CN108489613A - A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure - Google Patents
A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure Download PDFInfo
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- CN108489613A CN108489613A CN201810110121.XA CN201810110121A CN108489613A CN 108489613 A CN108489613 A CN 108489613A CN 201810110121 A CN201810110121 A CN 201810110121A CN 108489613 A CN108489613 A CN 108489613A
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 93
- 238000003384 imaging method Methods 0.000 claims abstract description 34
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 210000001747 pupil Anatomy 0.000 claims abstract description 11
- 238000005286 illumination Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000004907 flux Effects 0.000 abstract description 8
- 230000003595 spectral effect Effects 0.000 abstract description 7
- 230000000007 visual effect Effects 0.000 abstract description 7
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- 238000001237 Raman spectrum Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 230000009466 transformation Effects 0.000 description 5
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The present invention proposes a kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure, and imaging spectrometer includes objective table, the first collimation lens, the first Raman optical filter, the first speculum, the first condenser lens, the first beam-splitter, the second beam-splitter, two the second speculums, two volume holographic rib grid, the second Raman optical filter, the second collimation lens, third speculum, the second condenser lens, emergent pupil, field lens and planar array detector.The advantages of volume holographic grating type space heterodyne Raman spectrometer proposed by the present invention combines color dispersion-type Raman spectrometer and FTRaman SpectrometerFTIRRaman, light path is divided into two-arm light path using beam-splitter, space heterodyne Raman interference light is obtained, and imaging spectral information is obtained using space heterodyne interference light；And improve the luminous flux of system using volume holographic rib grid and increase the visual field of system, total is compact, stable, highly reliable without moving parts, performance.
Description
Technical field
The present invention relates to spectrometric instrument technical field, more particularly to a kind of volume holographic grating type space heterodyne Raman at
As light path of optical spectrometer structure.
Background technology
Raman spectroscopy be a kind of characteristic based on light-matter interaction and using inelastic Raman light scattering come
The method for carrying out nondestructive detecting.Incident laser excitation is tested molecular system, to generate the Raman different from incident light frequency
Scatter light.By the relative intensity of particular spectral ingredient in measurement raman scattering spectrum and its relative to the frequency displacement of incident light, so that it may
To obtain the relevant information for being tested molecular system.However, some chemical substances have similar Raman spectral characteristics, high score is needed
The Raman spectrometer of resolution could be differentiated.According to the operation principle of Raman spectrometer, can be divided into：Color dispersion-type Raman spectrometer, Fu
In leaf transformation Raman spectrometer and tunable optic filter Raman spectrometer.The Raman spectrometer of color dispersion-type needs very small slit
Higher resolution ratio could be obtained, so color dispersion-type Raman spectrometer can not obtain higher luminous flux；Fourier transformation Raman
Spectrometer does not need entrance slit, high-resolution and high-throughput feature may be implemented, but this kind of spectrometer is needed using movement
Component obtains optical path difference；Tunable optic filter Raman spectrometer has the advantages that without motion firmware and small, but it is differentiated
Rate is low and cannot be operated in ultraviolet band.
To overcome the above disadvantages, a kind of new volume holographic grating type space heterodyne Raman spectroscopy instrument light path knot is designed
Structure.
Invention content
In view of this, an embodiment of the present invention provides provide kind of a low cost, high-resolution, high throughput, movement-less part, knot
Compact, the light-weight volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure of structure.
A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure is provided in the embodiment of the present invention, is wrapped
It includes：Preposition imaging system, the preposition imaging system includes objective table, the first collimation lens, the first Raman optical filter, first anti-
Mirror and the first condenser lens are penetrated, wherein the objective table is located at the focal plane of first collimation lens；Interferometer, it is described dry
Interferometer is located at the rear of the preposition imaging system, the interferometer include the first beam-splitter, the second beam-splitter, two it is second anti-
Penetrate mirror and two volume holographic rib grid；Postposition imaging system, the postposition imaging system is located at the rear of the interferometer, after described
It includes the second Raman optical filter, the second collimation lens, third speculum, the second condenser lens and emergent pupil to set imaging system；
Reception system, the reception system are located at the lower section of the postposition imaging system, and the reception system includes field lens and detector.
