CN113301482A - A vibrating diaphragm and microphone for microphone - Google Patents
A vibrating diaphragm and microphone for microphone Download PDFInfo
- Publication number
- CN113301482A CN113301482A CN202110500299.7A CN202110500299A CN113301482A CN 113301482 A CN113301482 A CN 113301482A CN 202110500299 A CN202110500299 A CN 202110500299A CN 113301482 A CN113301482 A CN 113301482A
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- diaphragm
- microphone
- structures
- corrugation
- deformation
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/16—Mounting or tensioning of diaphragms or cones
- H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
- H04R7/20—Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention is used in the technical field of sound-electricity conversion devices, and particularly relates to a vibrating diaphragm for a microphone. The diaphragm comprises a diaphragm and a plurality of connecting structures which extend outwards from the edge of the diaphragm, and the connecting structures are arranged at intervals along the circumferential direction of the diaphragm; the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being dragged by external force and recovering to an initial shape after the external force disappears, and one end of the connecting piece is connected to the diaphragm; the supporting piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part. The vibrating diaphragm for the microphone is fixed in the microphone through the supporting piece of the connecting structure, when the diaphragm of the vibrating diaphragm is vibrated to generate displacement, the deformation part of the supporting piece is dragged by the displacement of the diaphragm to generate deformation, and the deformation part can be restored to the initial form after the vibration is stopped, so that the product performance of the microphone can be effectively improved when the vibrating diaphragm is applied to the microphone.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of sound-electricity conversion devices, in particular to a vibrating diaphragm for a microphone and the microphone.
[ background of the invention ]
The MEMS microphone is a Micro-Electro-Mechanical System (MEMS), and has better acoustic performance, higher signal-to-noise ratio, better consistency and lower power consumption compared with the conventional Electret Condenser Microphone (ECM). MEMS microphones have been widely used in smart phones, notebook computers, tablet computers, and other fields to provide higher voice quality.
The diaphragm is an important component of the MEMS microphone, and the performance of the diaphragm directly affects the sound pickup effect of the MEMS microphone, and the diaphragm is fixed inside the MEMS microphone through a support part of the diaphragm. The supporting member of the diaphragm commonly used in the prior art is usually a flat solid structure, and the supporting member of the structure is completely fixed inside the MEMS microphone without any floating room, so that the displacement and the sensing area of the diaphragm are limited, and the product performance of the MEMS microphone is affected.
Therefore, there is a need to provide a product to solve the above technical problems.
[ summary of the invention ]
The invention aims to provide a diaphragm for a microphone and the microphone, and aims to solve the technical problem that the displacement and the induction area of the diaphragm in the prior art are limited.
The technical scheme of the invention is as follows:
the diaphragm for the microphone comprises a diaphragm and a plurality of connecting structures which extend outwards from the edge of the diaphragm, wherein the connecting structures are distributed at intervals along the circumferential direction of the diaphragm;
the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being dragged by external force and recovering to an initial shape after the external force disappears, and one end of the connecting piece is connected to the diaphragm;
the support piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part.
Optionally, each of the connecting structures is arranged at equal intervals.
Optionally, the deformation portion is the helical spring structure, the outer edge of the deformation portion of the helical spring structure connect in the connecting piece, the center of the deformation portion is equipped with the fixed part, just the deformation portion with the fixed part is located the coplanar and is integrated into one piece.
Optionally, the deformation portion includes a base extending from an end of the connecting member and located on the same plane as the connecting member, and at least one annular groove structure or annular corrugation structure, each of the groove structures or corrugation structures is disposed on a surface of the base and is disposed to extend from the surface of the base, and the fixing portion is disposed on the surface of the base in a protruding manner.
Optionally, the annular groove structure or the annular corrugation structure of the fixing part and the deformation part are concentrically arranged.
Optionally, the number of the groove structures or the corrugated structures is multiple, the diameters of the groove structures or the corrugated structures are different, the groove structure or the corrugated structure with the smaller diameter in two adjacent groove structures or corrugated structures is located on the inner side of the groove structure or the corrugated structure with the larger diameter, and the fixing portion is located in the center of the groove structure or the corrugated structure with the smallest diameter.
