CN211401425U - Compact snapshot type spectral imaging device based on micro-interference array - Google Patents
Compact snapshot type spectral imaging device based on micro-interference array Download PDFInfo
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Abstract
The utility model relates to a snapshot formula spectral imaging device, in particular to compact snapshot formula spectral imaging device based on little interference array has solved current snapshot formula spectral imaging device and has been difficult to satisfy when measuring greenhouse gas, needs imaging device small, the frequency of revisiting is high, spatial resolution is high and the technical problem that the space coverage is high. The device is characterized in that: the micro-interference micro-lens array comprises an imaging objective lens, a diaphragm, a collimating objective lens, an optical filter, a micro-interference array, a micro-diaphragm array, a micro-lens array and a large target surface detector which are sequentially arranged along a light path; the micro-interference array is an m-row and n-column interference modulation unit array consisting of m multiplied by n interference modulation units with different thicknesses; the interferometric modulation unit positioned in the first row and the first column is the thinnest, the thickness of each row increases from the first column to the nth column, and the thickness of the first column of the row is larger than that of the last column of the previous row from the 2 nd row; the diaphragm units and the lens units correspond to the interference modulation units one by one.
Description
Technical Field
The utility model relates to a snapshot formula spectral imaging device, in particular to compact snapshot formula spectral imaging device based on little interference array.
Background
Greenhouse gases (methane, carbon dioxide and the like) are important factors influencing climate change and causing global warming, the measurement precision of the greenhouse gases is improved, and the sources of the greenhouse gases can be analyzed more accurately. Currently, there are two major technical challenges facing greenhouse gas monitoring technology: the first is to design an ultra-compact optical measurement scheme to realize high-stability and high-precision measurement; the second is to increase the frequency of the return visits, spatial resolution and spatial coverage of the monitoring.
The snapshot type spectral imaging technology can synchronously acquire two-dimensional spatial information and spectral information of a target changing along with time, and is gradually developed into a spectral measurement means with great potential. At present, conventional snapshot type spectral imaging apparatuses mainly include both a filter type and an interference type. The filter snapshot type spectral imaging device is limited by a coating process, so that high spectral resolution is difficult to realize; the prior interference type snapshot spectrum imaging device is limited by the number of signal sampling points, so that the spectrum resolution is difficult to improve and the volume is large. Therefore, the existing snapshot type spectral imaging devices are difficult to meet the application requirements of small size, high revisit frequency, high spatial resolution and high spatial coverage rate of the imaging device when measuring greenhouse gases.
Disclosure of Invention
The utility model aims at providing a compact snapshot formula spectral imaging device based on little interference array to when solving current snapshot formula spectral imaging device and being difficult to satisfy and measuring greenhouse gas, need imaging device small, the frequency of revisiting is high, spatial resolution is high and the technical problem that the space coverage is high.
The utility model discloses the technical scheme who adopts is, a compact snapshot formula spectral imaging device based on micro interference array, its special character lies in:
the micro-interference micro-lens system comprises an imaging objective lens, a diaphragm, a collimating objective lens, an optical filter, a micro-interference array, a micro-diaphragm array, a micro-lens array and a large target surface detector which are sequentially arranged along a light path;
the micro-interference array is an interferometric modulation unit array which is composed of m multiplied by n interferometric modulation units and has m rows and n columns, wherein m and n are natural numbers which are more than or equal to 2; the row direction and the column direction of the interference modulation unit array are perpendicular to the light path direction, the thickness direction of the interference modulation units is parallel to the light path direction, and the end faces of the m times n interference modulation units, which are close to one side of the optical filter, are positioned on the same plane; the thicknesses of the m multiplied by n interferometric modulation units are different, wherein the interferometric modulation unit positioned in the first row and the first column is the thinnest, the thickness of each row increases from the first column to the nth column in sequence, and the thickness of the first column of the row from the 2 nd row is larger than that of the last column of the previous row;
diaphragm units in the micro diaphragm array and lens units in the micro lens array are in one-to-one correspondence with interference modulation units in the micro interference array; and the clear aperture of each diaphragm unit is smaller than the apertures of the corresponding interference modulation unit and the corresponding lens unit.
