WO2022061979A1 - Bone conduction microphone - Google Patents

Bone conduction microphone Download PDF

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Publication number
WO2022061979A1
WO2022061979A1 PCT/CN2020/120595 CN2020120595W WO2022061979A1 WO 2022061979 A1 WO2022061979 A1 WO 2022061979A1 CN 2020120595 W CN2020120595 W CN 2020120595W WO 2022061979 A1 WO2022061979 A1 WO 2022061979A1
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WO
WIPO (PCT)
Prior art keywords
circuit board
bone conduction
metal cover
cover plate
conduction microphone
Prior art date
Application number
PCT/CN2020/120595
Other languages
French (fr)
Chinese (zh)
Inventor
张金宇
Original Assignee
瑞声声学科技(深圳)有限公司
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Publication of WO2022061979A1 publication Critical patent/WO2022061979A1/en

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Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones

Definitions

  • the utility model belongs to the technical field of microphones, in particular to a bone conduction microphone.
  • the MEMS chip of the bone conduction microphone is attached to the circuit board. Since the circuit board itself has a large thickness, the microphone as a whole occupies a large space.
  • the purpose of the present invention is to provide a bone conduction microphone, which aims to reduce the size of the bone conduction microphone.
  • a bone conduction microphone comprising a circuit board assembly, a vibration assembly fixed to the circuit board assembly, a MEMS chip electrically connected to the circuit board assembly and having a back cavity, and a MEMS chip connected to the circuit board assembly.
  • the bone conduction microphone further includes a metal cover plate stacked on the circuit board assembly, the circuit board assembly including a top surface that is attached to the metal cover plate and a The top surface is recessed in the direction away from the metal cover plate, the metal cover plate is fixed between the vibration component and the circuit board component; the MEMS chip and the ASIC chip are fixed on the the metal cover plate and the MEMS chip and the ASIC chip are located in the receiving groove; the metal cover plate is provided with an acoustic hole communicating with the back cavity, and the vibration component is arranged on the metal cover plate The cover plate is away from the side of the back cavity.
  • the bone conduction microphone further includes a base plate sandwiched between the metal cover plate and the vibration component, the base plate is provided with a first hollow portion, and the first hollow portion communicates with the sound hole. .
  • the circuit board assembly includes a first circuit board attached to the metal cover plate, a second circuit board attached to the side of the first circuit board away from the metal cover plate, and a second circuit board attached to the side of the first circuit board away from the metal cover plate.
  • the thickness of the metal cover plate is smaller than the thicknesses of the first circuit board, the second circuit board and the third circuit board.
  • first circuit board, the second circuit board and the third circuit board are bonded, fixed and electrically connected.
  • the MEMS chip and the ASIC chip are bonded and fixed to the metal cover plate.
  • the vibration assembly includes a bone conduction shell covering the side of the base plate away from the circuit board assembly to receive external vibration, a vibration membrane sandwiched between the bone conduction shell and the base plate, and a fixed Mass on the diaphragm.
  • the MEMS chip has a through hole facing the substrate and communicating with the back cavity, the through hole is opposite to the acoustic hole and the diameter of the acoustic hole is smaller than that of the through hole.
  • the acoustic hole is directly opposite to the through hole.
  • mass block is fixed on the side of the diaphragm away from the metal cover plate.
  • the beneficial effects of the present invention are as follows: in the bone conduction microphone of the present invention, a layer of metal cover plate is stacked on the circuit board assembly, and the top surface of the circuit board assembly is recessed toward the direction away from the metal cover plate to form a receiving groove, the MEMS chip and the ASIC The chip is fixed in the receiving slot.
  • the thickness of the circuit board assembly includes the thickness of the MEMS chip and the ASIC chip, the MEMS chip and the ASIC chip do not occupy another thickness, so the thickness of the bone conduction microphone can be reduced.
  • the vibration component vibrates in response to the vibration signal, so that the gap between the MEMS chip and the vibration component
  • the gas in the cavity is compressed and stretched, and the pressure changes periodically.
  • the changed pressure signal is picked up by the MEMS chip and converted into an electrical signal.
  • the ASIC chip 3 further amplifies the signal to realize the transmission of sound.
  • FIG. 1 is a schematic diagram of the overall structure of a bone conduction microphone provided by an embodiment of the present invention
  • FIG. 2 is a schematic diagram of an exploded structure of a bone conduction microphone provided by an embodiment of the present invention
  • FIG. 3 is a schematic cross-sectional view in the direction A-A of FIG. 1 .
  • a bone conduction microphone provided by an embodiment of the present invention includes a circuit board assembly 1 , a vibration assembly 5 fixed to the circuit board assembly 1 , and a vibration assembly 5 that is electrically connected to the circuit board assembly 1 and has a back The MEMS chip 2 of the cavity 21 and the ASIC chip 3 electrically connected to the circuit board assembly 1 .
  • the bone conduction microphone of this embodiment further includes a metal cover 4 stacked on the circuit board assembly 1 , and the circuit board On the top surface 112 and the receiving groove 8 recessed in the direction away from the metal cover plate 4, the metal cover plate 4 is fixed between the vibration component 5 and the circuit board component 1, the MEMS chip 2 and the ASIC chip 3 are fixed on the metal cover plate 4 and The MEMS chip 2 and the ASIC chip 3 are located in the receiving groove 8 , and an acoustic hole 41 communicating with the back cavity 21 is formed through the metal cover plate 4 .
