CN111254306A - 一种低氧含量钼铌合金的制备方法 - Google Patents
一种低氧含量钼铌合金的制备方法 Download PDFInfo
- Publication number
- CN111254306A CN111254306A CN202010066341.4A CN202010066341A CN111254306A CN 111254306 A CN111254306 A CN 111254306A CN 202010066341 A CN202010066341 A CN 202010066341A CN 111254306 A CN111254306 A CN 111254306A
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- China
- Prior art keywords
- niobium
- molybdenum
- powder
- carbon
- alloy
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001257 Nb alloy Inorganic materials 0.000 title claims abstract description 75
- DTSBBUTWIOVIBV-UHFFFAOYSA-N molybdenum niobium Chemical compound [Nb].[Mo] DTSBBUTWIOVIBV-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 55
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 239000001301 oxygen Substances 0.000 title claims abstract description 54
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 95
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 66
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 64
- 239000007789 gas Substances 0.000 claims abstract description 60
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 claims abstract description 47
- 238000000034 method Methods 0.000 claims abstract description 37
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000011261 inert gas Substances 0.000 claims abstract description 21
- 239000002245 particle Substances 0.000 claims abstract description 19
- 238000002156 mixing Methods 0.000 claims abstract description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 26
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 7
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 7
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 6
- SRGHYVOLEUAOSA-UHFFFAOYSA-N [Nb].[Mo]=O Chemical compound [Nb].[Mo]=O SRGHYVOLEUAOSA-UHFFFAOYSA-N 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 61
- 239000002184 metal Substances 0.000 abstract description 61
- 239000010955 niobium Substances 0.000 abstract description 56
- 229910052758 niobium Inorganic materials 0.000 abstract description 48
- 238000005245 sintering Methods 0.000 abstract description 30
- 229910052750 molybdenum Inorganic materials 0.000 abstract description 14
- 239000011733 molybdenum Substances 0.000 abstract description 14
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 description 41
- 239000000843 powder Substances 0.000 description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 22
- 238000010438 heat treatment Methods 0.000 description 14
- 125000004430 oxygen atom Chemical group O* 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 229910052786 argon Inorganic materials 0.000 description 11
- 239000011148 porous material Substances 0.000 description 11
- 239000013077 target material Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Inorganic materials O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 6
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical group O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 6
- 229910052593 corundum Inorganic materials 0.000 description 5
- 239000010431 corundum Substances 0.000 description 5
- 238000000280 densification Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 229910000484 niobium oxide Inorganic materials 0.000 description 4
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- QXYJCZRRLLQGCR-UHFFFAOYSA-N molybdenum(IV) oxide Inorganic materials O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 description 3
- -1 niobium hydride Chemical compound 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- HFLAMWCKUFHSAZ-UHFFFAOYSA-N niobium dioxide Inorganic materials O=[Nb]=O HFLAMWCKUFHSAZ-UHFFFAOYSA-N 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007323 disproportionation reaction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000002816 gill Anatomy 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- QSGNKXDSTRDWKA-UHFFFAOYSA-N zirconium dihydride Chemical compound [ZrH2] QSGNKXDSTRDWKA-UHFFFAOYSA-N 0.000 description 1
