CN112995859A - Vibrating diaphragm, sensor chip and sensor - Google Patents
Vibrating diaphragm, sensor chip and sensor Download PDFInfo
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- CN112995859A CN112995859A CN202110203363.5A CN202110203363A CN112995859A CN 112995859 A CN112995859 A CN 112995859A CN 202110203363 A CN202110203363 A CN 202110203363A CN 112995859 A CN112995859 A CN 112995859A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
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Abstract
The invention discloses a vibrating diaphragm, a sensor chip and a sensor. The vibrating diaphragm is provided with a first direction and a second direction which are arranged at an included angle, and is provided with a first negative Poisson ratio cell structure, and the first negative Poisson ratio cell structure is configured to expand in the second direction when the first direction is stressed and stretched or contract in the second direction when the first direction is stressed and condensed. The vibrating diaphragm of the technical scheme of the invention can avoid damage caused by high-pressure impact, and ensure the performance of the product.
Description
Technical Field
The invention relates to the technical field of sensing equipment, in particular to a vibrating diaphragm, a sensor chip and a sensor.
Background
The diaphragm in the related art, for example the diaphragm that uses among sound sensor, the pressure sensor, its in the use, when receiving higher acoustic pressure or the instantaneous high-pressure impact, the stress concentration appears because of high-pressure impact in the diaphragm easily to lead to the diaphragm damage, influence the performance of product.
Disclosure of Invention
The invention mainly aims to provide a vibrating diaphragm, which can avoid damage caused by high-pressure impact and ensure the performance of a product.
In order to achieve the above object, the present invention provides a diaphragm, where the diaphragm has a first direction and a second direction arranged at an included angle, and the diaphragm is provided with a first negative poisson's ratio cell structure, and the first negative poisson's ratio cell structure is configured to expand in the second direction when the first direction is stretched by a force, or contract in the second direction when the first direction is shrunk by a force.
Optionally, the first negative poisson's ratio cell structure includes at least one first slit structure and at least one second slit structure, and a first slit structure intersects with a second slit structure.
Optionally, the first slit structure and the second slit structure are perpendicularly arranged in an intersecting manner.
Optionally, the intersection point of the first slit structure and the second slit structure is located at the middle or the end of the first slit structure.
Optionally, the first slit structure and the second slit structure are disposed to penetrate in a thickness direction of the diaphragm.
Optionally, the number of the first negative poisson's ratio cell structures is multiple, and the multiple first negative poisson's ratio cell structures are arranged on the diaphragm in an annular array.
Optionally, the diaphragm is further provided with a second negative poisson's ratio cell element structure arranged at an interval with the first negative poisson's ratio cell element structure, the second negative poisson's ratio cell element structure includes at least one third kerf structure and at least one fourth kerf structure, and the third kerf structure and the fourth kerf structure are arranged in an intersecting manner and are arranged in a non-penetrating manner in the thickness direction of the diaphragm.
Optionally, the number of the second negative poisson's ratio cell structures is multiple, and the multiple second negative poisson's ratio cell structures are arranged on the diaphragm in an annular array.
Optionally, the number of the second negative poisson ratio cell structures is multiple, and multiple second negative poisson ratio metamaterials are continuously arranged along the circumferential direction of the diaphragm and are formed into an annular structure.
Optionally, the diaphragm includes a diaphragm body and a corrugated structure, the first negative poisson's ratio cell structure is disposed on the diaphragm body, and the corrugated structure is connected to the diaphragm body.
Optionally, the first negative poisson's ratio cell structure is arranged on the corrugated structure.
Optionally, the first slit structure and the second slit structure are provided non-penetratingly in a thickness direction of the corrugated structure.
Optionally, the vibrating diaphragm has still been seted up a plurality of structures of disappointing, and is a plurality of the structure of disappointing with first negative poisson ratio cell element structure looks interval ground sets up, and is a plurality of the structure of disappointing is followed the circumference of vibrating diaphragm encircles the setting.
