CN111208316B - Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof - Google Patents
Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof Download PDFInfo
- Publication number
- CN111208316B CN111208316B CN202010114163.8A CN202010114163A CN111208316B CN 111208316 B CN111208316 B CN 111208316B CN 202010114163 A CN202010114163 A CN 202010114163A CN 111208316 B CN111208316 B CN 111208316B
- Authority
- CN
- China
- Prior art keywords
- bionic
- micro
- film
- airflow
- flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/02—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
- G01P5/04—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer using deflection of baffle-plates
Landscapes
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
Abstract
The invention discloses a bionic airflow omnidirectional sensing flexible sensor and a preparation method thereof, wherein the sensor comprises: the flexible substrate film, the flexible elastic polymer film, the conducting layer and the micro/nano rod are sequentially arranged; the flexible elastic polymer film is provided with a bionic slit structure with a plurality of emission shapes, the conducting layer is located in the bionic slit structure with the emission shapes, the micro/nano rods are located in the emission centers of the bionic slit structure with the emission shapes, and the elastic modulus of the micro/nano rods is larger than that of the flexible elastic polymer film. Since the micro/nano-rods are located at the emission centers of the emission-shaped bionic slit structures, each bionic slit structure represents one orientation. When the micro/nano rod swings to a certain bionic slit structure, the resistance of the bionic slit structure changes correspondingly. The flowing direction of the airflow can be obtained through the resistance change of the conducting layer corresponding to each bionic slit structure, and the size of the airflow can be obtained through the size of the resistance change.
Description
Technical Field
The invention relates to the technical field of gas flow velocity measurement, in particular to a bionic airflow omnidirectional sensing flexible sensor and a preparation method thereof.
Background
The currently commonly used gas flow velocity and direction measurement sensors can be classified into mechanical flow velocity and direction sensors, hot wire flow velocity sensors, electromagnetic flow velocity sensors, doppler optical flow velocity sensors, acoustic flow velocity sensors, and the like. However, the above fluid flow rate sensors all have certain defects, for example, the mechanical flow rate and flow direction sensor mainly measures the flow rate by driving the mechanical rotor or the rotary vane to rotate by the fluid, and the flow direction is mainly induced by the magnetic sensing device through the magnetic coupling effect. But has the defects of non-negligible mechanical wear, low flow velocity, low measurement precision and the like. The hot wire type flow velocity sensor is characterized in that a resistance change is caused by a hot wire temperature change caused by heat dissipation of an electrified and heated resistance wire in a flow field, so that a corresponding electric signal is output. The disadvantage is that the energy consumption is large, the probe is easy to damage due to long-time heating, and only one-dimensional flow direction change can be measured for flow direction measurement. Therefore, the flow direction of the gas flow rate measurement in the prior art is single.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a bionic airflow omnidirectional sensing flexible sensor and a preparation method thereof aiming at solving the problem of single flow direction of gas flow velocity measurement in the prior art.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a bionic airflow omni-directional sensing flexible sensor, comprising: the flexible substrate film, the flexible elastic polymer film, the conducting layer and the micro/nano rod are sequentially arranged; the flexible elastic polymer film is provided with an emission-shaped bionic slit structure, the micro/nano rods are located in the emission centers of the emission-shaped bionic slit structure, and the elastic modulus of the micro/nano rods is larger than that of the flexible elastic polymer film.
The bionic airflow omni-directional sensing flexible sensor is characterized in that the elastic modulus of the micro/nano rods is more than 100 times of that of the flexible elastic polymer film.
The bionic airflow omnidirectional sensing flexible sensor is characterized in that the flexible substrate film is one or more of a polyimide film, a polypropylene film, a polyester film, a polyvinylidene fluoride film, a polyethylene film and a polyvinyl chloride film.
The bionic airflow omnidirectional sensing flexible sensor is characterized in that the flexible elastic polymer film is an insulating flexible elastic polymer film.
The bionic airflow omnidirectional sensing flexible sensor is characterized in that the flexible elastic polymer film is one or more of a polydimethylsiloxane film, a rubber film, an epoxy resin film and a hydrogel film.
