CN217083959U - High spectrum system and spectrum appearance based on MEMS - Google Patents
High spectrum system and spectrum appearance based on MEMS Download PDFInfo
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- CN217083959U CN217083959U CN202220147413.2U CN202220147413U CN217083959U CN 217083959 U CN217083959 U CN 217083959U CN 202220147413 U CN202220147413 U CN 202220147413U CN 217083959 U CN217083959 U CN 217083959U
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Abstract
The utility model discloses a hyperspectral system and a spectrometer based on MEMS, which comprises a light source (121) and a light beam processing unit, wherein, a MEMS scanning micro-mirror (151), and the MEMS scanning micro-mirror (151) is an array scanning micro-mirror; the light beam (142) processed by the light beam processing unit of the light source (121) enters the MEMS scanning micro-mirror (151), and the light beam (142) is reflected by the MEMS scanning micro-mirror (151) in sequence according to requirements; the interference system (160) comprises a MEMS translation micro-mirror (163), the light beam (142) reflected by the MEMS scanning micro-mirror (151) enters the MEMS translation micro-mirror (163), and the MEMS translation micro-mirror (163) modulates and reflects the light beam (142); the utility model discloses a its small, the resolution ratio is high, stability is good of the spectrometer, and is with low costs moreover.
Description
Technical Field
The utility model relates to a high spectral imaging technique has especially related to high spectral system and spectrum appearance based on MEMS.
Background
The hyperspectral imaging technology is formed by cross fusion of spectroscopy and image technology, and is a technology for performing qualitative and quantitative analysis on a substance by using spectral information while performing research on the size and distribution of a target shape through the image information. The method is widely applied to the fields of agriculture, food safety, medical diagnosis, environmental engineering, geological exploration, fishery, safety and the like.
Imaging data obtained by the hyperspectral imaging device is a spectral image cube, and the spectral image cube comprises two-dimensional image information and one-dimensional spectral information.
At present, a two-dimensional image sensor detector applied to a hyperspectral imaging device is a two-dimensional detector, only a geometric image in a light sensing range and two-dimensional distribution information under a light intensity information wavelength under a single wavelength can be acquired in a transient state, and spectrum information in a wider wavelength range cannot be acquired.
In the prior art, a filter mode can be adopted to obtain spectral information within a certain range, however, the mode is only suitable for imaging of a static scene or a static target due to the narrow wavelength band, and is not suitable for acquiring and analyzing spectral data of a dynamic target under complex conditions such as illumination change and atmospheric disturbance, the multi-stage interference occurs in a spectrometer with working principles such as acousto-optic modulation and liquid crystal, and although the filter is not directly added, the wavelength band is relatively narrow due to the multi-stage interference. In addition, in the application of the hyperspectral imaging system, for example, one-time multipoint imaging cannot be realized, spectral information in a larger wavelength range (thousands or even thousands of nanometer wave bands) cannot be acquired at one time (the efficiency is low), the resolution is low, the signal-to-noise ratio is low (the energy sensitivity is low), the size is large, and the cost is high; in the prior art, spectral information in a wider wavelength range is obtained by a spectral imaging mode of arranging a slit (for example, adopting a prism and a grating light splitting system), but when the method is adopted, the light flux is sacrificed when a wide wavelength range is pursued, and the detection sensitivity is further reduced.
The existing spectral imaging device needs to perform spectral analysis of the position resolution of N x N on a two-dimensional plane, and the same number of planar array type photodetectors are needed to acquire spectral information, so that the cost of the spectral imaging device is greatly increased.
For example, prior art patent application No.: CN201710651230.8 utilizes the scheme of dispersion light splitting + digital array scanning micro-mirror (DMD) + linear light detector to realize the hyperspectral imaging system. The spectral range of the dispersion light splitting is narrow, and the signal-to-noise ratio is low; the cost of the solution of DMD + linear photodetector array employed is high.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to in the application of the high spectral imaging system of prior art such as unable a multiple spot formation of image, unable once gather spectral information (inefficiency) of great wavelength range (thousands or even thousands of nanometer wave bands), resolution ratio low, SNR low (energy sensitivity is low), bulky, with high costs problem, provide high spectral system and spectrum appearance based on MEMS.
