CN111131988A - Vibration sensor and audio device - Google Patents
Vibration sensor and audio device Download PDFInfo
- Publication number
- CN111131988A CN111131988A CN201911405322.3A CN201911405322A CN111131988A CN 111131988 A CN111131988 A CN 111131988A CN 201911405322 A CN201911405322 A CN 201911405322A CN 111131988 A CN111131988 A CN 111131988A
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- cavity
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention discloses a vibration sensor and audio equipment, wherein the vibration sensor comprises a shell, a microphone assembly, a vibration assembly and a pressure regulating sheet, wherein the microphone assembly and the shell are matched to form an accommodating space; the vibration assembly is arranged in the accommodating space and comprises a first vibrating diaphragm fixedly held on the shell and a mass block attached to the first vibrating diaphragm, the first vibrating diaphragm divides the accommodating space into a first cavity and a second cavity, and the mass block is provided with a mass block pressure equalizing hole communicated with the first cavity and the second cavity; the pressure regulating sheet is arranged in the mass block pressure equalizing hole and is used for regulating the opening caliber of the mass block pressure equalizing hole along with the air flow between the first cavity and the second cavity. The technical scheme of the invention is sensitive to low-frequency vibration, and the vibrating diaphragm is not easy to break when heated sharply or impacted.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a vibration sensor and audio equipment using the same.
Background
Present current vibration sensor includes vibration induction system and turns into the vibration detection device of the signal of telecommunication with the vibration, and vibration induction system has the vibrating diaphragm of response vibration, and this vibrating diaphragm resonates after receiving external vibration to produce resonance gas wave, this vibration detection device is through detecting resonance gas wave, with vibration signal conversion, and output, realize vibration sensing's function. In order to facilitate the vibration of the vibrating diaphragm, a mass block is usually disposed on the surface of the vibrating diaphragm, and a pressure equalizing hole is formed in the mass block to facilitate air pressure balance. When the pressure equalizing hole trompil is great, vibration detection device is poor to low frequency response, and when the pressure equalizing hole trompil was less, the inside atmospheric pressure of vibration detection device was heated when sharply increasing or received great impact, because atmospheric pressure changes acutely, leads to the vibrating diaphragm to break easily, influences product life.
Disclosure of Invention
The invention mainly aims to provide a vibration sensor, and aims to solve the technical problem that the aperture of a pressure equalizing hole is large and the low-frequency response is poor.
To achieve the above object, the present invention provides a vibration sensor including:
a housing;
the microphone assembly is matched with the shell to enclose an accommodating space;
the vibration assembly is arranged in the accommodating space and comprises a first vibrating diaphragm fixedly fixed on the shell and a mass block attached to the first vibrating diaphragm, the first vibrating diaphragm divides the accommodating space into a first cavity and a second cavity, and the mass block is provided with a mass block pressure equalizing hole communicated with the first cavity and the second cavity;
and the pressure regulating sheet is arranged in the mass block pressure equalizing hole and is used for regulating the opening caliber of the mass block pressure equalizing hole along with the air flow between the first cavity and the second cavity.
Preferably, the mass block is attached to a surface of the first diaphragm, which is far away from the microphone assembly, and one end of the pressure adjusting piece is connected with the surface of the mass block, which is far away from the first diaphragm.
Preferably, the surface of the mass block, which is far away from the first diaphragm, is recessed to form an installation step communicated with the mass block pressure equalizing hole, one end of the pressure regulating piece is connected with the installation step, and the other end of the pressure regulating piece is in contact with the inner wall surface of the mass block pressure equalizing hole.
Preferably, the mounting step includes a mounting surface extending from a surface of the mass block far away from the first diaphragm to a direction close to the first diaphragm, and an abutting surface extending from the mounting surface to a direction close to the mass block pressure equalizing hole, one end of the pressure adjusting piece contacts with an inner wall surface of the mass block pressure equalizing hole, and the abutting surface supports the other end of the pressure adjusting piece.
Preferably, the pressure regulating sheet is any one of a metal foil sheet, a rubber sheet or a plastic sheet.