  • a layer of metal cover plate 4 is stacked on the circuit board assembly 1, and the top surface 112 of the circuit board assembly 1 is recessed in the direction away from the metal cover plate 4 to form a receiving groove 8, a MEMS chip 2 and an ASIC chip 3 is fixed in the receiving groove 8.
  • the thickness of the circuit board assembly 1 includes the thickness of the MEMS chip 2 and the ASIC chip 3, the MEMS chip 2 and the ASIC chip 3 do not occupy another thickness, so it can be reduced
  • the thickness dimension of the bone conduction microphone is reduced by about 0.1mm, which is conducive to the miniaturization of the product.
  • the vibration component 5 vibrates in response to the vibration signal, so that the gas in the cavity between the MEMS chip 2 and the vibration component 5 is compressed and stretched , the pressure changes periodically, the changed pressure signal is picked up by the MEMS chip and converted into an electrical signal, and the ASIC chip 3 further amplifies the signal to realize the transmission of sound.
  • the bone conduction microphone of this embodiment further includes a base plate 6 sandwiched between the metal cover plate 4 and the vibration component 5 , the base plate 6 is provided with a first hollow portion 61 , and the first hollow portion 61 communicates with the sound hole 41 . That is, the first hollow portion 61 , the sound hole 41 and the back cavity 21 are communicated with each other.
  • the circuit board assembly 1 includes a first circuit board 11 attached to the metal cover plate 4 , a second circuit board 12 attached to the side of the first circuit board 11 away from the metal cover plate 4 , and a second circuit board attached to the second circuit A third circuit board 13 on the side of the board 12 away from the first circuit board 11 .
  • the first circuit board 11 is provided with a second hollow portion 111
  • the second circuit board 12 is provided with a third hollow portion communicating with the second hollow portion 111 .
  • part 121 , the second hollow part 111 and the third hollow part 121 together constitute the receiving groove 8 .
  • the arrangement of the second hollow portion 111 and the third hollow portion 121 can not only constitute the receiving groove 8 for accommodating the MEMS chip 2 and the ASIC chip 3 , but also save the circuit manufacturing process and cost of the circuit board assembly.
  • the first circuit board 11 , the second circuit board 12 and the third circuit board 13 are bonded, fixed and electrically connected.
  • the first circuit board 11 , the second circuit board 12 , and the third circuit board 13 may be electrically connected through a conductive material, and the conductive material may be conductive glue, conductive solder paste, or other conductive materials, which are not covered in this embodiment. It is limited as long as the electrical connection between the first circuit board 11 , the second circuit board 12 and the third circuit board 13 can be realized.
  • the MEMS chip 2 and the ASIC chip 3 are bonded and fixed to the metal cover plate 4 .
  • the MEMS chip 2 and the ASIC chip 3 can be connected to the circuit board assembly 1 through wires. Since the MEMS chip 2 and the ASIC chip 3 are electrically connected to the circuit board assembly 1 respectively, the MEMS chip 2 and the ASIC chip 3 are electrically connected to each other.
  • the ASIC chip 3 can receive the signal of the MEMS chip 2, of course, in other possible implementations, the MEMS chip 2 and the ASIC chip 3 can also be directly electrically connected through wires.
  • the thickness of the metal cover plate 4 in this embodiment is relatively thin, and its thickness is smaller than the thicknesses of the first circuit board 11 , the second circuit board 12 and the third circuit board 13 , thereby further reducing the thickness of the bone conduction microphone.
  • the vibration component 5 of this embodiment includes a bone conduction shell 51 which is covered on the side of the base plate 6 away from the circuit board assembly 1 to receive external vibration, and is sandwiched between the bone conduction shell 51 and the base plate 6 .
  • the vibrating membrane 52 in between and the mass block 53 fixed on the vibrating membrane 52 .
  • the mass 53 responds to the vibration After the signal, the relative MEMS chip 2 is displaced, so that the gas in the cavity between the MEMS chip 2 and the mass 53 is compressed and stretched, the pressure changes periodically, and the changed pressure signal is picked up by the MEMS chip 2 and converted into an electrical signal , the ASIC chip 3 further amplifies the signal and realizes the transmission of sound.
  • the MEMS chip 2 of this embodiment has a through hole 211 facing the substrate 6 , the through hole 211 is opposite to the acoustic hole 41 , the diameter of the acoustic hole 41 is smaller than that of the through hole 211 , and the acoustic hole 41 is directly opposite to the through hole 211 , which can make the MEMS chip 2 have a better effect of picking up the pressure signal.
  • the mass block 53 in this embodiment is fixed on the side of the diaphragm 52 away from the metal cover plate 4 .
  • the bone conduction shell 51 and the diaphragm 52 are enclosed to form an accommodating space 7 for accommodating the mass block 53 .
  • the height of the accommodating space 7 should be greater than the thickness dimension of the mass block 53 to avoid affecting the vibration of the mass block 53 .
  • the bone conduction shell 51 can also protect the internal structure of the bone conduction microphone, and the peripheral wall of the bone conduction shell 51 is flush with the edge of the circuit board assembly 1 , so that the bone conduction microphone is overall balanced and stable, and is more beautiful.
