CN113192813A - Plasma device using mechanical arm - Google Patents
Plasma device using mechanical arm Download PDFInfo
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- CN113192813A CN113192813A CN202110582127.9A CN202110582127A CN113192813A CN 113192813 A CN113192813 A CN 113192813A CN 202110582127 A CN202110582127 A CN 202110582127A CN 113192813 A CN113192813 A CN 113192813A
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- plasma processing
- switch cabinet
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- 238000012545 processing Methods 0.000 claims abstract description 60
- 239000007921 spray Substances 0.000 claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000009832 plasma treatment Methods 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 230000033001 locomotion Effects 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 230000007935 neutral effect Effects 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 239000000463 material Substances 0.000 description 9
- 239000000178 monomer Substances 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 238000006557 surface reaction Methods 0.000 description 4
- 239000011149 active material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007259 addition reaction Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 230000000975 bioactive effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-M hydroperoxide group Chemical group [O-]O MHAJPDPJQMAIIY-UHFFFAOYSA-M 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910001872 inorganic gas Inorganic materials 0.000 description 1
- 239000012567 medical material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000036544 posture Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/06—Control stands, e.g. consoles, switchboards
Abstract
The invention discloses a plasma device utilizing a mechanical arm, which comprises a square device frame, wherein a plasma torch and a mechanical arm auxiliary treatment device are arranged in a plasma treatment cavity on the right side of the upper layer of the square device frame. A mechanical arm is adopted to drive a plasma spray gun to move in the plasma treatment cavity; the spray gun distance detection unit is arranged on the surface of the mechanical arm and used for collecting the distance between the plasma spray gun nozzle and the processed surface and transmitting the collected data to the CPU through a corresponding line; the left side of the upper layer is provided with a control switch cabinet; a mechanical arm control panel, a plasma processing device control panel, a mechanical arm control circuit, a plasma processing device control circuit, an air source supply switch and a wireless transmission device are arranged in the control switch cabinet; the CPU is communicated with the control platform through a wireless transmission device; the plasma power generator is arranged in the middle layer of the device frame. The plasma device is simple and convenient to operate, strong in controllability and low in treatment cost.
Description
Technical Field
The invention relates to the technical field of plasma processing, in particular to a plasma device utilizing a mechanical arm.
Background
Plasma is a high-energy mass state of aggregation containing a large number of reactive particles such as electrons, ions, excited atoms, molecules, photons, and radicals. The treatment of the material with plasma can cause physical changes (such as etching, desorption, sputtering, injection, excitation, ionization, etc.) and chemical changes (such as oxidation, decomposition, crosslinking, polymerization, grafting, etc.) on the surface of the material, so as to achieve the purpose of changing the surface characteristics (including hydrophilicity, hydrophobicity, adhesiveness, flame retardancy, corrosion resistance, antistatic property and biocompatibility) of the material. In recent years, the application of plasma surface modification technology to the modification of medical materials has become a research hotspot of plasma technology. The low-temperature plasma treatment is classified into plasma polymerization and plasma surface treatment. Plasma polymerization is a process in which organic gaseous monomers are plasmatized by electric discharge to produce various active materials, and a polymerization film is formed by an addition reaction between these active materials or between the active materials and the monomers. The plasma surface treatment is to perform surface reaction by using plasma of non-polymerizable inorganic gas (Ar2, N2, H2, O2, and the like), introduce specific functional groups on the surface through the surface reaction, generate surface erosion, form a cross-linked structure layer or generate surface free radicals, and further react to generate the specific functional groups such as hydroperoxide at the positions of the surface free radicals activated by the plasma. It is common to introduce oxygen-containing functional groups on the surface of polymeric materials. Such as-OH, -OOH, etc. Amine groups have also been introduced at the surface of the material. After generating free radicals or introducing functional groups on the surface of the material, the material can react with other high molecular monomers to carry out grafting (namely the free radicals or the functional groups formed on the surface of the material initiate monomer molecules to act with the monomer molecules) or polymerization, or bioactive molecules are directly fixed on the surface of the material. Because ions, free electrons and free radicals exist in the low-temperature plasma, the low-temperature plasma provides chemical reaction conditions which are not available in a conventional chemical reactor, and not only can decompose molecules in raw gas, but also can cause a plurality of organic monomers to generate polymerization reaction.
With the development of the plasma processing technology, the requirements for surface reaction of the plasma are continuously improved, the range of the surface to be processed is more and more extensive, the structure of the surface is more and more complex, the mechanical arm is introduced to control the plasma gun, the plasma processing of the surfaces with different shapes can be realized, and the quality and the speed of the processing can be ensured.