The bionic airflow omni-directional sensing flexible sensor is characterized in that the conductive layer is made of a conductive material, and the conductive material comprises: one or more of carbon nanoparticles, metal nanoparticles, and alloy nanoparticles; the metal nanoparticles include: gold nanoparticles, silver nanoparticles, copper nanoparticles; the alloy nanoparticles comprise aluminum boron alloy nanoparticles, aluminum chromium alloy nanoparticles, iron manganese alloy nanoparticles, aluminum chromium yttrium alloy nanoparticles and silver copper palladium alloy nanoparticles.
The bionic airflow omnidirectional sensing flexible sensor is characterized in that the cross section of the emission-shaped bionic slit structure is V-shaped.
The bionic airflow omnidirectional sensing flexible sensor is characterized in that the micro/nano rods are in vertical capillary shapes, and the length-diameter ratio of the micro/nano rods is 50-150.
A preparation method of the bionic airflow omni-directional sensing flexible sensor comprises the following steps:
providing a flexible substrate film;
sequentially preparing a flexible elastic polymer film on the flexible substrate film, and preparing a conductive layer in the emission-shaped bionic seam structure of the flexible elastic polymer film;
and preparing micro/nano rods at the emission centers of the emission-shaped bionic slit structures on the conductive layer to obtain the bionic airflow omnidirectional sensing flexible sensor.
The preparation method of the bionic airflow omnidirectional sensing flexible sensor, wherein the micro/nano rod is prepared at the emission center of the emission-shaped bionic slit structure on the conducting layer to obtain the bionic airflow omnidirectional sensing flexible sensor, comprises the following steps:
preparing a mask on the conducting layer, and growing micro/nano rods on the emitting centers of the emitting-shaped bionic slit structures on the conducting layer through hydrothermal reaction to obtain the bionic airflow omnidirectional sensing flexible sensor.
Has the advantages that: since the micro/nano-rods are located at the emission centers of the emission-shaped bionic slit structures, each bionic slit structure represents one orientation. When the micro/nano rod swings to a certain bionic slit structure, the resistance of the bionic slit structure changes correspondingly. The flowing direction of the airflow can be obtained through the resistance change of the conducting layer corresponding to each bionic slit structure, and the size of the airflow can be obtained through the size of the resistance change.
Drawings
Fig. 1 is a flow chart of a method for manufacturing a bionic airflow omnidirectional sensing flexible sensor in the invention.
Fig. 2 is a side view of the bionic airflow omni-directional sensing flexible sensor in the invention.
Fig. 3 is a top view of the bionic airflow omni-directional sensing flexible sensor in the invention.
Fig. 4 is a schematic diagram of the bionic airflow omnidirectional sensing flexible sensor for detecting airflow in the invention.
FIG. 5 is a planar view of a biomimetic suture structure in accordance with the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 2-5, the present invention provides some embodiments of a bionic airflow omni-directional sensing flexible sensor.
In nature, living beings generally have some excellent physiological structures of receptors, and can realize multiple sensing functions, such as chemical sensing, tactile sensing, vibration sensing and the like. One of the most well known typical receptors is the hair structure on arthropods. This hair is structurally distinct from hair of higher animals. These arthropods detect the surrounding environment by sensing air turbulence using these hair structures. For example, the parasitic hairs on the chela of the scorpion can sense and detect the air flow rate of 0.1 mu m/s, the cilia structure of the leg of the cricket can sense the air disturbance of 30 mu m/s, and the cave blind fish can distinguish the millimeter-level obstacles in the water flow only through the hair structure distributed in the nerve hills of the body lateral line area under the condition of losing vision after living in a dark water area for a long time. In addition to this, these biological hair structure receptors can also be used to distinguish the direction of fluid flow. Moreover, most arthropod bodies are distributed with a vibration receptor on the foot, the structure of the vibration receptor is in a slit shape, and the vibration receptor has the capability of distinguishing and positioning the peripheral vibration direction. The combination of the hairy and the slit biological receptor structures provides a natural biological blue book for designing and manufacturing the bionic high-sensitivity sensor.
As shown in fig. 2-3, the bionic airflow omni-directional sensing flexible sensor of the present invention comprises: the flexible substrate film 1, the flexible elastic polymer film 2, the conducting layer 3 and the micro/nano-rods 4 are sequentially arranged; be formed with the bionical seam structure of a plurality of emission form on the gentle elastic polymer film 2, the conducting layer is located in the bionical seam structure of emission form, little/nanorod 4 is located the transmission center of the bionical seam structure of emission form, little/nanorod 4's modulus of elasticity is greater than gentle elastic polymer film 2's modulus of elasticity.