In order to solve the technical problem, the utility model discloses a following technical scheme can solve:
the hyperspectral system based on the MEMS comprises a light source and a light beam processing unit, wherein the light source comprises an MEMS scanning micro-mirror which is an array type scanning micro-mirror; the light beam processed by the light beam processing unit enters the MEMS scanning micro-mirror, and the light beam is reflected by the MEMS scanning micro-mirror in sequence according to requirements.
In order to solve the above problems, the present application further provides a hyperspectral system based on MEMS, which includes a light source, a light beam processing unit, and an interference system, where the interference system includes a MEMS translational micromirror, and a light beam processed by the light source through the light beam processing unit enters the MEMS translational micromirror, and the MEMS translational micromirror modulates and reflects the light beam.
Preferably, the optical fiber laser further comprises an interference system, wherein the interference system comprises a MEMS translational micro-mirror, the light beam reflected by the MEMS scanning micro-mirror enters the MEMS translational micro-mirror, and the MEMS translational micro-mirror modulates and reflects the light beam.
Preferably, the beam processing unit includes a first lens group composed of at least 1 group of lenses and a first light splitting system; the light beam of the light source after passing through the sample is transmitted to the first lens group, the first lens group processes the light beam, the processed light beam is divided into 2 groups of light beams by the first light splitting system, one group of light beams enter the imaging system, and the other group of light beams form light beams and enter the MEMS scanning micro-mirror.
Preferably, the light beam processing unit comprises a first lens group and a first light splitting system, the first lens group at least comprises 1 group of lenses, light beams of the light source passing through the sample are transmitted to the first lens group, the first lens group processes the light beams, the processed light beams are divided into 2 groups of light beams through the first light splitting system, one group of light beams enter the imaging system, and the other group of light beams enter the MEMS translational micro-mirror.
Preferably, the beam processing unit further includes a second light splitting system, and the first lens group includes a first collimating lens and a second collimating lens; the light beam firstly passes through a first collimating lens and then passes through a second light splitting system; the light beam is split and enters a second collimating lens.
Preferably, the beam processing unit further includes a second light splitting system, and the first lens group includes a first collimating lens and a second collimating lens; the light beam firstly passes through a first collimating lens and then passes through a second light splitting system; the light beam is split and enters a second collimating lens.
Preferably, the micro-mirror array further comprises a second lens group, and the light beam is reflected to the second lens group by the MEMS scanning micro-mirror.
Preferably, the micro-electromechanical system further comprises a second lens group, and the light beam is reflected to the second lens group by the MEMS translational micro-mirror.
Preferably, the interference system further comprises a third light splitting system and a plane fixed mirror; the light beam is divided into two beams by the third beam splitting system, one beam enters the plane fixed mirror and returns to the third beam splitting system through the plane fixed mirror, and the other beam enters the MEMS translation micro-mirror and returns to the third beam splitting system through the MEMS translation micro-mirror.
Preferably, the light source includes, but is not limited to, a broadband light source.
To address the above issues, the present application also provides a MEMS-based spectrometer that includes a MEMS-based hyperspectral system.
The size of the high-resolution spectrometer can be further reduced and the power consumption of the high-resolution spectrometer can be reduced through the MEMS; the array scanning micro-mirrors are arranged, so that one-time multi-point imaging can be realized, and the cost is reduced; the setting of the Michelson interferometer improves the spectral wavelength range, the signal-to-noise ratio and the resolution.
The utility model discloses owing to adopted above technical scheme, have apparent technological effect:
the utility model discloses a time modulation type FT spectral system based on only need single photoelectric detector realizes that the imaging spectral analysis scope is wide, and resolution ratio is high, signal-to-noise ratio is high;
secondly, the utility model adopts MEMS translational micro-mirror to realize a micro FT spectrum acquisition system; the MEMS translation micro-mirror is a vertical large-displacement MEMS micro-mirror, and adopts an electrothermal driving working principle, so that the designed spectrum system has the characteristics of small volume, high resolution and good stability;
three, the utility model discloses a two-dimensional MEMS scans the micro mirror, selectively reflects the light signal of every pixel on the 2D plane in space in proper order to single photoelectric detector on, increases the rotatory micro mirror of MEMS diaxon that realizes the area array scanning in FT spectral system for with the light reflection on every pixel to single photodetector. Therefore, the optical detector array corresponding to the N x N pixel points one by one is not needed, and the cost of the system is greatly reduced.