- 229910000568 zirconium hydride Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
Claims (8)
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CN111254306B CN111254306B (zh) | 2021-04-16 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111850489A (zh) * | 2020-07-29 | 2020-10-30 | 江苏集萃先进金属材料研究所有限公司 | 靶材中间料及其形成方法和实现该形成方法的装置 |
CN115572877A (zh) * | 2022-10-08 | 2023-01-06 | 郑州大学 | 一种钼铌或钼钽合金的制备方法 |
Citations (10)
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DE3407293A1 (de) * | 1984-02-29 | 1985-09-05 | Hochtemperatur-Reaktorbau GmbH, 5000 Köln | Verfahren zum herstellen festhaftender nbc-schichten auf aus ni-cr-legierungen bestehenden bauteilen |
US20030019326A1 (en) * | 1999-07-07 | 2003-01-30 | Hitachi Metals, Ltd. | Sputtering target, method of making same, and high-melting metal powder material |
CN1509483A (zh) * | 2001-03-16 | 2004-06-30 | �Ѻ͵繤��ʽ���� | 用于电容器的铌和使用铌烧结体的电容器 |
WO2006006397A1 (ja) * | 2004-07-07 | 2006-01-19 | Youtec Co., Ltd | 被覆微粒子 |
CN103981383A (zh) * | 2014-05-23 | 2014-08-13 | 西安瑞科新材料科技有限公司 | 一种Al4SiC4-HfC包覆制备低氧钼及钼合金的方法 |
CN104561915A (zh) * | 2015-01-29 | 2015-04-29 | 烟台希尔德新材料有限公司 | 一种大尺寸钼铌靶材的制备方法 |
CN105154740A (zh) * | 2015-10-22 | 2015-12-16 | 烟台希尔德新材料有限公司 | 机械合金化铌钼靶材的制备方法 |
CN105593399A (zh) * | 2013-10-01 | 2016-05-18 | 吉坤日矿日石金属株式会社 | 钽溅射靶 |
EP2388346B1 (en) * | 2005-08-31 | 2019-05-22 | H.C. Starck Inc. | Production of fine grain niobium products by micro-alloying and ingot metallurgy |
CN110421158A (zh) * | 2019-07-22 | 2019-11-08 | 山东格美钨钼材料股份有限公司 | 一种低氧钼铌合金靶材的生产方法 |
-
2020
- 2020-01-20 CN CN202010066341.4A patent/CN111254306B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3407293A1 (de) * | 1984-02-29 | 1985-09-05 | Hochtemperatur-Reaktorbau GmbH, 5000 Köln | Verfahren zum herstellen festhaftender nbc-schichten auf aus ni-cr-legierungen bestehenden bauteilen |
US20030019326A1 (en) * | 1999-07-07 | 2003-01-30 | Hitachi Metals, Ltd. | Sputtering target, method of making same, and high-melting metal powder material |
CN1509483A (zh) * | 2001-03-16 | 2004-06-30 | �Ѻ͵繤��ʽ���� | 用于电容器的铌和使用铌烧结体的电容器 |
WO2006006397A1 (ja) * | 2004-07-07 | 2006-01-19 | Youtec Co., Ltd | 被覆微粒子 |
EP2388346B1 (en) * | 2005-08-31 | 2019-05-22 | H.C. Starck Inc. | Production of fine grain niobium products by micro-alloying and ingot metallurgy |
CN105593399A (zh) * | 2013-10-01 | 2016-05-18 | 吉坤日矿日石金属株式会社 | 钽溅射靶 |
CN103981383A (zh) * | 2014-05-23 | 2014-08-13 | 西安瑞科新材料科技有限公司 | 一种Al4SiC4-HfC包覆制备低氧钼及钼合金的方法 |
CN104561915A (zh) * | 2015-01-29 | 2015-04-29 | 烟台希尔德新材料有限公司 | 一种大尺寸钼铌靶材的制备方法 |
CN105154740A (zh) * | 2015-10-22 | 2015-12-16 | 烟台希尔德新材料有限公司 | 机械合金化铌钼靶材的制备方法 |
CN110421158A (zh) * | 2019-07-22 | 2019-11-08 | 山东格美钨钼材料股份有限公司 | 一种低氧钼铌合金靶材的生产方法 |
Non-Patent Citations (1)
Title |
---|
王振龙: "粉末法被覆碳化铌工艺的研究", 《辽宁工学院学报》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111850489A (zh) * | 2020-07-29 | 2020-10-30 | 江苏集萃先进金属材料研究所有限公司 | 靶材中间料及其形成方法和实现该形成方法的装置 |
CN115572877A (zh) * | 2022-10-08 | 2023-01-06 | 郑州大学 | 一种钼铌或钼钽合金的制备方法 |
CN115572877B (zh) * | 2022-10-08 | 2023-06-09 | 郑州大学 | 一种钼铌或钼钽合金的制备方法 |
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CN111254306B (zh) | 2021-04-16 |
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Effective date of registration: 20211123 Address after: 471822 Zongsan Road East, Luoxin industrial agglomeration zone, Xin'an County, Luoyang City, Henan Province Patentee after: Achemetal Tungsten AND Molybdenum Co.,Ltd. Address before: 450001 No. 100, science Avenue, hi tech Development Zone, Henan, Zhengzhou Patentee before: Zhengzhou University |
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Denomination of invention: A preparation method of molybdenum niobium alloy with low oxygen content Effective date of registration: 20220418 Granted publication date: 20210416 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2022980004337 |
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Granted publication date: 20210416 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2022980004337 |