Optionally, the shape of the diaphragm is any one of rectangular, square, diamond, circular and oval.
Optionally, the diaphragm is square, the number of the connecting structures is four, and the four connecting structures are respectively arranged at four corners of the diaphragm.
In order to solve the above technical problem, the present invention further provides a microphone, including a substrate, a back plate disposed on the substrate, and the above diaphragm for a microphone, where the diaphragm is disposed between the substrate and the back plate and opposite to the back plate, and the support member of the connection structure is fixedly connected to the substrate or the back plate.
The invention has the beneficial effects that:
the vibrating diaphragm for the microphone is fixed in the microphone through the supporting piece of the connecting structure, when the diaphragm of the vibrating diaphragm is vibrated to generate displacement, the deformation part of the supporting piece is dragged by the displacement of the diaphragm to deform so as to increase the maximum value of the displacement of the diaphragm, namely the amplitude of the diaphragm is increased, and the deformation part can recover to the initial form after the vibration stops, namely the form when the deformation part is not deformed; in addition, the increase of the amplitude of the diaphragm is accompanied with the increase of the sensing area of the diaphragm, so that the product performance of the microphone can be effectively improved when the diaphragm is applied to the microphone.
[ description of the drawings ]
Fig. 1 is a schematic perspective view of a diaphragm for a microphone according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a connection structure in one embodiment of FIG. 1;
FIG. 3 is a perspective view of another embodiment of the connection structure of FIG. 1;
FIG. 4 is a schematic perspective view of another side of the connection structure of FIG. 3;
FIG. 5 is a graph showing the effect of the sensing area of the diaphragm of FIG. 1 when subjected to vibration;
FIG. 6 is a cross-sectional view of a microphone in an embodiment of the invention;
fig. 7 is a cross-sectional view of a microphone in another embodiment of the invention.
[ detailed description ] embodiments
The invention is further described with reference to the following figures and embodiments.
As shown in fig. 1 to 7, an embodiment of the present invention provides a diaphragm 100 for a microphone, where the diaphragm 100 includes a diaphragm 1 and a plurality of connection structures 2, the connection structures 2 may be disposed to extend outward from an edge of the diaphragm 1, and the connection structures 2 may be disposed at intervals in a circumferential direction of the diaphragm 1, so that the diaphragm 100 can be smoothly installed inside a microphone 200. The connecting structure 2 comprises a connecting piece 21 and a support piece 22, one end of the connecting piece 21 being connectable to the membrane 1. The supporting member 22 includes a fixing portion 221 and a deformation portion 222, and the other end of the deformation portion 222, which can be disposed on the connecting member 21, is connected, that is, the diaphragm 1 can be fixedly connected inside the microphone 200 through the supporting member 22; meanwhile, the deformation portion 222 may be disposed at an end of the fixing portion 221, and the deformation portion 222 may be disposed around the fixing portion 221 so as to connect the fixing portion 221 with the connecting member 21; the fixing portion 221 may be fixed to the substrate 3 or the backplate 4 inside the microphone 200 to implement the installation of the diaphragm 100 inside the microphone 200.
It is understood that the diaphragm 100 operates substantially as follows:
when the diaphragm 1 is vibrated to generate displacement, because the deformation portion 222 of the supporting member 22 has certain flexibility, the displacement of the diaphragm 1 may drag the deformation portion 222 to deform the deformation portion 222, so as to increase the maximum value of the displacement of the diaphragm 1, that is, increase the amplitude of the diaphragm 1; moreover, the deformation portion 222 also has a certain recovery capability, when the vibration stops and the stress of the deformation portion 222 disappears, the deformation portion 222 will recover to the original form, that is, the form when the deformation portion 222 is not deformed, and at this time, the diaphragm 1 is pulled back to the original flat form.