It is worth noting that, when the airflow with the flow velocity V is tested, the action of the airflow on the micro/nano-rods 4 can be simplified as an external force F acting on the top ends of the micro/nano-rods 4 to deflect the micro/nano-rods 4 around the pivot point, as shown in FIG. 4. Since the elastic modulus of the micro/nano-rods 4 is greater than that of the flexible elastic polymer film 2, the micro/nano-rods 4 can swing under the action of external force without deflection. The greater the difference between the elastic modulus of the micro/nanorods 4 and the elastic modulus of the flexible elastic polymer film 2, the more swing, rather than deflection, occurs. For example, the elastic modulus of the micro/nanorods 4 is 100 times or more greater than that of the flexible elastic polymer film 2, increasing the difference in elastic modulus between the micro/nanorods 4 and the flexible elastic polymer film 2. Under the huge difference of the elastic modulus between the two materials, the swing angle theta of the micro/nano rod 4 is larger than the deflection angle of deflection. That is, the micro/nano-rods 4 with a large elastic modulus almost completely transfer the external force to the flexible elastic polymer thin film 2 when acted by the fluid, and the loss (self bending deformation) on the micro/nano-rods 4 themselves is very small and negligible, thereby improving the measurement accuracy and sensitivity.
From the moment balance it can be derived:
FL cosθ＝M1
wherein L is the length of the micro/nano rod 4, M1Is the moment of the flexible and elastic polymer film 2 to the micro/nano-rods 4. The same applies to the moment of the micro/nanorods 4 on the flexible elastic polymer film 2, according to the principle that the forces act on each other. Where there should be a direct relationship between F and theta. When the airflow velocity V is increased, the equivalent external force F is correspondingly increased, and the swing angle theta is also increased, so that M is caused1And therewith becomes larger. Thus the flow velocities V and M of the gas flow1There is also a direct relationship between them.
At moment M1Will result in a certain deformation of the conductive layer 3. Due to the external force, the conductive layer 3 is deformed, thereby affecting the overall resistance R of the sensor. R should also be proportional to R:
R∝M1
electrode leads (6,7) are respectively arranged at two ends of the conducting layer 3, and the resistance value of the conducting layer 3 is output at any time through the electrode leads (6,7), so that the flow velocity of the airflow is obtained. The micro/nano rod 4 can be used for detecting small airflow, so that the accuracy of airflow velocity measurement is improved. It should be noted that, because there are a plurality of bionic slit structures and a plurality of corresponding conductive layers, as shown in fig. 3, there is only one electrode lead at one end, and there are a plurality of electrode leads at the other end, and each bionic slit structure corresponds to one electrode lead.
Because the conductive layer 3 is arranged on the emitting bionic slit structure of the flexible elastic polymer film 2, when the micro/nano-rod 4 swings, the bionic slit structure can change under the action of force exerted on the flexible substrate film 2, for example, as shown in fig. 5, if the cross section of the emitting bionic slit structure is in a V shape, and the conductive layer 3 is also distributed on the bionic slit structure in a V shape, the change of the bionic slit structure can mean that the opening of the V shape can be close to or separated from each other. When the V-shaped bionic slit structures are close to each other, the V-shaped conductive layers 3 are also close to each other, and the resistance of the conductive layer 30 is reduced. When the V-shaped bionic slit structures are separated from each other, the V-shaped conductive layers 3 are also separated from each other, and the resistance of the conductive layer 30 is increased.
Since the micro/nano-rods are located at the emission centers of the emission-shaped bionic slit structures, each bionic slit structure represents one orientation. When the micro/nano rod swings to a certain bionic slit structure, the V-shaped structure of the bionic slit structure can be separated, and the resistance can be reduced. And the V-shaped surrounding the bionic slit structure is close to each other, so that the resistance is increased. The flowing direction of the airflow can be obtained through the resistance change of the conducting layer corresponding to each bionic slit structure, and the size of the airflow can be obtained through the size of the resistance change.