Fourthly, the hyperspectral meter designed by the utility model can further reduce the volume of the hyperspectral meter and the power consumption of the hyperspectral meter through MEMS; the array scanning micro-mirrors are arranged, so that one-time multi-point imaging can be realized, and the cost is reduced; the setting of the Michelson interferometer improves the spectral wavelength range, the signal-to-noise ratio and the resolution.
Drawings
Fig. 1 is an overall structure schematic diagram of the hyperspectral system of the present invention.
Fig. 2 is an overall structure schematic diagram of the hyperspectral system of the present invention.
Fig. 3 is a schematic view of the overall structure of embodiment 12 of the present invention.
Fig. 4 is a schematic view of the overall structure of embodiment 12 of the present invention.
200-sample, 121-first light source, 110-first lens group, 111-second light splitting system, 112-first collimating lens, 113-second collimating lens, 141-imaging system, 142-light beam, 130-first light splitting system, 200-sample, 150-micromirror unit, 151-MEMS scanning micromirror, 152-first lens, 153-second lens, 160-interference system, 170-second lens group, 180-light receiving unit, 161-third light splitting system, 162-plane fixed mirror, 163-MEMS translational micromirror, 172-third collimating lens, 171-fourth collimating lens, 122-second light source, 190-circuit system;
MEMS: micro Electro Mechanical System, Micro Electro Mechanical System.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1
The spectral imaging device is used for acquiring a large number of narrow-band continuous spectral images of the ground object target and acquiring almost continuous spectral data of each pixel. The spectral imaging device is divided into a multispectral imaging device, a hyperspectral imaging device and a hyperspectral imaging device according to different spectral resolutions of the sensors. The spectral resolution of multispectral imaging devices is on the order of 0.1 at delta lambda/lambda, and typically has only a few bands in the visible and near infrared regions. The spectral resolution of the hyperspectral imaging device is in the order of 0.01 of delta _ lambda/lambda, and tens to hundreds of wave bands exist in visible light and near infrared regions, and the spectral resolution can reach the nm level. The spectral resolution of a hyperspectral imaging device is on the order of 0.001 at delta _ lambda/lambda, and can reach thousands of bands in the visible and near infrared regions.
Among them, the fourier transform spectrometer is gradually becoming a research hotspot in the field of spectrum technology, especially near infrared and infrared spectrum, due to its advantages of high spectral resolution, high luminous flux, high signal-to-noise ratio, and the like. Fourier Transform (FT) spectroscopy splits the beam 142 into two or more components, which are recombined after a certain phase difference, to obtain higher resolution spectral information. The Fourier transform spectrometer is based on a Michael interferometer and consists of a fixed mirror and a movable mirror. The operating principle of the michelson interferometer is that a beam of incident light is divided into two beams by a beam splitter prism and then reflected by corresponding plane mirrors, and the two beams of light have the same frequency, the same vibration direction and constant phase difference (namely, the interference condition is met), so that interference can occur. Further, the incident light beam (carrying the information of the sample 200) is changed into interference light by the michelson interferometer which drives the mirror to scan, the interference light with the information of the sample 200 is received by the light receiver, and then the spectrum image cube of the sample 200 can be obtained by the computer software through fourier transform. The fixed mirror and the movable mirror in the fourier transform spectrometer are usually implemented by using mems (micro Electro Mechanical system) micro mirrors. The MEMS micro-mirror is a micro-mirror that can rotate or move vertically implemented based on MEMS actuators.
The hyperspectral system based on the MEMS comprises a light source, a light beam processing unit and an MEMS scanning micro-mirror 151, wherein the MEMS scanning micro-mirror 151 is an array type scanning micro-mirror; the light beam 142 processed by the light beam processing unit enters the MEMS scanning micro-mirror 151, and the light beam 142 is sequentially reflected by the MEMS scanning micro-mirror 151 as required.