Preferably, the microphone assembly includes a first circuit board that is matched with the housing to form the receiving space, and a microphone that is disposed on a side of the first circuit board away from the receiving space, the microphone is electrically connected to the circuit board, and the first circuit board is provided with a through hole that communicates the receiving space and a vibration cavity of the microphone.
Preferably, the microphone assembly further includes a second circuit board disposed at an interval from the first circuit board, and a supporting member connected to the first circuit board and the second circuit board, wherein the first circuit board, the second circuit board and the supporting member form a resonant cavity, and the microphone is accommodated in the resonant cavity.
Preferably, the microphone includes a support surrounding a vibration cavity and a second diaphragm fixed on the support, the support is disposed around the through hole, and the second diaphragm covers the through hole.
Preferably, the microphone further comprises a back plate connected with the support, the back plate and the second vibrating diaphragm are arranged at intervals, a back plate pressure equalizing hole is formed in the back plate, and the back plate pressure equalizing hole is communicated with the vibrating cavity and the resonant cavity.
The invention also proposes an audio device comprising a vibration sensor as described above.
The vibration sensor is provided with the pressure regulating sheet through the mass block pressure equalizing hole, so that the pressure regulating sheet can shield part of the mass block pressure equalizing hole under a general condition, the opening diameter of the mass block pressure equalizing hole is smaller, low-frequency vibration can be sensed, and when the vibration sensor is violently impacted or heated to sharply increase, the pressure regulating sheet can deform or slide along with the airflow between the first cavity and the second cavity, so that the opening diameter of the mass block pressure equalizing hole is larger, the air pressure between the first cavity and the second cavity is rapidly balanced, and the first vibrating diaphragm is prevented from being damaged due to the larger air pressure difference between the first cavity and the second cavity.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of a pressure-regulating plate closing mass pressure-equalizing hole according to an embodiment of the vibration sensor of the present invention;
FIG. 2 is a schematic cross-sectional view of a pressure-regulating plate opening mass pressure-equalizing hole according to an embodiment of the vibration sensor of the present invention;
FIG. 3 is an enlarged schematic view of portion A of FIG. 1;
fig. 4 is an enlarged schematic structural view of a portion B shown in fig. 1.
The reference numbers illustrate:
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The present invention proposes a vibration sensor 100.
Referring to fig. 1 and 2, a vibration sensor 100 according to an embodiment of the present invention includes: the microphone assembly comprises a shell 1, a microphone assembly 3, a vibration assembly 5 and a pressure regulating sheet 7, wherein the microphone assembly 3 and the shell 1 are matched to enclose an accommodating space 2; the vibration assembly 5 is arranged in the accommodating space 2, the vibration assembly 5 comprises a first vibrating diaphragm 51 fixed on the shell 1 and a mass block 53 attached to the first vibrating diaphragm 51, the accommodating space 2 is divided into a first cavity 21 and a second cavity 23 by the first vibrating diaphragm 51, and the mass block 53 is provided with a mass block pressure equalizing hole 52 communicating the first cavity 21 and the second cavity 23; the pressure adjusting sheet 7 is arranged in the mass equalizing hole 52 and is used for adjusting the opening caliber of the mass equalizing hole 52 along with the air flow between the first cavity 21 and the second cavity 23.