In short, when the sensor is installed and fixed and is placed in a fluid flow field, the force bearing areas of the micro/nano rods 4 in any direction of the plane are equal, so that the installation angle of the sensor is not required. Under the action of the flow field, the rigid micro/nano rod 4 with a large elastic modulus swings around the substrate (non-deflection), and at the moment, according to the moment balance principle, the action moment of the flow field force on the micro/nano rod 4 is equal to the action moment of the micro/nano rod 4 on the flexible elastic polymer film, and the directions are opposite. Therefore, the film is subjected to internal stress of tension or compression, and the contact state of the conductive particles between the two walls of the slit is further changed, thereby outputting an electric signal. The output port with larger electric signal indicates that the acting force of the bristle bar on the section of seam is the largest, and the acting force is reflected as the flow direction of the flow field. The larger the electrical signal, the larger the corresponding flow rate.
The precision of direction measurement can be changed by adjusting the number of the bionic seam structures, and usually 8 bionic seam structures are arranged to represent 8 different directions. The bionic slit structures can be arranged around the micro/nano rods to form circular distribution and also can form semicircular distribution, as shown in fig. 3.
A sensor with different detection limits can be obtained by adjusting the elastic modulus of the flexible elastic polymer film 2, specifically, when the elastic modulus of the flexible elastic polymer film 2 is smaller, the detection limit is lower, that is, a smaller airflow speed can be detected; when the elastic modulus of the flexible elastic polymer film 2 is large, the detection limit is high, that is, a large flow rate of the air stream can be detected.
It is also possible to obtain sensors with different sensitivities and different ranges by changing the material of the flexible elastic polymer film 2, for example, by increasing the difference in elastic modulus between the micro/nanorods 4 and the flexible elastic polymer film 2, and increasing the aspect ratio of the micro/nanorods 4 to obtain a sensor with high sensitivity.
In a preferred embodiment of the present invention, the flexible substrate film 1 is one or more of a Polyimide (PI) film, a polypropylene (PP) film, a Polyester (PET) film, a polyvinylidene fluoride (PVDF) film, a Polyethylene (PE) film, and a polyvinyl chloride (PVC) film.
In particular, the flexible base film 1 may provide better mechanical strength. The flexible substrate film 1 is adopted, so that the sensor can be conveniently prepared and formed on the flexible substrate film 1, and the flexible substrate film 1 is adopted, so that the sensor can be attached to sampling points with different shapes, and the application range of the sensor is expanded.
In a preferred embodiment of the present invention, the flexible elastic polymer film 2 is an insulating flexible elastic polymer film.
Specifically, the flexible and elastic polymer film 2 can induce the micro/nano rod 4 to swing under the action of the airflow, so that the micro/nano rod deforms correspondingly, and meanwhile, the conductive layer 3 also deforms, so that the resistance changes correspondingly. The flexible elastic polymer film 2 adopts an insulating flexible elastic polymer film to isolate the conductive layer 3, so that on one hand, external charges are prevented from interfering with resistance measurement, and the accuracy of the sensor is improved; on the other hand, the charge on the conducting layer 3 is prevented from leaking to the point to be measured, and the point to be measured is prevented from being influenced or damaged.
In a preferred embodiment of the present invention, the flexible and elastic polymer film 2 is one or more of a polydimethylsiloxane film, a rubber film, an epoxy resin film, and a hydrogel film.
Specifically, the rubber in the rubber film includes natural rubber, styrene-butadiene rubber, isoprene rubber, silicone rubber, chloroprene rubber, butyl rubber.
In a preferred embodiment of the present invention, the conductive layer 3 is made of a conductive material, and the conductive material includes: carbon nanoparticles, metal nanoparticles, and alloy materials.
Specifically, the carbon nanoparticles include: carbon nanotubes, nano carbon black, graphene, graphdiyne; the metal nanoparticles include: gold nanoparticles, silver nanoparticles, copper nanoparticles; the alloy material comprises an aluminum boron alloy (AlB), an aluminum chromium alloy (AlCr), an iron manganese alloy (FeMn), an aluminum chromium yttrium alloy (AlCrY) and a silver copper palladium alloy (AgCuPd).
In a preferred embodiment of the present invention, as shown in fig. 2, the micro/nanorods 4 are in the shape of vertical hair shafts, and the length-diameter ratio of the micro/nanorods 4 is 50-150. The spacing between two adjacent micro/nanorods may be set to be greater than the height of the micro/nanorods so as not to interfere with each other when the micro/nanorods swing.
