CN111006765B - Compact snapshot type spectrum imaging device and method based on micro-interference array - Google Patents
Compact snapshot type spectrum imaging device and method based on micro-interference array Download PDFInfo
- Publication number
- CN111006765B CN111006765B CN201911377305.3A CN201911377305A CN111006765B CN 111006765 B CN111006765 B CN 111006765B CN 201911377305 A CN201911377305 A CN 201911377305A CN 111006765 B CN111006765 B CN 111006765B
- Authority
- CN
- China
- Prior art keywords
- interference
- array
- micro
- diaphragm
- units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 58
- 238000001228 spectrum Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 4
- 238000005070 sampling Methods 0.000 claims description 4
- 239000002210 silicon-based material Substances 0.000 claims description 4
- 238000000701 chemical imaging Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 2
- 239000005431 greenhouse gas Substances 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
Abstract
The invention relates to a snapshot type spectrum imaging device, in particular to a compact snapshot type spectrum imaging device and method based on a micro-interference array, which solve the technical problems that the prior snapshot type spectrum imaging device is small in size, high in return visit frequency, high in spatial resolution and high in spatial coverage rate when the prior snapshot type spectrum imaging device is difficult to meet the requirement of greenhouse gas measurement. The device is characterized in that: the device comprises an imaging objective lens, a diaphragm, a collimating objective lens, an optical filter, a micro interference array, a micro diaphragm array, a micro lens array and a large target surface detector which are sequentially arranged along an optical path; the micro interference array is an array of m rows and n columns of interference modulation units consisting of m times n interference modulation units with different thicknesses; the thickness of each row increases from the first column to the nth column, and from the 2 nd row, the thickness of the first column of the row is larger than that of the last column of the last row; the diaphragm units and the lens units are in one-to-one correspondence with the interferometric modulation units.
Description
Technical Field
The present invention relates to a snapshot spectrum imaging device, and more particularly, to a compact snapshot spectrum imaging device and method based on a micro-interference array.
Background
Greenhouse gases (methane, carbon dioxide and the like) are important factors affecting climate change and causing global warming, so that the measurement accuracy of the greenhouse gases is improved, and the sources of the greenhouse gases can be analyzed more accurately. Currently, there are two major technical challenges faced by greenhouse gas monitoring technologies: the first is to design an ultra-compact optical measurement scheme to realize high-stability and high-precision measurement; the second is to increase the return visit frequency, spatial resolution and spatial coverage of the monitoring.
The snapshot spectrum imaging technology can synchronously acquire two-dimensional space information and spectrum information of a target changing along with time, and gradually develops into a spectrum measurement means with great potential. Currently, conventional snapshot-type spectral imaging devices mainly include both filter type and interference type. The filter type snapshot type spectrum imaging device is limited by a coating process, so that higher spectrum resolution is difficult to realize; however, the existing interference type snapshot spectrum imaging device is limited by the number of signal sampling points, so that the spectrum resolution is difficult to improve, and the size is large. Therefore, the existing snapshot spectrum imaging device is difficult to meet the application requirements of small size, high return visit frequency, high spatial resolution and high spatial coverage rate of the imaging device when greenhouse gas measurement is required.
Disclosure of Invention
The invention aims to provide a compact snapshot spectrum imaging device and method based on a micro-interference array, which are used for solving the technical problems that the imaging device is small in size, high in return visit frequency, high in spatial resolution and high in spatial coverage rate when the existing snapshot spectrum imaging device is difficult to meet the requirement of greenhouse gas measurement.
The technical scheme adopted by the invention is that the compact snapshot type spectrum imaging device based on the micro-interference array is characterized in that:
the device comprises an imaging objective lens, a diaphragm, a collimating objective lens, an optical filter, a micro interference array, a micro diaphragm array, a micro lens array and a large target surface detector which are sequentially arranged along an optical path;
the micro interference array is an m-row n-column interference modulation unit array composed of m times n interference modulation units, wherein m and n are natural numbers greater than or equal to 2; the row direction and the column direction of the interference modulation unit array are perpendicular to the light path direction, the thickness direction of the interference modulation units is parallel to the light path direction, and the end surfaces of m times n interference modulation units, which are close to one side of the optical filter, are positioned on the same plane; the thicknesses of the m by n interferometric modulation units are different, wherein the interferometric modulation units positioned in the first row and the first column are thinnest, the thickness of each row increases gradually from the first column to the n column, and the thickness of the first column of each row is larger than that of the last column of the last row from the 2 nd row;
the diaphragm units in the micro diaphragm array and the lens units of the micro lens array are in one-to-one correspondence with the interference modulation units in the micro interference array; the aperture of each aperture unit is smaller than the aperture of the corresponding interferometric modulation unit and lens unit.