The invention also provides a sensor chip which comprises the diaphragm.
The invention also provides a sensor which comprises the sensor chip.
According to the vibrating diaphragm in the technical scheme, the first negative Poisson ratio cell structure is arranged, so that when the vibrating diaphragm is impacted by high pressure, namely when the vibrating diaphragm is stretched or condensed in the first direction, the vibrating diaphragm correspondingly expands or contracts in the second direction at the moment, and a negative Poisson ratio effect is formed, therefore, stress in the first direction of the vibrating diaphragm is dispersed to the second direction, stress concentration caused by deformation in the same direction is avoided, the phenomenon that the vibrating diaphragm is damaged due to high-pressure impact is further effectively avoided, and the performance of a product is ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of the deformation mechanism of the negative Poisson ratio effect;
FIG. 2 is a schematic cross-sectional view of one embodiment of a sensor chip of the present invention;
FIG. 3 is a schematic plan view of the diaphragm of FIG. 2;
FIG. 4 is an enlarged view of a first negative Poisson ratio cell structure according to the present invention;
FIG. 5 is a schematic cross-sectional view of another embodiment of a sensor chip of the present invention;
FIG. 6 is a schematic plan view of the diaphragm of FIG. 5;
FIG. 7 is a schematic cross-sectional view of yet another embodiment of a sensor chip of the present invention;
FIG. 8 is a schematic plan view of the diaphragm of FIG. 7;
FIG. 9 is a schematic cross-sectional view of a sensor chip according to yet another embodiment of the present invention
FIG. 10 is a schematic plan view of an embodiment of the diaphragm of FIG. 9;
FIG. 11 is a schematic plan view of another embodiment of the diaphragm of FIG. 9;
fig. 12 is a schematic plan view of a diaphragm according to an embodiment of the present invention.
The reference numbers illustrate:
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout is to include three juxtapositions, exemplified by "A and/or B," including either the A or B arrangement, or both A and B satisfied arrangement. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
Meta-materials refer to a class of man-made materials with special properties that are not found in nature. Metamaterials generally have three important features: the metamaterial has a novel artificial structure, has extraordinary physical properties (which are not possessed by materials in nature), and the properties of the metamaterial are determined by the internal artificial structure rather than the intrinsic properties of the constituent materials.
The poisson ratio concept is used to describe the longitudinal deformation phenomenon that accompanies the transverse deformation of a material. It is generally believed that almost all materials have a positive poisson's ratio of about 1/3, 1/2 for rubber-like materials, 0.33 for aluminum metal, 0.27 for copper, 0.11-0.14 for typical polymer foams, etc., i.e., the materials shrink in the cross direction when stretched. The Negative Poisson's Ratio effect, which refers to the expansion of a material in the transverse direction in the elastic range when the material is stretched; while under compression, the material shrinks in the transverse direction instead. That is, when the poisson's ratio is negative, the material may exhibit abnormal characteristics different from those of the conventional material, and as shown in fig. 1, the negative poisson's ratio material may expand in the longitudinal direction when a tensile load F is applied in the transverse direction. Therefore, the application of the metamaterial with the negative poisson ratio is more and more important.
The present invention provides a diaphragm 100.
Referring to fig. 2 to 4, in an embodiment of the present invention, the diaphragm 100 has a first direction and a second direction arranged at an included angle, the diaphragm 100 has a first negative poisson's ratio cell structure 110, and the first negative poisson's ratio cell structure is configured to expand in the second direction when the first direction is stretched by a force, or contract in the second direction when the first direction is shrunk by a force.
Generally, the diaphragm 100 is disposed on the substrate 200 through a support, and the diaphragm 100 is spaced apart from the back electrode 300 through a spacer, so that a space is formed between the diaphragm 100 and the back electrode 300. The diaphragm 100 includes a conductor, a semiconductor, and an insulator, which can generate vibration and convert the vibration into an electrical signal. The shape of the diaphragm 100 may be designed to be circular, and the material of the diaphragm 100 may be a composite material, such as a polymer material; or a flexible material such as graphene or the like.
