deposition mask according to aspect 2 has a third alignment unit and a fourth alignment unit each having a sheet shape and provided with alignment marks, and the third alignment unit is connected to the first alignment unit from the first alignment unit, The fourth alignment portion is disposed in the extension direction of the plurality of howling sheets, and the fourth alignment portion is disposed in the extension direction of the plurality of howling sheets from the second alignment portion, and in plan view, the third alignment portion and the third alignment portion The four alignment units may be disposed to face each other via the plurality of howling sheets, and may be attached to the mask frame so as not to overlap with the respective howling sheets.

In the deposition mask according to the third aspect, in the edge of the frame opening in the mask frame, a plurality of grooves for fixing the plurality of howling sheets are provided for each of the howling sheets, and the plurality of grooves Assuming that the length between both ends of the region in which is formed is D1, and the distance between the first alignment portion and the second alignment portion is D2, D22D1.

In the evaporation mask according to the fourth aspect, each of the first alignment unit, the second alignment unit, the third alignment unit, and the fourth alignment unit has a fixing portion fixed to the mask frame, In each of the first alignment unit, the second alignment unit, the third alignment unit, and the fourth alignment unit, the fixing unit is on the outer side farther from the howling sheet than the alignment mark. It may be provided.

In the vapor deposition mask according to the fifth aspect, the effective portion includes a first region and a second region, the first region has a shape corresponding to the active region, and is provided for each active region. The second region defines the shape of the first region, and a portion of the deposition holes of the plurality of deposition holes may be shielded by overlapping with the howling sheet.

The vapor deposition mask according to the sixth aspect includes a notch that protrudes from the one side toward the inner direction of the first region on one side of the first region, and is surrounded by the notch outside the first region. The plurality of vapor deposition holes in the shaded area may be shielded by the howling sheet.

The vapor deposition mask according to aspect 7 is the same as the height of the surface to which the first alignment portion and the second alignment portion are attached and the height of the surface to which the plurality of mask sheets are attached in the mask frame. The height of the surface to which the plurality of howling sheets are attached may be different from the height of the surface to which the first alignment portion, the second alignment portion, and the plurality of mask sheets are attached. .

The vapor deposition mask according to the eighth aspect may have a plurality of cover sheets attached to the mask frame by extending in a direction different from the plurality of howling sheets so as to intersect with the plurality of howling sheets .

The vapor deposition mask according to the ninth aspect has a dummy effective portion in which a plurality of dummy vapor deposition holes are provided in a position not overlapping the pixel, and directly or indirectly to the mask frame so as to cover the frame opening. The dummy mask sheet may be attached, and the dummy effective portion may cover an opening between the first alignment portion and the second alignment portion.

The method of manufacturing a vapor deposition mask according to aspect 10 is a method of manufacturing a vapor deposition mask for vapor depositing a vapor deposition layer on the pixels of the vapor deposition substrate provided with a plurality of active regions in which pixels contributing to display are arranged. An alignment portion forming step of forming a sheet-like first alignment portion and a second alignment portion provided with alignment marks on a mask frame provided with a frame opening so as to be separated and opposed to each other; A plurality of howling sheets so as to be non-overlapping with the first alignment portion and the second alignment portion between the first alignment portion and the second alignment portion in plan view after the portion forming step Howling sea attached to the mask frame with reference to the alignment mark After the attaching step and the howling sheet attaching step, a mask sheet having an effective portion in which a plurality of vapor deposition holes are aligned is used to cover the frame opening and to be supported by the plurality of howling sheets. And attaching a plurality of the howling sheets in the extending direction of the plurality of howling sheets to the mask frame.

In the method of manufacturing a vapor deposition mask according to aspect 11, each of the alignment part forming step is a sheet-like third alignment part and a fourth alignment part provided with alignment marks, and the third alignment part is the above-mentioned third alignment part. The fourth alignment unit is disposed in the extension direction of the plurality of howling sheets from the first alignment unit, and the fourth alignment unit is disposed in the extension direction of the plurality of howling sheets from the second alignment unit, and the third alignment unit and the fourth alignment unit The method may include attaching to a mask frame provided with the frame opening such that the alignment portions are spaced apart and opposed to each other.

