CN103123320B - Laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting - Google Patents
Laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting Download PDFInfo
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- CN103123320B CN103123320B CN201210489391.9A CN201210489391A CN103123320B CN 103123320 B CN103123320 B CN 103123320B CN 201210489391 A CN201210489391 A CN 201210489391A CN 103123320 B CN103123320 B CN 103123320B
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Abstract
The invention discloses a laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting. The implementation device comprises a laser source, a laser beam splitting device, a straight optical transmission device, a bypass optical transmission device, an optical fiber detector, an optical spectrometer and a data analyzer, which are correspondingly connected through optical paths, wherein the laser beam splitting device is used for splitting a laser beam emitted from the laser source into two laser beams; one laser beam is vertically incident onto the surface of a sample after being focused by the straight optical transmission device, and the other laser beam is incident onto the surface of the sample by focusing after the laser incident angle is adjusted through the bypass optical transmission device to be an angle coincident with an action point of the vertical incident laser on the surface of the sample; the two laser beams stimulate the sample to generate plasmas; the optical fiber detector for collecting the plasmas is connected with the optical spectrometer through an optical fiber; a plasma emission spectrum is coupled into the optical spectrometer; the optical spectrometer is used for transmitting the collected spectrum data to the data analyzer through a USB (Universal Serial Bus) data wire; and the data analyzer is used for detecting and analyzing sample components to obtain sample component information.
Description
Technical field
The invention belongs to field of spectral analysis technology, relate to a kind of laser spectral analysis technology, especially produce a Laser-induced Breakdown Spectroscopy analytical technology for twin-beam based on single beam beam splitting technology, be specifically related to a kind of double light beam laser induced breakdown spectroscopy analytical approach and device for carrying out said thereof.
Background technology
Laser-induced Breakdown Spectroscopy (Laser Induced Breakdown Spectroscopy, LIBS) technology is a kind of New type atom Emission Spectroscopy, this technology is fast by feat of detection speed, simultaneous determination of multiponents, possess on-the-spot in-situ study ability and the advantage such as sample pre-treatments without the need to complexity, is widely used in the numerous areas such as oil-gas mining, geologic prospecting, metallurgical electric power and environmental monitoring.But in recent years, its lower sensitivity and higher detection limit had become the bottleneck of restriction LIBS technical development, therefore obtained the great attention of numerous LIBS researchist.Solution at present for problems mainly comprises:
1., based on the signal Enhancement Method of microwave radiation technology: the method adds microwave energy around testing sample, by changing the living environment of laser induced plasma, achieve the enhancing to LIBS spectral signal;
2. based on the signal Enhancement Method that effluve is auxiliary: the method adds two high-field electrodes at laser induced plasma place, realizes secondary excitation by effluve plasma, achieves the enhancing to LIBS spectral signal;
3. based on the signal Enhancement Method of laser double-pulse: the method utilizes two laser instruments and a chronotron to produce the laser pulse that two have certain time delay (Microsecond grade), successively acted on sample or laser induced plasma by two laser pulses, realize the secondary excitation of plasma, improve the intensity of LIBS spectral signal.
Above-mentioned solution is improving the intensity of LIBS spectral signal in varying degrees, although implementation method is different, but its ultimate principle belongs to a class together, namely based on the additional energy (such as microwave, effluve, pulse laser etc.) that second excitaton source provides, increase the launching efficiency of laser induced plasma, and then reach the sensitivity promoting LIBS and the object reducing detection limit.As can be seen here, the condition precedent that this type of scheme realizes is: in original LIBS system, increase an excitaton source, for plasma provides extra excitation energy.But the excitaton source increased will increase extra device or annex (such as microwave cavity, microwave generator, high-voltage pulse power source, laserresonator, pumping lamp water cooling plant etc.) for LIBS system, such device or annex, volume is comparatively large, complex structure and expensive, will certainly increase the complexity realizing cost and experimental provision of LIBS system, this will be unfavorable for the propagation and employment of LIBS Signal Enhanced Technology and relevant apparatus.