Optionally, the first Raman optical filter is placed along the emergent ray direction of first collimation lens, along institute
First speculum is placed in the emergent ray direction for stating the first Raman optical filter, in the reflection light direction of first speculum
First condenser lens is placed, first beam-splitter is placed in the emergent ray direction of first condenser lens, along institute
Two second speculums are placed in two emergent ray directions for stating the first beam-splitter respectively, anti-along two described second later
Two volume holographic rib grid are placed in the reflection light direction for penetrating mirror respectively, in the emergent ray side of two volume holographic rib grid
To placement second beam-splitter.
Optionally, the second Raman optical filter is placed along the emergent ray direction of second beam-splitter, later along institute
Second collimation lens is placed in the emergent ray direction for stating the second Raman optical filter, in the emergent light of second collimation lens
The third speculum is placed in line direction, and placing described second in the reflection light direction of the third speculum later focuses thoroughly
Mirror places the emergent pupil, later along the outgoing of the emergent pupil along the emergent ray direction of second condenser lens
Radiation direction places the field lens, finally places the detector in the emergent ray direction of the field lens.
Optionally, the focal plane of first collimating mirror is for placing article, and article reflects or the light beam of transmission is through institute
It states the first collimation lens and is incident on the preposition imaging system.
Optionally, each described volume holographic rib grid includes two prisms and a volume holographic grating, the volume holographic
Grating is located between two prisms.
Optionally, first collimation lens is anaberration non-spherical lens.
Optionally, first condenser lens and second condenser lens are all anaberration lens, and described first is poly-
Focus lens for realizing any point on article to be detected focus on the volume holographic rib grid it is unique a little on, described second
The light that condenser lens is shot out for the postposition imaging system focus on the detector it is unique a bit.
Optionally, further include laser and beam expander, the beam expander is located at the laser rear, for will be described
The spot diameter of laser illumination expands so that the spot diameter of the laser illumination is more than twice of article diameter.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
1, each described volume holographic rib grid includes two prisms and a volume holographic grating, the volume holographic grating position
Between two prisms, the volume holographic rib grid manufacture craft is simple, and the volume holographic grating therein have compared with
High diffraction efficiency, can improve the luminous flux of system, and two prisms can both increase the visual field of system, and can also compensate
The aberration of system.
2, two-dimensional space information and one-dimensional spectral information are obtained using array detector and by pushing away to sweep.It moves along the x-axis direction
The objective table makes spectrometer scanned item in the form of pushing away and sweep, for the every bit in visual field, as the objective table is walked along Y-axis
Into movement, the field angle relative to interferometer will change, when volume holographic grating type space heterodyne Raman spectrometer is inswept
When the area of one full filed, the interference pattern of every bit will be obtained, implementing Fourier transformation to interference pattern just obtains on article often
The Raman spectrum of one object point is distributed.
3, the spot diameter of the laser illumination is greater than 2 times of article diameter, ensures the objective table mobile
In the process, always in the hot spot of laser irradiation, the light beam that every bit is reflected or transmitted upon laser irradiation on article passes through article
The spectrometer is crossed eventually to be focused in detector array corresponding points.
Description of the drawings
Fig. 1 is the schematic diagram of the volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure of the present invention.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Fig. 1 is please referred to, for the volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure of the present invention, both may be used
To measure the reflection Raman spectrum of article, the transmission Raman spectrum of article can also be measured.
Fig. 1 is please referred to, volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure includes：Preposition imaging system
System, interferometer, postposition imaging system and reception system.The preposition imaging system includes the first collimation lens 1, described first
Raman optical filter 2, the first speculum 3 and first condenser lens 4.After the interferometer is located at the preposition imaging system
Side, the interferometer includes first beam-splitter 5,6, two the second speculums 7,8 of the second beam-splitter and two volume holographic ribs
Grid 9,10.The postposition imaging system is located at the rear of the interferometer, and the postposition imaging system filters including the second Raman
Piece 11, the second collimation lens 12, third speculum 13, the second condenser lens 14 and emergent pupil 15.The reception system is located at
The lower section of the postposition imaging system, the reception system include field lens 16 and detector 17.
Wherein, the first speculum 3, the second speculum 7,8 and third speculum 13 are plane mirror, and detector 17 is
Surface detector.
Wherein, the preposition imaging system：The effect of first collimation lens 1 is that the light beam that article is reflected becomes directional light
Beam, the effect of the first Raman optical filter 2 are only Raman light to be allowed to be incident in system, and the effect of first condenser lens 4 is
Raman light is focused on volume holographic grating.