Further, for data processing convenience, the interferometric modulating unit is square.
Further, the micro-interference array is made of an uncoated silicon material.
Further, the micro interference array is made of glass materials treated by a coating process.
Meanwhile, the invention also provides an imaging method of the compact snapshot spectrum imaging device based on the micro-interference array, which is characterized by comprising the following steps:
step 1: an incident light beam from a scene to be detected is imaged at the position of the diaphragm through the imaging objective lens, a target view field is determined, stray light beams are eliminated, and an effective light beam is emitted after passing through the diaphragm;
step 2: the light beam emitted from the diaphragm in the step 1 passes through the collimating objective lens to form a collimated light beam;
step 3: after the collimated light beam formed in the step 2 passes through the optical filter, the light beam of the gating target wave band is emitted through the optical filter, and the light beams of other wave bands are reflected or absorbed;
step 4: the collimated light beams emitted from the optical filter in the step 3 enter the micro-interference array, are modulated by the interference modulation units with different thicknesses in the micro-interference array respectively, continuously distributed modulation optical path differences are introduced, and each beam of incident light is split into a plurality of beams of parallel light to be emitted;
step 5: multiple parallel light beams emitted from the micro interference array in the step 4 are gated and emitted by corresponding diaphragm units in the micro diaphragm array, so as to shield crosstalk light beams among different interference modulation units;
step 6: the beams gated by the diaphragm units in the step 5 pass through the corresponding lens units in the micro lens array, are converged and imaged on the photosensitive surface of the large target surface detector;
step 7: capturing an interference pattern array signal by the large target surface detector according to the imaging on the photosensitive surface in the step 6, and extracting effective interference signals of the same target point from the interference pattern array signal;
step 8: and (3) integrally translating or rotating the compact snapshot spectrum imaging device based on the micro interference array to finish a one-dimensional imaging scanning process, repeating the steps 1 to 7 for a plurality of times in the one-dimensional imaging scanning process, combining the effective interference signals of the same target point extracted in each step 7 to obtain more refined interference signals, directly analyzing the refined interference signals or carrying out data inversion on the refined interference signals, analyzing the restored spectrum signals, and monitoring the change condition of an incident spectrum.
Further, in step 7, the effective interference signal is an interference signal that is not included in the optical path difference sampling interval and is far from zero optical path difference.
The beneficial effects of the invention are as follows:
(1) The compact snapshot spectrum imaging device and the method based on the micro interference array have the advantages that the micro interference array, the micro aperture array and the micro lens array are adopted, so that the structure is very compact, and the compact snapshot spectrum imaging device is beneficial to the miniaturization design of the imaging device and the application to a small satellite carrying platform; meanwhile, as the micro interference array, the micro aperture array and the micro lens array are adopted, m times n small images can be obtained each time, and compared with an imaging device with only one large image, the spatial resolution, the spatial coverage rate and the return visit frequency are improved; therefore, the invention solves the technical problems that the prior snapshot type spectrum imaging device is small in size, high in return visit frequency, high in spatial resolution and high in spatial coverage rate when the prior snapshot type spectrum imaging device is difficult to meet the requirement of greenhouse gas measurement. The invention shortens the measurement period of greenhouse gas and improves the detection precision, the spatial resolution and the coverage range under the condition of realizing the light and small system.
(2) According to the compact snapshot spectrum imaging device and method based on the micro interference array, as the micro interference array, the micro aperture array and the micro lens array are adopted, a plurality of small images can be collected at one time, the effective interference signal envelopes are more and finer, and therefore the sensitivity of analyzing the restored spectrum signals is improved through data inversion on the basis.
(3) The compact snapshot type spectrum imaging device and the compact snapshot type spectrum imaging method based on the micro-interference array can synchronously and efficiently acquire the spatial information and the spectrum information of the detection target which change along with time.
Drawings
FIG. 1 is a schematic diagram of a compact snapshot spectrum imaging device based on micro-interference array according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a micro-interference array in accordance with an embodiment of the present invention;
FIG. 3 is an interferometric array schematic of an embodiment of a compact snapshot spectral imaging device employing a micro-interferometric array based array of the present invention.