In summary, compared with the prior art, the diaphragm 100 for a microphone has at least the following beneficial effects:
the diaphragm 100 for a microphone is fixed inside the microphone 200 mainly by the support member 22 of the connection structure 2. When the diaphragm 1 of the diaphragm 100 is vibrated to generate displacement, the deformation portion 222 of the supporting member 22 is dragged by the displacement of the diaphragm 1 to deform so as to increase the maximum value of the displacement amount of the diaphragm 1, that is, increase the amplitude of the diaphragm 1, and after the vibration stops, the deformation portion 222 can return to the initial form, that is, the form when the deformation portion 222 is not deformed; moreover, the increase of the amplitude of the diaphragm 1 is accompanied by the increase of the sensing area of the diaphragm 1, so that the product performance of the microphone 200 can be effectively improved when the diaphragm 100 is applied to the microphone 200.
In some embodiments, as shown in fig. 1, the connecting structures 2 may be arranged at equal intervals, so that the diaphragm 100 can be flatly installed inside the microphone 200, and the diaphragm 1 can be uniformly stressed when the diaphragm 100 is vibrated.
In some embodiments, the fixing portion 221 of the supporting member 22 may be fixedly connected to the substrate 3 or the backplate 4 inside the microphone 200 by adhesive or welding, so as to mount the diaphragm 100 inside the microphone 200.
In some embodiments, as an implementation manner of the deformation portion 222, as shown in fig. 2, the deformation portion 222a may be a spiral spring structure, an outer edge of the deformation portion 222a of the spiral spring structure may be connected to the connecting member 21, and the fixing portion 221 may be disposed at a central end of the deformation portion 222 a. Moreover, when the diaphragm 100 is not subjected to an external force, both the deformation portion 222a and the fixing portion 221 can be located on the same plane; when the diaphragm 100 is subjected to an external force to pull the supporting member 22, the deformation portion 222a is deformed into a tower shape, and the fixing portion 221 is located at the tower top of the deformation portion 222 a. It can be understood that the greater the number of turns of the deformation portion 222a, the greater the height of the deformation portion 222a when deformed into a tower shape by an external force, so that the greater the amplitude of the diaphragm 1.
It can be understood that, when the diaphragm 1 is vibrated to generate displacement, the displacement of the diaphragm 1 may involve the deformation portion 222a of the spiral spring structure of the support 22 to deform the deformation portion 222a of the spiral spring structure, specifically, the spiral spring is stretched into a tower shape, so as to increase the maximum value of the displacement amount of the diaphragm 1; when the vibration stops, i.e. the stress on the supporting member 22 disappears, the deformation portion 222a of the supporting member 22 will return to the original shape, i.e. the deformation portion 222a returns to the spiral spring shape, and at this time, the membrane 1 is pulled back to the flat original shape.
In some embodiments, as shown in fig. 2, the diaphragm 1, the connecting member 21 and the deformation portion 222a of the supporting member 22 may be an integrally formed structure; the deformable portion 222a and the fixing portion 221 of the support 22 may be formed integrally. Further, the membrane 1 and the connecting structure 2 may be integrally formed by using a metal material.
In some embodiments, as another implementation manner of the deformation portion 222, as shown in fig. 3 and 4, the deformation portion 222b includes a base 2222b and at least one annular groove structure 2221b or annular corrugation structure (not shown) may be disposed on a surface of the base 2222b, and the annular groove structure 2221b or annular corrugation structure may be disposed to extend from a surface of the base 2222b, and the annular groove structure 2221b or annular corrugation structure may be laid out and unfolded to increase a width of the deformation portion 222b when the deformation portion is pulled out and spread out. The fixing portion 221 may be protruded from the surface of the base 2222b and located inside 2221b or the corrugated structure, so that when the diaphragm 100 is mounted on the substrate 3 or the backplate 4 of the microphone 200, the fixing portion 221 and the substrate 3 or the backplate 4 can have a distance therebetween by the protrusion 2211b, and the substrate 3 or the backplate 4 is prevented from interfering with the annular groove structure 2221b or the annular corrugated structure of the deformation portion 222 b. When the diaphragm 100 is not subjected to an external force, the annular groove structure 2221b or the annular corrugated structure maintains the original shape, and both the base 2222b and the fixing portion 221 can be located on the same plane; when the diaphragm 100 is subjected to an external force to pull the supporting member 22, the annular groove structure 2221b or the annular corrugated structure is pulled flat, spread and inclined towards the force-receiving direction, and a distance is generated between the base 2222b and the fixing portion 221.