Example 2
In order to solve the above problem, the present application further provides a hyperspectral system based on MEMS, which includes a light source and a light beam processing unit, and further includes an interference system 160, where the interference system 160 includes a MEMS translation micromirror 163, and a light beam 142 processed by the light source through the light beam processing unit enters the MEMS translation micromirror 163, and the MEMS translation micromirror 163 modulates and reflects the light beam 142.
Example 3
On the basis of embodiment 2, the interference system 160 of this embodiment further includes a third optical splitting system 161 and a plane fixed mirror 162; the light beam 142 is split into two beams by the third beam splitting system 161, one beam enters the flat surface mirror 162 and returns to the third beam splitting system 161 through the flat surface mirror 162, and the other beam enters the MEMS translation micromirror 163 and returns to the third beam splitting system 161 through the MEMS translation micromirror 163.
The present embodiment further includes a micromirror unit 150 including a first lens 152 and a second lens 153; the light beam 142, which is used as an input to the micromirror unit 150, is transmitted to the MEMS scanning micromirror 151 by the first lens 152, and then reflected to an output via the second lens 153. The light beams 142 transmitted by the first lens 152 are read one by rotating the mirror surface of the MEMS scanning micromirror 151, and the read light beam 142 at each time is output via the second lens 153. The MEMS scanning micro-mirror 151 is a biaxial MEMS deflection mirror, and the mirror surface angle of the MEMS scanning micro-mirror 151 can be deflected by the micro-mirror driving, so as to position the coordinate position of the reading beam 142 based on the biaxial deflection amount of the MEMS scanning micro-mirror 151.
The operation of reading the light beams at different positions is realized by changing the deflection amount of at least one shaft. For example, the deflection of one axis of the MEMS scanning micro-mirror 151 is used to position the row position of the light beam 142 to be read, and the deflection of the other axis of the MEMS scanning micro-mirror 151 is used to position the column position of the light beam 142 to be read. The entire light beam 142 can be read by the MEMS scanning micro-mirror 151 deflection. The MEMS scanning micro-mirror 151 deflects once to read and output the light beam, and the deflection once of the MEMS scanning micro-mirror 151 is calculated, for example, according to a change in the amount of deflection of one of the axes of the MEMS scanning micro-mirror 151.
Example 4
On the basis of embodiment 1, the present embodiment further includes an interference system 160, where the interference system 160 includes a MEMS translation micro-mirror 163, the light beam 142 reflected by the MEMS scanning micro-mirror 151 enters the MEMS translation micro-mirror 163, and the MEMS translation micro-mirror 163 modulates and reflects the light beam 142.
Example 5
On the basis of embodiment 1, the light beam processing unit of this embodiment includes a first lens 152 group 110 and a first light splitting system 130, where the first lens 152 group 110 is composed of at least 1 lens group; the light beam 142 of the light source passing through the sample 200 is transmitted to the first lens 152 group 110, the first lens 152 group 110 processes the light beam 142, the processed light beam 142 is divided into 2 groups of light beams 142 by the first light splitting system 130, one group of light beams 142 enters the imaging system, and the other group of light beams 142 forms the light beam 142 and enters the MEMS scanning micro-mirror 151.
Example 6
On the basis of embodiment 3, the light beam processing unit of this embodiment includes a first lens 152 group 110 and a first light splitting system 130, the first lens 152 group 110 is composed of at least 1 group of lenses, the light beam 142 of the light source passing through the sample 200 is transmitted to the first lens 152 group 110, the first lens 152 group 110 processes the light beam 142, the processed light beam 142 is split into 2 groups of light beams 142 by the first light splitting system 130, one group of light beams 142 enters the imaging system, and the other group of light beams 142 enters the MEMS translational micromirror 163.
Example 7
On the basis of embodiment 3, the light beam processing unit of this embodiment includes a first lens 152 group 110 and a first light splitting system 130, where the first lens 152 group 110 is composed of at least 1 lens group; the light beam 142 of the light source passing through the sample 200 is transmitted to the first lens 152 group 110, the first lens 152 group 110 processes the light beam 142, the processed light beam 142 is divided into 2 groups of light beams 142 by the first light splitting system 130, one group of light beams 142 enters the imaging system, and the other group of light beams 142 forms the light beam 142 and enters the MEMS scanning micro-mirror 151.