Further, for convenience of data processing, the interferometric modulation units are square.
Further, the micro-interference array is made of an uncoated silicon material.
Further, the micro interference array is made of a glass material processed by a coating process.
And simultaneously, the utility model also discloses an imaging method based on above-mentioned compact snapshot formula spectral imaging device based on little interference array, its special character lies in, including following step:
step 1: an incident beam from a scene to be detected is imaged at the position of the diaphragm through the imaging objective lens, a target field of view is determined, a stray light beam is eliminated, and an effective light beam is emitted after penetrating through the diaphragm;
step 2: the light beam emitted from the diaphragm in the step 1 passes through a collimating objective lens to form a collimated light beam;
and step 3: after the collimated light beams formed in the step 2 pass through the optical filter, the light beams of the gated target wave band penetrate through the optical filter to be emitted, and the light beams of other wave bands are reflected or absorbed;
and 4, step 4: the collimated light beams emitted from the optical filter in the step 3 enter the micro-interference array, are respectively modulated by the interference modulation units with different thicknesses in the micro-interference array, continuously distributed modulation optical path differences are introduced, and each incident light beam is split into a plurality of parallel light beams to be emitted;
and 5: a plurality of parallel light beams emitted from the micro interference array in the step 4 are gated and emitted by corresponding diaphragm units in the micro diaphragm array, and crosstalk light beams among different interference modulation units are shielded;
step 6: the light beams gated and emitted by the diaphragm unit in the step 5 are converged and imaged on a photosensitive surface of the large target surface detector after passing through a corresponding lens unit in the micro lens array;
and 7: the large target surface detector captures an interference pattern array signal according to the imaging on the photosensitive surface in the step 6, and extracts an effective interference signal of the same target point from the interference pattern array signal;
and 8: and integrally translating or rotating the compact snapshot type spectral imaging device based on the micro-interference array to complete a one-dimensional imaging scanning process, repeating the steps 1 to 7 for multiple times in the one-dimensional imaging scanning process, combining effective interference signals of the same target point extracted in the step 7 every time to obtain more refined interference signals, directly analyzing the refined interference signals, or performing data inversion on the refined interference signals, analyzing the restored spectral signals of the refined interference signals, and monitoring the change condition of the incident spectrum.
Further, in step 7, the effective interference signal is an interference signal that is not included in the optical path difference sampling interval and is far from the zero optical path difference.
The utility model has the advantages that:
(1) the compact snapshot type spectrum imaging device based on the micro interference array of the utility model adopts the micro interference array, the micro diaphragm array and the micro lens array, so that the structure is very compact, and the compact snapshot type spectrum imaging device is beneficial to the miniaturization design of the imaging device and the application to a small satellite carrying platform; meanwhile, due to the adoption of a micro interference array, a micro diaphragm array and a micro lens array, m by n small images can be obtained each time, and compared with an original imaging device with only one large image, the spatial resolution, the spatial coverage rate and the return visit frequency of the imaging device are improved; therefore, the utility model provides a current snapshot formula spectral imaging device be difficult to satisfy when measuring greenhouse gas, need imaging device small, return visit the technical problem that frequency is high, spatial resolution is high and the space coverage is high. The utility model discloses shorten greenhouse gas's measurement cycle under the condition of realization system miniaturization, improved detection precision, spatial resolution and coverage.
(2) The utility model discloses a compact snapshot formula spectral imaging device based on micro-interference array owing to adopted micro-interference array, little diaphragm array and microlens array, once can gather many sprites, and its effective interference signal envelope is more, thinner, consequently, through the data inversion on this basis, analyzes its sensitivity improvement of restoring the spectral signal.
