CN104215283A - Gas microflow detection device based on flow sensing mechanism of poison hairs of scorpions - Google Patents
Gas microflow detection device based on flow sensing mechanism of poison hairs of scorpions Download PDFInfo
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- CN104215283A CN104215283A CN201410479888.1A CN201410479888A CN104215283A CN 104215283 A CN104215283 A CN 104215283A CN 201410479888 A CN201410479888 A CN 201410479888A CN 104215283 A CN104215283 A CN 104215283A
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Abstract
The invention discloses a gas microflow detection device based on a flow sensing mechanism of poison hairs of scorpions. The gas microflow detection device consists of a similar poison hair rod, a similar poison hair base part, a similar poison hair seat, an elastic connection film, a first electrode wire and a second electrode wire, wherein the similar poison hair rod and the similar poison hair base part are assembled to form a whole so as to form a similar poison hair structure; the lower half part of the similar poison hair base part is provided with a conductive coating layer; the similar poison hair base part is mounted in a similar spherical cavity assembled by the similar poison hair seat and the elastic connection film; the first electrode wire is embedded into the surface of the elastic connection film; when swinging, the similar poison hair structure is conducted with the conductive coating layer of the similar poison hair base part; a hemispherical groove of the similar poison hair seat just can support the free swinging of the similar poison hair base part therein; the similar poison hair base part is assembled into the similar poison hair seat so as to form an equivalent angular displacement type area-variable capacitive sensor; the second electrode wire is led out of the bottom of the similar poison hair seat and is connected with the conductive layer of the similar poison hair seat. The gas microflow detection device simulates a flow sensing structure of the poison hairs of the scorpions, and the equivalent angular displacement type area-variable capacitive sensor is formed, so that the sensitivity is high.
Description
Technical field
The invention belongs to gas flow measurement technical field, be specifically related to a kind of gas micro pick-up unit.By detection type legendary venomous insect hair relative to class legendary venomous insect hair seat pivot angle size, determine flow velocity or the flow of tested gas.
Background technology
Accurate measurement gas micrometeor tool is of great significance.Such as keeping the pressure in airship cabin normal, need to hunt leak to cabin body, accurately detect small leak rate flow, this is particularly important to the manned spaceship of long-time running; In electronics industry and fine chemistry industry industry, require the injection accurately controlling gas micro, to ensure the stable of processing quality and properties of product.
At present, main detection of gas flow rate has: mechanical type detection of gas flow rate (comprise diaphragm type gas flow detect and turbine type detection of gas flow rate), hot line hot diaphragm type detection of gas flow rate (HWA) (comprising hot line instrument and the thermal type gas quality flow detection based on microelectromechanical systems (MEMS)), ultrasonic and laser dopper flowmeter flow rate detection method etc.But mechanical detection precision is low, device is easily aging and temperature influence is large; Must to sensor chip electrical heating when HWA formula detects, thus power consumption is large and be not suitable for the detection of flammable explosive gas; Ultrasonic expensive with laser dopper flowmeter flow rate checkout equipment complexity, generally use at Precision Measurement Laboratory or when demarcating other velocimeter, and laser-Doppler is not suitable for the miniflow speed measuring Clean room.So, research have high sensitivity, economy, security micrometeor pick-up unit significant.
Biology defines a lot of structure cleverly in very long evolutionary process, for bionics fiber provides outstanding source.The legendary venomous insect hair on scorpion tibia surface, to the perception of the extremely small flow of ambient air, provides model for Bionic Design produces high-sensitive micrometeor pick-up unit.The present invention is on the Research foundation to scorpion legendary venomous insect hair body surface flow sensor mechanism of perception, based on the gas micro pick-up unit that MEMS process technology proposes, has that volume is little, lightweight, highly sensitive, measuring accuracy is high, be easy to the advantages such as batch production.
Summary of the invention
The object of this invention is to provide a kind of gas micro pick-up unit based on scorpion legendary venomous insect gross discharge mechanism of perception processed by MEMS technology, it is applicable to the measurement of minute gas flow velocity (0 ~ 500mm/s), and its sensitivity is high, measuring accuracy is high, volume is little and good economy performance is easy to batch production.