Summary of the invention
For present situation and the Problems existing of above-mentioned existing LIBS Signal Enhanced Technology, object of the present invention aims to provide a kind of new Laser-induced Breakdown Spectroscopy analytical approach and device for carrying out said thereof, to enrich the mode that LIBS signal strengthens, overcome the device for carrying out said complex structure that existing LIBS Signal Enhanced Technology exists, the problems such as installation cost is high.
Double light beam laser induced breakdown spectroscopy analytical approach provided by the invention, the formation of its technical scheme mainly comprises: the laser pulse that lasing light emitter is launched is divided into transmission laser and reflects laser two restraints laser, a branch of in two bundle laser is forthright excitation laser, line focus impinges perpendicularly on sample surfaces and produces plasma, another beam of laser is bypass excitation laser, through incident angle adjustment with focus on to be that angle β incides sample surfaces and produces plasma with vertical incidence excitation laser, and the application point of this incident excitation laser on sample overlaps with the application point of vertical incidence excitation laser on sample surfaces, utilize fibre-optical probe by the emission spectrum coupled into optical fibres of the plasma of generation, and be transferred to spectrometer and data-analyzing machine carries out spectral analysis, finally obtain the composition information of testing sample.
In technique scheme, described transmission laser and reflects laser all can be used as vertical incidence excitation laser or the incident excitation laser of skew back.The angle β that two bundle excitation lasers incide on sample surfaces is being greater than 0
0be less than 90
0the scope effect that has LIBS signal to strengthen, but preferably to control 20
0~ 80
0between.
For implementing the apparatus structure of the double light beam laser induced breakdown spectroscopy method that the present invention proposes, mainly comprise the lasing light emitter of the corresponding connection of light path, laser beam splitter device, forthright optical transmission apparatus, bypass optical transmission apparatus, and fiber-optical probe, spectrometer and data-analyzing machine, the beam of laser that lasing light emitter is launched is divided into two bundle laser by described laser beam splitter device, wherein beam of laser impinges perpendicularly on sample surfaces after being focused on by forthright optical transmission apparatus, another beam of laser adjusts laser incident angle to the angle that overlaps with the application point of vertical incidence laser on sample surfaces and sample surfaces is incided in line focus by bypass optical transmission apparatus, the common excited sample of two bundle laser produces plasma, the fiber-optical probe that detection window aims at plasma is connected with spectrometer by optical fiber, plasma emission spectroscopy is coupled into spectrometer, the spectroscopic data of collection is transferred to data-analyzing machine by USB data line and carries out detection analysis to sample composition by spectrometer.
Owing to the present invention relates to a kind of laser spectrum quasi-instrument, for the ease of stating the relation between each device, be " light input interface " by the incident light direction of device and node definition, be " light output interface " by the emergent light direction of device and node definition, when " the light input interface " of previous device is connected with " the light output interface " of a rear device immediately, represent that the direction of the light beam that previous device exports is identical with the light beam incident direction of a rear device, and by incident node.According to above-mentioned definition, device for carrying out said of the present invention also can be described as: " the light output interface " of lasing light emitter is connected with " the light input interface " of laser beam splitter device, this Shu Jiguang is divided into forthright excitation laser to laser beam splitter device and bypass excitation laser two restraints laser, wherein " the light output interface " of forthright excitation laser is connected with " the light input interface " of forthright optical transmission apparatus, " the light output interface " of bypass excitation laser is connected with " the light input interface " of bypass optical transmission apparatus, laser action same point to sample surfaces that " the light output interface " of forthright optical transmission apparatus and bypass optical delivery exports, and produce plasma, the detection window of fiber-optical probe aims at plasma, and be connected with spectrometer through optical fiber, plasma emission spectroscopy is coupled into spectrometer, and the spectroscopic data of collection is transferred to data-analyzing machine by USB data line by spectrometer, completes the analysis to sample composition.