The first direction and the second direction may be two directions perpendicular to the diaphragm 100, such as a transverse direction and a longitudinal direction, or may be any two directions forming a right angle or an acute angle on a 360 ° plane of the diaphragm 100, which is not particularly limited in this application. The shape of the first negative poisson's ratio cell structure 110 may be a two-dimensional or three-dimensional negative poisson's ratio metamaterial structure shape, which is commonly used in the art.
Therefore, according to the diaphragm 100 of the technical solution of the present invention, by providing the first negative poisson's ratio cell structure 110, when the diaphragm 100 is impacted by a high pressure, that is, when the diaphragm 100 is stretched or shrunk in the first direction, the second direction of the diaphragm 100 correspondingly expands or contracts, so as to form a negative poisson's ratio effect, thereby dispersing the stress in the first direction of the diaphragm 100 to the second direction, avoiding the stress concentration caused by the deformation in the same direction, further effectively avoiding the damage of the diaphragm 100 due to the high pressure impact, and ensuring the performance of the product.
In an embodiment of the present application, the first negative poisson's ratio cell structure 110 includes at least one first slit structure 111 and at least one second slit structure 112, and a first slit structure 111 intersects with a second slit structure 112.
In this embodiment, the first negative poisson's ratio cell structure 110 is a two-dimensional structure, and the first kerf structure 111 and the second kerf structure 112 may be directly connected to intersect with each other or may be formed with a space to intersect with each other; the extending directions of the first slit structure 111 and the second slit structure 112 may be the same as or different from the first direction and the second direction; the number of the first slit structures 111 and the second slit structures 112 may be the same or different. For example, the first negative poisson's ratio cell structure 110 may be a concave hexagonal honeycomb structure formed by three first slit structures 111 and three second slit structures 112, or a concave triangular structure formed by two first slit structures 111 and two second slit structures 112, a star-shaped structure arranged in a rotational symmetry manner, and the like, which are commonly used in the prior art. The first slit structure 111 and the second slit structure 112 may be straight slits, circular slits, and may be formed in combination as a chiral/anti-chiral structure, a fiber/node structure, or the like.
In practical applications, in a normal state, according to different flexibilities of the material of the diaphragm 100, the first slit structure 111 and the second slit structure 112 of the first negative poisson's ratio cell structure 110 disposed on the diaphragm 100 can both maintain a closed state, so as to maintain the surface of the diaphragm 100 to be complete and closed; or the first slit structure 111 and the second slit structure 112 form a small gap and keep relatively closed, so that the sound pressure or other pressure can be sensitively sensed; when the diaphragm 100 is subjected to high sound pressure or instantaneous high-pressure impact, the diaphragm 100 is stretched in a first direction (such as a transverse direction), and at the moment, the gaps of the first slit structure 111 and the second slit structure 112 become larger and can be expanded and opened, so that the diaphragm 100 is also expanded in a second direction (such as a longitudinal direction), a negative poisson's ratio effect is generated, and stress concentration in the same direction is avoided.
Of course, in other embodiments of the present application, the first negative poisson's ratio cell structure 110 may also be a three-dimensional structure formed on the diaphragm, for example, the first negative poisson's ratio cell structure 110 is a three-dimensional structure that is more commonly used in the prior art, such as a three-dimensional concave honeycomb structure, a rotational rigid structure, a three-dimensional chiral isotropic lattice, a folded paper structure unit, a folded structure, a babbitt structure, and so on.
Further, a first slit structure 111 and a second slit structure 112 are perpendicularly intersected. It can be understood that, by such an arrangement, when the diaphragm 100 is under high pressure, the first slit structure 111 and the second slit structure 112 vertically arranged can make the deformation amount of the diaphragm 100 stretching and expanding in the longitudinal direction and the transverse direction larger, so that the concentrated stress received can be better dispersed, the stress concentration is avoided, and the protection of the diaphragm 100 from damage is more facilitated.
