CN111161994A

CN111161994A - Plasma surface treatment apparatus and method

Info

Publication number: CN111161994A
Application number: CN202010089609.6A
Authority: CN
Inventors: 万良淏; 徐龙; 万京林
Original assignee: Nanjing Suman Plasma Technology Co ltd
Current assignee: Nanjing Suman Plasma Technology Co ltd
Priority date: 2020-02-12
Filing date: 2020-02-12
Publication date: 2020-05-15

Abstract

The invention discloses a plasma surface treatment device and a method, wherein the plasma surface treatment device comprises a tool assembly and is characterized in that an adsorption system is arranged: the tool assembly comprises a tool block, the top surface of the tool block is used for placing a product workpiece to be processed, and at least one adsorption hole is formed in the tool block at a position covered by the product workpiece; the adsorption system comprises an adsorption fan, adsorption holes in the tool block are connected with the adsorption fan through a gas circuit, and when the equipment works, the product workpiece is adsorbed on the tool block through the adsorption fan. The plasma surface treatment equipment and the plasma surface treatment method can effectively avoid the phenomenon that a workpiece product is blown and moved by the jet plasma, and greatly improve the production stability, the standard reaching rate of the treatment result of the working procedure and the product qualification rate of the whole production line. Meanwhile, the invention also has the advantages of wide application range of product types and low modification cost, and is suitable for popularization and use.

Description

Plasma surface treatment apparatus and method

Technical Field

The invention belongs to the technical field of automatic machining, and particularly relates to plasma surface treatment equipment and a plasma surface treatment method.

Background

The technology for treating the surface of a product by using low-temperature plasma to improve the bonding performance partially or completely replaces the conventional dispensing treatment technology in the industry at present, and the technology has a great promotion space in the application of an actual production line.

The 3C production industry is one of the most fiery industries at present and is also one of the fields of continuous research and development and most application of new technologies. In the aspect of low-temperature plasma surface treatment application of mobile phone screens, most of the equipment used in the existing production line is simply combined by an independent plasma generation system and an independent motion platform, the automation degree is not high, only 1-2 mobile phone screens can be treated at one time, and the efficiency is too low for the production line with higher yield requirement. Meanwhile, the existing devices also have the following problems, including: the jet plasma airflow blows away the workpiece; the edge part of the back surface (surface without plasma body treatment) of the mobile phone screen is easy to corrode; strong current of a plasma system and weak current interference of a motion platform can cause system instability and the like, and the yield of a production line can not be guaranteed due to the above problems.

Disclosure of Invention

The technical purpose of the invention is to provide a novel plasma surface treatment device and a novel plasma surface treatment method aiming at improving the plasma surface treatment process of a mobile phone screen or similar products on the basis of the prior art so as to solve some problems in the prior art.

In order to achieve the technical purpose, the invention provides the following technical scheme:

the utility model provides a plasma surface treatment equipment, includes the frock subassembly, its characterized in that is equipped with adsorption system:

the tool assembly comprises a tool block, the top surface of the tool block is used for placing a product workpiece to be processed, and at least one adsorption hole is formed in the tool block at a position covered by the product workpiece;

the adsorption system comprises an adsorption fan, adsorption holes in the tool block are connected with the adsorption fan through a gas circuit, and when the equipment works, the product workpiece is adsorbed on the tool block through the adsorption fan.

On the basis of the above scheme, a further improved or preferred scheme also comprises

The top surface area of the tool block is smaller than the upper surface area of the product workpiece, and when the product workpiece is placed on the tool block, the middle part of the product workpiece is supported by the tool block, so that the peripheral edge of the product workpiece is suspended.

The distance between the edge of the product workpiece and the edge of the tool block is not less than 10 mm.

