CN111130492B - 悬翼结构具有角部的体声波谐振器、滤波器及电子设备 - Google Patents
悬翼结构具有角部的体声波谐振器、滤波器及电子设备 Download PDFInfo
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- CN111130492B CN111130492B CN201911424760.4A CN201911424760A CN111130492B CN 111130492 B CN111130492 B CN 111130492B CN 201911424760 A CN201911424760 A CN 201911424760A CN 111130492 B CN111130492 B CN 111130492B
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- 238000010897 surface acoustic wave method Methods 0.000 description 2
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (15)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911424760.4A CN111130492B (zh) | 2019-12-31 | 2019-12-31 | 悬翼结构具有角部的体声波谐振器、滤波器及电子设备 |
PCT/CN2020/088730 WO2021135020A1 (zh) | 2019-12-31 | 2020-05-06 | 悬翼结构具有角部的体声波谐振器、滤波器及电子设备 |
Applications Claiming Priority (1)
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CN201911424760.4A CN111130492B (zh) | 2019-12-31 | 2019-12-31 | 悬翼结构具有角部的体声波谐振器、滤波器及电子设备 |
Publications (2)
Publication Number | Publication Date |
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CN111130492A CN111130492A (zh) | 2020-05-08 |
CN111130492B true CN111130492B (zh) | 2021-06-01 |
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CN201911424760.4A Active CN111130492B (zh) | 2019-12-31 | 2019-12-31 | 悬翼结构具有角部的体声波谐振器、滤波器及电子设备 |
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CN (1) | CN111130492B (zh) |
WO (1) | WO2021135020A1 (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101689845A (zh) * | 2007-07-13 | 2010-03-31 | 富士通株式会社 | 压电薄膜共振元件以及利用它的电路部件 |
JP2010087577A (ja) * | 2008-09-29 | 2010-04-15 | Kyocera Corp | 薄膜圧電共振器の製造方法 |
CN101841313A (zh) * | 2009-03-19 | 2010-09-22 | 太阳诱电株式会社 | 压电薄膜谐振器、滤波器、通信模块和通信装置 |
CN108123695A (zh) * | 2016-11-30 | 2018-06-05 | 三星电机株式会社 | 体声波谐振器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8902023B2 (en) * | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
US9520856B2 (en) * | 2009-06-24 | 2016-12-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
US8248185B2 (en) * | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
US8692631B2 (en) * | 2009-10-12 | 2014-04-08 | Hao Zhang | Bulk acoustic wave resonator and method of fabricating same |
US9203374B2 (en) * | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
US9401691B2 (en) * | 2014-04-30 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator device with air-ring and temperature compensating layer |
US10873316B2 (en) * | 2017-03-02 | 2020-12-22 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method of manufacturing the same |
-
2019
- 2019-12-31 CN CN201911424760.4A patent/CN111130492B/zh active Active
-
2020
- 2020-05-06 WO PCT/CN2020/088730 patent/WO2021135020A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101689845A (zh) * | 2007-07-13 | 2010-03-31 | 富士通株式会社 | 压电薄膜共振元件以及利用它的电路部件 |
JP2010087577A (ja) * | 2008-09-29 | 2010-04-15 | Kyocera Corp | 薄膜圧電共振器の製造方法 |
CN101841313A (zh) * | 2009-03-19 | 2010-09-22 | 太阳诱电株式会社 | 压电薄膜谐振器、滤波器、通信模块和通信装置 |
CN108123695A (zh) * | 2016-11-30 | 2018-06-05 | 三星电机株式会社 | 体声波谐振器 |
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Publication number | Publication date |
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WO2021135020A1 (zh) | 2021-07-08 |
CN111130492A (zh) | 2020-05-08 |
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Denomination of invention: Bulk acoustic wave resonator, filter and electronic equipment with corner of suspended wing structure Effective date of registration: 20210908 Granted publication date: 20210601 Pledgee: Tianjin TEDA Haihe intelligent manufacturing industry development fund partnership (L.P.) Pledgor: ROFS MICROSYSTEM(TIANJIN) Co.,Ltd. Registration number: Y2021980009022 |
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