In an embodiment of the diaphragm 100 of the present application, an intersection point of the first slit structure 111 and the second slit structure 112 is located in a middle portion or an end portion of the first slit structure 111. Specifically, when the intersection point of the first slit structure 111 and the second slit structure 112 is located at the middle of the first slit structure 111, the first slit structure 111 and the second slit structure 112 may intersect to form a cross shape, or form an "X" shape; when the intersection point of the first slit structure 111 and the second slit structure 112 is located at the end of the first slit structure 111, the first slit structure 111 and the second slit structure 112 may intersect to form a "T" shape, or a first slit structure 111 and two second slit structures 112 may intersect to form a "h" shape. Therefore, the deformation mechanisms of other cell structures such as a concave polygonal structure, a rotary rigid body structure, a chiral structure, a node-fiber structure and the like can be simulated respectively under the conditions of different numbers, shapes and arrangements of the slits, so that the negative poisson's ratio effect is realized, and the vibrating diaphragm 100 is prevented from being damaged by stress concentration. Of course, the negative poisson's ratio effect can also be achieved by the random arrangement of the first kerf structures 111 and the second kerf structures 112.
Further, with reference to fig. 2 in combination, in an embodiment of the application, the first slit structure 111 and the second slit structure 112 are disposed through in a thickness direction of the diaphragm 100. In this embodiment, in a normal state, the first slit structure 111 and the second slit structure 112 are kept in a closed state, and the surface of the diaphragm 100 has integrity and tightness, and can sense sound pressure sensitively, thereby ensuring good acoustic performance thereof; when the diaphragm 100 is impacted by high sound pressure or instantaneous high pressure, the first slit structure 111 and the second slit structure 112 can be expanded and opened, so that the diaphragm 100 can be stretched in the transverse direction and the longitudinal direction to generate a negative poisson ratio effect, and meanwhile, air pressure can be discharged from the opened first slit structure 111 and the opened second slit structure 112, so that the purpose of active air leakage is achieved, and air pressure balance is maintained.
Further, the number of the first negative poisson's ratio cell structures 110 is plural, and a plurality of the first negative poisson's ratio cell structures 110 are disposed on the diaphragm 100 in an annular array. In this embodiment, the specific number of the first negative poisson's ratio cell structures 110 can be adaptively set according to the size of the diaphragm 100. The array arrangement of the first negative poisson ratio cell structures 110 can make the diaphragm 100 uniformly deform when being stressed and stretched or contracted when being impacted by high pressure, so as to avoid the phenomenon of different local deformation, and be beneficial to better protecting the diaphragm 100 from damage.
Of course, in other embodiments, the first negative poisson's ratio cell structure 110 may also form a continuous annular structure in the circumferential direction of the diaphragm 100, so as to further increase the deformation amount of the diaphragm 100 after being stressed, and prevent the diaphragm 100 from being damaged due to concentrated stress.
Referring to fig. 5 and fig. 6 in combination, in an embodiment of the diaphragm 100 of the present application, the diaphragm 100 includes a diaphragm body 100a and a corrugated structure 120, the first negative poisson's ratio cell structure 110 is disposed on the diaphragm body 100a, and the corrugated structure 120 is connected to the diaphragm body 100 a.
In this embodiment, the corrugated structure 120 may be a corrugated corrugation formed on the diaphragm 100, and by providing the corrugated structure 120, when the diaphragm 100 is impacted by a high pressure, not only the concentrated stress may be dispersed by the negative poisson's ratio effect of the first negative poisson's ratio cell structure 110, but also the concentrated stress may be relaxed by the expansion of the corrugated structure 120, so that the dual pressure relief is realized by using the first negative poisson's ratio cell structure 110 and the corrugated structure 120, and the integrity of the diaphragm 100 is better ensured.