The reference numerals in the drawings are as follows:
1-imaging objective lens, 2-diaphragm, 3-collimating objective lens, 4-optical filter, 5-micro interference array, 6-micro diaphragm array, 7-micro lens array and 8-large target surface detector.
Detailed Description
The invention will be described in detail below with reference to the drawings and the detailed description.
Referring to fig. 1, the compact snapshot spectrum imaging device based on the micro interference array of the invention comprises an imaging objective lens 1, a diaphragm 2, a collimating objective lens 3, an optical filter 4, a micro interference array 5, a micro aperture array 6, a micro lens array 7 and a large target surface detector 8 which are sequentially arranged along an optical path.
Referring to fig. 2, the micro interference array 5 is an array of m rows and n columns of m by n interferometric modulation units, where m and n are natural numbers equal to or greater than 2; the row direction and the column direction of the interference modulation unit array are perpendicular to the light path direction, the thickness direction of the interference modulation units is parallel to the light path direction, and the end faces of m times n interference modulation units close to one side of the optical filter 4 are positioned on the same plane; the thicknesses of the m by n interferometric modulation units are different, wherein the interferometric modulation units in the first row and the first column are thinnest, the thickness of each row increases from the first column to the n column in sequence, and the thickness of the first column of each row is larger than that of the last column of the last row from the 2 nd row. The diaphragm units in the micro diaphragm array 6 and the lens units of the micro lens array 7 are in one-to-one correspondence with the interference modulation units in the micro interference array 5; the aperture of each aperture unit is smaller than the aperture of the corresponding interference modulation unit and lens unit, so as to avoid the crosstalk of light beams between different interference modulation units. In this embodiment, m and n are 7.
In this embodiment, the interferometric modulating unit is square. The micro interference array 5 is made of uncoated silicon material; in addition to the uncoated silicon material of this embodiment, a glass material treated by a coating process may be used.
With CO in greenhouse gases 2 For example, the imaging method of the compact snapshot spectrum imaging device based on the micro interference array comprises the following steps:
step 1: an incident light beam from a scene to be detected is imaged at the position of the diaphragm 2 through the imaging objective lens 1, a target view field is determined, stray light beams are eliminated, and an effective light beam is emitted after passing through the diaphragm 2;
step 2: the light beam emitted from the diaphragm 2 in the step 1 passes through the collimating objective lens 3 to form a collimated light beam;
step 3: after the collimated light beam formed in the step 2 passes through the optical filter 4, the light beam of the gating target wave band is emitted through the optical filter 4, and the light beams of other wave bands are reflected or absorbed; in this embodiment, the filter 4 gates a beam with a center wavelength of 1.6 μm;
step 4: the collimated light beams emitted from the optical filter 4 in the step 3 enter the micro-interference array 5, are modulated by the interference modulation units with different thicknesses in the micro-interference array 5 respectively, and are led into continuously distributed modulation optical path differences, and each beam of incident light is split into a plurality of parallel light beams to be emitted; in this embodiment, the number of interference modulation units in the micro interference array 5 is 7×7, each of the interference modulation units is square, and the side length thereof is 1920 μm;
step 5: multiple parallel light beams emitted from the micro interference array 5 in the step 4 are gated and emitted by corresponding diaphragm units in the micro diaphragm array 6, so as to shield crosstalk light beams among different interference modulation units;
step 6: the beams which are gated and emergent by the diaphragm units in the step 5 pass through the corresponding lens units in the micro lens array 7, are converged and imaged on the photosensitive surface of the large target surface detector 8; in this embodiment, the number of pixels of the large target surface detector 8 is 1024×1024, and the pixel size is 15 μm;
step 7: the large target surface detector 8 captures the interferogram array signal according to the imaging on the photosensitive surface in the step 6, see fig. 3, and extracts the effective interference signal of the same target point from the interferogram array signal; in the present embodiment, the number of pixels per interferogram array unit is 128×128;
step 8: and (3) integrally translating or rotating the compact snapshot spectrum imaging device based on the micro interference array to finish a one-dimensional imaging scanning process, repeating the steps 1 to 7 for a plurality of times in the one-dimensional imaging scanning process, combining the effective interference signals of the same target point extracted in each step 7 to obtain more refined interference signals, directly analyzing the refined interference signals or carrying out data inversion on the refined interference signals, analyzing the restored spectrum signals, and monitoring the change condition of an incident spectrum.