The tool assembly is also provided with a supporting plate, a gas circuit board, a gas circuit interface and a switching tray, the tool block is arranged on the supporting plate, and the supporting plate is provided with a through hole at a position corresponding to the adsorption hole of the tool block; the gas circuit board is arranged below the supporting plate, a gas circuit groove is formed in the gas circuit board, the gas circuit groove is connected with the adsorption fan through a gas circuit interface, and the adsorption hole in the tool block is communicated with the gas circuit groove through a through hole in the supporting plate; the switching tray is provided with workpiece grooves corresponding to the tool blocks one by one, the top surfaces of the workpiece grooves are open, the bottom plate is provided with through holes, and the size of the opening on the top surface of the workpiece groove is larger than that of a product workpiece, so that the product workpiece can fall into the workpiece grooves; the size of the through hole on the bottom plate of the workpiece groove is smaller than that of the product workpiece, but larger than that of the tooling block, so that the workpiece groove can support the falling product workpiece, and the tooling block can be inserted into the workpiece groove from the lower part to jack up the product workpiece.

Furthermore, the workpiece groove is frustum-shaped, the four walls are inclined planes, the size of the outer edge of the bottom plate of the workpiece groove is consistent with that of a product workpiece, the product workpiece is convenient to position, and the through hole in the bottom plate is formed in the middle of the bottom plate.

The integrated plasma surface treatment equipment is also provided with a cabinet body and a multi-axial motion system. The middle part of the cabinet body is equipped with the workstation, multiaxis axial motion system includes X axle slip table, Y axle slip table and Z axle slip table, X axle slip table is located one side of Y axle slip table, installs the rear side at the upper portion cabinet body, and Z axle slip table is installed on the slip table slider of X axle slip table, and Y axle slip table is installed on the workstation. And a spray gun of the plasma generation system is arranged on a sliding table sliding block of the Z-axis sliding table and is positioned in an upper cabinet body above the workbench. The tool assembly is arranged on a sliding table sliding block of the Y-axis sliding table and is driven by the sliding table sliding block to enter and exit the upper cabinet body.

The internal tow chain that is provided with of lower part cabinet of workstation below, the tow chain direction of laying is parallel with the direction of motion of Y axle slip table, and tow chain floating end links firmly with the frock subassembly and connects, and the absorption gas circuit penetrates from the tow chain stiff end, wears out from the tow chain removal end, with the absorption hole intercommunication on the frock piece.

The spray gun of more than two kinds of types and the rodless cylinder that corresponds with the spray gun one-to-one are installed on the slip table slider of Z axle slip table, and the spray gun is installed on the slider of rodless cylinder, rodless cylinder fixed mounting be in the slip table slider of Z axle slip table.

A plasma surface treatment method based on the equipment is characterized in that when a spray gun of a plasma generation system works, a product workpiece to be treated is stabilized on a tool block in an air pressure adsorption mode.

The middle part of the product workpiece is supported by the tool block with the top surface area smaller than that of the product workpiece, so that the edge of the product workpiece is suspended, and the plasma which is reflected and splashed is prevented from being attached to the edge part of the back surface of the product workpiece.

Has the advantages that:

1) the plasma surface treatment equipment and the plasma surface treatment method provided by the invention are additionally provided with the adsorption system, so that the phenomenon that a workpiece product is blown and moved by the jet plasma can be effectively avoided, and the production stability, the standard reaching rate of the treatment result of the working procedure and the product qualification rate of the whole production line can be greatly improved.

2) In a further scheme, the tool assembly is improved, so that the edge of the back surface of a product workpiece can be effectively prevented from being damaged by the reflected and splashed jet plasma, and the product treatment quality is improved.

3) In a further scheme, the automatic part picking and placing device can simply finish the action of picking and placing parts through the switching tray, the labor intensity of operators is reduced, and the production efficiency and the yield are improved.

4) In a further scheme, a plurality of sets of spray guns are installed, the spray gun type can be simply replaced through the rodless cylinder, and the requirements of products with different sizes can be flexibly met.

5) The plasma surface treatment equipment can be used for surface treatment of various products, has wide application range for product types and low modification cost, and is suitable for popularization and use.

Drawings

FIG. 1 is a schematic diagram of the right-hand side view of the apparatus;

FIG. 2 is a schematic diagram of a front view configuration of the apparatus;

FIG. 3 is a schematic diagram of an isometric configuration of the apparatus;

FIG. 4 is an exploded view of the equipment skid structure;

FIG. 5 is a view of the internal structure of the lower cabinet of the apparatus;

FIG. 6 is an exploded view of the equipment tool assembly;

fig. 7 is a schematic structural diagram of the equipment accessory adapter tray.