The present invention is made up of class legendary venomous insect mao mao bar, class legendary venomous insect wool base, class legendary venomous insect hair seat, elasticity junctional membrane, the first contact conductor and the second contact conductor, and class legendary venomous insect mao mao's bar and class legendary venomous insect wool base are assembled into one, forms class legendary venomous insect hair knot structure; Class legendary venomous insect wool base the latter half has conductive coating, class legendary venomous insect wool base be arranged on class legendary venomous insect hair seat and elasticity junctional membrane assemble after class spherical cavity in; Elasticity junctional membrane top has opening, the size of the openings of sizes restricted legendary venomous insect mao mao bar pendulum angle of elasticity junctional membrane; First contact conductor embeds elasticity junctional membrane surface, when class legendary venomous insect hair knot structure swings and the conductive coating of class legendary venomous insect wool base connect; Class legendary venomous insect hair seat is cylindrical insulator, the hemispherical groove of class legendary venomous insect hair seat just in time can support class legendary venomous insect wool base and within it freely swing, hemispherical groove inside surface has conductive layer, be coated with a layer insulating on conductive layer, class legendary venomous insect wool base is assembled to the equivalent angular displacement type variable-area capacitive sensor of both formation in class legendary venomous insect hair seat; Second contact conductor is drawn bottom class legendary venomous insect hair seat, and the second contact conductor is connected with the conductive layer of class legendary venomous insect hair seat.
The surface of described class legendary venomous insect mao mao bar is non-smooth surface.
The material of described elasticity junctional membrane is elastic insulating material.
When there being the gas flow warp of tiny flow quantity, class legendary venomous insect mao mao bar is subject to friction force and the resistance of air-flow, and by class legendary venomous insect mao mao's bar and class legendary venomous insect wool base stressed time the steel microtube structure that formed friction force and air resistance are amplified, class legendary venomous insect hair relative class legendary venomous insect hair seat is deflected.Because class legendary venomous insect wool base and class legendary venomous insect hair seat have conductive coating and mutually insulated respectively, form capacitor.Be equivalent to an angular displacement type variable-area capacitive sensor during deflection of class legendary venomous insect hair relative class legendary venomous insect hair seat, by the change of Detection capacitance capacity, realize the measurement to gas micro.
Described class legendary venomous insect mao mao bar surface forms non-smooth surface to increase the contact force with air by the method etching or spray, and its depth ratio (ratio of length and diameter) is 50 ~ 200, and hair pole length is 700 ~ 1500 μm; Class legendary venomous insect wool base is made up of insulating material, and its Lower Half branch is coated with conductive layer; Class legendary venomous insect mao mao's bar and class legendary venomous insect wool base are assembled into one, form class legendary venomous insect hair knot structure.Class legendary venomous insect hair can swing with certain angular deflection in whole circumference under the restriction of class legendary venomous insect hair seat and elasticity junctional membrane.
Class legendary venomous insect hair seat be cylindricality insulating material thereon surface working go out hemispheric groove and form, hemispherical groove surface first sprays conductive material, then sprays one deck insulating material.Hemispherical groove can support class legendary venomous insect wool base and within it freely swing.Thus, class legendary venomous insect hair is assembled in class legendary venomous insect hair seat and just defines a capacitor; When class legendary venomous insect hair is subject to the excitation of air mass flow and deflects, class legendary venomous insect wool base and class legendary venomous insect hair seat are actually an angular displacement type variable-area capacitive sensor.
Elasticity junctional membrane is that elastic insulating material is made, and its underpart (Kai great Kou goes out) end face coordinates with class legendary venomous insect hair seat, the maximum deflection angle of the restricted legendary venomous insect hair of size of upper opening.Elasticity junctional membrane inside is a kind of slippery inner surface formed for a week by cam curve sweeping, and it contacts with class legendary venomous insect wool base the first half surface, forms a kind of cooperation of similar cams.When class legendary venomous insect hair is subject to the excitation of air mass flow and deflects, class legendary venomous insect wool base the first half extruding elasticity junctional membrane; Elastic deformation is there is after elasticity junctional membrane is squeezed; When the excitation of air mass flow is cancelled, the aligning torque of elasticity junctional membrane makes class legendary venomous insect Mao Huizheng.
Be embedded in the first contact conductor at elasticity junctional membrane, when legendary venomous insect hair swings and the conductive layer of legendary venomous insect hair bottom connect; Class legendary venomous insect hair seat bottom hole draws another with the second contact conductor, and it is connected with the conductive layer of class legendary venomous insect hair seat hemispherical groove.
Realized the sensitivity of adjustment measurement mechanism by the depth ratio of adjustment class legendary venomous insect mao mao bar, change its flow detection scope with this.
During concrete use, the described gas micro pick-up unit based on scorpion legendary venomous insect gross discharge mechanism of perception is affixed on glass substrate, its one-piece construction diameter is 50 ~ 200 microns, is highly 2 ~ 4 millimeters, measures flow velocity at the minute gas flow rate of below 500mm/s or flow with this.
