CN113301482B - Vibrating diaphragm for microphone and microphone - Google Patents
Vibrating diaphragm for microphone and microphone Download PDFInfo
- Publication number
- CN113301482B CN113301482B CN202110500299.7A CN202110500299A CN113301482B CN 113301482 B CN113301482 B CN 113301482B CN 202110500299 A CN202110500299 A CN 202110500299A CN 113301482 B CN113301482 B CN 113301482B
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- diaphragm
- microphone
- structures
- deformation
- deformation portion
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/16—Mounting or tensioning of diaphragms or cones
- H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
- H04R7/20—Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention is used in the technical field of acoustic-electric conversion devices, and particularly relates to a vibrating diaphragm for a microphone. The vibrating diaphragm comprises a diaphragm and a plurality of connecting structures which are arranged by extending outwards from the edge of the diaphragm, and the connecting structures are distributed at intervals along the circumferential direction of the diaphragm; the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being pulled by external force and recovering to an initial form after the external force disappears, and one end of the connecting piece is connected with the diaphragm; the support piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part. The vibrating diaphragm for the microphone is fixed in the microphone through the supporting piece of the connecting structure, when the diaphragm of the vibrating diaphragm is subjected to vibration to generate displacement, the deformation part of the supporting piece is pulled by the displacement of the diaphragm to deform, and the deformation part can be restored to the initial form after the vibration is stopped, so that the product performance of the microphone can be effectively improved when the vibrating diaphragm is applied to the microphone.
Description
[ field of technology ]
The invention relates to the technical field of acoustic-electric conversion devices, in particular to a vibrating diaphragm for a microphone and the microphone.
[ background Art ]
MEMS microphones employ Micro-Electro-Mechanical System (MEMS) systems, which have better acoustic performance, higher signal-to-noise ratio, better uniformity and lower power consumption than conventional Electret Condenser Microphones (ECM). MEMS microphones have been widely used in smart phones, notebook computers, tablet computers, etc. to provide higher voice quality.
The vibrating diaphragm is an important component of the MEMS microphone, the performance of the vibrating diaphragm directly influences the pickup effect of the MEMS microphone, and the vibrating diaphragm is fixed inside the MEMS microphone through a supporting piece of the vibrating diaphragm. The support of the vibrating diaphragm commonly used in the prior art is usually a flat solid structure, and the support of the structure is completely fixed inside the MEMS microphone without any floating margin, so that the displacement and the sensing area of the vibrating diaphragm are limited, and the product performance of the MEMS microphone is affected.
Accordingly, there is a need to provide a product to solve the above-mentioned technical problems.
[ invention ]
The invention aims to provide a vibrating diaphragm for a microphone and the microphone, and aims to solve the technical problems of limited displacement and sensing area of the vibrating diaphragm in the prior art.
The technical scheme of the invention is as follows:
the vibrating diaphragm for the microphone comprises a diaphragm and a plurality of connecting structures which are arranged to extend outwards from the edge of the diaphragm, wherein the connecting structures are distributed at intervals along the circumferential direction of the diaphragm;
the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being pulled by external force and recovering to an initial shape after the external force disappears, and one end of the connecting piece is connected with the diaphragm;
the support piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part.
Optionally, each of the connection structures is disposed at equal intervals.
Optionally, the deformation portion is spiral spring structure, the outer edge of the deformation portion of spiral spring structure connect in the connecting piece, the center of deformation portion is equipped with fixed part, just deformation portion with fixed part is located the coplanar and for integrated into one piece.
Optionally, the deformation portion includes a substrate extending from an end of the connecting piece and located on the same plane with the connecting piece, and at least one annular groove structure or annular fold structure, where each groove structure or fold structure is disposed on a surface of the substrate and extends from the surface of the substrate, and the fixing portion is protruding on the surface of the substrate.
Optionally, the fixing portion and the annular groove structure or the annular fold structure of the deformation portion are disposed concentrically.