In the technical scheme of above-mentioned device for carrying out said, lasing light emitter preferred energy is greater than 30 MJs, wavelength is the pulse laser of 1064nm, the wavelength of lasing light emitter also can be the pulse laser of 532nm, 355nm or 266nm, as long as the energy of single bundle of pulsed laser is greater than 30 MJs, the wavelength chooses of concrete lasing light emitter and energy are selected to depend on actual demand.
In the technical scheme of above-mentioned device for carrying out said, described laser beam splitter device is made up of with the laser beam splitter mirror be placed on mirror holder the first mirror holder that possesses spinfunction.Fixing beam splitter is responsible for by the mirror holder wherein possessing spinfunction, and changed the angle α of beam splitter axis and incident laser by spinfunction, wherein α ∈ (0 °, 90 °).The beam of laser pulse that beam splitter is responsible for lasing light emitter produces is divided into forthright excitation laser and bypass excitation laser two restraints laser, and two bundle laser energy summations after beam splitting are less than or equal to the laser energy (due to the change of angle [alpha], beam splitter can lose certain energy) before beam splitting.
In the technical scheme of above-mentioned device for carrying out said, described forthright optical transmission apparatus is f by a burnt length
1the first condenser lens and the second mirror holder composition, by the second mirror holder, the first lens are fixed on f above sample surfaces
1place, its object is in order to ensure that the first condenser lens focus is at sample surfaces.
In the technical scheme of above-mentioned device for carrying out said, described bypass optical transmission apparatus is at least f by the first catoptron, burnt length
2the second condenser lens, settle the 3rd mirror holder of the first catoptron, the 4th mirror holder of the second condenser lens be installed, radius is R
1the first circular arc type track and radius be R
2second circular arc type track composition, described 3rd mirror holder is movably arranged on the first circular arc type track, described 4th mirror holder is movably arranged on the second circular arc type track, and the 3rd mirror holder and the 4th mirror holder are the mirror holder with spinfunction, and the radius R of the second circular arc type track
2long f burnt with the second condenser lens
2unanimously, for ensureing that the focus of the second condenser lens is at sample surfaces.Namely in the apparatus, the first catoptron is for changing when bypass excitation laser incides sample surfaces and the angle β of sample surfaces vertical direction, β ∈ (20 ° 80 °); The burnt long f of second condenser lens
2, be responsible for focusing on bypass excitation laser, in order to ensure bypass excitation laser focusing after focus overlaps with initial point (definition forthright excitation laser focusing application point that is rear and sample surfaces is initial point), so R
2=f
2.The center of circle of described first circular arc type track and described second circular arc type track preferably overlaps.
In the technical scheme of above-mentioned device for carrying out said, in order to adapt to the bypass laser that emits from laser beam splitter device can not glancing incidence to the situation of the first catoptron, described bypass optical transmission apparatus is preferably designed with bypass excitation laser adjustment light path, described adjustment light path can by the second catoptron, the 3rd catoptron, respectively the second catoptron and the 3rd catoptron are installed and possess the 5th mirror holder of spinfunction and the 6th mirror holder forms, two catoptrons change angle by the rotation of respective mirror holder, and then realize the adjustment of bypass laser position.Second catoptron and the 3rd catoptron are preferably and be arranged in parallel.The described position height of the 3rd catoptron and the position height of the first catoptron are preferably consistent.
In the technical scheme of above-mentioned device for carrying out said, the spectrum of collection for collecting two bundle laser-produced plasma emission spectrum, and is entered spectrometer by coupling fiber by fiber-optical probe; Spectrometer for gathering the spectrum collected by fiber-optical probe, and is translated into electric signal, is transferred to data-analyzing machine by USB data line; Data-analyzing machine for calculating, the electric signal that transmits for the treatment of and analysis spectrometer, show finally by the spectrum of display by this sample.