Example 8
On the basis of the above embodiment, the beam processing unit further includes a second light splitting system 111, and the first lens 152 group 110 includes a first collimating lens 112 and a second collimating lens 113; the light beam 142 passes through the first collimating lens 112 and then the second beam splitting system 111; the light beam 142 is split and enters the second collimating lens 113.
Example 9
In addition to the above embodiments, the present embodiment further includes a second lens assembly 170, and the light beam 142 is reflected to the second lens assembly 170 by the MEMS scanning micro-mirror 151.
The second lens group 170 includes a third collimating lens 172 and a fourth collimating lens 171, and the light beam 142 is reflected by the MEMS scanning micro-mirror 151 to the third collimating lens 172 and the fourth collimating lens 171.
Example 10
In addition to the above embodiments, the present embodiment further includes a second lens assembly 170, and the light beam 142 is reflected to the second lens assembly 170 by the MEMS micro-mirror 163. The second lens group 170 includes a third collimating lens 172 and a fourth collimating lens 171, and the light beam 142 is reflected by the MEMS scanning micro-mirror 151 to the third collimating lens 172 and the fourth collimating lens 171.
Example 11
On the basis of the above embodiments, the present embodiment provides a MEMS-based spectrometer comprising a MEMS-based hyperspectral system.
The interferometric system 160 is a michelson interferometric system 160 that includes a third optical splitting system 161, a MEMS translational micromirror 163, and a flat fixed mirror 162. The third light splitting system 161 receives the light beam read by the micromirror unit 150 and splits the light beam into two paths, one path of the light beam is transmitted to the MEMS translation micromirror 163, the other path of the light beam is transmitted to the plane fixed mirror 162, and then the light paths received by the plane fixed mirror 162 and the MEMS translation micromirror 163 are reflected by the mirror surfaces of the two to the third light splitting system 161 to form interference light. Wherein the MEMS translational micro-mirror 163 is driven by itself to move. The specific michelson interference principle is well known to those skilled in the art and will not be described herein.
The MEMS spectrometer further includes a light receiving unit 180, and the light receiving unit 180 receives the interference light corresponding to the light beam 142 through the second lens group 170, and obtains a spectral image cube of the sample 200 according to the interference light. The light receiving unit 180 includes a photodetector and a signal processor.
The light receiving unit 180 includes a photodetector and a signal processor. The photodetector receives the interference light generated by the interference system 160 through the second lens group 170 and converts the interference light into an electrical signal.
The signal processor is connected to the photodetector to receive the electrical signal, and further obtains a spectral image cube of the sample 200. The spectral image cube contains the ground two-dimensional spatial image information of the sample 200 and the one-dimensional spectral information corresponding to the two-dimensional spatial image information, and the acquired data form a three-dimensional data set.
The spectral image cube enables image analysis and identification of the ground object according to image characteristics in a spatial section, and spectral characteristic analysis of the ground object according to spectral characteristics in a spectral dimension, thereby identifying the type, composition and content of the ground object (sample 200).
The spectral image cube of the sample 200 can be obtained without moving the test position of the sample 200, and the imaging difficulty is reduced. And spectral imaging can be completed only by arranging one optical detector, so that the imaging cost is reduced. The use of the michelson interference system 160 allows for a spectral imaging device with a wider spectral range, higher resolution, and smaller device size.
The beams 142 are read one by one in rows or columns or other rules in the spectral imaging apparatus. The MEMS scanning micro-mirror 151 and the MEMS translation micro-mirror 163 shift or move by adopting an electrothermal driving working principle, so that the linear movement distance in the MEMS actuator is larger. Therefore, the spectral imaging device has small volume and good stability
Example 12
On the basis of the above embodiment, the light source includes the first light source 121 and the second light source 122, and the second light source 122 of the present embodiment is a single-wavelength light source with a specific wavelength, such as a laser. After the sunlight irradiates the surface of the sample 200, the reflected beam 142 with the information of the object to be measured is guided to the subsequent system. The laser beam from the second light source 122 will also be guided to the subsequent system to calibrate the position information for the MEMS translational micro-mirror 163.