(3) The utility model discloses a compact snapshot formula spectral imaging device based on little interference array can acquire the space information and the spectral information of surveying target along with time variation high-efficiently in step.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a compact snapshot-type spectral imaging device based on a micro-interference array according to the present invention;
FIG. 2 is a schematic structural diagram of a micro interference array according to an embodiment of the present invention;
fig. 3 is a schematic diagram of an interference pattern array obtained by using the embodiment of the compact snapshot type spectral imaging device based on micro interference array of the present invention.
The reference numerals in the drawings are explained as follows:
the system comprises an imaging objective lens 1, a diaphragm 2, a collimating objective lens 3, a filter 4, a micro interference array 5, a micro diaphragm array 6, a micro lens array 7 and a large target surface detector 8.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1, the utility model relates to a compact snapshot formula spectral imaging device based on micro-interference array, include along imaging objective 1, diaphragm 2, collimating objective 3, light filter 4, micro-interference array 5, little diaphragm array 6, microlens array 7 and big target surface detector 8 that the light path set gradually.
Referring to fig. 2, the micro-interference array 5 is an interferometric modulation unit array with m rows and n columns composed of m by n interferometric modulation units, where m and n are natural numbers greater than or equal to 2; the row direction and the column direction of the interference modulation unit array are both vertical to the optical path direction, the thickness direction of the interference modulation units is parallel to the optical path direction, and the end surfaces of the m times n interference modulation units close to the side of the optical filter 4 are positioned on the same plane; the thicknesses of the m-by-n interferometric modulation units are different, wherein the interferometric modulation unit in the first row and the first column is the thinnest, the thickness of each row increases from the first column to the nth column, and the thickness of the first column in the row from the 2 nd row is greater than that of the last column in the previous row. The diaphragm units in the micro diaphragm array 6 and the lens units in the micro lens array 7 are in one-to-one correspondence with the interference modulation units in the micro interference array 5; the clear aperture of each diaphragm unit is smaller than the apertures of the corresponding interference modulation unit and the lens unit, so that the effect of avoiding beam crosstalk between different interference modulation units is achieved. In this example, m and n are both 7.
In this embodiment, the interferometric modulation units are square. The micro interference array 5 is made of an uncoated silicon material; in addition to the non-coated silicon material used in the present embodiment, a glass material processed by a coating process may also be used.
By CO in greenhouse gases2For example, the imaging method based on the compact snapshot type spectral imaging device based on the micro-interference array comprises the following steps:
step 1: an incident beam from a scene to be detected is imaged at the position of the diaphragm 2 through the imaging objective lens 1, a target field of view is determined, a stray light beam is eliminated, and an effective light beam is emitted after penetrating through the diaphragm 2;
step 2: the light beam emitted from the diaphragm 2 in the step 1 passes through a collimating objective lens 3 to form a collimated light beam;
and step 3: after the collimated light beam formed in the step 2 passes through the optical filter 4, the light beam of the gated target waveband is emitted through the optical filter 4, and the light beams of other wavebands are reflected or absorbed; in the present embodiment, the optical filter 4 gates a light beam having a center wavelength of 1.6 μm;
and 4, step 4: collimated light beams emitted from the optical filter 4 in the step 3 enter the micro-interference array 5, are respectively modulated by interference modulation units with different thicknesses in the micro-interference array 5, continuously distributed modulation optical path differences are introduced, and each incident light beam is split into a plurality of parallel light beams to be emitted; in the present embodiment, the number of the interferometric modulation units in the micro-interferometric array 5 is 7 × 7, each interferometric modulation unit is a square, and the side length of each interferometric modulation unit is 1920 μm;
and 5: a plurality of parallel light beams emitted from the micro interference array 5 in the step 4 are gated and emitted by corresponding diaphragm units in the micro diaphragm array 6, and crosstalk light beams among different interference modulation units are shielded;
step 6: the light beams emitted by the stop unit in the step 5 are converged and imaged on the photosensitive surface of the large target surface detector 8 after passing through the corresponding lens unit in the micro lens array 7; in this embodiment, the number of pixels of the large target surface detector 8 is 1024 × 1024, and the size of the pixels is 15 μm;
and 7: the large target surface detector 8 captures an interference pattern array signal according to the imaging on the photosensitive surface in the step 6, referring to fig. 3, and extracts an effective interference signal of the same target point from the interference pattern array signal; in the present embodiment, the number of pixels per interference pattern array unit is 128 × 128;
and 8: the compact snapshot type spectral imaging device based on the micro interference array is translated or rotated integrally to complete a one-dimensional imaging scanning process, in the one-dimensional imaging scanning process, the steps 1 to 7 are repeated for multiple times, effective interference signals of the same target point extracted in the step 7 every time are combined, more refined interference signals are obtained, the refined interference signals are directly analyzed, or data inversion is carried out on the refined interference signals, the spectrum signals recovered by the refined interference signals are analyzed, and the change condition of an incident spectrum is monitored.
