CN102520203B - Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof - Google Patents
Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof Download PDFInfo
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- CN102520203B CN102520203B CN 201110433661 CN201110433661A CN102520203B CN 102520203 B CN102520203 B CN 102520203B CN 201110433661 CN201110433661 CN 201110433661 CN 201110433661 A CN201110433661 A CN 201110433661A CN 102520203 B CN102520203 B CN 102520203B
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Abstract
The invention relates to a bionic three-dimensional angular speed sensor, in particular to a bionic three-dimensional angular speed sensor based on moth tentacle navigation and a preparation method of the three-dimensional angular speed sensor. Problems that a micromechanical gyroscope in an existing navigation system only can detect angular speed in a single direction, so that the navigation system is complex in structure, and measurement errors are high are solved. The bionic three-dimensional angular speed sensor based on moth tentacle navigation comprises an N-type (100) double-polished silicon wafer and organic glass, a center square hole is arranged on the organic glass, four grooves are symmetrically arranged at the top of the organic glass, flexible magnets wound with coils are adhered in the grooves, a first square groove is arranged at the bottom of the organic glass, and the N-type (100) double-polished silicon wafer is adhered in the first square groove, and comprises a hollow frame and four foldable beams. A single structure is used for completing detection of three-dimensional angular speed, so that the bionic three-dimensional angular speed sensor is simple in structure, and can be widely applicable to detecting angular speed in the field of bionic MEMS (micro-electromechanical system) sensors.
Description
Technical field
The present invention relates to the bionic three-dimensional angular-rate sensor, specifically a kind of bionic three-dimensional angular-rate sensor based on moth feeler navigation and preparation method thereof.
Background technology
Bionics is the bridge that connects biological and technology, and the mankind achieve great success about bionic invention and innovative technology in recent years; People have invented daylight lamp by the luminescence mechanism research to firefly; By the secret of electric fish discharge is probed into, invented voltaic element the earliest; By giraffine dermal composition is probed into, developed flying suit---" antigravity suit "; But the research about the bionic navigation technology is few.The core devices micro-mechanical gyroscope of navigational system can only detect the angular velocity information on single direction at present, and for the measurement of three dimensions attitude, common way is to utilize to be arranged on three micro-mechanical gyroscopes on mutually perpendicular direction and to unite attitude algorithm, thus cause that navigational system complex structure, volume and quality are large, manufacturing process is difficult and combination after the large problem of measuring error.
Summary of the invention
The present invention causes navigational system complex structure, problem that measuring error is large in order to solve in existing navigational system the angular velocity that can only detect single direction because of micro-mechanical gyroscope, and a kind of bionic three-dimensional angular velocity detection sensor based on the navigation of moth feeler is provided.
The present invention adopts following technical scheme to realize: the bionic three-dimensional angular-rate sensor based on the navigation of moth feeler comprises the two throwing silicon chips of N-type [100] and organic glass; Have the center square hole on organic glass, the top symmetry of organic glass has four ends and communicates with the center square hole and the groove vertical with the limit, hole, is bonded with the soft magnetic bodies that is wound with coil in groove; The bottom of organic glass has the first identical square groove of Center-to-Center square hole, has the second square groove in the first square groove; The two throwing silicon chips of N-type [100] are bonded in the first square groove, the two throwing silicon chips of N-type [100] comprise hollow framework and four folded beams, an end of all folded beams be symmetrically fixed on the limit of hollow framework and the other end be fixed on together hollow framework in be formed centrally the center branch; Be fixed with the permalloy rod that passes the second square groove, organic glass center square hole on the branch of center, the permalloy rod is comprised of lower barred body and the diameter upper barred body greater than lower barred body diameter; Be fixed with four pads that are positioned at four folded beam opposite sides on hollow framework; The stress sensitive place of folded beam is fixed with two and all is connected with adjacent pad by aluminum lead and resistance is the P type pressure drag bar of 2-3k Ω, the P type pressure drag bar of the folded beam that the position the is relative formation Wheatstone bridge that is cascaded in twos.
