CN111118476B - Special gas pipeline - Google Patents
Special gas pipeline Download PDFInfo
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- CN111118476B CN111118476B CN202010083929.0A CN202010083929A CN111118476B CN 111118476 B CN111118476 B CN 111118476B CN 202010083929 A CN202010083929 A CN 202010083929A CN 111118476 B CN111118476 B CN 111118476B
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- 230000000903 blocking effect Effects 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 24
- 239000013049 sediment Substances 0.000 claims description 20
- 210000000621 bronchi Anatomy 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000002035 prolonged effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 73
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Pipeline Systems (AREA)
Abstract
The invention discloses a special gas pipeline, which comprises: the special gas hole of anti-blocking loudspeaker is prevented to air supply pipe, a plurality of groups, prevent blocking loudspeaker special gas hole evenly set up in on the air supply pipe wall, anti-blocking loudspeaker special gas hole includes: the outer cover and the horn-shaped special air hole are arranged in the outer cover, the lower air inlet of the horn-shaped special air hole is connected with the air supply pipe wall, and the side wall of the upper air outlet of the horn-shaped special air hole is tangentially connected with the side wall of the opening of the outer cover; the problem that the special air holes of the special air pipeline are easy to block is effectively avoided, the blocking period of the special air pipeline is reduced, the service life of the special air pipeline is prolonged, the generation cost of the special air pipeline is reduced, and the productivity loss of a production line is reduced.
Description
Technical Field
The invention relates to the technical field of solar cells, in particular to a special gas pipeline.
Background
PECVD (plasma enhanced chemical vapor deposition) equipment is an important process link equipment for solar cell production, a special gas pipeline is an important component part of PECVD (plasma enhanced chemical vapor deposition) film plating equipment, process gases such as silane, ammonia, trimethylaluminum (TMA) and the like are conveyed through the special gas pipeline in the production process, the size and uniformity of special gas holes in the continuous production process are continuously consistent, the distribution of gas in a process cavity is directly influenced, and whether the distribution of the special gas holes is uniform or not determines the quality and the uniformity of appearance color of a film plating.
The existing special gas pipeline is characterized in that holes with the same size are directly punched on the pipeline and uniformly distributed. The special air holes are blocked by process products (silicon nitride, aluminum oxide and the like) in every five to seven days of maintenance period, the substances blocking the special air holes are hard, the special air holes are required to be polished and cleaned by a drill, and the special air holes are easy to damage and deform after multiple times of drill polishing, so that the gas distribution is influenced, and the quality of products (crystalline silicon solar cells) is poor; according to different materials of the special gas pipeline, the special gas pipeline can be replaced every three months or six months, and the longest time is one year. Some manufacturers improve the special air holes, such as adding an annular device, adding a detachable threaded bolt and the like, but the problems of more process gas deposition, untimely cleaning of through holes, inconvenience and the like can not be solved in the actual production process, and in the actual application, the pipeline is directly perforated into the special air holes of the most common special air pipeline.
Therefore, the occurrence of a special gas pipeline is needed, the problem that special gas holes of the special gas pipeline are easy to block is effectively avoided, the blocking period of the special gas pipeline is reduced, the service life of the special gas pipeline is prolonged, the generation cost of the special gas pipeline is reduced, and the productivity loss of a production line is reduced.
Disclosure of Invention
In order to solve the technical problems, the invention provides the special gas pipeline, which effectively avoids the problem that the special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the productivity loss of a production line.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
A specialty gas circuit comprising: the special gas hole of anti-blocking loudspeaker is prevented to air supply pipe, a plurality of groups, prevent blocking loudspeaker special gas hole evenly set up in on the air supply pipe wall, anti-blocking loudspeaker special gas hole includes: the outer cover and set up in the special gas pocket of loudspeaker form in the outer cover, the below air inlet of the special gas pocket of loudspeaker form with the air supply pipe wall intercommunication is connected, the lateral wall of the top gas outlet of the special gas pocket of loudspeaker form with the opening lateral wall of outer cover is tangent to be connected.
The special gas pipeline provided by the invention effectively avoids the problem that the special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the productivity loss of a production line.
On the basis of the technical scheme, the following improvement can be made:
Preferably, the diameter of the air inlet below the horn-shaped air hole is smaller than the diameter of the air outlet above the horn-shaped air hole.