  • a layer of metal cover plate 4 is stacked on the circuit board assembly 1 , and the top surface 112 of the circuit board assembly 1 is recessed in the direction away from the metal cover plate 4 to form a receiving groove 8 .
  • the chip 2 and the ASIC chip 3 are fixed in the receiving groove 8.
  • the thickness of the circuit board assembly 1 includes the thickness of the MEMS chip 2 and the ASIC chip 3, the MEMS chip 2 and the ASIC chip 3 do not occupy another area. Therefore, the thickness of the bone conduction microphone can be reduced by about 0.1mm, which is conducive to the miniaturization of the product.
  • the vibration component 5 vibrates in response to the vibration signal, so that the gas in the cavity between the MEMS chip 2 and the vibration component 5 is compressed and stretched , the pressure changes periodically, the changed pressure signal is picked up by the MEMS chip and converted into an electrical signal, and the ASIC chip 3 further amplifies the signal to realize the transmission of sound.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)

Abstract

Provided is a bone conduction microphone. The bone conduction microphone comprises a circuit board assembly, a vibration assembly fixed to the circuit board assembly, a MEMS chip electrically connected to the circuit board assembly and provided with a back cavity, and an ASIC chip electrically connected to the circuit board assembly; and same further comprises a metal cover plate stacked on the circuit board assembly. The circuit board assembly comprises a top face attached to the metal cover plate and an accommodating recess provided in the top face and recessed in the direction away from the metal cover plate, and the metal cover plate is fixed between the vibration assembly and the circuit board assembly; the MEMS chip and the ASIC chip are fixed on the metal cover plate, and the MEMS chip and the ASIC chip are positioned in the accommodating recess; and a sound hole which is in communication with the back cavity is provided in the metal cover plate in a penetrating manner. The present disclosure can reduce the thickness of a bone conduction microphone by approximately 0.1 mm, and facilitates the miniaturization of products.

Description

一种骨传导麦克风A bone conduction microphone 技术领域technical field
本实用新型属于麦克风技术领域,尤其涉及一种骨传导麦克风。The utility model belongs to the technical field of microphones, in particular to a bone conduction microphone.
背景技术Background technique
随着科技的进步,市面上出现一种利用骨传导方式实现声音传播的麦克风,在嘈杂的环境中实现清晰的声音还原,避免空气传播声音所产生的噪声干扰,极高地保证声音质量。相关技术中,骨传导麦克风的MEMS芯片是贴设在线路板上的,由于线路板本身就具有较大的厚度,因此导致麦克风整体占据较大的空间。With the advancement of science and technology, there is a microphone on the market that uses bone conduction to realize sound transmission, which can achieve clear sound restoration in a noisy environment, avoid noise interference caused by air-borne sound, and ensure high sound quality. In the related art, the MEMS chip of the bone conduction microphone is attached to the circuit board. Since the circuit board itself has a large thickness, the microphone as a whole occupies a large space.
技术问题technical problem
本实用新型的目的在于提供一种骨传导麦克风,旨在减小骨传导麦克风的尺寸。The purpose of the present invention is to provide a bone conduction microphone, which aims to reduce the size of the bone conduction microphone.
技术解决方案technical solutions
本实用新型的技术方案如下:一种骨传导麦克风,包括线路板组件、与所述线路板组件固定的振动组件、以及与所述线路板组件电连接且具有背腔的MEMS芯片以及与所述线路板组件电连接的ASIC芯片,所述骨传导麦克风还包括叠设于所述线路板组件上的金属盖板,所述线路板组件包括与所述金属盖板贴合的顶面以及开设在所述顶面且朝远离所述金属盖板方向凹陷的收容槽,所述金属盖板固定于所述振动组件与所述线路板组件之间;所述MEMS芯片和所述ASIC芯片固定在所述金属盖板上且所述MEMS芯片和所述ASIC芯片位于所述收容槽内;所述金属盖板上贯穿开设有与所述背腔连通的声孔,所述振动组件设置于所述金属盖板远离所述背腔的一侧。The technical scheme of the present invention is as follows: a bone conduction microphone, comprising a circuit board assembly, a vibration assembly fixed to the circuit board assembly, a MEMS chip electrically connected to the circuit board assembly and having a back cavity, and a MEMS chip connected to the circuit board assembly. An ASIC chip electrically connected to a circuit board assembly, the bone conduction microphone further includes a metal cover plate stacked on the circuit board assembly, the circuit board assembly including a top surface that is attached to the metal cover plate and a The top surface is recessed in the direction away from the metal cover plate, the metal cover plate is fixed between the vibration component and the circuit board component; the MEMS chip and the ASIC chip are fixed on the the metal cover plate and the MEMS chip and the ASIC chip are located in the receiving groove; the metal cover plate is provided with an acoustic hole communicating with the back cavity, and the vibration component is arranged on the metal cover plate The cover plate is away from the side of the back cavity.
进一步地,所述骨传导麦克风还包括夹设于所述金属盖板与所述振动组件之间的基板,所述基板开设有第一镂空部,所述第一镂空部与所述声孔连通。Further, the bone conduction microphone further includes a base plate sandwiched between the metal cover plate and the vibration component, the base plate is provided with a first hollow portion, and the first hollow portion communicates with the sound hole. .