Wherein, interferometer：The effect of first beam-splitter 5 and second beam-splitter 6 is that incident beam is divided into two
Beam, then re-modulation two-beam obtain space heterodyne Raman interference light.The effect of two volume holographic rib grid 9,10 is increase system
Visual field and improve system luminous flux.
Wherein, postposition imaging system：The purpose of second Raman optical filter 11 is drawn the space heterodyne projected from interferometer
Graceful interfering beam makees further Raman light filtering.The effect of second collimating mirror 12 is will to pass through the space heterodyne further filtered
Raman interfering beam becomes collimated light beam.The effect of second condenser lens 14 is to focus parallel space heterodyne Raman interfering beam
Onto the array of detector 17.
Wherein, system is received：The spectral information that imaging system obtains is received using detector array.In addition, field lens 16
Main purpose is correction systematical distortion.
Fig. 1 is please referred to, the first Raman optical filter 2, edge are placed along the emergent ray direction of first collimation lens 1
First speculum 3 is placed in the emergent ray direction for the first Raman optical filter 2, in the anti-of first speculum 3
It penetrates light direction and places first condenser lens 4, institute is placed in the emergent ray direction of first condenser lens 4
The first beam-splitter 5 is stated, two second speculums 7 are placed respectively along two emergent ray directions of first beam-splitter 5
With 8, two 9 Hes of volume holographic rib grid are placed respectively along the reflection light direction of two second speculums 7 and 8 later
10, place second beam-splitter 6 in the emergent ray direction of two volume holographic rib grid 9 and 10.Along second light splitting
The second Raman optical filter 11 is placed in the emergent ray direction of plate 6, later along the emergent light of the second Raman optical filter 11
Second collimation lens 12 is placed in line direction, and it is anti-to place the third in the emergent ray direction of second collimation lens 12
Mirror 13 is penetrated, places second condenser lens 14 in the reflection light direction of the third speculum 13 later, it is poly- along described second
The emergent pupil 15 is placed in the emergent ray direction of focus lens 14, is put later along the emergent ray direction of the emergent pupil 15
The field lens 16 is set, finally places the detector 17 in the emergent ray direction of the field lens 16.
Fig. 1 is please referred to, the focal plane of first collimation lens 1 is for placing article, and article reflects or the light of transmission
First collimation lens 1 described in Shu Jing is incident on the preposition imaging system, further includes objective table 19, and the objective table 19 is located at institute
The focal plane for stating the first collimation lens 1, further includes laser 21 and beam expander 20, and the beam expander 20 is located at the laser
21 rear of device, the spot diameter for irradiating the laser 21 expand so that the spot diameter that the laser 21 irradiates
More than 2 times of article diameter.The laser 21 moves the objective table along the x-axis direction through 20 irradiating item with electron radiation of the beam expander
19 make the region that spectrometer scanned item in the form of pushing away and sweep is irradiated with a laser.Wherein, the spot diameter that laser 21 irradiates is big
In 2 times of article diameter, ensure the objective table 19 during along Y-axis step motion article always in the hot spot of laser irradiation
Interior, the light beam that every bit is reflected or transmitted upon laser irradiation on article is eventually focused on detector array by the spectrometer
In row corresponding points, the objective table 19 will change relative to the field angle of interferometer, when the objective table 19 inswept one
When the move distance of full filed, the interference pattern of every bit will be obtained, implementing Fourier transformation to interference pattern just obtains on sample often
The Raman spectrum of one object point is distributed.The light beam that any point is reflected or transmitted upon laser irradiation on article is accurate by described first
Straight lens 1 become collimated light beam and irradiate the first Raman optical filter 2, the drawing being emitted later from the first Raman optical filter 2
Graceful light beam is focused on by first condenser lens 4 on volume holographic grating after first speculum 3 reflection, from described first
The Raman light that condenser lens 4 is emitted irradiates first beam-splitter 5, two beam Raman lights being divided into through first beam-splitter 5 point
The volume holographic rib grid 9 and 10 are not irradiated after second speculum 7 and 8 reflection, are reflected through the volume holographic rib grid 9 and 10
Second beam-splitter 6 is irradiated with the outgoing Raman light beam after diffraction, the space heterodyne Raman synthesized through second beam-splitter 6
Interference light irradiates the second Raman filter plate 11, the space heterodyne Raman interference light being emitted from the second Raman filter plate 11
Beam irradiates second collimation lens 12, and the parallel space heterodyne Raman interference light being emitted from second collimation lens 12 is through institute
It states after third speculum 13 reflects and irradiates second condenser lens 14, the light beam being emitted from second condenser lens 14 passes through
The emergent pupil 15 irradiates the field lens 16, and the light beam being emitted from the field lens 16 is finally received by detector array 17.