Specifically, the mass 53 may be a spring, a beam, or other structure, and provides support for the first diaphragm 51 when vibrating with the first diaphragm 51. The pressure adjusting sheet 7 may be connected to the mass block 53, or may be connected to the housing 1 or the first diaphragm 51, so as to ensure that the pressure adjusting sheet 7 is fixedly installed in the accommodating space 2. When the vibration sensor 100 needs to be used, a vibration signal or a pressure signal is input outside the housing 1, the first diaphragm 51 and the mass block 53 are excited by the vibration signal or the pressure signal, the mass block 53 and the first diaphragm 51 vibrate, so that the gas in the accommodating space 2 vibrates, the air pressure in the accommodating space 2 changes, the microphone assembly 3 senses the vibration generated by the gas in the accommodating space 2, converts the sensed information into a detectable electric signal, and transmits the detectable electric signal to an external electronic device. Under the normal use condition, the pressure regulating sheet 7 covers the mass block pressure equalizing hole 52, so that the opening of the mass block pressure equalizing hole 52 keeps a smaller caliber, and the microphone assembly 3 has good response to low-frequency vibration; when the vibration sensor 100 is violently impacted or heated to sharply increase, and the air pressure in the accommodating space 2 changes violently, the air flow flowing between the first cavity 21 and the second cavity 23 impacts the pressure adjusting sheet 7, so that the pressure adjusting sheet 7 deforms or slides, and the opening of the mass block pressure equalizing hole 52 keeps a larger caliber, thereby being beneficial to the air flow between the first cavity 21 and the second cavity 23, being beneficial to maintaining the air pressure balance between the first cavity 21 and the second cavity 23, reducing the vibration amplitude of the first vibrating diaphragm 51, and avoiding the vibration sensor 100 from being violently impacted or heated to sharply increase, the first vibrating diaphragm 51 is damaged. Of course, it can be understood by those skilled in the art that the pressure-regulating sheet 7 makes the opening of the mass block pressure equalizing hole 52 maintain a smaller diameter or a larger diameter, and only when the same vibration sensor 100 is in different states, the two different diameters of the mass block pressure equalizing hole 52 are compared, and the opening diameter of the mass block pressure equalizing hole 52 is not limited.
According to the invention, the pressure regulating sheet 7 is arranged through the mass block pressure equalizing hole 52, so that under a general condition, the pressure regulating sheet 7 can shield part of the mass block pressure equalizing hole 52, the opening diameter of the mass block pressure equalizing hole 52 is smaller, and the sensing of low-frequency vibration is facilitated, when the vibration sensor 100 is violently impacted or heated to sharply increase, the pressure regulating sheet 7 can deform or slide along with the airflow between the first cavity 21 and the second cavity 23, so that the opening diameter of the mass block pressure equalizing hole 52 is larger, the air pressure between the first cavity 21 and the second cavity 23 is rapidly balanced, and the first diaphragm 51 is prevented from being damaged due to the larger air pressure difference between the first cavity 21 and the second cavity 23.
In one embodiment, a leakage port 12 is formed on the housing 1 to communicate the first cavity 21 with the external environment. When first vibrating diaphragm 51 vibrates, the confined space can produce the vibration resistance to the vibration of first vibrating diaphragm 51, is unfavorable for first vibrating diaphragm 51 to drive the gas vibration in accommodating space 2 to arouse the atmospheric pressure to change, set up leakage port 12 and can be convenient for with outside intercommunication, thereby resistance when reducing first vibrating diaphragm 51 and vibrate. The number and the positions of the leakage ports 12 may be set according to actual needs as long as the vibration resistance of the first diaphragm 51 is reduced. The pressure regulating sheet 7 may be any one of a metal foil (the metal material may be selected from stainless steel, aluminum alloy, copper alloy, iron alloy, etc.), a rubber sheet (the rubber material may be selected from natural rubber, styrene butadiene rubber, isoprene rubber, etc.) or a plastic sheet (the plastic may be selected from flexible plastics, such as ABS, POM, PS, PMMA, PC, PET, PBT, PPO, etc.), as long as the pressure regulating sheet 7 can deform or move with the airflow flowing between the first cavity 21 and the second cavity 23.
In one embodiment, the mass 53 is attached to a surface of the first diaphragm 51 away from the microphone assembly 3, and one end of the pressure regulating plate 7 is connected to a surface of the mass 53 away from the first diaphragm 51. Therefore, the pressure regulating sheet 7 moves towards the direction far away from the first diaphragm 51 without being interfered by the mass block 53, and the assembly of the pressure regulating sheet 7 and the mass block 53 is convenient. In another embodiment, the pressure regulating sheet 7 is disposed in the mass equalizing hole 52, and one end of the pressure regulating sheet 7 is connected to an inner wall surface of the mass equalizing hole 52.