进一步地,所述线路板组件包括与所述金属盖板贴合的第一线路板、贴设在所述第一线路板远离所述金属盖板一侧的第二线路板以及贴设在所述第二线路板远离所述第一线路板一侧的第三线路板,所述第一线路板上开设有第二镂空部,所述第二线路板上开设有与所述第二镂空部连通的第三镂空部,所述第二镂空部和所述第三镂空部共同构成所述收容槽。Further, the circuit board assembly includes a first circuit board attached to the metal cover plate, a second circuit board attached to the side of the first circuit board away from the metal cover plate, and a second circuit board attached to the side of the first circuit board away from the metal cover plate. a third circuit board on the side of the second circuit board away from the first circuit board, a second hollow part is formed on the first circuit board, and a second hollow part is formed on the second circuit board The connected third hollow part, the second hollow part and the third hollow part together form the receiving groove.
进一步地,所述金属盖板的厚度小于所述第一线路板、所述第二线路板以及所述第三线路板的厚度。Further, the thickness of the metal cover plate is smaller than the thicknesses of the first circuit board, the second circuit board and the third circuit board.
进一步地,所述第一线路板、所述第二线路板以及所述第三线路板之间粘接固定并电连接。Further, the first circuit board, the second circuit board and the third circuit board are bonded, fixed and electrically connected.
进一步地,所述MEMS芯片和所述ASIC芯片与所述金属盖板粘接固定。Further, the MEMS chip and the ASIC chip are bonded and fixed to the metal cover plate.
进一步地,所述振动组件包括盖设于所述基板远离所述线路板组件一侧的接收外部振动的骨传导外壳、夹设于所述骨传导外壳与所述基板之间的振膜以及固定在所述振膜上的质量块。Further, the vibration assembly includes a bone conduction shell covering the side of the base plate away from the circuit board assembly to receive external vibration, a vibration membrane sandwiched between the bone conduction shell and the base plate, and a fixed Mass on the diaphragm.
进一步地,所述MEMS芯片具有朝向所述基板并与所述背腔连通的通孔,所述通孔与所述声孔相对且所述声孔的孔径小于通孔的孔径。Further, the MEMS chip has a through hole facing the substrate and communicating with the back cavity, the through hole is opposite to the acoustic hole and the diameter of the acoustic hole is smaller than that of the through hole.
进一步地,所述声孔与所述通孔正对。Further, the acoustic hole is directly opposite to the through hole.
进一步地,所述质量块固定在所述振膜的远离所述金属盖板一侧。Further, the mass block is fixed on the side of the diaphragm away from the metal cover plate.
有益效果beneficial effect
本实用新型的有益效果在于:本实用新型的骨传导麦克风,在线路板组件上叠设一层金属盖板,并且线路板组件顶面朝远离金属盖板方向凹陷形成收容槽, MEMS芯片和ASIC芯片固定在收容槽内,相较于相关技术,由于线路板组件的厚度包含了MEMS芯片和ASIC芯片的厚度,因此MEMS芯片和ASIC芯片没有占据另外的厚度,因此可缩小骨传导麦克风的厚度尺寸,降低约0.1mm的厚度尺寸,有利于实现产品的小型化;当通过骨头传播的振动信号传递至骨传导麦克风时,振动组件响应于振动信号后发生振动,从而使得MEMS芯片与振动组件之间的腔体内的气体被压缩和拉伸,压强发生周期变化,变化的压强信号被MEMS芯片拾取,转化为电信号,ASIC芯片3进一步将信号进行放大,实现了声音的传播。The beneficial effects of the present invention are as follows: in the bone conduction microphone of the present invention, a layer of metal cover plate is stacked on the circuit board assembly, and the top surface of the circuit board assembly is recessed toward the direction away from the metal cover plate to form a receiving groove, the MEMS chip and the ASIC The chip is fixed in the receiving slot. Compared with the related art, since the thickness of the circuit board assembly includes the thickness of the MEMS chip and the ASIC chip, the MEMS chip and the ASIC chip do not occupy another thickness, so the thickness of the bone conduction microphone can be reduced. , reducing the thickness of about 0.1mm, which is conducive to the miniaturization of products; when the vibration signal transmitted through the bone is transmitted to the bone conduction microphone, the vibration component vibrates in response to the vibration signal, so that the gap between the MEMS chip and the vibration component The gas in the cavity is compressed and stretched, and the pressure changes periodically. The changed pressure signal is picked up by the MEMS chip and converted into an electrical signal. The ASIC chip 3 further amplifies the signal to realize the transmission of sound.
附图说明Description of drawings
图1是本实用新型实施例提供的骨传导麦克风的整体结构示意图;1 is a schematic diagram of the overall structure of a bone conduction microphone provided by an embodiment of the present invention;
图2是本实用新型实施例提供的骨传导麦克风的分解结构示意图;2 is a schematic diagram of an exploded structure of a bone conduction microphone provided by an embodiment of the present invention;
图3是图1 A-A方向的剖视示意图。FIG. 3 is a schematic cross-sectional view in the direction A-A of FIG. 1 .