As a preferred embodiment, the method comprises: the device comprises a main air pipe, an air supply pipe and at least more than two bronchi, wherein the two bronchi are symmetrically distributed and communicated with the main air pipe, the bronchi are communicated with the air supply pipe, the anti-blocking horn special air holes are formed in the side wall of the air supply pipe and are communicated with the air supply pipe, and one special air uniformly enters the process cavity through the anti-blocking horn special air holes.
Preferably, the outer cover is any one of a cylindrical shape, a truncated cone shape, an inverted truncated cone shape and a hexagonal shape.
As a preferable scheme, the diameter of the air inlet hole below the horn-shaped special air hole is 0.1mm-2mm.
As a preferable scheme, the diameter of the upper air outlet hole of the horn-shaped special air hole is 1.5mm-5mm.
As an optimal scheme, the height of the special air hole of the anti-blocking horn is 1mm-5mm.
Preferably, the anti-blocking horn-shaped special air holes are detachably connected with the side wall of the air supply pipe.
As an optimal scheme, a sealing ring is arranged at the joint of the anti-blocking horn-shaped special air hole and the side wall of the air supply pipe.
As a preferred embodiment, the method comprises: the device comprises a sediment thickness detection sensor, a central processor and a main pipeline controller, wherein the sediment thickness detection sensor is electrically connected with the central processor, and the central processor is electrically connected with the main pipeline controller to control the special gas input or the special gas cut-off of the main pipeline.
Drawings
FIG. 1 is a block diagram of a special gas pipeline provided by an embodiment of the invention;
FIG. 2 is an enlarged block diagram of A in a special gas pipeline according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a special gas pipeline according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a specific air hole of an anti-blocking horn of a specific air pipeline according to an embodiment of the present invention;
FIG. 5 is a flow chart of a special gas pipeline according to an embodiment of the present invention;
wherein: 1. an air supply pipe, 2, a blocking-proof horn-shaped special air hole, 3, a lower air inlet of the horn-shaped special air hole, 4, an upper air outlet of the horn-shaped special air hole, 5, a housing, 6, a horn-shaped special air hole, and 7, the side wall of the air outlet above the horn-shaped special air hole is tangential to the side wall of the opening of the outer cover, 8, a main air pipe, 9, a branch air pipe and 11.
Detailed Description
The following description of the technical solutions in the embodiments of the present invention will be clear and complete, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
To achieve the object of the present invention, as shown in fig. 1 to 5, a special gas pipeline in this embodiment includes: the air supply pipe 1, a plurality of groups prevent blockking up special gas pocket 2 of loudspeaker, prevent blockking up special gas pocket 2 of loudspeaker evenly set up in on the air supply pipe 1 wall, prevent blockking up special gas pocket 2 of loudspeaker and include: the outer cover 5 and the horn-shaped special air hole 6 arranged in the outer cover, the lower air inlet 3 of the horn-shaped special air hole is communicated and connected with the wall of the air supply pipe 1, and the side wall of the upper air outlet 4 of the horn-shaped special air hole is tangentially connected with the side wall of the opening of the outer cover 5.
The special gas pipeline provided by the invention effectively avoids the problem that the special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the productivity loss of a production line.
In some embodiments, the diameter of the lower air inlet 3 of the horn vent is smaller than the diameter of the upper air outlet 4 of the horn vent.
By adopting the embodiment, the device is simple in structure and convenient to operate, the diameter of the upper air outlet 4 of the special air hole of the horn is 3mm, the diameter of the lower air inlet 3 of the special air hole of the horn is 1mm, the area of the upper air outlet 4 of the special air hole of the horn is 9 times that of the area of the lower air inlet 3 of the special air hole of the horn, and the area of the upper air outlet 4 of the special air hole of the horn is far larger than that of the lower air inlet 3 of the special air hole of the horn, so that the problem that the special air hole 2 of the horn is easy to block due to blockage of a special air pipeline is effectively avoided.
In some embodiments, comprising: the device comprises a main air pipe 8, an air supply pipe 1 and at least more than two bronchi 9, wherein the two bronchi 9 are symmetrically distributed, the main air pipe 8 is communicated with the air supply pipe 1, the anti-blocking horn special air holes 2 are formed in the side wall of the air supply pipe 1 and are communicated with the air supply pipe 1, and special air 11 uniformly enters a process cavity through the anti-blocking horn special air holes 2.
