CN106289210B - A kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity - Google Patents
A kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity Download PDFInfo
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- CN106289210B CN106289210B CN201510247649.8A CN201510247649A CN106289210B CN 106289210 B CN106289210 B CN 106289210B CN 201510247649 A CN201510247649 A CN 201510247649A CN 106289210 B CN106289210 B CN 106289210B
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- comb
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
Abstract
The invention discloses a kind of bionical hair formula silicon micro-gyroscopes for angular speed sensitivity, by overlayer polymer hair, middle layer silicon micro-sensor and equipped with circuit bottom glass substrate composition, the middle layer silicon micro-sensor includes circular mass and the annulus mass block with circular mass concentric, there are two torsion beams for setting between the circular mass and annulus mass block, the overlayer polymer hair is bonded in circular mass center, the circumferential side portion of the annulus mass block is evenly provided with several comb groups and square wave supporting beam, the comb group and square wave supporting beam are intertwined.Structure of the invention is novel, possesses stronger sensitivity, compatible with existing planar technology, and the setting of overlayer polymer hair can effectively amplify coriolis force effect, improve the sensitivity of structure compared to previous simple planar structure.
Description
Technical field
The invention belongs to microelectromechanical systems and micro-inertia measuring technical field, and in particular to one kind is quick for angular speed
The bionical hair formula silicon micro-gyroscope of sense.
Background technique
MEMS sensor is using the novel sensor of micromachining technology manufacture, is one important point of MEMS device
Branch.With the development of microelectric technique, integrated circuit technique and processing technology, MEMS sensor relies on small in size, light-weight, function
It consumes low, high reliablity, high sensitivity, be easily integrated and the advantages such as resistance to harsh environments, be greatly promoted sensor
Micromation, intelligent, multifunction and web development.MEMS sensor just gradually occupies transducer market, and gradually replaces
The leading position of tradition machinery sensor has obtained consumption electronic product, auto industry, aerospace, machinery, chemical industry and medicine
Etc. the favor in each field.
Hair formula sensor is a kind of MEMS sensor mentality of designing emerging in recent years.Hair formula sensor passes through existing
There is MEMS technology technology to be processed, the hair structure in nature is copied to carry out sensor design, hair formula sensor will pass
The sensitive action of sensor has been extended in three-dimensional i.e. spatial dimension by previous two-dimensional structure i.e. planar range, greatly
Ground improves the sensing range of MEMS sensor.
In recent years, domestic and international You Duojia research institution has started the research to hair formula sensor.Dutch Universiteit Twente
Professor G.J.M.Krijnen tentatively have developed a kind of hair formula gyroscope, by the polymer cilium at top to coriolis force into
Row is sensitive, realizes the measurement to extraneous input angular velocity.But the hair formula gyroscope that most of mechanism researches and develops at present, function
Single, structure is complex, and practicability is poor.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides that a kind of detection sensitivity is high, property is made an uproar
The bionical hair formula silicon micro-gyroscope for angular speed sensitivity more very high than high and testing result accuracy.
Technical solution: in order to solve the above technical problems, a kind of bionical hair for angular speed sensitivity provided by the invention
Formula silicon micro-gyroscope is made of overlayer polymer hair, middle layer silicon micro-sensor and bottom glass substrate equipped with circuit, described
Middle layer silicon micro-sensor includes circular mass and the annulus mass block with circular mass concentric, the circular mass
There are two torsion beams for setting between annulus mass block, and the overlayer polymer hair is bonded in circular mass center, described
The circumferential side portion of annulus mass block is evenly provided with several comb groups and square wave supporting beam, the comb group and square wave supporting beam
It is intertwined.
Preferably, there are four comb group and four square wave supporting beams, two adjacent combs for setting on the annulus mass block
It is divided into 90 degree between tooth group, is divided into 90 degree between two adjacent square wave supporting beams.
Preferably, described two torsion beams are symmetrical on the basis of the axis of circular mass.