Detailed Description

In order to clarify the technical solution and the working principle of the present invention, the present invention is further described with reference to the accompanying drawings and specific embodiments.

In a certain processing stage, one surface of the mobile phone screen to be processed needs to be kept hydrophobic, and the other surface needs to be changed to have hydrophilicity.

As shown in fig. 3, the double-station integrated low-temperature plasma surface treatment equipment in the figure comprises a cabinet body, a control system, a plasma generation system, a multi-axial motion system, a tool assembly, an adsorption system and other components:

one) cabinet body

The plasma surface treatment equipment is provided with an aluminum profile frame cabinet body, a workbench is arranged in the middle of the cabinet body, the part above the workbench is divided into an upper cabinet body, and the part below the workbench is divided into a lower cabinet body. The upper cabinet body occupies the rear half part of the workbench, and the front side of the upper cabinet body is provided with an openable split door.

Two) control system

The control system mainly comprises a distribution board, an operation box 30 and a touch screen 31. The distribution board is installed at the rear side of the upper cabinet body, and a PLC (programmable logic controller) is installed on the distribution board. And a plasma power supply, a pressure switch and an electromagnetic valve in the plasma generation system, a servo motor and a sensor in the multi-axis motion system, an adsorption motor 19 and an electromagnetic valve in the adsorption system, and lighting control, air exhaust fan control and door opening and closing sensors in other functions are all connected with the PLC.

The operation box 30 is installed on the right side of the upper cabinet body, and a touch screen 31 is installed on the operation box. The touch screen 31 is connected with a PLC on the distribution board and used for realizing the overall operation and control of the equipment, including setting parameters such as power voltage, air source flow and air pressure of the working plasma rotating spray gun 2, and establishing, editing, storing, calling and deleting different motion tracks and the like for a multi-axial motion system.

Three) plasma generating system

The plasma generating system is connected with the control system, and comprises a jet plasma rotating spray gun 2, a jet plasma direct injection spray gun 32 and two plasma power supplies 1. The jet plasma rotary spray gun 2 is a wide spray gun, and the jet plasma direct injection spray gun 32 is a small spray gun.

The two plasma power supplies 1 are arranged on the bottom plate of the lower cabinet body, are positioned on the left side and the right side, and are respectively connected with the jet plasma rotating spray gun 2 and the jet plasma direct injection spray gun 32. The power supply signal input end and the control signal input end of the plasma power supply 1 are respectively connected with a distribution board of a control system, the gas source input end is connected with an input gas circuit, the grounding end is connected with an equipment grounding column, and the input gas circuit is provided with a pressure switch and an electromagnetic valve.

Rotatory spray gun 2 of efflux plasma and efflux plasma directly spout spray gun 32 and all set up at upper portion cabinet internally, install respectively on the slider of a stroke 50 mm's rodless cylinder, rodless cylinder's cylinder body fixed mounting is on the slider of multiaxis motion system Z axle slip table. The control system adjusts the positions of the two spray guns through the multi-axial motion system, and selects the spray gun to be used through the lifting of the rodless cylinder.

Four) multi-axial motion system

The multi-axial motion system comprises an X-axis sliding table 3, two Y-axis sliding tables 4 and 5 and a Z-axis sliding table 6. The X-axis sliding table 3 is arranged on a horizontal frame structure on the back surface of the upper cabinet body and is positioned at the rear sides of the two Y-axis sliding tables. The Y-axis sliding table is laid on the workbench, one end of the Y-axis sliding table is located in the upper cabinet body, and the other end of the Y-axis sliding table extends out of the upper cabinet body. Y axle slip table 4 sets up on the left station of workstation, and Y axle slip table 5 sets up on the right station of workstation, all installs a set of frock subassembly on every Y axle slip table, by the position of Y axle slip table mobile control frock subassembly. The Z-axis sliding table 6 is arranged on a sliding table sliding block of the X-axis sliding table 3, namely, the spray gun can freely adjust the spatial position in a coordinate system plane formed by the X-axis and the Z-axis.