The preparation method of above-mentioned bionic three-dimensional angular-rate sensor based on moth feeler navigation comprises the steps:
(1), make the two throwing silicon chips of N-type [100]:
Step 1: get the two throwing substrates of the N-type that thickness is 300-350um [100], form the pressure drag graph area by photoetching process on the two throwing substrates of N-type [100], at the pressure drag graph area P type pressure drag bar that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N-type [100] symmetric offset spread be 2-3k Ω and four resistances on vertical direction be 2-3k Ω;
Step 2: utilize photoetching technique to form the fairlead that is positioned at P type pressure drag bar two ends on the two throwing substrates of N-type [100]; Utilize photoetching process to form the graph area of lead-in wire and pad on the two throwing substrates of N-type [100], form the aluminum lead of both sides, the center P type pressure drag bar formation Wheatstone bridge on two pads being positioned on horizontal direction four P type pressure drag bar both sides and two pads that are positioned on vertical direction four P type pressure drag bar both sides, connecting lead wire hole and the aluminum lead of adjacent pad and connect in twos horizontal direction and vertical direction at the aluminium film that the graph area sputter thickness of lead-in wire and pad is 3000 dusts;
Step 3: get rid of the SU-8 glue that a layer thickness is 1-1.1mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the lower barred body of permalloy rod by little electroforming process in center pit; Get rid of again the SU-8 glue that a layer thickness is 1.1-1.2mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the upper barred body of permalloy rod by little electroforming process in center pit;
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, forming the two throwing silicon chips of N-type [100] by hollow framework, center branch and four symmetries are connected between center branch and hollow framework and the stress sensitive place is comprised of the folded beam of two P type pressure drag bars;
(2), get organic glass, communicate with the center square hole and four grooves vertical with the limit, hole with processing technology machining center square hole and an end at the top of organic glass; After using processing technology machining center first square groove identical with the center square hole, the back side of organic glass processes again the second square groove in the first square groove;
(3), be bonded in respectively in four grooves of organic glass after being wrapped in respectively coil (4) on four soft magnetic bodies; The two throwing silicon chips of N-type [100] are bonded in the first square groove and make the upper barred body of permalloy rod pass the center square hole; Namely obtain the bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
Thereby the top that in the present invention, the perm alloy bar adopts upper coarse and lower fine structure that barycenter is concentrated on the permalloy rod has increased coriolis force (size of coriolis force is relevant with quality and the speed of permalloy rod) and has then improved measurement sensitivity; Have the second square groove in the first square groove of organic glass bottom, when preventing the folded beam vibration and the lower surface of organic glass bump; Adopt simultaneously folded beam can make the permalloy rod have degree of freedom on three-dimensional at the effect lower swing of electromagnetic actuation force on N-type (100) silicon chip.
Feeler is as the important receptor of moth, not only to external world smell and air velocity is very responsive, and can experience the variation of self attitude, Johnston ' the s organ of feeler pedicel is a small-sized mechanical pick-up device, it can experience body posture in three-dimensional subtle change, and the information of experiencing is passed to brain, and control wing modulation attitude by brain, keep stable state of flight.The structure of three dimensional angular speed pickup of the present invention is refined from moth feeler model, and the feeler of moth is with the vibration frequency of wing
Ceaselessly swinging up and down, when the moth body posture changes, (object has simultaneously relative motion and namely moves or rotate and involve when rotating will to produce coriolis force at the feeler root, to produce a coriolis acceleration, it is Corioli's acceleration, it is coriolis force that moving object produces inertial force corresponding to Corioli's acceleration), the neurocyte of root will be experienced the De Geshi force information and pass to brain and carry out resolving of attitude; Come the feeler of contraposition moth by the biomimetic features of the simulation of this living model having been invented two-dimentional driving, thereby relative groove coil joint all is connected with the drive circuit module that produces square-wave signal produces magnetic field formation Electromagnetic Drive structure, magnetic field makes the permalloy rod swing along x, y axle, can not be similar to the moth feeler of failure of oscillation; Swing in permalloy rod two-dimensional space will cause the vibration of this structure on the z direction of principal axis, because having applied frequency is
Square wave driving signal can so that this structure along x, y direction of principal axis with different along the vibration frequency on the z direction of principal axis, along the main vibration frequency on x, y direction of principal axis be namely
And the axial vibration frequency of z is 2
(as shown in Figure 4).By the analysis to the feeler model, the coriolis force that yaw rate causes has been modulated on x, y direction of principal axis
In frequency signal; And also be modulated on x, y direction of principal axis by roll angle speed, the caused coriolis force of rate of pitch, but mainly concentrate on 2 because of the vibration velocity of z axle
The place makes the coriolis force that is caused by roll angle speed, rate of pitch be modulated at 2
In frequency signal; So can pass through frequency signal
, 2
Extraction obtain each coriolis force information.As shown in Figure 3, P type pressure drag bar R1, R2, R5, R6 and P type pressure drag bar R3, R4, R7, R8 form two Wheatstone bridges, relative pad (being two output terminals of Wheatstone bridge) all is connected with signal processing module by lead-in wire, just can calculate the size and Orientation of angular velocity signal on three-dimensional, determine the attitude information of this model, and then carry out effective attitude and control the realization navigation.Below the detection of yaw rate, roll angle speed and rate of pitch:
1, the detection of yaw rate
Under the effect of Electromagnetic Drive structure, the permalloy rod along x, y direction of principal axis with
Frequency vibration, and at this moment, folded beam is along x, y direction of principal axis generation deformation, and the driving force signal as shown in Figure 5; When rotating along Z axis on sensor being fixed on carrier (as aircraft), according to the coriolis force effect principle as can be known, can produce coriolis force at y, x direction of principal axis, the coriolis force signal as shown in Figure 5, coriolis force causes that the folded beam of permalloy rod root is along x, the deformation of y direction generation secondary, cause like this resistance of P type pressure drag bar on folded beam to change, further make the Wheatstone bridge output voltage signal change, by theoretical analysis and signal superposition principle as can be known, drive the phase phasic difference 90 of signal and coriolis force signal
, amplitude is two signal coupling amplitudes, and the changing value that records with signal processing module is carried out phase demodulating and computational analysis, can resolve amplitude and the phase place of coriolis force signal, and then draws the size and Orientation of yaw rate.