Preferably, the comb group is made of left comb teeth, right comb teeth and middle comb teeth, wherein middle comb teeth is fixed on annulus mass
On block, left comb teeth and right comb teeth are fixed on bottom glass substrate.
Preferably, the square wave supporting beam is fixedly connected with anchor point.
Preferably, in the comb group comb teeth the tangential direction for being oriented parallel to annulus mass block.
Preferably, the circular mass is with the axis direction of torsion beam in the view field on bottom glass substrate
Cut direction is equipped with the first half-round metal electrode and the second half-round metal electrode.
The setting of present invention polymeric hair at the middle and upper levels can increase the quality of middle layer silicon micro-sensor, so as to effective
Raising detection sensitivity, square wave supporting beam is connected to anchor point, anchor point by metal electrode and bottom glass substrate bonding, this
Sample enables middle layer silicon micro-sensor to be suspended on bottom glass substrate, in this way under the support of two torsion beams, circular masses
Block can carry out left and right torsion in the axis direction locating for torsion beam, when circular mass carry out left and right torsion when, round matter
The spacing of the pole plate for the capacitor that gauge block is constituted with the first half-round metal electrode and the second half-round metal electrode can change
Become, the electricity for the capacitive sensing mechanism that circular mass and the first half-round metal electrode and the second half-round metal electrode are constituted
Holding capacitance can also change.
When active force in the present invention when annulus mass block by its tangential direction, annulus mass block can be revolved around its center of circle
Turn certain angle, therefore that one end that square wave supporting beam is connected with annulus mass block also can and then rotate, due to square wave supporting beam
That one end being connected with anchor point is fixed, and the square wave configuration in square wave supporting beam can be elongated during rotation, generate with
The opposite elastic force of force direction.
The utility model has the advantages that the present invention compared with the prior art for have the advantages that
(1) overlayer polymer hair has been bonded on circular mass, increases the quality of middle layer silicon micro-sensor, thus
It is effectively exaggerated the sensitive action of testing agency, improves the sensitivity of detection.
(2) structure being combined using circular mass, annulus mass block and torsion beam, so that drive part and test section
Divide and separate well, reduces output noise signal, improve signal-to-noise ratio.
(3) design of square wave supporting beam is designed compared to common straight beam, and resonance frequency is low, and structural sensitivity is high, together
When can preferably discharge the residual stress left when processing, reduce the interference to testing result.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the top view of silicon micro-sensor in the present invention；
Fig. 3 is the circuit diagram being produced on bottom glass substrate in the present invention.
Specific embodiment
The present invention will be further explained with reference to the accompanying drawing.
As shown in Figure 1, Figure 2 and Figure 3, the present invention provides a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity
Instrument, for measuring the angular speed of X-direction input, the present invention includes overlayer polymer hair 1, middle layer silicon micro-sensor and is equipped with
The bottom glass substrate of circuit, the overlayer polymer hair 1 are obtained by polymer SU-8 is stretched, the micro- biography of middle layer silicon
Sensor includes circular mass 2 and the annulus mass block 3 with 2 concentric of circular mass, the circular mass 2 and annular
The first torsion beam 4-1 and the second torsion beam 4-2 are provided between mass block 3, the overlayer polymer hair 1 is bonded in round matter
2 center of gauge block, the circumferential side portion of the annulus mass block 3 are set there are four comb group 5 and square wave supporting beam 6,5 He of comb group
Square wave supporting beam 6 is intertwined, and four comb groups 5 are respectively the first comb group 5-1, the second comb group 5-2, third comb teeth
Group 5-3 and the 4th comb group 5-4, four square wave supporting beams 6 are respectively the first square wave supporting beam 6-1, the second square wave supporting beam 6-
2, third square wave supporting beam 6-3 and the 4th square wave supporting beam 6-4, the first square wave supporting beam 6-1, the second square wave supporting beam 6-
2, third square wave supporting beam 6-3 and the 4th square wave supporting beam 6-4 respectively with the first anchor point 7-1, the second anchor point 7-2, third anchor point
7-3 and the 4th anchor point 7-4 is connected.