Referring to fig. 3, the surface of the mass 53 away from the first diaphragm 51 is recessed to form an installation step 531 communicated with the mass pressure equalizing hole 52, one end of the pressure regulating sheet 7 is connected to the installation step 531, and the other end of the pressure regulating sheet 7 is in contact with the inner wall surface of the mass pressure equalizing hole 52. The connection of the pressure adjusting piece 7 to the mass 53 is made more stable by providing the mounting step 531. In another embodiment, the pressure regulating plate 7 may be connected to the mass 53 through a flexible connecting member, and when the air flowing between the first cavity 21 and the second cavity 23 impacts the pressure regulating plate 7, the flexible connecting member deforms, and an end of the pressure regulating plate 7 far away from the flexible connecting member moves, so as to adjust the opening diameter of the mass equalizing hole 52.
Specifically, the mounting step 531 includes a mounting surface (not shown) extending from the surface of the mass 53 away from the first diaphragm 51 toward the direction close to the first diaphragm 51, and an abutting surface (not shown) extending from the mounting surface toward the direction close to the mass pressure equalizing hole 52, one end of the pressure adjusting sheet 7 is in contact with the inner wall surface of the mass pressure equalizing hole 52, and the abutting surface supports the other end of the pressure adjusting sheet 7.
Referring to fig. 1 and 4, the microphone assembly 3 includes a first circuit board 31 cooperating with the housing 1 to form an accommodating space 2, and a microphone 33 disposed on a side of the first circuit board 31 away from the accommodating space 2, wherein the microphone 33 is electrically connected to the circuit board, and the first circuit board 31 is provided with a through hole 34 for communicating the accommodating space 2 and a vibration cavity 332 of the microphone 33.
Specifically, the microphone 33 may be an MEMS (micro electro Mechanical Systems) microphone 33, the microphone 33 may be electrically connected to the first circuit board 31 through solder, the housing 1 may be fixed to the first circuit board 31 through a glue or a fastener or a connector, so long as the microphone 33 can better sense the vibration generated by the gas in the accommodating space 2. In the present embodiment, the housing 1 includes a bottom wall 11, a side wall 13 extending from the bottom wall 11, and a connecting member 15 connecting the first circuit board 31 and the side wall 13, and the outer edge of the first diaphragm 51 is fixed between the connecting member 15 and the housing 1. The connecting member 15 is provided to facilitate the connection between the side wall 13 and the first circuit board 31, and provide a vibration stroke for the vibration of the first diaphragm 51, specifically, glue may be laid on both sides of the connecting member 15, and then the first circuit board 31 and the side wall 13 are fixed to both sides of the connecting member 15, to which the glue is adhered, respectively.
When a vibration signal or a pressure signal is input to the outside of the housing 1, the gas in the accommodating space 2 vibrates, the vibrating gas drives the first diaphragm 51 to vibrate, and the air flow changes the air pressure in the vibration cavity 332 of the microphone 33 through the through hole 34, so that the microphone 33 converts the vibration signal into an electric signal.
The microphone assembly 3 further includes a second circuit board 35 disposed at an interval from the first circuit board 31, and a supporting member 37 connecting the first circuit board 31 and the second circuit board 35, wherein the first circuit board 31, the second circuit board 35, and the supporting member 37 enclose a resonant cavity 32, and the microphone 33 is accommodated in the resonant cavity 32. The first circuit board 31 is further provided with an ASIC (application specific integrated circuit) chip 9, and the ASIC chip 9 is electrically connected to the microphone 33. The ASIC chip 9 provides external biasing for the microphone 33, and effective biasing will maintain stable acoustic and electrical parameters for the microphone 33 throughout the operating temperature range, and also supports microphone 33 designs with different sensitivities. By providing the resonant cavity 32, when the first diaphragm 51 vibrates slightly due to a vibration signal or a pressure signal input to the outside of the housing 1, the side of the first diaphragm 51 away from the vibration source is easily compressed, so that the vibration resistance of the first diaphragm 51 is reduced, and it is possible to easily generate a vibration response under slight air vibration, so that the sensitivity of the microphone 33 is high. It will be appreciated that the larger the cavity 32, the more air is available, facilitating the vibration of the first diaphragm 51.