The four sliding tables are basically identical in structure, and only the stroke and the installation position are different. The basic structure of the sliding table is shown in fig. 4, and the components of the sliding table comprise a bottom plate 7, a track 8, a lead screw 9, a lead screw nut 10, a sliding block 11, a sliding table sliding block 12, a servo motor 13, a synchronous pulley mechanism 14, a sensor 15, a cover plate 16 and the like.

The utility model discloses a lead screw machine, including base plate 7, the workstation, X axle slip table, lead screw 9, lead screw nut 10, slide table slider 12, apron 16, the apron is covered track 8 and lead screw 9 from the top, the apron is transversely stretched out to the both sides wing of slide table slider 12, be used for with carry on the object fixed connection on the slip table, it removes to drive the object, the bottom plate of X axle slip table is fixed on the mounted position of slip table (the bottom plate of X axle slip table is fixed on the frame construction of the upper portion cabinet body, the bottom plate of Y axle slip table is fixed on the workstation, the bottom plate of Z axle slip table is fixed on the slip table slider of X axle slip table), install two tracks 8 and a lead screw 9 that are parallel to each other on the bottom plate 7.

A servo motor 13 is arranged at one end of the sliding table, and the servo motor 13 is connected with the lead screw 9 through a synchronous pulley mechanism 14. And a displacement sensor 15 is arranged beside the bottom plate, and the displacement sensor 15 is connected with a control system and used for acquiring the position information of the sliding table sliding block 12. The servo motor 13 is connected with the control system, and when the synchronous pulley mechanism 14 works, the lead screw 9 rotates, the lead screw nut 10 on the lead screw 9 further moves, and the sliding table sliding block 12 is driven to move back and forth.

Five) tool assembly

The tooling assemblies are two groups and are respectively arranged on sliding table sliding blocks of the Y-axis sliding tables 5 and 6 at the left station and the right station. The structural explosion diagram of the tooling assembly is shown in fig. 6 and consists of a supporting plate 22, a gas circuit board 23, a bracket 24, a gas circuit interface 25, a plurality of tooling blocks 26 and a transfer tray 27.

In the prior art, when a corresponding surface is modified, plasma airflow is emitted to a mobile phone screen and a surrounding structure thereof from the upper part, particles included in the mobile phone screen are adsorbed and captured when the particles are emitted to a material, and the particles which are not captured by the material can generate reflection splash, the mobile phone screen is a sheet product, and a certain radian is often presented when the mobile phone screen is naturally placed, or the product is designed to have a radian, especially an edge part, when the mobile phone screen cannot be closely attached to a supporting surface below the mobile phone screen, the reverse side of the edge part is extremely easy to be corroded by the plasma which is reflected and splashed, and through tests, the water drop angle of the edge part of the back side (hydrophobic side) of the mobile phone screen can be reduced from more than 110 degrees to less than 100 degrees after the edge part is subjected to the non-purpose harmful. Aiming at the modification treatment:

in this embodiment, the tool block 26 is made of a polymer material, and the middle portion of the tool block is provided with an adsorption hole, so that the device can generate adsorption force when working, and prevent a workpiece product from generating displacement under the blowing of jet plasma. The shape of the tooling block 26 can be generally designed according to the shape and requirements of a product, in the embodiment, the tooling block 26 is designed into a shape with an inverted T-shaped longitudinal section for a mobile phone screen product workpiece, and consists of an upper rectangular block body and a folded edge of which the bottom is connected with a supporting plate. The top surface of the upper rectangular block is smaller than the area of the upper surface of the mobile phone screen, so that the periphery of the mobile phone screen is suspended and keeps a certain distance from surrounding components, and the plasma which is splashed by reflection is avoided. When the mobile phone screen is placed on the tool block 26 in a downward edge bending posture, the distance between the peripheral edge of the top surface of the tool block 26 and the peripheral edge of the mobile phone screen is controlled to be more than 10mm, so that the phenomenon that plasma diffused along the surface of the mobile phone screen forms inward rotational flow at the peripheral part of the mobile phone screen, and the plasma ascends under the influence of the side wall of the rectangular block body to interfere the reverse side (namely the bottom surface) of the mobile phone screen is avoided.

