CN114122918A - Multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic plasma - Google Patents

Multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic plasma Download PDF

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CN114122918A
CN114122918A CN202111436756.7A CN202111436756A CN114122918A CN 114122918 A CN114122918 A CN 114122918A CN 202111436756 A CN202111436756 A CN 202111436756A CN 114122918 A CN114122918 A CN 114122918A
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mechanical arm
insulating ceramic
spark plug
degree
jet
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CN114122918B (en
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崔行磊
方志
周洋洋
祝曦
申杰飞
黄成硕
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Nanjing Tech University
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Nanjing Tech University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01TSPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T21/00Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs
    • H01T21/02Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs of sparking plugs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01TSPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T21/00Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs
    • H01T21/02Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs of sparking plugs
    • H01T21/04Cleaning

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Abstract

The invention belongs to the technical field of spark plugs, and particularly relates to a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film deposition method, which comprises the following steps: primarily cleaning the surface of the spark plug insulating ceramic; the insulating ceramic is fixed on the rotating motor, and the shape of the insulating ceramic is scanned by using the mechanical arm; introducing argon (Ar)/oxygen (O) into the jet reactor2) Mixing working gas, generating jet discharge, measuring the length of a body plume, reasonably planning the running path of the mechanical arm, and entering a cleaning working mode; introduction of Ar/O2Mixing the working gas and the silicon-containing medium, re-planning a path, and entering a film deposition working mode. The invention adopts the matching of the multi-degree-of-freedom mechanical arm and the rotating motor, obtains the length of the fluid plume of the jet under the cleaning mode and the film deposition mode respectively, controls the running path of the mechanical arm by combining the ceramic shape scanning, realizes the dynamic processing of the spark plug insulating ceramic, keeps the consistency of the processing distance,thereby ensuring the uniformity of film deposition.

Description

Multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic plasma
Technical Field
The invention relates to the technical field of spark plugs, in particular to a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film deposition method.
Background
Spark plugs are the core components of an engine, and their performance is related to the starting, power output, emissions, and operational stability of the vehicle. When the spark plug works in an extreme environment with high temperature and high pressure for a long time, carbon deposition on the surface of the insulating ceramic is easily caused to cause the ignition performance to be reduced, on one hand, the engine is insufficient in power, shakes, stalls and even cannot be started, and the threat is brought to the stable and safe running of the automobile; on the other hand, the oil-gas mixture is not combusted sufficiently, a large amount of toxic and harmful substances are discharged into the air, and the environment is seriously polluted. Therefore, a measure is urgently needed to effectively inhibit the reduction of the surface voltage resistance of the insulating ceramic, so that the ignition performance of the spark plug is improved, the service life of the spark plug is prolonged, and the stability and the safety of the running of an automobile are enhanced.
The traditional method for enhancing the carbon deposition resistance of the spark plug mainly has the following defects:
1) the improved electrode structure of the spark plug not only can increase the process complexity and the economic cost of design and production, but also can not solve the problem of carbon deposition fundamentally and only can slightly prolong the service life of the spark plug.
2) Adjusting the ignition and fuel injection control strategy not only increases the complexity of the vehicle ignition control system, but inevitably reduces the output torque and power of the engine.
3) The off-line cleaning of the surface carbon deposition can not only damage the surface of the insulating ceramic, but also can not ensure the consistency of the ignition performance of the spark plug after cleaning, and is very easy to damage the engine.
4) The catalytic decomposition efficiency of the functional film formed by the vacuum ion plating method needs to be improved, the treatment condition is harsh, the equipment operation cost is high, and industrial large-scale continuous treatment is difficult to realize.
5) The existing plasma processing method does not consider the complex shape parameters of the spark plug insulating ceramic in the dynamic processing process, can not ensure the consistent processing distance of each point, and is difficult to realize uniform processing. In addition, the mechanical stability of the film is poor due to incomplete cleaning of the ceramic surface and the fact that the silicon-containing film is mainly composed of organic components.
Therefore, a plasma multi-degree-of-freedom dynamic film deposition method for the spark plug insulating ceramic is provided to solve the problems.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a plasma multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic.