The present invention can guarantee that any time is irradiated to the full surface of sample using the laser facula expanded, and use
Condenser lens 4 realize any point on sample focus on volume holographic grating 9 it is unique a bit, using interferometer and imaging len
The optical elements such as group focus on planar array detector 17 it is unique a bit, to realize any point and planar array detector 17 on sample
On more unique one-to-one relationship, using by the objective table 19 along Y direction carry out continuous step motion and
Planar array detector 17 carries out a heterodyne Raman interference pattern shooting and storage when 19 each step motion of the objective table stops,
To obtain with the heterodyne Raman interference pattern cube with sample surface location coordinate information, by by sample table
The heterodyne Raman interference pattern cube metadata that face each pair of point is answered extracts, you can obtains the drawing that sample surface is each put
Graceful spectral information, to realize sample surface each position Raman spectrum quick measurement.
The effect of second condenser lens 14 in the present invention is to sample heterodyne Raman in one of the embodiments,
Interference light plays compression in Z-direction (i.e. perpendicular to paper direction), and sample heterodyne Raman interference light is made to be accounted in Z-direction
There is less planar array detector pixel number (for example only occupying 100 pixel numbers), to realize each frame heterodyne of planar array detector
The Quick Acquisition of Raman interference light.
In practical measurement process, the pixel number of 19 times of exercise of the objective table and the X-direction of planar array detector 17
Unanimously.Planar array detector 17 in this example is the iKon-M_934BU2 products of Andor companies, the X-direction of the detector 17
Pixel number be 1024.Therefore, the times of exercise of the objective table 19 is 1024, and each step distance of the objective table 19 is
Raman Measurement area of sample in the length of Y direction divided by the pixel number of detector X-direction, i.e. 1.5cm divided by
1024, about 1.46 microns.The objective table 19 is primary per stepping, and planar array detector 17 carries out a Raman image acquisition, can
Moving stage is total to stepping 1024 times, therefore planar array detector 12 acquires 1024 width Raman images altogether.
It is an advantage of the invention that can realize in a short period of time with any dot position information in the full surface of sample
(a Raman image acquisition time is about 0.2 second to raman spectroscopy measurement, acquires 1024 width images and carries out Raman data analysis only
Need 3 to 5 minutes or so), it need to use point-by-point two-dimensional scan that could realize that sample is complete so as to avoid traditional Raman spectrometer
Low (collecting efficiency of conventional method is about several the percent of the method for the present invention to measurement efficiency caused by Surface Raman Spectra measures
One even several one thousandths) the problems such as, be effectively saved the time of measuring of the Raman spectrum of sample surface each position, significantly
It improves work efficiency.
Each described volume holographic rib grid 9 includes two prisms and an individual holographic optical in one of the embodiments,
Grid, the volume holographic grating are located between two prisms.The volume holographic rib grid manufacture craft is simple, and body therein
Holographic grating has higher diffraction efficiency, can improve the luminous flux of system；Two prisms can both increase the visual field of system,
Can also compensation system aberration.In addition, the acquisition of interference fringe is not necessarily to moving component in system, this can effectively enhance instrument
The reliability of device Raman spectrum imaging detection.
First collimation lens 1 is anaberration non-spherical lens in one of the embodiments, and aspherical anaberration is saturating
Mirror may be implemented maximum Raman light and collect, and first condenser lens 4 and second condenser lens 14 are all to disappear
Aberration lens, it is possible to reduce system aberration restores Raman spectrum the influence of precision.
Volume holographic grating type space heterodyne Raman spectrometer proposed by the present invention combines color dispersion-type Raman spectrometer and Fu
In leaf transformation Raman spectrometer the advantages of, while having that high resolution, luminous flux are big, the wide, movement-less part that measures wavelength band
The advantages that, while light path is divided into two-arm light path using beam-splitter, space heterodyne Raman interference light is obtained, and utilize space heterodyne
Interference light obtains imaging spectral information；And improve the luminous flux of system using volume holographic rib grid and increase the visual field of system, it is whole
It is a compact-sized, stable, highly reliable without moving parts, performance.The volume holographic grating type space heterodyne Raman image of the present invention
Light path of optical spectrometer structure have unique superiority, it is compact-sized, light-weight, visual field is big, luminous flux is high, high resolution, spy
Degree of testing the speed is fast, energy-consuming consumptive material is few, performance is stable, can be mass, and especially it is easily achieved modularization, has secondary development
Can, it can be used for further manufacturing other analytical instrument.