Specifically, all the micro/nanorods 4 are perpendicular to the conductive layer 3 and distributed in an array. The micro/nanorods 4 are grown by hydrothermal reaction, for example, NiCo2O4And (4) nanorods.
Based on the bionic airflow omnidirectional sensing flexible sensor in any embodiment, the invention also provides a preferred embodiment of the preparation method of the bionic airflow omnidirectional sensing flexible sensor, which comprises the following steps:
as shown in fig. 1, the preparation method of the bionic airflow omni-directional sensing flexible sensor according to the embodiment of the invention comprises the following steps:
step S100, providing a flexible substrate film.
Specifically, the flexible base film may be one produced industrially, for example, a polyvinyl chloride film. The flexible base film can also be prepared by spin coating.
And S200, sequentially preparing a flexible elastic polymer film on the flexible substrate film, and preparing a conductive layer in the emission-shaped bionic seam structure of the flexible elastic polymer film.
Specifically, spin coating can also be used to produce flexible and elastic polymer films and conductive films. For example, a solution of the soft and elastic polymer is prepared first, and the soft and elastic polymer is dissolved by a solvent; and then transferring the flexible elastic polymer solution to a spin coater, and forming a film by the spin coater. After the flexible elastic polymer film is prepared, an emissive bionic seam structure is prepared on the flexible elastic polymer film by adopting a micro-machining or reverse mould method, and then a conductive layer is prepared.
When the conducting layer is prepared, a film coating mode is adopted for preparation; sputtering coating and deposition coating may be employed, for example, carbon deposition coating and nickel deposition coating; for another example, the metal nanoparticles are sputtered with particles. And (3) reserving the conducting layers in the emission-shaped bionic seam structures, etching gaps on the conducting layers at the positions between every two emission-shaped bionic seam structures, and independently opening every two emission-shaped bionic seam structures, wherein the emission-shaped bionic seam structures are connected together at the emission center position of the emission-shaped bionic seam structures. Specific flexible and elastic polymers and conductive materials may be selected as in the above embodiments.
And S300, preparing micro/nano rods at the emission centers of the emission-shaped bionic slit structures on the conductive layer to obtain the bionic airflow omnidirectional sensing flexible sensor.
Specifically, a mask is prepared on the conductive layerAnd the membrane plate is used for growing micro/nano rods on the conducting layer through hydrothermal reaction, and then the mask plate is removed to obtain the bionic airflow omnidirectional sensing flexible sensor. The mask is formed with micro/nano holes, which provide the positions for forming micro/nano rods, and the mask and the film (including flexible substrate film, flexible elastic polymer film, conductive layer) are fixed mechanically (such as clips) or by double-sided adhesive tape. After the mask plate and the film are fixed, the film is placed into a hydrothermal kettle. The hydrothermal kettle is provided with micro/nano rod materials to grow NiCo2O4Taking the nanorod as an example, NiCl is firstly added2、CoCl2And dissolving the urea by using deionized water, pouring the urea into a hydrothermal kettle, and then adding the fixed mask and the film to perform hydrothermal reaction. The mask plate can be made of silicon-based material, so that NiCo cannot grow on the mask plate2O4And (4) nanorods. Even if the micro/nanorods are grown on the mask, the micro/nanorods can be removed when the mask is removed, thereby obtaining the micro/nanorod array.
Specifically, mass ratio NiCl2：CoCl2: urea is 0.3-1:1:0.2-0.7, deionized water can be added according to needs, micro/nano rod materials need to be completely dissolved, and the dissolving can be accelerated in a stirring mode. The temperature of the hydrothermal reaction is 100-180 ℃, and the time of the hydrothermal reaction is 3-24 hours.
In other embodiments, the micro/nano rod material can be prepared by deposition, but the bonding force between the material interfaces is weaker than that of the hydrothermal method, i.e., the micro/nano rod material is less robust. Therefore, it is preferred to prepare the micro/nanorods by a hydrothermal method.
Of course, other methods without the need for a mask to prepare the micro/nanorods can be used as well, as long as the micro/nanorods are firmly connected to the conductive layer.