In order to achieve the purpose, the invention adopts the following technical scheme:
a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film deposition method comprises the following steps:
s1, performing primary cleaning treatment on the surface of the spark plug insulating ceramic;
s2, fixing the spark plug insulating ceramic on the rotating motor and keeping the rotating motor still, and scanning the shape of the rotating motor by using a mechanical arm;
s3, introducing Ar/O into the jet flow reactor2Mixing working gas, switching on a high-voltage power supply, generating jet discharge, measuring the length of the body plume, and reasonably planning the operation path of the mechanical arm by combining shape scanning data and body plume length data;
s4, starting a rotating motor and a mechanical arm, entering a cleaning working mode, and driving the jet flow reactor to carry out deep cleaning treatment on the ceramic surface for 120S by the mechanical arm; after cleaning, turning off the power supply, stopping ventilation, stopping the motor, and returning the mechanical arm to the original point;
s5, keeping the motor and the mechanical arm static, and introducing Ar/O into the reactor2Mixing working gas and a silicon-containing medium, starting a high-voltage power supply, generating jet discharge, measuring the length of the body plume again, and re-planning the operation path of the mechanical arm;
s6, starting a rotating motor and a mechanical arm, entering a film deposition working mode, and driving the jet flow reactor to dynamically process the ceramic surface for 120S by the mechanical arm; and after the treatment is finished, the power supply is turned off, the ventilation is stopped, the motor is stopped, and the mechanical arm returns to the original point.
In the above method for depositing a multi-degree-of-freedom dynamic plasma film on a spark plug insulating ceramic, the surface of the spark plug insulating ceramic is scrubbed with alcohol before being treated in step S1, then the surface of the spark plug insulating ceramic is cleaned with deionized water in an ultrasonic cleaner, and finally the surface of the spark plug insulating ceramic is dried in a dryer for 30 minutes to remove dust and dirt with weak adhesion on the surface of the spark plug insulating ceramic.
In the above method for depositing a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film, after the initial cleaning of the spark plug insulating ceramic in step S2 is completed, the spark plug insulating ceramic is fixed on a rotating motor in a dynamic modification platform, a multi-degree-of-freedom mechanical arm is started to scan the surface of the ceramic, shape parameters of the ceramic are obtained, data is recorded, and finally the mechanical arm returns to the origin.
In the multi-degree-of-freedom dynamic film deposition method for the spark plug insulating ceramic plasma, the dynamic modification platform comprises a mechanical system, a processing system, a high-voltage driving circuit, a mechanical arm and rotating motor driving circuit, a gas circuit, a control system and a data acquisition system.
In the method for depositing the spark plug insulating ceramic plasma multi-freedom-degree dynamic film, the mechanical system comprises a multi-freedom-degree mechanical arm and a rotating motor which are used in a matched manner to realize the dynamic uniform treatment of the insulating ceramic surface; one side of the multi-degree-of-freedom mechanical arm is provided with a mechanical arm controller and a mechanical arm driver which are connected with the multi-degree-of-freedom mechanical arm, and the processing system is a needle ring electrode jet flow reactor; the high-voltage driving circuit comprises a nanosecond pulse power supply and a related connecting circuit and is used for driving the jet reactor.
In the above method for depositing a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film, the dc driving circuit includes a multi-degree-of-freedom mechanical arm, a rotating motor, a gas flow meter, a control system and a dc power supply of a data acquisition system; the gas path comprises a main gas path argon gas, an oxygen gas and an auxiliary gas path argon gas, and a silicon-containing medium is carried by a bubbling method, and the silicon-containing medium provides low-polarity silicon-containing groups for film formation; the control system controls the operation path of the mechanical arm, the rotating speed of the rotating motor and the gas flow of the gas circuit; the data acquisition system respectively acquires the shape data of the insulating ceramic and the length data of the fluid plume of the jet flow through the displacement sensor and the optical fiber sensor.
In the above method for depositing a multi-degree-of-freedom dynamic film on a spark plug insulating ceramic plasma, in step S3, opening a main gas path of argon and oxygen at flow rates of 1L/min and 1mL/min, respectively, passing through a gas mixing chamber, mixing thoroughly, passing through an incident flow reactor, passing through a nanosecond pulse power supply after passing through the reactor for 5S, generating jet discharge, and measuring the length of a jet plume by using an optical fiber sensor at an origin position.