本发明的实施方式Embodiments of the present invention
下面结合附图和实施方式对本实用新型作进一步说明。The present utility model will be further described below with reference to the accompanying drawings and embodiments.
实施例:Example:
请参阅图1至图3,为本实用新型实施例提供的一种骨传导麦克风,包括线路板组件1、与线路板组件1固定的振动组件5、以及与线路板组件1电连接且具有背腔21的MEMS芯片2以及与线路板组件1电连接的ASIC芯片3。Referring to FIGS. 1 to 3 , a bone conduction microphone provided by an embodiment of the present invention includes a circuit board assembly 1 , a vibration assembly 5 fixed to the circuit board assembly 1 , and a vibration assembly 5 that is electrically connected to the circuit board assembly 1 and has a back The MEMS chip 2 of the cavity 21 and the ASIC chip 3 electrically connected to the circuit board assembly 1 .
如图2和图3所示,本实施例的骨传导麦克风还包括叠设于线路板组件1上的金属盖板4,线路板组件1包括与金属盖板4贴合的顶面112以及开设在顶面112且朝远离金属盖板4方向凹陷的收容槽8,金属盖板4固定于振动组件5与线路板组件1之间,MEMS芯片2和ASIC芯片3固定在金属盖板4上且MEMS芯片2和ASIC芯片3位于收容槽8内,金属盖板4上贯穿开设有与背腔21连通的声孔41。As shown in FIG. 2 and FIG. 3 , the bone conduction microphone of this embodiment further includes a metal cover 4 stacked on the circuit board assembly 1 , and the circuit board On the top surface 112 and the receiving groove 8 recessed in the direction away from the metal cover plate 4, the metal cover plate 4 is fixed between the vibration component 5 and the circuit board component 1, the MEMS chip 2 and the ASIC chip 3 are fixed on the metal cover plate 4 and The MEMS chip 2 and the ASIC chip 3 are located in the receiving groove 8 , and an acoustic hole 41 communicating with the back cavity 21 is formed through the metal cover plate 4 .
本实用新型的骨传导麦克风,在线路板组件1上叠设一层金属盖板4,并且线路板组件1顶面112朝远离金属盖板4方向凹陷形成收容槽8, MEMS芯片2和ASIC芯片3固定在收容槽8内,相较于相关技术,由于线路板组件1的厚度包含了MEMS芯片2和ASIC芯片3的厚度,因此MEMS芯片2和ASIC芯片3没有占据另外的厚度,因此可缩小骨传导麦克风的厚度尺寸,降低约0.1mm的厚度尺寸,有利于实现产品的小型化。当通过骨头传播的振动信号传递至本实用新型的骨传导麦克风时,振动组件5响应于振动信号后发生振动,从而使得MEMS芯片2与振动组件5之间的腔体内的气体被压缩和拉伸,压强发生周期变化,变化的压强信号被MEMS芯片拾取,转化为电信号,ASIC芯片3进一步将信号进行放大,实现了声音的传播。In the bone conduction microphone of the present invention, a layer of metal cover plate 4 is stacked on the circuit board assembly 1, and the top surface 112 of the circuit board assembly 1 is recessed in the direction away from the metal cover plate 4 to form a receiving groove 8, a MEMS chip 2 and an ASIC chip 3 is fixed in the receiving groove 8. Compared with the related art, since the thickness of the circuit board assembly 1 includes the thickness of the MEMS chip 2 and the ASIC chip 3, the MEMS chip 2 and the ASIC chip 3 do not occupy another thickness, so it can be reduced The thickness dimension of the bone conduction microphone is reduced by about 0.1mm, which is conducive to the miniaturization of the product. When the vibration signal transmitted through the bone is transmitted to the bone conduction microphone of the present invention, the vibration component 5 vibrates in response to the vibration signal, so that the gas in the cavity between the MEMS chip 2 and the vibration component 5 is compressed and stretched , the pressure changes periodically, the changed pressure signal is picked up by the MEMS chip and converted into an electrical signal, and the ASIC chip 3 further amplifies the signal to realize the transmission of sound.
具体的,本实施例的骨传导麦克风还包括夹设于金属盖板4与振动组件5之间的基板6,基板6开设有第一镂空部61,第一镂空部61与声孔41连通,即第一镂空部61、声孔41以及背腔21三者相互连通。Specifically, the bone conduction microphone of this embodiment further includes a base plate 6 sandwiched between the metal cover plate 4 and the vibration component 5 , the base plate 6 is provided with a first hollow portion 61 , and the first hollow portion 61 communicates with the sound hole 41 . That is, the first hollow portion 61 , the sound hole 41 and the back cavity 21 are communicated with each other.