In summary, the bionic airflow omni-directional sensing flexible sensor and the preparation method thereof provided by the invention comprise the following steps: the flexible substrate film, the flexible elastic polymer film, the conducting layer and the micro/nano rod are sequentially arranged; the flexible elastic polymer film is provided with a bionic slit structure with a plurality of emission shapes, the conducting layer is located in the bionic slit structure with the emission shapes, the micro/nano rods are located in the emission centers of the bionic slit structure with the emission shapes, and the elastic modulus of the micro/nano rods is larger than that of the flexible elastic polymer film. Since the micro/nano-rods are located at the emission centers of the emission-shaped bionic slit structures, each bionic slit structure represents one orientation. When the micro/nano rod swings to a certain bionic slit structure, the resistance of the bionic slit structure changes correspondingly. The flowing direction of the airflow can be obtained through the resistance change of the conducting layer corresponding to each bionic slit structure, and the size of the airflow can be obtained through the size of the resistance change.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (9)
1. A bionic airflow omni-directional sensing flexible sensor is characterized by comprising: the flexible substrate film, the flexible elastic polymer film, the conducting layer and the micro/nano rod are sequentially arranged; the flexible elastic polymer film is provided with a plurality of emission-shaped bionic slit structures, the conducting layer is positioned in the emission-shaped bionic slit structures, the micro/nano rods are positioned at the emission centers of the emission-shaped bionic slit structures, and the elastic modulus of the micro/nano rods is greater than that of the flexible elastic polymer film; the elastic modulus of the micro/nano rods is more than 100 times of that of the flexible elastic polymer film; when the micro/nano rod swings under the action of air flow, the flexible elastic polymer film and the conductive film deform, and the swing angle of the micro/nano rod is larger than the deflection angle of deflection of the micro/nano rod.
2. The bionic airflow omni-directional sensing flexible sensor according to claim 1, wherein the flexible substrate film is one or more of a polyimide film, a polypropylene film, a polyester film, a polyvinylidene fluoride film, a polyethylene film and a polyvinyl chloride film.
3. The bionic airflow omni-directional sensing flexible sensor according to claim 1, wherein the flexible elastic polymer film is an insulating flexible elastic polymer film.
4. The bionic airflow omni-directional sensing flexible sensor according to claim 3, wherein the flexible and elastic polymer film is one or more of a polydimethylsiloxane film, a rubber film, an epoxy resin film and a hydrogel film.
5. The bionic airflow omni-directional sensing flexible sensor according to claim 1, wherein the conductive layer is made of a conductive material, and the conductive material comprises: one or more of carbon nanoparticles, metal nanoparticles, and alloy nanoparticles; the metal nanoparticles include: gold nanoparticles, silver nanoparticles, copper nanoparticles; the alloy nanoparticles comprise aluminum boron alloy nanoparticles, aluminum chromium alloy nanoparticles, iron manganese alloy nanoparticles, aluminum chromium yttrium alloy nanoparticles and silver copper palladium alloy nanoparticles.
6. The bionic airflow omni-directional sensing flexible sensor according to claim 1, wherein the cross section of the emission-shaped bionic slit structure is V-shaped.
7. The bionic airflow omni-directional sensing flexible sensor according to claim 1, wherein the micro/nanorods are in the shape of vertical hair shafts, and the length-diameter ratio of the micro/nanorods is 50-150.
8. A method for preparing a bionic airflow omni-directional sensing flexible sensor according to any one of claims 1 to 7, characterized by comprising the following steps:
providing a flexible substrate film;
sequentially preparing a flexible elastic polymer film on the flexible substrate film, and preparing a conductive layer in the emission-shaped bionic seam structure of the flexible elastic polymer film;
and preparing micro/nano rods at the emission centers of the emission-shaped bionic slit structures on the conductive layer to obtain the bionic airflow omnidirectional sensing flexible sensor.