In one embodiment, the corrugated structure 120 is disposed on the diaphragm 100 in a ring shape, and a center of a ring formed by the corrugated structure 120 coincides with a center of the array of the plurality of first negative poisson's ratio cell structures 110, or a center of a ring formed by the corrugated structure 120 coincides with a center of a ring formed by the first negative poisson's ratio cell structures 110. So set up for the structure for dispersion stress that sets up on vibrating diaphragm 100, the center of vibrating diaphragm 100 is even orderly to arranging in direction all around, thereby when receiving high-pressure impact, can carry out the homodisperse to the stress of concentrating, and then more is favorable to protecting vibrating diaphragm 100.
Further, the corrugated structure 120 is disposed in a ring shape in the circular array of the first negative poisson's ratio cell structure 110. That is, the diameter of the loops formed by the corrugated structure 120 is smaller than the diameter of the circular array of the first negative poisson's ratio cell structures 110. In this embodiment, since the portion of the diaphragm 100 close to the central region is more easily impacted by pressure after being mounted, when the central region of the diaphragm 100 is impacted by a certain pressure, the central region can resist the impact by the extension of the corrugated structure 120, so that the first slit structure 111 and the second slit structure 112 in the first negative poisson ratio cell structure 110 close to the peripheral edge do not need to be expanded and opened, and thus the diaphragm 100 can still maintain the integrity of the surface after being impacted by a certain high pressure, and further the performance of the product can be ensured.
In view of the integrity of the corrugated structure 120 after expansion, please refer to fig. 7 and 8 in combination, in the present application, the first negative poisson's ratio cell structure 110 is disposed on the corrugated structure 120. In this embodiment, the first negative poisson's ratio cell structure 110 is disposed on the diaphragm body 100a and the corrugated structure 120, so that when the diaphragm 100 is impacted by high pressure, on one hand, stress can be dispersed on the diaphragm body 100a through the first slit structure 111 and the second slit structure 112, on the other hand, the corrugated structure 120 expands to relieve the stress, and meanwhile, the expanded corrugated structure 120 can also be dispersed by the first slit structure 111 and the second slit structure 112 to protect the integrity of the corrugated structure 120.
Further, in an embodiment of the present application, the first slit structure 111 and the second slit structure 112 are not disposed through in a thickness direction of the corrugated structure 120. In this embodiment, after the corrugated structure 120 is unfolded, since the first slit structure 111 and the second slit structure 112 are not cut through, when the unfolded corrugated structure 120 disperses stress, the first slit structure 111 and the second slit structure 112 do not form a hole when being unfolded, so that the diaphragm 100 is kept intact in the area of the corrugated structure 120, which is beneficial for the diaphragm 100 to receive vibration caused by sensing sound or pressure.
With reference to fig. 9 to 11, in an embodiment of the present application, the diaphragm 100 is further provided with a second negative poisson's ratio cell structure 130 disposed at a distance from the first negative poisson's ratio cell structure 110, the second negative poisson's ratio cell structure 130 includes at least one third slit structure (not labeled) and at least one fourth slit structure (not labeled), and a third slit structure intersects with a fourth slit structure and is disposed non-penetratingly in a thickness direction of the diaphragm 100.
In this embodiment, the third and fourth kerf structures are identical in shape, arrangement and number to the first and second kerf structures 111 and 112, i.e., the second negative poisson's ratio cell structure 130 can also be used to form a negative poisson's ratio effect. And because the first kerf structure 111 and the second kerf structure 112 are arranged in a penetrating manner in the thickness direction of the diaphragm 100, and the third kerf structure and the fourth kerf structure are not arranged in a penetrating manner in the thickness direction of the diaphragm 100, when the diaphragm 100 is impacted by high pressure, the third kerf structure and the fourth kerf structure can expand or contract to deform for buffering impact, and the first kerf structure 111 and the second kerf structure 112 are opened for exhausting air pressure, so that the second negative poisson's ratio cell structure 130 has a function of a schlieren film in the related technology, and the integrity of the diaphragm 100 is ensured multiply.
Based on the above-mentioned embodiment, referring to fig. 10, in an embodiment of the present application, the number of the second negative poisson's ratio cell structures 130 is plural, and the plural second negative poisson's ratio cell structures 130 are disposed on the diaphragm 100 in an annular array. The specific number of the second negative poisson's ratio cell structures 130 can be adaptively set according to the size of the diaphragm 100. The arrangement of the plurality of second negative poisson ratio cell structures 130 in an array manner can enable the diaphragm 100 to be stressed, stretched or contracted to deform uniformly when being impacted by high pressure, so that the phenomenon of inconsistent local deformation is avoided, and the diaphragm 100 can be better protected from damage.
In addition, the plurality of second negative poisson's ratio cell structures 130 may also form a plurality of annular arrays, and the centers of each array coincide, so that the deformation capability of the diaphragm 100 can be further increased by increasing the area of the annular array of the second negative poisson's ratio cell structures 130.
Referring to fig. 11, in another embodiment, the number of the second negative poisson's ratio cell structures 130 is multiple, and a plurality of the second negative poisson's ratio metamaterial is continuously arranged along the circumferential direction of the diaphragm 100 and is formed into an annular structure. It can be understood that, by adopting such an arrangement, the diaphragm 100 can be subjected to pressure impact, and the deformation area where stress dispersion occurs is more continuous and the deformation amount is larger, so that the impact of high pressure dispersion is more favorably relieved.
In this application, the array formed by the arrangement of the second negative poisson's ratio cell structures 130 is located inside the array formed by the arrangement of the first negative poisson's ratio cell structures 110, and the centers of the two arrays coincide. That is, the diameter of the circular array formed by the arrangement of the second negative poisson's ratio cell structures 130 is smaller than the diameter of the circular array formed by the arrangement of the first negative poisson's ratio cell structures 110. With such an arrangement, when the central region of the diaphragm 100 is impacted by pressure, the second negative poisson's ratio cell element structure 130 can resist the impact, so that the first slit structure 111 and the second slit structure 112 in the first negative poisson's ratio cell element structure 110 close to the peripheral edge do not need to be expanded and opened, and thus the diaphragm 100 can still maintain the integrity of the surface after being impacted by a certain high pressure, and the performance of the product can be further ensured.
Referring to fig. 12, in an embodiment of the present application, the diaphragm 100 is further provided with a plurality of air-bleed structures 140, the plurality of air-bleed structures 140 are disposed at intervals with the first negative poisson's ratio cell structure 110, and the plurality of air-bleed structures 140 are disposed around the circumference of the diaphragm 100.
In this embodiment, the air-release structure 140 may be a circular hole, an elliptical hole or other shaped holes, and the air-release structure 140 may also be an air-release valve; the number of venting structures 140 may be adaptively designed according to the actual size of the diaphragm 100. Through the arrangement of the air release structure 140, when the diaphragm 100 is impacted by an abnormal high pressure, not only can the first negative poisson's ratio cell structure 110 and the second negative poisson's ratio cell structure 130 protect and resist, but also a part of air pressure can be directly discharged through the air release structure 140, so that triple protection is formed on the diaphragm 100, and the diaphragm 100 is ensured not to be damaged.
Further, a plurality of air escape structures 140 are arranged at the periphery of the first negative poisson's ratio cell structure 110. So set up, make the structure of losing air 140, first negative poisson ratio cell element structure 110 and second negative poisson ratio cell element structure 130/crease structure 120 can arrange the setting in proper order outside-in on vibrating diaphragm 100, and the structure of losing air 140 and first kerf structure 111 that are close to the outside, second kerf structure 112 can excrete atmospheric pressure, and be close to inboard third kerf structure and fourth kerf structure and crease structure 120 then can carry out slowly-releasing pressure through the stretching, guarantee like this that vibrating diaphragm 100 can carry out the pressure release through corresponding row's of dissolving dispersion mode when receiving different pressure, thereby make vibrating diaphragm 100 compromise the quality performance of the ability of pressure release buffering and product itself.