Optionally, a plurality of groove structures or fold structures are provided, each groove structure or fold structure has a different diameter, the smaller diameter groove structure or fold structure of two adjacent groove structures or fold structures is located inside the larger diameter groove structure or fold structure, and the fixing portion is located at the center of the smallest diameter groove structure or fold structure.
Optionally, the membrane has any one of a rectangular shape, a square shape, a diamond shape, a circular shape, and an elliptical shape.
Optionally, the membrane is square, the connection structure is provided with four, and the four connection structures are respectively arranged at four corners of the membrane.
In order to solve the technical problems, the invention also provides a microphone, which comprises a substrate, a back plate arranged on the substrate, and the vibrating diaphragm for the microphone, wherein the vibrating diaphragm is positioned between the substrate and the back plate and is opposite to the back plate, and a support piece of the connecting structure is fixedly connected to the substrate or the back plate.
The invention has the beneficial effects that:
the vibrating diaphragm for the microphone is fixed in the microphone through the supporting piece of the connecting structure, when the diaphragm of the vibrating diaphragm is subjected to vibration to generate displacement, the deformation part of the supporting piece is pulled by the displacement of the diaphragm to deform so as to increase the maximum value of the displacement of the diaphragm, namely the amplitude of the diaphragm is increased, and the deformation part can be restored to an initial form after the vibration is stopped, namely the form when the deformation part is not deformed; in addition, the increase of the amplitude of the diaphragm is accompanied by the increase of the sensing area of the diaphragm, so that the product performance of the microphone can be effectively improved when the diaphragm is applied to the microphone.
[ description of the drawings ]
Fig. 1 is a schematic perspective view of a diaphragm for a microphone according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a connecting structure in one embodiment of FIG. 1;
FIG. 3 is a schematic perspective view of a connecting structure in another embodiment of FIG. 1;
FIG. 4 is a schematic perspective view of another surface of the connecting structure in FIG. 3;
FIG. 5 is a graph showing the effect of the sensing area of the diaphragm of FIG. 1 when subjected to vibration;
FIG. 6 is a cross-sectional view of a microphone in one embodiment of the invention;
fig. 7 is a cross-sectional view of a microphone in another embodiment of the invention.
[ detailed description ] of the invention
The invention will be further described with reference to the drawings and embodiments.
As shown in fig. 1 to 7, an embodiment of the present invention provides a diaphragm 100 for a microphone, the diaphragm 100 including a diaphragm 1 and a plurality of connection structures 2, the connection structures 2 being disposed to extend outwardly from edges of the diaphragm 1, and the connection structures 2 being disposed to be spaced apart along a circumferential direction of the diaphragm 1 so that the diaphragm 100 can be smoothly mounted inside the microphone 200. The connection structure 2 includes a connection member 21 and a support member 22, and one end of the connection member 21 is connectable to the diaphragm 1. The support 22 includes a fixing portion 221 and a deformation portion 222, and the deformation portion 222 may be disposed at the other end of the connection member 21 and connected, that is, the diaphragm 1 may be fixedly connected to the inside of the microphone 200 through the support 22; meanwhile, the deformation portion 222 may be further disposed at an end of the fixing portion 221, and the deformation portion 222 may be disposed around the fixing portion 221, so that the fixing portion 221 is connected to the connecting member 21; the fixing portion 221 may be fixed to the base 3 or the backplate 4 inside the microphone 200 to achieve mounting of the diaphragm 100 inside the microphone 200.
As can be appreciated, the diaphragm 100 operates generally as follows:
when the diaphragm 1 is subjected to vibration to generate displacement, as the deformation portion 222 of the support member 22 has a certain flexibility, the displacement of the diaphragm 1 will involve the deformation portion 222 to deform the deformation portion 222, so as to increase the maximum value of the displacement of the diaphragm 1, that is, increase the amplitude of the diaphragm 1; the deformation portion 222 also has a certain restoring capability, and when the vibration is stopped and the stress of the deformation portion 222 is removed, the deformation portion 222 will return to the original shape, that is, the shape when the deformation portion 222 is not deformed, and the diaphragm 1 will be pulled back to the original flat shape.