In the present embodiment, the combination of the second beam splitter 111 and the second light source 122 is not necessarily located between the sample 200 and the first beam splitter 130, and may be located between the second lens 153 and the michelson interference system 160.
Example 13
On the basis of the above embodiment, this embodiment further includes a circuit system 190, the circuit system 190 is used for performing the related processing of imaging, and the circuit system 190 is similar to the imaging system of 141 and is out of the discussion range of the patent.
Claims (9)
1. The hyperspectral system based on the MEMS comprises a light source (121) and a light beam processing unit, and is characterized by further comprising an MEMS scanning micro-mirror (151), wherein the MEMS scanning micro-mirror (151) is an array type scanning micro-mirror; the light beam (142) processed by the light beam processing unit of the light source (121) enters the MEMS scanning micro-mirror (151), and the light beam (142) is reflected by the MEMS scanning micro-mirror (151) in sequence according to requirements.
2. The MEMS-based hyperspectral system according to claim 1, further comprising an interference system (160), wherein the interference system (160) comprises a MEMS translational micro-mirror (163), and wherein the beam (142) reflected by the MEMS scanning micro-mirror (151) enters the MEMS translational micro-mirror (163), and wherein the beam (142) is modulated and reflected by the MEMS translational micro-mirror (163).
3. The MEMS-based hyperspectral system according to claim 1, wherein the beam processing unit comprises a first lens group (110) and a first beam splitting system (130), the first lens group (110) consisting of at least 1 lens group; the light beam (142) of the light source (121) after passing through the sample is transmitted to the first lens group (110), the first lens group (110) processes the light beam (142), the processed light beam (142) is divided into 2 groups of light beams (142) through the first light splitting system (130), one group of light beams (142) enter the imaging system, and the other group of light beams (142) form the light beam (142) and enter the MEMS scanning micro-mirror (151).
4. The MEMS based hyperspectral system according to claim 1, wherein the beam processing unit further comprises a second beam splitting system (111), the first lens group (110) comprising a first collimating lens (112) and a second collimating lens (113); the light beam (142) firstly passes through a first collimating lens (112) and then passes through a second light splitting system (111); the light beam (142) is split and enters a second collimating lens (113).
5. The hyperspectral system based on the MEMS comprises a light source (121) and a light beam processing unit and is characterized by further comprising an interference system (160), wherein the interference system (160) comprises an MEMS translation micro-mirror (163), a light beam (142) processed by the light beam processing unit of the light source (121) enters the MEMS translation micro-mirror (163), and the MEMS translation micro-mirror (163) modulates and reflects the light beam (142).
6. The MEMS-based hyperspectral system of claim 5, wherein the beam processing unit comprises a first lens group (110) and a first light splitting system (130), the first lens group (110) consists of at least 1 group of lenses, the light source (121) passes through the sample-processed light beam (142) to the first lens group (110), the first lens group (110) processes the light beam (142), the processed light beam (142) is split into 2 groups of light beams (142) by the first light splitting system (130), one group of light beams (142) enters the imaging system, and the other group of light beams (142) enters the MEMS translational micromirror (163).
7. The MEMS based hyperspectral system according to claim 5, wherein the beam processing unit further comprises a second beam splitting system (111), the first lens group (110) comprising a first collimating lens (112) and a second collimating lens (113); the light beam (142) firstly passes through a first collimating lens (112) and then passes through a second light splitting system (111); the light beam (142) is split and enters a second collimating lens (113).
8. The MEMS based hyperspectral system according to claim 5, wherein the interferometric system (160) further comprises a third optical splitting system (161) and a planar fixed mirror (162); the light beam (142) is split into two beams by the third beam splitting system (161), one beam enters the plane fixed mirror (162) and returns to the third beam splitting system (161) through the plane fixed mirror (162), and the other beam enters the MEMS translational micro-mirror (163) and returns to the third beam splitting system (161) through the MEMS translational micro-mirror (163).
9. A MEMS-based spectrometer comprising the hyperspectral system of MEMS as recited in any of claims 1-8.
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