9. The method for preparing a bionic airflow omni-directional sensing flexible sensor according to claim 8, wherein the preparing of micro/nano rods at the emission centers of the emission-shaped bionic slit structures on the conductive layer to obtain the bionic airflow omni-directional sensing flexible sensor comprises:
preparing a mask on the conducting layer, and growing micro/nano rods on the emitting centers of the emitting bionic slit structures on the conducting layer through hydrothermal reaction to obtain the bionic airflow omnidirectional sensing flexible sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010114163.8A CN111208316B (en) | 2020-02-24 | 2020-02-24 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010114163.8A CN111208316B (en) | 2020-02-24 | 2020-02-24 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111208316A CN111208316A (en) | 2020-05-29 |
| CN111208316B true CN111208316B (en) | 2021-04-20 |
Family
ID=70788534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010114163.8A Active CN111208316B (en) | 2020-02-24 | 2020-02-24 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111208316B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751571B (en) * | 2020-07-31 | 2021-08-13 | 中国科学技术大学 | Bending deformation contact domino principle-based flow velocity sensor |
| CN112858717B (en) * | 2021-02-20 | 2022-04-19 | 吉林大学 | Bionic airflow sensor and airflow detection device |
| CN113048974B (en) * | 2021-03-17 | 2023-09-22 | 吉林大学 | Bionic positioning device and application method thereof |
| CN113532520B (en) * | 2021-07-06 | 2022-07-12 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| KR102548893B1 (en) * | 2022-12-16 | 2023-06-28 | 한국해양과학기술원 | Method for measuring flow velocity and flow direction using optical sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215283A (en) * | 2014-09-18 | 2014-12-17 | 吉林大学 | Gas microflow detection device based on flow sensing mechanism of poison hairs of scorpions |
| CN106872724A (en) * | 2017-03-10 | 2017-06-20 | 吉林大学 | The bionical air flow rate sensor that a kind of clinking is combined |
| CN106959071A (en) * | 2017-01-19 | 2017-07-18 | 吉林大学 | A kind of bionical strain perceptual structure and forming method thereof |
| CN107943126A (en) * | 2017-11-30 | 2018-04-20 | 吉林大学 | A kind of bionical vascular testing system adjusted based on air pressure transformer |
| CN109931990A (en) * | 2019-02-25 | 2019-06-25 | 吉林大学 | Based on the adjustable bionical flow sensor of legendary venomous insect trichopore sensitivity and flow detector |
| CN110081995A (en) * | 2019-04-08 | 2019-08-02 | 吉林大学 | Bionic flexible temperature sensor and preparation method thereof based on scorpion seam receptor |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0328054D0 (en) * | 2003-12-04 | 2004-01-07 | Council Cent Lab Res Councils | Fluid probe |
| CN1851472A (en) * | 2006-05-29 | 2006-10-25 | 东南大学 | Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology |
| WO2016068804A1 (en) * | 2014-10-28 | 2016-05-06 | Massachusetts Institute Of Technology | A biomimetic sensor structure |
| CN104459181B (en) * | 2014-12-31 | 2017-06-23 | 东南大学 | A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed |
| CN104833350B (en) * | 2015-04-24 | 2017-05-31 | 东南大学 | For flow velocity and the sensitive bionical hair sensor of acceleration and detection method |
| CN106289210B (en) * | 2015-05-15 | 2019-04-30 | 东南大学 | A kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity |
| CN105304813A (en) * | 2015-09-23 | 2016-02-03 | 复旦大学 | Neural synapse simulation device and preparation method thereof |
| CN105424969B (en) * | 2015-11-21 | 2018-05-15 | 吉林大学 | A kind of magnetic-type class scorpion legendary venomous insect hair flow speed and direction sensor |
| JP6893678B2 (en) * | 2016-11-25 | 2021-06-23 | ホルトプラン合同会社 | Wind measuring device |
| CN107655465B (en) * | 2017-08-28 | 2020-08-14 | 东南大学 | Two-stage lever amplification resonant bionic hair flow velocity and acceleration micro-sensor |
| CN207649678U (en) * | 2017-12-30 | 2018-07-24 | 石家庄铁道大学 | Wind speed wind direction sensor |
| CN108362334B (en) * | 2018-02-02 | 2021-01-19 | 西安交通大学 | Underwater bionic lateral line sensing array |
| CN108444617B (en) * | 2018-02-08 | 2020-01-10 | 浙江大学 | Digital bionic hair sensing structure |
| CN108332794A (en) * | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN108802421B (en) * | 2018-07-27 | 2019-08-16 | 北京航空航天大学 | A kind of bionical flow sensor |