The optical delivery scheme of the invention process device is as Fig. 3, shown in Fig. 4 or Fig. 6, lasing light emitter produces beam of laser pulse, a branch of forthright excitation laser and a branch of bypass excitation laser is divided into after beam splitter, wherein forthright excitation laser is after the first condenser lens, incident perpendicular to sample surfaces, bypass excitation laser changes transmission path through the second catoptron and the 3rd catoptron, and incide the first catoptron from horizontal direction, laser through the first catoptron reflection incides the second condenser lens, finally focus on sample surfaces, and focus point overlaps with the application point of sample with the forthright excitation laser of vertical incidence.In whole optical delivery scheme, when β numerical value changes, need the optics of adjustment to comprise the second catoptron, the 3rd catoptron, the first catoptron and the second condenser lens, detailed adjustment is described as follows, and wherein the space structure schematic diagram of these mirrors is as shown in Figure 5:
1. the regulative mode of the second catoptron: the effect of this catoptron is the position adjustments realizing bypass excitation laser, before explanation control method, a critical angle need be calculated, the laser that definition lasing light emitter is launched is d relative to the level height of sample surfaces, when not using the second catoptron to change bypass excitation laser level height, the angle β of the laser that the first catoptron reflects and forthright excitation laser
0=arccos (d/R
1), therefore as β < β
0time, the Main Function of the second catoptron needs the level height raising bypass excitation laser, as shown in the second catoptron in Fig. 3; As β > β
0time, the Main Function of the second catoptron needs the level height reducing bypass excitation laser, and as shown in the second catoptron in Fig. 4, adjustment process has been come by the 4th mirror holder in bypass optical transmission apparatus.
2. the regulative mode of the 3rd catoptron: the effect of this catoptron is the transmission path changing bypass excitation laser, the object of its path changing is to make bypass excitation laser incide the first catoptron in the horizontal direction, therefore the second catoptron and keeping parallelism relative with the reflecting surface of the 3rd catoptron, the height of the 3rd catoptron and the height of the first catoptron are consistent.
3. the regulative mode of the first catoptron: the effect of the first catoptron is the transmission path changing bypass excitation laser, and the object of its path changing is to make bypass excitation laser incide sample surfaces according to predetermined angle β.Incident laser due to the first catoptron is horizontal direction, according to triangle geometry principle, so the reflects laser of the first catoptron and the angle of incident laser are 90 ° of-β, then according to principle of reflection, the axis of the first catoptron and the angle of horizontal direction are (45 ° of-β/2).Other first catoptron is relative to the level height h of sample surfaces
1, can calculate according to triangle geometry principle equally, result of calculation is h
1=R
1cos β.According to above-mentioned result of calculation, by spinfunction and the first circular arc type track of the second mirror holder, adjust the angle of the first catoptron and height.
4. the regulative mode of the second condenser lens: the effect of the second condenser lens is to focus on the reflects laser of the first catoptron, according to the principle of work of condenser lens, the position of the second condenser lens should ensure the geometric center of incident laser through lens, and along the Propagation of these lens, so according to triangle geometry principle, the axis of the second condenser lens and the angle of vertical direction are β, the height h of the second condenser lens
2=R
2cos β.According to above-mentioned result of calculation, by spinfunction and the second circular arc type track of the 3rd mirror holder, adjust the angle of the second condenser lens and height.
In implementation method, compared with existing LIBS dipulse analytical technology, in its ultimate principle realized and Optical System Design, there is very outstanding difference in essence, be described as follows in the present invention:
1, ultimate principle is different.Existing LIBS Signal Enhanced Technology all realizes the enhancing of LIBS signal by additionally increasing an excitaton source, no matter this excitaton source is microwave, high-voltage power supply or laser pulse, all need increase excitaton source than basic LIBS system, the energy needed for system has nearly increase at double.And the Enhancement Method that the present invention proposes, it is the single-pulse laser that basic LIBS system is produced, be divided into two bundle laser, this two energy summation of restrainting laser is less than or equal to the single-pulse laser energy before beam splitting, can find out, system capacity required for the present invention is identical with basic LIBS system, and without the need to extra excitaton source, therefore the present invention is all greatly better than existing LIBS Signal Enhanced Technology on the cost and structure complexity of device.
2, a mistake in understanding of the prior art is overcome.The Optical System Design scheme of current existing double-pulsed technology mainly comprises two classes: 1. vertical colli piear, and namely two laser pulses successively incide sample surfaces from vertical direction; 2. right-angled intersection, namely a laser pulse is incident perpendicular to sample surfaces, and another laser pulse is parallel to sample surfaces incidence.Existing document all shows with actual test, when such scheme all requires that the time delay between two laser pulses is not less than 2 microsecond, just can produce obvious humidification to LIBS spectrum wire size, if time delay too short (being less than 1 microsecond), LIBS spectral signal not only can not strengthen, and there will be the trend weakened on the contrary.And twin-beam of the present invention is produced by a laser pulse, the interval time that two bundle laser arrive sample surfaces is only determined by the optical path difference of two bundle laser, the optical path difference of two bundle laser is generally less than 1 meter, namely will be less than 5 nanoseconds (being far smaller than 1 microsecond) interval time of two bundle laser arrival sample surfaces, the visible understanding by prior art, the monopulse double-beam technique that the present invention proposes to make LIBS spectral signal strengthen.But inventor is by deep research and discovery, change existing dipulse design proposal, a brand-new double-pulse laser incident path geometric model is proposed, namely the first bundle laser vertical sample surfaces is incident, and the second bundle laser and beam of laser are incident from the side at an angle, through experimental verification, the geometric model that the present invention proposes can realize the enhancing of LIBS spectral signal equally when two bundle laser almost do not postpone (being less than for 5 nanoseconds).
3, device for carrying out said structure is simple, and cost of manufacture is low.Device for carrying out said of the present invention only has a lasing light emitter, lifting LIBS spectral signal intensity device for carrying out said compared to prior art, original LIBS system increases an excitaton source, for plasma provides extra excitation energy, saves an excitaton source and device supporting with it or annex.Increase an excitaton source, LIBS system need be equipped with multiple servicing unit or annex simultaneously, as microwave cavity, microwave generator, high-voltage pulse power source, laserresonator, pumping lamp water cooling plant etc., and this type of servicing unit or accessory structure complexity, expensive, volume is comparatively large, therefore considerably increases the manufacturing cost of LIBS system and device and the complexity of experimental provision, is unfavorable for the propagation and employment of LIBS Signal Enhanced Technology and relevant apparatus.
Accompanying drawing illustrates:
Fig. 1 is device for carrying out said one-piece construction schematic block diagram of the present invention;
Fig. 2 is the laser beam splitter apparatus structure schematic diagram in device for carrying out said;
Fig. 3 is the optical delivery conceptual design figure (β < β 0) of device for carrying out said of the present invention;
Fig. 4 is the optical delivery conceptual design figure (β > β 0) of device for carrying out said of the present invention;
Fig. 5 is the locus schematic diagram of optical mirror slip in bypass optical transmission apparatus;
Fig. 6 is the device for carrying out said optical delivery conceptual design figure using transmission laser as vertical incidence excitation laser;
Fig. 7 is the Mirror frame structure schematic diagram possessing spinfunction;
When Fig. 8 is two bundle excitation lasers incidence angle β=60 °, two bundle excitation lasers strengthen design sketch with the spectral signal of common activated plasma respectively;
When Fig. 9 is two bundle excitation lasers incidence angle β=30 °, two bundle excitation lasers strengthen design sketch with the spectral signal of common activated plasma respectively.