In summary, compared with the prior art, the diaphragm 100 for a microphone has at least the following advantages:
the diaphragm 100 for a microphone is mainly fixed inside the microphone 200 by the support 22 of the connection structure 2. When the diaphragm 1 of the diaphragm 100 is displaced by vibration, the deformation portion 222 of the support member 22 is deformed by the displacement of the diaphragm 1 to increase the maximum value of the displacement amount of the diaphragm 1, that is, to increase the amplitude of the diaphragm 1, and the deformation portion 222 can return to the original shape after the vibration is stopped, that is, the shape when the deformation portion 222 is not deformed; in addition, the amplitude of the diaphragm 1 is increased along with the increase of the sensing area of the diaphragm 1, so that the product performance of the microphone 200 can be effectively improved when the diaphragm 100 is applied to the microphone 200.
In some embodiments, as shown in fig. 1, the connection structures 2 may be disposed at equal intervals, so that the diaphragm 100 can be mounted in the microphone 200 smoothly, and the diaphragm 1 can be uniformly stressed when the diaphragm 100 is vibrated.
In some embodiments, the fixing portion 221 of the support 22 may be fixedly connected to the base 3 or the back plate 4 of the interior of the microphone 200 by adhesive or welding, so as to mount the diaphragm 100 inside the microphone 200.
In some embodiments, as an implementation manner of the deformation portion 222, as shown in fig. 2, the deformation portion 222a may be a spiral spring structure, an outer edge of the deformation portion 222a of the spiral spring structure may be connected to the connection member 21, and the fixing portion 221 may be disposed at a central end of the deformation portion 222 a. Also, when the diaphragm 100 is not subjected to an external force, the deformation portion 222a and the fixing portion 221 may be located on the same plane; when the diaphragm 100 is pulled by an external force to the supporting member 22, the deformation portion 222a deforms into a tower shape, and the fixing portion 221 is located at the top of the deformation portion 222 a. It can be understood that the more the number of turns of the deformation portion 222a, the higher the height of the deformation portion 222a when deformed into a tower shape by an external force is, so that the larger the amplitude of the diaphragm 1 is.
As can be appreciated, when the diaphragm 1 is subjected to vibration to generate displacement, the displacement of the diaphragm 1 will involve the deformation portion 222a of the spiral spring structure of the support member 22 to deform the deformation portion 222a of the spiral spring structure, and specifically, the deformation portion is stretched by the spiral spring to be tower-shaped, so as to increase the maximum value of the displacement of the diaphragm 1; when the vibration is stopped, that is, the stress of the support 22 is removed, the deformed portion 222a of the support 22 returns to the original shape, that is, the deformed portion 222a returns to the spiral spring, and the diaphragm 1 is pulled back to the flat original shape.
In some embodiments, as shown in fig. 2, the diaphragm 1, the connecting member 21, and the deformation portion 222a of the supporting member 22 may be an integrally formed structure; the deformation portion 222a and the fixing portion 221 of the support 22 may be integrally formed. Further, the membrane 1 and the connecting structure 2 may be integrally formed of a metal material.
In some embodiments, as another implementation of the deformation portion 222, as shown in fig. 3 and 4, the deformation portion 222b includes a base 2222b and at least one annular groove structure 2221b or annular fold structure (not shown) may be disposed on a surface of the base 2222b, and the annular groove structure 2221b or annular fold structure may be disposed to extend from the surface of the base 2222b, and the annular groove structure 2221b or annular fold structure may be tiled and unfolded to increase a width of the deformation portion 222b when being torn and unfolded. The fixing portion 221 may be protruded on the surface of the base 2222b and located in the 2221b or the corrugated structure, so that when the diaphragm 100 is mounted on the substrate 3 or the backplate 4 of the microphone 200, the protrusion 2211b can enable a space between the fixing portion 221 and the substrate 3 or the backplate 4 to prevent the substrate 3 or the backplate 4 from interfering with the annular groove structure 2221b or the annular corrugated structure of the deformation portion 222 b. When the diaphragm 100 is not subjected to external force, the annular groove structure 2221b or the annular fold structure maintains the original shape, and the substrate 2222b and the fixing part 221 can be located on the same plane; when the diaphragm 100 is pulled by an external force to the support 22, the annular groove structure 2221b or the annular fold structure is pulled flat, unfolded and inclined towards the force direction, and a distance is generated between the base 2222b and the fixing portion 221.