In the above method for depositing the spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film, the nanosecond pulse power supply parameters include power supply voltage 12kV, frequency 5kHz, rising edge 50ns, falling edge 50ns and pulse width time 800 ns.
In the above method for depositing a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film, in step S5, while keeping the motor and the mechanical arm stationary, simultaneously turning on argon, oxygen and a silicon-containing medium at flow rates of 1L/min, 1mL/min and 1.3mL/min, after being fully mixed in the gas mixing chamber, passing through the jet reactor, after 5S, after the air in the reactor is exhausted, starting a nanosecond pulse power supply, measuring the length of the jet fluid plume again by using an optical fiber sensor at the origin position, and planning the mechanical arm operation path again by combining the shape parameters obtained by shape scanning and the length of the jet fluid plume, so that the tip of the jet fluid plume is always kept in contact with the ceramic surface during dynamic jet treatment.
Compared with the prior art, the method for depositing the spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film has the advantages that:
1. the invention provides a plasma surface film deposition method capable of enhancing the carbon deposition resistance of insulating ceramic of a spark plug, which utilizes the mixing of oxygen in argon as a working gas to improve the cleaning effect in a cleaning working mode on one hand, and utilizes plasma jet flow formed by mixing argon, oxygen and a silicon-containing medium to deposit a silicon-containing inorganic film on the surface of the ceramic in a film deposition working mode on the other hand, so that the mechanical stability of the film is improved while the polarity of the surface of the insulating ceramic is reduced; in addition, the multi-degree-of-freedom mechanical arm is matched with a rotating motor, the length of a jet fluid plume is obtained in a cleaning mode and a film deposition mode respectively, the mechanical arm running path is controlled by combining ceramic shape scanning, dynamic processing of spark plug insulating ceramic is achieved, the consistency of processing distance is kept, and the uniformity of film deposition is further guaranteed.
2. Compared with the traditional methods of spark plug structure optimization, ignition and oil injection mode optimization, spark plug surface cleaning and the like, the method disclosed by the invention utilizes physical etching and chemical deposition of plasmas on the surface of insulating ceramics to change the surface physicochemical property of the plasmas, so that the problem of ignition performance reduction caused by carbon deposition on the surface of the spark plug is fundamentally solved; compared with the existing plasma modification method, the method has the advantages that the shape of the spark plug insulating ceramic to be processed is scanned and the length of the correlation fluid plume is measured by using the sensor, the information of the shape and the length of the correlation fluid plume is fused and planned to the operation path of the mechanical arm, the consistency of the relative positions of the plume and the spark plug insulating ceramic to be processed in the dynamic processing process is ensured, and therefore the uniformity of modification processing and the universality of the method for spark plugs of different models and sizes are improved; in addition, compared with the existing plasma modification method, the method has the advantages that oxygen is added into the working gas, the cleaning treatment effect is improved, the inorganic component content of the deposited film on the surface of the insulating ceramic is improved, and the stability of the deposited film is improved.
Drawings
FIG. 1 is a method structure diagram of a multi-degree-of-freedom dynamic film deposition method for a spark plug insulating ceramic plasma according to the present invention;
FIG. 2 is a schematic diagram of the robot arm scanning the ceramic shape according to the multi-degree of freedom dynamic film deposition method for the spark plug insulating ceramic plasma provided by the present invention;
FIG. 3 is a schematic diagram of a film deposition mode of a multi-degree-of-freedom dynamic film deposition method for a spark plug insulating ceramic plasma according to the present invention;
FIG. 4 is a method step diagram of a multi-degree-of-freedom dynamic film deposition method for spark plug insulating ceramic plasma according to the present invention.