The object that in above-mentioned accompanying drawing, each shown by reference numeral table is known is respectively: 1-lasing light emitter; 2-laser beam splitter device; 3-forthright optical transmission apparatus; 4-bypass optical transmission apparatus; 5-fiber-optical probe; 6-spectrometer; 7-data-analyzing machine; 8-beam splitter; 9-forthright excitation laser; 10-bypass excitation laser; 11-first condenser lens; 12-second catoptron; 13-the 3rd catoptron; 14-first catoptron; 15 first circular arc type tracks; 16-second focus lamp; 17-second circular arc type track; 18-sample; 19-mirror holder external frame; 20-mirror holder inner frame; 21-mirror holder swingle; 22-mirror holder fixed screw.
Embodiment:
Provide specific embodiments of the invention below in conjunction with accompanying drawing, and by embodiment, the present invention is further described specifically.Be necessary to herein means out, the following examples are just for setting forth principle of work of the present invention and practical application thereof better, so that the present invention is used in the various facilities in its field by the technician in other field, and improve according to the imagination of various special-purpose.Although the present invention discloses its first-selected embodiment by word; but by read these technology explanatory notes can understand wherein can optimization and alterability; and improve not departing from scope and spirit of the present invention, but such improvement still should belong to the protection domain of the claims in the present invention.
Embodiment
The present embodiment is for measuring the device of solid sample composition, and as shown in Figure 1, device optical delivery conceptual design as shown in Figure 3 and Figure 4 for its structured flowchart.With wavelength 1064nm, single beam laser pulse energy 100mJ, the Nd:YAG laser instrument of pulse width 8ns is lasing light emitter 1, the pulse laser that lasing light emitter is launched is divided into a branch of forthright excitation laser 9 and a branch of bypass excitation laser 10 after beam splitter 8, wherein forthright excitation laser is after the first condenser lens 11, incident perpendicular to sample 18 surface, and focus is positioned at sample surfaces, bypass excitation laser is through the second catoptron 12, its beam Propagation path is made from left to right to change into vertical direction from bottom to up by horizontal direction, and incide the 3rd catoptron 13, its beam Propagation path is made to change into horizontal direction from bottom to up from left to right by vertical direction, and incide the first catoptron 14, the laser reflected through the first catoptron 14 incides the second condenser lens 16, and focus on sample surfaces, and the focus that focus and forthright excitation laser converge to sample surfaces overlaps, due to the acting in conjunction of two bundle laser, plasma can be produced at sample surfaces, the emission spectrum of plasma is collected by fiber-optical probe 5, and be coupled to spectrometer 6 and carry out data acquisition and photosignal transforms, be transferred to data-analyzing machine 7 eventually through USB data line and carry out spectrum analysis.Wherein the second catoptron, the 3rd catoptron, the first catoptron and the second condenser lens are arranged on the second mirror holder, the 3rd mirror holder, the 4th mirror holder and the 5th mirror holder successively, mirror holder possesses spinfunction, its structure as shown in Figure 7, external frame 19 is fixed on other poles for mirror holder, inner frame 20 is for installing catoptron or condenser lens, swingle 21 is for rotating inner frame, to reach the angle of inclination of eyeglass on adjustment inner frame, after fixed screw 22 is screwed down, can the angle of inclination of fixing internal framework.In the optical mirror slip of these angle adjustable, second catoptron and the 3rd catoptron just need when this device is built to carry out angular setting, once device is built complete, when starting to carry out analytical test, without the need to adjusting angle, only need to carry out angular adjustment to the first catoptron and the second condenser lens, to reach the incident angle changing bypass excitation laser and forthright excitation laser.