The effective interference signal in the step 7 is an interference signal which is not included in the optical path difference sampling interval and is far from zero optical path difference.
The compact snapshot spectrum imaging device and method based on the micro-interference array can be used for monitoring greenhouse gases with high efficiency, high resolution and large breadth.
Claims (5)
1. A compact snapshot spectrum imaging device based on a micro-interference array, characterized in that:
the device comprises an imaging objective lens (1), a diaphragm (2), a collimating objective lens (3), an optical filter (4), a micro interference array (5), a micro diaphragm array (6), a micro lens array (7) and a large target surface detector (8) which are sequentially arranged along a light path;
the micro interference array (5) is an m-row n-column interference modulation unit array composed of m times n interference modulation units, wherein m and n are natural numbers greater than or equal to 2; the row direction and the column direction of the interference modulation unit array are perpendicular to the light path direction, the thickness direction of the interference modulation units is parallel to the light path direction, and the end surfaces of m times n interference modulation units, which are close to one side of the optical filter (4), are positioned on the same plane; the thicknesses of the m by n interferometric modulation units are different, wherein the interferometric modulation units positioned in the first row and the first column are thinnest, the thickness of each row increases gradually from the first column to the n column, and the thickness of the first column of each row is larger than that of the last column of the last row from the 2 nd row;
the diaphragm units in the micro diaphragm array (6) and the lens units of the micro lens array (7) are in one-to-one correspondence with the interference modulation units in the micro interference array (5); the aperture of each diaphragm unit is smaller than the aperture of the corresponding interference modulation unit and lens unit;
the interferometric modulating unit is square.
2. The micro-interference array-based compact snapshot spectrum imaging device of claim 1, wherein: the micro interference array (5) is made of uncoated silicon material.
3. The micro-interference array-based compact snapshot spectrum imaging device of claim 1, wherein: the micro interference array (5) is made of glass materials treated by a coating process.
4. A method of imaging a compact snapshot spectral imaging device based on a micro-interference array according to any of claims 1 to 3, comprising the steps of:
step 1: an incident light beam from a scene to be detected is imaged at the position of the diaphragm (2) through the imaging objective lens (1), a target view field is determined, stray light beams are eliminated, and an effective light beam is emitted after passing through the diaphragm (2);
step 2: the light beam emitted from the diaphragm (2) in the step 1 passes through the collimating objective lens (3) to form a collimated light beam;
step 3: after the collimated light beam formed in the step 2 passes through the optical filter (4), the light beam of the gating target wave band is emitted through the optical filter (4), and the light beams of other wave bands are reflected or absorbed;
step 4: the collimated light beams emitted from the optical filter (4) in the step 3 enter the micro-interference array (5), are modulated by the interference modulation units with different thicknesses in the micro-interference array (5) respectively, continuously distributed modulation optical path differences are introduced, and each incident light beam is split into a plurality of parallel light beams to be emitted;
step 5: multiple parallel light beams emitted from the micro interference array (5) in the step (4) are gated and emitted by corresponding diaphragm units in the micro diaphragm array (6), so that crosstalk light beams among different interference modulation units are shielded;
step 6: the beams gated by the diaphragm units in the step 5 are converged and imaged on the photosensitive surface of the large target surface detector (8) after passing through the corresponding lens units in the micro lens array (7);
step 7: the large target surface detector (8) captures an interference pattern array signal according to the imaging on the photosensitive surface in the step 6, and extracts an effective interference signal of the same target point from the interference pattern array signal;
step 8: and (3) integrally translating or rotating the compact snapshot spectrum imaging device based on the micro interference array to finish a one-dimensional imaging scanning process, repeating the steps 1 to 7 for a plurality of times in the one-dimensional imaging scanning process, combining the effective interference signals of the same target point extracted in each step 7 to obtain more refined interference signals, directly analyzing the refined interference signals or carrying out data inversion on the refined interference signals, analyzing the restored spectrum signals, and monitoring the change condition of an incident spectrum.