In some embodiments, as shown in fig. 3 and 4, the annular groove structures 2221b or the annular corrugation structures of the fixing portion 221 and the deformation portion 222 may be concentrically arranged, so that the diaphragm 1 does not deflect in other directions when subjected to a force displacement, and the stability of the vibration of the diaphragm 1 is ensured.
In some embodiments, as shown in fig. 3, a plurality of annular groove structures 2221b or annular corrugation structures may be provided, each annular groove structure 2221b or annular corrugation structure may have a different diameter, two adjacent annular groove structures 2221b or annular corrugation structures may have a smaller diameter of the annular groove structures 2221b or annular corrugation structures provided inside the larger diameter of the annular groove structures or annular corrugation structures, and the fixing part 221 may be located at the center of the smallest diameter of the annular groove structures 2221b2221b or corrugation structures. It can be understood that the more the groove structures 2221b or the corrugation structures are provided, the larger the spread width of the entire deformation portion 222b when the deformation portion 222b is subjected to an external force is, so that the amplitude of the diaphragm 1 is larger.
It can be understood that, when the diaphragm 1 is vibrated to generate displacement, the displacement of the diaphragm 1 will involve the deformation portion 222b of the supporting member 22 to generate deformation, specifically, the original groove structure 2221b or the corrugated structure is pulled flat, unfolded and inclined towards the force direction, and the deformation portion 222b is displaced and unfolded and inclined towards the force direction to increase the maximum value of the displacement of the diaphragm 1; when the vibration stops, i.e. the stress on the supporting member 22 disappears, the groove structure 2221b or the corrugation structure of the supporting member 22 will return to the original shape, and the surface of the deformation portion 222 and the fixing portion 221 return to the same plane, so that the membrane 1 is pulled back to the flat original shape.
In some embodiments, as shown in fig. 3 and 4, the diaphragm 1, the connecting member 21, and the deformation portion 222b of the supporting member 22 may be an integrally formed structure; the deformable portion 222b and the fixing portion 221 of the support 22 may be formed integrally. Further, the diaphragm 1 and the connecting structure 2 may be integrally formed by using a silicone material, and the rigidity of the deformation portion 222b is less than that of other portions.
In some embodiments, as shown in fig. 1, the shape of the membrane 1 may be any one of rectangular, square, diamond, circular, and oval. Further, when the membrane 1 is arranged in any one of a rectangle, a square and a diamond, four connecting structures 2 can be arranged, and one connecting structure 2 can be arranged on each corner of the membrane 1; when the diaphragm 1 is set to be circular, three connecting structures 2 can be arranged, and the distance between every two adjacent connecting structures 2 can be 120 degrees; when the diaphragm 1 is set to be oval, four connecting structures 2 can be set, two of the connecting structures 2 can be arranged on two long-edge focuses of the diaphragm 1, and the other two connecting structures 2 can be arranged on two short-edge focuses of the diaphragm 1. Of course, the shape of the membrane 1 includes, but is not limited to, the above, and the arrangement of the corresponding connection structure 2 is not limited.
In order to solve the above technical problem, as shown in fig. 6 and 7, an embodiment of the present invention further provides a microphone 200, including a substrate 3 and a backplate 4 disposed on the substrate 3; also included is the diaphragm 100 described above, the diaphragm 100 may be located between the substrate 3 and the backplate 4, and may be disposed opposite the backplate 4 to form the air cavity 5, and the support member 22 of the connection structure 2 may be fixedly connected to the substrate 3 or the backplate 4.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (9)
1. A diaphragm for a microphone is characterized by comprising a diaphragm and a plurality of connecting structures extending outwards from the edge of the diaphragm, wherein the connecting structures are distributed at intervals along the circumferential direction of the diaphragm;
the connecting structure comprises a connecting piece and a supporting piece, wherein the supporting piece is used for deforming when being dragged by external force and recovering to an initial shape after the external force disappears, and one end of the connecting piece is connected to the diaphragm;
the support piece comprises a fixing part and a deformation part connected with the other end of the connecting piece and the end part of the fixing part, and the deformation part is arranged around the fixing part.
