CN111007052A - Measuring device and measuring method for low-damage threshold defect of large-caliber fused quartz glass - Google Patents
Measuring device and measuring method for low-damage threshold defect of large-caliber fused quartz glass Download PDFInfo
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- CN111007052A CN111007052A CN202010025626.3A CN202010025626A CN111007052A CN 111007052 A CN111007052 A CN 111007052A CN 202010025626 A CN202010025626 A CN 202010025626A CN 111007052 A CN111007052 A CN 111007052A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
Abstract
A measuring device and a measuring method for low-threshold defects of a large-caliber fused quartz element are disclosed, and a system identifies the low-threshold defects on the large-caliber fused quartz element by detecting fluorescence spectra of the defects. Compared with the existing commonly adopted photo-thermal weak absorption measurement method, the method can improve the measurement speed of the low threshold defect by tens of thousands of times.
Description
Technical Field
The invention relates to the field of measurement of defects of optical elements, in particular to a device and a method for measuring low damage threshold defects of large-caliber fused quartz glass.
Background
The large-caliber fused quartz optical glass is an important base stone of optical components in a strong laser device, and the processing quality of the surface and the sub-surface of the large-caliber fused quartz optical glass directly influences and determines the comprehensive performance indexes (such as peak power, beam quality and the like) of a strong laser system. At present, various types of defects are generated on the surface and the subsurface of fused quartz glass by mainstream fused quartz processing technology, wherein the low damage threshold defect can cause fatal damage to optical components in a strong laser device, so that the improvement of various performances of a strong laser system is seriously restricted, and therefore, the accurate measurement of the low threshold defect on the large-caliber fused quartz processing surface has very important significance.
The existing common method for detecting the low-threshold defect on the processed surface of the small-caliber fused quartz glass is a photo-thermal weak absorption measurement method, but because the area of a single measurement by the method is too small (10 multiplied by 10 mu m), for the large-caliber fused quartz glass (such as 400 multiplied by 400mm), if a measuring mode of two-dimensional point-by-point scanning is adopted, the photo-thermal weak absorption measurement method needs about 50000 hours to complete the measurement of the low-threshold defect in the full caliber of the large-caliber fused quartz glass, and the method is obviously not practical. In view of this, the large-caliber fused quartz component produced at present often does not have the process flow of defect detection, so that in a strong laser device, a plurality of potential safety hazards exist.
Disclosure of Invention
In order to solve the defect that the speed of measuring the low-threshold defect by the existing method is very low, the invention provides the measuring device and the measuring method for the low-threshold defect of the large-caliber fused quartz element, and the measuring device can improve the measuring speed of the existing low-threshold defect by tens of thousands of times.
The technical solution of the invention is as follows:
a measuring device for the low threshold defect of large-caliber fused quartz glass is characterized by comprising a two-dimensional mechanical scanning mechanism, a laser source, a light filter, a spectrometer, a stepping motor controller, a data collector, a laser controller and a computer, the two-dimensional mechanical scanning mechanism is used for placing large-caliber fused quartz glass to be measured, laser emitted by the laser source irradiates the surface of the large-caliber fused quartz glass to be measured, the direction of the fluorescence emitted by the surface defect of the large-caliber fused quartz glass to be detected is sequentially the optical filter and the spectrometer, the output end of the spectrometer is connected with the input end of the computer, the output end of the computer is respectively connected with the control end of the two-dimensional mechanical scanning mechanism through the stepping motor controller, and is connected with the control end of the laser source through the laser controller.
The laser is used for providing an excitation light source for the measuring system, the spectrometer is used for detecting a fluorescence spectrum of a low-threshold defect (through early experimental research, the fact that almost all low-threshold defects have fluorescence peaks at specific wavelength positions on the surface of fused quartz glass is found, therefore, whether the low-threshold defects exist on the surface of a fused quartz sample can be judged in reverse through measuring the fluorescence spectrum), the optical filter is used for filtering out environment stray light with other wavelengths, the two-dimensional scanning mechanism is used for scanning large-caliber fused quartz glass to be measured in two dimensions, the stepping motor controller is used for controlling mechanical movement of the two-dimensional scanning mechanism, the laser controller is used for controlling the laser, the data collector is used for collecting electric signals output by the detector, and the computer is used for achieving automatic measurement and control functions such as hardware control, data collection and data storage.
