CN104236739A - Temperature and humidity sensor - Google Patents
Temperature and humidity sensor Download PDFInfo
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- CN104236739A CN104236739A CN201410508317.6A CN201410508317A CN104236739A CN 104236739 A CN104236739 A CN 104236739A CN 201410508317 A CN201410508317 A CN 201410508317A CN 104236739 A CN104236739 A CN 104236739A
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Abstract
The invention discloses a temperature and humidity sensor which comprises a substrate, a conductive layer, a humidity sensitive layer, test electrodes and metal electrodes. The conductive layer is formed on the substrate, the humidity sensitive layer is formed on the conductive layer and completely covers the same, the metal electrodes are fixed to the humidity sensitive layer, and the test electrodes are fixed to the substrate and connected with the conductive layer. The temperature and humidity sensor is small, light and precise and is high in integration degree, easy to manufacture and low in cost.
Description
Technical field
The present invention relates to and automatically control and observation and control technology field, particularly relate to a kind of Temperature Humidity Sensor.
Background technology
Because the humiture of environment and the real life of people and commercial production have close relationship, therefore in the last few years, there is integrated Temperature Humidity Sensor.Temperature value in environment and humidity value are the electric signal being easy to measure by sensitive material or element transformation by the Temperature Humidity Sensor of integration.At present, in daily life, Temperature Humidity Sensor mainly applies to the field such as air-conditioning system, environment measuring.In the industrial production, mainly apply to weaving workshop, field, Fine Chemical Works, chemical laboratory, ultra-clean chamber etc. and higher place is required to humiture.Meanwhile, more and more Temperature Humidity Sensor will be used in fields such as safety monitoring, automobile, household electrical appliances, consumer electronics.But it is large that traditional Temperature Humidity Sensor exists volume mostly, has moving machinery parts, with the shortcoming such as integrated circuit is compatible low, make the effect of Temperature Humidity Sensor not very good.
Summary of the invention
The embodiment of the present invention proposes a kind of Temperature Humidity Sensor, and volume is little, and quality is light, and precision is high, and integration degree is high, and manufacture craft is simple, and with low cost.
The embodiment of the present invention provides a kind of Temperature Humidity Sensor, comprises substrate, conductive layer, humidity-sensitive layer, test electrode and metal electrode;
Described conductive layer is formed on described substrate, described humidity-sensitive layer to be formed on described conductive layer and to cover described conductive layer completely, described metal electrode is fixed in described humidity-sensitive layer, and described test electrode to be fixed on described substrate and to be connected with described conductive layer.
Further, described metal electrode comprises the first comb and the second comb; Described first comb and described second comb are staggered.
Implement the embodiment of the present invention, there is following beneficial effect:
The Temperature Humidity Sensor manufacture craft that the embodiment of the present invention provides is simple, adopt MEMS (Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) technology makes, volume is little, quality is light, and integration degree is high, good with the compatibility of integrated circuit, and with low cost, be easy to batch production; Caused the change of metal electrode electric capacity by the volumetric expansion of humidity-sensitive layer, thus calculate corresponding humidity value, the linearity and precision can be improved.
Accompanying drawing explanation
Fig. 1 is the diagrammatic cross-section of an embodiment of Temperature Humidity Sensor provided by the invention;
Fig. 2 is the vertical view of an embodiment of Temperature Humidity Sensor provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
See Fig. 1, be the diagrammatic cross-section of an embodiment of Temperature Humidity Sensor provided by the invention, comprise substrate 1, conductive layer 2, humidity-sensitive layer 3, test electrode 5 and metal electrode 4;
Conductive layer 2 is formed on substrate 1, and humidity-sensitive layer 3 to be formed on conductive layer 2 and to cover conductive layer 2 completely, and metal electrode 4 is fixed in humidity-sensitive layer 3, and test electrode 5 to be fixed on substrate 1 and to be connected with conductive layer 2.
In the present embodiment, when the temperature in environment changes, conductive layer 2 is as temperature sensitive, and significant change can occur its resistance value, thus obtains the variable quantity of environment temperature by the change in resistance measuring conductive layer 2.When the humidity in environment, namely when atmospheric water content changes, hydrone in humidity-sensitive layer 3 absorbed air, makes the specific inductive capacity of humidity-sensitive layer 3 change, thus obtains the variable quantity of ambient humidity by the measurement capacitance of metal electrode 4 or the change of resistance value.Meanwhile, because the temperature and humidity in environment influences each other in measuring process, compensated mutually by the variable quantity measuring the temperature and humidity obtained, thus can obtain accurate ambient temperature value and humidity value by calculating.After test completes, by the program of setting, heating power is carried out to humidity-sensitive layer 3, accelerate the desorption of hydrone in humidity-sensitive layer 3.
Further, as shown in Figure 2, metal electrode 4 comprises the first comb 6 and the second comb 7; First comb 6 and the second comb 7 are staggered.
When humidity-sensitive layer 3 is subject to humidity change and changes volume, staggered distance between first comb 6 and the second comb 7 changes, thus generation differential capacitance, and then calculate humidity value by the capacitance of differential capacitance, improve the linearity measured and precision further.
Preferably, metal electrode 4 is aluminium or gold electrode.
Preferably, substrate 1 is bulk silicon substrate.
Preferably, conductive layer 2 is made up of silit, porous silicon or metal material.
Preferably, humidity-sensitive layer 3 is made up of polyimide, polystyrene or acetate fiber.
The Temperature Humidity Sensor manufacture craft that the embodiment of the present invention provides is simple, and adopt MEMS technology to make, volume is little, and quality is light, and integration degree is high, good with the compatibility of integrated circuit, and with low cost, is easy to batch production; Caused the change of metal electrode electric capacity by the volumetric expansion of humidity-sensitive layer, thus calculate corresponding humidity value, the linearity and precision can be improved.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (6)
1. a Temperature Humidity Sensor, is characterized in that, comprises substrate, conductive layer, humidity-sensitive layer, test electrode and metal electrode;
Described conductive layer is formed on described substrate, described humidity-sensitive layer to be formed on described conductive layer and to cover described conductive layer completely, described metal electrode is fixed in described humidity-sensitive layer, and described test electrode to be fixed on described substrate and to be connected with described conductive layer.
2. Temperature Humidity Sensor as claimed in claim 1, it is characterized in that, described metal electrode comprises the first comb and the second comb; Described first comb and described second comb are staggered.
3. Temperature Humidity Sensor as claimed in claim 1 or 2, it is characterized in that, described metal electrode is aluminium or gold electrode.
4. Temperature Humidity Sensor as claimed in claim 3, it is characterized in that, described substrate is bulk silicon substrate.
5. Temperature Humidity Sensor as claimed in claim 3, it is characterized in that, described conductive layer is made up of silit, porous silicon or metal material.
6. Temperature Humidity Sensor as claimed in claim 3, it is characterized in that, described humidity-sensitive layer is made up of polyimide, polystyrene or acetate fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410508317.6A CN104236739A (en) | 2014-09-28 | 2014-09-28 | Temperature and humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410508317.6A CN104236739A (en) | 2014-09-28 | 2014-09-28 | Temperature and humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104236739A true CN104236739A (en) | 2014-12-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201410508317.6A Pending CN104236739A (en) | 2014-09-28 | 2014-09-28 | Temperature and humidity sensor |
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| CN (1) | CN104236739A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614079A (en) * | 2015-02-10 | 2015-05-13 | 东南大学 | Infrared sensor |
| CN105067016A (en) * | 2015-08-19 | 2015-11-18 | 东南大学 | Flexible integrated temperature and humidity sensor based on oxidized graphene and preparation method of sensor |
| CN107407652A (en) * | 2015-03-11 | 2017-11-28 | 罗伯特·博世有限公司 | Manufacture method and corresponding gas sensor for gas sensor |
| CN108680611A (en) * | 2018-07-02 | 2018-10-19 | 京东方科技集团股份有限公司 | Humidity sensor, measuring system, switch controller and humidity measuring method |
| CN108896488A (en) * | 2018-07-17 | 2018-11-27 | 山东省科学院激光研究所 | Light fibre humidity transducer, production method, data processing method and acquisition device |
Citations (5)
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| JPS54102147A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS54102146A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS54102148A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS57172239A (en) * | 1981-04-17 | 1982-10-23 | Toshiba Corp | Detection circuit of temperature and humidity |
| JPS58105047A (en) * | 1981-12-18 | 1983-06-22 | Hitachi Ltd | Monolithic type temperature-humidity sensor |
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2014
- 2014-09-28 CN CN201410508317.6A patent/CN104236739A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54102147A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS54102146A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS54102148A (en) * | 1978-01-30 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Temperature and humidity sensor |
| JPS57172239A (en) * | 1981-04-17 | 1982-10-23 | Toshiba Corp | Detection circuit of temperature and humidity |
| JPS58105047A (en) * | 1981-12-18 | 1983-06-22 | Hitachi Ltd | Monolithic type temperature-humidity sensor |
Non-Patent Citations (1)
| Title |
|---|
| 施利毅: "《纳米材料》", 31 January 2007, 华东理工大学出版社 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614079A (en) * | 2015-02-10 | 2015-05-13 | 东南大学 | Infrared sensor |
| CN104614079B (en) * | 2015-02-10 | 2017-10-03 | 东南大学 | A kind of infrared sensor |
| CN107407652A (en) * | 2015-03-11 | 2017-11-28 | 罗伯特·博世有限公司 | Manufacture method and corresponding gas sensor for gas sensor |
| CN105067016A (en) * | 2015-08-19 | 2015-11-18 | 东南大学 | Flexible integrated temperature and humidity sensor based on oxidized graphene and preparation method of sensor |
| CN108680611A (en) * | 2018-07-02 | 2018-10-19 | 京东方科技集团股份有限公司 | Humidity sensor, measuring system, switch controller and humidity measuring method |
| CN108896488A (en) * | 2018-07-17 | 2018-11-27 | 山东省科学院激光研究所 | Light fibre humidity transducer, production method, data processing method and acquisition device |
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Application publication date: 20141224 |