The invention further provides a sensor chip 500, where the sensor chip 500 includes the diaphragm 100, and the specific structure of the diaphragm 100 refers to the above embodiments, and since the sensor chip 500 adopts all technical solutions of all the above embodiments, at least all beneficial effects brought by the technical solutions of the above embodiments are achieved, and are not described in detail herein. The sensor 500 chip may be a MEMS sensor chip 500 of a dual diaphragm 100, a single diaphragm 100, or a dual back electrode 300, or may be a pressure sensor chip 500, an acoustic sensor chip 500, an ultrasonic sensor chip 500, or the like.
The present invention further provides a sensor, which includes a sensor chip 500, and since the sensor employs all technical solutions of all embodiments described above, the sensor at least has all beneficial effects brought by the technical solutions of the embodiments described above, and details are not repeated herein.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (14)
1. The vibrating diaphragm is characterized in that the vibrating diaphragm is provided with a first direction and a second direction which are arranged at an included angle, the vibrating diaphragm is provided with a first negative Poisson ratio cell structure, and the first negative Poisson ratio cell structure is configured to expand in the second direction when the first direction is stressed and stretched or contract in the second direction when the first direction is stressed and condensed.
2. The diaphragm of claim 1, wherein the first negative poisson's ratio cell structure includes at least one first kerf structure and at least one second kerf structure, and a first kerf structure intersects a second kerf structure.
3. The diaphragm of claim 2, wherein a first kerf structure and a second kerf structure are arranged to intersect perpendicularly;
and/or the intersection point of the first slit structure and the second slit structure is positioned in the middle or the end of the first slit structure.
4. The diaphragm of claim 2, wherein the first kerf structure and the second kerf structure are disposed therethrough in a thickness direction of the diaphragm.
5. The diaphragm of claim 4, wherein the number of the first negative Poisson ratio cell structures is plural, and the plural first negative Poisson ratio cell structures are disposed on the diaphragm in an annular array.
6. The diaphragm of claim 4, wherein the diaphragm further has a second negative Poisson ratio cell structure spaced apart from the first negative Poisson ratio cell structure, the second negative Poisson ratio cell structure including at least one third slit structure and at least one fourth slit structure, and a third slit structure intersecting with a fourth slit structure and disposed non-through in a thickness direction of the diaphragm.
7. The diaphragm of claim 6, wherein the number of the second negative Poisson ratio cell structures is plural, and the plural second negative Poisson ratio cell structures are disposed on the diaphragm in an annular array.
8. The diaphragm of claim 6, wherein the number of the second negative Poisson ratio cell structures is plural, and a plurality of the second negative Poisson ratio metamaterial is continuously arranged along the circumferential direction of the diaphragm and is formed into an annular structure.
9. The diaphragm of claim 4, wherein the diaphragm includes a diaphragm body and a corrugated structure, the first negative Poisson ratio cell structure is disposed on the diaphragm body, and the corrugated structure is connected to the diaphragm body.
10. The diaphragm of claim 9, wherein the corrugated structure is provided with the first negative poisson's ratio cell structure.
11. The diaphragm of claim 10, wherein the first kerf structure and the second kerf structure are non-through disposed in a thickness direction of the corrugation structure.
12. The diaphragm according to any one of claims 1 to 11, wherein the diaphragm further defines a plurality of air-bleed structures, the plurality of air-bleed structures are disposed at intervals with respect to the first negative poisson's ratio cell structure, and the plurality of air-bleed structures are disposed circumferentially around the diaphragm.
13. A sensor chip, characterized in that it comprises a diaphragm according to any one of claims 1 to 12.
14. A sensor comprising a sensor chip according to claim 13.
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| CN115842990A (en) * | 2023-02-15 | 2023-03-24 | 共达电声股份有限公司 | Vibrating diaphragm system and loudspeaker |
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| CN112995859B (en) | 2022-12-23 |
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