The effective interference signal in the step 7 is an interference signal which is not included in the optical path difference sampling interval and is far away from the zero optical path difference.
The utility model discloses a compact snapshot formula spectral imaging device based on little interference array can be used to in high efficiency, high resolution, the wide greenhouse gas monitoring by a wide margin.
Claims (4)
1. A compact snapshot type spectral imaging device based on a micro-interference array is characterized in that:
the micro-interference micro-lens system comprises an imaging objective lens (1), a diaphragm (2), a collimating objective lens (3), an optical filter (4), a micro-interference array (5), a micro-diaphragm array (6), a micro-lens array (7) and a large target surface detector (8) which are sequentially arranged along a light path;
the micro-interference array (5) is an interferometric modulation unit array which is composed of m multiplied by n interferometric modulation units and has m rows and n columns, wherein m and n are natural numbers which are more than or equal to 2; the row direction and the column direction of the interference modulation unit array are perpendicular to the optical path direction, the thickness direction of the interference modulation units is parallel to the optical path direction, and the end faces of the m times n interference modulation units, which are close to one side of the optical filter (4), are positioned on the same plane; the thicknesses of the m multiplied by n interferometric modulation units are different, wherein the interferometric modulation unit positioned in the first row and the first column is the thinnest, the thickness of each row increases from the first column to the nth column in sequence, and the thickness of the first column of the row from the 2 nd row is larger than that of the last column of the previous row;
diaphragm units in the micro diaphragm array (6) and lens units in the micro lens array (7) are in one-to-one correspondence with interference modulation units in the micro interference array (5); and the clear aperture of each diaphragm unit is smaller than the apertures of the corresponding interference modulation unit and the corresponding lens unit.
2. The compact snapshot micro-interference array-based spectral imaging apparatus according to claim 1, wherein: the interferometric modulation units are square.
3. The compact snapshot micro-interference array-based spectral imaging apparatus according to claim 1 or 2, wherein: the micro-interference array (5) is made of an uncoated silicon material.
4. The compact snapshot micro-interference array-based spectral imaging apparatus according to claim 1 or 2, wherein: the micro interference array (5) is made of glass materials processed by a coating process.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111006765A (en) * | 2019-12-27 | 2020-04-14 | 中国科学院西安光学精密机械研究所 | Compact snapshot type spectral imaging device and method based on micro-interference array |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111006765A (en) * | 2019-12-27 | 2020-04-14 | 中国科学院西安光学精密机械研究所 | Compact snapshot type spectral imaging device and method based on micro-interference array |
| CN111006765B (en) * | 2019-12-27 | 2024-01-30 | 中国科学院西安光学精密机械研究所 | Compact snapshot type spectrum imaging device and method based on micro-interference array |
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