In some embodiments, as shown in fig. 3 and 4, the annular groove structures 2221b or the annular fold structures of the fixing portion 221 and the deforming portion 222 may be disposed concentrically, so that the diaphragm 1 does not deflect in other directions when the diaphragm 1 is displaced by force, and stability of vibration of the diaphragm 1 is ensured.
In some embodiments, as shown in fig. 3, a plurality of annular groove structures 2221b or annular pleat structures may be provided, the diameters of each annular groove structure 2221b or annular pleat structure may be different, adjacent annular groove structures 2221b or annular pleat structures may be different, the annular groove structure 2221b or annular pleat structure with the smaller diameter may be provided inside the annular groove structure or annular pleat structure with the larger diameter, and the fixing portion 221 may be located at the center of the groove structure 2221b2221b or annular pleat structure with the smallest diameter. It will be appreciated that the more grooves 2221b or corrugations are provided, the greater the width of the deformation 222b as a whole when subjected to an external force, so that the greater the amplitude of the diaphragm 1.
As can be appreciated, when the diaphragm 1 is displaced by vibration, the displacement of the diaphragm 1 will cause the deformation portion 222b of the support member 22 to deform, and specifically, the original groove structure 2221b or the fold structure is pulled flat, unfolded and inclined towards the stress direction, and the deformation portion 222b is displaced, unfolded and inclined towards the stress direction, so as to increase the maximum value of the displacement amount of the diaphragm 1; when the vibration is stopped, that is, the stress of the supporting member 22 is removed, the groove structure 2221b or the fold structure of the supporting member 22 is restored to the original shape, and the surface of the deformation portion 222 and the fixing portion 221 are restored to the same plane, at this time, the membrane 1 is pulled back to the flat original shape.
In some embodiments, as shown in fig. 3 and 4, the diaphragm 1, the connecting member 21, and the deformation portion 222b of the supporting member 22 may be an integrally formed structure; the deformation portion 222b and the fixing portion 221 of the support 22 may be integrally formed. Further, the diaphragm 1 and the connecting structure 2 may be integrally formed of a silicone material, and the rigidity of the deformed portion 222b is smaller than that of other portions.
In some embodiments, as shown in fig. 1, the membrane 1 may be any one of rectangular, square, diamond, circular, and oval in shape. Further, when the membrane 1 is set to any one of a rectangle, a square, and a diamond, four connection structures 2 may be provided, and one connection structure 2 may be provided at each corner of the membrane 1; when the membrane 1 is arranged in a circular shape, three connecting structures 2 can be arranged, and the distance between two adjacent connecting structures 2 can be 120 degrees; when the diaphragm 1 is configured as an ellipse, four connection structures 2 may be provided, wherein two connection structures 2 may be disposed at two long-side foci of the diaphragm 1, and the other two connection structures 2 may be disposed at two short-side foci of the diaphragm 1. Of course, the shape of the membrane 1 includes, but is not limited to, the above, and the arrangement of the corresponding connection structure 2 is not limited.
In order to solve the above technical problems, as shown in fig. 6 and 7, an embodiment of the present invention further provides a microphone 200, including a substrate 3 and a back plate 4 disposed on the substrate 3; the diaphragm 100 may be located between the substrate 3 and the back plate 4, and may be disposed opposite to the back plate 4 to form the air cavity 5, and the support 22 of the connection structure 2 may be fixedly connected to the substrate 3 or the back plate 4.