Beneficial effect of the present invention:
The gas micro pick-up unit that the present invention is based on scorpion legendary venomous insect gross discharge mechanism of perception is processed by MEMS technology, copy the traffic aware structure of scorpion legendary venomous insect hair, form an equivalent angular displacement type variable-area capacitive sensor, highly sensitive, technique be simple, good economy performance, be applicable to large-scale production.
Accompanying drawing explanation
Fig. 1 structural representation of the present invention.
Fig. 2 is the present invention when measuring tiny flow quantity, and class legendary venomous insect hair knot structure is to slight moment amplification principle figure.
Equivalent angular displacement type variable-area capacitive Fundamentals of Sensors figure when Fig. 3 is measuring flow of the present invention.
Embodiment
Refer to shown in Fig. 1, the present embodiment is made up of class legendary venomous insect mao mao bar 1, class legendary venomous insect wool base 2, class legendary venomous insect hair seat 3, elasticity junctional membrane 4, first contact conductor 5 and the second contact conductor 6, class legendary venomous insect mao mao bar 1 and class legendary venomous insect wool base 2 are assembled into one, form class legendary venomous insect hair knot structure; Class legendary venomous insect wool base 2 the latter half has conductive coating 9, class legendary venomous insect wool base 2 be arranged on class legendary venomous insect hair seat 3 assemble with elasticity junctional membrane 4 after class spherical cavity 7 in; Elasticity junctional membrane 4 top has opening 8, the size of opening 8 size restricted legendary venomous insect mao mao bar 1 pendulum angle of elasticity junctional membrane 4; First contact conductor 5 embed elasticity junctional membrane 4 surface, when class legendary venomous insect hair knot structure swings and the conductive coating 9 of class legendary venomous insect wool base 2 connect; Class legendary venomous insect hair seat 3 is cylindrical insulator, the hemispherical groove 10 of class legendary venomous insect hair seat 3 just in time can support class legendary venomous insect wool base 2 and within it freely swing, hemispherical groove 10 inside surface has conductive layer, be coated with a layer insulating on conductive layer, class legendary venomous insect wool base 2 is assembled to the equivalent angular displacement type variable-area capacitive sensor of both formation in class legendary venomous insect hair seat 3; Second contact conductor 6 is drawn bottom class legendary venomous insect hair seat 3, and the second contact conductor 6 is connected with the conductive layer of class legendary venomous insect hair seat 3.
The surface of described class legendary venomous insect mao mao bar 1 is non-smooth surface.
The material of described elasticity junctional membrane 4 is elastic insulating material.
The course of work of the present invention and principle:
As shown in Figure 2, omit the conductive coating 9 of class legendary venomous insect wool base 2 in Fig. 2, when test flow velocity is the air-flow of V, air-flow and class legendary venomous insect mao mao bar 1 interaction force F drive class legendary venomous insect hair knot structure to deflect, deflection angle theta.Meanwhile, legendary venomous insect hair knot structure receives the elastic force N of class legendary venomous insect hair the seat 3 and elastic force T of elasticity junctional membrane 4.Centered by O point, the torque equilibrium equation of class legendary venomous insect hair knot structure is:
T·D＝F·H (1)
In formula (1), D and H is the moment relative to O point respectively.Therefore, the H/D that what F caused put on elasticity junctional membrane 4 elastic force T ' (T '=-T) is F doubly.Class legendary venomous insect hair knot structure has larger depth ratio, and air-flow small thus also can make class legendary venomous insect hair knot structure swing.Therefore, this device has high sensitivity.Meanwhile, the length of adjustment class legendary venomous insect mao mao bar 1, changes depth ratio with this, changes its flow detection scope with this.
Class legendary venomous insect hair seat 3 is cylindrical conductive substance, and its hemispherical groove just in time can support class legendary venomous insect wool base 2 and within it freely swing; Its hemispherical groove inside first sprays a conductive layer, then covers a layer insulating, and when class legendary venomous insect hair is assembled in class legendary venomous insect hair seat, both form equivalent angular displacement type variable-area capacitive sensor.
As Fig. 3, when class legendary venomous insect hair knot structure is subject to flow excitation and deflects θ, the right opposite of the capacitor plate of the equivalent angular displacement type variable-area capacitive sensor that class legendary venomous insect wool base 2 and class legendary venomous insect hair seat 3 are formed is long-pending reduces 2S
θ, electric capacity becomes C
1; Former equivalent area is S
0, electric capacity C
0:
S
0＝2πr
2,S
θ＝2θπr
2 (2)
In formula (2), r is the radius of class legendary venomous insect wool base 2; In formula (3) and (4), ε is specific inductive capacity, k is electrostatic constant, d is thickness of insulating layer.Found out by formula (3) and formula (4), when apparatus of the present invention receive flow excitation, class legendary venomous insect hair knot structure deflection angle can be determined by equivalent angular displacement type variable-area capacitive sensor capacitance variable quantity, realizes the measurement to gas micro.
Claims (3)
1. the gas micro pick-up unit based on scorpion legendary venomous insect gross discharge mechanism of perception, it is characterized in that: be made up of class legendary venomous insect mao mao bar (1), class legendary venomous insect wool base (2), class legendary venomous insect hair seat (3), elasticity junctional membrane (4), the first contact conductor (5) and the second contact conductor (6), class legendary venomous insect mao mao bar (1) and class legendary venomous insect wool base (2) are assembled into one, form class legendary venomous insect hair knot structure; Class legendary venomous insect wool base (2) the latter half has conductive coating (9), class legendary venomous insect wool base (2) be arranged on class legendary venomous insect hair seat (3) and elasticity junctional membrane (4) assemble after class spherical cavity (7) in; Elasticity junctional membrane (4) top has opening (8), the size of opening (8) size restricted legendary venomous insect mao mao bar (1) pendulum angle of elasticity junctional membrane (4); First contact conductor (5) embed elasticity junctional membrane (4) surface, when class legendary venomous insect hair knot structure swings and the conductive coating (9) of class legendary venomous insect wool base (2) connect; Class legendary venomous insect hair seat (3) is cylindrical insulator, the hemispherical groove (10) of class legendary venomous insect hair seat (3) just in time can support class legendary venomous insect wool base (2) and within it freely swing, hemispherical groove (10) inside surface has conductive layer, be coated with a layer insulating on conductive layer, class legendary venomous insect wool base (2) is assembled to the equivalent angular displacement type variable-area capacitive sensor of both formation in class legendary venomous insect hair seat (3); Second contact conductor (6) is drawn from class legendary venomous insect hair seat (3) bottom, and the second contact conductor (6) is connected with the conductive layer of class legendary venomous insect hair seat (3).
2. a kind of gas micro pick-up unit based on scorpion legendary venomous insect gross discharge mechanism of perception according to claim 1, is characterized in that: the surface of described class legendary venomous insect mao mao bar (1) is non-smooth surface.
3. a kind of gas micro pick-up unit based on scorpion legendary venomous insect gross discharge mechanism of perception according to claim 1, is characterized in that: the material of described elasticity junctional membrane (4) is elastic insulating material.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105424300A (en) * | 2015-11-06 | 2016-03-23 | 扬州大学 | Tunneling fiber device |
| CN105445490A (en) * | 2015-11-15 | 2016-03-30 | 吉林大学 | Intelligent bionic sensor |
| CN106872724A (en) * | 2017-03-10 | 2017-06-20 | 吉林大学 | The bionical air flow rate sensor that a kind of clinking is combined |
| CN109696185A (en) * | 2018-12-30 | 2019-04-30 | 吉林大学 | A kind of bionical micro cantilever structure, its manufacturing method and piezoresistance sensor |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111313754A (en) * | 2020-03-20 | 2020-06-19 | 吉林大学 | Bionic wind power generation array and wind power generation device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424300A (en) * | 2015-11-06 | 2016-03-23 | 扬州大学 | Tunneling fiber device |
| CN105424300B (en) * | 2015-11-06 | 2018-07-06 | 扬州大学 | A kind of tunnelling cilium device |
| CN105445490A (en) * | 2015-11-15 | 2016-03-30 | 吉林大学 | Intelligent bionic sensor |
| CN106872724A (en) * | 2017-03-10 | 2017-06-20 | 吉林大学 | The bionical air flow rate sensor that a kind of clinking is combined |
| CN109696185A (en) * | 2018-12-30 | 2019-04-30 | 吉林大学 | A kind of bionical micro cantilever structure, its manufacturing method and piezoresistance sensor |
| CN109696185B (en) * | 2018-12-30 | 2020-04-21 | 吉林大学 | Bionic micro-cantilever structure, manufacturing method thereof and piezoresistive sensor |
| WO2020140567A1 (en) * | 2018-12-30 | 2020-07-09 | 吉林大学 | Biomimetic microcantilever structure and manufacturing method therefor, and piezoresistive sensor |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111208316B (en) * | 2020-02-24 | 2021-04-20 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111313754A (en) * | 2020-03-20 | 2020-06-19 | 吉林大学 | Bionic wind power generation array and wind power generation device |
| CN111313754B (en) * | 2020-03-20 | 2022-06-07 | 吉林大学 | Bionic wind power generation array and wind power generation device |
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