Two lines of 10 tooling blocks 26 are arranged above the supporting plate 22, and through holes are respectively arranged at the positions of the supporting plate 22 corresponding to the adsorption holes of each tooling block 26. The lower surface of the supporting plate is provided with a left air channel plate 23 and a right air channel plate 23 which respectively correspond to two rows of tool blocks 26. An air passage groove is processed in the air passage plate 23. One end of the air passage plate 23 is connected to the air passage interface 25. The gas path groove is communicated with the adsorption gas path through a gas path interface 25 positioned below the gas path groove and is communicated with the adsorption hole of the tool block through each supporting plate through hole positioned above the gas path groove. A bracket 24 is secured below the pallet 22 for connection to the suction system.

Fig. 7 shows an external view of the adaptor tray 27, which is used as an accessory for a device. The adaptor pallet 27 is sized according to the pallet 22, tooling blocks 26 and the product workpiece, and has an outer contour that conforms to the pallet 22. The transfer tray 27 is provided with workpiece grooves at the same positions according to the positions of the tooling blocks 26 mounted on the pallet 22. The workpiece groove is in the shape of a quadrangular frustum, four walls are inclined planes, the area of an upper opening (a top surface opening) of the workpiece groove is slightly larger than that of a product, the shape and the size of a lower opening (the outer edge of a bottom plate) of the workpiece groove are the same as those of a mobile phone screen, and a through hole with the size slightly larger than that of the top surface of a tool block and smaller than that of the mobile phone screen is arranged in the middle of the bottom plate of the workpiece groove.

The support ribs are arranged around the switching tray 27 to serve as acting points when the switching tray is stacked, so that the switching tray can be stacked together, the space is saved, and the switching tray is convenient to carry. When the transfer tray 27 is used for placing a product workpiece and transferring, the product workpiece is placed in the workpiece slot and supported by the workpiece slot bottom plate. When the equipment works, the switching tray 27 is integrally placed on the supporting plate 22, and the tool block 26 just penetrates through a through hole in the bottom plate of the workpiece groove to jack up a product workpiece and suspend the periphery of the product workpiece in the air; after the work is finished, the transfer tray 27 can be directly lifted, and the product workpiece automatically falls back into the workpiece groove.

Six) adsorption system

The adsorption system mainly comprises an adsorption fan 19, an adsorption gas path and a drag chain 21. Fig. 5 is an internal structure view of a lower cabinet body, and a main machine air path and an adsorption system are mainly installed in the lower cabinet body.

The air path of the main machine is provided with an electromagnetic valve A17 and a pressure switch 18 for controlling the on-off of the air path, and a PU pneumatic hose is connected to the electronic valve A17 and the pressure switch 18 from the air inlet of the equipment and finally connected to the air source input end of the plasma power supply 1.

The adsorption air path is provided with an adsorption fan 19, two electromagnetic valves B20 and two drag chains 21, a 1-inch hose is used for connecting an air path from the adsorption fan 19, the air path is divided into two parts and then respectively passes through the two electromagnetic valves B20, the two parts are divided into four parts, every two parts penetrate through the fixed ends of the corresponding drag chains 21 and then penetrate out from the floating ends of the drag chains 21, and finally the adsorption air path is connected to the air path connector 25 of the tooling assembly.

Two drag chains 21 which are arranged along the longitudinal direction are arranged in the lower cabinet body and respectively correspond to the X-axis sliding tables of the left station and the right station on the workbench. The fixed end of the drag chain 21 is installed on a bottom plate of the lower cabinet body, the floating end is installed on a support 24 of the tool assembly, and an air pipe of an adsorption air path penetrates through the drag chain 21.

The worktable is provided with guide grooves which are communicated up and down on two sides of the Y-axis sliding table respectively, and the guide grooves are parallel to the running direction of the Y-axis sliding table sliding block. The bracket 24 is U-shaped, the bottom of the bracket is connected with the drag chain 21, and the two arms penetrate through the workbench from the guide groove and are connected with the supporting plate 22.

Seven) other facilities

The top of the equipment is provided with a three-color alarm lamp 28 and a mute exhaust fan 29. The three-color alarm lamp 28 is connected with the control system and used for indicating the working state of the equipment; and the air inlet of the mute exhaust fan 29 is communicated with the upper cabinet body and is used for pumping out and exhausting the gas generated by the jet plasma in the equipment.