While the invention has been described with respect to the above embodiments, it should be noted that modifications can be made by those skilled in the art without departing from the inventive concept, and these are all within the scope of the invention.
Claims (9)
1. A vibrating diaphragm for a microphone, comprising a diaphragm and a plurality of connecting structures extending outwards from the edge of the diaphragm, wherein each connecting structure is distributed at intervals along the circumferential direction of the diaphragm;
the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being pulled by external force and recovering to an initial shape after the external force disappears, and one end of the connecting piece is connected with the diaphragm;
the support piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part;
the deformation part of the support piece is pulled by the displacement of the diaphragm to deform so as to increase the maximum value of the displacement of the diaphragm, and the deformation part can return to the initial form after vibration is stopped.
2. The diaphragm for a microphone of claim 1, wherein each of the connection structures is disposed at equal intervals.
3. The diaphragm for a microphone according to claim 1, wherein the deformation portion is a spiral spring structure, an outer edge of the deformation portion of the spiral spring structure is connected to the connecting piece, the fixing portion is disposed at a center of the deformation portion, and the deformation portion and the fixing portion are located on the same plane and are integrally formed.
4. The diaphragm for a microphone according to claim 1, wherein the deformation portion includes a base extending from an end of the connecting member and being in the same plane as the connecting member, and at least one annular groove structure or annular wrinkle structure, each of the groove structures or the wrinkle structures being provided on a surface of the base and extending from the surface of the base, and the fixing portion being protruded from the surface of the base.
5. The diaphragm for a microphone of claim 4, wherein the fixing portion and the annular groove structure or the annular wrinkle structure of the deformation portion are disposed concentrically.
6. The diaphragm for a microphone according to claim 4, wherein a plurality of groove structures or pleat structures are provided, each groove structure or pleat structure has a different diameter, the groove structure or pleat structure having a smaller diameter of two adjacent groove structures or pleat structures is located inside the groove structure or pleat structure having a larger diameter, and the fixing portion is located at a center of the groove structure or pleat structure having a smallest diameter.
7. The diaphragm for a microphone of claim 1, wherein the diaphragm has any one of a rectangular shape, a square shape, a diamond shape, a circular shape, and an elliptical shape.
8. The diaphragm for a microphone of claim 7, wherein the diaphragm is square, the connection structure is provided with four, and the four connection structures are respectively provided at four corners of the diaphragm.
9. A microphone comprising a substrate and a backplate provided on the substrate, characterized in that it further comprises a diaphragm for a microphone according to any one of claims 1 to 8, the diaphragm being located between the substrate and the backplate and being disposed opposite to the backplate, the support of the connection structure being fixedly connected to the substrate or the backplate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110500299.7A CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110500299.7A CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
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| Publication Number | Publication Date |
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| CN113301482A CN113301482A (en) | 2021-08-24 |
| CN113301482B true CN113301482B (en) | 2023-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110500299.7A Active CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
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| CN (1) | CN113301482B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN218387806U (en) * | 2022-08-26 | 2023-01-24 | 瑞声声学科技(深圳)有限公司 | Microphone chip and microphone |
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| CN211296939U (en) * | 2019-12-31 | 2020-08-18 | 瑞声科技（南京）有限公司 | Piezoelectric MEMS microphone |
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2021
- 2021-05-08 CN CN202110500299.7A patent/CN113301482B/en active Active
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| JP2007243757A (en) * | 2006-03-10 | 2007-09-20 | Yamaha Corp | Condenser microphone |
| CN102056061A (en) * | 2009-10-29 | 2011-05-11 | 苏州敏芯微电子技术有限公司 | Capacitive miniature silicon microphone and manufacturing method thereof |
| CN203206466U (en) * | 2013-03-12 | 2013-09-18 | 北京卓锐微技术有限公司 | Silicon capacitor microphone |
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| CN113301482A (en) | 2021-08-24 |
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