In the vapor deposition mask manufacturing method according to the twelfth aspect, the alignment portion forming step includes: the first alignment portion, the second alignment portion, and a first central portion connecting the first alignment portion and the second alignment portion. Attaching a first alignment sheet including the first alignment sheet to the mask frame, the third alignment portion, the fourth alignment portion, and a second central portion connecting the third alignment portion and the fourth alignment portion. Attaching the second alignment sheet to the mask frame; and cutting both ends of the first central portion of the first alignment sheet attached to the mask frame; Forming a second alignment portion; and Among alignment sheet, by cutting the two ends of the second central portion may include a step of forming the third alignment portion, and the fourth alignment portion.

The manufacturing method of the vapor deposition mask which concerns on aspect 13 is a mask sheet which attaches several cover sheets for making it cross with several said howling sheets on the said mask frame on the basis of the said alignment mark before the said mask sheet attachment process. An attachment step may be included.

The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the different embodiments. Is also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

2 TFT substrate (deposited substrate)
DESCRIPTION OF SYMBOLS 3 active area 4 frame-like bank 5

sealing layer

6, 8 inorganic film 7 organic film 9 organic EL display

panel formation area

10, 10A vapor deposition mask 11 mask frame 11a frame opening 11b outer peripheral part 11c frame-like part 11c1 first extending part 11c2 Second Stretched Part 11c3 Third Stretched Part 11c4 Fourth

Stretched Part

11d,

111d Grooves

11e,

111e Grooves

11g, 11h Top surface 12 Cover sheet 13 Howling sheet 14 Alignment sheet 14A1 Alignment sheet (first alignment sheet)
14A2 Alignment sheet (2nd alignment sheet)

14a alignment mark

14b fixing portion 14d alignment portion (first alignment portion)
14e Alignment unit (second alignment unit)
14f Alignment unit (3rd alignment unit)
14g Alignment unit (4th alignment unit)
14h Central part (1st central part)
14i Central area (2nd central area)
15 Mask sheet 15 Z Mask sheet (dummy mask sheet)
42 Organic EL Display Panel 43 Display Area 80 Light Emitting Layer (Deposition Layer)
First area YA2 of YA1 effective area YA Second area YAZ effective area of YA effective area (dummy effective area)