By adopting the embodiment, the device has simple structure and convenient operation, the special air pipeline is adopted to prevent blocking the horn mouth special air hole 2, in the use process, one special air pipeline only has one special air 11, the air preventing blocking the horn mouth special air hole 2 in the process is one air, the process sediment is not easy to deposit, and the blocking of the horn mouth special air hole 2 is reduced.
In some embodiments, the housing 5 is any one of cylindrical, frustoconical, inverted frustoconical, or hexagonal.
By adopting the embodiment, the air supply pipe has simple structure and convenient operation, and can be used with different structures.
In some embodiments, the diameter of the air inlet hole 3 below the trumpet-shaped special air hole is 0.1mm-2mm.
By adopting the embodiment, the anti-blocking horn special air hole 2 is simple in structure and convenient to operate, and thus the problem that the anti-blocking horn special air hole 2 of a special air pipeline is easy to block is effectively avoided.
In some embodiments, the diameter of the upper air outlet hole 4 of the trumpet-shaped special air hole is 1.5mm-5mm.
By adopting the embodiment, the anti-blocking horn special air hole 2 is simple in structure and convenient to operate, and thus the problem that the anti-blocking horn special air hole 2 of a special air pipeline is easy to block is effectively avoided.
In some embodiments, the anti-clogging flare gas orifice 2 has a height of 1mm to 5mm.
By adopting the embodiment, the anti-blocking horn special air hole 2 is simple in structure and convenient to operate, and thus the problem that the anti-blocking horn special air hole 2 of a special air pipeline is easy to block is effectively avoided.
In some embodiments, the anti-blocking trumpet-shaped special air holes 2 are detachably connected with the side wall of the air supply pipe 1.
By adopting the embodiment, the device has simple structure and convenient operation, a certain amount of sediment can be always deposited in the process of a certain period, the air supply pipe 1 is easy to damage in the process of removing the sediment by using the drill bit, and the anti-blocking horn-shaped special air hole 2 is detached in the process of cleaning the sediment to remove the sediment by using the drill bit, so that the pollution to the air supply pipe 1 can be effectively avoided.
In some embodiments, a sealing ring (not shown) is arranged at the connection part of the anti-blocking horn-shaped special air hole 2 and the side wall of the air supply pipe 1.
By adopting the embodiment, the device has simple structure and convenient operation, ensures the integral tightness of the special gas pipeline and avoids the leakage of the special gas 11.
In some embodiments, comprising: the device comprises a sediment thickness detection sensor, a central processing unit and a main pipeline controller, wherein the sediment thickness detection sensor is electrically connected with the central processing unit, and the central processing unit is electrically connected with the main pipeline controller to control the special gas input or the special gas cut-off of the main pipeline 8.
With the above embodiment, when the thickness of the deposit at the upper air outlet 4 of the horn-shaped special air hole reaches the set threshold value, the deposit thickness detection sensor changes the deposit thickness reaching the set threshold value into an electric signal, and sends the signal to the central processor, after background operation, the signal is interpreted, the signal for controlling the cut-off of the special air is generated and sent to the main pipeline controller, the air inlet of the main pipeline 8 is closed, the special air 11 is cut off and input into the main pipeline 8, the anti-blocking horn-shaped special air hole 2 is detached from the side wall of the air supply pipe 1, and the deposit at the upper air outlet 4 for cleaning the horn-shaped special air hole is removed by the drill; when the sediment thickness of the upper air outlet 4 of the horn-shaped special air hole does not reach a set threshold value, the sediment thickness detection sensor changes the sediment thickness which does not reach the set threshold value into an electric signal, and sends a signal to the central processor, after background operation, the signal is interpreted, a signal for controlling the input of special air is generated and sent to the main pipeline controller, the air inlet of the main pipeline 8 is opened, the special air 11 is input into the main pipeline 8, the special air 11 is communicated with the air supply pipe 1 through two symmetrically distributed branch air pipes 9 communicated with the main air pipe 8 and is input into the anti-blocking horn special air hole 2, and the special air 11 is uniformly input into the process cavity through the upper air outlet 4 of the horn-shaped special air hole, so that the operation is convenient, the through holes are convenient to clean in time, and the occurrence of operation accidents caused by the fact that the through holes are not cleaned in time is avoided.