2. The diaphragm of claim 1, wherein the connecting structures are arranged at equal intervals.
3. The diaphragm for the microphone of claim 1, wherein the deformation portion is of a spiral spring structure, an outer edge of the deformation portion of the spiral spring structure is connected to the connecting member, the fixing portion is disposed at a center of the deformation portion, and the deformation portion and the fixing portion are located on the same plane and are integrally formed.
4. The diaphragm of claim 1, wherein the deformation portion includes a base extending from the end of the connecting member and located on the same plane as the connecting member, and at least one annular groove structure or annular corrugation structure, each groove structure or corrugation structure is disposed on the surface of the base and configured to extend from the surface of the base, and the fixing portion is protruded from the surface of the base.
5. The diaphragm for a microphone according to claim 4, wherein the annular groove structure or the annular corrugation structure of the fixing portion and the deformation portion are concentrically arranged.
6. The diaphragm for the microphone as claimed in claim 4, wherein the plurality of groove structures or corrugation structures are provided, the diameters of the groove structures or corrugation structures are different, the groove structure or corrugation structure with the smaller diameter in two adjacent groove structures or corrugation structures is located on the inner side of the groove structure or corrugation structure with the larger diameter, and the fixing portion is located in the center of the groove structure or corrugation structure with the smallest diameter.
7. The diaphragm for a microphone according to claim 1, wherein the shape of the diaphragm is any one of a rectangle, a square, a diamond, a circle, and an ellipse.
8. The diaphragm of claim 7, wherein the diaphragm is square, and the number of the connecting structures is four, and the four connecting structures are respectively disposed at four corners of the diaphragm.
9. A microphone, comprising a substrate and a backplate provided on the substrate, characterized by further comprising a diaphragm for a microphone according to any one of claims 1 to 8, the diaphragm being located between the substrate and the backplate and disposed opposite to the backplate, the support member of the connection structure being fixedly connected to the substrate or the backplate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110500299.7A CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110500299.7A CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
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| Publication Number | Publication Date |
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| CN113301482A true CN113301482A (en) | 2021-08-24 |
| CN113301482B CN113301482B (en) | 2023-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110500299.7A Active CN113301482B (en) | 2021-05-08 | 2021-05-08 | Vibrating diaphragm for microphone and microphone |
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| Country | Link |
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| CN (1) | CN113301482B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024040652A1 (en) * | 2022-08-26 | 2024-02-29 | 瑞声声学科技(深圳)有限公司 | Microphone chip and microphone |
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| CN210927933U (en) * | 2019-12-30 | 2020-07-03 | 瑞声声学科技(深圳)有限公司 | Electret bone conduction microphone |
| CN211296939U (en) * | 2019-12-31 | 2020-08-18 | 瑞声科技（南京）有限公司 | Piezoelectric MEMS microphone |
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2021
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| JP2007243757A (en) * | 2006-03-10 | 2007-09-20 | Yamaha Corp | Condenser microphone |
| CN102056061A (en) * | 2009-10-29 | 2011-05-11 | 苏州敏芯微电子技术有限公司 | Capacitive miniature silicon microphone and manufacturing method thereof |
| CN203206466U (en) * | 2013-03-12 | 2013-09-18 | 北京卓锐微技术有限公司 | Silicon capacitor microphone |
| WO2014141505A1 (en) * | 2013-03-12 | 2014-09-18 | オムロン株式会社 | Capacitive sensor, acoustic sensor and microphone |
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| WO2024040652A1 (en) * | 2022-08-26 | 2024-02-29 | 瑞声声学科技(深圳)有限公司 | Microphone chip and microphone |
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| CN113301482B (en) | 2023-09-01 |
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