First comb group 5-1, the second comb group 5-2, third comb group 5-3 and the 4th comb group 5-4 structure in the present invention
90 degree are divided between all identical and adjacent, specifically by taking the first comb group 5-1 as an example, the first comb group 5-1 is by the first left comb
Comb teeth 5-1c is constituted in tooth 5-1a, the first right comb teeth 5-1b and first, wherein comb teeth 5-1c is fixed on annulus mass block 3 in first
On, the first left right comb teeth 5-1b of comb teeth 5-1a and first is fixed on bottom glass substrate, and the first left comb teeth 5-1a and first
Right comb teeth 5-1b is plugged in first on comb teeth 5-1c.
The comb of first comb group 5-1, the second comb group 5-2, third comb group 5-3 and the 4th comb group 5-4 in the present invention
Tooth is oriented parallel to the tangential direction of annulus mass block 3, wherein the first comb group 5-1 and third comb group 5-3 is as driving comb
Tooth group, composition become space type electrostatic capacitance driving pole plate, the second comb group 5-2 and the 4th comb group 5-4 as detection comb group,
Composition becomes space type capacitive detecting structure.
First half-round metal electrode 809b and the second half-round metal electrode on bottom glass substrate in the present invention
809c is two semicircular electrodes, and electrode 809a and 809d are respectively the electrode that it is drawn；The left comb teeth 5- of electrode 801a and first
1a bonding, electrode 801b are its extraction electrode；Electrode 802a is bonded with the first right comb teeth 5-1b, and electrode 802b draws electricity for it
Pole；Electrode 803a is bonded with the second left comb teeth 5-2a, and electrode 803b is its extraction electrode；The right comb teeth 5-2b of electrode 804a and second
Bonding, electrode 804b are its extraction electrode；Electrode 805a is bonded with the left comb teeth 5-3a of third, and electrode 805b is its extraction electrode；
Electrode 806a is bonded with the right comb teeth 5-3b of third, and electrode 806b is its extraction electrode；The left comb teeth 5-4a key of electrode 807a and the 4th
It closes, electrode 807b is its extraction electrode；Electrode 808a is bonded with the 4th right comb teeth 5-4b, and electrode 808b is its extraction electrode；Electricity
Pole 810a is bonded with the first anchor point 7-1, electrode 810b is bonded with the second anchor point 7-2, electrode 810c is bonded with third anchor point 7-3,
Electrode 810d is bonded with the 4th anchor point 7-4, and wherein electrode 810a, electrode 810b, electrode 810c and electrode 810d are connected with each other, electricity
Pole 810e is its extraction electrode.
First comb group 5-1 and third comb group 5-3 uses comb teeth capacitor electrostatic drive form, tool as driving comb group
Body is by taking the first comb group 5-1 as an example, when the alternating voltage for applying opposite in phase respectively in electrode 801b, 802b, and
It is superimposed identical DC offset voltage, in the case that the level in first on comb teeth 5-1c is zero, in first comb teeth 5-1c by
The driving force arrived are as follows:
In formula,For the single side comb teeth number of comb teeth 5-1c in first, h is the thickness of comb teeth,For dielectric constant,For
Comb teeth gap.In driving forceUnder the action of, annulus mass block 3 the first square wave supporting beam 6-1, the second square wave supporting beam 6-2,
Under the support of third square wave supporting beam 6-3 and the 4th square wave supporting beam 6-4, using the center of circle of circular mass 2 as rotation center,
Crankmotion is done on XOY plane, annulus mass block 3 drives circular mass 2 also to do reciprocating rotary transhipment on XOY plane
It is dynamic, for rotating clockwise, if there is the angular speed along the input of X-axis positive direction at this time, then differentiated according to the right hand of coriolis force
Rule, using the axis of the first torsion beam 4-1 and the second torsion beam 4-2 as boundary, for the left semicircle of circular mass 2, by
Upward Ge Shi masterpiece is used, and for the right semi-circle of circular mass 2, is used by downward Ge Shi masterpiece, then circular mass 2
Overlayer polymer hair 1 will be driven to overturn.