The integrated low-temperature plasma surface treatment equipment is industrial equipment used in the process of treating the surface of a product workpiece by plasma in a factory production line, integrates all systems into a unified whole through PLC integration, and controls all the systems of the equipment through the touch screen 31 on the operation box 30, so that the automation degree is high, the efficiency and yield of the process in the production line can be effectively guaranteed, and the workload of operators is reduced.

According to the plasma surface treatment method based on the equipment, when the spray gun of the plasma generation system works, the middle part of a product workpiece is supported through the tool block 26 with the top surface area smaller than that of the product workpiece, the product workpiece is lifted, the edge of the product workpiece is suspended, and the plasma which is splashed by reflection is avoided. Then, the product workpiece to be processed is adsorbed on the tool block 26 in an air pressure adsorption mode.

Meanwhile, the double-station integrated low-temperature plasma surface treatment equipment can select two different jet plasma spray guns according to the sizes of products, different treatment paths are edited according to different treatment positions, different treatment parameters are set according to different treatment materials, so that the equipment can be suitable for product workpieces made of different materials and different shapes, can be applied to different production lines in different industries, and is wide in application range.

Before the equipment is used, an equipment engineer is required to select a proper spray gun type in advance according to a product workpiece, set the operation parameters of the equipment, and establish and call a new motion track. After the parameters are set and the motion track is called through the touch screen 31, the device can be started and stopped by one key through program design, and the device automatically works according to the preset motion track to process the surface of a product workpiece. One motion trajectory program can process a plurality of production workpiece products at a time. When the product that needs production changes, only need the shape size of adjustment frock subassembly and simply change the operating parameter of equipment, transfer different motion trails, just can be applicable to the production of different products.

When the equipment starts to be used, the tool assembly is initially positioned at the front end of the Y-axis sliding table track, outside the upper cabinet body, an operator ensures that product workpieces are placed on the tool block one by one on a station, then the equipment is started, the equipment controls the Y-axis sliding table to move according to preset parameters and a calling track, the tool assembly and the product workpieces are sent into the upper cabinet body, the spray gun is started, and the process of performing plasma surface treatment on the product workpieces is automatically completed. After the processing is finished, the Y-axis sliding table is controlled to move, the tool assembly with the product workpiece is moved out of the upper cabinet body, and the worker takes down the product workpiece to enter the next step.

In order to facilitate the switching between the sample taking and placing and the working procedures of an operator, the equipment is matched with a switching tray according to a product workpiece, so that the workload of the operator for taking and placing the product is greatly reduced.

In the embodiment, the equipment is provided with double stations, and a working mode that the left station and the right station operate in turn can be established. When the tool assembly on one station enters the upper cabinet body under the drive of the Y-axis sliding table, the tool assembly on the other station is controlled to automatically withdraw to a product workpiece taking and placing position under the drive of the Y-axis sliding table, namely when the station on one side is in a working state, the tray on the other side is automatically withdrawn to be in a standby position, and the slide block of the X-axis sliding table drives the spray gun to reciprocate between the two stations. The operative employee can accomplish the work of getting and putting the piece at another side station in equipment work, so both sides are the operation in turn, have greatly improved production efficiency.

The plasma surface treatment equipment of the embodiment is repeatedly verified through sample experiments, so that the treatment effect can meet the requirements of a production line. The equipment adopts the integrated design, avoids the problems of incompatibility, mutual interference, unstable plasma and the like among systems, and the process is fully automatically completed by a machine, thereby avoiding artificial misoperation. The equipment is applied to the process of plasma surface treatment on a production line, and can greatly improve the production stability of the process, the standard reaching rate of the treatment result of the process and the qualification rate of products of the whole production line.

The main structure and operation of the present invention are described in detail with reference to the drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. The utility model provides a plasma surface treatment equipment, includes the frock subassembly, its characterized in that is equipped with adsorption system:

the tool assembly comprises a tool block (26), the top surface of the tool block (26) is used for placing a product workpiece to be processed, and at least one adsorption hole is formed in the tool block (26) at a position covered by the product workpiece;

the adsorption system comprises an adsorption fan, adsorption holes in the tool block (26) are connected with the adsorption fan (19) through a gas circuit, and when the equipment works, a product workpiece is adsorbed on the tool block (26) through the adsorption fan (19).

