CN111148964B - 表征光学元件的表面形状的方法及装置 - Google Patents

表征光学元件的表面形状的方法及装置 Download PDF

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Publication number
CN111148964B
CN111148964B CN201880063801.9A CN201880063801A CN111148964B CN 111148964 B CN111148964 B CN 111148964B CN 201880063801 A CN201880063801 A CN 201880063801A CN 111148964 B CN111148964 B CN 111148964B
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optical element
calculation
mirror
carrying
measurement
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Chinese (zh)
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CN111148964A (zh
Inventor
F.里彭豪森
M.施罗特
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Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02085—Combining two or more images of different regions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/52—Combining or merging partially overlapping images to an overall image

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Geometry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN201880063801.9A 2017-09-29 2018-09-04 表征光学元件的表面形状的方法及装置 Active CN111148964B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017217371.8 2017-09-29
DE102017217371.8A DE102017217371A1 (de) 2017-09-29 2017-09-29 Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
PCT/EP2018/073703 WO2019063247A1 (de) 2017-09-29 2018-09-04 Verfahren und vorrichtung zur charakterisierung der oberflächenform eines optischen elements

Publications (2)

Publication Number Publication Date
CN111148964A CN111148964A (zh) 2020-05-12
CN111148964B true CN111148964B (zh) 2022-04-12

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CN201880063801.9A Active CN111148964B (zh) 2017-09-29 2018-09-04 表征光学元件的表面形状的方法及装置

Country Status (5)

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US (1) US11118900B2 (enExample)
JP (1) JP2020535425A (enExample)
CN (1) CN111148964B (enExample)
DE (1) DE102017217371A1 (enExample)
WO (1) WO2019063247A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017217251A1 (de) 2017-09-27 2019-03-28 Carl Zeiss Smt Gmbh Verfahren und Anordnung zur Analyse der Wellenfrontwirkung eines optischen Systems
WO2019081187A1 (en) 2017-10-25 2019-05-02 Carl Zeiss Smt Gmbh METHOD FOR REGULATING THE TEMPERATURE OF A COMPONENT
US12053240B2 (en) * 2020-05-20 2024-08-06 Arizona Optical Metrology Llc Systems and methods for measurement of optical wavefronts
WO2022170160A1 (en) * 2021-02-07 2022-08-11 Arizona Optical Metrology Llc Alignment of a measurement optical system and a sample under test
DE102021211172B3 (de) 2021-10-04 2023-03-23 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
DE102022209513A1 (de) 2022-09-12 2023-10-19 Carl Zeiss Smt Gmbh Verfahren zum Kalibrieren einer sphärischen Welle, sowie Prüfsystem zur interferometrischen Bestimmung der Oberflächenform eines Prüflings

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416586A (en) * 1993-10-15 1995-05-16 Tropel Corporation Method of testing aspherical optical surfaces with an interferometer
CN101709955A (zh) * 2009-11-24 2010-05-19 中国科学院长春光学精密机械与物理研究所 子孔径拼接干涉检测光学非球面面形的装置
CN102645181A (zh) * 2011-02-18 2012-08-22 卡尔蔡司Smt有限责任公司 确定光学测试表面的形状的方法和设备
CN106030410A (zh) * 2014-02-14 2016-10-12 卡尔蔡司Smt有限责任公司 移动至少一个光学部件的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6956657B2 (en) 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
JP2005345260A (ja) * 2004-06-03 2005-12-15 Canon Inc 平面干渉計測方法および平面干渉計測装置
US7221461B2 (en) * 2004-08-13 2007-05-22 Zygo Corporation Method and apparatus for interferometric measurement of components with large aspect ratios
DE102008048844A1 (de) * 2007-09-25 2009-05-14 Carl Zeiss Smt Ag Verfahren und System zum Vermessen einer Oberfläche eines Objektes
WO2009126269A2 (en) * 2008-04-08 2009-10-15 Qed Technologies International, Inc. Stitching of near-nulled subaperture measurements
JP5483993B2 (ja) * 2009-10-20 2014-05-07 キヤノン株式会社 干渉計
KR101336399B1 (ko) * 2009-11-19 2013-12-04 캐논 가부시끼가이샤 계측 장치, 가공 방법 및 컴퓨터 판독가능한 저장 매체
JP5300929B2 (ja) * 2011-07-22 2013-09-25 キヤノン株式会社 測定方法、測定装置及びプログラム
CN102661719B (zh) * 2012-04-16 2014-03-26 中国人民解放军国防科学技术大学 用于非球面子孔径拼接测量的近零位补偿器及面形测量仪和测量方法
DE102014208770A1 (de) 2013-07-29 2015-01-29 Carl Zeiss Smt Gmbh Projektionsoptik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen Projektionsoptik
JP2016017744A (ja) * 2014-07-04 2016-02-01 キヤノン株式会社 非球面計測方法、非球面計測装置、プログラム、光学素子の加工装置、および、光学素子
DE102015202695A1 (de) * 2015-02-13 2016-08-18 Carl Zeiss Smt Gmbh Prüfvorrichtung sowie Verfahren zum Prüfen eines Spiegels

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416586A (en) * 1993-10-15 1995-05-16 Tropel Corporation Method of testing aspherical optical surfaces with an interferometer
CN101709955A (zh) * 2009-11-24 2010-05-19 中国科学院长春光学精密机械与物理研究所 子孔径拼接干涉检测光学非球面面形的装置
CN102645181A (zh) * 2011-02-18 2012-08-22 卡尔蔡司Smt有限责任公司 确定光学测试表面的形状的方法和设备
CN106030410A (zh) * 2014-02-14 2016-10-12 卡尔蔡司Smt有限责任公司 移动至少一个光学部件的方法

Also Published As

Publication number Publication date
US20200225029A1 (en) 2020-07-16
US11118900B2 (en) 2021-09-14
WO2019063247A1 (de) 2019-04-04
CN111148964A (zh) 2020-05-12
JP2020535425A (ja) 2020-12-03
DE102017217371A1 (de) 2019-04-04

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