5. The imaging method as claimed in claim 4, wherein: in step 7, the effective interference signal is an interference signal which is not included in the optical path difference sampling interval and is far from zero optical path difference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911377305.3A CN111006765B (en) | 2019-12-27 | 2019-12-27 | Compact snapshot type spectrum imaging device and method based on micro-interference array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911377305.3A CN111006765B (en) | 2019-12-27 | 2019-12-27 | Compact snapshot type spectrum imaging device and method based on micro-interference array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111006765A CN111006765A (en) | 2020-04-14 |
| CN111006765B true CN111006765B (en) | 2024-01-30 |
Family
ID=70119140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911377305.3A Active CN111006765B (en) | 2019-12-27 | 2019-12-27 | Compact snapshot type spectrum imaging device and method based on micro-interference array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111006765B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111750997A (en) * | 2020-06-29 | 2020-10-09 | 中国科学院西安光学精密机械研究所 | Optical imaging detection device based on polarization time-sharing spectrum synchronization |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106456070A (en) * | 2014-06-26 | 2017-02-22 | 索尼公司 | Imaging device and method |
| CN108088561A (en) * | 2017-12-15 | 2018-05-29 | 哈尔滨工业大学 | A kind of fast illuminated light field-optical spectrum imagers and imaging method |
| CN108151878A (en) * | 2017-12-20 | 2018-06-12 | 中国科学院长春光学精密机械与物理研究所 | Snapshot imaging spectrometer based on micro- imaging lens array with array phase speculum |
| CN109477758A (en) * | 2016-06-30 | 2019-03-15 | 国家航空与空间研究事务局 | Fourier transformation multichannel optical spectrum imaging device |
| CN211401425U (en) * | 2019-12-27 | 2020-09-01 | 中国科学院西安光学精密机械研究所 | Compact snapshot type spectral imaging device based on micro-interference array |
-
2019
- 2019-12-27 CN CN201911377305.3A patent/CN111006765B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106456070A (en) * | 2014-06-26 | 2017-02-22 | 索尼公司 | Imaging device and method |
| CN109477758A (en) * | 2016-06-30 | 2019-03-15 | 国家航空与空间研究事务局 | Fourier transformation multichannel optical spectrum imaging device |
| CN108088561A (en) * | 2017-12-15 | 2018-05-29 | 哈尔滨工业大学 | A kind of fast illuminated light field-optical spectrum imagers and imaging method |
| CN108151878A (en) * | 2017-12-20 | 2018-06-12 | 中国科学院长春光学精密机械与物理研究所 | Snapshot imaging spectrometer based on micro- imaging lens array with array phase speculum |
| CN211401425U (en) * | 2019-12-27 | 2020-09-01 | 中国科学院西安光学精密机械研究所 | Compact snapshot type spectral imaging device based on micro-interference array |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111006765A (en) | 2020-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11681045B2 (en) | Three-dimensional hyperspectral imaging systems and methods using a light detection and ranging (LIDAR) focal plane array | |
| Cao et al. | A prism-mask system for multispectral video acquisition | |
| US6525827B2 (en) | Method and system for imaging an object with a plurality of optical beams | |
| US7053395B2 (en) | Wafer defect detection system with traveling lens multi-beam scanner | |
| US4976542A (en) | Digital array scanned interferometer | |
| US20140085629A1 (en) | Active Hyperspectral Imaging Systems | |
| WO1994007117A2 (en) | Airborne multiband imaging spectrometer | |
| CN104359555B (en) | A kind of portable EO-1 hyperion reconstructor based on digital micro-mirror | |
| CN110501289B (en) | Spectrum broadening method and device based on digital micromirror array (DMD) | |
| CN205808912U (en) | Compact high-resolution wide visual field spectrum imaging system | |
| CN107942338B (en) | Multi-wavelength associated imaging system based on digital micromirror device | |
| CN106382988B (en) | A kind of hyperspectral imager based on step optical filter | |
| JP6918395B1 (en) | Imaging device | |
| CN108896183B (en) | Aperture coding polarization spectrum imaging device | |
| JP2020190557A (en) | Time resolution hyperspectral single pixel imaging | |
| CN111006765B (en) | Compact snapshot type spectrum imaging device and method based on micro-interference array | |
| CN211401425U (en) | Compact snapshot type spectral imaging device based on micro-interference array | |
| JPH0599610A (en) | Method and device for detecting wave front of beam | |
| CN110632002A (en) | Aperture coding spectrum detection device based on compressed sensing | |
| CN108931298B (en) | Compact high-flux high-stability interference imaging spectrometer | |
| CN106382985A (en) | Spectral imaging method and spectral imaging device realized by means of multiple slits | |
| CN108507679B (en) | Broad spectrum high-resolution spectrum interferometry method and device | |
| CN217083959U (en) | High spectrum system and spectrum appearance based on MEMS | |
| CN108489613B (en) | A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure | |
| CN111504917A (en) | Low-cost quick linear spectral imaging system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |