CN1111936C - 光学位置测量装置 - Google Patents

光学位置测量装置 Download PDF

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Publication number
CN1111936C
CN1111936C CN97199653A CN97199653A CN1111936C CN 1111936 C CN1111936 C CN 1111936C CN 97199653 A CN97199653 A CN 97199653A CN 97199653 A CN97199653 A CN 97199653A CN 1111936 C CN1111936 C CN 1111936C
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CN
China
Prior art keywords
scale
driver element
measuring device
optical position
position measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN97199653A
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English (en)
Chinese (zh)
Other versions
CN1237284A (zh
Inventor
J·布拉施
M·阿尔高尔
C·卡利米斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of CN1237284A publication Critical patent/CN1237284A/zh
Application granted granted Critical
Publication of CN1111936C publication Critical patent/CN1111936C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
CN97199653A 1996-11-13 1997-10-08 光学位置测量装置 Expired - Fee Related CN1111936C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19646771 1996-11-13
DE19646771.3 1996-11-13

Publications (2)

Publication Number Publication Date
CN1237284A CN1237284A (zh) 1999-12-01
CN1111936C true CN1111936C (zh) 2003-06-18

Family

ID=7811460

Family Applications (1)

Application Number Title Priority Date Filing Date
CN97199653A Expired - Fee Related CN1111936C (zh) 1996-11-13 1997-10-08 光学位置测量装置

Country Status (3)

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JP (1) JP3429007B2 (de)
CN (1) CN1111936C (de)
DE (1) DE59704038D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100401020C (zh) * 2003-09-23 2008-07-09 约翰尼斯海登海恩博士股份有限公司 位置测量装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10050392A1 (de) * 2000-10-12 2002-04-18 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
JP4784905B2 (ja) * 2004-09-03 2011-10-05 株式会社安川電機 Ｘｙ位置決め装置
DE102012221566A1 (de) * 2012-11-26 2014-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP3501096A4 (de) * 2016-08-16 2019-07-31 Robert Bosch GmbH Optischer sensor und verfahren zum schätzen der positionen von rotoren in einem motor und motor mit dem optischen sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100401020C (zh) * 2003-09-23 2008-07-09 约翰尼斯海登海恩博士股份有限公司 位置测量装置

Also Published As

Publication number Publication date
DE59704038D1 (de) 2001-08-16
JP2001503598A (ja) 2001-03-13
JP3429007B2 (ja) 2003-07-22
CN1237284A (zh) 1999-12-01

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C10 Entry into substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20030618

Termination date: 20091109