The microphone 33 includes a support 331 defining a vibration cavity 332, and a second diaphragm 333 fixed to the support 331, wherein the support 331 is disposed around the through hole 34, and the second diaphragm 333 covers the through hole 34.
Preferably, the first diaphragm 51 is disposed opposite to the second diaphragm 333, so that the second diaphragm 333 directly senses the air pressure change caused by the first diaphragm 51, thereby improving the sensing effect of the vibration sensor 100. In an embodiment of the present invention, a projected area of the first diaphragm 51 in the vibration direction is larger than a projected area of the second diaphragm 333 in the vibration direction. The first diaphragm 51 has a larger contact area with the air in the accommodating space 2, so that the first diaphragm can better vibrate the air, and the second diaphragm 333 has a smaller area, so that the microphone 33 generates lower vibration coupling to the noise caused by the loudspeaker installed in the same electronic device, thereby facilitating use.
The microphone 33 further includes a back plate 335 connected to the support 331, the back plate 335 and the second diaphragm 333 are disposed at intervals, a back plate pressure equalizing hole 336 is formed in the back plate 335, and the back plate pressure equalizing hole 336 communicates with the vibration cavity 332 and the resonance cavity 32. Preferably, the second diaphragm 333 is further provided with a diaphragm pressure equalizing hole 334, so as to facilitate air pressure balance on two sides of the second diaphragm 333.
Specifically, the manufacturing process of the microphone 33 is: depositing several layers of different materials on the wafer, and then etching away the useless materials to form a support 331; a movable diaphragm (i.e., the second diaphragm 333) and a fixed support plate (i.e., the back plate 335) are provided on the support 331. The supporting plate has better rigidity and adopts a through hole structure. The second diaphragm 333 is thin and flexible. When the air pressure changes, the second diaphragm 333 bends with the change of the air pressure, and the capacitance between the second diaphragm 333 and the support 331 changes when the second diaphragm is bent, so that the ASIC chip 9 can convert the capacitance signal into an electrical signal.
The invention also proposes an audio device (not shown) comprising the vibration sensor 100 described above.
It will be appreciated that the audio device may be a bone conduction microphone. The audio device further comprises mounting holes to facilitate exposing the housing 1 portion of the vibration sensor 100 to facilitate sensing vibrations.
Since the audio device adopts all technical solutions of all the embodiments, at least all the beneficial effects brought by the technical solutions of the embodiments are achieved, and no further description is given here.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A vibration sensor, comprising:
a housing;
the microphone assembly is matched with the shell to enclose an accommodating space;
the vibration assembly is arranged in the accommodating space and comprises a first vibrating diaphragm fixedly fixed on the shell and a mass block attached to the first vibrating diaphragm, the first vibrating diaphragm divides the accommodating space into a first cavity and a second cavity, and the mass block is provided with a mass block pressure equalizing hole communicated with the first cavity and the second cavity;
and the pressure regulating sheet is arranged in the mass block pressure equalizing hole and is used for regulating the opening caliber of the mass block pressure equalizing hole along with the air flow between the first cavity and the second cavity.
2. The vibration transducer of claim 1, wherein the mass is attached to a surface of the first diaphragm remote from the microphone assembly, and an end of the pressure pad is connected to the surface of the mass remote from the first diaphragm.
3. The vibration sensor according to claim 2, wherein a surface of the mass remote from the first diaphragm is recessed to form a mounting step communicating with the mass pressure equalizing hole, one end of the pressure-adjusting piece is connected to the mounting step, and the other end of the pressure-adjusting piece is in contact with an inner wall surface of the mass pressure equalizing hole.
4. The vibration sensor according to claim 3, wherein the mounting step includes a mounting surface extending from a surface of the mass away from the first diaphragm in a direction approaching the first diaphragm, and an abutting surface extending from the mounting surface in a direction approaching the mass pressure equalizing hole, one end of the pressure adjusting piece being in contact with an inner wall surface of the mass pressure equalizing hole, the abutting surface supporting the other end of the pressure adjusting piece.
5. The vibration sensor according to claim 1, wherein the pressure-adjusting sheet is any one of a metal foil sheet, a rubber sheet, or a plastic sheet.