The operating process adopting double light beam laser induced breakdown spectroscopy analytical equipment of the present invention to measure solid sample can be divided into following three phases:
1. the preparatory stage: before experiment starts, first according to above-mentioned optical delivery scheme, the angle of inclination of adjustment beam splitter, the second catoptron and the 3rd catoptron, and fixed by the pitch angle of fixed screw by these three optical mirror slips.Then solid sample to be measured is carried out compressing tablet, and by sample stage adjustment sample surfaces height, make the focus of the upper surface of sample and the first condenser lens in same level.
2. the optimum configurations stage: angle β when experimentally the preassigned forthright excitation laser of condition and bypass excitation laser incide sample surfaces, and the control method of above-mentioned first catoptron and the second condenser lens, the angle of the axis and horizontal direction that calculate the first catoptron is (45 ° of-β/2), the first catoptron is R relative to the height of sample surfaces
1the axis of cos β, the second condenser lens and the angle of vertical direction are β, the second condenser lens is R relative to the height of sample surfaces
2cos β, and adjust the first catoptron and the second condenser lens according to result of calculation, then start laser instrument, and the first catoptron and the second condenser lens are finely tuned at the first circular arc type track 15 and the second circular arc type track 17, to guarantee that the focus point of two bundle laser overlaps at sample surfaces.Experimental specific requirement, arranges the experiment parameters such as the energy of laser instrument, repetition frequency, spectrometer integral time, spectrometer time delay and average testing time.
3. the analytical test stage: after Preparatory work of experiment stage and optimum configurations stage, start laser instrument and send a synchronizing signal to spectrometer, open forthright optical transmission apparatus 3 and bypass optical transmission apparatus 4, make forthright excitation laser and bypass excitation laser almost focus on same point on sample surfaces simultaneously, the spectral analysis software of operational data analysis device, is undertaken the spectrogram of acquisition analyzing, storing.
In order to set forth the advantage of the present invention in the enhancing of LIBS signal further, below for the standard model of shale (GBW03104), and provide concrete experiment parameter and the result of this experiment.Si in selected shale is element to be measured, and the wavelength of its atomic emissions characteristic spectral line is 288.15nm; The running parameter of laser instrument and spectrometer: single beam laser pulse energy 100mJ, laser instrument repetition frequency 5Hz, spectrometer 3ms integral time, spectrometer signals collecting μ s time delay 3.5, data average time 50 times; Angle β when forthright excitation laser and bypass excitation laser incide sample surfaces is chosen as 30 ° and 60 ° respectively.Under these conditions, when β=60 °, beam splitter is replaced with catoptron, open forthright optical transmission apparatus, close bypass optical transmission apparatus, only use the forthright excitation laser excited sample of vertical direction, the test result of average 50 times, and preserve the data of spectrometer collection, experimental result is as Z=3 curve in Fig. 8; Remove beam splitter, open bypass optical transmission apparatus, close forthright optical transmission apparatus, only use bypass excitation laser excited sample, the test result of average 50 times, and the data of preserving spectrometer collection, experimental result is as Z=2 curve in Fig. 8; Recover the installation of beam splitter, open forthright optical transmission apparatus and bypass optical transmission apparatus simultaneously, use forthright excitation laser and the acting in conjunction of bypass excitation laser at sample surfaces, the test result of average 50 times, and preserve the data of spectrometer collection, experimental result, as Z=1 curve in Fig. 8, can find out method provided by the invention and device for carrying out said, can effectively strengthen LIBS signal.
In order to prove that the incident angle β of forthright excitation laser and bypass excitation laser to strengthen the impact of effect on LIBS, the β angle of above-mentioned experiment condition is set to 30 °, and repeat above-mentioned analytical test step, experimental result as shown in Figure 9, the forthright excitation laser excitation result of vertical direction is wherein only used to be Z=3 curve, bypass excitation laser excitation result is only used to be Z=2 curve, open forthright optical transmission apparatus and bypass optical transmission apparatus simultaneously, use forthright excitation laser and the acting in conjunction of bypass excitation laser at sample, acquired results is Z=1 curve.By comparison diagram 8 and Fig. 9, can find out, the angle difference of two bundle laser can affect the enhancing effect of spectral line, and this is also the object that excitation laser incident angle is restrainted in change two.