The invention provides a special gas pipeline, which has the following beneficial effects:
1) The diameter of the upper air outlet of the anti-blocking horn special air hole is 3mm, the diameter of the lower air inlet of the horn special air hole is 1mm, the area of the upper air outlet of the horn special air hole is 9 times that of the lower air inlet of the horn special air hole, and the area of the upper air outlet of the horn special air hole is far larger than that of the lower air inlet of the horn special air hole, so that the problem that the horn special air hole of a special air pipeline is easy to block is effectively avoided;
2) The special gas pipeline with the horn-shaped special gas holes is adopted, one special gas pipeline only has one special gas in the use process, the gas in the anti-blocking horn special gas holes is one gas in the process, the deposition of process sediments is not easy to occur, and the blocking of the horn-shaped special gas holes is reduced; proved by practical experiments, the deposit is very little deposited on the inner wall of the horn-shaped special air hole 6, mainly deposited on the joint of the horn-shaped special air hole 6 and the outer wall of the outer cover 5, so that the horn-shaped special air hole 6 is designed to be connected with the outer wall of the outer cover 5 in a tangential manner, the step of the position of the air outlet 4 above the horn-shaped special air hole is reduced as much as possible, and the blockage of the horn-shaped special air hole 2 is reduced;
3) The period of the original special air holes passing through the drill through holes can be prolonged from 5 to 7 days in the prior art, and the period of the anti-blocking horn special air holes passing through the drill through holes is prolonged to 30 to 40 days, so that the damage to a special air pipeline is reduced;
4) After the inconsistent damage of the special air hole of the anti-blocking horn is reduced, the service life of the special air pipeline can be prolonged by 4-5 times, and the sharing cost of the special air pipeline is reduced.
As shown in fig. 4, the anti-clogging flare specific vent includes an outer cover 5 of the following different shapes: a cylindrical housing 5 (fig. 4 (b), a round table housing 5 (fig. 4 (c), a reverse round table housing 5 (fig. 4 (d)), a hexagonal housing 5 (fig. 4 (e)), a polygonal housing 5, and the like;
Although the connection between the side wall of the upper air outlet 4 of the trumpet-shaped special air hole and the side wall of the opening of the outer cover 5 in fig. 4 (f) can cause deposition of process sediment, compared with other outer covers (the side wall of the upper air outlet 4 of the trumpet-shaped special air hole is tangential to the side wall of the opening of the outer cover 5), the blocking of the upper air outlet 4 of the trumpet-shaped special air hole is accelerated, but the blocking speed of the anti-blocking trumpet-shaped special air hole in fig. 4 (f) is still 2-3 times slower than that of the existing special air hole.
The design is characterized in that the anti-blocking horn-shaped special air hole is additionally arranged outside the special air pipeline instead of directly making the horn-shaped special air hole design on the wall of the traditional special air pipeline, and mainly comprises the following reasons:
1) The special gas pipeline wall is thinner, about 1mm, and the height required by blocking the horn-shaped special air holes cannot be met;
2) The special air hole blockage is mainly caused by sediment deposition at the outlet of the special air hole, and the sediment deposition at the outlet of the special air hole can not be reduced even if the outlet is directly designed on the original special air pipeline;
3) In any mode, a certain amount of sediment is always deposited in a certain period of process, a horn mouth is directly designed on the wall of the special gas pipeline, the designed special gas hole is easy to damage in the subsequent process of removing the sediment by using a drill bit, and the gas supply pipe is polluted and damaged.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which fall within the scope of the present invention.
Claims (9)
1. A specialty gas line comprising: the special gas hole of anti-blocking loudspeaker is prevented to air supply pipe, a plurality of groups, prevent blocking loudspeaker special gas hole evenly set up in on the air supply pipe wall, anti-blocking loudspeaker special gas hole includes: the outer cover and the horn-shaped special air hole are arranged in the outer cover, the lower air inlet of the horn-shaped special air hole is communicated and connected with the air supply pipe wall, and the side wall of the upper air outlet of the horn-shaped special air hole is tangentially connected with the side wall of the opening of the outer cover; wherein,
The diameter of the air inlet below the horn special air hole is smaller than that of the air outlet above the horn special air hole.