Meanwhile the present invention provides a kind of volume holographic grating type space heterodyne Raman spectroscopy instrument for Raman spectrum analysis
Light channel structure receives two-dimension spectrum using the volume holographic grating of high-diffraction efficiency and the rib grid of prism arrangement and area array CCD
Information, the structure type ensure that high-resolution and high-throughput requirement well.
The specific implementation mode of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes made by the technical concept of the present invention and deformation, should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (8)
1. a kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure, which is characterized in that including：
Preposition imaging system, the preposition imaging system include objective table, the first collimation lens, the first Raman optical filter, first
Speculum and the first condenser lens, wherein the objective table is located at the focal plane of first collimation lens；
Interferometer, the interferometer are located at the rear of the preposition imaging system, and the interferometer includes the first beam-splitter, second
Beam-splitter, two the second speculums and two volume holographic rib grid；
Postposition imaging system, the postposition imaging system are located at the rear of the interferometer, and the postposition imaging system includes the
Two Raman optical filters, the second collimation lens, third speculum, the second condenser lens and emergent pupil；
Reception system, the reception system are located at the lower section of the postposition imaging system, and the reception system includes field lens and spy
Survey device.
2. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as described in claim 1, it is characterised in that：
The first Raman optical filter is placed along the emergent ray direction of first collimation lens, along the first Raman optical filter
Emergent ray direction place first speculum, placing described first in the reflection light direction of first speculum focuses
Lens place first beam-splitter, along the two of first beam-splitter in the emergent ray direction of first condenser lens
Two second speculums are placed in a emergent ray direction respectively, later along the reflection light side of two second speculums
To two volume holographic rib grid are placed respectively, described second point is placed in the emergent ray direction of two volume holographic rib grid
Tabula rasa.
3. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as claimed in claim 2, it is characterised in that：
The second Raman optical filter is placed along the emergent ray direction of second beam-splitter, later along the second Raman optical filter
Emergent ray direction place second collimation lens, place described the in the emergent ray direction of second collimation lens
Three speculums are placed second condenser lens in the reflection light direction of the third speculum later, are focused along described second
The emergent pupil is placed in the emergent ray direction of lens, places the field along the emergent ray direction of the emergent pupil later
Mirror finally places the detector in the emergent ray direction of the field lens.
4. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as claimed in claim 3, it is characterised in that：
The focal plane of first collimation lens is for placing article, and article reflects or the light beam of transmission is through first collimation lens
It is incident on the preposition imaging system.
5. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as described in claim 1, it is characterised in that：
Each described volume holographic rib grid includes two prisms and a volume holographic grating, and the volume holographic grating is located at described in two
Between prism.
6. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as described in claim 1, it is characterised in that：
First collimation lens is anaberration non-spherical lens.
7. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as described in claim 1, it is characterised in that：
First condenser lens and second condenser lens are all anaberration lens, and first condenser lens is for realizing waiting for
Any point on detection article focus on the volume holographic rib grid it is unique a little on, second condenser lens is for described
The light that postposition imaging system is shot out focus on the detector it is unique a bit.
8. volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure as described in claim 1, it is characterised in that：
Further include laser and beam expander, the beam expander is located at the laser rear, is used for the light of the laser illumination
Spot diameter expands so that the spot diameter of the laser illumination is more than twice of article diameter.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113189079A (en) * | 2021-04-26 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Spatial heterodyne Raman spectrometer system |
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| US20100315631A1 (en) * | 2009-06-11 | 2010-12-16 | Bwt Property, Inc. | Raman Spectroscopic Apparatus Utilizing Self-Aligned Non-Dispersive External Cavity Laser |
| CN102998295A (en) * | 2011-09-09 | 2013-03-27 | 福州高意光学有限公司 | Miniature Raman spectrometer |
| CN103219638A (en) * | 2013-03-18 | 2013-07-24 | 深圳大学 | Super-continuum spectrum light source and coherent anti Stokes Raman scattering imaging system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113189079A (en) * | 2021-04-26 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Spatial heterodyne Raman spectrometer system |
| CN113189079B (en) * | 2021-04-26 | 2023-09-01 | 中国科学院西安光学精密机械研究所 | Space heterodyne Raman spectrometer system |
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