In the figure, a 100-degree-of-freedom robot, a 200-rotation motor, a 300-jet reactor, a 400-gas flow meter, a 500-silica-containing coal, a 600-robot controller, and a 700-robot driver are shown.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Examples
Referring to fig. 1-4, a spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film deposition method comprises the following steps:
s1, performing primary cleaning treatment on the surface of the spark plug insulating ceramic;
s2, fixing the spark plug insulating ceramic on the rotating motor and keeping the rotating motor still, and scanning the shape of the rotating motor by using a mechanical arm;
s3, introducing Ar/O into the jet flow reactor2Mixing working gas, switching on a high-voltage power supply, generating jet discharge, measuring the length of the body plume, and reasonably planning the operation path of the mechanical arm by combining shape scanning data and body plume length data;
s4, starting a rotating motor and a mechanical arm, entering a cleaning working mode, and driving the jet flow reactor to carry out deep cleaning treatment on the ceramic surface for 120S by the mechanical arm; after cleaning, turning off the power supply, stopping ventilation, stopping the motor, and returning the mechanical arm to the original point;
s5, keeping the motor and the mechanical arm static, and introducing Ar/O into the reactor2Mixing working gas and a silicon-containing medium, starting a high-voltage power supply, generating jet discharge, measuring the length of the body plume again, and re-planning the operation path of the mechanical arm;
s6, starting a rotating motor and a mechanical arm, entering a film deposition working mode, and driving the jet flow reactor to dynamically process the ceramic surface for 120S by the mechanical arm; and after the treatment is finished, the power supply is turned off, the ventilation is stopped, the motor is stopped, and the mechanical arm returns to the original point.
The plasma is utilized to generate physical etching and chemical deposition on the surface of the spark plug insulating ceramic, the physical and chemical properties of the surface of the spark plug insulating ceramic are changed, and the surface polarity is reduced, so that the carbon deposition resistance of the spark plug is enhanced, and the problem of ignition performance reduction of the spark plug caused by carbon deposition is solved.
Wherein, before treatment in step S1, the surface of the spark plug insulating ceramic is scrubbed by alcohol, then is cleaned by deionized water in an ultrasonic cleaner, and finally is dried in a dryer for 30 minutes to remove dust and dirt with weak adhesive force on the surface of the ceramic, two cleaning treatments are carried out before modification treatment, the dust and dirt with weak adhesive force on the surface of the ceramic are removed by primary cleaning treatment, and pollutants which are difficult to remove on the surface of the ceramic are removed by plasma etching and strong oxidizing property of active substances in deep treatment.
After the preliminary cleaning treatment of the spark plug insulating ceramic is finished in the step S2, the spark plug insulating ceramic is fixed on a rotating motor in a dynamic modification platform, a multi-degree-of-freedom mechanical arm is started to scan the surface of the ceramic, ceramic shape parameters are obtained, data are recorded, and finally the mechanical arm returns to the original point.
Further, the dynamic modification platform comprises a mechanical system, a processing system, a high-voltage driving circuit, a mechanical arm and rotating motor driving circuit, an air path, a control system and a data acquisition system, specifically, the mechanical system comprises a multi-degree-of-freedom mechanical arm 100 and a rotating motor 200 which are matched for use so as to realize dynamic uniform processing on the surface of the insulating ceramic, one side of the multi-degree-of-freedom mechanical arm 100 is provided with a mechanical arm controller 600 and a mechanical arm driver 700 which are connected with the multi-degree-of-freedom mechanical arm, the normal use of the multi-degree-of-freedom mechanical arm is ensured, and the processing system is a needle ring electrode jet reactor 300; the high-voltage driving circuit comprises a nanosecond pulse power supply and related connecting circuits and is used for driving the jet flow reactor 300, and more specifically, the direct-current driving circuit comprises a direct-current power supply of the multi-degree-of-freedom mechanical arm 100, a rotating motor 200, a gas flowmeter 400, a control system and a data acquisition system; the gas circuit comprises a main gas circuit argon gas, an oxygen gas and an auxiliary gas circuit argon gas, and the silicon-containing medium 500 is carried by a bubbling method, wherein the argon gas is working gas, the oxygen addition increases the oxygen atom content with strong oxidizing property on one hand, the deep cleaning treatment effect of the insulating ceramic is improved, and on the other hand, the inorganic component content of the deposited film on the surface of the insulating ceramic can be improved, so that the stability of the film is improved. The silicon-containing medium provides low polarity silicon-containing groups for film formation.
Further, the control system controls the operation path of the mechanical arm, the rotating speed of the rotating motor 200 and the gas flow of the gas path; the data acquisition system respectively acquires insulating ceramic shape data and jet flow body plume length data through a displacement sensor and an optical fiber sensor, a scanning sensor on a mechanical arm is used for obtaining spark plug insulating ceramic shape parameters, the optical fiber sensor at the origin position of the mechanical arm is used for measuring the length of the jet flow body plume twice, and the mechanical arm operation path planning is carried out twice, so that the tip end of the body plume can be always kept in contact with the ceramic surface during deep cleaning treatment and dynamic modification treatment, and the influence on the surface treatment uniformity caused by the length change of the body plume due to the addition of a silicon-containing medium is avoided; in addition, the mechanical arm is matched with the rotating motor 200 for use, so that the modification treatment of the spark plug insulating ceramics of different models can be realized, and the universality is improved.
In the step S3, opening main gas paths of argon and oxygen at flow rates of 1L/min and 1mL/min, mixing the mixture in a gas mixing chamber, introducing into the reactor, introducing air for 5S, starting a nanosecond pulse power supply to generate jet discharge, and measuring the length of the jet plume by using an optical fiber sensor at the origin position, wherein the parameters of the nanosecond pulse power supply specifically include power voltage 12kV, frequency 5kHz, rising edge 50ns, falling edge 50ns, and pulse width time 800 ns.
Wherein, in step S5, when keeping the motor and the mechanical arm static, simultaneously opening argon, oxygen and silicon-containing medium with flow rates of 1L/min, 1mL/min and 1.3mL/min, after fully mixing in the gas mixing chamber and passing through the jet reactor, after 5S, exhausting the air in the reactor, starting a nanosecond pulse power supply, measuring the length of the jet fluid plume again by using the optical fiber sensor at the original point position, planning the mechanical arm running path again by combining the shape parameter obtained by shape scanning and the length of the jet fluid plume, so that the tip of the jet fluid plume is always kept in contact with the ceramic surface during the dynamic treatment of the jet fluid, scanning the shape of the spark plug insulating ceramic to be treated and measuring the length of the jet fluid plume by using the sensor, reasonably planning the mechanical arm running path, improving the uniformity of the modification treatment and the universality of the method, compared with the traditional spark plug structure optimization, The invention relates to a method for optimizing ignition and oil injection modes, cleaning the surface of a spark plug and the like.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (9)

1. A spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film deposition method is characterized by comprising the following steps:
s1, performing primary cleaning treatment on the surface of the spark plug insulating ceramic;
s2, fixing the spark plug insulating ceramic on the rotating motor and keeping the rotating motor still, and scanning the shape of the rotating motor by using a mechanical arm;
s3, introducing Ar/O into the jet flow reactor2Mixing working gas, switching on a high-voltage power supply, generating jet discharge, measuring the length of the body plume, and reasonably planning the operation path of the mechanical arm by combining shape scanning data and body plume length data;
s4, starting a rotating motor and a mechanical arm, entering a cleaning working mode, and driving the jet flow reactor to carry out deep cleaning treatment on the ceramic surface for 120S by the mechanical arm; after cleaning, turning off the power supply, stopping ventilation, stopping the motor, and returning the mechanical arm to the original point;
s5, keeping the motor and the mechanical arm static, and introducing Ar/O into the reactor2Mixing working gas and silicon-containing medium, starting high-voltage power supply to generate jet dischargeMeasuring the length of the body feather again, and planning the operation path of the mechanical arm again;
s6, starting a rotating motor and a mechanical arm, entering a film deposition working mode, and driving the jet flow reactor to dynamically process the ceramic surface for 120S by the mechanical arm; and after the treatment is finished, the power supply is turned off, the ventilation is stopped, the motor is stopped, and the mechanical arm returns to the original point.
2. The method as claimed in claim 1, wherein the surface of the spark plug insulating ceramic is cleaned with alcohol before being treated in step S1, then cleaned with deionized water in an ultrasonic cleaner, and finally dried in a dryer for 30 minutes to remove dust and dirt with weak adhesion.
3. The method as claimed in claim 2, wherein the spark plug insulating ceramic is fixed on a rotating motor in a dynamic modification platform after the preliminary cleaning process of the spark plug insulating ceramic in the step S2 is completed, the multi-degree-of-freedom mechanical arm is started to scan the surface of the ceramic, the shape parameters of the ceramic are obtained, the data are recorded, and finally the mechanical arm returns to the origin.
4. The method as claimed in claim 3, wherein the dynamic modification platform comprises a mechanical system, a processing system, a high voltage driving circuit, a mechanical arm and rotating motor driving circuit, a gas circuit, a control system and a data acquisition system.
5. The method for depositing the spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film as claimed in claim 4, wherein the mechanical system comprises a multi-degree-of-freedom mechanical arm (100) and a rotating motor (200) which are used in cooperation to achieve dynamic uniform treatment on the insulating ceramic surface, and a mechanical arm controller (600) and a mechanical arm driver (700) which are connected with one side of the multi-degree-of-freedom mechanical arm (100) are arranged on one side of the multi-degree-of-freedom mechanical arm (100); the processing system is a needle ring electrode jet flow reactor (300); the high voltage drive circuit includes a nanosecond pulsed power supply and associated connection circuitry and is used to drive the jet reactor (300).
6. The method for depositing the spark plug insulating ceramic plasma multi-degree-of-freedom dynamic film as recited in claim 4, wherein the DC driving circuit comprises a DC power supply of the multi-degree-of-freedom mechanical arm (100), a rotating motor (200), a gas flow meter (400), a control system and a data acquisition system; the gas path comprises a main gas path argon gas, an oxygen gas and an auxiliary gas path argon gas, and a silicon-containing medium (500) is carried by a bubbling method, wherein the silicon-containing medium (500) provides low-polarity silicon-containing groups for film formation; the control system controls the operation path of the mechanical arm, the rotating speed of the rotating motor (200) and the gas flow of the gas circuit; the data acquisition system respectively acquires the shape data of the insulating ceramic and the length data of the fluid plume of the jet flow through the displacement sensor and the optical fiber sensor.
7. The method for multi-degree-of-freedom dynamic film deposition on spark plug insulating ceramic plasma according to claim 1, wherein in step S3, the main gas path of argon and oxygen is opened, the flow rates are 1L/min and 1mL/min respectively, the mixture is fully mixed in the gas mixing chamber and then introduced into the flow reactor, after 5S of introduction, the nanosecond pulse power supply is started to generate jet discharge after the air in the reactor is exhausted, and the length of the jet plume is measured by using the optical fiber sensor at the origin position.
8. The method as claimed in claim 6, wherein said nanosecond pulse power supply parameters comprise power voltage 12kV, frequency 5kHz, rising edge 50ns, falling edge 50ns and pulse width time 800 ns.
9. The method for multi-degree-of-freedom dynamic film deposition on spark plug insulating ceramic plasma according to claim 1, wherein in step S5, while keeping the motor and the mechanical arm stationary, argon, oxygen and silicon-containing media are turned on at the same time, the flow rates are 1L/min, 1mL/min and 1.3mL/min, the mixture is fully mixed in the gas mixing chamber and then introduced into the jet reactor, after 5S, the nanosecond pulse power supply is started, the length of the jet fluid plume is measured again by using the optical fiber sensor at the origin position, and the mechanical arm running path is planned again by combining the shape parameters obtained by shape scanning and the length of the jet fluid plume, so that the tip of the plume is always kept in contact with the ceramic surface during the dynamic jet treatment.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106910580A (en) * 2017-04-28 2017-06-30 南京工业大学 A kind of insulator surface plasma hydrophobicity is modified integral treatment method
CN107002626A (en) * 2014-12-08 2017-08-01 株式会社电装 The manufacture method of igniter and super hydrophilic film wherein used
CN111146693A (en) * 2019-12-31 2020-05-12 南京工业大学 Plasma surface modification method for enhancing carbon deposition resistance of spark plug
CN113192813A (en) * 2021-05-27 2021-07-30 南京珀斯佩特电子科技有限公司 Plasma device using mechanical arm

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107002626A (en) * 2014-12-08 2017-08-01 株式会社电装 The manufacture method of igniter and super hydrophilic film wherein used
CN106910580A (en) * 2017-04-28 2017-06-30 南京工业大学 A kind of insulator surface plasma hydrophobicity is modified integral treatment method
CN111146693A (en) * 2019-12-31 2020-05-12 南京工业大学 Plasma surface modification method for enhancing carbon deposition resistance of spark plug
CN113192813A (en) * 2021-05-27 2021-07-30 南京珀斯佩特电子科技有限公司 Plasma device using mechanical arm

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