Disclosure of Invention
1. The technical problem to be solved is as follows:
in view of the above problems, the present invention provides a plasma apparatus using a robot arm, which solves the problem of incomplete plasma surface reaction caused by non-coplanar surfaces and non-uniform structures when a plasma gun performs surface treatment.
2. The technical scheme is as follows:
a plasma apparatus using a robot arm includes a square apparatus frame; a plasma power generator, a plasma processing device, a mechanical arm auxiliary processing device and a gas source supply device are arranged in the device frame; the method is characterized in that: the device frame is divided into an upper part, a middle part and a lower part; the right side of the uppermost layer is provided with a plasma processing cavity; the bottom of the plasma processing cavity is a plasma processing platform; the plasma processing device comprises a plasma torch; the mechanical arm auxiliary processing device comprises a mechanical arm, a mechanical arm fixing device and a spray gun distance detection unit; the mechanical arm can drive the plasma spray gun to move in the plasma treatment cavity; a mechanical arm fixing device is arranged on the surface of the plasma processing platform; the mechanical arm is a six-axis attitude omnibearing motion mechanical arm, and a plasma spray gun is fixed at one end of the mechanical arm and drives the plasma spray gun to move; the other end is fixedly arranged on the surface of the plasma processing platform, and a motion control unit of a mechanical arm is arranged in the other end; the spray gun distance detection unit is arranged on the surface of the mechanical arm and used for collecting the distance between the spray head of the plasma spray gun and the surface to be processed and transmitting the collected data to the CPU through a corresponding line; the left side of the uppermost layer is a control switch cabinet; a mechanical arm control panel, a plasma processing device control panel, a mechanical arm control circuit, a plasma processing device control circuit, an air source supply switch and a wireless transmission device are arranged in the control switch cabinet; the plasma processing device comprises a mechanical arm control panel, a plasma processing device control panel, an air source supply switch and an electromagnetic valve, wherein the mechanical arm control panel is connected with a mechanical arm control circuit through a corresponding line; the mechanical arm control circuit, the plasma processing device control circuit and the gas source supply switch are all connected with the CPU; the CPU is communicated with the control platform through a wireless transmission device; a plasma power generator is arranged in the middle layer of the device frame; the plasma power generator is connected with the plasma spray gun to provide high voltage electricity for the plasma spray gun; the gas source supply device is connected with the plasma torch pipeline to provide corresponding high-pressure gas for the plasma torch.
Furthermore, a mechanical arm control panel and a plasma processing device control panel of the control switch cabinet are touch screen control panels which are both arranged on the front side of the control switch cabinet; the opening door device for controlling the switch cabinet is arranged on the side wall of the device frame; the reverse side of the control switch cabinet is provided with a vent hole; and a cooling fan of the control switch cabinet is arranged in the control switch cabinet.
Further, the plasma power generator is a differential excitation power supply; the plasma torch is a differential excitation plasma torch.
Furthermore, the spray gun distance detection unit is an infrared distance meter; the infrared distance meter acquires the distance between the surface to be processed and a plasma spray gun nozzle by emitting infrared rays; the distance from the surface to be treated to the spray gun nozzle is 6-12 mm.
Further, the gas source supply device comprises one of oxygen and inert gas.
Further, the plasma torch is a rotary jet low-temperature plasma torch, the energy of ions and electrons of the plasma torch reaches 6-10eV, and the ejected low-temperature plasma flow is neutral.
Furthermore, the device is positioned at the upper part of the plasma processing cavity, and the top end of the device frame is provided with a vent hole; the air vent is connected with an external dust suction device to discharge nitride and dust in the plasma processing cavity.
A method for controlling a plasma apparatus using a robot arm, comprising: the method comprises the following steps: a
The method comprises the following steps: before starting up, confirming that a power input plug is reliably connected with a power supply socket and a ground wire binding post is reliably connected with a standard ground; after the device is confirmed to be correct, a main power switch of the device is turned on to the limit position, the device is powered on, and the air source supply device works;
step two: placing the surface to be processed upwards on the upper end of the mechanical arm fixing device and fixing; setting the distance from the surface to be processed, the processing time and the movement range of the mechanical arm;
step three: the mechanical arm drives the plasma spray gun to perform plasma surface treatment on the surface to be treated within a set treatment range and treatment time; and after the treatment flow is finished, taking out the treated workpiece.
3. Has the advantages that:
(1) the plasma device is simple and convenient to operate, strong in controllability and low in treatment cost; the size and the treatment process of the device can be flexibly adjusted according to the diameter, the height, the shape and the treatment effect requirements of the treatment piece, and the treatment is carried out in the normal pressure air, so that the treatment cost is low and the treatment efficiency is high.
(2) The device adopts a robot arm capable of performing all-directional motion in six-axis postures, the robot arm drives the plasma spray gun to perform all-directional spraying, the energy of ions and electrons emitted by the spray gun reaches 6-10eV, and the emitted low-temperature plasma flow is neutral and uncharged. The operation of the automatic equipment is achieved through positioning control and manual input of control data, and the size and the treatment process of the device can be flexibly adjusted according to the diameter and the height of a treated test piece and the treatment effect requirement.
In conclusion, the device saves a large amount of human resources, avoids errors of manual work and effectively improves the processing efficiency.
Drawings
FIG. 1 is an oblique view of the present apparatus;
FIG. 2 is a front view of the present device;
fig. 3 is a side view of the device.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
A plasma apparatus using a robot arm as shown in fig. 1 to 2 includes a square apparatus frame 1; a plasma power generator 2, a plasma processing device, a mechanical arm auxiliary processing device and a gas source supply device are arranged in the device frame; the method is characterized in that: the device frame is divided into an upper part, a middle part and a lower part; the right side of the uppermost layer is provided with a plasma processing cavity; the bottom of the plasma processing cavity is a plasma processing platform; the plasma processing apparatus includes a plasma torch 3; the mechanical arm auxiliary processing device comprises a mechanical arm 4, a mechanical arm fixing device 8 and a spray gun distance detection unit; the mechanical arm can drive the plasma spray gun to move in the plasma treatment cavity; a mechanical arm fixing device is arranged on the surface of the plasma processing platform; the mechanical arm is a six-axis attitude omnibearing motion mechanical arm, and a plasma spray gun is fixed at one end of the mechanical arm and drives the plasma spray gun to move; the other end is fixedly arranged on the surface of the plasma processing platform, and a motion control unit of a mechanical arm is arranged in the other end; the spray gun distance detection unit is arranged on the surface of the mechanical arm and used for collecting the distance between the spray head of the plasma spray gun and the surface to be processed and transmitting the collected data to the CPU through a corresponding line; the left side of the uppermost layer is provided with a control switch cabinet 5; a mechanical arm control panel, a plasma processing device control panel, a mechanical arm control circuit, a plasma processing device control circuit, an air source supply switch and a wireless transmission device are arranged in the control switch cabinet; the plasma processing device comprises a mechanical arm control panel, a plasma processing device control panel, an air source supply switch and an electromagnetic valve, wherein the mechanical arm control panel is connected with a mechanical arm control circuit through a corresponding line; the mechanical arm control circuit, the plasma processing device control circuit and the gas source supply switch are all connected with the CPU; the CPU is communicated with the control platform through a wireless transmission device; a plasma power generator is arranged in the middle layer of the device frame; the plasma power generator is connected with the plasma spray gun to provide plasma current for the plasma spray gun; the gas source supply device is connected with the plasma torch pipeline to provide corresponding high-pressure gas for the plasma torch.
Further, a mechanical arm control panel and a plasma processing device control panel of the control switch cabinet are both touch screen control panels 6 which are both installed on the front side of the control switch cabinet; the opening door device for controlling the switch cabinet is arranged on the side wall of the device frame; the reverse side of the control switch cabinet is provided with a vent hole; and a cooling fan of the control switch cabinet is arranged in the control switch cabinet.
Further, the plasma power generator is a differential excitation power supply; the plasma torch is a differential excitation plasma torch.
Furthermore, the spray gun distance detection unit is an infrared distance meter; the infrared distance meter acquires the distance between the surface to be processed and a plasma spray gun nozzle by emitting infrared rays; the distance from the surface to be treated to the spray gun nozzle is 6-12 mm.
Further, the gas source supply device comprises one of oxygen and inert gas.
Further, the plasma torch is a rotary jet low-temperature plasma torch, the energy of ions and electrons of the plasma torch reaches 6-10eV, and the ejected low-temperature plasma flow is neutral.
Further, a vent hole 7 is arranged at the top end of the device frame and positioned at the upper part of the plasma processing cavity; the air vent is connected with an external dust suction device to discharge nitride and dust in the plasma processing cavity.
The specific embodiment is as follows:
a method of using a plasma apparatus using a robot arm, comprising the steps of: a
The method comprises the following steps: before starting up, confirming that a power input plug is reliably connected with a power supply socket and a ground wire binding post is reliably connected with a standard ground; after the device is confirmed to be correct, a main power switch of the device is turned on to the limit position, the device is powered on, and the air source supply device works;
step two: placing the surface to be processed upwards on the upper end of the mechanical arm fixing device and fixing; setting the distance from the surface to be processed, the processing time and the movement range of the mechanical arm;
step three: the mechanical arm drives the plasma spray gun to perform plasma surface treatment on the surface to be treated within a set treatment range and treatment time; and after the treatment flow is finished, taking out the treated workpiece.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. A plasma apparatus using a robot arm includes a square apparatus frame; a plasma power generator, a plasma processing device, a mechanical arm auxiliary processing device and a gas source supply device are arranged in the device frame; the method is characterized in that: the device frame is divided into an upper part, a middle part and a lower part; the right side of the uppermost layer is provided with a plasma processing cavity; the bottom of the plasma processing cavity is a plasma processing platform; the plasma processing device comprises a plasma torch; the mechanical arm auxiliary processing device comprises a mechanical arm, a mechanical arm fixing device and a spray gun distance detection unit; the mechanical arm can drive the plasma spray gun to move in the plasma treatment cavity; a mechanical arm fixing device is arranged on the surface of the plasma processing platform; the mechanical arm is a six-axis attitude omnibearing motion mechanical arm, and a plasma spray gun is fixed at one end of the mechanical arm and drives the plasma spray gun to move; the other end is fixedly arranged on the surface of the plasma processing platform, and a motion control unit of a mechanical arm is arranged in the other end; the spray gun distance detection unit is arranged on the surface of the mechanical arm and used for collecting the distance between the spray head of the plasma spray gun and the surface to be processed and transmitting the collected data to the CPU through a corresponding line; the left side of the uppermost layer is a control switch cabinet; a mechanical arm control panel, a plasma processing device control panel, a mechanical arm control circuit, a plasma processing device control circuit, an air source supply switch and a wireless transmission device are arranged in the control switch cabinet; the plasma processing device comprises a mechanical arm control panel, a plasma processing device control panel, an air source supply switch and an electromagnetic valve, wherein the mechanical arm control panel is connected with a mechanical arm control circuit through a corresponding line; the mechanical arm control circuit, the plasma processing device control circuit and the gas source supply switch are all connected with the CPU; the CPU is communicated with the control platform through a wireless transmission device; a plasma power generator is arranged in the middle layer of the device frame; the plasma power generator is connected with the plasma spray gun to provide plasma current for the plasma spray gun; the gas source supply device is connected with the plasma torch pipeline to provide corresponding high-pressure gas for the plasma torch.
2. The plasma apparatus using a robot arm according to claim 1, wherein: the mechanical arm control panel and the plasma processing device control panel of the control switch cabinet are touch screen control panels which are arranged on the front side of the control switch cabinet; the opening door device for controlling the switch cabinet is arranged on the side wall of the device frame; the reverse side of the control switch cabinet is provided with a vent hole; and a cooling fan of the control switch cabinet is arranged in the control switch cabinet.
3. The plasma apparatus using a robot arm according to claim 1, wherein: the plasma power generator is a differential excitation power supply; the plasma torch is a differential excitation plasma torch.
4. The plasma apparatus using a robot arm according to claim 1, wherein: the spray gun distance detection unit is an infrared distance meter; the infrared distance meter acquires the distance between the surface to be processed and a plasma spray gun nozzle by emitting infrared rays; the distance from the surface to be treated to the spray gun nozzle is 6-12 mm.
5. The plasma apparatus using a robot arm according to claim 1, wherein: the gas source supply device comprises one of oxygen and inert gas.
6. The plasma apparatus using a robot arm according to claim 1, wherein: the plasma torch is a rotary jet low-temperature plasma torch, the energy of ions and electrons of the plasma torch reaches 6-10eV, and the ejected low-temperature plasma flow is neutral.
7. The plasma apparatus using a robot arm according to claim 1, wherein: the device frame is positioned at the upper part of the plasma processing cavity, and the top end of the device frame is provided with a vent hole; the air vent is connected with an external dust suction device to discharge nitride and dust in the plasma processing cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110582127.9A CN113192813A (en) | 2021-05-27 | 2021-05-27 | Plasma device using mechanical arm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110582127.9A CN113192813A (en) | 2021-05-27 | 2021-05-27 | Plasma device using mechanical arm |
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| Publication Number | Publication Date |
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| CN113192813A true CN113192813A (en) | 2021-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110582127.9A Pending CN113192813A (en) | 2021-05-27 | 2021-05-27 | Plasma device using mechanical arm |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114122918A (en) * | 2021-11-30 | 2022-03-01 | 南京工业大学 | Multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic plasma |
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| CN212418871U (en) * | 2020-07-31 | 2021-01-29 | 江苏创励安科技有限公司 | FPC plasma cleaning equipment |
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2021
- 2021-05-27 CN CN202110582127.9A patent/CN113192813A/en active Pending
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|---|---|---|---|---|
| CN101370622A (en) * | 2006-01-18 | 2009-02-18 | 阿戈斯治疗公司 | Systems and methods for processing samples in a closed container, and related devices |
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Application publication date: 20210730 |