2, the detection of roll angle speed, rate of pitch
Under the effect of Electromagnetic Drive structure, utilizing square wave driving signal can control alloy column body structure vibration frequency on the z direction is 2
, so the deformation of folded beam is also along the Z direction, this moment the driving force signal as shown in Figure 6.When rotating along X-axis on sensor being fixed on carrier (as aircraft), Y-direction will produce coriolis force and cause y direction corresponding deformation, and the coriolis force that produce this moment just is modulated at 2
In frequency signal; In like manner, when carrier rotated along the y axle, the x direction will produce coriolis force and cause x direction corresponding deformation, and the coriolis force that produce this moment also is modulated at 2
In frequency signal, two coriolis force signals as shown in Figure 6, these deformation cause that finally P type pressure drag bar resistance changes, and then cause that the Wheatstone bridge output voltage signal changes, the realizable force electric coupling, to recording the De Geshi force signal with signal processing module and the driving force signal carries out phase demodulating and computational analysis, and then calculate roll angle speed and rate of pitch respectively.
The detection that the present invention adopts single structure to complete three dimensional angular speed makes sensor construction simple, and success biologic-organ is converted into the engineering application structure, realized the combination of bionics and micromachining technology; Only need to detect simultaneously just to have calculated the angular velocity information on the three-dimensional along the STRESS VARIATION on x, y direction, greatly reduced measuring error; Solve in existing navigational system the angular velocity that can only detect single direction because of micro-mechanical gyroscope and caused navigational system complex structure, problem that measuring error is large, can be widely used in the angular velocity detection of bionical MEMS sensor field.
Description of drawings
Fig. 1 is stereographic map of the present invention.
Fig. 2 is the front elevation of Fig. 1.
Fig. 3 is the structural representation of N-type [100] silicon chip.
Fig. 4-a is that permalloy rod of the present invention exists
Movement profiles under frequency; Fig. 4-b is that permalloy rod of the present invention is 2
Movement profiles under frequency.
Fig. 5 is the movement profiles of the present invention's permalloy rod when detecting yaw rate.
Fig. 6 is the movement profiles of the present invention's permalloy rod when detecting roll angle speed or rate of pitch.
In figure: the 1-organic glass; The 2-pad; The 3-groove; The 4-coil; The 5-soft magnetic bodies; 6-the second square groove; Barred body under 7-; The upper barred body of 8-; The 9-folded beam; 10-P type pressure drag bar; The hollow framework of 11-.
Embodiment
Bionic three-dimensional angular-rate sensor based on the navigation of moth feeler comprises the two throwing silicon chips of N-type [100] and organic glass 1; Have the center square hole on organic glass 1, the top symmetry of organic glass 1 has that four ends communicate with the center square hole and the groove 3 vertical with the limit, hole, is bonded with the soft magnetic bodies 5 that is wound with coil 4 in groove 3; The bottom of organic glass 1 has the first identical square groove of Center-to-Center square hole, has the second square groove 6 in the first square groove; The two throwing silicon chips of N-type [100] are bonded in the first square groove, the two throwing silicon chips of N-type [100] comprise hollow framework 11 and four folded beams 9, an end of all folded beams 9 be symmetrically fixed on the limit of hollow framework 11 and the other end be fixed on together hollow framework 11 in be formed centrally the center branch; Be fixed with the permalloy rod that passes the second square groove 6, organic glass 1 center square hole on the branch of center, the permalloy rod is comprised of lower barred body 7 and the diameter upper barred body 8 greater than lower barred body 7 diameters; Be fixed with four pads 2 that are positioned at four folded beam 9 opposite sides on hollow framework 11; The stress sensitive place of folded beam 9 is fixed with two and all is connected with adjacent pad 2 by aluminum lead and resistance is the P type pressure drag bar 10 of 2-3k Ω, the P type pressure drag bar 10 of the folded beam 9 that the position the is relative formation Wheatstone bridge that is cascaded in twos.
The preparation method of above-mentioned bionic three-dimensional angular-rate sensor based on moth feeler navigation comprises the steps:
(1), make the two throwing silicon chips of N-type [100]:
Step 1: get the two throwing substrates of the N-type that thickness is 300-350um [100], form the pressure drag graph area by photoetching process on the two throwing substrates of N-type [100], at the pressure drag graph area P type pressure drag bar 10 that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N-type [100] symmetric offset spread be 2-3k Ω and four resistances on vertical direction be 2-3k Ω;
Step 2: utilize photoetching technique to form the fairlead that is positioned at P type pressure drag bar 10 two ends on the two throwing substrates of N-type [100]; Form lead-in wire and the graph area of pad by photoetching process on the two throwing substrates of N-type [100], form the aluminum lead of both sides, the center P type pressure drag bar 10 formation Wheatstone bridges on two pads 2 of being positioned on horizontal direction four P type pressure drag bar 10 both sides and two pads 2 that are positioned on vertical direction four P type pressure drag bar 10 both sides, connecting lead wire hole and the aluminum lead of adjacent pad 2 and connect in twos horizontal direction and vertical direction at the aluminium film that the graph area sputter thickness of lead-in wire and pad is 3000 dusts;
Step 3: get rid of the SU-8 glue that a layer thickness is 1-1.1mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the lower barred body 7 of permalloy rod by little electroforming process in center pit; Get rid of again the SU-8 glue that a layer thickness is 1.1-1.2mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the upper barred body 8 of permalloy rod by little electroforming process in center pit;
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, forming the two throwing silicon chips of N-type [100] by hollow framework 11, center branch and four symmetries are connected between center branch and hollow framework 11 and the stress sensitive place is comprised of the folded beam 9 of two P type pressure drag bars 10;
(2), get organic glass 1, communicate with the center square hole and four grooves 3 vertical with the limit, hole with processing technology machining center square hole and an end at the top of organic glass 1; After using processing technology machining center first square groove identical with the center square hole, the back side of organic glass 1 processes again the second square groove 6 in the first square groove;
(3), be bonded in respectively in four grooves 3 of organic glass 1 after coil 4 being wrapped in respectively on four soft magnetic bodies 5; The two throwing silicon chips of N-type [100] are bonded in the first square groove and make the upper barred body 8 of permalloy rod pass the center square hole; Namely obtain the bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
Claims (2)
1. based on the bionic three-dimensional angular-rate sensor of moth feeler navigation, it is characterized in that: comprise the two throwing silicon chips of N-type [100] and organic glass (1); Organic glass has the center square hole on (1), and the top symmetry of organic glass (1) has that four ends communicate with the center square hole and the groove (3) vertical with the limit, hole, is bonded with the soft magnetic bodies (5) that is wound with coil (4) in groove (3); The bottom of organic glass (1) has the first identical square groove of Center-to-Center square hole, has the second square groove (6) in the first square groove; The two throwing silicon chips of N-type [100] are bonded in the first square groove, the two throwing silicon chips of N-type [100] comprise hollow framework (11) and four folded beams (9), an end of all folded beams (9) be symmetrically fixed on the limit of hollow framework (11) and the other end be fixed on together hollow framework (11) in be formed centrally the center branch; Be fixed with the permalloy rod that passes the second square groove (6), organic glass (1) center square hole on the branch of center, the permalloy rod is comprised of lower barred body (7) and the diameter upper barred body (8) greater than lower barred body (7) diameter; Be fixed with four pads (2) that lay respectively at four folded beams (9) opposite side on hollow framework (11); The stress sensitive place of folded beam (9) is fixed with two and all is connected with adjacent pad (2) by aluminum lead and resistance is the P type pressure drag bar (10) of 2-3k Ω, the P type pressure drag bar (10) of the folded beam (9) that the position the is relative formation Wheatstone bridge that is cascaded in twos.
2. the preparation method of the bionic three-dimensional angular-rate sensor based on moth feeler navigation as claimed in claim 1, is characterized in that: comprise the steps:
(1), make the two throwing silicon chips of N-type [100]:
Step 1: get the two throwing substrates of the N-type that thickness is 300-350um [100], form the pressure drag graph area by photoetching process on the two throwing substrates of N-type [100], at the pressure drag graph area P type pressure drag bar (10) that to inject the P ion P type pressure drag bar (10) that to form around four resistances on the horizontal direction of the two throwing substrate center of N-type [100] symmetric offset spread be 2-3k Ω and four resistances on vertical direction be 2-3k Ω;
Step 2: utilize photoetching process to form the fairlead that is positioned at P type pressure drag bar (10) two ends on the two throwing substrates of N-type [100]; Form the graph area of lead-in wire and pad by photoetching process on the two throwing substrates of N-type [100], be the aluminium film of 3000 dusts at lead-in wire and the graph area sputter thickness of pad, form two pads (2) of laying respectively at two pads (2) of four P type pressure drag bars (10) both sides on horizontal direction and laying respectively at four P type pressure drag bars (10) both sides on vertical direction, connecting lead wire hole and the aluminum lead of adjacent pad (2) and the aluminum lead of the formation of both sides, the center P type pressure drag bars (10) on connect in twos horizontal direction and vertical direction Wheatstone bridge;
Step 3: get rid of the SU-8 glue that a layer thickness is 1-1.1mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the lower barred body (7) of permalloy rod by little electroforming process in center pit; Get rid of again the SU-8 glue that a layer thickness is 1.1-1.2mm on the two throwing substrates of N-type [100], utilize photoetching process to form center pit, form the upper barred body (8) of permalloy rod by little electroforming process in center pit;
Step 4: utilize the back side of photoetching technique, the two throwing substrates of ICP lithographic technique etching N type [100] and penetrate, forming the two throwing silicon chips of N-type [100] by hollow framework (11), center branch and four symmetries are connected between center branch and hollow framework (11) and the stress sensitive place has the folded beam (9) of two P type pressure drag bars (10) to form;
(2), get organic glass (1), communicate with the center square hole and four grooves (3) vertical with the limit, hole with processing technology machining center square hole and an end at the top of organic glass (1); After using processing technology machining center first square groove identical with the center square hole, the back side of organic glass (1) processes again the second square groove (6) in the first square groove;
(3), be bonded in respectively in four grooves (3) of organic glass (1) after coil (4) being wrapped in respectively on four soft magnetic bodies (5); The two throwing silicon chips of N-type [100] are bonded in the first square groove and make the upper barred body (8) of permalloy rod pass the center square hole; Namely obtain the bionic three-dimensional angular-rate sensor based on the navigation of moth feeler.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110433661 CN102520203B (en) | 2011-12-22 | 2011-12-22 | Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof |
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| CN 201110433661 CN102520203B (en) | 2011-12-22 | 2011-12-22 | Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof |
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| JP3451308B2 (en) * | 1996-08-07 | 2003-09-29 | 独立行政法人通信総合研究所 | Communication satellite tracking device for mobile communication |
| SE9800194D0 (en) * | 1998-01-23 | 1998-01-23 | Gert Andersson | Device for measuring angular velocity |
| US7832110B1 (en) * | 2010-04-02 | 2010-11-16 | Hong-Wen Cheng | Quasi-uniaxial solar trajectory tracking transit system |
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Inventor after: Liu Jun Inventor after: Guo Hao Inventor after: Wen Huanfei Inventor after: Tang Jun Inventor after: Cui Yongjun Inventor after: Shi Yunbo Inventor after: Li Jie Inventor after: Zhang Xiaoming Inventor after: Cao Weida Inventor after: Liu Yao Inventor after: Ding Yukai Inventor before: Liu Jun Inventor before: Tang Jun Inventor before: Shi Yunbo Inventor before: Li Jie Inventor before: Zhang Xiaoming Inventor before: Liu Yao Inventor before: Guo Hao Inventor before: Wen Huanfei |
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Free format text: CORRECT: INVENTOR; FROM: LIU JUN TANG JUN SHI YUNBO LI JIE ZHANG XIAOMING LIU YAO GUO HAO WEN HUANFEI TO: LIU JUN TANG JUN CUI YONGJUN SHI YUNBO LI JIE ZHANG XIAOMING CAO WEIDA LIU YAO DING YUKAI GUO HAO WEN HUANFEI |
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