具体的,线路板组件1包括与金属盖板4贴合的第一线路板11、贴设在第一线路板11远离金属盖板4一侧的第二线路板12以及贴设在第二线路板12远离第一线路板11一侧的第三线路板13,第一线路板11上开设有第二镂空部111,第二线路板12上开设有与第二镂空部111连通的第三镂空部121,第二镂空部111和第三镂空部121共同构成收容槽8。可以理解的是,第二镂空部111和第三镂空部121的设置不仅可以构成容纳MEMS芯片2和ASIC芯片3的收容槽8,还可以节省线路板组件的电路制作工艺,节约成本。本实施例中,第一线路板11、第二线路板12以及第三线路板13之间粘接固定并电连接。具体地,第一线路板11、第二线路板12以及第三线路板13之间可以通过导电材料电连接,导电材料可以为导电胶或导电锡膏或其它导电材料,本实施例对此不做限制,只要能实现第一线路板11、第二线路板12以及第三线路板13之间的电连接即可。Specifically, the circuit board assembly 1 includes a first circuit board 11 attached to the metal cover plate 4 , a second circuit board 12 attached to the side of the first circuit board 11 away from the metal cover plate 4 , and a second circuit board attached to the second circuit A third circuit board 13 on the side of the board 12 away from the first circuit board 11 . The first circuit board 11 is provided with a second hollow portion 111 , and the second circuit board 12 is provided with a third hollow portion communicating with the second hollow portion 111 . part 121 , the second hollow part 111 and the third hollow part 121 together constitute the receiving groove 8 . It can be understood that the arrangement of the second hollow portion 111 and the third hollow portion 121 can not only constitute the receiving groove 8 for accommodating the MEMS chip 2 and the ASIC chip 3 , but also save the circuit manufacturing process and cost of the circuit board assembly. In this embodiment, the first circuit board 11 , the second circuit board 12 and the third circuit board 13 are bonded, fixed and electrically connected. Specifically, the first circuit board 11 , the second circuit board 12 , and the third circuit board 13 may be electrically connected through a conductive material, and the conductive material may be conductive glue, conductive solder paste, or other conductive materials, which are not covered in this embodiment. It is limited as long as the electrical connection between the first circuit board 11 , the second circuit board 12 and the third circuit board 13 can be realized.
另外,MEMS芯片2和ASIC芯片3与金属盖板4粘接固定。本实施方式中, MEMS芯片2和ASIC芯片3可以通过引线与线路板组件1连接,由于MEMS芯片2和ASIC芯片3分别与线路板组件1电连接,由此使得MEMS芯片2与ASIC芯片3之间电连接,ASIC芯片3可接收MEMS芯片2的信号,当然,在其他可能的实施方式中,MEMS芯片2和ASIC芯片3也可以通过引线直接电连接。本实施例的金属盖板4的厚度较薄,其厚度小于第一线路板11、第二线路板12以及第三线路板13的厚度,从而进一步缩小骨传导麦克风的厚度尺寸。In addition, the MEMS chip 2 and the ASIC chip 3 are bonded and fixed to the metal cover plate 4 . In this embodiment, the MEMS chip 2 and the ASIC chip 3 can be connected to the circuit board assembly 1 through wires. Since the MEMS chip 2 and the ASIC chip 3 are electrically connected to the circuit board assembly 1 respectively, the MEMS chip 2 and the ASIC chip 3 are electrically connected to each other. The ASIC chip 3 can receive the signal of the MEMS chip 2, of course, in other possible implementations, the MEMS chip 2 and the ASIC chip 3 can also be directly electrically connected through wires. The thickness of the metal cover plate 4 in this embodiment is relatively thin, and its thickness is smaller than the thicknesses of the first circuit board 11 , the second circuit board 12 and the third circuit board 13 , thereby further reducing the thickness of the bone conduction microphone.
如图2和图3所示,本实施例的振动组件5包括盖设于基板6远离线路板组件1一侧的接收外部振动的骨传导外壳51、夹设于骨传导外壳51与基板6之间的振膜52以及固定在振膜52上的质量块53。由于MEMS芯片2的背腔21通过金属盖板4上的声孔41与基板6的第一镂空部61连通,当通过骨头传播的振动信号传递至骨传导外壳51时,质量块53响应于振动信号后相对MEMS芯片2发生位移,从而使得MEMS芯片2与质量块53之间的腔体内的气体被压缩和拉伸,压强发生周期变化,变化的压强信号被MEMS芯片2拾取,转化为电信号,ASIC芯片3进一步将信号进行放大,实现了声音的传播。As shown in FIG. 2 and FIG. 3 , the vibration component 5 of this embodiment includes a bone conduction shell 51 which is covered on the side of the base plate 6 away from the circuit board assembly 1 to receive external vibration, and is sandwiched between the bone conduction shell 51 and the base plate 6 . The vibrating membrane 52 in between and the mass block 53 fixed on the vibrating membrane 52 . Since the back cavity 21 of the MEMS chip 2 communicates with the first hollow portion 61 of the base plate 6 through the acoustic hole 41 on the metal cover plate 4 , when the vibration signal propagated through the bone is transmitted to the bone conduction shell 51 , the mass 53 responds to the vibration After the signal, the relative MEMS chip 2 is displaced, so that the gas in the cavity between the MEMS chip 2 and the mass 53 is compressed and stretched, the pressure changes periodically, and the changed pressure signal is picked up by the MEMS chip 2 and converted into an electrical signal , the ASIC chip 3 further amplifies the signal and realizes the transmission of sound.
进一步地,本实施例的MEMS芯片2具有朝向基板6的通孔211,通孔211与声孔41相对且声孔41的孔径小于通孔211的孔径,并且声孔41与通孔211正对,可以使得MEMS芯片2拾取压强信号的效果更好。另外,本实施例的质量块53固定在振膜52的远离金属盖板4一侧。本实施例的骨传导外壳51与振膜52合围形成容置质量块53的容置空间7,该容置空间7的高度应该大于质量块53的厚度尺寸,避免对质量块53的振动造成影响。骨传导外壳51还可起到保护骨传导麦克风内部结构的作用,并且骨传导外壳51的周壁与线路板组件1的边缘平齐,使得骨传导麦克风整体均衡稳定,也更加美观。Further, the MEMS chip 2 of this embodiment has a through hole 211 facing the substrate 6 , the through hole 211 is opposite to the acoustic hole 41 , the diameter of the acoustic hole 41 is smaller than that of the through hole 211 , and the acoustic hole 41 is directly opposite to the through hole 211 , which can make the MEMS chip 2 have a better effect of picking up the pressure signal. In addition, the mass block 53 in this embodiment is fixed on the side of the diaphragm 52 away from the metal cover plate 4 . In this embodiment, the bone conduction shell 51 and the diaphragm 52 are enclosed to form an accommodating space 7 for accommodating the mass block 53 . The height of the accommodating space 7 should be greater than the thickness dimension of the mass block 53 to avoid affecting the vibration of the mass block 53 . . The bone conduction shell 51 can also protect the internal structure of the bone conduction microphone, and the peripheral wall of the bone conduction shell 51 is flush with the edge of the circuit board assembly 1 , so that the bone conduction microphone is overall balanced and stable, and is more beautiful.
综上所述,本实用新型的骨传导麦克风,在线路板组件1上叠设一层金属盖板4,并且线路板组件1顶面112朝远离金属盖板4方向凹陷形成收容槽8, MEMS芯片2和ASIC芯片3固定在收容槽8内,相较于相关技术,由于线路板组件1的厚度包含了MEMS芯片2和ASIC芯片3的厚度,因此MEMS芯片2和ASIC芯片3没有占据另外的厚度,因此可缩小骨传导麦克风的厚度尺寸,降低约0.1mm的厚度尺寸,有利于实现产品的小型化。当通过骨头传播的振动信号传递至本实用新型的骨传导麦克风时,振动组件5响应于振动信号后发生振动,从而使得MEMS芯片2与振动组件5之间的腔体内的气体被压缩和拉伸,压强发生周期变化,变化的压强信号被MEMS芯片拾取,转化为电信号,ASIC芯片3进一步将信号进行放大,实现了声音的传播。To sum up, in the bone conduction microphone of the present invention, a layer of metal cover plate 4 is stacked on the circuit board assembly 1 , and the top surface 112 of the circuit board assembly 1 is recessed in the direction away from the metal cover plate 4 to form a receiving groove 8 . The chip 2 and the ASIC chip 3 are fixed in the receiving groove 8. Compared with the related art, since the thickness of the circuit board assembly 1 includes the thickness of the MEMS chip 2 and the ASIC chip 3, the MEMS chip 2 and the ASIC chip 3 do not occupy another area. Therefore, the thickness of the bone conduction microphone can be reduced by about 0.1mm, which is conducive to the miniaturization of the product. When the vibration signal transmitted through the bone is transmitted to the bone conduction microphone of the present invention, the vibration component 5 vibrates in response to the vibration signal, so that the gas in the cavity between the MEMS chip 2 and the vibration component 5 is compressed and stretched , the pressure changes periodically, the changed pressure signal is picked up by the MEMS chip and converted into an electrical signal, and the ASIC chip 3 further amplifies the signal to realize the transmission of sound.
以上所述的仅是本实用新型的实施方式,在此应当指出,对于本领域的普通技术人员来说,在不脱离本实用新型创造构思的前提下,还可以做出改进,但这些均属于本实用新型的保护范围。The above are only the embodiments of the present utility model. It should be pointed out that for those of ordinary skill in the art, improvements can be made without departing from the inventive concept of the present utility model, but these belong to The scope of protection of the utility model.

Claims (10)

  1. 一种骨传导麦克风,包括线路板组件、与所述线路板组件固定的振动组件、以及与所述线路板组件电连接且具有背腔的MEMS芯片以及与所述线路板组件电连接的ASIC芯片,其特征在于:所述骨传导麦克风还包括叠设于所述线路板组件上的金属盖板,所述线路板组件包括与所述金属盖板贴合的顶面以及自所述顶面且朝远离所述金属盖板方向凹陷的收容槽,所述金属盖板固定于所述振动组件与所述线路板组件之间;所述MEMS芯片和所述ASIC芯片固定在所述金属盖板上且所述MEMS芯片和所述ASIC芯片位于所述收容槽内;所述金属盖板上贯穿开设有与所述背腔连通的声孔,所述振动组件设置于所述金属盖板远离所述背腔的一侧。A bone conduction microphone, comprising a circuit board assembly, a vibration assembly fixed to the circuit board assembly, a MEMS chip electrically connected to the circuit board assembly and having a back cavity, and an ASIC chip electrically connected to the circuit board assembly , characterized in that: the bone conduction microphone further includes a metal cover plate stacked on the circuit board assembly, and the circuit board assembly includes a top surface attached to the metal cover plate and a a receiving groove recessed in the direction away from the metal cover plate, the metal cover plate is fixed between the vibration component and the circuit board component; the MEMS chip and the ASIC chip are fixed on the metal cover plate and the MEMS chip and the ASIC chip are located in the receiving groove; the metal cover plate is provided with a sound hole communicating with the back cavity, and the vibration component is arranged on the metal cover plate away from the side of the back cavity.
  2. 根据权利要求1所述的骨传导麦克风,其特征在于,所述骨传导麦克风还包括夹设于所述金属盖板与所述振动组件之间的基板,所述基板开设有第一镂空部,所述第一镂空部与所述声孔连通。The bone conduction microphone according to claim 1, wherein the bone conduction microphone further comprises a base plate sandwiched between the metal cover plate and the vibration component, the base plate is provided with a first hollow portion, The first hollow portion communicates with the sound hole.
  3. 根据权利要求1所述的骨传导麦克风,其特征在于,所述线路板组件包括与所述金属盖板贴合的第一线路板、贴设在所述第一线路板远离所述金属盖板一侧的第二线路板以及贴设在所述第二线路板远离所述第一线路板一侧的第三线路板,所述第一线路板上开设有第二镂空部,所述第二线路板上开设有与所述第二镂空部连通的第三镂空部,所述第二镂空部和所述第三镂空部共同构成所述收容槽。The bone conduction microphone according to claim 1, wherein the circuit board assembly comprises a first circuit board attached to the metal cover, and a first circuit board attached to the first circuit board away from the metal cover A second circuit board on one side and a third circuit board attached to the side of the second circuit board away from the first circuit board, the first circuit board is provided with a second hollow portion, the second circuit board is A third hollow portion communicated with the second hollow portion is formed on the circuit board, and the second hollow portion and the third hollow portion together form the receiving groove.
  4. 根据权利要求3所述的骨传导麦克风,其特征在于,所述金属盖板的厚度小于所述第一线路板、所述第二线路板以及所述第三线路板的厚度。The bone conduction microphone according to claim 3, wherein the thickness of the metal cover plate is smaller than the thicknesses of the first circuit board, the second circuit board and the third circuit board.
  5. 根据权利要求3所述的骨传导麦克风,其特征在于,所述第一线路板、所述第二线路板以及所述第三线路板之间粘接固定并电连接。The bone conduction microphone according to claim 3, wherein the first circuit board, the second circuit board and the third circuit board are adhesively fixed and electrically connected.
  6. 根据权利要求1所述的骨传导麦克风,其特征在于,所述MEMS芯片和所述ASIC芯片与所述金属盖板粘接固定。The bone conduction microphone according to claim 1, wherein the MEMS chip and the ASIC chip are bonded and fixed to the metal cover plate.
  7. 根据权利要求2所述的骨传导麦克风,其特征在于,所述振动组件包括盖设于所述基板远离所述线路板组件一侧的接收外部振动的骨传导外壳、夹设于所述骨传导外壳与所述基板之间的振膜以及固定在所述振膜上的质量块。The bone conduction microphone according to claim 2, wherein the vibration component comprises a bone conduction shell which is covered on the side of the base plate away from the circuit board component and receives external vibration, and is sandwiched between the bone conduction shell. A vibrating membrane between the casing and the base plate and a mass block fixed on the vibrating membrane.
  8. 根据权利要求7所述的骨传导麦克风,其特征在于,所述MEMS芯片具有朝向所述基板并与所述背腔连通的通孔,所述通孔与所述声孔相对且所述声孔的孔径小于所述通孔的孔径。The bone conduction microphone according to claim 7, wherein the MEMS chip has a through hole facing the substrate and communicating with the back cavity, the through hole is opposite to the acoustic hole and the acoustic hole The pore size is smaller than the pore size of the through hole.
  9. 根据权利要求8所述的骨传导麦克风,其特征在于,所述声孔与所述通孔正对。The bone conduction microphone according to claim 8, wherein the sound hole is directly opposite to the through hole.
  10. 根据权利要求7所述的骨传导麦克风,其特征在于,所述质量块固定在所述振膜的远离所述金属盖板一侧。The bone conduction microphone according to claim 7, wherein the mass block is fixed on a side of the diaphragm away from the metal cover.
PCT/CN2020/120595 2020-09-25 2020-10-13 Bone conduction microphone WO2022061979A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180063645A1 (en) * 2016-08-30 2018-03-01 Lingsen Precision Industries, Ltd. Mems microphone package
CN209314103U (en) * 2019-03-27 2019-08-27 歌尔科技有限公司 Vibrating sensor and audio frequency apparatus
CN110300364A (en) * 2019-07-18 2019-10-01 东莞市瑞勤电子有限公司 Bone conduction silicon microphone
CN111131988A (en) * 2019-12-30 2020-05-08 歌尔股份有限公司 Vibration sensor and audio device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180063645A1 (en) * 2016-08-30 2018-03-01 Lingsen Precision Industries, Ltd. Mems microphone package
CN209314103U (en) * 2019-03-27 2019-08-27 歌尔科技有限公司 Vibrating sensor and audio frequency apparatus
CN110300364A (en) * 2019-07-18 2019-10-01 东莞市瑞勤电子有限公司 Bone conduction silicon microphone
CN111131988A (en) * 2019-12-30 2020-05-08 歌尔股份有限公司 Vibration sensor and audio device

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