The the first half-round metal electrode 809b and the second half-round metal electrode of circular mass 2 and setting thereunder
809c constitutes two symmetrical capacitance structures, wherein public pole plate of the center of circle mass block 2 as the two capacitors, fast when carrying out angle
When degree detection, when circular mass 2 generates overturning, the first half-round metal electrode 809b and the second half-round metal electrode 809c
The capacitance of two capacitors constituted with circular mass 2 can follow the angle of overturning to change, and detection circuit passes through respectively
Electrode 809a and electrode 810e and electrode 809d and electrode 810e detects the variations of two capacitor's capacities, passes through detection capacitance
Variation, the angle of available deflection can further calculate the size of input angular velocity.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (5)
1. a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity, by overlayer polymer hair (1), the micro- biography of middle layer silicon
Sensor and equipped with circuit bottom glass substrate composition, it is characterised in that:
The middle layer silicon micro-sensor includes circular mass (2) and the annulus mass block with circular mass (2) concentric
(3), there are two torsion beam (4), the overlayer polymer hairs for setting between the circular mass (2) and annulus mass block (3)
Hair (1) is bonded in circular mass (2) center, and the circumferential side portion of the annulus mass block (3) is evenly provided with several comb teeth
Group (5) and square wave supporting beam (6), the comb group (5) and square wave supporting beam (6) are intertwined；
The tangential direction for being oriented parallel to annulus mass block (3) of comb teeth in the comb group (5)；
The circular mass (2) is cutting with the axis direction of torsion beam (4) in the view field on bottom glass substrate
Direction is equipped with the first half-round metal electrode (809b) and the second half-round metal electrode (809c).
2. a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity according to claim 1, it is characterised in that:
There are four comb group (5) and four square wave supporting beams (6), two adjacent comb groups (5) for setting on the annulus mass block (3)
Between be divided into 90 degree, be divided into 90 degree between two adjacent square wave supporting beams (6).
3. a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity according to claim 1, it is characterised in that:
Described two torsion beams (4) are symmetrical on the basis of the axis of circular mass (2).
4. a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity according to claim 1 or 2, feature exist
In: the comb group (5) is made of left comb teeth (5-a), right comb teeth (5-b) and middle comb teeth (5-c), wherein middle comb teeth (5-c) is solid
It is scheduled on annulus mass block (3), left comb teeth (5-a) and right comb teeth (5-b) are fixed on bottom glass substrate.
5. a kind of bionical hair formula silicon micro-gyroscope for angular speed sensitivity according to claim 1 or 2, feature exist
In: the square wave supporting beam (6) is fixedly connected with anchor point (7).
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| CN107421526B (en) * | 2017-07-04 | 2020-05-05 | 东南大学 | Bionic double-shaft hair sensor device |
| CN107655465B (en) * | 2017-08-28 | 2020-08-14 | 东南大学 | Two-stage lever amplification resonant bionic hair flow velocity and acceleration micro-sensor |
| CN109353985B (en) * | 2018-10-15 | 2021-06-11 | 北京航天控制仪器研究所 | Micro-mechanical electrostatic driving arc comb tooth structure |
| CN110850111B (en) * | 2019-10-09 | 2021-03-23 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN111208316B (en) * | 2020-02-24 | 2021-04-20 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315B (en) * | 2020-02-24 | 2022-02-01 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111521170B (en) * | 2020-05-22 | 2022-10-25 | 东南大学 | Master-slave mass micro mechanical hair gyroscope for driving amplitude amplification |
| CN116907463B (en) * | 2023-09-08 | 2023-12-15 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
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| CN102520203B (en) * | 2011-12-22 | 2013-06-12 | 中北大学 | Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof |
| CN104459181B (en) * | 2014-12-31 | 2017-06-23 | 东南大学 | A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed |
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