6. The vibration sensor according to any one of claims 1 to 5, wherein the microphone assembly includes a first circuit board that cooperates with the housing to form the receiving space, and a microphone that is disposed on a side of the first circuit board away from the receiving space, the microphone being electrically connected to the circuit board, the first circuit board defining a through hole that communicates the receiving space and a vibration cavity of the microphone.
7. The vibration transducer of claim 6, wherein the microphone assembly further comprises a second circuit board spaced apart from the first circuit board, and a support member connecting the first circuit board and the second circuit board, wherein the first circuit board, the second circuit board, and the support member define a resonant cavity, and wherein the microphone is received in the resonant cavity.
8. The vibration sensor of claim 7, wherein the microphone includes a support frame defining a vibration cavity, and a second diaphragm fixed to the support frame, the support frame being disposed around the through-hole, the second diaphragm being disposed to cover the through-hole.
9. The vibration transducer as recited in claim 8, wherein the microphone further comprises a back plate connected to the support, the back plate is spaced apart from the second diaphragm, and a back plate pressure equalizing hole is formed in the back plate and communicates the vibration cavity and the resonant cavity.
10. An audio device, characterized in that it comprises a vibration sensor according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911405322.3A CN111131988B (en) | 2019-12-30 | 2019-12-30 | Vibration sensor and audio device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911405322.3A CN111131988B (en) | 2019-12-30 | 2019-12-30 | Vibration sensor and audio device |
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| Publication Number | Publication Date |
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| CN111131988A true CN111131988A (en) | 2020-05-08 |
| CN111131988B CN111131988B (en) | 2021-06-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911405322.3A Active CN111131988B (en) | 2019-12-30 | 2019-12-30 | Vibration sensor and audio device |
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| CN (1) | CN111131988B (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112188377A (en) * | 2020-09-27 | 2021-01-05 | 广州沈思贸易有限公司 | Sound detection machine utilizing vibration to generate heat to induce vibration diaphragm |
| CN112254806A (en) * | 2020-10-23 | 2021-01-22 | 歌尔智能科技有限公司 | Vibration assembly and electronic device having the same |
| CN112565995A (en) * | 2020-11-16 | 2021-03-26 | 歌尔微电子有限公司 | Sensor chip, bone voiceprint sensor and electronic device |
| CN112714388A (en) * | 2020-12-25 | 2021-04-27 | 歌尔微电子有限公司 | Directional microphone and electronic device |
| CN112995859A (en) * | 2021-02-23 | 2021-06-18 | 歌尔微电子股份有限公司 | Vibrating diaphragm, sensor chip and sensor |
| US20210364346A1 (en) * | 2020-03-25 | 2021-11-25 | Merry Electronics Co., Ltd. | Vibration sensor |
| CN113709643A (en) * | 2021-08-27 | 2021-11-26 | 歌尔微电子股份有限公司 | Vibration pickup unit, bone voiceprint sensor and electronic equipment |
| WO2022000791A1 (en) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | Vibration sensor |
| WO2022000852A1 (en) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | Vibration sensor |
| WO2022000794A1 (en) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | Vibration sensor |
| WO2022000630A1 (en) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | Vibration sensor and audio device having same |
| WO2022062002A1 (en) * | 2020-09-25 | 2022-03-31 | 瑞声声学科技(深圳)有限公司 | Bone conduction microphone |
| WO2022061979A1 (en) * | 2020-09-25 | 2022-03-31 | 瑞声声学科技(深圳)有限公司 | Bone conduction microphone |
| CN114501252A (en) * | 2022-01-25 | 2022-05-13 | 青岛歌尔智能传感器有限公司 | Vibration assembly and preparation method thereof, bone voiceprint sensor and electronic equipment |
| US11467027B2 (en) * | 2020-03-25 | 2022-10-11 | Merry Electronics Co., Ltd. | Vibration sensor for obtaining signals with high signal-to-noise ratio |
| EP4203511A4 (en) * | 2020-12-28 | 2023-11-29 | Shenzhen Shokz Co., Ltd. | Vibration sensor |
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