The invention is not restricted to embodiment mentioned above, as long as the scope that the suitable amendment carried out on architecture basics of the present invention and optimization are defined in claim all belongs to category of the present invention.
Claims (1)
1. the device of the analysis of the Laser-induced Breakdown Spectroscopy based on single beam beam splitting, mainly comprise the lasing light emitter (1) of the corresponding connection of light path, laser beam splitter device (2), forthright optical transmission apparatus (3), bypass optical transmission apparatus (4), and fiber-optical probe (5), spectrometer (6) and data-analyzing machine (7), the beam of laser that lasing light emitter is launched is divided into two bundle excitation lasers by described laser beam splitter device, wherein a branch of excitation laser impinges perpendicularly on sample surfaces after being focused on by forthright optical transmission apparatus, another bundle excitation laser adjusts laser incident angle to the angle that overlaps with the application point of forthright excitation laser on sample surfaces and sample surfaces is incided in line focus by bypass optical transmission apparatus, the common excited sample of two bundle excitation lasers produces plasma, the fiber-optical probe that detection window aims at plasma is connected with spectrometer by optical fiber, plasma emission spectroscopy is coupled into spectrometer, the spectroscopic data of collection is transferred to data-analyzing machine by USB data line and carries out detection analysis to sample composition by spectrometer, it is characterized in that described laser beam splitter device (2) is made up of with the laser beam splitter mirror (8) be placed on mirror holder the first mirror holder that possesses spinfunction, fixing beam splitter is responsible for by the mirror holder possessing spinfunction, and the angle α of beam splitter axis and incident laser is changed by spinfunction, wherein α ∈ (0 °, 90 °), described bypass optical transmission apparatus (4) is f by least one first catoptron (14), burnt length
2the second condenser lens (16), the 3rd mirror holder installing the first catoptron, the 4th mirror holder installing the second condenser lens, radius be R
1the first circular arc type track (15), radius be R
2second circular arc type track (17) composition, described 3rd mirror holder is movably arranged on the first circular arc type track (15), described 4th mirror holder is movably arranged on the second circular arc type track (17), and the radius R of the second circular arc type track
2with f
2unanimously, the 3rd mirror holder and the 4th mirror holder are the mirror holder with spinfunction, described bypass optical transmission apparatus is provided with bypass excitation laser adjustment light path, this adjustment optical routing second catoptron (12), the 3rd catoptron (13), the second catoptron and the 3rd catoptron are installed and possess the 5th mirror holder and the 6th mirror holder composition of spinfunction respectively, two catoptrons change angle by the rotation of respective mirror holder, and then realize the adjustment of bypass excitation laser position, second catoptron (12) and the 3rd catoptron (13) of described bypass excitation laser adjustment light path be arranged in parallel, and the position height of the 3rd catoptron (13) and the position height of the first catoptron (14) are consistent, the axis direction of the first catoptron (14) and the angle of horizontal direction are set to (45 ° of-β/2), and the first catoptron (14) is set to R relative to the height of sample surfaces
1cos β, wherein β is the predetermined incident angles of two bundle laser, the center of circle of described first circular arc type track (15) and described second circular arc type track (17) overlaps, and overlaps with the focus of the first condenser lens (11) in forthright optical transmission apparatus, it is characterized in that the axis of the second condenser lens and the angle of vertical direction are β, the second condenser lens is R relative to the height of sample surfaces
2cos β.
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Application publication date: 20130529 Assignee: Ai Li Chengdu science and Technology Co., Ltd. Assignor: Sichuan University Contract record no.: 2017510000012 Denomination of invention: Laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting Granted publication date: 20150617 License type: Common License Record date: 20170614 |