2. The plasma surface treatment equipment according to claim 1, wherein the top surface area of the tooling block (26) is smaller than the upper surface area of the product workpiece, and when the product workpiece is placed on the tooling block (26), the tooling block (26) supports the middle part of the product workpiece, so that the edge of the product workpiece is suspended.

3. A plasma surface treatment device according to claim 1, characterized in that the distance between the edge of the product workpiece and the edge of the tool block (26) is not less than 10 mm.

4. The plasma surface treatment equipment according to claim 2 or 3, wherein the tool assembly is further provided with a supporting plate (22), a gas circuit board (23), a gas circuit interface (25) and a switching tray (27);

the fixture block (26) is arranged on the supporting plate (22), and the supporting plate (22) is provided with a through hole at a position corresponding to the adsorption hole of the fixture block (26);

the gas circuit board (23) is arranged below the supporting plate (22), a gas circuit groove is formed in the gas circuit board (23), the gas circuit groove is connected with the adsorption fan (19) through a gas circuit interface (25), and the adsorption hole in the tool block (26) is communicated with the gas circuit groove through a through hole in the supporting plate (22);

the switching tray (27) is provided with workpiece grooves which correspond to the tool blocks (26) one by one, the top surfaces of the workpiece grooves are open, the bottom plate is provided with through holes, and the size of the opening on the top surface of the workpiece groove is larger than that of a product workpiece, so that the product workpiece can fall into the workpiece grooves; the size of the through hole of the bottom plate of the workpiece groove is smaller than that of a product workpiece, but larger than that of the tooling block, so that the workpiece groove can support the falling product workpiece, and the tooling block (26) can be inserted into the workpiece groove from the lower part to jack up the product workpiece.

5. The plasma surface treatment apparatus according to claim 4, wherein the workpiece groove is in a frustum shape, the four walls are inclined surfaces, the outer edge of the bottom plate has a size consistent with that of the product workpiece, and the through hole in the bottom plate is arranged in the middle.

6. A plasma surface treatment apparatus according to claim 1, wherein there is provided a cabinet and a multi-axial motion system;

the multi-axial movement system comprises an X-axis sliding table, a Y-axis sliding table and a Z-axis sliding table, wherein the X-axis sliding table is positioned at one side of the Y-axis sliding table and is arranged at the rear side of the upper cabinet body, the Z-axis sliding table is arranged on a sliding table sliding block of the X-axis sliding table, and the Y-axis sliding table is arranged on the working table;

a spray gun of the plasma generation system is arranged on a sliding table sliding block of the Z-axis sliding table and is positioned in an upper cabinet body above the workbench; the tool assembly is arranged on a sliding table sliding block of the Y-axis sliding table and is driven by the sliding table sliding block to enter and exit the upper cabinet body;

the lower part cabinet body below the workbench is internally provided with a drag chain (21), the laying direction of the drag chain (21) is parallel to the motion direction of the Y-axis sliding table, the floating end of the drag chain is fixedly connected with the tool assembly, and the adsorption gas circuit penetrates from the fixed end of the drag chain and penetrates out from the movable end of the drag chain to be communicated with the adsorption hole on the tool block (26).

7. The plasma surface treatment equipment according to claim 6, wherein more than two types of spray guns and rodless cylinders corresponding to the spray guns in a one-to-one manner are mounted on the sliding table slide block of the Z-axis sliding table, the spray guns are mounted on the slide block of the rodless cylinders, and the rodless cylinders are fixedly mounted on the sliding table slide block of the Z-axis sliding table.

8. A plasma surface treatment method based on the equipment of any one of claims 1 to 6, characterized in that when a spray gun of a plasma generation system works, a product workpiece to be treated is adsorbed on a tool block (26) in a gas pressure adsorption mode.

9. The processing method of a plasma surface processing apparatus according to claim 8, wherein the middle part of the product workpiece is supported by a tooling block (26) having a smaller top surface area than the product workpiece, so that the edge of the product workpiece is suspended, and the reflected and splashed plasma is prevented from interfering with the reverse edge part of the product workpiece.