The method for measuring the large-caliber fused quartz glass low-threshold defect by using the measuring device for the large-caliber fused quartz glass low-threshold defect mainly comprises the following measuring steps:
1) placing the large-caliber fused quartz glass to be detected on the two-dimensional mechanical scanning mechanism, irradiating the surface of the large-caliber fused quartz glass to be detected with laser output by the laser source, and adjusting the spectrometer and the optical filter to align with fluorescence emitted by the surface defect of the large-caliber fused quartz glass to be detected;
2) starting the computer, and under the control of the computer, controlling the two-dimensional mechanical scanning mechanism by the stepping motor controller to move the large-caliber fused quartz glass to be detected to an initial position, wherein laser output by the laser source irradiates the initial position on the surface of the large-caliber fused quartz glass to be detected, N is 1, and the number of positions irradiated by the large-caliber fused quartz glass to be detected by laser scanning is N;
3) under the control of the computer, the laser output by the laser source 3 irradiates on the surface n of the large-caliber fused quartz glass to be detected, and the spectrometer measures the fluorescence spectrum emitted from the surface n of the large-caliber fused quartz glass to be detected and inputs the fluorescence spectrum into the computer;
4) the computer judges whether the position n has a fluorescence spectrum corresponding to the low threshold defect, if so, the computer records the coordinate of the position n, namely the position n has the low threshold defect;
5) the computer controls the two-dimensional mechanical scanning mechanism 1 through the stepping motor controller, moves the large-caliber fused quartz glass to be detected to a position N +1, and enables N to be N +1, and when N is less than or equal to N, the computer returns to the step 3); when N is greater than N, entering the next step;
6) and the computer outputs the coordinates of all the low-threshold defects, namely the measurement and the coordinate positioning of the large-caliber fused quartz glass low-threshold defects are realized in the full-caliber range, and the measurement is finished.
The invention has the following advantages:
compared with the existing photothermal weak absorption measurement method (the size of a single measurement area is about 10 multiplied by 10 microns), the single measurement area of the invention can reach 5 multiplied by 5mm, so the measurement speed can be improved by tens of thousands of times.
Drawings
FIG. 1 is a schematic view of a measuring apparatus for measuring a low threshold defect in large caliber fused silica glass.
Fig. 2 is a schematic diagram of a laser two-dimensional scanning track.
Detailed Description
The invention is described in detail below with reference to the drawings and examples, but the scope of the invention should not be limited thereto.
Example 1:
referring to fig. 1, fig. 1 is a schematic structural diagram of a measuring device for large-caliber fused silica glass low-threshold defects according to the present invention. As can be seen from the figure, the measuring device for the large-caliber fused silica glass low-threshold defect is characterized by comprising a two-dimensional mechanical scanning mechanism 1, a laser light source 3, a light filter 4, a spectrometer 5, a stepping motor controller 6, a data collector 7, a laser controller 8 and a computer 9, wherein the two-dimensional mechanical scanning mechanism 1 is used for placing the large-caliber fused silica glass 2 to be measured, the laser emitted by the laser light source 3 is irradiated on the surface of the large-caliber fused silica glass 2 to be measured, the light filter 4 and the spectrometer 5 are sequentially arranged in the direction of the fluorescence emitted by the surface defect of the large-caliber fused silica glass 2 to be measured, the output end of the spectrometer 5 is connected with the input end of the computer 9, the output end of the computer 9 is respectively connected with the control end of the two-dimensional mechanical scanning mechanism 1 through the stepping motor controller 6, and is connected with the control end of the laser light source 3 through the laser controller 8.
The laser light emitted by the laser light source 3 irradiates the surface of the large-caliber fused quartz glass 2 to be detected, and the fluorescence emitted by the defect on the surface of the large-caliber fused quartz glass 2 to be detected is collected by the spectrometer 5 after the action of the optical filter 4.
The laser controller 8 is used for controlling the laser light source 3.
The data collector 7 is used for collecting the signal output by the spectrometer 5.
The stepper motor controller 6 controls the two-dimensional mechanical scanning mechanism 1.
The working process of the measuring device is as follows:
1) placing the large-caliber fused quartz glass 2 to be detected on the two-dimensional mechanical scanning mechanism 1, irradiating the surface of the large-caliber fused quartz glass 2 to be detected with laser output by the laser source 3, and adjusting the spectrometer 5 and the optical filter 4 to align fluorescence emitted by the surface defect of the large-caliber fused quartz glass 2 to be detected;
2) starting the computer 9, under the control of the computer 9, controlling the two-dimensional mechanical scanning mechanism 1 by the stepping motor controller 6, moving the large-caliber fused quartz glass 2 to be measured to an initial position, irradiating the initial position on the surface of the large-caliber fused quartz glass 2 to be measured by the laser output by the laser source 3, and setting N to 1, wherein the number of positions irradiated by the large-caliber fused quartz glass 2 to be measured in laser scanning is N;
3) under the control of the computer 9, the laser output by the laser source 3 irradiates on the surface n of the large-caliber fused quartz glass 2 to be measured, and the spectrometer 5 measures the fluorescence spectrum emitted from the surface n of the large-caliber fused quartz glass 2 to be measured and inputs the fluorescence spectrum into the computer 9;
4) the computer 9 judges whether a fluorescence spectrum corresponding to the low threshold defect exists at the position n, if so, the computer 9 records the coordinate of the position n, namely the position has the low threshold defect;
5) the computer 9 controls the two-dimensional mechanical scanning mechanism 1 through the stepping motor controller 6, moves the large-caliber fused quartz glass 2 to be detected to a position N +1, and makes N equal to N +1, and when N is less than or equal to N, returns to the step 3); when N is greater than N, entering the next step;
6) and the computer 9 outputs the coordinates of all the low-threshold defects, namely the measurement and the coordinate positioning of the large-caliber fused quartz glass low-threshold defects are realized in the full-caliber range, and the measurement is finished.