2. The extra gas line according to claim 1, comprising: the device comprises a main air pipe, an air supply pipe and at least more than two bronchi, wherein the main air pipe is communicated with the two bronchi which are symmetrically distributed, the bronchi are communicated with the air supply pipe, the anti-blocking horn special air holes are formed in the side wall of the air supply pipe and are communicated with the air supply pipe, and special air uniformly enters the process cavity through the anti-blocking horn special air holes.
3. The extra-gas pipeline according to claim 2, wherein the outer cover is any one of cylindrical, truncated cone-shaped, inverted truncated cone-shaped or hexagonal.
4. A tertiary air duct according to claim 3, wherein the diameter of the air inlet below the trumpet-shaped tertiary air holes is 0.1mm-2mm.
5. The special gas pipeline according to claim 4, wherein the diameter of the upper gas outlet of the horn-shaped special gas hole is 1.5mm-5mm.
6. The extra-gas pipeline according to claim 5, wherein the height of the anti-clogging horn extra-gas hole is 1mm-5mm.
7. The extra-gas pipeline according to claim 6 wherein the anti-clogging trumpet-shaped extra-gas hole is detachably connected to the side wall of the gas supply pipe.
8. The extra-gas pipeline according to claim 7, wherein a sealing ring is arranged at the joint of the anti-blocking horn-shaped extra-gas hole and the side wall of the gas supply pipe.
9. The extra gas pipeline according to claim 8, comprising: the device comprises a sediment thickness detection sensor, a central processor and a main pipeline controller, wherein the sediment thickness detection sensor is electrically connected with the central processor, and the central processor is electrically connected with the main pipeline controller to control the special gas input or the special gas cut-off of the main pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010083929.0A CN111118476B (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010083929.0A CN111118476B (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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| CN111118476A CN111118476A (en) | 2020-05-08 |
| CN111118476B true CN111118476B (en) | 2024-08-13 |
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| CN202010083929.0A Active CN111118476B (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212025453U (en) * | 2020-02-10 | 2020-11-27 | 江苏科来材料科技有限公司 | Special gas pipeline |
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| JP4929727B2 (en) * | 2005-02-14 | 2012-05-09 | 東洋製罐株式会社 | Gas supply pipe for plasma processing |
| KR100982987B1 (en) * | 2008-04-18 | 2010-09-17 | 삼성엘이디 주식회사 | Apparatus for chemical vapor deposition |
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| CN202688437U (en) * | 2012-07-18 | 2013-01-23 | 保定天威英利新能源有限公司 | Special gas pipeline and hot-line plasma enhanced chemical vapor deposition equipment with same |
| CN102978587B (en) * | 2012-12-12 | 2014-07-23 | 英利能源（中国）有限公司 | Novel flat type PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment and gas channel connecting hole structure thereof |
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| CN203639548U (en) * | 2013-12-31 | 2014-06-11 | 英利能源（中国）有限公司 | Flat-plate type PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment and gas path device thereof |
| CN203923369U (en) * | 2014-06-12 | 2014-11-05 | 中节能太阳能科技（镇江）有限公司 | A kind of special air pipe of replaceable special tracheal orifice |
| CN204779800U (en) * | 2015-08-04 | 2015-11-18 | 英利能源（中国）有限公司 | Special air pipe |
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| CN207646284U (en) * | 2017-12-15 | 2018-07-24 | 浙江晶盛机电股份有限公司 | A kind of admission line for flat-plate type PECVD protects structure |
| CN209113985U (en) * | 2018-11-28 | 2019-07-16 | 盐城阿特斯阳光能源科技有限公司 | A kind of cleaning plant of board-like ald chamber body |
| CN209816273U (en) * | 2019-02-27 | 2019-12-20 | 铜仁梵能移动能源有限公司 | Device for improving uniformity of tubular PECVD gas |
| CN110158057B (en) * | 2019-06-05 | 2024-05-03 | 承德石油高等专科学校 | PECVD process chamber branch pipeline device and gas circuit system thereof |
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2020
- 2020-02-10 CN CN202010083929.0A patent/CN111118476B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212025453U (en) * | 2020-02-10 | 2020-11-27 | 江苏科来材料科技有限公司 | Special gas pipeline |
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