Claims

A deposition mask for depositing a deposition layer on a pixel of a deposition substrate provided with a plurality of active regions in which pixels contributing to display are arranged.
A mask frame provided with a frame opening;
A plurality of mask sheets having an effective portion in which a plurality of vapor deposition holes corresponding to the pixels are lined up, and attached to the mask frame side by side so as to cover the frame opening;
A plurality of howling sheets that support the plurality of mask sheets, extend in the direction in which the plurality of mask sheets are arranged, and are attached to the mask frame;
Each having a first alignment portion and a second alignment portion which are sheet-like and provided with alignment marks,
In plan view,
The first alignment unit and the second alignment unit are disposed opposite to each other via the plurality of howling sheets, and are attached to the mask frame so as not to overlap with the respective howling sheets. Deposition mask.
And a third alignment unit and a fourth alignment unit each having a sheet shape and provided with alignment marks,
The third alignment unit is disposed in the extending direction of the plurality of howling sheets from the first alignment unit,
The fourth alignment unit is disposed in the extending direction of the plurality of howling sheets from the second alignment unit,
In plan view,
The third alignment unit and the fourth alignment unit are disposed opposite to each other through the plurality of howling sheets, and are respectively attached to the mask frame so as not to overlap with the respective howling sheets. The vapor deposition mask according to claim 1.
At the edge of the frame opening in the mask frame, a plurality of grooves for fixing the plurality of howling sheets are provided for each of the howling sheets,
Let D1 be the length between the ends of the region in which the plurality of grooves are formed,
Assuming that the distance between the first alignment unit and the second alignment unit is D2,
The deposition mask according to claim 2, wherein D 2 DD 1.
The first alignment unit, the second alignment unit, the third alignment unit, and the fourth alignment unit each have a fixing portion fixed to the mask frame,
In each of the first alignment unit, the second alignment unit, the third alignment unit, and the fourth alignment unit, the fixing unit is on the outer side farther from the howling sheet than the alignment mark. The deposition mask according to claim 2, wherein the deposition mask is provided.
The effective portion includes a first area and a second area, and
The first area has a shape corresponding to the active area, and is provided for each active area.
The second region defines the shape of the first region, and a part of the deposition holes of the plurality of deposition holes are shielded by overlapping with the howling sheet. Deposition mask.
One side of the first area includes a notch projecting from the one side toward the inside of the first area,
The deposition mask according to claim 5, wherein the plurality of deposition holes outside the first region and in the region surrounded by the notches are shielded by the howling sheet.
In the above mask frame
The height of the surface to which the first alignment portion and the second alignment portion are attached is the same as the height of the surface to which the plurality of mask sheets are attached,
The height of the surface to which the plurality of howling sheets is attached is different from the height of the surface to which the first alignment portion, the second alignment portion, and the plurality of mask sheets are attached. The deposition mask according to any one of claims 1 to 6.
8. A plurality of cover sheets extending in a direction different from the plurality of howling sheets and attached to the mask frame so as to intersect with the plurality of howling sheets. The vapor deposition mask as described in 1 or 2.
A dummy mask sheet provided directly or indirectly on the mask frame so as to cover the frame opening and having a dummy effective portion in which a plurality of dummy evaporation holes are provided at positions not overlapping the pixels; Have
The evaporation mask according to any one of claims 1 to 8, wherein the dummy effective portion covers an opening between the first alignment portion and the second alignment portion.
A method of manufacturing a vapor deposition mask for vapor depositing a vapor deposition layer on a pixel of a vapor deposition substrate provided with a plurality of active regions in which pixels contributing to display are arranged.
An alignment portion forming step of forming a first alignment portion and a second alignment portion, each in sheet form and provided with an alignment mark, on a mask frame provided with a frame opening so as to be separated and opposed to each other;
After the alignment portion forming step, in plan view, a plurality of the first alignment portion and the second alignment portion do not overlap with the first alignment portion and the second alignment portion. Attaching the howling sheet to the mask frame with reference to the alignment mark;
After the howling sheet attaching process, a mask sheet having a plurality of effective portions in which a plurality of vapor deposition holes are arranged covers the frame opening and is supported by the plurality of howling sheets based on the alignment marks. And a mask sheet attaching step of attaching a plurality of the arranged in the extending direction of the howling sheet to the mask frame.
The alignment portion forming step is
A third alignment unit and a fourth alignment unit each having a sheet shape and provided with alignment marks;
The third alignment unit is disposed in the extending direction of the plurality of howling sheets from the first alignment unit,
The fourth alignment unit is disposed in the extending direction of the plurality of howling sheets from the second alignment unit,
The method of manufacturing a deposition mask according to claim 10, further comprising the step of attaching to the mask frame provided with the frame opening such that the third alignment unit and the fourth alignment unit are spaced apart and opposed to each other. .
The alignment portion forming step is
Attaching a first alignment sheet including the first alignment portion, the second alignment portion, and a first central portion connecting the first alignment portion and the second alignment portion to the mask frame;
Attaching a second alignment sheet including the third alignment unit, the fourth alignment unit, and a second central portion connecting the third alignment unit and the fourth alignment unit to the mask frame;
Forming the first alignment portion and the second alignment portion by cutting both ends of the first central portion of the first alignment sheet attached to the mask frame;
Forming the third alignment portion and the fourth alignment portion by cutting both ends of the second central portion of the second alignment sheet attached to the mask frame; The manufacturing method of the vapor deposition mask of Claim 11 characterized by the above-mentioned.
Before the mask sheet attaching step, the method includes a mask sheet attaching step of attaching a plurality of cover sheets for intersecting the plurality of howling sheets to the mask frame with reference to the alignment mark. 10. The method for producing a vapor deposition mask according to any one of 10 to 12.