Experiments show that the method can improve the measurement speed of the low-threshold defect by tens of thousands of times.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. The measuring device is characterized by comprising a two-dimensional mechanical scanning mechanism (1), a laser light source (3), an optical filter (4), a spectrometer (5), a stepping motor controller (6), a data collector (7), a laser controller (8) and a computer (9), wherein the two-dimensional mechanical scanning mechanism (1) is used for placing large-caliber fused quartz glass (2) to be measured, laser emitted by the laser light source (3) irradiates on the surface of the large-caliber fused quartz glass (2) to be measured, the direction of fluorescence emitted by the surface defect of the large-caliber fused quartz glass (2) to be measured is sequentially the optical filter (4) and the spectrometer (5), the output end of the spectrometer (5) is connected with the input end of the computer (9), and the output end of the computer (9) is respectively connected with the stepping motor controller (6) and the two-dimensional mechanical scanner (9) The control end of the structure (1) is connected with the control end of the laser light source (3) through the laser controller (8).
2. The method for measuring the large-caliber fused silica glass low-threshold defect by using the measuring device of the large-caliber fused silica glass low-threshold defect as claimed in claim 1, characterized by comprising the following steps:
1) placing the large-caliber fused quartz glass (2) to be detected on the two-dimensional mechanical scanning mechanism (1), irradiating the laser output by the laser source (3) on the surface of the large-caliber fused quartz glass (2) to be detected, and adjusting the spectrometer (5) and the optical filter (4) to align to the fluorescence emitted by the surface defect of the large-caliber fused quartz glass (2) to be detected;
2) starting the computer (9), wherein under the control of the computer (9), the stepping motor controller (6) controls the two-dimensional mechanical scanning mechanism (1) to move the large-caliber fused quartz glass (2) to be detected to an initial position, laser output by the laser source (3) irradiates the initial position on the surface of the large-caliber fused quartz glass (2) to be detected, the position is N-1, and the number of positions irradiated by the large-caliber fused quartz glass (2) to be detected in a laser scanning mode is N;
3) under the control of the computer (9), the laser output by the laser source (3) irradiates the position n on the surface of the large-caliber fused quartz glass (2) to be measured, and the spectrometer (5) measures the fluorescence spectrum emitted by the position n on the surface of the large-caliber fused quartz glass (2) to be measured and inputs the fluorescence spectrum into the computer (9);
4) the computer (9) judges whether the position n has a fluorescence spectrum corresponding to the low threshold defect, if so, the computer (9) records the coordinate of the position n, namely the position has the low threshold defect;
5) the computer (9) controls the two-dimensional mechanical scanning mechanism (1) through the stepping motor controller (6), moves the large-caliber fused quartz glass (2) to be detected to a position N +1, and enables N to be N +1, and when N is less than or equal to N, the step 3 is returned; when N is greater than N, entering the next step;
6) and the computer (9) outputs the coordinates of all the low-threshold defects, namely the measurement and the coordinate positioning of the large-caliber fused quartz glass low-threshold defects are realized in the full-caliber range, and the measurement is finished.
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| CN2019109571294 | 2019-10-10 | ||
| CN201910957129.4A CN110736726A (en) | 2019-10-10 | 2019-10-10 | Measuring device and measuring method for low-damage threshold defect of large-caliber fused quartz glass |
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- 2020-01-10 CN CN202010025626.3A patent/CN111007052A/en active Pending
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| JP2012197220A (en) * | 2005-03-01 | 2012-10-18 | Nikon Corp | Method for inspecting synthetic quartz glass molded product, method for inspecting synthetic quartz glass member, and method for manufacturing the synthetic quartz glass member |
| US20130270458A1 (en) * | 2012-04-12 | 2013-10-17 | Government Of The United States, As Represented By The Secretary Of The Air Force | All Fiber Coupled Ultraviolet Planar Laser Induced Fluorescence Detection System |
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