| CN109238245B (en) * | 2018-11-30 | 2020-11-10 | 中国海洋大学 | Novel bionic lateral line sensor |
| CN110231064A (en) * | 2019-05-08 | 2019-09-13 | 西安交通大学 | A kind of microflow sensor and its manufacturing system and method |
| CN110346033A (en) * | 2019-06-20 | 2019-10-18 | 重庆大学 | A kind of imitative spider flexibility low-frequency shock transducer |
-
2020
- 2020-02-24 CN CN202010114163.8A patent/CN111208316B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215283A (en) * | 2014-09-18 | 2014-12-17 | 吉林大学 | Gas microflow detection device based on flow sensing mechanism of poison hairs of scorpions |
| CN106959071A (en) * | 2017-01-19 | 2017-07-18 | 吉林大学 | A kind of bionical strain perceptual structure and forming method thereof |
| CN106872724A (en) * | 2017-03-10 | 2017-06-20 | 吉林大学 | The bionical air flow rate sensor that a kind of clinking is combined |
| CN107943126A (en) * | 2017-11-30 | 2018-04-20 | 吉林大学 | A kind of bionical vascular testing system adjusted based on air pressure transformer |
| CN109931990A (en) * | 2019-02-25 | 2019-06-25 | 吉林大学 | Based on the adjustable bionical flow sensor of legendary venomous insect trichopore sensitivity and flow detector |
| CN110081995A (en) * | 2019-04-08 | 2019-08-02 | 吉林大学 | Bionic flexible temperature sensor and preparation method thereof based on scorpion seam receptor |
Non-Patent Citations (3)
| Title |
|---|
| 《Biomaterial systems for mechanosensing and actuation;Fratzl Peter;《Nature》;20091126;全文 * |
| 《Visual-Tactile Sensory Map Calibration of a Biomimetic Whiskered Robot》;Tareq Assaf;《2016 IEEE International Conference on Robotics and Automation (ICRA)》;20160521;全文 * |
| 《基于蝎子缝感受器的仿生应变感知结构制造及性能研究》;宋洪烈;《中国博士学位论文全文数据库工程科技辑》;20170915;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111208316A (en) | 2020-05-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111208316B (en) | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof | |
| CN111208315B (en) | Bionic hairy airflow velocity sensor and preparation method thereof | |
| Ejeian et al. | Design and applications of MEMS flow sensors: A review | |
| KR101898604B1 (en) | Highly sensitive sensor comprising linear crack pattern and process for preparing same | |
| CN102313818B (en) | Based on flexible pressure drag flow field sensor and the method for making of single-wall carbon nanotube array | |
| CN205608019U (en) | Imitative water skipper sensation hair sensor measurements device | |
| US8056419B2 (en) | Artificial lateral line | |
| US20080022778A1 (en) | Microfabricated pressure and shear stress sensors | |
| Huang et al. | Compact biomimetic hair sensors based on single silicon nanowires for ultrafast and highly-sensitive airflow detection | |
| CN107765030B (en) | Piezoelectric fiber array sensor for sensing flow velocity change and measuring method thereof | |
| US20050034542A1 (en) | Sensor comprising mechanical amplification of surface stress sensitive cantilever | |
| CN109738097A (en) | A kind of multifunction electronic skin and preparation method thereof, plane external force detection method | |
| CN112525065A (en) | Micro-crack flexible resistance change mechanical sensor based on mixed resistance entanglement network and preparation method thereof | |
| CN108414584A (en) | A kind of preparation method of flexible, wearable moisture sensor and its application in breathing detection | |
| Yang et al. | From artificial hair cell sensor to artificial lateral line system: development and application | |
| US20210356340A1 (en) | Strain sensor | |
| Jia et al. | Flexible and highly sensitive piezoresistive pressure sensor with sandpaper as a mold | |
| CN112858717B (en) | Bionic airflow sensor and airflow detection device | |
| KR102045220B1 (en) | Strain sensing device, sensor array using the same and preparation method thereof | |
| CN209541954U (en) | A kind of multifunction electronic skin | |
| Chen et al. | Design and Fabrication of a Displacement Sensor Using Screen Printing Technology and Piezoelectric Nanofibers in d 33 Mode. | |
| Moshizi et al. | Carbon nanofiber-reinforced Pt thin film-based airflow sensor for respiratory monitoring | |
| CN117213355A (en) | Bionic strain sensor with adjustable measuring range, preparation method and measuring method thereof | |
| CN111721963A (en) | Wind speed sensor and wind speed detection device | |
| CN112648917A (en) | Novel flexible sensor capable of detecting human physiological signals based on coffee ring effect and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |